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WO2008062676A1 - Proximity field light generation element, proximity field light head, and information recording/reproducing device - Google Patents

Proximity field light generation element, proximity field light head, and information recording/reproducing device Download PDF

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Publication number
WO2008062676A1
WO2008062676A1 PCT/JP2007/071745 JP2007071745W WO2008062676A1 WO 2008062676 A1 WO2008062676 A1 WO 2008062676A1 JP 2007071745 W JP2007071745 W JP 2007071745W WO 2008062676 A1 WO2008062676 A1 WO 2008062676A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
field
field light
end side
generating element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/071745
Other languages
French (fr)
Japanese (ja)
Inventor
Masakazu Hirata
Manabu Oumi
Majung Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007029071A external-priority patent/JP5278887B2/en
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to US12/312,613 priority Critical patent/US8270259B2/en
Priority to CN200780042853XA priority patent/CN101536091B/en
Publication of WO2008062676A1 publication Critical patent/WO2008062676A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109Details
    • G11B5/313Disposition of layers
    • G11B5/3133Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
    • G11B5/314Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/122Flying-type heads, e.g. analogous to Winchester type in magnetic recording
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1387Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10532Heads
    • G11B11/10534Heads for recording by magnetising, demagnetising or transfer of magnetisation, by radiation, e.g. for thermomagnetic recording
    • G11B11/10536Heads for recording by magnetising, demagnetising or transfer of magnetisation, by radiation, e.g. for thermomagnetic recording using thermic beams, e.g. lasers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/1055Disposition or mounting of transducers relative to record carriers
    • G11B11/10552Arrangements of transducers relative to each other, e.g. coupled heads, optical and magnetic head on the same base
    • G11B11/10554Arrangements of transducers relative to each other, e.g. coupled heads, optical and magnetic head on the same base the transducers being disposed on the same side of the carrier
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B2005/0002Special dispositions or recording techniques
    • G11B2005/0005Arrangements, methods or circuits
    • G11B2005/0021Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal

