WO2007018074A1 - Resinoid grinding wheel - Google Patents
Resinoid grinding wheel Download PDFInfo
- Publication number
- WO2007018074A1 WO2007018074A1 PCT/JP2006/315195 JP2006315195W WO2007018074A1 WO 2007018074 A1 WO2007018074 A1 WO 2007018074A1 JP 2006315195 W JP2006315195 W JP 2006315195W WO 2007018074 A1 WO2007018074 A1 WO 2007018074A1
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- WO
- WIPO (PCT)
- Prior art keywords
- epoxy resin
- resinoid
- grindstone
- grinding
- mortar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
Definitions
- the present invention relates to a resinoid mortar and a method for producing the same. More specifically, the present invention is particularly suitable for polishing a hard and brittle material, without causing chipping or microcracking, and deburring a pressed metal part, and a thin plate-like work with unevenness.
- the present invention relates to a resinoid grindstone using an epoxy resin as a binder, and a method for producing the same, which ensures a good polished surface quality in the polishing of objects.
- Resinoid mortar is a grinding wheel that is widely used because of its high-efficiency grinding.
- phenolic resin, epoxy resin, PVA are used as organic binders for resinoid grinding wheels, and urethane resin, melamine resin, etc. are used as other organic resins.
- resin grindstones using epoxy resin are suitably used for high-efficiency grinding such as deep cutting due to good wettability between the abrasive grains and the binder.
- epoxy resin can be easily cast-molded, and a resinoid grindstone using this can be easily manufactured.
- epoxy resins used for resinoid grinding wheels bisphenol A type epoxy resins or bisphenol F type epoxy resins are generally used. This is because, for example, these epoxy resins can be easily obtained, the hardness and heat resistance of the grindstone itself can be improved by using these epoxy resins as a binder, The ability to maintain a certain amount of power. Resinoid grinding wheels using epoxy resin are disclosed in Patent Documents 1 and 2, for example.
- Patent Document 3 Japanese Patent Laid-Open No. 48-77489
- Patent Document 2 Japanese Patent Laid-Open No. 10-202536
- Patent Document 3 Japanese Unexamined Patent Application Publication No. 2004-160646
- the TFT liquid crystal glass material has an edge force applied by a diamond wheel of a metal bond binder. , Easy to induce subsequent dusting. Dust generation leads to panel failure due to contamination and scratches in the subsequent process. Therefore, the edge polishing has a finishing polishing process that smoothes the streaks and removes or reduces microcracks. Often added,
- binder resins mainly used in resinoid mortars other than epoxy resins include phenol resin, polyimide resin, polyurethane resin, PVA resin, rubber-based resin, and the like.
- phenol resin and polyimide resin are hard resins and excellent in mechanical strength, and there is no problem in terms of durability of the mortar, but grinding of hard and brittle materials that do not have flexibility in the resin itself. Suitable for polishing! ! Cunning.
- Polyurethane resin, PVA resin, and rubber-based resin are flexible, and are capable of grinding and polishing hard and brittle materials. Since the durability of the turret is low, the turret replacement frequency is shortened and the production efficiency is poor.
- the present invention has obtained a good sharpness and durability without generating V, chipping or microcracks, especially in a grinding and polishing case of a hard and brittle material. It is an object of the present invention to provide a resinoid grindstone using an epoxy resin as a binder and a method for producing the same.
- the resinoid grindstone of the present invention is characterized in that the abrasive grains are fixed with an epoxy resin and the epoxy resin is a flexible epoxy resin.
- the resinoid grindstone preferably has a compressive strength value of CFI S R1608 (measured according to CFI S R1608) force and 20 MPa and an elastic modulus (measured according to JIS R1602) of 30 to 40 MPa.
- the flexible epoxy resin is preferably a dimer acid-modified epoxy resin.
- the epoxy resin preferably contains an aromatic glycidyl ether type epoxy resin up to 40% by weight based on the total weight of the epoxy resin.
