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WO2008078573A1 - 弾性表面波共振器並びにそれを用いた弾性表面波フィルタ及びアンテナ共用器 - Google Patents

弾性表面波共振器並びにそれを用いた弾性表面波フィルタ及びアンテナ共用器 Download PDF

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Publication number
WO2008078573A1
WO2008078573A1 PCT/JP2007/074084 JP2007074084W WO2008078573A1 WO 2008078573 A1 WO2008078573 A1 WO 2008078573A1 JP 2007074084 W JP2007074084 W JP 2007074084W WO 2008078573 A1 WO2008078573 A1 WO 2008078573A1
Authority
WO
WIPO (PCT)
Prior art keywords
surface acoustic
acoustic wave
wave resonator
electrode
antenna duplexer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/074084
Other languages
English (en)
French (fr)
Inventor
Hiroyuki Nakamura
Hidekazu Nakanishi
Yukio Iwasaki
Ken Matsunami
Tetsuya Tsurunari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to EP07850596A priority Critical patent/EP1962424A4/en
Priority to JP2008518531A priority patent/JP4569699B2/ja
Priority to CN2007800046075A priority patent/CN101379699B/zh
Priority to US12/094,324 priority patent/US7965155B2/en
Publication of WO2008078573A1 publication Critical patent/WO2008078573A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14517—Means for weighting
    • H03H9/1452—Means for weighting by finger overlap length, apodisation
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02858—Means for compensation or elimination of undesirable effects of wave front distortion
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02881—Means for compensation or elimination of undesirable effects of diffraction of wave beam
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02992—Details of bus bars, contact pads or other electrical connections for finger electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

　本発明は、弾性表面波の横方向の漏れを改善し、スプリアスが小さく、特性に優れた弾性表面波共振器を提供する。本発明の弾性表面波フィルタは、圧電基板上に櫛型電極と反射器電極が形成され、その上に、ＳｉＯ２薄膜が形成される。櫛型電極は、バスバー電極領域とダミー電極領域、交差領域とを含む構成であり、さらに、櫛型電極のバスバー電極領域の上部はＳｉＯ２薄膜が取り除かれた状態となっている。
PCT/JP2007/074084 2006-12-27 2007-12-14 弾性表面波共振器並びにそれを用いた弾性表面波フィルタ及びアンテナ共用器 Ceased WO2008078573A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP07850596A EP1962424A4 (en) 2006-12-27 2007-12-14 ACOUSTIC SURFACE WAVE RESERATOR, ACOUSTIC SURFACE WAVE FILTER USING THE ACOUSTIC SURFACE WAVE RESONATOR AND ANTENNA DUPLEXER
JP2008518531A JP4569699B2 (ja) 2006-12-27 2007-12-14 弾性表面波共振器並びにそれを用いた弾性表面波フィルタ及びアンテナ共用器
CN2007800046075A CN101379699B (zh) 2006-12-27 2007-12-14 声表面波谐振器及使用该声表面波谐振器的声表面波滤波器以及天线共用器
US12/094,324 US7965155B2 (en) 2006-12-27 2007-12-14 Surface acoustic wave resonator, and surface acoustic wave filter and antenna duplexer in which the surface acoustic wave resonator is used

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006351247 2006-12-27
JP2006-351247 2006-12-27

Publications (1)

Publication Number Publication Date
WO2008078573A1 true WO2008078573A1 (ja) 2008-07-03

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/074084 Ceased WO2008078573A1 (ja) 2006-12-27 2007-12-14 弾性表面波共振器並びにそれを用いた弾性表面波フィルタ及びアンテナ共用器

Country Status (6)