Definitions

  • Near-field light generating element near-field light head, and information recording / reproducing apparatus
  • the present invention relates to a near-field light generating element that condenses an introduced light beam and generates near-field light from the light beam, and magnetic recording using the near-field light generated by the near-field light generating element
  • the present invention relates to a near-field optical head for recording various kinds of information on a medium at an ultra-high density and an information recording / reproducing apparatus having the near-field optical head.
  • the recording density of information within a single recording surface has increased with an increase in the capacity of hard disks and the like in computer equipment.
  • the recording area occupied by one bit on the recording medium decreases.
  • the energy power of 1-bit information is close to the thermal energy at room temperature, and the recorded demagnetization problem may be reversed or lost due to thermal fluctuations. It will occur.
  • force is a method for recording magnetism so that the direction of magnetization is in the in-plane direction of the recording medium.
  • the recording information by thermal demagnetization described above is recorded. Disappearance is likely to occur. Therefore, in order to solve such a problem, a shift is being made to a perpendicular recording method in which a magnetization signal is recorded in a direction perpendicular to the recording medium.
  • This method is a method for recording magnetic information on the principle of bringing a single magnetic pole closer to a recording medium. According to this method, the recording magnetic field is directed substantially perpendicular to the recording film.
  • a hybrid magnetic recording method in which the magnetic domain is locally heated by near-field light to temporarily reduce the coercive force and writing is performed during that time.
  • This hybrid magnetic recording system uses near-field light generated by the interaction between a microscopic area and an optical aperture formed in a size smaller than the wavelength of the light formed in the near-field optical head.
  • This hybrid magnetic recording system uses near-field light generated by the interaction between a microscopic area and an optical aperture formed in a size smaller than the wavelength of the light formed in the near-field optical head.
  • a small optical aperture that exceeds the diffraction limit of light that is, a near-field optical head having a near-field light generating element, it is less than the wavelength of light that has been limited by conventional optical systems. It is possible to handle the optical information in the area. Therefore, it is possible to increase the density of recording bits exceeding the conventional optical information recording / reproducing apparatus.
  • the near-field light generating element may be constituted by a protrusion formed in a nanometer size, for example, not only by the above-described optical micro-aperture. This projection can also generate near-field light as in the case of the optical minute aperture.
  • Various types of recording heads using the hybrid magnetic recording system described above are provided, and one of them is a near-field in which the recording density is increased by reducing the size of the light spot.
  • Optical heads are known (see, for example, JP 2004-158067 and JP 2005 4901).
  • This near-field optical head generates near-field light mainly from a main magnetic pole, an auxiliary magnetic pole, a coil winding in which a helical conductor pattern is formed inside an insulator, and irradiated laser light.
  • a metal scatterer to be irradiated a planar laser light source for irradiating the metal scatterer with laser light, and a lens for focusing the irradiated laser light.
  • Each of these components is attached to the side surface of a slider fixed to the front end of the beam.
  • the main magnetic pole has one end facing the recording medium and the other end connected to the auxiliary magnetic pole.
  • the main magnetic pole and the auxiliary magnetic pole constitute a single magnetic pole type vertical head in which one magnetic pole (single magnetic pole) is arranged in the vertical direction.
  • the coil winding is fixed to the auxiliary magnetic pole so that part of the coil winding passes between the magnetic pole and the auxiliary magnetic pole.
  • These magnetic poles, auxiliary magnetic poles, and coil windings constitute an electromagnet as a whole!
  • the metal scatterer made of gold or the like is attached to the tip of the main pole!
  • the planar laser light source is disposed at a position separated from the metal scatterer, and the lens is disposed between the planar laser light source and the metal scatterer.
  • Each component described above is attached in the order of the auxiliary magnetic pole, the coil winding, the main magnetic pole, the metal scatterer, the lens, and the planar laser light source from the side surface side of the slider.
  • the near-field light head configured as described above
  • various information can be recorded on the recording medium by generating a near-field light and simultaneously applying a recording magnetic field! .
  • laser light is emitted from a planar laser light source.
  • This laser light is collected by a lens and irradiated onto a metal scatterer.
  • the free electrons inside are uniformly oscillated by the electric field of the laser beam, so that the plasmon is excited to generate near-field light at the tip.
  • the magnetic recording layer of the recording medium is locally heated by near-field light, and the coercive force temporarily decreases.
  • a recording magnetic field is locally applied to the magnetic recording layer of the recording medium adjacent to the main pole by supplying a driving current to the conductor pattern of the coil winding. To do.
  • the recording force on the recording medium is controlled by the force S.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2004_158067
  • Patent Document 2 JP 2005-4901
  • a laser beam is irradiated from a planar laser light source to the metal scatterer via the lens.
  • a metal scatterer was attached to the tip of the force main pole, it was inevitable to irradiate laser light obliquely from a planar laser light source. Therefore, the laser beam cannot be incident along the metal scatterer, and the laser beam is lost due to scattering or the like on the way, and the near-field light is generated efficiently. It was difficult.
  • the metal scatterer cannot intentionally change the direction of the introduced light, it has been forced to irradiate the laser beam obliquely and enter the metal scatterer as described above. .
  • the present invention has been made in view of such circumstances, and an object of the present invention is to efficiently collect near-field light by collecting light flux while changing the direction of the introduced light flux. It is possible to provide a near-field light generating element, a near-field light head having the near-field light generating element, and an information recording / reproducing apparatus having the near-field light head.
  • the present invention provides the following means in order to solve the above problems.
  • the near-field light generating element propagates the light beam introduced to one end side while condensing to the other end side in a direction different from the introduction direction, and generates the near-field light after generating the near-field light.
  • a near-field light generating element that emits light at a reflection surface that reflects the introduced light flux in a direction different from the introduction direction, and a cross-sectional area perpendicular to the longitudinal direction from the one end side toward the other end side is gradually reduced.
  • a light beam condensing unit that condenses and reflects the reflected light beam and propagates it toward the other end side, and further stops the end of the light beam condensing unit from the end to the other end side.
  • the near-field light generating part In a state of being made of a low level material and with the other end of the core exposed to the outside
  • the near-field light generating part has an end face exposed to the outside on the other end side having a size equal to or smaller than the wavelength of light, and has at least one side face. Is shielded from light by a light shielding film.
  • a polyhedral core formed integrally by the reflecting surface, the light beam condensing unit, and the near-field light generating unit, and a cladding for confining the core inside
  • the near-field light from the other end side is introduced into the core from one end side.
  • the clad is formed so as to be in close contact with the side surface of the core by a material having a refractive index lower than that of the core, and confines the core so that no gap is formed between the clad and the core.
  • a light beam is introduced into the core from one end side, the light beam is reflected by the reflecting surface and changes its direction. That is, the direction changes in a direction different from the introduction direction.
  • the light flux whose direction has been changed propagates in the core from one end side to the other end side by the light flux collecting section.
  • the light beam condensing part is drawn so that the cross-sectional area perpendicular to the longitudinal direction from one end side to the other end side gradually decreases. Therefore, when the light beam passes through the light beam condensing portion, it is gradually condensed while repeating reflection on the side surface and propagates inside the core. In particular, since the clad is in close contact with the side surface of the core, light does not leak to the outside of the core, and the introduced light beam can be propagated to the other end side without being wasted.
  • the light beam propagated to the end of the light beam condensing unit is incident on the near-field light generating unit.
  • This near-field light generating part is further drawn toward the other end, and the end face exposed to the outside at the other end is a size smaller than the wavelength of light (a minute size exceeding the light diffraction limit). It has become.
  • at least one of the side surfaces of the near-field light generator is shielded by the light shielding film. Therefore, the light beam incident on the near-field light generating part can be propagated toward the end face without leaking to the clad side. Therefore, the force S that generates near-field light is the force S that is emitted from the edge surface force.
  • the light beam introduced from one end side of the core can be converted into near-field light, and the near-field light can be emitted to the outside from the other end side.
  • the introduced light beam can be reflected by the reflecting surface and freely redirected toward the other end side, the light beam can be reliably introduced from the other end side in the near field regardless of the direction from which the light beam is introduced.
  • the power S can be generated as light.
  • the light beam condensing part and the near-field light generating part are formed in a body-like manner, it is not necessary to align the positions as in the conventional lens and metal scatterer.
  • the near-field light generating element can be easily used in various devices that require near-field light, and the degree of freedom in design can be improved. In particular, since near-field light can be generated efficiently regardless of the direction of light flux introduction, it is easy to handle and excellent in convenience.
  • the near-field light generating element according to the present invention is the near-field light generating element of the present invention, wherein the cladding force is formed with one end side of the core exposed to the outside. Is a special feature.
  • the clad is formed in a state where one end side of the core is exposed to the outside, it is possible to directly introduce the light flux into the core without passing through the clad. In addition, it can be converted into near-field light more efficiently and emitted from the end face to the outside.
  • the near-field light generating unit in the near-field light generating element of the present invention, has a predetermined length on the other end side that is the same as the end face. It is characterized by being shaped into a straight shape.
  • the predetermined length on the other end side is not the end where the near-field light generating unit is not drawn from the end of the light beam condensing unit to the end surface. It is formed in a straight shape with the same size as the surface. Therefore, in the manufacturing process of the near-field light generating element, when the end surface is formed by dicing the other end side of the core and the clad, even if a small dicing error or a draw forming error occurs.
  • the end face size can always be the same. Therefore, even if a large number of near-field light generating elements are manufactured, variations (individual differences) among the near-field light generating elements can be eliminated, and the same quality can be stably manufactured. Therefore, the yield can be improved.
  • the near-field light generating element in the near-field light generating element of any of the above-described present invention, all side surfaces of the near-field light generating unit are shielded from light by the light-shielding film. ! /, That is special.
  • the near-field generating element since all the side surfaces of the near-field light generating unit are shielded by the light shielding film, the light beam incident on the near-field light generating unit leaks to the cladding side. There is no. Therefore, loss of light flux can be minimized, and near-field light can be generated more efficiently.
  • the light shielding film is a metal film that increases the light intensity of the near-field light. It is that characteristic.
  • near-field light having a high light intensity can be generated at the interface between the metal film and the core, it is not directly affected by the design size of the end face itself. In other words, it is possible to reliably generate near-field light with a high light intensity that is not affected by the physical design, without having to make the end face size finer.
  • the side surface of the near-field light generating portion provided with the metal film has the light flux collecting portion. The angle is adjusted so that the light beam condensed by the optical part is incident on the metal film at a resonance angle and the surface plasmon is excited by the energy of the light beam.
  • the light beam condensed by the light beam condensing unit is incident on the metal film at a resonance angle at which the light energy is most utilized for excitation of the surface plasmon.
  • Power S can be. Therefore, the surface plasmon can be excited most efficiently, and near-field light having a higher combing force and a higher light intensity can be generated. Therefore, further high density recording can be achieved.
  • the near-field optical head heats the magnetic recording medium rotating in a certain direction and applies a recording magnetic field in the perpendicular direction to the magnetic recording medium, thereby causing magnetization reversal and information.
  • a near-field optical head for recording a magnetic recording medium a slider disposed opposite to the surface of the magnetic recording medium, an auxiliary magnetic pole fixed to the front end surface of the slider, and connected to the auxiliary magnetic pole via a magnetic circuit, A main magnetic pole that generates the recording magnetic field with the auxiliary magnetic pole, a coil that is supplied with a current modulated according to the information, and spirally wound around the magnetic circuit, and the other end side of the coil
  • the near-field light generating element according to any one of the present invention, which is fixed adjacent to the main magnetic pole in a state facing the magnetic recording medium, and the slider arranged in parallel to the slider. Fixed and said one end It said from A light beam introducing means for introducing the light beam into the core, and the near-field light generating unit generates the
  • the near-field light assisted magnetic recording method in which the near-field light generated by the near-field light generating element and the recording magnetic field generated by both magnetic poles cooperate with each other. Information can be recorded on the rotating magnetic recording medium.
  • the slider is arranged in a state of facing the surface of the magnetic recording medium.
  • An auxiliary magnetic pole is fixed to the front end surface of the slider, and a main magnetic pole is connected to the auxiliary magnetic pole via a magnetic circuit.
  • a near-field light generating element is fixed adjacent to the main magnetic pole. That is, an auxiliary magnetic pole, a magnetic circuit, a main magnetic pole, and a near-field light generating element are arranged in this order from the slider side on the front end surface of the slider.
  • the near-field light generating element is fixed in a state where the other end side where the near-field light is generated faces the magnetic recording medium side. Therefore, one end side where the light flux is introduced is directed to a position away from the magnetic recording medium.
  • a light beam introducing means fixed to the slider is connected to one end side.
  • the light beam is introduced into the core from the light beam introducing means.
  • the light beam can be introduced in a direction parallel to the slider.
  • the introduced light beam is bent by approximately 90 degrees by the reflecting surface, and then propagates while being condensed by the light beam condensing unit toward the other end side located on the magnetic recording medium side.
  • near-field light is generated by the near-field light generation unit and leaks from the end face to the outside.
  • the near-field light locally heats the magnetic recording medium and temporarily reduces the coercive force.
  • the near-field light generator generates near-field light in the vicinity of the main magnetic pole, so that the coercivity of the magnetic recording medium can be reduced at a position as close as possible to the main magnetic pole.
  • a current modulated according to information to be recorded is supplied to the coil.
  • the current magnetic field generates a magnetic flux in the magnetic circuit, so that a force S can be generated between the main magnetic pole and the auxiliary magnetic pole in a direction perpendicular to the magnetic recording medium.
  • the magnetic flux generated from the main magnetic pole flows perpendicularly to the magnetic recording medium and returns to the auxiliary magnetic pole after passing through the magnetic recording medium.
  • a recording magnetic field can be applied at a pinpoint. Note that the direction of this recording magnetic field is reversed according to the information to be recorded.
  • the magnetic recording medium receives a recording magnetic field
  • the magnetization direction is reversed in the vertical direction in accordance with the direction of the recording magnetic field.
  • information can be recorded.
  • it is possible to record information by the near-field light assisted magnetic recording method in which the near-field light and the recording magnetic field cooperate.
  • recording is performed by the perpendicular magnetic recording method, it is difficult to receive the phenomenon of thermal fluctuation, and stable recording with high writing reliability can be performed.
  • the peak position of the heating temperature can be set at a position where the recording magnetic field acts locally. Therefore, recording can be performed more reliably and high-density recording can be realized.
  • the near-field light generating element capable of efficiently generating near-field light
  • the writing reliability of the near-field light head itself can be improved, and the quality can be improved.
  • force S since it is also a near-field light generating element that generates the light beam as near-field light from the other end side regardless of the direction from which the light beam is introduced, even if the light beam introducing means is arranged in parallel with the slider, the light beam The light beam from the introducing means can be made near-field light in the vicinity of the main magnetic pole.
  • the design of the near-field optical head can be made compact.
  • unlike the conventional way of entering light there is no need to propagate the light beam in the air, so the light guide loss can be reduced as much as possible.
  • the auxiliary magnetic pole, the main magnetic pole, the near-field light generating element, and the like are sequentially arranged on the leading end surface of the slider, it is possible to prevent as much as possible that each component other than the light beam introducing means overlaps in the slider thickness direction. is doing. Therefore, the near-field optical head itself can be thinned.
  • a groove that exposes a side surface of the near-field light generating unit is formed in the clad in the near-field optical head of the present invention.
  • the main magnetic pole force S and the protruding portion that comes into contact with the side surface of the near-field light generating portion through the groove portion are provided.
  • the groove portion in which the main magnetic pole is formed in the cladding is provided. Since the projecting portion is in contact with the side surface of the near-field light generating portion, the position where the near-field light is generated and the position where the recording magnetic field is generated can be made as close as possible. Accordingly, the near-field light and the recording magnetic field can be made to cooperate more efficiently, and the force S can cope with the higher density recording.
  • the near-field optical head according to the present invention is the near-field optical head according to the present invention, wherein the light-shielding film is disposed between the protrusion and the side surface of the near-field light generating unit. Is formed.
  • the near-field light head since the light shielding film is formed between the protrusion and the side surface of the near-field light generator, near-field light is generated more concentrated near the protrusion. The power to do S. Therefore, it is possible to achieve further high density recording.
  • the near-field optical head according to the present invention is the above-described contact-field optical head according to the present invention, wherein the protruding portion and the light-shielding film are electrically or magnetically connected. At least! /, A shield film that cuts off one of the connections is formed! /.
  • information can be recorded by a near-field light-assisted magnetic recording method in which near-field light and a recording magnetic field are more effectively collaborated.
  • the information recording / reproducing apparatus is movable in the direction parallel to the surface of the magnetic recording medium and the! / A beam that supports the near-field light head on the tip side in a state of being rotatable about two axes that are parallel to the surface of the magnetic recording medium and perpendicular to each other, and the light beam is incident on the light beam introducing means
  • a controller for supplying the current to the coil and controlling the operation of the light source.
  • the beam is moved by the actuator to scan the near-field optical head.
  • the near-field optical head is arranged at a desired position on the magnetic recording medium.
  • the near-field optical heads are parallel to the surface of the magnetic recording medium and orthogonal to each other. It is supported by the beam so that it can rotate about two axes, that is, it can be twisted about the two axes. Therefore, even if waviness occurs in the magnetic recording medium, changes in wind pressure due to waviness or waviness directly transmitted can be absorbed by twisting, and the attitude of the near-field optical head can be stabilized. it can.
  • control unit activates the light source and supplies a current modulated according to the information to the coil.
  • the near-field light head can record information on the magnetic recording medium by cooperating the near-field light and the recording magnetic field.
  • the near-field optical head described above since the near-field optical head described above is provided, it is possible to cope with high-density recording with high writing reliability, and high quality can be achieved. At the same time, the power S is used to reduce the thickness.
  • FIG. 1 is a configuration diagram showing an embodiment of an information recording / reproducing apparatus including a near-field light head having a near-field light generating element according to the present invention.
  • FIG. 2 is an enlarged cross-sectional view of the near-field optical head shown in FIG.
  • FIG. 3 is a view of the near-field optical head shown in FIG. 2 as viewed from the disk surface side.
  • FIG. 4 is an enlarged cross-sectional view of the side surface on the outflow end side of the near-field light head shown in FIG. 2, showing the configurations of the near-field light generating element and the recording element, and the near-field light during recording. It is the figure which showed the relationship between and a magnetic field.
  • FIG. 5 is a view of the core of the near-field light generating element shown in FIG. 4 as viewed from the direction of arrow A.
  • FIG. 6 is an enlarged view of the other end side of the core shown in FIG.
  • FIG. 7 is an enlarged view of the other end side of the near-field light generating element shown in FIG.
  • FIG. 8 is a view of the near-field light generating element shown in FIG. 7 as viewed from the end face side.
  • FIG. 9 is a view showing a modification of the near-field light generating element according to the present invention, and is a view showing a core in which a part of the near-field light generating part is formed in a straight shape.
  • FIG. 10 is a cross-sectional view of the near-field light generating element having the core shown in FIG.
  • FIG. 11 is a view of the near-field light generating element shown in FIG. 10 as viewed from the end face side.
  • FIG. 12 is a view showing a modification of the near-field light generating element according to the present invention, and is a cross-sectional view of the near-field light generating element in which a light shielding film is formed on all side surfaces of the near-field light generating part. 13]
  • FIG. 13 is a view of the near-field light generating element shown in FIG. 12 as viewed from the end face side.
  • FIG. 14 is a diagram showing a modification of the near-field light generating element according to the present invention, in which a light-shielding film is formed on all side surfaces of the near-field light generating unit, and one of the light-shielding films is a metal film.
  • 2 is a cross-sectional view of a near-field light generating element.
  • FIG. 15 is a view of the near-field light generating element shown in FIG.
  • FIG. 16 is a view showing a modification of the near-field light generating element according to the present invention, and is a cross-sectional view of the near-field light generating element in which a metal film is formed on one of the side surfaces of the near-field light generating part. is there. 17]
  • FIG. 17 is a view of the near-field light generating element shown in FIG. 16 as viewed from the end face side.
  • a diagram showing a modification of the near-field light head according to the present invention is a partially enlarged view of the near-field light head provided with the main magnetic pole in contact with the side surface of the near-field light generator.
  • FIG. 19 is a view of the near-field optical head shown in FIG. 18 as viewed from the end face side.
  • FIG. 20 is a diagram showing a modification of the near-field light head according to the present invention, and a near-field light in which a light shielding film is formed between the main magnetic pole shown in FIG. 18 and the side surface of the near-field light generating unit. It is a partially enlarged view of the head.
  • FIG. 21 is a view of the near-field optical head shown in FIG. 20 as viewed from the end surface side.
  • a diagram showing a modification of the near-field optical head according to the present invention is a partially enlarged view of the near-field optical head using the light shielding film shown in FIG. 20 as a metal film.
  • FIG. 23 is a view of the near-field optical head shown in FIG. 22 as viewed from the end surface side.
  • FIG. 24 is a view showing a modification of the near-field light head according to the present invention, and is one of the near-field light heads whose angle is adjusted on the side surface of the near-field light generating part on which the metal film shown in FIG. FIG.
  • FIG. 25 is a view of the near-field optical head shown in FIG. 24 as viewed from the end surface side.
  • FIG. 26 is a diagram for explaining the relationship between the incident angle of light that excites surface plasmons and the intensity of reflected light.
  • FIG. 27 is a diagram showing a modification of the near-field optical head according to the present invention, and is a partially enlarged view of the near-field optical head in which a part of the metal film shown in FIG. 22 overlaps the clad.
  • FIG. 28 is a view of the near-field optical head shown in FIG. 27 as viewed from the end surface side.
  • FIG. 29 A diagram showing a modification of the near-field optical head according to the present invention, wherein the metal shown in FIG. FIG. 4 is a partially enlarged view of a near-field optical head in which a shield film is formed between the film and the protrusion.
  • FIG. 30 is a view of the near-field optical head shown in FIG. 29 as viewed from the end surface side.
  • the information recording / reproducing apparatus 1 of the present embodiment is an apparatus for writing on a disk (magnetic recording medium) D having a perpendicular recording layer d2 by a perpendicular recording method.
  • a disk (magnetic recording medium) D having a perpendicular recording layer d2 by a perpendicular recording method.
  • an air floating type in which the near-field optical head 2 is floated using an air flow in which the disk D rotates will be described as an example.
  • the information recording / reproducing apparatus 1 of the present embodiment includes an optical near-field optical head 2 having a spot size converter (near-field light generating element) 22 described later, and a disk surface (magnetic The surface of the recording medium)
  • the near-field optical head is movable in the X and Y directions parallel to D1 and is rotatable about two axes (X axis and Y axis) that are parallel to the disk surface D1 and perpendicular to each other.
  • an optical signal controller (light source) 5 that makes the light beam L incident on the optical waveguide 4 from the proximal end side of the optical waveguide (flux introducing means) 4, and the proximal end of the beam 3
  • An actuator 6 that scans and moves the beam 3 in the XY directions parallel to the disk surface D1
  • a spindle motor (rotary drive unit) 7 that rotates the disk D in a fixed direction, and information.
  • a modulated current is supplied to the coil 33 described later.
  • the housing 9 is formed of a metal material such as aluminum in a square shape when viewed from above, and a recess 9a for accommodating each component is formed inside. Further, a lid (not shown) is detachably fixed to the housing 9 so as to close the opening of the recess 9a.
  • the spindle motor 7 is attached to the approximate center of the recess 9a, and the disc D is detachably fixed by fitting the center hole into the spindle motor 7.
  • the above-mentioned actuator 6 is attached to the corner of the recess 9a.
  • This actuator 6 has a shaft A carriage 11 is attached via a receiver 10, and a beam 3 is attached to the tip of the carriage 11.
  • the carriage 11 and the beam 3 are both movable in the XY directions by driving the actuator 6.
  • the carriage 11 and the beam 3 are retracted from the disk D by driving the actuator 6 when the rotation of the disk D is stopped.
  • the near-field light head 2 and the beam 3 constitute a suspension 12.
  • the optical signal controller 5 is mounted in the recess 9 a so as to be adjacent to the actuator 6.
  • the controller 8 is attached adjacent to the actuator 6.
  • the near-field optical head 2 heats the rotating disk D and applies a perpendicular recording magnetic field to the disk D to cause magnetization reversal and record information. As shown in FIGS. 2 and 3, the near-field optical head 2 is arranged so as to face the disk D in a state where it floats by a predetermined distance H from the disk surface D1, and has a slider 2 Oa facing the disk surface D1.
  • a recording element 21 fixed to the front end surface of the slider 20 (hereinafter referred to as a side surface on the outflow end side), a spot size converter 22 fixed adjacent to the recording element 21,
  • An optical waveguide 4 for introducing a light beam L from the optical signal controller 5 is provided in a core 40 (to be described later) of the spot size converter 22.
  • the near-field light head 2 of the present embodiment includes a reproducing element 23 fixed adjacent to the spot size converter 22.
  • the slider 20 is formed in a rectangular parallelepiped shape using a light-transmitting material such as quartz glass or a ceramic such as AlTiC (altic).
  • the slider 20 is supported so as to hang from the tip of the beam 3 via the gimbal portion 24 with the opposing surface 20a facing the disk D.
  • the gimbal portion 24 is a component whose movement is restricted so as to be displaced only around the X axis and around the Y axis.
  • the slider 20 can be rotated around two axes (X axis, Y axis) that are parallel to the disk surface D1 and orthogonal to each other as described above.
  • the opposed surface 20a of the slider 20 is formed with a ridge portion 20b that generates pressure for rising due to the viscosity of the air flow generated by the rotating disk D.
  • a ridge portion 20b that generates pressure for rising due to the viscosity of the air flow generated by the rotating disk D.
  • two ridges 20b extending in the longitudinal direction are formed so as to be arranged in a rail shape.
  • the surface of this ridge portion 20b is a surface called ABS (Air Bearing Surface).
  • the slider 20 receives a force that rises from the disk surface D1 by the two ridges 20b.
  • the beam 3 is steeped in the Z direction perpendicular to the disk surface D1, and absorbs the floating force of the slider 20. That is, the slider 20 receives a force pressed by the beam 3 to the disk surface D1 side when it floats. Therefore, the slider 20 floats in a state of being separated from the disk surface D1 by a predetermined distance H as described above due to the balance between the forces of the two.
  • the slider 20 since the slider 20 is rotated about the X axis and the Y axis by the gimbal portion 24, the slider 20 always floats in a stable posture.
  • the recording element 21 is connected to the auxiliary magnetic pole 30 fixed to the side surface on the outflow end side of the slider 20 and the auxiliary magnetic pole 30 via the magnetic circuit 31, and is connected to the disk D.
  • a main magnetic pole 32 that generates a perpendicular recording magnetic field with the auxiliary magnetic pole 30, and a coil 33 that spirally winds around the magnetic circuit 31 around the magnetic circuit 31. That is, the auxiliary magnetic pole 30, the magnetic circuit 31, the coil 33, and the main magnetic pole 32 are arranged in order from the outflow end side of the slider 20.
  • Both the magnetic poles 30, 32 and the magnetic circuit 31 are formed of a high saturation magnetic flux density (Bs) material (for example, CoNiFe alloy, CoFe alloy, etc.) having a high magnetic flux density.
  • the coil 33 is arranged so that there is a gap between adjacent coil wires, between the magnetic circuit 31 and between the magnetic poles 30 and 32 so as not to be short-circuited. Molded by 34.
  • the coil 33 is supplied with a current modulated in accordance with information from the control unit 8. That is, the magnetic circuit 31 and the coil 33 constitute an electromagnet as a whole.
  • the main magnetic pole 32 and the auxiliary magnetic pole 30 are designed so that the end surfaces facing the disk D are flush with the ABS of the slider 20. As shown in FIGS.
  • the spot size converter 22 is adjacent to the recording element 21 with one end side facing the upper side of the slider 20 and the other end side facing the disk D side. Is fixed. More specifically, it is fixed adjacent to the main pole 32.
  • FIG. 5 is a view of a core 40 described later as seen from the direction of arrow A shown in FIG.
  • the spot size converter 22 propagates the light flux L introduced to one end side while condensing to the other end side in a direction different from the introduction direction, and generates the near-field light R and then emits it to the outside.
  • the element is composed of a polyhedral core 40 and a clad 41 for confining the core 40 therein, and is formed in a substantially plate shape as a whole.
  • FIG. 6 is an enlarged view of the other end side of the core 40 shown in FIG. 5
  • FIG. 7 is an enlarged view of the other end side of the spot size converter 22 shown in FIG. 4,
  • FIG. FIG. 8 is a view of the spot size converter 22 shown in FIG. 7 as viewed from the end face 40d side.
  • the core 40 is integrally formed by the reflecting surface 40a, the light beam condensing unit 40b, and the near-field light generating unit 40c.
  • the light beam condensing unit 40b and the near-field light generating unit 40c are each formed to have three side surfaces, and one of the side surfaces is arranged to face the main magnetic pole 32. It's like! /
  • the reflection surface 40a reflects the light beam L introduced by the optical waveguide 4 from one end side in a direction different from the introduction direction.
  • the light beam L is reflected so that the direction of the light beam L changes by approximately 90 degrees.
  • the light beam condensing part 40b is a part formed by drawing so that the cross-sectional area perpendicular to the longitudinal direction (Z direction) from one end side to the other end side is gradually reduced, and is reflected by the reflecting surface 40a.
  • the light beam L is condensed and propagated toward the other end. In other words, the light beam condensing unit 40b can reduce the spot size of the introduced light beam L to a small size.
  • the near-field light generating unit 40c is a portion that is further formed into a diaphragm from the end of the light beam condensing unit 40b toward the other end. That is, the near-field light generation unit 40c can further reduce the spot size narrowed down by the light beam condensing unit 40b.
  • the near-field light generating unit 40c is drawn so that the end face 40d located on the other end side has a size equal to or smaller than the wavelength of light.
  • the maximum linear length L1 1S that can be secured on the end face 40d is designed to be less than the wavelength of the light.
  • the size of this light is less than the wavelength. In particular, it is preferably in the range of lnm; m, and more preferably in the range of lnm force, 500 nm.
  • the spot size can be reduced to the same size as the maximum linear length L1, that is, the diameter can be reduced to about In m to l ⁇ m (or about l nm to 500 nm). It can be emitted from the end face 40d to the outside as the incident light R.
  • the light beam condensing unit 40b and the near-field light generating unit 40c are both gradually drawn toward the main magnetic pole 32 as shown in FIG.
  • the end face 40d is positioned on the main magnetic pole 32 side.
  • the near-field light R having the above size can be generated in the vicinity of the main magnetic pole 32.
  • the term “near” in the present invention refers to a region within a range separated from the main magnetic pole 32 by a distance approximately equal to or less than the diameter of the near-field light R generated from the end face 40d.
  • the distance force between the main magnetic pole 32 and the end face 40d of the near-field light generator 40c is approximately the same as the diameter (maximum linear length L1) of the near-field light R from lnm to l ⁇ m It is designed to be a distance (or about lnm to 500nm) or less!
  • the clad 41 is formed of a material having a refractive index lower than that of the core 40.
  • the clad 41 is in close contact with the side surface of the core 40 to confine the core 40 inside. Yes. Therefore, there is no gap between the core 40 and the clad 41.
  • the clad 41 of the present embodiment is formed so that the end face 40d on the other end side is also exposed to the outside, like the one end side of the core 40.
  • a combination of materials used as the clad 41 and the core 40 is described.
  • a combination in which the core 40 is formed of quartz (SiO 2), and the clad 41 is formed of quartz doped with fluorine. Can be considered.
  • the wavelength of the light beam L is 400 nm
  • the refractive index of the core 40 is 1.47
  • the refractive index of the clad 41 is less than 1.47, which is a preferable combination.
  • a combination in which the core 40 is formed of quartz doped with germanium and the cladding 41 is formed of quartz (SiO 2) is also conceivable.
  • the wavelength of the light beam L is 4 OOnm, it becomes larger than the refractive skew force 1.47 of the core 40 and becomes the refractive skew force 47 of the clad 41.
  • the tantalum oxide (TaO: refractive index 2.16 when the wavelength is 550 nm) is used for the core 40 and quartz is used for the clad 41 to increase the difference in refractive index between the two. More preferably.
  • the luminous flux L in the infrared region it is also effective to form the core 40 with silicon (Si: refractive index is about 4) which is a material transparent to infrared light.
  • a light shielding film 42 that shields the light flux L is formed on two of the three side surfaces of the near-field light generating unit 40c except for one side surface that faces the main magnetic pole 32. This prevents the light flux L from leaking from the near-field light generating unit 40c to the clad 41 side.
  • the near-field light generating unit 40c generates near-field light R from the light beam L collected by the light beam condensing unit 40b and emits it from the end face 40d to the outside by the light shielding film 42 and the above-described aperture forming. It can be done. However, since the end face 40d is formed on the main magnetic pole 32 side, the near-field light R can be generated in the vicinity of the main magnetic pole 32.
  • the end surface 40d of the spot size converter 22 is designed to be flush with the ABS of the slider 20.
  • the optical waveguide 4 is a biaxial waveguide composed of a core 4a and a clad 4b, and the light flux L propagates through the core 4a.
  • the optical waveguide 4 is fixed in a state of being fitted in a groove portion 41 a formed in the clad 41 and a groove portion (not shown) formed in the upper surface of the slider 20. As a result, the optical waveguide 4 is placed in parallel with the slider 20.
  • the tip end of the optical waveguide 4 is connected to one end side of the spot size converter 22, and the light flux L is introduced into the core 40. Further, the base end side of the optical waveguide 4 is drawn out to the optical signal controller 5 through the beam 3 and the carriage 11 and then connected to the optical signal controller 5.
  • the positions of the spot size converter 22 and the optical waveguide 4 are arranged so that the light beam L introduced from the optical waveguide 4 into the core 40 enters the approximate center of the reflecting surface 40a. The relationship has been adjusted.
  • the reproducing element 23 is a magnetoresistive film whose electric resistance is converted according to the magnitude of the magnetic field leaking from the perpendicular recording layer d2 of the disk D.
  • a bias current is supplied to the reproducing element 23 from the control unit 8 via a lead film (not shown).
  • the control unit 8 detects a change in the magnetic field leaking from the disk D as a change in voltage. The signal can be reproduced from the change in voltage.
  • the disk D of the present embodiment is composed of at least two layers: a perpendicular recording layer d2 having an easy axis of magnetization in a direction perpendicular to the disk surface D1, and a soft magnetic layer d3 made of a high permeability material.
  • a perpendicular recording layer d2 having an easy axis of magnetization in a direction perpendicular to the disk surface D1
  • a soft magnetic layer d3 made of a high permeability material.
  • a soft magnetic layer d3, an intermediate layer d4, a perpendicular recording layer d2, a protective layer d5, and a lubricating layer d6 are sequentially formed on a substrate dl. Use the film.
  • the substrate dl is, for example, an aluminum substrate or a glass substrate.
  • the soft magnetic layer d3 is a high permeability layer.
  • the intermediate layer d4 is a crystal control layer of the perpendicular recording layer d2.
  • the perpendicular recording layer d2 is a perpendicular anisotropic magnetic layer, and for example, a CoCrPt alloy is used.
  • the protective layer d5 is for protecting the perpendicular recording layer d2, and for example, a DLC (diamond “like” carbon) film is used.
  • lubrication layer d6 for example, a fluorine-based liquid lubricant is used.
  • the spindle motor 7 is driven to rotate the disk D in a certain direction.
  • the actuator 6 is actuated to scan the beam 3 in the XY directions via the carriage 11.
  • a force S for positioning the near-field optical head 2 at a desired position on the disk D can be achieved.
  • the near-field optical head 2 receives a force that rises by the two ridges 20b formed on the opposing surface 20a of the slider 20, and is pressed against the disk D side with a predetermined force by the beam 3 or the like. Attached.
  • the near-field optical head 2 floats to a position separated from the disk D by a predetermined distance H as shown in FIG.
  • the near-field optical head 2 can be floated in a stable state.
  • the control unit 8 operates the optical signal controller 5 and supplies a current modulated in accordance with the information to the coil 33.
  • the optical signal controller 5 causes the light beam L to enter from the proximal end side of the optical waveguide 4.
  • the incident light beam L travels toward the front end side in the core 4a of the optical waveguide 4 and is introduced into the core 40 from one end side of the spot size converter 22, as shown in FIG.
  • the light beam L is introduced into the core 40 in a direction parallel to the slider 20.
  • the introduced light beam L is reflected by the reflecting surface 40a and changes its direction by approximately 90 degrees. That is, the direction changes in a direction different from the introduction direction.
  • the light beam L whose direction has changed is propagated while being collected by the light beam condensing unit 40b toward the other end side located on the disk D side, and is incident on the near-field light generating unit 40c.
  • the light beam condensing part 40b is drawn so that the direction force from one end side to the other end side and the cross-sectional area perpendicular to the longitudinal direction gradually decrease. Therefore, when the light beam L passes through the light beam condensing part 40b, it is gradually condensed while being reflected on the side surface and propagates inside the core 40. In particular, since the clad 41 is in close contact with the side surface of the core 40, it is possible to propagate the introduced light flux L to the other end side without losing the introduced light flux L without leaking light to the outside of the core 40. Touch with S.
  • the light beam L propagated to the end of the light beam condensing unit 40b is incident on the near-field light generating unit 40c.
  • the near-field light generation unit 40c is further drawn toward the other end, and the end surface 40d has a size equal to or smaller than the light wavelength.
  • the two side surfaces of the near-field light generating unit 40c are shielded from light by the light shielding film 42. Therefore, the light beam L incident on the near-field light generating unit 40c can be propagated toward the end face 40d without leaking to the clad 41 side. Therefore, the near-field light R can be generated, and the near-field light R is emitted from the end face 40d.
  • the near-field light R causes the disk D to be heated locally, and the coercive force is temporarily reduced.
  • the near-field light generation unit 40c generates the near-field light R in the vicinity of the main magnetic pole 32, that is, in a range separated from the main magnetic pole 32 by a distance approximately equal to the diameter of the near-field light R.
  • the coercive force of disk D can be reduced as close as possible to the main pole 32.
  • the current magnetic field when a current is supplied to the coil 33 by the control unit 8, the current magnetic field generates a magnetic field in the magnetic circuit 31 according to the principle of the electromagnet, so that the demagnetization between the main magnetic pole 32 and the auxiliary magnetic pole 30 occurs.
  • a recording magnetic field perpendicular to the disk D can be generated.
  • the magnetic flux generated from the main magnetic pole 32 side passes straight through the perpendicular recording layer d2 of the disk D and reaches the soft magnetic layer d3 as shown in FIG.
  • recording can be performed in a state in which the magnetization of the perpendicular recording layer d2 is directed perpendicular to the disk surface D1.
  • the magnetic flux reaching the soft magnetic layer d3 returns to the auxiliary magnetic pole 30 via the soft magnetic layer d3.
  • the direction of magnetization is not affected. This is because the area force of the auxiliary magnetic pole 30 facing the disk surface D1 is larger than the main magnetic pole 32, so that the magnetic flux density is large and a force sufficient to reverse the magnetization does not occur. That is, recording can be performed only on the main magnetic pole 32 side.
  • the peak position of the heating temperature can be set at a position where the recording magnetic field acts locally. Therefore, recording can be performed reliably, reliability can be improved, and high density recording can be achieved with the power S.
  • the reproducing element 23 fixed adjacent to the spot size converter 22 leaks from the perpendicular recording layer d2 of the disc D.
  • the electrical resistance changes according to the magnitude. Therefore, the voltage of the reproducing element 23 changes.
  • the control unit 8 can detect a change in the magnetic field leaking from the disk D as a change in voltage.
  • the control unit 8 can reproduce information by reproducing the signal from the change in voltage.
  • the near-field optical head 2 of the present embodiment includes the spot size converter 22 that can generate the near-field light R efficiently! 2
  • the reliability of writing itself can be improved and the quality can be improved.
  • the clad 41 is formed with the end face 40d on one end side and the other end side of the core 40 exposed to the outside, so that the light flux L is directly applied to the core 40 without passing through the clad 41. Can be introduced, and more efficiently converted to near-field light R and emitted from the end face 40d to the outside. Can do.
  • the spot size converter 22 can freely change the direction of the introduced light beam L by reflecting it with the reflecting surface 40a, even if the optical waveguide 4 is arranged parallel to the slider 20, The light beam L from the optical waveguide 4 can be converted into near-field light R in the vicinity of the main magnetic pole 32. Therefore, the optical waveguide 4 can be arranged without being affected by the direction in which the light flux L is introduced. Therefore, the design of the near-field optical head 2 can be made compact. Moreover, unlike the conventional way of entering light, it is not necessary to propagate the light beam L in the air, so that the light guide loss can be reduced as much as possible.
  • each component other than the optical waveguide 4 overlaps in the thickness direction of the slider 20. To prevent that. Therefore, it is possible to reduce the thickness of the near-field optical head 2 itself with the force S.
  • the near-field optical head 2 of the present embodiment when manufactured, it can be manufactured by using a semiconductor technology such as a photolithography technology and an etching processing technology. That is, a semiconductor technology such as a photolithography technology and an etching processing technology. That is, a semiconductor technology such as a photolithography technology and an etching processing technology. That is, a semiconductor technology such as a photolithography technology and an etching processing technology. That is,
  • the spot size converter 22 can be created at the same time in the flow of the conventional manufacturing process without using a special method.
  • the recording element 21 is formed on the side surface on the outflow end side of the slider 20 using the semiconductor technology.
  • a spot size converter 22 is formed on the recording element 21 in the same manner using semiconductor technology.
  • the reproducing element 23 may be built on the spot size converter 22.
  • the near-field optical head 2 can be easily manufactured by adding only one manufacturing process of the spot size converter 22 in the course of manufacturing each component in order from the slider 20 side.
  • the cladding 41 is formed on the main magnetic pole 32. At this time, in order to connect the optical waveguide 4 to one end side later, the clad 41 is patterned so that the groove 41a is formed. Next, after the core 40 is formed in a convex shape on the clad 41, etching is performed as appropriate to form the reflecting surface 40a, the light beam condensing unit 40b, and the near-field light generating unit 40c. Next, light is blocked on the side surface of the near-field light generating unit 40c. A film 42 is formed. Next, the clad 41 is formed again so as to confine the core 40 inside. Finally, the outer shape of the clad 41 is processed into a predetermined shape. At this time, the end face 40d can be formed by cutting the other end side of the spot size converter 22 by dicing or the like. In this way, it is possible to easily manufacture the spot size converter 22 using semiconductor technology.
  • the near-field optical head 2 described above since the near-field optical head 2 described above is provided, it is possible to cope with high-density recording with high writing reliability. Ability to improve quality. At the same time, the thickness can be reduced.
  • the near-field light R can be concentrated and localized near the side surface (region S shown in FIG. 8) of the near-field light generation unit 40c facing the main magnetic pole 32 side. Therefore, it is possible to achieve higher density recording.
  • the present invention is not limited to the near-field light head 2, and the near-field light R is not limited to the near-field light head 2. It may be applied to various necessary devices.
  • the introduced light beam L when applied to the near-field light head 2, the introduced light beam L is designed to change its direction by approximately 90 degrees on the reflecting surface 40a, but the reflection angle is limited to this angle. is not.
  • the design of the reflecting surface 40a! / the light beam L introduced from one end side can be reflected by the reflecting surface 40a and changed in direction toward the other end side at a free angle. Accordingly, the light flux L can be reliably generated as the near-field light R from the other end regardless of the direction from which the light flux is introduced. Therefore, it can be used for various devices that are easy to handle.
  • the near-field light generating part 40c is formed so that the predetermined length L3 on the other end side is the same size as the end face 40d and is straight. It doesn't matter. That is, the predetermined length L3 on the other end side is not straight when the near-field light generating unit 40c is not drawn from the end of the light beam condensing unit 40b to the end surface 40d. It is formed in a shape.
  • the end face 40d can always have the same size. Therefore, even if the spot size converters 22 are manufactured in large quantities, variations (individual differences) among the spot size converters 22 can be eliminated, and it is possible to stably manufacture products of the same quality. Therefore, the yield can be improved.
  • the two side surfaces of the three side surfaces of the near-field light generating unit 40c are shielded by the light-shielding film 42. At least one side surface may be shielded from light. Absent. Even in this case, the near-field light R can be generated.
  • the light shielding film 42 it is preferable that all the side surfaces (three side surfaces) be shielded by the light shielding film 42. By doing so, the light beam L incident on the near-field light generating unit 40c does not leak to the clad 41 side. Therefore, the loss of the luminous flux L can be minimized, and the near-field light R can be generated more efficiently.
  • the light shielding film 42 formed on any one of the side surfaces may be a metal film 43 that enhances the light intensity of the near-field light R.
  • a light shielding film formed on the side surface facing the main magnetic pole 32 may be used as the metal film 43 that enhances the light intensity of the near-field light R.
  • near-field light R with higher light intensity can be generated. That is, the light beam L condensed by the light beam condensing unit 40b is incident on the metal film 43 by the near-field light generating unit 40c. Then, surface plasmons are excited in the metal film 43.
  • the excited surface plasmon propagates toward the end face 40d through the interface between the metal film 43 and the core 40 while being enhanced by the resonance effect. And when it reaches the end face 40d, it leaks as near-field light R with high light intensity. Therefore, higher density recording can be achieved.
  • the metal film 43 is, for example, a gold film, a silver film, a platinum film, or the like. Among these, it is preferable to use a gold film because it is resistant to oxidation and excellent in durability. It is also possible to use the light shielding film as the metal film 43! /
  • the metal film 43 may be formed on only one or two of the three side surfaces of the near-field light generating unit 40c.
  • the metal film 43 may be formed on one of the three side surfaces of the near-field light generating unit 40c other than the side surface facing the main magnetic pole 32.
  • the force S can be generated in a state where the near-field light R having high light intensity is localized at the interface between the metal film 43 and the core 40 without being influenced by the physical design. Therefore, further high density recording can be achieved.
  • the metal film 43 is formed on only one of the three side surfaces of the near-field light generating unit 40c, it is easier to make compared with the case where the metal film 43 is formed on two or three side surfaces.
  • a groove 41b that exposes the side surface of the near-field light generating part 40c is formed in the clad 41, and the near field through the groove 41b.
  • the main magnetic pole 32 may be provided with a protruding portion 32a that contacts the side surface of the light generating portion 40c.
  • the force S can be as close as possible to the position where the near-field light R is generated and the position where the recording magnetic field is generated. Therefore, the near-field light R and the recording magnetic field can be made to cooperate more efficiently, and this can be dealt with by high-density recording.
  • the protrusion 32a when the protrusion 32a is provided, as shown in FIGS. 20 and 21, when the light-shielding film 42 is formed between the protrusion 32a and the side surface of the near-field light generator 40c. More preferred. By doing so, the near-field light R can be intensively generated in the vicinity of the projecting portion 32a, so that higher density recording can be achieved.
  • the protrusion 32a is provided, as shown in FIGS. 22 and 23, it is formed on the side surface facing the main magnetic pole 32 among the three side surfaces of the near-field light generating unit 40c.
  • the light shielding film is preferably a metal film 43 as in the case shown in FIGS.
  • the light beam L collected by the light beam condensing unit 40b is incident on the metal film 43 at the resonance angle ⁇ , and surface plasmon is excited on the surface of the metal film 43 by the energy of the light beam L.
  • the angle of the side surface of the near-field light generating unit 40c on which the metal film 43 is formed may be adjusted.
  • the incident angle ⁇ (a straight line perpendicular to the surface of the metal film P2
  • the reflected light intensity changes according to the angle formed with the light L1. This is because the energy of light L1 is used to excite surface plasmons.
  • the reflected light intensity is detected by changing the incident angle, there is an incident angle at which the reflected light intensity is minimized. This is because the energy of light L1 is most utilized for excitation of surface plasmons.
  • the incident angle at which the reflected light intensity is minimized is generally referred to as the resonance angle.
  • surface plasmon can be excited most efficiently by making the light beam L collected by the light beam condensing unit 40b enter the metal film 43 at the resonance angle ⁇ . It is possible to generate near-field light R with higher efficiency and higher light intensity.
  • the light flux L introduced into the core 40 is gradually condensed while being reflected on the side surface of the core 40, and is gradually condensed and is advanced to the end face 40d.
  • the direction to go is determined. That is, when the core 40 is designed, it is possible to grasp how the main component of the light flux L propagates through the core 40 while proceeding. Therefore, as shown in FIG. 24, the angle of the side surface of the near-field light generating unit 40c may be adjusted so that the main component of the light beam L is incident on the metal film 43 at the resonance angle ⁇ .
  • the metal film 43 is designed to partially overlap the clad 41, good.
  • the light beam L is incident on the metal film 43 at the resonance angle ⁇ , so that the surface plasmon is efficiently excited. Only the dielectric thin film is adsorbed on the metal film P2 of the prism P1.
  • the resonance angle ⁇ changes at. Therefore, as shown in FIG. 27, the metal film 43 and the clad 41 are partially overlapped so that the resonance angle ⁇ Can be adjusted in degrees. Therefore, even in the case shown in FIG. 27, it becomes possible to make the collected light beam L incident on the metal film 43 at the resonance angle ⁇ , and similarly, the near-field light R having a higher light intensity is more efficiently used. It can be generated well.
  • the shield film 44 shown in FIGS. 29 and 30 may be provided between the metal film 43 and the protruding portion 32a. I do not care.
  • the shield film 44 blocks at least one of the electrical connection or the magnetic connection between the protrusion 42a and the metal film 43. In this way, it is possible to use the near-field light assisted magnetic recording method that more effectively collaborates the near-field light R and the recording magnetic field to achieve the ability to record information.
  • the air floating type information recording / reproducing apparatus 1 in which the near-field optical head 2 is levitated has been described as an example.
  • the present invention is not limited to this and is directed to the disk surface D1.
  • the disk D and the slider 20 may be in contact with each other. That is, the near-field optical head 2 according to the present invention may be a contact slider type head! / Even in this case, the same effects can be achieved.
  • the near-field light generating element of the present invention the light beam introduced from one end side of the core can be efficiently converted into near-field light, and the near-field light is externally transmitted from the other end side. Power S can be generated.
  • the ability to generate near-field light efficiently regardless of the direction in which the light flux is introduced can be used, making it easy to handle and convenient. Therefore, it can be easily used for various devices that require near-field light, and the degree of design freedom can be improved.
  • the near-field light head since the near-field light generating element described above is provided, the writing reliability can be improved and the quality can be improved.
  • the light beam introduction means can be arranged without being influenced by the direction in which the light beam is introduced, it is possible to make the design compact.
  • the light guide loss can be reduced as much as possible.
  • Each component is prevented from overlapping in the thickness direction of the slider as much as possible.
  • the near-field optical head described above since the near-field optical head described above is provided, it is possible to cope with high-density recording with high writing reliability, and to achieve high quality. Power S can be. At the same time, the thickness can be reduced.