- the aromatic glycidyl ether type epoxy resin is preferably bisphenol A type epoxy resin or bisphenol F type epoxy resin.
- the resinoid grindstone of the present invention has a large pore by using a powder or liquid foaming agent, an inorganic or organic pore forming agent, or a surfactant.
- the rubber hardness of the resinoid grindstone is rubber hardness.
- It is preferably 50 to 90 as measured by A scale.
- the resinoid grinding wheel preferably has a 25% compression hardness (JIS K6767) of 1.0 to 35. OMPa.
- the resilience modulus of the resinoid mortar is preferably 5 to 20%.
- a resinoid grindstone using an epoxy resin as a binder and a method for producing the same, without generating any chipping particularly when grinding hard and brittle materials.
- the resinoid grindstone of the present invention uses an epoxy resin, so the adhesion between the binder and the abrasive grains is secured, so there is no problem in terms of durability, and the epoxy resin is used.
- chipping with low grinding resistance does not occur, in other words, good finished surface roughness can be imparted.
- FIG. 1 is a conceptual diagram showing a method for measuring the rebound resilience of a grindstone.
- FIG. 2 is a conceptual diagram showing a method for measuring a 25% compression hardness value of a turret.
- the grindstone further imparted with flexibility can be used for deburring metal parts that have been punched out of stamping, and for thin plate-like workpieces with unevenness. Even when polishing a workpiece, it is easy to adapt to the work material, and in contrast to using a non-flexible prior art turret, the uniform ground and polished surface of the workpiece and the turret Can be ensured at the same time.
- the resinoid grindstone of the present invention is a grindstone in which abrasive grains are fixed with an epoxy resin.
- the epoxy resin that can be used in the present invention is a flexible epoxy resin.
- an epoxy-based thermosetting resin composition that is a precursor composition for producing a turret and a grindstone that is a cured product have sufficient flexibility. You can have it. Due to this flexibility, the resinoid grindstone of the present invention can exhibit a high degree of elongation over a wide temperature range from a low temperature range to a high temperature range.
- the resinoid grindstone of the present invention has a compressive strength value of 5 to 20 MPa as measured according to JIS R1608 (Method for testing compressive strength of fine ceramics), and JIS R1602 (Fine It is preferable that the elastic modulus is 30 to 40 MPa as measured according to the elastic modulus test method of ceramics).
- the abrasive and the binder must be excellent. It is important to provide flexibility and durability using an epoxy resin that achieves excellent wettability and is easy to manufacture.
- the compressive strength value is 5 to 20 MPa
- the elastic modulus in accordance with JIS R1602 (Measurement) was found to be preferably 30 to 40 MPa.
- the compressive strength value increases, the elastic modulus increases in proportion thereto.
- the compressive strength value increases, the holding power of the abrasive grains increases and the durability of the grinding wheel improves, and the elastic modulus of the grinding wheel rises proportionally, and the flexibility of the grinding wheel is lost.
- the elastic modulus is so high that the hard brittle material is destroyed by the impact during grinding or polishing, or chipping and microcracks are generated. For this reason, good grinding performance cannot be obtained for grinding and polishing of brittle materials such as glass, silicon wafers and ceramic materials. If the elastic modulus is lowered to cope with this problem, the compressive strength value also becomes lower, so that the consumption of the turret increases, the replacement frequency of the mortar increases, and the production efficiency decreases.
- the present inventors use a flexible epoxy resin as a grindstone binder, pay attention to the compressive strength value and the elastic modulus as the grindstone physical properties, and adjust these physical properties to an appropriate range. If the compressive strength value (measured according to JIS R1608) is 5-20 MPa and the elastic modulus (measured according to JIS R1602) is 30-40 MPa It has been found that it exhibits good grinding performance.
- the compressive strength value is measured in accordance with JIS R1608, and is determined from the load when the test piece is broken by applying a compressive load by the following equation.