Country Link
US (1) US7965155B2 (ja)
EP (1) EP1962424A4 (ja)
JP (2) JP4569699B2 (ja)
KR (1) KR100963341B1 (ja)
CN (1) CN101379699B (ja)
WO (1) WO2008078573A1 (ja)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009159039A (ja) * 2007-12-25 2009-07-16 Panasonic Corp 弾性境界波デバイス、及びそれを用いたフィルタ、アンテナ共用器
JP2010166148A (ja) * 2009-01-13 2010-07-29 Murata Mfg Co Ltd 弾性波装置
WO2010137279A1 (ja) * 2009-05-27 2010-12-02 パナソニック株式会社 弾性波共振器と、これを用いたアンテナ共用器
WO2010140456A1 (ja) * 2009-06-04 2010-12-09 株式会社村田製作所 弾性波共振子、ラダー型フィルタ及びデュプレクサ
WO2011105316A1 (ja) * 2010-02-26 2011-09-01 太陽誘電株式会社 弾性波デバイス
US20110215883A1 (en) * 2010-03-02 2011-09-08 Panasonic Corporation Acoustic wave resonator and acoustic wave filter using the same
WO2014103953A1 (ja) * 2012-12-26 2014-07-03 株式会社村田製作所 ラダー型フィルタ
US8896399B2 (en) 2011-05-19 2014-11-25 Taiyo Yuden Co., Ltd. Acoustic wave device and module including a dielectric film with an inclined upper surface
JP2015119413A (ja) * 2013-12-19 2015-06-25 太陽誘電株式会社 弾性表面波デバイス及びフィルタ

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102204092B (zh) * 2009-02-25 2014-03-12 松下电器产业株式会社 弹性波元件和弹性波滤波器
CN104467729B (zh) 2009-11-02 2018-08-03 天工滤波方案日本有限公司 弹性波元件、和其使用的双工器及电子设备
DE102010005596B4 (de) * 2010-01-25 2015-11-05 Epcos Ag Elektroakustischer Wandler mit verringerten Verlusten durch transversale Emission und verbesserter Performance durch Unterdrückung transversaler Moden
JPWO2011102128A1 (ja) 2010-02-22 2013-06-17 パナソニック株式会社 アンテナ共用器
CN101860342B (zh) * 2010-04-29 2013-12-18 贵州大学 汇流条兼作反射栅型idt结构的saw器件
DE102010053674B4 (de) 2010-12-07 2017-08-24 Snaptrack Inc. Elektroakustischer Wandler
CN103314529A (zh) * 2011-01-24 2013-09-18 埃普科斯股份有限公司 表面声波滤波器
JPWO2012127793A1 (ja) * 2011-03-22 2014-07-24 パナソニック株式会社 弾性波素子
US9065424B2 (en) 2011-03-25 2015-06-23 Skyworks Panasonic Filter Solutions Japan Co., Ltd Acoustic wave device with reduced higher order transverse modes
JP6504551B2 (ja) * 2013-06-10 2019-04-24 太陽誘電株式会社 共振器、フィルタおよび分波器
JP6629192B2 (ja) 2013-07-18 2020-01-15 スナップトラック・インコーポレーテッド 不要なモードの抑制が改善された電気音響変換器
JP6335473B2 (ja) * 2013-11-01 2018-05-30 太陽誘電株式会社 弾性表面波デバイス及びフィルタ
WO2015182521A1 (ja) * 2014-05-26 2015-12-03 株式会社村田製作所 弾性波装置及びラダー型フィルタ
DE102014111828A1 (de) * 2014-08-19 2016-02-25 Epcos Ag Mit akustischen Oberflächenwellen arbeitender Eintorresonator
CN104980117A (zh) * 2015-06-15 2015-10-14 电子科技大学 一种耐高温的柔性声表面波器件及其制造方法
DE112016003390B4 (de) * 2015-07-28 2024-06-20 Murata Manufacturing Co., Ltd. Vorrichtung für elastische Wellen
RU2602392C1 (ru) * 2015-11-09 2016-11-20 федеральное государственное автономное образовательное учреждение высшего образования "Южный федеральный университет" Фильтр на поверхностных акустических волнах
CN109891612A (zh) 2016-10-20 2019-06-14 天工方案公司 具有亚波长厚度的压电层的弹性波器件
JP6913619B2 (ja) * 2017-12-12 2021-08-04 株式会社村田製作所 マルチプレクサ、高周波フロントエンド回路及び通信装置
KR20190138096A (ko) * 2018-06-04 2019-12-12 (주)와이솔 표면 탄성파 소자
JP7163965B2 (ja) * 2018-09-20 2022-11-01 株式会社村田製作所 弾性波装置
CN109327200A (zh) * 2018-11-27 2019-02-12 中电科技德清华莹电子有限公司 一种声表面波谐振结构滤波器
CN109309485A (zh) * 2018-11-27 2019-02-05 中电科技德清华莹电子有限公司 采用畴反转区的声表面波谐振结构滤波器
CN110572138A (zh) * 2019-10-08 2019-12-13 开元通信技术（厦门）有限公司 一种滤波装置及其制作方法
US11870421B2 (en) 2019-10-23 2024-01-09 Skyworks Solutions, Inc. Surface acoustic wave resonator with suppressed transverse modes using second bus bar
US11811392B2 (en) 2019-10-23 2023-11-07 Skyworks Solutions, Inc. Surface acoustic wave resonator with suppressed transverse modes using selective dielectric removal
US12231111B2 (en) * 2020-04-30 2025-02-18 Rf360 Singapore Pte. Ltd. Surface acoustic wave electroacoustic device for reduced transversal modes
JP2023123880A (ja) * 2020-05-27 2023-09-06 株式会社村田製作所 弾性波装置
CN113098432B (zh) * 2021-04-08 2025-07-15 江苏卓胜微电子股份有限公司 一种声表面波谐振器和射频滤波器
US12438519B2 (en) 2021-12-06 2025-10-07 Skyworks Solutions, Inc. Methods of manufacturing multi-band surface acoustic wave filters
US12294351B2 (en) 2021-12-22 2025-05-06 Skyworks Solutions, Inc. Acoustic wave device with mini bus bars
US20230345182A1 (en) 2022-03-30 2023-10-26 Skyworks Solutions, Inc. Package with integrated device die at least disposed within carrier
CN115276593B (zh) * 2022-06-27 2023-03-28 上海馨欧集成微电有限公司 一种声波谐振器及滤波器
EP4681327A1 (en) * 2023-03-15 2026-01-21 Qorvo US, Inc. Acoustic wave device in trapezoidal mode
CN119030491B (zh) * 2024-07-30 2025-06-17 上海馨欧集成微电有限公司 一种声波谐振器、声波滤波器及通信设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6162221A (ja) * 1984-09-04 1986-03-31 Nec Corp 弾性表面波共振子
JPH05335879A (ja) * 1992-05-28 1993-12-17 Fujitsu Ltd 弾性表面波素子
JPH06164297A (ja) * 1992-02-12 1994-06-10 Kokusai Electric Co Ltd 弾性表面波共振子
JP2002084162A (ja) * 2000-09-06 2002-03-22 Hitachi Ltd 弾性表面波装置
JP2003209458A (ja) 2001-03-04 2003-07-25 Kazuhiko Yamanouchi 弾性表面波基板及び弾性表面波機能素子