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  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
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  • Manufacturing & Machinery (AREA)
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Abstract

A proximity field light generation element (22) includes a polyhedral core (40) and a clad (41) for covering the core in such a manner that the clad is in contact with the side surfaces of the core (40). The polyhedral core (40) has: a reflection surface (40a) for reflecting a light flux (L) in a direction different from the direction of introduction; a light flux collecting unit (40b) which is narrow-molded into such a shape that a cross sectional area orthogonally intersecting the longitudinal direction from one end to the other end is gradually reduced so as to collect the reflected light flux to propagate to the other end side; and a proximity field light generation unit (40c) which is further narrow-molded from the end of the light flux collecting unit to the other end side so as to generate a proximity field light (R) from the collected light and emit it outside from the other end side. An end surface (40d) has a size not greater than the wavelength of the light and the side surface of the proximity field light generation unit is shaded by a light-shading film (42).

Description

明 細 書  Specification

近接場光発生素子、近接場光ヘッド及び情報記録再生装置  Near-field light generating element, near-field light head, and information recording / reproducing apparatus

技術分野  Technical field

[0001] 本発明は、導入された光束を集光して該光束から近接場光を発生させる近接場光 発生素子、該近接場光発生素子により発生された近接場光を利用して磁気記録媒 体に各種の情報を超高密度で記録する近接場光ヘッド及び該近接場光ヘッドを有 する情報記録再生装置に関するものである。  The present invention relates to a near-field light generating element that condenses an introduced light beam and generates near-field light from the light beam, and magnetic recording using the near-field light generated by the near-field light generating element The present invention relates to a near-field optical head for recording various kinds of information on a medium at an ultra-high density and an information recording / reproducing apparatus having the near-field optical head.

背景技術  Background art

[0002] 近年、コンピュータ機器におけるハードディスク等の容量増加に伴い、単一記録面 内における情報の記録密度が増加している。例えば、磁気ディスクの単位面積当たり の記録容量を多くするためには、面記録密度を高くする必要がある。ところ力 記録 密度が高くなるにつれて、記録媒体上で 1ビット当たりの占める記録面積が小さくなつ ている。このビットサイズが小さくなると、 1ビットの情報が持つエネルギー力 室温の 熱エネルギーに近くなり、記録した情報が熱揺らぎ等のために反転したり、消えてし まったりする等の熱減磁の問題が生じてしまう。  In recent years, the recording density of information within a single recording surface has increased with an increase in the capacity of hard disks and the like in computer equipment. For example, in order to increase the recording capacity per unit area of the magnetic disk, it is necessary to increase the surface recording density. However, as the force recording density increases, the recording area occupied by one bit on the recording medium decreases. When this bit size is reduced, the energy power of 1-bit information is close to the thermal energy at room temperature, and the recorded demagnetization problem may be reversed or lost due to thermal fluctuations. It will occur.

[0003] 一般的に用いられてきた面内記録方式では、磁化の方向が記録媒体の面内方向 に向くように磁気を記録する方式である力 この方式では上述した熱減磁による記録 情報の消失等が起こり易い。そこで、このような不具合を解消するために、記録媒体 に対して垂直な方向に磁化信号を記録する垂直記録方式に移行しつつある。この方 式は、記録媒体に対して、単磁極を近づける原理で磁気情報を記録する方式である 。この方式によれば、記録磁界が記録膜に対してほぼ垂直な方向を向く。垂直な磁 界で記録された情報は、記録膜面内において N極と S極とがループを作り難いため、 エネルギー的に安定を保ち易い。そのため、この垂直記録方式は、面内記録方式に 対して熱減磁に強くなつて!/、る。  In a generally used in-plane recording method, force is a method for recording magnetism so that the direction of magnetization is in the in-plane direction of the recording medium. In this method, the recording information by thermal demagnetization described above is recorded. Disappearance is likely to occur. Therefore, in order to solve such a problem, a shift is being made to a perpendicular recording method in which a magnetization signal is recorded in a direction perpendicular to the recording medium. This method is a method for recording magnetic information on the principle of bringing a single magnetic pole closer to a recording medium. According to this method, the recording magnetic field is directed substantially perpendicular to the recording film. Information recorded in a perpendicular magnetic field is easy to maintain in energy stability because it is difficult for the N and S poles to form a loop in the recording film plane. Therefore, this perpendicular recording method is more resistant to thermal demagnetization than the in-plane recording method!

[0004] しかしながら、近年の記録媒体は、より大量且つ高密度情報の記録再生を行いた い等のニーズを受けて、さらなる高密度化が求められている。そのため、隣り合う磁区 同士の影響や、熱揺らぎを最小限に抑えるために、保磁力の強いものが記録媒体と して採用され始めている。そのため、上述した垂直記録方式であっても、記録媒体に 情報を記録することが困難になっていた。 [0004] However, recent recording media are required to have higher density in response to the need to record and reproduce a larger amount of high-density information. Therefore, in order to minimize the influence of adjacent magnetic domains and thermal fluctuations, a recording medium with a strong coercive force is used. Has begun to be adopted. Therefore, it has been difficult to record information on a recording medium even with the above-described perpendicular recording method.

[0005] そこで、この不具合を解消するために、近接場光により磁区を局所的に加熱して一 時的に保磁力を低下させ、その間に書き込みを行うハイブリッド磁気記録方式 (近接 場光アシスト磁気記録方式)が提供されている。このハイブリッド磁気記録方式は、微 小領域と、近接場光ヘッドに形成された光の波長以下のサイズに形成された光学的 開口との相互作用により発生する近接場光を利用する方式である。このように、光の 回折限界を超えた微小な光学的開口、即ち、近接場光発生素子を有する近接場光 ヘッドを利用することで、従来の光学系において限界とされていた光の波長以下とな る領域における光学情報を扱うことが可能となる。よって、従来の光情報記録再生装 置等を超える記録ビットの高密度化を図ることができる。  [0005] Therefore, in order to solve this problem, a hybrid magnetic recording method (near-field light assisted magnetism) in which the magnetic domain is locally heated by near-field light to temporarily reduce the coercive force and writing is performed during that time. Recording system). This hybrid magnetic recording system uses near-field light generated by the interaction between a microscopic area and an optical aperture formed in a size smaller than the wavelength of the light formed in the near-field optical head. In this way, by using a small optical aperture that exceeds the diffraction limit of light, that is, a near-field optical head having a near-field light generating element, it is less than the wavelength of light that has been limited by conventional optical systems. It is possible to handle the optical information in the area. Therefore, it is possible to increase the density of recording bits exceeding the conventional optical information recording / reproducing apparatus.

[0006] なお、近接場光発生素子は、上述した光学的微小開口によるものだけでなぐ例え ば、ナノメートルサイズに形成された突起部により構成しても構わない。この突起部に よっても、光学的微小開口と同様に近接場光を発生させることができる。  [0006] Note that the near-field light generating element may be constituted by a protrusion formed in a nanometer size, for example, not only by the above-described optical micro-aperture. This projection can also generate near-field light as in the case of the optical minute aperture.

[0007] 上述したハイブリッド磁気記録方式による記録ヘッドとしては、各種のものが提供さ れているが、その 1つとして、光スポットのサイズを縮小して記録密度の増大化を図つ た近接場光ヘッドが知られている(例えば、特開 2004— 158067号及び特開 2005 4901号参照)。  [0007] Various types of recording heads using the hybrid magnetic recording system described above are provided, and one of them is a near-field in which the recording density is increased by reducing the size of the light spot. Optical heads are known (see, for example, JP 2004-158067 and JP 2005 4901).

[0008] この近接場光ヘッドは、主に主磁極と、補助磁極と、螺旋状の導体パターンが絶縁 体の内部に形成されたコイル巻線と、照射されたレーザ光から近接場光を発生させ る金属散乱体と、金属散乱体に向けてレーザ光を照射する平面レーザ光源と、照射 されたレーザ光を集束させるレンズとを備えている。これら各構成品は、ビームの先 端に固定されたスライダの側面に取り付けられている。  [0008] This near-field optical head generates near-field light mainly from a main magnetic pole, an auxiliary magnetic pole, a coil winding in which a helical conductor pattern is formed inside an insulator, and irradiated laser light. A metal scatterer to be irradiated, a planar laser light source for irradiating the metal scatterer with laser light, and a lens for focusing the irradiated laser light. Each of these components is attached to the side surface of a slider fixed to the front end of the beam.

[0009] 主磁極は、一端側が記録媒体に対向した面となっており、他端側が補助磁極に接 続されている。つまり、主磁極及び補助磁極は、 1本の磁極(単磁極)を垂直方向に 配置した単磁極型垂直ヘッドを構成している。また、コイル巻線は、磁極と補助磁極 との間を一部が通過するように補助磁極に固定されている。これら磁極、補助磁極及 びコイル巻線は、全体として電磁石を構成して!/、る。 [0010] 主磁極の先端には、金等からなる上記金属散乱体が取り付けられて!/、る。また、金 属散乱体から離間した位置に上記平面レーザ光源が配置されると共に、該平面レー ザ光源と金属散乱体との間に上記レンズが配置されている。 [0009] The main magnetic pole has one end facing the recording medium and the other end connected to the auxiliary magnetic pole. In other words, the main magnetic pole and the auxiliary magnetic pole constitute a single magnetic pole type vertical head in which one magnetic pole (single magnetic pole) is arranged in the vertical direction. The coil winding is fixed to the auxiliary magnetic pole so that part of the coil winding passes between the magnetic pole and the auxiliary magnetic pole. These magnetic poles, auxiliary magnetic poles, and coil windings constitute an electromagnet as a whole! [0010] The metal scatterer made of gold or the like is attached to the tip of the main pole! The planar laser light source is disposed at a position separated from the metal scatterer, and the lens is disposed between the planar laser light source and the metal scatterer.

[0011] 上述した各構成品は、スライダの側面側から、補助磁極、コイル巻線、主磁極、金 属散乱体、レンズ、平面レーザ光源の順に取り付けられている。  Each component described above is attached in the order of the auxiliary magnetic pole, the coil winding, the main magnetic pole, the metal scatterer, the lens, and the planar laser light source from the side surface side of the slider.

[0012] このように構成された近接場光ヘッドを利用する場合には、近接場光を発生させる と同時に記録磁界を印加することで、記録媒体に各種の情報を記録して!/、る。  [0012] When the near-field light head configured as described above is used, various information can be recorded on the recording medium by generating a near-field light and simultaneously applying a recording magnetic field! .

[0013] 即ち、平面レーザ光源からレーザ光を照射させる。このレーザ光は、レンズによって 集光され、金属散乱体に照射される。すると金属散乱体は、内部の自由電子がレー ザ光の電場によって一様に振動させられるのでプラズモンが励起されて先端部分に 近接場光を発生させる。その結果、記録媒体の磁気記録層は、近接場光によって局 所的に加熱され、一時的に保磁力が低下する。  That is, laser light is emitted from a planar laser light source. This laser light is collected by a lens and irradiated onto a metal scatterer. Then, in the metal scatterer, the free electrons inside are uniformly oscillated by the electric field of the laser beam, so that the plasmon is excited to generate near-field light at the tip. As a result, the magnetic recording layer of the recording medium is locally heated by near-field light, and the coercive force temporarily decreases.

[0014] また、上記レーザ光の照射と同時に、コイル巻線の導体パターンに駆動電流を供 給することで、主磁極に近接する記録媒体の磁気記録層に対して記録磁界を局所 的に印加する。これにより、保磁力が一時的に低下した磁気記録層に各種の情報を 記録すること力 Sできる。つまり、近接場光と磁場との協働により、記録媒体への記録を fiうこと力 Sでさる。  [0014] Simultaneously with the laser light irradiation, a recording magnetic field is locally applied to the magnetic recording layer of the recording medium adjacent to the main pole by supplying a driving current to the conductor pattern of the coil winding. To do. As a result, it is possible to record various information on the magnetic recording layer whose coercive force is temporarily reduced. In other words, with the cooperation of near-field light and magnetic field, the recording force on the recording medium is controlled by the force S.

特許文献 1:特開 2004 _ 158067号公報  Patent Document 1: Japanese Patent Application Laid-Open No. 2004_158067

特許文献 2 :特開 2005— 4901号公報  Patent Document 2: JP 2005-4901

発明の開示  Disclosure of the invention

発明が解決しょうとする課題  Problems to be solved by the invention

[0015] しかしながら、上述した従来の近接場光ヘッドには、まだ以下の課題が残されてい た。 However, the conventional near-field optical head described above still has the following problems.

[0016] 即ち、情報の記録に不可欠な近接場光を発生させる際に、平面レーザ光源からレ ンズを介して金属散乱体にレーザ光を照射させている。ところ力 主磁極の先端に金 属散乱体が取り付けられているので、平面レーザ光源からレーザ光を斜めに照射せ ざるを得なかった。よって、金属散乱体に沿ってレーザ光を入射させることができず、 レーザ光が途中で散乱等により損失してしまい、近接場光を効率良く発生させること が難しかった。特に、金属散乱体は、導入された光の向きを意図的に変えることがで きるものではないので、上述したようにレーザ光を斜めに照射して金属散乱体に入射 せざるを得なかった。 That is, when generating near-field light indispensable for recording information, a laser beam is irradiated from a planar laser light source to the metal scatterer via the lens. However, since a metal scatterer was attached to the tip of the force main pole, it was inevitable to irradiate laser light obliquely from a planar laser light source. Therefore, the laser beam cannot be incident along the metal scatterer, and the laser beam is lost due to scattering or the like on the way, and the near-field light is generated efficiently. It was difficult. In particular, since the metal scatterer cannot intentionally change the direction of the introduced light, it has been forced to irradiate the laser beam obliquely and enter the metal scatterer as described above. .

[0017] また、記録媒体への干渉を考慮しながら、平面レーザ光源と金属散乱体との間にレ ンズを配置する必要があるので、半円形状のものを使用している。そのため、レーザ 光を効率良く金属散乱体に集光することが難しかった。このことも、近接場光の発生 効率の低下を招く要因であった。  [0017] In addition, since it is necessary to dispose a lens between the planar laser light source and the metal scatterer in consideration of interference with the recording medium, a semicircular one is used. Therefore, it is difficult to efficiently focus the laser beam on the metal scatterer. This was also a factor in reducing the generation efficiency of near-field light.

課題を解決するための手段  Means for solving the problem

[0018] 本発明は、このような事情に考慮してなされたもので、その目的は、導入された光束 の向きを変えながら集光して該光束力 近接場光を効率良く発生させることができる 近接場光発生素子、該近接場光発生素子を有する近接場光ヘッド及び該近接場光 ヘッドを有する情報記録再生装置を提供することである。 [0018] The present invention has been made in view of such circumstances, and an object of the present invention is to efficiently collect near-field light by collecting light flux while changing the direction of the introduced light flux. It is possible to provide a near-field light generating element, a near-field light head having the near-field light generating element, and an information recording / reproducing apparatus having the near-field light head.

[0019] 本発明は、前記課題を解決するために以下の手段を提供する。 The present invention provides the following means in order to solve the above problems.

[0020] 本発明に係る近接場光発生素子は、一端側に導入された光束を導入方向とは異 なる方向で他端側に集光しながら伝播すると共に、近接場光に生成した後に外部に 発する近接場光発生素子であって、導入された前記光束を導入方向とは異なる方向 に反射させる反射面と、前記一端側から前記他端側に向かう長手方向に直交する断 面積が漸次減少するように絞り成形され、反射された前記光束を集光させながら他 端側に向けて伝播させる光束集光部と、該光束集光部の端部から前記他端側に向 けてさらに絞り成形され、集光された前記光束から前記近接場光を生成して他端側 力、ら外部に向けて発する近接場光生成部と、を有する多面体のコアと、該コアよりも 屈折率が低レ、材料で形成され、コアの他端側を外部に露出させた状態でコアの側面 に密着してコアを内部に閉じ込めるクラッドとを有し、前記近接場光生成部が、前記 他端側で外部に露出する端面が光の波長以下のサイズとされ、少なくとも 1つの側面 が遮光膜によって遮光されていることを特徴とするものである。 [0020] The near-field light generating element according to the present invention propagates the light beam introduced to one end side while condensing to the other end side in a direction different from the introduction direction, and generates the near-field light after generating the near-field light. A near-field light generating element that emits light at a reflection surface that reflects the introduced light flux in a direction different from the introduction direction, and a cross-sectional area perpendicular to the longitudinal direction from the one end side toward the other end side is gradually reduced. A light beam condensing unit that condenses and reflects the reflected light beam and propagates it toward the other end side, and further stops the end of the light beam condensing unit from the end to the other end side. A polyhedral core having a near-field light generating unit that generates the near-field light from the shaped and condensed light flux and emits the other-side force toward the outside, and has a refractive index higher than that of the core. In a state of being made of a low level material and with the other end of the core exposed to the outside The near-field light generating part has an end face exposed to the outside on the other end side having a size equal to or smaller than the wavelength of light, and has at least one side face. Is shielded from light by a light shielding film.