- Compressive strength value 4 X (Fracture load) / (Specimen area)
- the elastic modulus is measured in accordance with JIS R1602, and the test piece is subjected to a bending test at three points, and the bending force of the test piece is obtained by the following equation.
- Elastic modulus ⁇ 3 X (length of specimen) X (load 2—load 1MZ [2 X (width of specimen) X (thickness of specimen) 2 X ⁇ (deflection dimension 2) — ( Deflection size 1) ⁇ ]
- the compressive strength value is preferably 5 to 20 MPa. If the compressive strength value is less than 5MPa, the durability of the turret will be impaired, the consumption of the mortar will increase, and the production efficiency will deteriorate. If the compressive strength value is greater than 20 MPa, the holding power of the cannon will become too high and it will not wear out to form a cutting edge! The abrasive will not fall off and will be held on the grindstone, resulting in poor sharpness.
- the compressive strength value is more preferably 7 to 18 MPa.
- the elastic modulus is preferably 30 to 40 MPa. If the elastic modulus is less than 30 MPa, the repulsive force is too high, and the barrel that becomes the cutting edge is recessed inside the turret, resulting in poor sharpness. If the modulus of elasticity is greater than OMPa, the resilience of the turret is insufficient and the brittle material is destroyed, or Chipping and microcracks occur.
- the elastic modulus is more preferably 35 to 40 MPa, and even more preferably 37 to 39 MPa.
- the flexible epoxy resin is not particularly limited as long as it can exhibit flexibility even after being cured with an epoxy resin hardener.
- flexible epoxy resins that can be used include, but are not limited to, polyethylene glycol diglycidyl ether, polypropylene glycol diglycidyl ether, and alkylene groups having 2 to 9 carbon atoms (preferably 2 to 4 carbon atoms).
- An epoxy resin added with a flexibility-imparting agent can also be used.
- the flexibility imparting agent imparts flexibility to the cured epoxy resin by decreasing the crosslinking density and increasing the molecular weight between the crosslinking points.
- Examples of the compound used as the flexibility-imparting agent include monoepoxide, gepoxide, polyol, polythiol, polyethylene glycol, and polypropylene glycol.
- the same effect can be obtained by introducing a long-chain saturated or unsaturated fatty acid (for example, C is 10 or more) into the curing agent.
- a long-chain saturated or unsaturated fatty acid for example, C is 10 or more
- the flexible epoxy resin is a dimer acid modified epoxy resin in which an epoxy group is introduced into the molecule of dimer acid or its derivative, which has a large effect of imparting flexibility and is easily available.
- dimer acid diglycidyl ester represented by the following chemical formula is preferred.
- the resinoid mortar of the present invention for the purpose of imparting heat resistance and adjusting Z or elasticity, together with the flexible epoxy resin, is an aromatic glycidyl ether type epoxy resin. Fats may be used. Aromatic glycidyl ether type epoxy resin can be used up to 40% by weight based on the total weight of epoxy resin used. Amount of aromatic glycidyl ether type epoxy resin If it exceeds 40% by weight based on the total weight of the epoxy resin used, the resilience of the turret is lost, which is disadvantageous because the effect of the present invention is impaired.
- the aromatic glycidyl ether type epoxy resin includes aromatic diglycidyl ethers, aromatic triglycidyl ethers and aromatic polyglycidyl ethers.
- aromatic glycidyl ether type epoxy resins include, but are not limited to, the following formulas that are aromatic diglycidyl ethers:
- Examples of other aromatic diglycidyl ethers include bisphenol S diglycidyl ether, resorcinol diglycidyl ether, and diglycidyl ether phthalate.
- Aromatic triglycidyl ethers include triglycidyl ether of trihydroxyphenol propane, glycidyl ether diglycidylamine of para-aminophenol, 4, 4-bis (4-hydroxyphenol pentanoic acid) di-
- Examples of the glycidyl ether glycidyl ester and aromatic polyglycidyl ethers include tetraphenyl-leneethane tetraglycidyl ether, tetraglycidyldiaminodiphenylmethane, tetraglycidylmetaxylenediamine, cresolyl novolac polyglycidyl ether, and the like.