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3760204A (en) * 1972-03-01 1973-09-18 Motorola Inc Acoustic surface wave resonator
US4978879A (en) 1988-07-27 1990-12-18 Fujitsu Limited Acoustic surface wave element
JPH02295211A (ja) * 1989-05-09 1990-12-06 Fujitsu Ltd エネルギー閉じ込め型弾性表面波素子
US4999535A (en) * 1989-09-25 1991-03-12 The United States Of America As Represented By The Secretary Of The Army Saw transducer with improved bus-bar design
JPH03158014A (ja) * 1989-11-15 1991-07-08 Fujitsu Ltd 弾性表面波素子
JPH06152299A (ja) * 1992-11-09 1994-05-31 Fujitsu Ltd 弾性表面波デバイス
JP3201088B2 (ja) * 1993-08-20 2001-08-20 株式会社明電舎 弾性表面波共振子
JP3226472B2 (ja) * 1996-05-14 2001-11-05 富士通株式会社 弾性表面波多重モードフィルタ
JPH1022765A (ja) * 1996-07-08 1998-01-23 Hitachi Ltd 弾性表面波共振子及び共振子型フィルタ
JPH10303681A (ja) * 1997-04-24 1998-11-13 Kyocera Corp 弾性表面波装置
JPH1174751A (ja) * 1997-08-28 1999-03-16 Murata Mfg Co Ltd 弾性表面波装置
JP3317273B2 (ja) * 1998-08-25 2002-08-26 株式会社村田製作所 表面波共振子、フィルタ、共用器、通信機装置
EP1239588A2 (en) * 2001-03-04 2002-09-11 Kazuhiko Yamanouchi Surface acoustic wave substrate and surface acoustic wave functional element
EP1324489A1 (en) * 2001-12-21 2003-07-02 Temex Method for realising surface acoustic wave filter arrangements and filter arrangement obtained in accordance to this method
JP2003198317A (ja) * 2001-12-21 2003-07-11 Fujitsu Media Device Kk 弾性表面波共振子及び弾性表面波フィルタ
JP4305173B2 (ja) * 2002-12-25 2009-07-29 パナソニック株式会社 電子部品およびこの電子部品を用いた電子機器
US7453334B1 (en) * 2005-03-21 2008-11-18 Triquint Semiconductor, Inc. Leaky SAW resonator and method
JP2007110342A (ja) * 2005-10-12 2007-04-26 Kyocera Corp 弾性表面波素子及びその製造方法
EP1971026A1 (en) * 2006-02-16 2008-09-17 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave device, surface acoustic wave filter employing same and antenna duplexer, and electronic apparatus employing same
JP4975377B2 (ja) * 2006-06-06 2012-07-11 太陽誘電株式会社 弾性境界波素子、共振器およびフィルタ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6162221A (ja) * 1984-09-04 1986-03-31 Nec Corp 弾性表面波共振子
JPH06164297A (ja) * 1992-02-12 1994-06-10 Kokusai Electric Co Ltd 弾性表面波共振子
JPH05335879A (ja) * 1992-05-28 1993-12-17 Fujitsu Ltd 弾性表面波素子
JP2002084162A (ja) * 2000-09-06 2002-03-22 Hitachi Ltd 弾性表面波装置
JP2003209458A (ja) 2001-03-04 2003-07-25 Kazuhiko Yamanouchi 弾性表面波基板及び弾性表面波機能素子