[0021] この発明に係る近接場光発生素子においては、反射面、光束集光部及び近接場 光生成部により一体的に形成された多面体のコアと、該コアを内部に閉じ込めるクラ ッドとを有しており、一端側からコアの内部に導入された光束を他端側から近接場光 として外] ¾に発すること力 Sでさる。 [0021] In the near-field light generating element according to the present invention, a polyhedral core formed integrally by the reflecting surface, the light beam condensing unit, and the near-field light generating unit, and a cladding for confining the core inside The near-field light from the other end side is introduced into the core from one end side. As outside] ¾ to be emitted by ¾.

[0022] クラッドは、コアよりも屈折率が低い材料によりコアの側面に密着するように形成され ており、コアとの間に隙間が生じないようにコアを閉じ込めている。ここで、一端側から コアの内部に光束を導入すると、該光束は反射面で反射されて向きが変わる。即ち、 導入方向とは異なる方向に向きが変化する。そして、向きが変化した光束は、光束集 光部によって一端側から他端側に向けてコアの内部を伝播する。  [0022] The clad is formed so as to be in close contact with the side surface of the core by a material having a refractive index lower than that of the core, and confines the core so that no gap is formed between the clad and the core. Here, when a light beam is introduced into the core from one end side, the light beam is reflected by the reflecting surface and changes its direction. That is, the direction changes in a direction different from the introduction direction. The light flux whose direction has been changed propagates in the core from one end side to the other end side by the light flux collecting section.

[0023] この際、光束集光部は、一端側から他端側に向かう長手方向に直交する断面積が 漸次減少するように絞り成形されている。そのため、光束はこの光束集光部を通過す る際に、側面で反射を繰り返しながら徐々に集光されてコアの内部を伝播していく。 特に、コアの側面にはクラッドが密着しているので、コアの外部に光が漏れることなく 、導入された光束を無駄にすることなく絞りながら他端側に伝播させることができる。  [0023] At this time, the light beam condensing part is drawn so that the cross-sectional area perpendicular to the longitudinal direction from one end side to the other end side gradually decreases. Therefore, when the light beam passes through the light beam condensing portion, it is gradually condensed while repeating reflection on the side surface and propagates inside the core. In particular, since the clad is in close contact with the side surface of the core, light does not leak to the outside of the core, and the introduced light beam can be propagated to the other end side without being wasted.

[0024] そして、光束集光部の端部まで伝播された光束は、続いて近接場光生成部に入射 する。この近接場光生成部は、他端側に向けてさらに絞り成形されており、他端側で 外部に露出する端面が光の波長以下のサイズ (光の回析限界を超えた微小なサイズ )となっている。し力、も、この近接場光生成部の側面のうち少なくとも 1つの側面が遮 光膜によって遮光されている。よって、近接場光生成部に入射した光束を、クラッド側 に漏らすことなく端面に向けて伝播させることができる。そのため、近接場光を生成す ること力 Sでさ、端面力、ら外 ¾に発すること力 Sでさる。  Then, the light beam propagated to the end of the light beam condensing unit is incident on the near-field light generating unit. This near-field light generating part is further drawn toward the other end, and the end face exposed to the outside at the other end is a size smaller than the wavelength of light (a minute size exceeding the light diffraction limit). It has become. However, at least one of the side surfaces of the near-field light generator is shielded by the light shielding film. Therefore, the light beam incident on the near-field light generating part can be propagated toward the end face without leaking to the clad side. Therefore, the force S that generates near-field light is the force S that is emitted from the edge surface force.

[0025] 上述したように、コアの一端側から導入させた光束を近接場光に変換することがで きると共に、他端側からこの近接場光を外部に発することができる。また、導入された 光束を反射面で反射させて他端側に向けて自由に向きを変えることができるので、ど の方向から光束が導入されても該光束を他端側から確実に近接場光として発生させ ること力 Sできる。更には、光束集光部と近接場光生成部とがー体的に形成されている ので、従来のレンズと金属散乱体とのように両者の位置合わせが不要である。  As described above, the light beam introduced from one end side of the core can be converted into near-field light, and the near-field light can be emitted to the outside from the other end side. In addition, since the introduced light beam can be reflected by the reflecting surface and freely redirected toward the other end side, the light beam can be reliably introduced from the other end side in the near field regardless of the direction from which the light beam is introduced. The power S can be generated as light. Furthermore, since the light beam condensing part and the near-field light generating part are formed in a body-like manner, it is not necessary to align the positions as in the conventional lens and metal scatterer.

[0026] これらのこと力、ら、近接場光発生素子を近接場光が必要な各種のデバイスに容易 に用いることができ、設計の自由度を向上することができる。特に、光束の導入方向 に関係なぐ効率良く近接場光を発生させることができるので、扱い易く利便性に優 れている。 [0027] また、本発明に係る近接場光発生素子は、上記本発明の近接場光発生素子にお いて、前記クラッド力 前記コアの一端側を外部に露出させた状態で形成されている ことを特 ί毁とするものである。 [0026] Because of these factors, the near-field light generating element can be easily used in various devices that require near-field light, and the degree of freedom in design can be improved. In particular, since near-field light can be generated efficiently regardless of the direction of light flux introduction, it is easy to handle and excellent in convenience. [0027] Further, the near-field light generating element according to the present invention is the near-field light generating element of the present invention, wherein the cladding force is formed with one end side of the core exposed to the outside. Is a special feature.

[0028] この発明に係る近接場光発生素子においては、クラッドがコアの一端側を外部に露 出させた状態で形成されているので、クラッドを介さずに直接コアに光束を導入する ことができると共に、より効率良く近接場光に変換して端面から外部に発することがで きる。  In the near-field light generating element according to the present invention, since the clad is formed in a state where one end side of the core is exposed to the outside, it is possible to directly introduce the light flux into the core without passing through the clad. In addition, it can be converted into near-field light more efficiently and emitted from the end face to the outside.

[0029] また、本発明に係る近接場光発生素子は、上記本発明の近接場光発生素子にお いて、前記近接場光生成部が、前記他端側における所定長さが前記端面と同じサイ ズでストレート状に成形されていることを特徴とするものである。  [0029] Further, in the near-field light generating element according to the present invention, in the near-field light generating element of the present invention, the near-field light generating unit has a predetermined length on the other end side that is the same as the end face. It is characterized by being shaped into a straight shape.

[0030] この発明に係る近接場光発生素子においては、近接場光生成部が光束集光部の 端部から端面に亘つて絞り成形されているのではなぐ他端側における所定長さが端 面と同じサイズでストレート状に成形されている。よって、近接場光発生素子の製造 過程において、コア及びクラッドの他端側をダイシングして端面を形成する際に、多 少のダイシング誤差が生じたり、絞り成形誤差が生じていたりしていても、端面のサイ ズを常に同じにすることができる。従って、近接場光発生素子を大量に製造したとし ても、各近接場光発生素子のばらつき(個体差)をなくすことができ、同じ品質のもの を安定して製造すること力できる。よって、歩留まりを向上することができる。  [0030] In the near-field light generating element according to the present invention, the predetermined length on the other end side is not the end where the near-field light generating unit is not drawn from the end of the light beam condensing unit to the end surface. It is formed in a straight shape with the same size as the surface. Therefore, in the manufacturing process of the near-field light generating element, when the end surface is formed by dicing the other end side of the core and the clad, even if a small dicing error or a draw forming error occurs. The end face size can always be the same. Therefore, even if a large number of near-field light generating elements are manufactured, variations (individual differences) among the near-field light generating elements can be eliminated, and the same quality can be stably manufactured. Therefore, the yield can be improved.

[0031] また、本発明に係る近接場光発生素子は、上記本発明のいずれかの近接場光発 生素子において、前記近接場光生成部の全ての側面が、前記遮光膜によって遮光 されて!/、ることを特 ί毁とするあのである。  [0031] Further, in the near-field light generating element according to the present invention, in the near-field light generating element of any of the above-described present invention, all side surfaces of the near-field light generating unit are shielded from light by the light-shielding film. ! /, That is special.

[0032] この発明に係る近接場発生素子においては、近接場光生成部の全ての側面が遮 光膜によって遮光されているので、近接場光生成部に入射した光束がクラッド側に漏 れることがない。よって、光束の損失を最小限に抑えることができ、より効率良く近接 場光を生成することができる。  In the near-field generating element according to the present invention, since all the side surfaces of the near-field light generating unit are shielded by the light shielding film, the light beam incident on the near-field light generating unit leaks to the cladding side. There is no. Therefore, loss of light flux can be minimized, and near-field light can be generated more efficiently.

[0033] また、本発明に係る近接場光発生素子は、上記本発明の近接場光発生素子にお いて、前記遮光膜が、前記近接場光の光強度を増加させる金属膜であることを特徴 とするあのである。 [0034] この発明に係る近接場発生素子においては、より光強度の強い近接場光を発生さ せること力 Sできる。つまり、光束集光部で集光された光束は、近接場光生成部で金属 膜に入射する。すると、この金属膜には表面プラズモンが励起される。励起された表 面プラズモンは、共鳴効果によって増強されながら金属膜とコアとの界面を端面に向 力、つて伝播する。そして、端面に達した時点で、光強度の強い近接場光となって外部 に漏れ出す。特に、金属膜とコアとの界面に光強度の強い近接場光を発生させること ができるので、端面の設計サイズ自体に直接影響を受けることがない。つまり、端面 のサイズをより微細化する等の作りこみを行わなくても、これら物理的な設計に影響さ れることなぐ光強度の強い近接場光を確実に発生させることができる。 [0033] In the near-field light generating element according to the present invention, in the near-field light generating element of the present invention, the light shielding film is a metal film that increases the light intensity of the near-field light. It is that characteristic. In the near-field generating element according to the present invention, it is possible to generate a force S that generates near-field light having a higher light intensity. That is, the light beam collected by the light beam condensing unit is incident on the metal film by the near-field light generating unit. Then, surface plasmons are excited in this metal film. The excited surface plasmon propagates through the interface between the metal film and the core toward the end face while being enhanced by the resonance effect. And when it reaches the end face, it becomes near-field light with strong light intensity and leaks outside. In particular, since near-field light having a high light intensity can be generated at the interface between the metal film and the core, it is not directly affected by the design size of the end face itself. In other words, it is possible to reliably generate near-field light with a high light intensity that is not affected by the physical design, without having to make the end face size finer.

[0035] また、本発明に係る近接場光発生素子は、上記本発明の近接場光発生素子にお いて、前記金属膜が設けられている前記近接場光生成部の側面が、前記光束集光 部で集光された前記光束が共鳴角度で前記金属膜に入射されて、該光束のェネル ギ一で表面プラズモンが励起されるように角度調整されていることを特徴とするもので ある。  [0035] Further, in the near-field light generating element according to the present invention, in the near-field light generating element of the present invention described above, the side surface of the near-field light generating portion provided with the metal film has the light flux collecting portion. The angle is adjusted so that the light beam condensed by the optical part is incident on the metal film at a resonance angle and the surface plasmon is excited by the energy of the light beam.

[0036] この発明に係る近接場光発生素子においては、光束集光部で集光された光束を、 光のエネルギーが最も表面プラズモンの励起に利用される共鳴角度で金属膜に入 射させること力 Sできる。従って、最も効率良く表面プラス 'モンを励起することができ、よ り効率良ぐし力、もさらに強い光強度の近接場光を発生させることができる。よって、さ らなる高密度記録化を図ることができる。  In the near-field light generating element according to the present invention, the light beam condensed by the light beam condensing unit is incident on the metal film at a resonance angle at which the light energy is most utilized for excitation of the surface plasmon. Power S can be. Therefore, the surface plasmon can be excited most efficiently, and near-field light having a higher combing force and a higher light intensity can be generated. Therefore, further high density recording can be achieved.

[0037] また、本発明に係る近接場光ヘッドは、一定方向に回転する磁気記録媒体を加熱 すると共に、磁気記録媒体に対して垂直方向の記録磁界を与えることで磁化反転を 生じさせ、情報を記録させる近接場光ヘッドであって、前記磁気記録媒体の表面に 対向配置されたスライダと、該スライダの先端面に固定された補助磁極と、磁気回路 を介して前記補助磁極に接続され、前記記録磁界を補助磁極との間で発生させる主 磁極と、前記情報に応じて変調された電流が供給され、前記磁気回路の周囲を螺旋 状に巻回するコイルと、前記他端側を前記磁気記録媒体側に向けた状態で前記主 磁極に隣接して固定された、上記本発明のいずれかの近接場光発生素子と、前記ス ライダに対して平行に配置された状態で該スライダに固定され、前記一端側から前記 コア内に前記光束を導入させる光束導入手段とを備え、前記近接場光生成部が、前 記主磁極の近傍に前記近接場光を発生させることを特徴とするものである。 [0037] Further, the near-field optical head according to the present invention heats the magnetic recording medium rotating in a certain direction and applies a recording magnetic field in the perpendicular direction to the magnetic recording medium, thereby causing magnetization reversal and information. A near-field optical head for recording a magnetic recording medium, a slider disposed opposite to the surface of the magnetic recording medium, an auxiliary magnetic pole fixed to the front end surface of the slider, and connected to the auxiliary magnetic pole via a magnetic circuit, A main magnetic pole that generates the recording magnetic field with the auxiliary magnetic pole, a coil that is supplied with a current modulated according to the information, and spirally wound around the magnetic circuit, and the other end side of the coil The near-field light generating element according to any one of the present invention, which is fixed adjacent to the main magnetic pole in a state facing the magnetic recording medium, and the slider arranged in parallel to the slider. Fixed and said one end It said from A light beam introducing means for introducing the light beam into the core, and the near-field light generating unit generates the near-field light in the vicinity of the main magnetic pole.

[0038] この発明に係る近接場光ヘッドにおいては、近接場光発生素子により発生した近 接場光と、両磁極で発生した記録磁界とを協働させた近接場光アシスト磁気記録方 式により、回転する磁気記録媒体に対して情報の記録を行うことができる。  In the near-field light head according to the present invention, the near-field light assisted magnetic recording method in which the near-field light generated by the near-field light generating element and the recording magnetic field generated by both magnetic poles cooperate with each other. Information can be recorded on the rotating magnetic recording medium.

[0039] まず、スライダは、磁気記録媒体の表面に対向した状態で配置されている。そして、 このスライダの先端面に補助磁極が固定されていると共に、該補助磁極に磁気回路 を介して主磁極が接続されている。さらにこの主磁極に隣接して近接場光発生素子 が固定されている。つまり、スライダの先端面には、スライダ側から順に、補助磁極、 磁気回路、主磁極、近接場光発生素子が配置されている。  [0039] First, the slider is arranged in a state of facing the surface of the magnetic recording medium. An auxiliary magnetic pole is fixed to the front end surface of the slider, and a main magnetic pole is connected to the auxiliary magnetic pole via a magnetic circuit. Furthermore, a near-field light generating element is fixed adjacent to the main magnetic pole. That is, an auxiliary magnetic pole, a magnetic circuit, a main magnetic pole, and a near-field light generating element are arranged in this order from the slider side on the front end surface of the slider.

[0040] また、近接場光発生素子は、近接場光が発生する他端側が磁気記録媒体側に向 けた状態で固定されている。よって、光束が導入される一端側が、磁気記録媒体から 離間した位置に向いている。そして、この一端側にスライダに固定された光束導入手 段が接続されている。  In addition, the near-field light generating element is fixed in a state where the other end side where the near-field light is generated faces the magnetic recording medium side. Therefore, one end side where the light flux is introduced is directed to a position away from the magnetic recording medium. A light beam introducing means fixed to the slider is connected to one end side.

[0041] ここで記録を行う場合には、光束導入手段から光束をコア内に導入する。この際、 スライダに対して平行な方向に光束を導入することができる。すると、導入された光束 は、反射面により向きが略 90度曲げられた後、磁気記録媒体側に位置する他端側 に向かって光束集光部で集光されながら伝播する。そして、近接場光生成部によつ て近接場光となり、端面から外部に漏れ出す。この近接場光によって磁気記録媒体 は、局所的に加熱されて一時的に保磁力が低下する。特に近接場光生成部は、近 接場光を主磁極の近傍で発生させるので、主磁極にできるだけ近!、位置で磁気記 録媒体の保磁力を低下させることができる。  [0041] When recording is performed here, the light beam is introduced into the core from the light beam introducing means. At this time, the light beam can be introduced in a direction parallel to the slider. Then, the introduced light beam is bent by approximately 90 degrees by the reflecting surface, and then propagates while being condensed by the light beam condensing unit toward the other end side located on the magnetic recording medium side. Then, near-field light is generated by the near-field light generation unit and leaks from the end face to the outside. The near-field light locally heats the magnetic recording medium and temporarily reduces the coercive force. In particular, the near-field light generator generates near-field light in the vicinity of the main magnetic pole, so that the coercivity of the magnetic recording medium can be reduced at a position as close as possible to the main magnetic pole.

[0042] 一方、上記光束の導入と同時に、記録する情報に応じて変調した電流をコイルに 供給する。すると電磁石の原理により、電流磁界が磁気回路内に磁束を発生させる ので、主磁極と補助磁極との間に磁気記録媒体に対して垂直方向の記録磁界を発 生させること力 Sできる。具体的には、主磁極から発生した磁束が、磁気記録媒体に対 して垂直に流れると共に、磁気記録媒体を経由した後に補助磁極に戻ってくる。これ により、近接場光によって保磁力が低下した磁気記録媒体の局所的な位置に対して ピンポイントで記録磁界を作用させることができる。なお、この記録磁界は、記録する 情報に応じて向きが反転する。 On the other hand, simultaneously with the introduction of the light flux, a current modulated according to information to be recorded is supplied to the coil. Then, due to the electromagnet principle, the current magnetic field generates a magnetic flux in the magnetic circuit, so that a force S can be generated between the main magnetic pole and the auxiliary magnetic pole in a direction perpendicular to the magnetic recording medium. Specifically, the magnetic flux generated from the main magnetic pole flows perpendicularly to the magnetic recording medium and returns to the auxiliary magnetic pole after passing through the magnetic recording medium. As a result, the local position of the magnetic recording medium whose coercive force is reduced by near-field light is reduced. A recording magnetic field can be applied at a pinpoint. Note that the direction of this recording magnetic field is reversed according to the information to be recorded.

[0043] そして、磁気記録媒体は、記録磁界を受けると該記録磁界の方向に応じて磁化の 方向が垂直方向に反転する。その結果、情報の記録を行うことができる。つまり、近 接場光と記録磁界とを協働させた近接場光アシスト磁気記録方式により情報の記録 を行うこと力 Sできる。また、垂直磁気記録方式で記録を行うので、熱揺らぎの現象を受 け難く、書き込みの信頼性が高い安定した記録を行うことができる。  Then, when the magnetic recording medium receives a recording magnetic field, the magnetization direction is reversed in the vertical direction in accordance with the direction of the recording magnetic field. As a result, information can be recorded. In other words, it is possible to record information by the near-field light assisted magnetic recording method in which the near-field light and the recording magnetic field cooperate. In addition, since recording is performed by the perpendicular magnetic recording method, it is difficult to receive the phenomenon of thermal fluctuation, and stable recording with high writing reliability can be performed.

[0044] 特に、主磁極の近傍で磁気記録媒体の保磁力を低下させることができるので、記 録磁界が局所的に作用する位置に加熱温度のピーク位置を入れることができる。従 つて、より確実に記録を行うことができると共に高密度記録を可能にすることができる  [0044] In particular, since the coercive force of the magnetic recording medium can be reduced in the vicinity of the main magnetic pole, the peak position of the heating temperature can be set at a position where the recording magnetic field acts locally. Therefore, recording can be performed more reliably and high-density recording can be realized.

[0045] また、近接場光を効率良く発生することができる近接場光発生素子を備えているの で、近接場光ヘッド自体の書き込みの信頼性を高めることができ、高品質化を図るこ と力 Sできる。また、どの方向から光束が導入されても該光束を他端側から近接場光と して発生させる近接場光発生素子でもあるので、スライダに平行に光束導入手段を 配置したとしても、該光束導入手段からの光束を主磁極の近傍で近接場光にするこ とができる。このように、光束の導入方向に影響されずに光束導入手段を配置できる ので、近接場光ヘッドの設計をコンパクトにすることができる。しかも従来の光の入れ 方とは異なり、光束を空中伝播させる必要がないので、導光損失を極力低下させるこ と力 Sできる。 [0045] Further, since the near-field light generating element capable of efficiently generating near-field light is provided, the writing reliability of the near-field light head itself can be improved, and the quality can be improved. And force S. Further, since it is also a near-field light generating element that generates the light beam as near-field light from the other end side regardless of the direction from which the light beam is introduced, even if the light beam introducing means is arranged in parallel with the slider, the light beam The light beam from the introducing means can be made near-field light in the vicinity of the main magnetic pole. As described above, since the light beam introducing means can be arranged without being influenced by the direction of introducing the light beam, the design of the near-field optical head can be made compact. In addition, unlike the conventional way of entering light, there is no need to propagate the light beam in the air, so the light guide loss can be reduced as much as possible.

[0046] 更に、スライダの先端面に、順に補助磁極、主磁極や近接場光発生素子等を配置 しているので、光束導入手段以外の各構成品がスライダの厚み方向に重なることを 極力防止している。従って、近接場光ヘッド自体の薄型化を図ることができる。  [0046] Further, since the auxiliary magnetic pole, the main magnetic pole, the near-field light generating element, and the like are sequentially arranged on the leading end surface of the slider, it is possible to prevent as much as possible that each component other than the light beam introducing means overlaps in the slider thickness direction. is doing. Therefore, the near-field optical head itself can be thinned.

[0047] また、本発明に係る近接場光ヘッドは、上記本発明の近接場光ヘッドにおレ、て、前 記クラッドには、前記近接場光生成部の側面を露出させる溝部が形成されており、前 記主磁極力 S、前記溝部を介して前記近接場光生成部の側面に接触する突出部を有 して!/ヽることを特 ί毁とするあのである。  [0047] Further, in the near-field optical head according to the present invention, a groove that exposes a side surface of the near-field light generating unit is formed in the clad in the near-field optical head of the present invention. In particular, the main magnetic pole force S and the protruding portion that comes into contact with the side surface of the near-field light generating portion through the groove portion are provided.

[0048] この発明に係る近接場光ヘッドにお!/、ては、主磁極がクラッドに形成された溝部を 介して近接場光生成部の側面に接触する突出部を有しているので、近接場光が発 生する位置と記録磁界が発生する位置とを極力近づけることができる。従って、より効 率良く近接場光と記録磁界とを協働させることができ、高密度記録化により対応する こと力 Sでさる。 [0048] In the near-field optical head according to the present invention, the groove portion in which the main magnetic pole is formed in the cladding is provided. Since the projecting portion is in contact with the side surface of the near-field light generating portion, the position where the near-field light is generated and the position where the recording magnetic field is generated can be made as close as possible. Accordingly, the near-field light and the recording magnetic field can be made to cooperate more efficiently, and the force S can cope with the higher density recording.