- epoxy resins other than those exemplified above can be used as long as the effects of the present invention are not impaired.
- the resinoid grindstone of the present invention has a specific flexibility represented by a compressive strength value of 5 to 20 MPa (measured according to JIS R1608) and an elastic modulus of 30 to 40 MPa (measured according to JIS R1602). It has the property.
- the flexibility of the resinoid grinding wheel of the present invention is determined by the following three parameters (rubber hardness, 25% compression hardness, rebound resilience) It can be defined even if it is called.
- Rubber hardness is measured using a rubber hardness meter (A scale).
- the 25% compression hardness is measured according to the following procedure specified in JIS K6767 (Foamed Plastics-Polyethylene-Test Method).
- Figure 2 shows a conceptual diagram showing the measurement method.
- the tester's load measurement pressurizing head 1 compresses it by 25% of the initial thickness of the test wheel 2 at a compression speed lOmmZmin and stops. 2 Measure the load (N) after 0 seconds.
- Test wheel 2 Drop the steel ball 5 with a drop height force of 2 to 200 mm.
- Rebound resilience (%) Rebound height (mm) Z drop height (200mm) X 100
- the rubber hardness is preferably 50 to 90 as measured by a rubber hardness meter A scale. If the rubber hardness is less than 50, the grindstone becomes soft and strong, which is inconvenient because the polishing power is insufficient. On the other hand, if the rubber hardness is higher than 90, the turret becomes hard, the flexibility is lost, and chipping and microcracks tend to occur. In the resinoid mortar of the present invention, the hardness is more preferably 55 to 90, and most preferably 60 to 90, as measured by a rubber hardness meter A scale.
- the resinoid mortar of the present invention preferably has a rebound resilience of 5 to 20%.
- the impact resilience is less than 5%, the turret becomes soft, the pressure responsiveness to the polishing pressure becomes poor, and the sharpness is lowered, which is inconvenient. Further, it is not preferable because the pressure response when the polishing pressure is changed is deteriorated. On the other hand, if the impact resilience exceeds 20%, the turret becomes hard and chipping and microcracks occur.
- the 25% compression hardness (JIS K6767) is preferably 1.0 to 35 MPa.
- the boulder is hard and pressure responsiveness to the polishing pressure is deteriorated, chipping and micro cracks are generated, and the boulder may be destroyed in some cases.
- the 25% compression hardness is more preferably 1.0 to 25 MPa. More preferably, it is 1.5 to 20 MPa, and most preferably it is 2.0 to 18 MPa.
- the bullets that can be used in the present invention are not limited to these, but in general, alumina-based abrasive grains, silicon carbide-based abrasive grains, zirconia-based abrasive grains, cerium oxide, silica, oxide 1
- alumina-based abrasive grains silicon carbide-based abrasive grains, zirconia-based abrasive grains, cerium oxide, silica, oxide 1
- One or more types selected from the group of chromium, CBN abrasives, and diamond abrasives can be appropriately selected according to conditions such as grinding and the material of the material to be ground. Further, as long as the effects of the present invention are not impaired, the other than those exemplified above can be used.
- the grain size of the abrasive grains is less than 1 ⁇ m from F4 (3rd stage sieve opening 4.75mm) specified in JIS R6001 (Gritiness of grinding and grinding abrasives). Applicable to diameters up to 0.1 ⁇ m.
- the resinoid grindstone of the present invention may contain a filler!
- the filler include silica, talc, cryolite, barium sulfate, potassium sulfate, calcium carbonate, and the like, which can be appropriately selected depending on grinding conditions and the like.
- the resinoid mortar of the present invention may be made porous in order to synergistically enhance its effect.
- the pores can be found in the precursor composition of the wheel, surfactant, solid (eg, foamed polystyrene, polymethylmethacrylate, rubber or plastic foaming agent) and Z or liquid (eg, diisopropylazodicarboxylate). It can be formed by adding a pore forming agent.
