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WO2008015700A3 - A method for nanopositioning object and device thereof - Google Patents

A method for nanopositioning object and device thereof Download PDF

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Publication number
WO2008015700A3
WO2008015700A3 PCT/IN2007/000230 IN2007000230W WO2008015700A3 WO 2008015700 A3 WO2008015700 A3 WO 2008015700A3 IN 2007000230 W IN2007000230 W IN 2007000230W WO 2008015700 A3 WO2008015700 A3 WO 2008015700A3
Authority
WO
WIPO (PCT)
Prior art keywords
actuator
actuators
stiffness
shearing
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IN2007/000230
Other languages
French (fr)
Other versions
WO2008015700A2 (en
Inventor
Hilaal Alam
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of WO2008015700A2 publication Critical patent/WO2008015700A2/en
Anticipated expiration legal-status Critical
Publication of WO2008015700A3 publication Critical patent/WO2008015700A3/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
    • B81C99/002—Apparatus for assembling MEMS, e.g. micromanipulators

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Abstract

A couple of actuators are attached with each other. One of the actuators has shear displacement where as the next one has linear displacement. The shearing actuator (3) is placed in such a way that the moving stage (2) is in contact with the actuator. The linear actuator (4) is placed below the shearing actuator (3). This set up is mounted over the stationary region of the monolithic stage. The stiffness of the holder (1 ) is less than the stiffness of the solid state actuators (3, 4). This combination works well when the continuous pulse is sent to the actuator to its frequency.
PCT/IN2007/000230 2006-07-31 2007-06-08 A method for nanopositioning object and device thereof Ceased WO2008015700A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IN1356CH2006 2006-07-31
IN01356/CHE/2006 2006-07-31

Publications (2)

Publication Number Publication Date
WO2008015700A2 WO2008015700A2 (en) 2008-02-07
WO2008015700A3 true WO2008015700A3 (en) 2009-09-24

Family

ID=38997579

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IN2007/000230 Ceased WO2008015700A2 (en) 2006-07-31 2007-06-08 A method for nanopositioning object and device thereof

Country Status (1)

Country Link
WO (1) WO2008015700A2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0457317A1 (en) * 1990-05-18 1991-11-21 Hitachi, Ltd. Electron microscope and method for observing microscopic image
US5237238A (en) * 1990-07-21 1993-08-17 Omicron Vakuumphysik Gmbh Adjusting device for microscopic movements
WO2005108004A1 (en) * 2004-04-23 2005-11-17 Schott Ag Device and method for the production of microstructures
US20050269915A1 (en) * 2004-06-03 2005-12-08 Industrial Technology Research Institute Long-stroke, high-resolution nanopositioning mechanism

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0457317A1 (en) * 1990-05-18 1991-11-21 Hitachi, Ltd. Electron microscope and method for observing microscopic image
US5237238A (en) * 1990-07-21 1993-08-17 Omicron Vakuumphysik Gmbh Adjusting device for microscopic movements
WO2005108004A1 (en) * 2004-04-23 2005-11-17 Schott Ag Device and method for the production of microstructures
US20050269915A1 (en) * 2004-06-03 2005-12-08 Industrial Technology Research Institute Long-stroke, high-resolution nanopositioning mechanism

Also Published As

Publication number Publication date
WO2008015700A2 (en) 2008-02-07

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