[0049] また、本発明に係る近接場光ヘッドは、上記本発明の近接場光ヘッドにおレ、て、前 記突出部と前記近接場光生成部の側面との間に、前記遮光膜が形成されていること を特徴とするものである。  [0049] Further, the near-field optical head according to the present invention is the near-field optical head according to the present invention, wherein the light-shielding film is disposed between the protrusion and the side surface of the near-field light generating unit. Is formed.

[0050] この発明に係る近接場光ヘッドにおいては、突出部と近接場光生成部の側面との 間に遮光膜が形成されているので、突出部の近傍により集中的に近接場光を発生 すること力 Sできる。よって、さらなる高密度記録ィ匕を図ること力 Sできる。  [0050] In the near-field light head according to the present invention, since the light shielding film is formed between the protrusion and the side surface of the near-field light generator, near-field light is generated more concentrated near the protrusion. The power to do S. Therefore, it is possible to achieve further high density recording.

[0051] また、本発明に係る近接場光ヘッドは、上記本発明の接場光ヘッドにおいて、前記 突出部と前記遮光膜との間には、両者の電気的又は磁気的な繋がりのうち、すくなく とも!/、ずれか一方の繋がりを遮断するシールド膜が形成されて!/、ることを特徴とする ものである。  [0051] Further, the near-field optical head according to the present invention is the above-described contact-field optical head according to the present invention, wherein the protruding portion and the light-shielding film are electrically or magnetically connected. At least! /, A shield film that cuts off one of the connections is formed! /.

[0052] この発明に係る近接場光ヘッドにおいては、近接場光と記録磁界とをより効果的に 協働させた近接場光アシスト磁気記録方式により情報の記録を行うことができる。  In the near-field light head according to the present invention, information can be recorded by a near-field light-assisted magnetic recording method in which near-field light and a recording magnetic field are more effectively collaborated.

[0053] また、本発明に係る情報記録再生装置は、上記本発明の!/、ずれかの近接場光へッ ドと、前記磁気記録媒体の表面に平行な方向に移動可能とされ、該磁気記録媒体の 表面に平行で且つ互いに直交する 2軸回りに回動自在な状態で、前記近接場光へ ッドを先端側で支持するビームと、前記光束導入手段に対して前記光束を入射させ る光源と、前記ビームの基端側を支持すると共に、該ビームを前記磁気記録媒体の 表面に平行な方向に向けて移動させるァクチユエータと、前記磁気記録媒体を前記 一定方向に回転させる回転駆動部と、前記コイルに前記電流を供給すると共に前記 光源の作動を制御する制御部とを備えていることを特徴とするものである。  [0053] Also, the information recording / reproducing apparatus according to the present invention is movable in the direction parallel to the surface of the magnetic recording medium and the! / A beam that supports the near-field light head on the tip side in a state of being rotatable about two axes that are parallel to the surface of the magnetic recording medium and perpendicular to each other, and the light beam is incident on the light beam introducing means A light source, an actuator for supporting the base end side of the beam and moving the beam in a direction parallel to the surface of the magnetic recording medium, and a rotational drive for rotating the magnetic recording medium in the fixed direction And a controller for supplying the current to the coil and controlling the operation of the light source.

[0054] この発明に係る情報記録再生装置にお!/、ては、回転駆動部により磁気記録媒体を 一定方向に回転させた後、ァクチユエータによりビームを移動させて近接場光ヘッド をスキャンさせる。そして、近接場光ヘッドを磁気記録媒体上の所望する位置に配置 させる。この際、近接場光ヘッドは、磁気記録媒体の表面に平行で且つ互いに直交 する 2軸回りに回動自在な状態、即ち、 2軸を中心として捻れることができるようにビー ムに支持されている。よって、磁気記録媒体にうねりが生じたとしても、うねりに起因す る風圧変化、又は、直接伝わってくるうねりの変化を捩じりによって吸収でき、近接場 光ヘッドの姿勢を安定にすることができる。 In the information recording / reproducing apparatus according to the present invention, after rotating the magnetic recording medium in a certain direction by the rotation drive unit, the beam is moved by the actuator to scan the near-field optical head. Then, the near-field optical head is arranged at a desired position on the magnetic recording medium. At this time, the near-field optical heads are parallel to the surface of the magnetic recording medium and orthogonal to each other. It is supported by the beam so that it can rotate about two axes, that is, it can be twisted about the two axes. Therefore, even if waviness occurs in the magnetic recording medium, changes in wind pressure due to waviness or waviness directly transmitted can be absorbed by twisting, and the attitude of the near-field optical head can be stabilized. it can.

[0055] その後、制御部は光源を作動させると共に、情報に応じて変調した電流をコイルに 供給する。これにより、近接場光ヘッドは、近接場光と記録磁界とを協働させて、磁気 記録媒体に情報を記録することができる。 [0055] Thereafter, the control unit activates the light source and supplies a current modulated according to the information to the coil. Thereby, the near-field light head can record information on the magnetic recording medium by cooperating the near-field light and the recording magnetic field.

[0056] 特に、上述した近接場光ヘッドを備えているので、書き込みの信頼性が高ぐ高密 度記録化に対応することができ、高品質化を図ることができる。また、同時に薄型化 を図ること力 Sでさる。 [0056] In particular, since the near-field optical head described above is provided, it is possible to cope with high-density recording with high writing reliability, and high quality can be achieved. At the same time, the power S is used to reduce the thickness.

図面の簡単な説明  Brief Description of Drawings

[0057] [図 1]本発明に係る近接場光発生素子を有する近接場光ヘッドを備えた情報記録再 生装置の一実施形態を示す構成図である。  FIG. 1 is a configuration diagram showing an embodiment of an information recording / reproducing apparatus including a near-field light head having a near-field light generating element according to the present invention.

[図 2]図 1に示す近接場光ヘッドの拡大断面図である。  2 is an enlarged cross-sectional view of the near-field optical head shown in FIG.

[図 3]図 2に示す近接場光ヘッドを、ディスク面側から見た図である。  FIG. 3 is a view of the near-field optical head shown in FIG. 2 as viewed from the disk surface side.

[図 4]図 2に示す近接場光ヘッドの流出端側の側面を拡大した断面図であり、近接場 光発生素子及び記録素子の構成を示すと共に、記録を行っている際の近接場光と 磁界との関係を示した図である。  4 is an enlarged cross-sectional view of the side surface on the outflow end side of the near-field light head shown in FIG. 2, showing the configurations of the near-field light generating element and the recording element, and the near-field light during recording. It is the figure which showed the relationship between and a magnetic field.

[図 5]図 4に示す近接場光発生素子のコアを矢印 A方向から見た図である。  FIG. 5 is a view of the core of the near-field light generating element shown in FIG. 4 as viewed from the direction of arrow A.

[図 6]図 5に示すコアの他端側を拡大した図である。  FIG. 6 is an enlarged view of the other end side of the core shown in FIG.

[図 7]図 4に示す近接場光発生素子の他端側を拡大した図である。  7 is an enlarged view of the other end side of the near-field light generating element shown in FIG.

[図 8]図 7に示す近接場光発生素子を端面側から見た図である。  FIG. 8 is a view of the near-field light generating element shown in FIG. 7 as viewed from the end face side.

[図 9]本発明に係る近接場光発生素子の変形例を示す図であって、近接場光生成部 の一部がストレート状に形成されたコアを示す図である。  FIG. 9 is a view showing a modification of the near-field light generating element according to the present invention, and is a view showing a core in which a part of the near-field light generating part is formed in a straight shape.

[図 10]図 9に示すコアを有する近接場光発生素子の断面図である。  10 is a cross-sectional view of the near-field light generating element having the core shown in FIG.

[図 11]図 10に示す近接場光発生素子を端面側から見た図である。  FIG. 11 is a view of the near-field light generating element shown in FIG. 10 as viewed from the end face side.

[図 12]本発明に係る近接場光発生素子の変形例を示す図であって、近接場光生成 部の側面全てに遮光膜が形成されている近接場光発生素子の断面図である。 園 13]図 12に示す近接場光発生素子を端面側から見た図である。 FIG. 12 is a view showing a modification of the near-field light generating element according to the present invention, and is a cross-sectional view of the near-field light generating element in which a light shielding film is formed on all side surfaces of the near-field light generating part. 13] FIG. 13 is a view of the near-field light generating element shown in FIG. 12 as viewed from the end face side.

[図 14]本発明に係る近接場光発生素子の変形例を示す図であって、近接場光生成 部の側面全てに遮光膜が形成されていると共に、遮光膜の 1つが金属膜となってい る近接場光発生素子の断面図である。 FIG. 14 is a diagram showing a modification of the near-field light generating element according to the present invention, in which a light-shielding film is formed on all side surfaces of the near-field light generating unit, and one of the light-shielding films is a metal film. 2 is a cross-sectional view of a near-field light generating element.

園 15]図 14に示す近接場光発生素子を端面側から見た図である。 15] FIG. 15 is a view of the near-field light generating element shown in FIG.

[図 16]本発明に係る近接場光発生素子の変形例を示す図であって、近接場光生成 部の側面の 1つに金属膜が形成されている近接場光発生素子の断面図である。 園 17]図 16に示す近接場光発生素子を端面側から見た図である。  FIG. 16 is a view showing a modification of the near-field light generating element according to the present invention, and is a cross-sectional view of the near-field light generating element in which a metal film is formed on one of the side surfaces of the near-field light generating part. is there. 17] FIG. 17 is a view of the near-field light generating element shown in FIG. 16 as viewed from the end face side.

園 18]本発明に係る近接場光ヘッドの変形例を示す図であって、近接場光生成部の 側面に接触する主磁極を備えた近接場光ヘッドの一部拡大図である。 18] A diagram showing a modification of the near-field light head according to the present invention, and is a partially enlarged view of the near-field light head provided with the main magnetic pole in contact with the side surface of the near-field light generator.

園 19]図 18に示す近接場光ヘッドを端面側から見た図である。 19] FIG. 19 is a view of the near-field optical head shown in FIG. 18 as viewed from the end face side.

[図 20]本発明に係る近接場光ヘッドの変形例を示す図であって、図 18に示す主磁 極と近接場光生成部の側面との間に遮光膜が形成された近接場光ヘッドの一部拡 大図である。  FIG. 20 is a diagram showing a modification of the near-field light head according to the present invention, and a near-field light in which a light shielding film is formed between the main magnetic pole shown in FIG. 18 and the side surface of the near-field light generating unit. It is a partially enlarged view of the head.

園 21]図 20に示す近接場光ヘッドを端面側から見た図である。 En 21] FIG. 21 is a view of the near-field optical head shown in FIG. 20 as viewed from the end surface side.

園 22]本発明に係る近接場光ヘッドの変形例を示す図であって、図 20に示す遮光 膜を金属膜とした近接場光ヘッドの一部拡大図である。 22] A diagram showing a modification of the near-field optical head according to the present invention, and is a partially enlarged view of the near-field optical head using the light shielding film shown in FIG. 20 as a metal film.

園 23]図 22に示す近接場光ヘッドを端面側から見た図である。 En 23] FIG. 23 is a view of the near-field optical head shown in FIG. 22 as viewed from the end surface side.

[図 24]本発明に係る近接場光ヘッドの変形例を示す図であって、図 22に示す金属 膜が形成されている近接場光生成部の側面を角度調整した近接場光ヘッドの一部 拡大図である。  FIG. 24 is a view showing a modification of the near-field light head according to the present invention, and is one of the near-field light heads whose angle is adjusted on the side surface of the near-field light generating part on which the metal film shown in FIG. FIG.

園 25]図 24に示す近接場光ヘッドを端面側から見た図である。 25] FIG. 25 is a view of the near-field optical head shown in FIG. 24 as viewed from the end surface side.

[図 26]表面プラズモンを励起させる光の入射角度と反射光強度との関係を説明する ための図である。  FIG. 26 is a diagram for explaining the relationship between the incident angle of light that excites surface plasmons and the intensity of reflected light.

園 27]本発明に係る近接場光ヘッドの変形例を示す図であって、図 22に示す金属 膜の一部がクラッドと重なっている近接場光ヘッドの一部拡大図である。 FIG. 27 is a diagram showing a modification of the near-field optical head according to the present invention, and is a partially enlarged view of the near-field optical head in which a part of the metal film shown in FIG. 22 overlaps the clad.

園 28]図 27に示す近接場光ヘッドを端面側から見た図である。 En 28] FIG. 28 is a view of the near-field optical head shown in FIG. 27 as viewed from the end surface side.

園 29]本発明に係る近接場光ヘッドの変形例を示す図であって、図 22に示す金属 膜と突出部との間にシールド膜が形成されている近接場光ヘッドの一部拡大図であ 29] A diagram showing a modification of the near-field optical head according to the present invention, wherein the metal shown in FIG. FIG. 4 is a partially enlarged view of a near-field optical head in which a shield film is formed between the film and the protrusion.

[図 30]図 29に示す近接場光ヘッドを端面側から見た図である。 30 is a view of the near-field optical head shown in FIG. 29 as viewed from the end surface side.

発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION

[0058] 以下、本発明に係る近接場光発生素子、近接場光ヘッド及び情報記録再生装置 の一実施形態を、図 1から図 8を参照して説明する。なお、本実施形態の情報記録再 生装置 1は、垂直記録層 d2を有するディスク (磁気記録媒体) Dに対して、垂直記録 方式で書き込みを行う装置である。また、本実施形態では、ディスク Dが回転する空 気の流れを利用して近接場光ヘッド 2を浮かせた空気浮上タイプを例に挙げて説明 する。 Hereinafter, an embodiment of a near-field light generating element, a near-field light head, and an information recording / reproducing apparatus according to the present invention will be described with reference to FIGS. 1 to 8. Note that the information recording / reproducing apparatus 1 of the present embodiment is an apparatus for writing on a disk (magnetic recording medium) D having a perpendicular recording layer d2 by a perpendicular recording method. In the present embodiment, an air floating type in which the near-field optical head 2 is floated using an air flow in which the disk D rotates will be described as an example.

[0059] 本実施形態の情報記録再生装置 1は、図 1に示すように、後述するスポットサイズ変 換器 (近接場光発生素子) 22を有する光近接場光ヘッド 2と、ディスク面 (磁気記録 媒体の表面) D1に平行な XY方向に移動可能とされ、ディスク面 D1に平行で且つ互 いに直交する 2軸 (X軸、 Y軸)回りに回動自在な状態で近接場光ヘッド 2を先端側で 支持するビーム 3と、光導波路 (光束導入手段) 4の基端側から該光導波路 4に対し て光束 Lを入射させる光信号コントローラ(光源) 5と、ビーム 3の基端側を支持すると 共に、該ビーム 3をディスク面 D1に平行な XY方向に向けてスキャン移動させるァク チユエータ 6と、ディスク Dを一定方向に回転させるスピンドルモータ(回転駆動部) 7 と、情報に応じて変調した電流を後述するコイル 33に対して供給すると共に、光信号 コントローラ 5の作動を制御する制御部 8と、これら各構成品を内部に収容するハウジ ング 9とを備えている。  As shown in FIG. 1, the information recording / reproducing apparatus 1 of the present embodiment includes an optical near-field optical head 2 having a spot size converter (near-field light generating element) 22 described later, and a disk surface (magnetic The surface of the recording medium) The near-field optical head is movable in the X and Y directions parallel to D1 and is rotatable about two axes (X axis and Y axis) that are parallel to the disk surface D1 and perpendicular to each other. 2 that supports 2 on the distal end side, an optical signal controller (light source) 5 that makes the light beam L incident on the optical waveguide 4 from the proximal end side of the optical waveguide (flux introducing means) 4, and the proximal end of the beam 3 An actuator 6 that scans and moves the beam 3 in the XY directions parallel to the disk surface D1, a spindle motor (rotary drive unit) 7 that rotates the disk D in a fixed direction, and information. In response to this, a modulated current is supplied to the coil 33 described later. With a control unit 8 for controlling the operation of the optical signal controller 5, and a housings 9 that houses the respective components therein.

[0060] ハウジング 9は、アルミニウム等の金属材料により、上面視四角形状に形成されてい ると共に、内側に各構成品を収容する凹部 9aが形成されている。また、このハウジン グ 9には、凹部 9aの開口を塞ぐように図示しない蓋が着脱可能に固定されるようにな つている。  [0060] The housing 9 is formed of a metal material such as aluminum in a square shape when viewed from above, and a recess 9a for accommodating each component is formed inside. Further, a lid (not shown) is detachably fixed to the housing 9 so as to close the opening of the recess 9a.

[0061] 凹部 9aの略中心には、上記スピンドルモータ 7が取り付けられており、該スピンドル モータ 7に中心孔を嵌め込むことでディスク Dが着脱自在に固定される。凹部 9aの隅 角部には、上記ァクチユエータ 6が取り付けられている。このァクチユエータ 6には、軸 受 10を介してキャリッジ 11が取り付けられており、該キャリッジ 11の先端にビーム 3が 取り付けられている。そして、キャリッジ 11及びビーム 3は、ァクチユエータ 6の駆動に よって共に上記 XY方向に移動可能とされている。 [0061] The spindle motor 7 is attached to the approximate center of the recess 9a, and the disc D is detachably fixed by fitting the center hole into the spindle motor 7. The above-mentioned actuator 6 is attached to the corner of the recess 9a. This actuator 6 has a shaft A carriage 11 is attached via a receiver 10, and a beam 3 is attached to the tip of the carriage 11. The carriage 11 and the beam 3 are both movable in the XY directions by driving the actuator 6.

[0062] なお、キャリッジ 11及びビーム 3は、ディスク Dの回転停止時にァクチユエータ 6の 駆動によって、ディスク D上から退避するようになっている。また、近接場光ヘッド 2と ビーム 3とで、サスペンション 12を構成している。また、光信号コントローラ 5は、ァクチ ユエータ 6に隣接するように凹部 9a内に取り付けられている。そして、このァクチユエ ータ 6に隣接して、上記制御部 8が取り付けられている。  It should be noted that the carriage 11 and the beam 3 are retracted from the disk D by driving the actuator 6 when the rotation of the disk D is stopped. The near-field light head 2 and the beam 3 constitute a suspension 12. The optical signal controller 5 is mounted in the recess 9 a so as to be adjacent to the actuator 6. The controller 8 is attached adjacent to the actuator 6.

[0063] 上記近接場光ヘッド 2は、回転するディスク Dを加熱すると共に、ディスク Dに対して 垂直方向の記録磁界を与えることで磁化反転を生じさせ、情報を記録させるものであ る。この近接場光ヘッド 2は、図 2及び図 3に示すように、ディスク面 D1から所定距離 Hだけ浮上した状態でディスク Dに対向配置され、ディスク面 D1に対向する対向面 2 Oaを有するスライダ 20と、該スライダ 20の先端面(以降、流出端側の側面と表現する )に固定された記録素子 21と、該記録素子 21に隣接して固定されたスポットサイズ変 換器 22と、該スポットサイズ変換器 22の後述するコア 40内に光信号コントローラ 5か らの光束 Lを導入する光導波路 4とを備えている。また、本実施形態の近接場光へッ ド 2は、スポットサイズ変換器 22に隣接して固定された再生素子 23を備えている。  [0063] The near-field optical head 2 heats the rotating disk D and applies a perpendicular recording magnetic field to the disk D to cause magnetization reversal and record information. As shown in FIGS. 2 and 3, the near-field optical head 2 is arranged so as to face the disk D in a state where it floats by a predetermined distance H from the disk surface D1, and has a slider 2 Oa facing the disk surface D1. 20, a recording element 21 fixed to the front end surface of the slider 20 (hereinafter referred to as a side surface on the outflow end side), a spot size converter 22 fixed adjacent to the recording element 21, An optical waveguide 4 for introducing a light beam L from the optical signal controller 5 is provided in a core 40 (to be described later) of the spot size converter 22. Further, the near-field light head 2 of the present embodiment includes a reproducing element 23 fixed adjacent to the spot size converter 22.

[0064] 上記スライダ 20は、石英ガラス等の光透過性材料や、 AlTiC (アルチック)等のセラ ミック等によって直方体状に形成されている。このスライダ 20は、対向面 20aをデイス ク D側にした状態で、ジンバル部 24を介してビーム 3の先端にぶら下がるように支持 されている。このジンバル部 24は、 X軸回り及び Y軸回りにのみ変位するように動きが 規制された部品である。これによりスライダ 20は、上述したようにディスク面 D1に平行 で且つ互いに直交する 2軸(X軸、 Y軸)回りに回動自在とされて!/、る。  [0064] The slider 20 is formed in a rectangular parallelepiped shape using a light-transmitting material such as quartz glass or a ceramic such as AlTiC (altic). The slider 20 is supported so as to hang from the tip of the beam 3 via the gimbal portion 24 with the opposing surface 20a facing the disk D. The gimbal portion 24 is a component whose movement is restricted so as to be displaced only around the X axis and around the Y axis. As a result, the slider 20 can be rotated around two axes (X axis, Y axis) that are parallel to the disk surface D1 and orthogonal to each other as described above.

[0065] スライダ 20の対向面 20aには、回転するディスク Dによって生じた空気流の粘性か ら、浮上するための圧力を発生させる凸条部 20bが形成されている。本実施形態で は、レール状に並ぶように、長手方向に沿って延びた凸条部 20bを 2つ形成している 場合を例にしている。但し、この場合に限定されるものではなぐスライダ 20をディスク 面 D1から離そうとする正圧とスライダ 20をディスク面 D1に引き付けようとする負圧と を調整して、スライダ 20を最適な状態で浮上させるように設計されていれば、どのよう な凹凸形状でも構わない。なお、この凸条部 20bの表面は ABS (Air Bearing Surface )と呼ばれる面とされている。 The opposed surface 20a of the slider 20 is formed with a ridge portion 20b that generates pressure for rising due to the viscosity of the air flow generated by the rotating disk D. In the present embodiment, an example is given in which two ridges 20b extending in the longitudinal direction are formed so as to be arranged in a rail shape. However, not limited to this case, there is a positive pressure for separating the slider 20 from the disk surface D1 and a negative pressure for attracting the slider 20 to the disk surface D1. As long as the slider 20 is designed to float in an optimal state by adjusting the height, any uneven shape may be used. The surface of this ridge portion 20b is a surface called ABS (Air Bearing Surface).

[0066] スライダ 20は、この 2つの凸条部 20bによってディスク面 D1から浮上する力を受け ている。また、ビーム 3は、ディスク面 D1に垂直な Z方向に橈むようになつており、スラ イダ 20の浮上力を吸収している。つまり、スライダ 20は、浮上した際にビーム 3によつ てディスク面 D1側に押さえ付けられる力を受けている。よってスライダ 20は、この両 者の力のバランスによって、上述したようにディスク面 D1から所定距離 H離間した状 態で浮上するようになっている。し力、もスライダ 20は、ジンバル部 24によって X軸回り 及び Y軸回りに回動するようになっているので、常に姿勢が安定した状態で浮上する ようになつている。 [0066] The slider 20 receives a force that rises from the disk surface D1 by the two ridges 20b. In addition, the beam 3 is steeped in the Z direction perpendicular to the disk surface D1, and absorbs the floating force of the slider 20. That is, the slider 20 receives a force pressed by the beam 3 to the disk surface D1 side when it floats. Therefore, the slider 20 floats in a state of being separated from the disk surface D1 by a predetermined distance H as described above due to the balance between the forces of the two. However, since the slider 20 is rotated about the X axis and the Y axis by the gimbal portion 24, the slider 20 always floats in a stable posture.

