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WO2008092129A3 - Procédé et appareil de détection de propriétés de surface et de subsurface de matières - Google Patents

Procédé et appareil de détection de propriétés de surface et de subsurface de matières Download PDF

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Publication number
WO2008092129A3
WO2008092129A3 PCT/US2008/052126 US2008052126W WO2008092129A3 WO 2008092129 A3 WO2008092129 A3 WO 2008092129A3 US 2008052126 W US2008052126 W US 2008052126W WO 2008092129 A3 WO2008092129 A3 WO 2008092129A3
Authority
WO
WIPO (PCT)
Prior art keywords
properties
region
materials
microwave
microwave radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2008/052126
Other languages
English (en)
Other versions
WO2008092129A2 (fr
Inventor
Richard B Miles
Arthur Dogariu
Alexander Goltsov
Mikhail N Shneider
Zhili Zhang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Princeton University
Original Assignee
Princeton University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Princeton University filed Critical Princeton University
Publication of WO2008092129A2 publication Critical patent/WO2008092129A2/fr
Publication of WO2008092129A3 publication Critical patent/WO2008092129A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0062—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using microwaves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/636—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited using an arrangement of pump beam and probe beam; using the measurement of optical non-linear properties

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Electromagnetism (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne un procédé et un appareil permettant de surveiller à distance les propriétés de gaz et de plasmas ainsi que les propriétés de surface et de subsurface de matières. Un faisceau laser est focalisé sur une zone souhaitée dans un gaz, un plasma ou une matière (par ex., solide ou liquide) à analyser, d'où la génération d'une zone d'échantillon ionisée ou d'une zone localisée de porteurs libres excités. Un faisceau de rayonnement de micro-ondes est dirigé vers la zone d'échantillon ionisée ou la zone de porteurs libres, et le rayonnement de micro-ondes est diffusé. Le rayonnement de micro-ondes diffusé est reçu par un récepteur de micro-ondes et traité au moyen d'un système de détection de micro-ondes en vue d'une détermination des propriétés du gaz, du plasma ou de la matière, et notamment des propriétés de surface et de subsurface.
PCT/US2008/052126 2007-01-25 2008-01-25 Procédé et appareil de détection de propriétés de surface et de subsurface de matières Ceased WO2008092129A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US89742007P 2007-01-25 2007-01-25
US60/897,420 2007-01-25

Publications (2)

Publication Number Publication Date
WO2008092129A2 WO2008092129A2 (fr) 2008-07-31
WO2008092129A3 true WO2008092129A3 (fr) 2008-09-18

Family

ID=39645216

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/052126 Ceased WO2008092129A2 (fr) 2007-01-25 2008-01-25 Procédé et appareil de détection de propriétés de surface et de subsurface de matières

Country Status (1)

Country Link
WO (1) WO2008092129A2 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7560869B2 (en) 2005-09-29 2009-07-14 The Trustees Of Princeton University Method and apparatus for remotely monitoring properties of gases and plasmas
US7728295B2 (en) 2005-09-29 2010-06-01 The Trustees Of Princeton University Method and apparatus for detecting surface and subsurface properties of materials
US10060777B2 (en) 2015-05-05 2018-08-28 Alan B Cain Apparatus and method for non-intrusive off-body measurements in hypersonic flight experiments
DE102021203453A1 (de) 2021-04-08 2022-10-13 Trumpf Laser- Und Systemtechnik Gmbh Verfahren und Vorrichtung zur additiven Fertigung dreidimensionaler Bauteile
CN120935579A (zh) * 2024-05-08 2025-11-11 华为技术有限公司 一种感知方法及相应装置

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3547540A (en) * 1967-12-15 1970-12-15 Nasa Laser fluid velocity detector
US4612641A (en) * 1984-05-18 1986-09-16 Canadian Patents & Development Limited Infrared pulse compression
US4733073A (en) * 1983-12-23 1988-03-22 Sri International Method and apparatus for surface diagnostics
US5229304A (en) * 1992-05-04 1993-07-20 At&T Bell Laboratories Method for manufacturing a semiconductor device, including optical inspection
US5406214A (en) * 1990-12-17 1995-04-11 Semilab Felvezeto Fizikai Lab, Rt Method and apparatus for measuring minority carrier lifetime in semiconductor materials
US6008496A (en) * 1997-05-05 1999-12-28 University Of Florida High resolution resonance ionization imaging detector and method
US6211961B1 (en) * 1995-08-25 2001-04-03 Brown University Research Foundation Optical method for the characterization of the electrical properties of semiconductors and insulating films
US20050167410A1 (en) * 2001-08-21 2005-08-04 Orson Bourne Methods for creating optical structures in dielectrics using controlled energy deposition
US6995841B2 (en) * 2001-08-28 2006-02-07 Rice University Pulsed-multiline excitation for color-blind fluorescence detection
US7033781B1 (en) * 1999-09-29 2006-04-25 Diversa Corporation Whole cell engineering by mutagenizing a substantial portion of a starting genome, combining mutations, and optionally repeating
US20060142746A1 (en) * 2002-12-11 2006-06-29 Beth Friedman Device and method for inducing vascular injury and/or blockage in an animal model
US20060219710A1 (en) * 2005-04-01 2006-10-05 Mcmanus Michael E Spectroscopy-based real-time control for microwave-assisted chemistry

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3547540A (en) * 1967-12-15 1970-12-15 Nasa Laser fluid velocity detector
US4733073A (en) * 1983-12-23 1988-03-22 Sri International Method and apparatus for surface diagnostics
US4612641A (en) * 1984-05-18 1986-09-16 Canadian Patents & Development Limited Infrared pulse compression
US5406214A (en) * 1990-12-17 1995-04-11 Semilab Felvezeto Fizikai Lab, Rt Method and apparatus for measuring minority carrier lifetime in semiconductor materials
US5229304A (en) * 1992-05-04 1993-07-20 At&T Bell Laboratories Method for manufacturing a semiconductor device, including optical inspection
US6211961B1 (en) * 1995-08-25 2001-04-03 Brown University Research Foundation Optical method for the characterization of the electrical properties of semiconductors and insulating films
US6008496A (en) * 1997-05-05 1999-12-28 University Of Florida High resolution resonance ionization imaging detector and method
US7033781B1 (en) * 1999-09-29 2006-04-25 Diversa Corporation Whole cell engineering by mutagenizing a substantial portion of a starting genome, combining mutations, and optionally repeating
US20050167410A1 (en) * 2001-08-21 2005-08-04 Orson Bourne Methods for creating optical structures in dielectrics using controlled energy deposition
US6995841B2 (en) * 2001-08-28 2006-02-07 Rice University Pulsed-multiline excitation for color-blind fluorescence detection
US20060142746A1 (en) * 2002-12-11 2006-06-29 Beth Friedman Device and method for inducing vascular injury and/or blockage in an animal model
US20060219710A1 (en) * 2005-04-01 2006-10-05 Mcmanus Michael E Spectroscopy-based real-time control for microwave-assisted chemistry

Also Published As

Publication number Publication date
WO2008092129A2 (fr) 2008-07-31

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