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009159039A (ja) * 2007-12-25 2009-07-16 Panasonic Corp 弾性境界波デバイス、及びそれを用いたフィルタ、アンテナ共用器
JP2010166148A (ja) * 2009-01-13 2010-07-29 Murata Mfg Co Ltd 弾性波装置
US8698578B2 (en) 2009-05-27 2014-04-15 Panasonic Corporation Acoustic wave resonator and duplexer using same
WO2010137279A1 (ja) * 2009-05-27 2010-12-02 パナソニック株式会社 弾性波共振器と、これを用いたアンテナ共用器
CN102449905B (zh) * 2009-06-04 2014-06-18 株式会社村田制作所 弹性波谐振器、梯形滤波器及双工器
CN102449905A (zh) * 2009-06-04 2012-05-09 株式会社村田制作所 弹性波谐振器、梯形滤波器及双工器
US8222973B2 (en) 2009-06-04 2012-07-17 Murata Manufacturing Co., Ltd. Elastic wave resonator, ladder filter and duplexer
JP5141776B2 (ja) * 2009-06-04 2013-02-13 株式会社村田製作所 弾性波共振子、ラダー型フィルタ及びデュプレクサ
WO2010140456A1 (ja) * 2009-06-04 2010-12-09 株式会社村田製作所 弾性波共振子、ラダー型フィルタ及びデュプレクサ
JP2011182096A (ja) * 2010-02-26 2011-09-15 Taiyo Yuden Co Ltd 弾性波デバイス
WO2011105316A1 (ja) * 2010-02-26 2011-09-01 太陽誘電株式会社 弾性波デバイス
US9083303B2 (en) 2010-02-26 2015-07-14 Taiyo Yuden Co., Ltd. Acoustic wave device
US20110215883A1 (en) * 2010-03-02 2011-09-08 Panasonic Corporation Acoustic wave resonator and acoustic wave filter using the same
US8487720B2 (en) * 2010-03-02 2013-07-16 Panasonic Corporation Acoustic wave resonator and acoustic wave filter using the same
US8896399B2 (en) 2011-05-19 2014-11-25 Taiyo Yuden Co., Ltd. Acoustic wave device and module including a dielectric film with an inclined upper surface
WO2014103953A1 (ja) * 2012-12-26 2014-07-03 株式会社村田製作所 ラダー型フィルタ
JP2015119413A (ja) * 2013-12-19 2015-06-25 太陽誘電株式会社 弾性表面波デバイス及びフィルタ

Also Published As

Publication number Publication date
KR20080077609A (ko) 2008-08-25
EP1962424A4 (en) 2013-04-03
CN101379699B (zh) 2012-04-11
CN101379699A (zh) 2009-03-04
KR100963341B1 (ko) 2010-06-14
US7965155B2 (en) 2011-06-21
US20100219905A1 (en) 2010-09-02
EP1962424A1 (en) 2008-08-27
JP4569699B2 (ja) 2010-10-27
JP2011019249A (ja) 2011-01-27
JP5012977B2 (ja) 2012-08-29
JPWO2008078573A1 (ja) 2010-04-22

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