[0067] なお、ディスク Dの回転に伴って生じる空気流は、スライダ 20の流入端側(ビーム 3 の基端側)から流入した後、 ABSに沿って流れ、スライダ 20の流出端側(ビーム 3の 先端側)から抜けている。  [0067] Note that the air flow generated by the rotation of the disk D flows from the inflow end side (base end side of the beam 3) of the slider 20 and then flows along the ABS, and flows out along the outflow end side of the slider 20 (beam The tip of 3 is missing.

[0068] 上記記録素子 21は、図 4に示すように、スライダ 20の流出端側の側面に固定され た補助磁極 30と、磁気回路 31を介して補助磁極 30に接続され、ディスク Dに対して 垂直な記録磁界を補助磁極 30との間で発生させる主磁極 32と、磁気回路 31を中心 として該磁気回路 31の周囲を螺旋状に巻回するコイル 33とを備えている。つまり、ス ライダ 20の流出端側から順に、補助磁極 30、磁気回路 31、コイル 33、主磁極 32が 配置されている。  As shown in FIG. 4, the recording element 21 is connected to the auxiliary magnetic pole 30 fixed to the side surface on the outflow end side of the slider 20 and the auxiliary magnetic pole 30 via the magnetic circuit 31, and is connected to the disk D. A main magnetic pole 32 that generates a perpendicular recording magnetic field with the auxiliary magnetic pole 30, and a coil 33 that spirally winds around the magnetic circuit 31 around the magnetic circuit 31. That is, the auxiliary magnetic pole 30, the magnetic circuit 31, the coil 33, and the main magnetic pole 32 are arranged in order from the outflow end side of the slider 20.

[0069] 両磁極 30、 32及び磁気回路 31は、磁束密度が高い高飽和磁束密度(Bs)材料( 例えば、 CoNiFe合金、 CoFe合金等)により形成されている。また、コィノレ 33は、ショ ートしないように、隣り合うコイル線間、磁気回路 31との間、両磁極 30、 32との間に 隙間が空くように配置されており、この状態で絶縁体 34によってモールドされている。 そして、コイル 33は、情報に応じて変調された電流が制御部 8から供給されるように なっている。即ち、磁気回路 31及びコイル 33は、全体として電磁石を構成している。 なお、主磁極 32及び補助磁極 30は、ディスク Dに対向する端面がスライダ 20の AB Sと面一となるように設計されている。 [0070] 上記スポットサイズ変換器 22は、図 4及び図 5に示すように、一端側がスライダ 20の 上方側に向くと共に、他端側がディスク D側に向いた状態で、記録素子 21に隣接し て固定されている。より具体的には、主磁極 32に隣接して固定されている。なお、図 5は、後述するコア 40を図 4に示す矢印 A方向から見た図である。 [0069] Both the magnetic poles 30, 32 and the magnetic circuit 31 are formed of a high saturation magnetic flux density (Bs) material (for example, CoNiFe alloy, CoFe alloy, etc.) having a high magnetic flux density. In addition, the coil 33 is arranged so that there is a gap between adjacent coil wires, between the magnetic circuit 31 and between the magnetic poles 30 and 32 so as not to be short-circuited. Molded by 34. The coil 33 is supplied with a current modulated in accordance with information from the control unit 8. That is, the magnetic circuit 31 and the coil 33 constitute an electromagnet as a whole. The main magnetic pole 32 and the auxiliary magnetic pole 30 are designed so that the end surfaces facing the disk D are flush with the ABS of the slider 20. As shown in FIGS. 4 and 5, the spot size converter 22 is adjacent to the recording element 21 with one end side facing the upper side of the slider 20 and the other end side facing the disk D side. Is fixed. More specifically, it is fixed adjacent to the main pole 32. FIG. 5 is a view of a core 40 described later as seen from the direction of arrow A shown in FIG.

[0071] このスポットサイズ変換器 22は、一端側に導入された光束 Lを導入方向とは異なる 方向で他端側に集光しながら伝播すると共に、近接場光 Rに生成した後に外部に発 する素子であって、図 4から図 8に示すように、多面体のコア 40と、該コア 40を内部に 閉じ込めるクラッド 41とから構成されており、全体として略板状に形成されている。  [0071] The spot size converter 22 propagates the light flux L introduced to one end side while condensing to the other end side in a direction different from the introduction direction, and generates the near-field light R and then emits it to the outside. As shown in FIGS. 4 to 8, the element is composed of a polyhedral core 40 and a clad 41 for confining the core 40 therein, and is formed in a substantially plate shape as a whole.

[0072] なお、図 6は図 5に示すコア 40の他端側の拡大図であり、図 7は図 4で示すスポット サイズ変換器 22の他端側の拡大図であり、図 8は図 7に示すスポットサイズ変換器 2 2を端面 40d側から見た図である。  FIG. 6 is an enlarged view of the other end side of the core 40 shown in FIG. 5, FIG. 7 is an enlarged view of the other end side of the spot size converter 22 shown in FIG. 4, and FIG. FIG. 8 is a view of the spot size converter 22 shown in FIG. 7 as viewed from the end face 40d side.

[0073] 上記コア 40は、反射面 40aと、光束集光部 40bと、近接場光生成部 40cとにより一 体的に形成されている。なお、本実施形態では、光束集光部 40b及び近接場光生成 部 40cがそれぞれ 3つの側面を有するように形成されており、そのうちの 1つの側面が 主磁極 32に対向するように配置されるようになって!/、る。  [0073] The core 40 is integrally formed by the reflecting surface 40a, the light beam condensing unit 40b, and the near-field light generating unit 40c. In the present embodiment, the light beam condensing unit 40b and the near-field light generating unit 40c are each formed to have three side surfaces, and one of the side surfaces is arranged to face the main magnetic pole 32. It's like! /

[0074] 反射面 40aは、一端側から光導波路 4によって導入された光束 Lを導入方向とは異 なる方向に反射させている。本実施形態では、光束 Lの向きが略 90度変わるように 反射させている。また、光束集光部 40bは、一端側から他端側に向かう長手方向(Z 方向)に直交する断面積が漸次減少するように絞り成形された部分であり、反射面 4 0aによって反射された光束 Lを集光させながら他端側に向けて伝播させている。つま り光束集光部 40bは、導入された光束 Lのスポットサイズを小さ!/、サイズに絞ることが できるようになつている。  [0074] The reflection surface 40a reflects the light beam L introduced by the optical waveguide 4 from one end side in a direction different from the introduction direction. In the present embodiment, the light beam L is reflected so that the direction of the light beam L changes by approximately 90 degrees. The light beam condensing part 40b is a part formed by drawing so that the cross-sectional area perpendicular to the longitudinal direction (Z direction) from one end side to the other end side is gradually reduced, and is reflected by the reflecting surface 40a. The light beam L is condensed and propagated toward the other end. In other words, the light beam condensing unit 40b can reduce the spot size of the introduced light beam L to a small size.

[0075] 近接場光生成部 40cは、光束集光部 40bの端部から他端側に向けてさらに絞り成 形された部分である。つまり近接場光生成部 40cは、光束集光部 40bによって絞られ たスポットサイズをさらに小さく絞ることができるようになつている。この際、近接場光生 成部 40cは、図 8に示すように、他端側に位置する端面 40dが光の波長以下のサイ ズとなるように絞り成形されている。つまり、端面 40d上で確保できる最大直線長さ L1 1S 光の波長以下となるように設計されている。なお、この光の波長以下のサイズとし ては、 lnmから; mの範囲にすることが好ましぐより好ましくは lnm力、ら 500nmの 範囲である。 [0075] The near-field light generating unit 40c is a portion that is further formed into a diaphragm from the end of the light beam condensing unit 40b toward the other end. That is, the near-field light generation unit 40c can further reduce the spot size narrowed down by the light beam condensing unit 40b. At this time, as shown in FIG. 8, the near-field light generating unit 40c is drawn so that the end face 40d located on the other end side has a size equal to or smaller than the wavelength of light. In other words, the maximum linear length L1 1S that can be secured on the end face 40d is designed to be less than the wavelength of the light. The size of this light is less than the wavelength. In particular, it is preferably in the range of lnm; m, and more preferably in the range of lnm force, 500 nm.

[0076] これにより、スポットサイズを最大直線長さ L1と同程度の大きさ、即ち、直径を約 In mから l ^ m程度(或いは lnmから 500nm程度)に絞ることができ、このサイズの近 接場光 Rとして端面 40dから外部に発することができる。  [0076] As a result, the spot size can be reduced to the same size as the maximum linear length L1, that is, the diameter can be reduced to about In m to l ^ m (or about l nm to 500 nm). It can be emitted from the end face 40d to the outside as the incident light R.

[0077] また、本実施形態では光束集光部 40b及び近接場光生成部 40cが、図 4に示すよ うに、共に主磁極 32側に向けて漸次絞り成形されている。これにより、主磁極 32側に 端面 40dが位置するようになっている。これにより、主磁極 32の近傍に上記サイズの 近接場光 Rを発生させることができるようになつている。なお、本発明でいう「近傍」と は、端面 40dから発生する近接場光 Rの直径と同程度の距離、或いは、それ以下の 距離だけ、主磁極 32から離間した範囲内の領域をいう。よって、本実施形態の場合 は、主磁極 32と近接場光生成部 40cの端面 40dとの距離力 近接場光 Rの直径 (最 大直線長さ L1)と同程度である lnmから l ^ m程度(或いは lnmから 500nm程度) 或いは、それ以下の距離になるように設計されて!/、る。  In the present embodiment, the light beam condensing unit 40b and the near-field light generating unit 40c are both gradually drawn toward the main magnetic pole 32 as shown in FIG. As a result, the end face 40d is positioned on the main magnetic pole 32 side. As a result, the near-field light R having the above size can be generated in the vicinity of the main magnetic pole 32. The term “near” in the present invention refers to a region within a range separated from the main magnetic pole 32 by a distance approximately equal to or less than the diameter of the near-field light R generated from the end face 40d. Therefore, in the present embodiment, the distance force between the main magnetic pole 32 and the end face 40d of the near-field light generator 40c is approximately the same as the diameter (maximum linear length L1) of the near-field light R from lnm to l ^ m It is designed to be a distance (or about lnm to 500nm) or less!

[0078] 上記クラッド 41は、図 4及び図 5に示すように、コア 40よりも屈折率が低い材料で形 成されており、コア 40の側面に密着して、コア 40を内部に閉じ込めている。よって、コ ァ 40とクラッド 41との間に隙間が生じないようになつている。また、本実施形態のクラ ッド 41は、コア 40の一端側と同様に、他端側の端面 40dについても外部に露出させ るように形成されている。  As shown in FIGS. 4 and 5, the clad 41 is formed of a material having a refractive index lower than that of the core 40. The clad 41 is in close contact with the side surface of the core 40 to confine the core 40 inside. Yes. Therefore, there is no gap between the core 40 and the clad 41. Further, the clad 41 of the present embodiment is formed so that the end face 40d on the other end side is also exposed to the outside, like the one end side of the core 40.

[0079] なお、クラッド 41及びコア 40として使用される材料の組み合わせの一例を記載する と、例えば、石英(SiO )でコア 40を形成し、フッ素をドープした石英でクラッド 41を形 成する組み合わせが考えられる。この場合には、光束 Lの波長が 400nmのときに、コ ァ 40の屈折率が 1. 47となり、クラッド 41の屈折率が 1. 47未満となるので好ましい組 み合わせである。また、ゲルマニウムをドープした石英でコア 40を形成し、石英(SiO )でクラッド 41を形成する組み合わせも考えられる。この場合には、光束 Lの波長が 4 OOnmのときに、コア 40の屈折串力 1. 47より大きくなり、クラッド 41の屈折串力 47 となるのでやはり好まし!/、組み合わせである。  [0079] An example of a combination of materials used as the clad 41 and the core 40 is described. For example, a combination in which the core 40 is formed of quartz (SiO 2), and the clad 41 is formed of quartz doped with fluorine. Can be considered. In this case, when the wavelength of the light beam L is 400 nm, the refractive index of the core 40 is 1.47, and the refractive index of the clad 41 is less than 1.47, which is a preferable combination. A combination in which the core 40 is formed of quartz doped with germanium and the cladding 41 is formed of quartz (SiO 2) is also conceivable. In this case, when the wavelength of the light beam L is 4 OOnm, it becomes larger than the refractive skew force 1.47 of the core 40 and becomes the refractive skew force 47 of the clad 41.

[0080] 特に、コア 40とクラッド 41との屈折率差が大きいほど、コア 40内に光束 Lを閉じ込 める力が大きくなるので、コア 40に酸化タンタル (Ta O:波長が 550nmのときに屈 折率が 2. 16)を用い、クラッド 41に石英等を用いて、両者の屈折率差を大きくするこ とがより好ましい。また、赤外領域の光束 Lを利用する場合には、赤外光に対して透 明な材料であるシリコン(Si:屈折率が約 4)でコア 40を形成することも有効である。 [0080] In particular, the larger the refractive index difference between the core 40 and the clad 41, the more confined the light flux L in the core 40. Therefore, the tantalum oxide (TaO: refractive index 2.16 when the wavelength is 550 nm) is used for the core 40 and quartz is used for the clad 41 to increase the difference in refractive index between the two. More preferably. In addition, when the luminous flux L in the infrared region is used, it is also effective to form the core 40 with silicon (Si: refractive index is about 4) which is a material transparent to infrared light.

[0081] また、近接場光生成部 40cの 3つの側面のうち、主磁極 32に対向する 1つの側面を 除く 2面には、光束 Lを遮光する遮光膜 42が形成されている。これにより、近接場光 生成部 40cからクラッド 41側に光束 Lが漏れ出さないようになつている。近接場光生 成部 40cは、この遮光膜 42と上述した絞り成形とによって、光束集光部 40bで集光さ れた光束 Lから近接場光 Rを生成して端面 40dから外部に発することができるように なっている。し力、も、端面 40dが主磁極 32側に形成されているので、近接場光 Rを主 磁極 32の近傍に発生させることができるようになつている。なお、スポットサイズ変換 器 22の端面 40dは、スライダ 20の ABSと面一となるように設計されている。  In addition, a light shielding film 42 that shields the light flux L is formed on two of the three side surfaces of the near-field light generating unit 40c except for one side surface that faces the main magnetic pole 32. This prevents the light flux L from leaking from the near-field light generating unit 40c to the clad 41 side. The near-field light generating unit 40c generates near-field light R from the light beam L collected by the light beam condensing unit 40b and emits it from the end face 40d to the outside by the light shielding film 42 and the above-described aperture forming. It can be done. However, since the end face 40d is formed on the main magnetic pole 32 side, the near-field light R can be generated in the vicinity of the main magnetic pole 32. The end surface 40d of the spot size converter 22 is designed to be flush with the ABS of the slider 20.

[0082] 上記光導波路 4は、図 4及び図 5に示すように、コア 4aとクラッド 4bとからなる 2軸の 導波路であり、コア 4a内を光束 Lが伝播するようになっている。この光導波路 4は、ク ラッド 41に形成された溝部 41a及びスライダ 20の上面に形成された図示しない溝部 内に嵌った状態で固定されている。これにより、光導波路 4は、スライダ 20に対して平 行に配置された状態となってレ、る。  As shown in FIGS. 4 and 5, the optical waveguide 4 is a biaxial waveguide composed of a core 4a and a clad 4b, and the light flux L propagates through the core 4a. The optical waveguide 4 is fixed in a state of being fitted in a groove portion 41 a formed in the clad 41 and a groove portion (not shown) formed in the upper surface of the slider 20. As a result, the optical waveguide 4 is placed in parallel with the slider 20.

[0083] また、光導波路 4の先端は、スポットサイズ変換器 22の一端側に接続されており、 光束 Lをコア 40内に導入している。また、光導波路 4の基端側は、ビーム 3及びキヤリ ッジ 11等を介して光信号コントローラ 5に引き出された後、該光信号コントローラ 5に 接続されている。  Further, the tip end of the optical waveguide 4 is connected to one end side of the spot size converter 22, and the light flux L is introduced into the core 40. Further, the base end side of the optical waveguide 4 is drawn out to the optical signal controller 5 through the beam 3 and the carriage 11 and then connected to the optical signal controller 5.

[0084] なお、図 5に示すように、光導波路 4からコア 40内に導入された光束 Lが反射面 40 aの略中心に入射するように、スポットサイズ変換器 22及び光導波路 4の位置関係が 調整されている。  As shown in FIG. 5, the positions of the spot size converter 22 and the optical waveguide 4 are arranged so that the light beam L introduced from the optical waveguide 4 into the core 40 enters the approximate center of the reflecting surface 40a. The relationship has been adjusted.

[0085] また、上記再生素子 23は、ディスク Dの垂直記録層 d2から漏れ出ている磁界の大 きさに応じて電気抵抗が変換する磁気抵抗効果膜である。この再生素子 23には、図 示しないリード膜等を介して制御部 8からバイアス電流が供給されている。これにより 制御部 8は、ディスク Dから漏れ出た磁界の変化を電圧の変化として検出することで き、この電圧の変化から信号の再生を行うことができるようになつている。 Further, the reproducing element 23 is a magnetoresistive film whose electric resistance is converted according to the magnitude of the magnetic field leaking from the perpendicular recording layer d2 of the disk D. A bias current is supplied to the reproducing element 23 from the control unit 8 via a lead film (not shown). As a result, the control unit 8 detects a change in the magnetic field leaking from the disk D as a change in voltage. The signal can be reproduced from the change in voltage.

[0086] なお、本実施形態のディスク Dは、少なくとも、ディスク面 D1に垂直な方向に磁化 容易軸を有する垂直記録層 d2と、高透磁率材料からなる軟磁性層 d3との 2層で構 成される垂直 2層膜ディスクを使用する。このようなディスク Dとしては、例えば、図 2に 示すように、基板 dl上に、軟磁性層 d3と、中間層 d4と、垂直記録層 d2と、保護層 d5 と、潤滑層 d6とを順に成膜したものを使用する。  Note that the disk D of the present embodiment is composed of at least two layers: a perpendicular recording layer d2 having an easy axis of magnetization in a direction perpendicular to the disk surface D1, and a soft magnetic layer d3 made of a high permeability material. Use vertical double-layer discs. As such a disk D, for example, as shown in FIG. 2, a soft magnetic layer d3, an intermediate layer d4, a perpendicular recording layer d2, a protective layer d5, and a lubricating layer d6 are sequentially formed on a substrate dl. Use the film.

[0087] 基板 dlとしては、例えば、アルミ基板やガラス基板等である。軟磁性層 d3は、高透 磁率層である。中間層 d4は、垂直記録層 d2の結晶制御層である。垂直記録層 d2は 、垂直異方性磁性層となっており、例えば CoCrPt系合金が使用される。保護層 d5 は、垂直記録層 d2を保護するためのもので、例えば DLC (ダイヤモンド'ライク'カー ボン)膜が使用される。潤滑層 d6は、例えば、フッ素系の液体潤滑材が使用される。  [0087] The substrate dl is, for example, an aluminum substrate or a glass substrate. The soft magnetic layer d3 is a high permeability layer. The intermediate layer d4 is a crystal control layer of the perpendicular recording layer d2. The perpendicular recording layer d2 is a perpendicular anisotropic magnetic layer, and for example, a CoCrPt alloy is used. The protective layer d5 is for protecting the perpendicular recording layer d2, and for example, a DLC (diamond “like” carbon) film is used. For the lubrication layer d6, for example, a fluorine-based liquid lubricant is used.

[0088] 次に、このように構成された情報記録再生装置 1により、ディスク Dに各種の情報を 記録再生する場合につ!/、て以下に説明する。  Next, the case where various kinds of information is recorded / reproduced on / from the disk D by the information recording / reproducing apparatus 1 configured as described above will be described below.

[0089] まず、スピンドルモータ 7を駆動させてディスク Dを一定方向に回転させる。次いで、 ァクチユエータ 6を作動させて、キャリッジ 11を介してビーム 3を XY方向にスキャンさ せる。これにより、図 1に示すように、ディスク D上の所望する位置に近接場光ヘッド 2 を位置させること力 Sできる。この際、近接場光ヘッド 2は、スライダ 20の対向面 20aに 形成された 2つの凸条部 20bによって浮上する力を受けると共に、ビーム 3等によつ てディスク D側に所定の力で押さえ付けられる。近接場光ヘッド 2は、この両者の力の ノ ランスによって、図 2に示すようにディスク D上から所定距離 H離間した位置に浮上 する。  [0089] First, the spindle motor 7 is driven to rotate the disk D in a certain direction. Next, the actuator 6 is actuated to scan the beam 3 in the XY directions via the carriage 11. As a result, as shown in FIG. 1, a force S for positioning the near-field optical head 2 at a desired position on the disk D can be achieved. At this time, the near-field optical head 2 receives a force that rises by the two ridges 20b formed on the opposing surface 20a of the slider 20, and is pressed against the disk D side with a predetermined force by the beam 3 or the like. Attached. The near-field optical head 2 floats to a position separated from the disk D by a predetermined distance H as shown in FIG.

[0090] また、近接場光ヘッド 2は、ディスク Dのうねりに起因して発生する風圧を受けたとし ても、ビーム 3によって Z方向の変位が吸収されると共に、ジンバル部 24によって XY 軸回りに変位することができるようになっているので、うねりに起因する風圧を吸収す ること力 Sできる。そのため、近接場光ヘッド 2を安定した状態で浮上させることができる  In addition, even when the near-field optical head 2 receives wind pressure generated due to the undulation of the disk D, the displacement in the Z direction is absorbed by the beam 3 and the gimbal portion 24 rotates around the XY axis. Therefore, it is possible to absorb the wind pressure caused by the swell. Therefore, the near-field optical head 2 can be floated in a stable state.

[0091] ここで、情報の記録を行う場合、制御部 8は光信号コントローラ 5を作動させると共に 、情報に応じて変調した電流をコイル 33に供給する。 [0092] まず、光信号コントローラ 5は、制御部 8からの指示を受けて光束 Lを光導波路 4の 基端側から入射させる。入射した光束 Lは、光導波路 4のコア 4a内を先端側に向かつ て進み、図 4に示すように、スポットサイズ変換器 22の一端側からコア 40内に導入さ れる。この際光束 Lは、スライダ 20に対して平行な方向でコア 40内に導入される。す ると、導入された光束 Lは、反射面 40aで反射されて向きが略 90度変わる。即ち、導 入方向とは異なる方向に向きが変化する。そして、向きが変わった光束 Lは、ディスク D側に位置する他端側に向かって光束集光部 40bで集光されながら伝播して近接 場光生成部 40cに入射する。 Here, when recording information, the control unit 8 operates the optical signal controller 5 and supplies a current modulated in accordance with the information to the coil 33. First, in response to an instruction from the control unit 8, the optical signal controller 5 causes the light beam L to enter from the proximal end side of the optical waveguide 4. The incident light beam L travels toward the front end side in the core 4a of the optical waveguide 4 and is introduced into the core 40 from one end side of the spot size converter 22, as shown in FIG. At this time, the light beam L is introduced into the core 40 in a direction parallel to the slider 20. Then, the introduced light beam L is reflected by the reflecting surface 40a and changes its direction by approximately 90 degrees. That is, the direction changes in a direction different from the introduction direction. Then, the light beam L whose direction has changed is propagated while being collected by the light beam condensing unit 40b toward the other end side located on the disk D side, and is incident on the near-field light generating unit 40c.

[0093] この際、光束集光部 40bは、一端側から他端側に向力、う長手方向に直交する断面 積が漸次減少するように絞り成形されている。そのため、光束 Lはこの光束集光部 40 bを通過する際に、側面で反射を繰り返しながら徐々に集光されてコア 40の内部を 伝播していく。特に、コア 40の側面にはクラッド 41が密着しているので、コア 40の外 部に光が漏れることなぐ導入された光束 Lを無駄にすることなく絞りながら他端側に 伝揚させること力 Sでさる。  [0093] At this time, the light beam condensing part 40b is drawn so that the direction force from one end side to the other end side and the cross-sectional area perpendicular to the longitudinal direction gradually decrease. Therefore, when the light beam L passes through the light beam condensing part 40b, it is gradually condensed while being reflected on the side surface and propagates inside the core 40. In particular, since the clad 41 is in close contact with the side surface of the core 40, it is possible to propagate the introduced light flux L to the other end side without losing the introduced light flux L without leaking light to the outside of the core 40. Touch with S.

[0094] そして、光束集光部 40bの端部まで伝播された光束 Lは、続!/、て近接場光生成部 4 0cに入射する。この近接場光生成部 40cは、他端側に向けてさらに絞り成形されて おり、端面 40dが光の波長以下のサイズとされている。し力、も、近接場光生成部 40c の 2つの側面は、遮光膜 42によって遮光されている。よって、近接場光生成部 40cに 入射した光束 Lを、クラッド 41側に漏らすことなく端面 40dに向けて伝播させることが できる。そのため、近接場光 Rを生成することができ、該近接場光 Rを端面 40dから外 に発することカでさる。  Then, the light beam L propagated to the end of the light beam condensing unit 40b is incident on the near-field light generating unit 40c. The near-field light generation unit 40c is further drawn toward the other end, and the end surface 40d has a size equal to or smaller than the light wavelength. However, the two side surfaces of the near-field light generating unit 40c are shielded from light by the light shielding film 42. Therefore, the light beam L incident on the near-field light generating unit 40c can be propagated toward the end face 40d without leaking to the clad 41 side. Therefore, the near-field light R can be generated, and the near-field light R is emitted from the end face 40d.

[0095] この近接場光 Rによって、ディスク Dは局所的に加熱されて一時的に保磁力が低下 する。特に、近接場光生成部 40cは、この近接場光 Rを主磁極 32の近傍、即ち、主 磁極 32から近接場光 Rの直径と同程度の距離だけ離間した範囲内に発生させるの で、主磁極 32にできるだけ近い位置でディスク Dの保磁力を低下させることができる  The near-field light R causes the disk D to be heated locally, and the coercive force is temporarily reduced. In particular, the near-field light generation unit 40c generates the near-field light R in the vicinity of the main magnetic pole 32, that is, in a range separated from the main magnetic pole 32 by a distance approximately equal to the diameter of the near-field light R. The coercive force of disk D can be reduced as close as possible to the main pole 32.

[0096] 一方、制御部 8によってコイル 33に電流が供給されると、電磁石の原理により電流 磁界が磁気回路 31内に磁界を発生させるので、主磁極 32と補助磁極 30との間にデ イスク Dに対して垂直方向の記録磁界を発生させることができる。すると、主磁極 32 側から発生した磁束が、図 4に示すように、ディスク Dの垂直記録層 d2を真直ぐ通り 抜けて軟磁性層 d3に達する。これによつて、垂直記録層 d2の磁化をディスク面 D1に 対して垂直に向けた状態で記録を行うことができる。また、軟磁性層 d3に達した磁束 は、該軟磁性層 d3を経由して補助磁極 30に戻る。この際、補助磁極 30に戻るときに は磁化の方向に影響を与えることはない。これは、ディスク面 D1に対向する補助磁 極 30の面積力 主磁極 32よりも大き!/、ので磁束密度が大きく磁化を反転させるほど の力が生じないためである。つまり、主磁極 32側でのみ記録を行うことができる。 On the other hand, when a current is supplied to the coil 33 by the control unit 8, the current magnetic field generates a magnetic field in the magnetic circuit 31 according to the principle of the electromagnet, so that the demagnetization between the main magnetic pole 32 and the auxiliary magnetic pole 30 occurs. A recording magnetic field perpendicular to the disk D can be generated. Then, the magnetic flux generated from the main magnetic pole 32 side passes straight through the perpendicular recording layer d2 of the disk D and reaches the soft magnetic layer d3 as shown in FIG. As a result, recording can be performed in a state in which the magnetization of the perpendicular recording layer d2 is directed perpendicular to the disk surface D1. Further, the magnetic flux reaching the soft magnetic layer d3 returns to the auxiliary magnetic pole 30 via the soft magnetic layer d3. At this time, when returning to the auxiliary magnetic pole 30, the direction of magnetization is not affected. This is because the area force of the auxiliary magnetic pole 30 facing the disk surface D1 is larger than the main magnetic pole 32, so that the magnetic flux density is large and a force sufficient to reverse the magnetization does not occur. That is, recording can be performed only on the main magnetic pole 32 side.

[0097] その結果、近接場光 Rと両磁極 30、 32で発生した記録磁界とを協働させた近接場 光アシスト磁気記録方式により情報の記録を行うことができる。しかも垂直記録方式 で記録を行うので、熱揺らぎ現象等の影響を受け難ぐ安定した記録を行うことができ る。よって、書き込みの信頼性を高めることができる。  As a result, information can be recorded by a near-field light assisted magnetic recording method in which the near-field light R and the recording magnetic fields generated by the magnetic poles 30 and 32 cooperate with each other. In addition, since recording is performed by the perpendicular recording method, stable recording that is hardly affected by the thermal fluctuation phenomenon or the like can be performed. Therefore, writing reliability can be improved.

[0098] 特に、主磁極 32の近傍でディスク Dの保磁力を低下させることができるので、記録 磁界が局所的に作用する位置に加熱温度のピーク位置を入れることができる。従つ て、確実に記録を行うことができ、信頼性の向上化を図ることができると共に高密度 記録ィ匕を図ること力 Sでさる。  In particular, since the coercive force of the disk D can be reduced in the vicinity of the main magnetic pole 32, the peak position of the heating temperature can be set at a position where the recording magnetic field acts locally. Therefore, recording can be performed reliably, reliability can be improved, and high density recording can be achieved with the power S.

[0099] 次に、ディスク Dに記録された情報を再生する場合には、スポットサイズ変換器 22 に隣接して固定されている再生素子 23が、ディスク Dの垂直記録層 d2から漏れ出て いる磁界を受けて、その大きさに応じて電気抵抗が変化する。よって、再生素子 23の 電圧が変化する。これにより制御部 8は、ディスク Dから漏れ出た磁界の変化を電圧 の変化として検出することができる。そして制御部 8は、この電圧の変化から信号の再 生を行うことで、情報の再生を行うことができる。  Next, when reproducing the information recorded on the disc D, the reproducing element 23 fixed adjacent to the spot size converter 22 leaks from the perpendicular recording layer d2 of the disc D. In response to a magnetic field, the electrical resistance changes according to the magnitude. Therefore, the voltage of the reproducing element 23 changes. As a result, the control unit 8 can detect a change in the magnetic field leaking from the disk D as a change in voltage. The control unit 8 can reproduce information by reproducing the signal from the change in voltage.

[0100] 上述したように、本実施形態の近接場光ヘッド 2は、近接場光 Rを効率良く発生す ることができるスポットサイズ変換器 22を備えて!/、るので、近接場光ヘッド 2自体の書 き込みの信頼性を高めることができ、高品質化を図ることができる。しかも、本実施形 態では、コア 40の一端側及び他端側の端面 40dを外部に露出させた状態でクラッド 41が形成されているので、該クラッド 41を介さずに直接コア 40に光束 Lを導入するこ とができると共に、より効率良く近接場光 Rに変換して端面 40dから外部に発すること ができる。 [0100] As described above, the near-field optical head 2 of the present embodiment includes the spot size converter 22 that can generate the near-field light R efficiently! 2 The reliability of writing itself can be improved and the quality can be improved. In addition, in the present embodiment, the clad 41 is formed with the end face 40d on one end side and the other end side of the core 40 exposed to the outside, so that the light flux L is directly applied to the core 40 without passing through the clad 41. Can be introduced, and more efficiently converted to near-field light R and emitted from the end face 40d to the outside. Can do.

[0101] 特に、このスポットサイズ変換器 22は、導入された光束 Lを反射面 40aで反射させ て自由に向きを変えることができるので、スライダ 20に平行に光導波路 4を配置して も、該光導波路 4からの光束 Lを主磁極 32の近傍で近接場光 Rにすることができる。 よって、光束 Lの導入方向に影響されずに光導波路 4を配置できる。従って、近接場 光ヘッド 2の設計をコンパクトにすることができる。しかも従来の光の入れ方とは異なり 、光束 Lを空中伝播させる必要がないので、導光損失を極力低下させることができる 。更に、スライダ 20の流出端側の側面に、順に記録素子 21、スポットサイズ変換器 2 2及び再生素子 23を配置しているので、光導波路 4以外の各構成品がスライダ 20の 厚み方向に重なることを防止している。従って、近接場光ヘッド 2自体の薄型化を図 ること力 Sでさる。  [0101] In particular, since the spot size converter 22 can freely change the direction of the introduced light beam L by reflecting it with the reflecting surface 40a, even if the optical waveguide 4 is arranged parallel to the slider 20, The light beam L from the optical waveguide 4 can be converted into near-field light R in the vicinity of the main magnetic pole 32. Therefore, the optical waveguide 4 can be arranged without being affected by the direction in which the light flux L is introduced. Therefore, the design of the near-field optical head 2 can be made compact. Moreover, unlike the conventional way of entering light, it is not necessary to propagate the light beam L in the air, so that the light guide loss can be reduced as much as possible. Furthermore, since the recording element 21, the spot size converter 22 and the reproducing element 23 are arranged in this order on the side surface on the outflow end side of the slider 20, each component other than the optical waveguide 4 overlaps in the thickness direction of the slider 20. To prevent that. Therefore, it is possible to reduce the thickness of the near-field optical head 2 itself with the force S.

[0102] また、本実施形態の近接場光ヘッド 2を製造する場合には、フォトリソグラフィ技術 及びエッチング加工技術等の半導体技術を利用して製造を行うことができる。つまり [0102] Further, when the near-field optical head 2 of the present embodiment is manufactured, it can be manufactured by using a semiconductor technology such as a photolithography technology and an etching processing technology. That is

、スポットサイズ変換器 22を有している場合であっても、特別な手法を用いずに、従 来の製造プロセスの流れの中でスポットサイズ変換器 22も同時に作りこむことができ Even if the spot size converter 22 is provided, the spot size converter 22 can be created at the same time in the flow of the conventional manufacturing process without using a special method.

[0103] 具体的に説明すると、スライダ 20を所定の外形形状に加工した後、該スライダ 20の 流出端側の側面に上記半導体技術を利用して記録素子 21を作りこむ。次いで、この 記録素子 21上に同様に半導体技術を利用して、スポットサイズ変換器 22を作りこむ 。そして最後に、スポットサイズ変換器 22上に再生素子 23を作りこめば良い。このよう に、スライダ 20側から順々に各構成品を作りこむ途中で、スポットサイズ変換器 22の 製造工程を一工程追加するだけで、容易に近接場光ヘッド 2を製造することができる More specifically, after the slider 20 is processed into a predetermined outer shape, the recording element 21 is formed on the side surface on the outflow end side of the slider 20 using the semiconductor technology. Next, a spot size converter 22 is formed on the recording element 21 in the same manner using semiconductor technology. Finally, the reproducing element 23 may be built on the spot size converter 22. As described above, the near-field optical head 2 can be easily manufactured by adding only one manufacturing process of the spot size converter 22 in the course of manufacturing each component in order from the slider 20 side.

[0104] なお、スポットサイズ変換器 22を製造する際には、まず、主磁極 32上にクラッド 41 を成膜する。この際、後に光導波路 4を一端側に接続させるために、クラッド 41に溝 部 41 aが形成されるようにパターユングする。次いで、このクラッド 41上にコア 40を凸 状に成膜した後、適宜エッチングを行って反射面 40a、光束集光部 40b及び近接場 光生成部 40cをそれぞれ形成する。次いで、近接場光生成部 40cの側面上に遮光 膜 42を成膜する。次いで、コア 40を内部に閉じ込めるように再度クラッド 41を成膜す る。そして、最後にクラッド 41の外形形状が所定の形になるように加工する。この際、 スポットサイズ変換器 22の他端側をダイシング等で切断加工することで、端面 40dを 形成すること力できる。このように半導体技術を利用して、容易にスポットサイズ変換 器 22を製造すること力 Sできる。 Note that when manufacturing the spot size converter 22, first, the cladding 41 is formed on the main magnetic pole 32. At this time, in order to connect the optical waveguide 4 to one end side later, the clad 41 is patterned so that the groove 41a is formed. Next, after the core 40 is formed in a convex shape on the clad 41, etching is performed as appropriate to form the reflecting surface 40a, the light beam condensing unit 40b, and the near-field light generating unit 40c. Next, light is blocked on the side surface of the near-field light generating unit 40c. A film 42 is formed. Next, the clad 41 is formed again so as to confine the core 40 inside. Finally, the outer shape of the clad 41 is processed into a predetermined shape. At this time, the end face 40d can be formed by cutting the other end side of the spot size converter 22 by dicing or the like. In this way, it is possible to easily manufacture the spot size converter 22 using semiconductor technology.

[0105] また、本実施形態の情報記録再生装置 1によれば、上述した近接場光ヘッド 2を備 えているので、書き込みの信頼性が高ぐ高密度記録化に対応することができ、高品 質化を図ること力 Sできる。また、同時に薄型化を図ることができる。  [0105] Further, according to the information recording / reproducing apparatus 1 of the present embodiment, since the near-field optical head 2 described above is provided, it is possible to cope with high-density recording with high writing reliability. Ability to improve quality. At the same time, the thickness can be reduced.

[0106] なお、上記実施形態において、図 8に示す矢印 L2方向に光束 Lの偏光成分が向く ように調整した後に、光束 Lを光導波路 4内に導入することが好ましい。こうすることで 、近接場光 Rを主磁極 32側に向いた近接場光生成部 40cの側面付近(図 8に示す 領域 S)に集中的に局在化することができる。従って、さらなる高密度記録化を図るこ と力 Sできる。  In the above-described embodiment, it is preferable to introduce the light beam L into the optical waveguide 4 after adjusting the polarization component of the light beam L in the arrow L2 direction shown in FIG. By doing this, the near-field light R can be concentrated and localized near the side surface (region S shown in FIG. 8) of the near-field light generation unit 40c facing the main magnetic pole 32 side. Therefore, it is possible to achieve higher density recording.

[0107] なお、本発明の技術範囲は上記実施の形態に限定されるものではなぐ本発明の 趣旨を逸脱しない範囲において種々の変更を加えることが可能である。  It should be noted that the technical scope of the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention.

[0108] 例えば、上記実施形態では、スポットサイズ変換器 22を近接場光ヘッド 2に適用し た場合を例に挙げて説明したが、近接場光ヘッド 2に限定されず、近接場光 Rが必 要な各種のデバイスに適用しても構わない。特に上記実施形態では、近接場光へッ ド 2に適用するにあたって、導入された光束 Lを反射面 40aで略 90度向きが変わるよ うに設計したが、反射角度はこの角度に限定されるものではない。つまり、反射面 40 aの設計しだ!/、では、一端側から導入された光束 Lを反射面 40aで反射させて他端 側に向けて自由な角度で向きを変えることができる。従って、どの方向から光束しが 導入されても該光束 Lを他端側から確実に近接場光 Rとして発生させることができる。 従って、扱い易ぐ様々なデバイスに利用することができる。  For example, in the above embodiment, the case where the spot size converter 22 is applied to the near-field light head 2 has been described as an example. However, the present invention is not limited to the near-field light head 2, and the near-field light R is not limited to the near-field light head 2. It may be applied to various necessary devices. In particular, in the above-described embodiment, when applied to the near-field light head 2, the introduced light beam L is designed to change its direction by approximately 90 degrees on the reflecting surface 40a, but the reflection angle is limited to this angle. is not. In other words, with the design of the reflecting surface 40a! /, The light beam L introduced from one end side can be reflected by the reflecting surface 40a and changed in direction toward the other end side at a free angle. Accordingly, the light flux L can be reliably generated as the near-field light R from the other end regardless of the direction from which the light flux is introduced. Therefore, it can be used for various devices that are easy to handle.

[0109] また、上記実施形態において、図 9から図 11に示すように、他端側における所定長 さ L3が端面 40dと同じサイズでストレート状になるように近接場光生成部 40cを形成 しても構わない。つまり、近接場光生成部 40cが、光束集光部 40bの端部から端面 4 0dに亘つて絞り成形されているのではなぐ他端側における所定長さ L3がストレート 状に形成されている。 Further, in the above embodiment, as shown in FIGS. 9 to 11, the near-field light generating part 40c is formed so that the predetermined length L3 on the other end side is the same size as the end face 40d and is straight. It doesn't matter. That is, the predetermined length L3 on the other end side is not straight when the near-field light generating unit 40c is not drawn from the end of the light beam condensing unit 40b to the end surface 40d. It is formed in a shape.

[0110] よって、スポットサイズ変換器 22の製造過程において、コア 40及びクラッド 41の他 端側をダイシングして端面 40dを形成する際に、多少のダイシング誤差が生じたり、 絞り成形誤差が生じていたりしていても、端面 40dのサイズを常に同じにすることがで きる。従って、スポットサイズ変換器 22を大量に製造したとしても、各スポットサイズ変 換器 22のばらつき(個体差)をなくすことができ、同じ品質のものを安定して製造する こと力 Sできる。よって、歩留まりを向上することができる。  [0110] Therefore, in the manufacturing process of the spot size converter 22, when the other end side of the core 40 and the clad 41 is diced to form the end face 40d, a slight dicing error or a drawing molding error occurs. The end face 40d can always have the same size. Therefore, even if the spot size converters 22 are manufactured in large quantities, variations (individual differences) among the spot size converters 22 can be eliminated, and it is possible to stably manufacture products of the same quality. Therefore, the yield can be improved.

[0111] また、上記実施形態では、近接場光生成部 40cの 3つの側面のうち、 2つの側面だ けを遮光膜 42で遮光した構成にした力 少なくとも 1つの側面だけを遮光しても構わ ない。この場合であっても、近接場光 Rを発生することができる。  [0111] In the above embodiment, only the two side surfaces of the three side surfaces of the near-field light generating unit 40c are shielded by the light-shielding film 42. At least one side surface may be shielded from light. Absent. Even in this case, the near-field light R can be generated.

[0112] 但し、図 12及び図 13に示すように全ての側面(3つの側面)を遮光膜 42で遮光す ることが好ましい。こうすることで、近接場光生成部 40cに入射した光束 Lが、クラッド 4 1側に漏れることがない。よって、光束 Lの損失を最小限に抑えることができ、より効率 良く近接場光 Rを発生させることができる。  However, as shown in FIGS. 12 and 13, it is preferable that all the side surfaces (three side surfaces) be shielded by the light shielding film 42. By doing so, the light beam L incident on the near-field light generating unit 40c does not leak to the clad 41 side. Therefore, the loss of the luminous flux L can be minimized, and the near-field light R can be generated more efficiently.

[0113] 更には、いずれかの側面上に形成された遮光膜 42を、近接場光 Rの光強度を増強 させる金属膜 43としても構わない。例えば、図 14及び図 15に示すように、主磁極 32 に対向する側面上に形成された遮光膜を、近接場光 Rの光強度を増強させる金属膜 43としても構わない。こうすることで、より光強度の強い近接場光 Rを発生することが できる。つまり、光束集光部 40bで集光された光束 Lは、近接場光生成部 40cでこの 金属膜 43に入射する。すると、この金属膜 43には表面プラズモンが励起される。励 起された表面プラズモンは、共鳴効果によって増強されながら金属膜 43とコア 40と の界面を端面 40dに向力 て伝播する。そして、端面 40dに達した時点で、光強度 の強い近接場光 Rとなって漏れ出す。従って、更なる高密度記録化を図ることができ  [0113] Furthermore, the light shielding film 42 formed on any one of the side surfaces may be a metal film 43 that enhances the light intensity of the near-field light R. For example, as shown in FIGS. 14 and 15, a light shielding film formed on the side surface facing the main magnetic pole 32 may be used as the metal film 43 that enhances the light intensity of the near-field light R. By doing so, near-field light R with higher light intensity can be generated. That is, the light beam L condensed by the light beam condensing unit 40b is incident on the metal film 43 by the near-field light generating unit 40c. Then, surface plasmons are excited in the metal film 43. The excited surface plasmon propagates toward the end face 40d through the interface between the metal film 43 and the core 40 while being enhanced by the resonance effect. And when it reaches the end face 40d, it leaks as near-field light R with high light intensity. Therefore, higher density recording can be achieved.

[0114] 特に、金属膜 43とコア 40との界面に光強度の強い近接場光 Rを発生させることが できるので、端面 40dの設計サイズに直接影響を受けることがない。つまり、端面 40d のサイズを微細化する等の作りこみを行わなくても、これら物理的な設計に影響され ることなぐ光強度の強い近接場光 Rを確実に発生させることができる。 [0115] なお、このような金属膜 43としては、例えば、金膜、銀膜やプラチナ膜等である。こ のうち、酸化に強ぐ耐久性に優れている点で金膜を使用することが好ましい。また、 全て遮光膜を金属膜 43としても構わな!/、。 [0114] In particular, since the near-field light R having a high light intensity can be generated at the interface between the metal film 43 and the core 40, the design size of the end face 40d is not directly affected. In other words, the near-field light R having a high light intensity that is not affected by the physical design can be reliably generated without making the size of the end face 40d finer. [0115] The metal film 43 is, for example, a gold film, a silver film, a platinum film, or the like. Among these, it is preferable to use a gold film because it is resistant to oxidation and excellent in durability. It is also possible to use the light shielding film as the metal film 43! /

[0116] 更には、近接場光生成部 40cの 3つの側面のうち、 1つ又は 2つの側面だけに金属 膜 43を形成しても構わない。例えば、図 16及び図 17に示すように、近接場光生成 部 40cの 3つの側面のうち、主磁極 32に対向する側面以外の側面の 1つに、金属膜 43を形成しても構わない。この場合であっても、物理的な設計に影響されることなぐ 金属膜 43とコア 40との界面に光強度の強い近接場光 Rを局在化させた状態で発生 させること力 Sできる。従って、更なる高密度記録化を図ることができる。  [0116] Furthermore, the metal film 43 may be formed on only one or two of the three side surfaces of the near-field light generating unit 40c. For example, as shown in FIGS. 16 and 17, the metal film 43 may be formed on one of the three side surfaces of the near-field light generating unit 40c other than the side surface facing the main magnetic pole 32. . Even in this case, the force S can be generated in a state where the near-field light R having high light intensity is localized at the interface between the metal film 43 and the core 40 without being influenced by the physical design. Therefore, further high density recording can be achieved.

[0117] 特に、近接場光生成部 40cの 3つの側面のうち 1つの側面だけに金属膜 43を形成 させるので、 2つ若しくは 3つの側面に形成する場合と比較して作り易い。  [0117] In particular, since the metal film 43 is formed on only one of the three side surfaces of the near-field light generating unit 40c, it is easier to make compared with the case where the metal film 43 is formed on two or three side surfaces.

[0118] また、上記実施形態において、図 18及び図 19に示すように、近接場光生成部 40c の側面を露出させる溝部 41bをクラッド 41に形成すると共に、該溝部 41bを介して近 接場光生成部 40cの側面に接触する突出部 32aを主磁極 32に設けても構わない。  Further, in the above embodiment, as shown in FIGS. 18 and 19, a groove 41b that exposes the side surface of the near-field light generating part 40c is formed in the clad 41, and the near field through the groove 41b. The main magnetic pole 32 may be provided with a protruding portion 32a that contacts the side surface of the light generating portion 40c.

[0119] こうすることで、近接場光 Rが発生する位置と記録磁界が発生する位置とを極力近 づけること力 Sできる。従って、より効率良く近接場光 Rと記録磁界とを協働させることが でき、高密度記録化により対応することができる。  [0119] By doing this, the force S can be as close as possible to the position where the near-field light R is generated and the position where the recording magnetic field is generated. Therefore, the near-field light R and the recording magnetic field can be made to cooperate more efficiently, and this can be dealt with by high-density recording.

[0120] 特に、この突出部 32aを備える際に、図 20及び図 21に示すように、突出部 32aと近 接場光生成部 40cの側面との間に遮光膜 42が形成されているとより好ましい。こうす ることで、突出部 32aの近傍により集中的に近接場光 Rを発生することができるので、 さらなる高密度記録化を図ることができる。  [0120] In particular, when the protrusion 32a is provided, as shown in FIGS. 20 and 21, when the light-shielding film 42 is formed between the protrusion 32a and the side surface of the near-field light generator 40c. More preferred. By doing so, the near-field light R can be intensively generated in the vicinity of the projecting portion 32a, so that higher density recording can be achieved.

[0121] 更には、突出部 32aを設けた際に、図 22及び図 23に示すように、近接場光生成部 40cの 3つの側面のうち、主磁極 32に対向する側面上に形成された遮光膜を、図 14 及び図 15に示した場合と同様に、金属膜 43とすることが好ましい。こうすることで、突 出部 32aにより近!/、位置で、光強度の強レ、近接場光 Rを局在化させた状態で発生さ せること力 Sできる。従って、さらに効率良く近接場光 Rと記録磁界とを協同させることが でき、さらなる高密度記録化を図ることができる。  Furthermore, when the protrusion 32a is provided, as shown in FIGS. 22 and 23, it is formed on the side surface facing the main magnetic pole 32 among the three side surfaces of the near-field light generating unit 40c. The light shielding film is preferably a metal film 43 as in the case shown in FIGS. By doing so, it is possible to generate force S with a strong light intensity and a near-field light R localized at a position near / to the protruding portion 32a. Therefore, the near-field light R and the recording magnetic field can be more efficiently collaborated, and higher density recording can be achieved.

[0122] また、図 22及び図 23に示すように金属膜 43を設けた場合に、より効率良くし力、もさ らに強い光強度の近接場光 Rを発生させることが可能である。 [0122] Further, when the metal film 43 is provided as shown in FIG. 22 and FIG. It is possible to generate near-field light R with a higher light intensity.

[0123] 例えば、光束集光部 40bで集光された光束 Lを共鳴角度 Θで金属膜 43に入射さ せて、光束 Lのエネルギーで金属膜 43の表面に表面プラズモンを励起させるように、 図 24及び図 25に示すように、金属膜 43が形成されている近接場光生成部 40cの側 面を角度調整すると良い。 [0123] For example, the light beam L collected by the light beam condensing unit 40b is incident on the metal film 43 at the resonance angle Θ, and surface plasmon is excited on the surface of the metal film 43 by the energy of the light beam L. As shown in FIGS. 24 and 25, the angle of the side surface of the near-field light generating unit 40c on which the metal film 43 is formed may be adjusted.

[0124] ここで、光束 Lの入射角度と反射光強度について、簡単に説明する。 [0124] Here, the incident angle of the light beam L and the reflected light intensity will be briefly described.

[0125] 図 26に示すように、底面に金属膜 P2が設けられたプリズム P1に向けて、光 L1を全 反射条件で入射させると、入射角度 Θ (金属膜 P2の表面に垂直な直線と光 L1との なす角度)に応じて反射光強度が変化する。これは、光 L1のエネルギーが表面ブラ ズモンの励起に利用されるからである。そして、入射角度を変化させて反射光強度を 検出すると、反射光強度が最小となる入射角度がある。これは、光 L1のエネルギー が最も表面プラズモンの励起に利用されるからである。そして、この反射光強度が最 小となる入射角度を、一般的に共鳴角度と称している。 As shown in FIG. 26, when the light L1 is incident on the prism P1 having the metal film P2 on the bottom surface under the total reflection condition, the incident angle Θ (a straight line perpendicular to the surface of the metal film P2 The reflected light intensity changes according to the angle formed with the light L1. This is because the energy of light L1 is used to excite surface plasmons. When the reflected light intensity is detected by changing the incident angle, there is an incident angle at which the reflected light intensity is minimized. This is because the energy of light L1 is most utilized for excitation of surface plasmons. The incident angle at which the reflected light intensity is minimized is generally referred to as the resonance angle.

[0126] よって、図 24に示すように、光束集光部 40bで集光された光束 Lを共鳴角度 Θで金 属膜 43に入射させることで、最も効率良く表面プラズモンを励起することができ、より 効率良ぐし力、もさらに強い光強度の近接場光 Rを発生させることができる。 Therefore, as shown in FIG. 24, surface plasmon can be excited most efficiently by making the light beam L collected by the light beam condensing unit 40b enter the metal film 43 at the resonance angle Θ. It is possible to generate near-field light R with higher efficiency and higher light intensity.

[0127] なお、コア 40内に導入された光束 Lは、コア 40の側面で反射を繰り返しながら徐々 に集光されて端面 40dに進む力 光束集光部 40bまで進んできた段階である程度に 集約されているので進む方向が定まっている。つまり、コア 40を設計した時点で、光 束 Lの主成分がどのように進みながらコア 40を伝播するのかを把握することができる 。そのため、図 24に示すように、この光束 Lの主成分が共鳴角度 Θで金属膜 43に入 射するように、近接場光生成部 40cの側面の角度を調整すれば良い。 [0127] The light flux L introduced into the core 40 is gradually condensed while being reflected on the side surface of the core 40, and is gradually condensed and is advanced to the end face 40d. The direction to go is determined. That is, when the core 40 is designed, it is possible to grasp how the main component of the light flux L propagates through the core 40 while proceeding. Therefore, as shown in FIG. 24, the angle of the side surface of the near-field light generating unit 40c may be adjusted so that the main component of the light beam L is incident on the metal film 43 at the resonance angle Θ.

[0128] なお、集光された光束 Lを共鳴角度 Θで金属膜 43に入射させる場合に、図 27及び 図 28に示すように、金属膜 43の一部がクラッド 41に重なるように設計すると良い。上 述したように、光束 Lを共鳴角度 Θで金属膜 43に入射させることで効率良く表面ブラ ズモンを励起させることが知られている力 プリズム P1の金属膜 P2に誘電体薄膜を 吸着させるだけで共鳴角度 Θが変化することも一般的に知られている。そのため、図 27に示すように、金属膜 43とクラッド 41とを一部重ねることで共鳴角度 Θを任意の角 度に調整することができる。従って、図 27に示す場合であっても、集光された光束 L を共鳴角度 Θで金属膜 43に入射させることが可能となり、やはり同様に、さらに強い 光強度の近接場光 Rをより効率良く発生させることができる。 In addition, when the collected light beam L is incident on the metal film 43 at the resonance angle Θ, as shown in FIGS. 27 and 28, if the metal film 43 is designed to partially overlap the clad 41, good. As described above, it is known that the light beam L is incident on the metal film 43 at the resonance angle Θ, so that the surface plasmon is efficiently excited. Only the dielectric thin film is adsorbed on the metal film P2 of the prism P1. It is also generally known that the resonance angle Θ changes at. Therefore, as shown in FIG. 27, the metal film 43 and the clad 41 are partially overlapped so that the resonance angle Θ Can be adjusted in degrees. Therefore, even in the case shown in FIG. 27, it becomes possible to make the collected light beam L incident on the metal film 43 at the resonance angle Θ, and similarly, the near-field light R having a higher light intensity is more efficiently used. It can be generated well.

[0129] 特に、近接場光生成部 40cの側面の角度を機械的に調整し難い場合であっても、 共鳴角度 Θ自体を変化させることができるので、機械的な設計を補助することができ る。従って、設計の自由度を向上することができる。  [0129] In particular, even when it is difficult to mechanically adjust the angle of the side surface of the near-field light generating unit 40c, the resonance angle Θ itself can be changed, so that mechanical design can be assisted. The Therefore, the degree of freedom in design can be improved.

[0130] また、図 22及び図 23に示すように金属膜 43を設けた場合に、金属膜 43と突出部 3 2aとの間に、図 29及び図 30に示すシールド膜 44を設けても構わない。このシールド 膜 44は、突出部 42aと金属膜 43との間の電気的な繋がり又は磁気的な繋がりのうち 、少なくともいずれか一方の繋がりを遮断するものである。こうすることで、近接場光 R と記録磁界とをより効果的に協働させた近接場光アシスト磁気記録方式により情報の 記録を fiうこと力 Sできる。  Furthermore, when the metal film 43 is provided as shown in FIGS. 22 and 23, the shield film 44 shown in FIGS. 29 and 30 may be provided between the metal film 43 and the protruding portion 32a. I do not care. The shield film 44 blocks at least one of the electrical connection or the magnetic connection between the protrusion 42a and the metal film 43. In this way, it is possible to use the near-field light assisted magnetic recording method that more effectively collaborates the near-field light R and the recording magnetic field to achieve the ability to record information.

[0131] また、上記各実施形態では、近接場光ヘッド 2を浮上させた空気浮上タイプの情報 記録再生装置 1を例に挙げて説明したが、この場合に限られず、ディスク面 D1に対 向配置されていればディスク Dとスライダ 20とが接触していても構わない。つまり、本 発明に係る近接場光ヘッド 2は、コンタクトスライダタイプのヘッドであっても構わな!/、 。この場合であっても、同様の作用効果を奏することができる。  Further, in each of the above embodiments, the air floating type information recording / reproducing apparatus 1 in which the near-field optical head 2 is levitated has been described as an example. However, the present invention is not limited to this and is directed to the disk surface D1. As long as it is arranged, the disk D and the slider 20 may be in contact with each other. That is, the near-field optical head 2 according to the present invention may be a contact slider type head! / Even in this case, the same effects can be achieved.

産業上の利用可能性  Industrial applicability

[0132] 本発明に係る近接場光発生素子によれば、コアの一端側から導入させた光束を効 率良く近接場光に変換することができると共に、他端側からこの近接場光を外部に発 すること力 Sできる。特に、光束の導入方向に関係なぐ効率良く近接場光を発生させ ること力 Sできるので、扱い易く利便性に優れている。従って、近接場光が必要な各種 のデバイスに容易に用いることができ、設計の自由度を向上することができる。  [0132] According to the near-field light generating element of the present invention, the light beam introduced from one end side of the core can be efficiently converted into near-field light, and the near-field light is externally transmitted from the other end side. Power S can be generated. In particular, the ability to generate near-field light efficiently regardless of the direction in which the light flux is introduced can be used, making it easy to handle and convenient. Therefore, it can be easily used for various devices that require near-field light, and the degree of design freedom can be improved.

[0133] また、本発明に係る近接場光ヘッドによれば、上述した近接場光発生素子を備えて いるので、書き込みの信頼性を高めることができ、高品質化を図ることができる。また 、光束の導入方向に影響されずに光束導入手段を配置できるので、設計をコンパク トにすること力 Sできる。しかも従来の光の入れ方とは異なり、光束を空中伝播させる必 要がないので、導光損失を極力低下させることができる。また、光束導入手段以外の 各構成品がスライダの厚み方向に重なることを極力防止しているので、薄型化を図る こと力 Sでさる。 [0133] Further, according to the near-field light head according to the present invention, since the near-field light generating element described above is provided, the writing reliability can be improved and the quality can be improved. In addition, since the light beam introduction means can be arranged without being influenced by the direction in which the light beam is introduced, it is possible to make the design compact. Moreover, unlike the conventional method of entering light, it is not necessary to propagate the light beam in the air, so that the light guide loss can be reduced as much as possible. Other than the light beam introducing means Each component is prevented from overlapping in the thickness direction of the slider as much as possible.

また、本発明に係る情報記録再生装置によれば、上述した近接場光ヘッドを備えて いるので、書き込みの信頼性が高ぐ高密度記録化に対応することができ、高品質化 を図ること力 Sできる。また、同時に薄型化を図ることができる。  Further, according to the information recording / reproducing apparatus of the present invention, since the near-field optical head described above is provided, it is possible to cope with high-density recording with high writing reliability, and to achieve high quality. Power S can be. At the same time, the thickness can be reduced.

Claims

請求の範囲 The scope of the claims [1] 一端側に導入された光束を導入方向とは異なる方向で他端側に集光しながら伝播 すると共に、近接場光に生成した後に外部に発する近接場光発生素子であって、 導入された前記光束を導入方向とは異なる方向に反射させる反射面と、前記一端 側から前記他端側に向かう長手方向に直交する断面積が漸次減少するように絞り成 形され、反射された前記光束を集光させながら他端側に向けて伝播させる光束集光 部と、該光束集光部の端部から前記他端側に向けてさらに絞り成形され、集光された 前記光束から前記近接場光を生成して他端側から外部に向けて発する近接場光生 成部と、を有する多面体のコアと、  [1] A near-field light generating element that propagates a light beam introduced to one end side while condensing to the other end side in a direction different from the introduction direction, and generates the near-field light and then emits it to the outside. The reflected light beam is reflected in a direction different from the introduction direction, and the cross-sectional area perpendicular to the longitudinal direction from the one end side to the other end side is gradually reduced and reflected. A light beam condensing part that propagates the light beam toward the other end side while condensing the light beam, and further drawn from the end of the light beam condensing part toward the other end side, and the proximity from the condensed light flux A polyhedral core having a near-field light generation unit that generates field light and emits the light from the other end side toward the outside; 該コアよりも屈折率が低い材料で形成され、コアの他端側を外部に露出させた状態 でコアの側面に密着してコアを内部に閉じ込めるクラッドとを有し、  A clad that is formed of a material having a refractive index lower than that of the core, tightly contacts the side of the core with the other end of the core exposed to the outside, and traps the core inside. 前記近接場光生成部は、前記他端側で外部に露出する端面が光の波長以下のサ ィズとされ、少なくとも 1つの側面が遮光膜によって遮光されていることを特徴とする 近接場光発生素子。  The near-field light generating unit is characterized in that an end surface exposed to the outside on the other end side has a size equal to or less than a wavelength of light, and at least one side surface is shielded by a light-shielding film. Generating element. [2] 請求項 1に記載の近接場光発生素子にお!/、て、  [2] The near-field light generating element according to claim 1! /, 前記クラッドは、前記コアの一端側を外部に露出させた状態で形成されて!/、ること を特徴とする近接場光発生素子。  The near-field light generating element, wherein the clad is formed with one end of the core exposed to the outside! /. [3] 請求項 1に記載の近接場光発生素子にお!/、て、 [3] The near-field light generating element according to claim 1! /, 前記近接場光生成部は、前記他端側における所定長さが前記端面と同じサイズで ストレート状に成形されていることを特徴とする近接場光発生素子。  The near-field light generating element, wherein the near-field light generating part is formed in a straight shape with a predetermined length on the other end side being the same size as the end face. [4] 請求項 1に記載の近接場光発生素子にお!/、て、 [4] The near-field light generating element according to claim 1! /, 前記近接場光生成部の全ての側面は、前記遮光膜によって遮光されてレ、ることを 特徴とする近接場光発生素子。  All the side surfaces of the near-field light generating part are shielded by the light-shielding film, and the near-field light generating element is characterized in that: [5] 請求項 1に記載の近接場光発生素子にお!/、て、 [5] The near-field light generating element according to claim 1! /, 前記遮光膜は、前記近接場光の光強度を増加させる金属膜であることを特徴とす る近接場光発生素子。  The near-field light generating element, wherein the light-shielding film is a metal film that increases the light intensity of the near-field light. [6] 請求項 5に記載の近接場光発生素子において、 [6] The near-field light generating element according to claim 5, 前記金属膜が設けられて!/、る前記近接場光生成部の側面は、前記光束集光部で 集光された前記光束が共鳴角度で前記金属膜に入射されて、該光束のエネルギー で表面プラズモンが励起されるように角度調整されていることを特徴とする近接場光 発生素子。 The metal film is provided! /, And the side surface of the near-field light generating unit is the light beam condensing unit. The near-field light generating element, wherein the condensed light beam is incident on the metal film at a resonance angle, and the surface plasmon is excited by the energy of the light beam. [7] 一定方向に回転する磁気記録媒体を加熱すると共に、磁気記録媒体に対して垂直 方向の記録磁界を与えることで磁化反転を生じさせ、情報を記録させる近接場光へ ッドでめって、  [7] A magnetic recording medium rotating in a certain direction is heated, and a perpendicular recording magnetic field is applied to the magnetic recording medium to cause magnetization reversal, so that the near-field light is used to record information. And 前記磁気記録媒体の表面に対向配置されたスライダと、  A slider disposed opposite to the surface of the magnetic recording medium; 該スライダの先端面に固定された補助磁極と、  An auxiliary magnetic pole fixed to the front end surface of the slider; 磁気回路を介して前記補助磁極に接続され、前記記録磁界を補助磁極との間で 発生させる主磁極と、  A main magnetic pole connected to the auxiliary magnetic pole through a magnetic circuit and generating the recording magnetic field with the auxiliary magnetic pole; 前記情報に応じて変調された電流が供給され、前記磁気回路の周囲を螺旋状に 巻回するコイルと、  A coil that is supplied with a current modulated according to the information and spirally wound around the magnetic circuit; 前記他端側を前記磁気記録媒体側に向けた状態で前記主磁極に隣接して固定さ れた、請求項 1に記載の近接場光発生素子と、  The near-field light generating element according to claim 1, wherein the near-field light generating element is fixed adjacent to the main magnetic pole with the other end side facing the magnetic recording medium side. 前記スライダに対して平行に配置された状態で該スライダに固定され、前記一端側 から前記コア内に前記光束を導入させる光束導入手段とを備え、  A light beam introducing means fixed to the slider in a state of being arranged in parallel to the slider and introducing the light beam into the core from the one end side; 前記近接場光生成部は、前記主磁極の近傍に前記近接場光を発生させることを特 徴とする近接場光ヘッド。  The near-field light head is characterized in that the near-field light generator generates the near-field light in the vicinity of the main magnetic pole. [8] 請求項 7に記載の近接場光ヘッドにおいて、 [8] The near-field optical head according to claim 7, 前記クラッドには、前記近接場光生成部の側面を露出させる溝部が形成されており 前記主磁極は、前記溝部を介して前記近接場光生成部の側面に接触する突出部 を有して!/ヽることを特徴とする近接場光ヘッド。  The clad is formed with a groove that exposes the side surface of the near-field light generating unit, and the main magnetic pole has a protrusion that contacts the side surface of the near-field light generating unit via the groove. / Near-field optical head characterized by squeezing. [9] 請求項 8に記載の近接場光ヘッドにおいて、 [9] The near-field optical head according to claim 8, 前記突出部と前記近接場光生成部の側面との間には、前記遮光膜が形成されて Vヽることを特徴とする近接場光ヘッド。  A near-field light head, wherein the light shielding film is formed between the protruding portion and the side surface of the near-field light generating portion, and is V-shaped. [10] 請求項 9に記載の近接場光ヘッドにおいて、 [10] The near-field optical head according to claim 9, 前記突出部と前記遮光膜との間には、両者の電気的又は磁気的な繋がりのうち、 すくなくともいずれか一方の繋がりを遮断するシールド膜が形成されていることを特徴 とする近接場光ヘッド。 Between the protruding portion and the light shielding film, among the electrical or magnetic connection between them, A near-field optical head, characterized in that a shielding film that cuts off at least one of the connections is formed. 請求項 7に記載の近接場光ヘッドと、 The near-field optical head according to claim 7, 前記磁気記録媒体の表面に平行な方向に移動可能とされ、該磁気記録媒体の表 面に平行で且つ互いに直交する 2軸回りに回動自在な状態で、前記近接場光ヘッド を先端側で支持するビームと、  The near-field optical head can be moved on the tip side in a state that it can move in a direction parallel to the surface of the magnetic recording medium and is rotatable about two axes parallel to the surface of the magnetic recording medium and orthogonal to each other. A supporting beam; 前記光束導入手段に対して前記光束を入射させる光源と、  A light source for making the light beam incident on the light beam introducing means; 前記ビームの基端側を支持すると共に、該ビームを前記磁気記録媒体の表面に平 行な方向に向けて移動させるァクチユエータと、  An actuator for supporting the base end side of the beam and moving the beam in a direction parallel to the surface of the magnetic recording medium; 前記磁気記録媒体を前記一定方向に回転させる回転駆動部と、  A rotation drive unit for rotating the magnetic recording medium in the fixed direction; 前記コイルに前記電流を供給すると共に前記光源の作動を制御する制御部とを備 えて!/、ることを特徴とする情報記録再生装置。  An information recording / reproducing apparatus comprising: a control unit that supplies the current to the coil and controls the operation of the light source.
PCT/JP2007/071745 2006-11-20 2007-11-09 Proximity field light generation element, proximity field light head, and information recording/reproducing device Ceased WO2008062676A1 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000028536A1 (en) * 1998-11-09 2000-05-18 Seiko Instruments Inc. Near-field optical head and production method thereof
JP2000206315A (en) * 1999-01-12 2000-07-28 Hitachi Ltd Micro optical recording device
JP2001189002A (en) * 1999-12-28 2001-07-10 Toshiba Corp Heat assisted magnetic recording method and heat assisted magnetic recording apparatus
JP2005004901A (en) * 2003-06-12 2005-01-06 Hitachi Ltd Magnetic head and magnetic recording method
JP2006073105A (en) * 2004-09-02 2006-03-16 Fujitsu Ltd Light irradiation head, information storage device, and composite head manufacturing method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000028536A1 (en) * 1998-11-09 2000-05-18 Seiko Instruments Inc. Near-field optical head and production method thereof
JP2000206315A (en) * 1999-01-12 2000-07-28 Hitachi Ltd Micro optical recording device
JP2001189002A (en) * 1999-12-28 2001-07-10 Toshiba Corp Heat assisted magnetic recording method and heat assisted magnetic recording apparatus
JP2005004901A (en) * 2003-06-12 2005-01-06 Hitachi Ltd Magnetic head and magnetic recording method
JP2006073105A (en) * 2004-09-02 2006-03-16 Fujitsu Ltd Light irradiation head, information storage device, and composite head manufacturing method

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