- the materials of the surfactant and the pore forming agent are not particularly limited as long as the effects of the present invention are not impaired.
- the pores may be formed by stirring the precursor composition of the grindstone and forcibly entraining the bubbles.
- the abrasive volume ratio is 5 vol% to 55 vol 0/0
- air pore volume ratio is 5 vol% to 80 vol%
- a flexible epoxy resin and optionally an aromatic glycidyl ether type epoxy resin are prepared in a liquid state and mixed.
- an amount of curing agent based on the epoxy equivalent of epoxy resin is added to these mixtures and mixed until uniform.
- the filler, surfactant, liquid and Z or solid pore former are added and mixed to obtain a uniform mixture.
- abrasive grains, and if necessary, other fillers, solid pore-forming agents and the like are added and stirred to obtain a uniform dispersion.
- this dispersion is poured into an arbitrary mold and heated at 40 to 90 ° C. for about 2 to 6 hours to obtain a primary cured product.
- the grindstone of this invention was manufactured using the raw material shown below.
- Binder Dimer acid diglycidyl ester liquid 372 parts by weight
- Curing agent 59 parts by weight of amine curing agent
- Aerosil silicon fine powder 1 part by weight
- Surfactant 10 parts by weight of non-ionic surfactant
- a predetermined part by weight of dimer acid diglycidyl ester and bisphenol F diglycidyl ether prepared in a liquid state and a part by weight of a curing agent based on the epoxy equivalent are put into a stirring vessel, and then a predetermined part.
- Weight part of Aerosil was mixed and mixed until uniform.
- the obtained mixture was poured into a molding die having a predetermined size and heated at 70 ° C. for about 4 hours to obtain a primary cured product. After demolding the primary cured product, it was further heated at 145 ° C for about 6 hours to complete the curing reaction.
- the resulting cured product was finished to obtain a grindstone.
- the composition of the produced grindstone was 28% abrasive volume, 40% binder, and 32% pore volume based on the total volume of the grindstone.
- a grindstone of the present invention was produced according to the same procedure as in Example 1 using the raw materials shown below.
- Binder Dimer acid diglycidyl ester liquid 423 parts by weight
- Curing agent 53 parts by weight of amine curing agent
- Aerosil silicon fine powder 1 part by weight
- Surfactant 10 parts by weight of non-ionic surfactant
- the composition of the manufactured grindstone was, based on the total volume of the grindstone, an abrasive volume ratio of 26%, a binder volume ratio of 37%, and a pore volume ratio of 37%.
- a conventional grinding wheel disclosed in Japanese Patent Laid-Open No. 2004-160646 was manufactured using the following raw materials.
- Binder Bisphenol F diglycidyl ether liquid 755 parts by weight (Toto Kasei Co., Ltd., product number YDF—170)
- Curing agent 191 parts by weight of amine curing agent
- Surfactant 10 parts by weight of non-ionic surfactant
- Liquid foaming agent 30 parts by weight of diisopropyl azodicarboxylate
- liquid epoxy resin bisphenol F diglycidyl ether
- curing agent a curing agent
- surfactant a surfactant
- talc and barrels were collected and mixed until uniform.
- a predetermined part by weight of diisopropyl azodicarboxylate was collected, and further stirred until a desired bubble entrainment state was obtained, and mixed until uniform.
- the obtained mixture was poured into a mold for casting and heated at 90 ° C. for 1 hour to obtain a primary cured product. After demolding the primary cured product, it was further heated at 150 ° C for about 6 hours to complete the curing reaction.
- the obtained hardened material was finished to obtain a grindstone.
- the composition of the manufactured whetstone was, based on the total volume of the whetstone, an abrasive volume ratio of 7.5%, a binder volume ratio of 22.5%, and a pore volume ratio of 70%.
- Hardness was measured using a rubber hardness meter (A scale).
- the 25% compression hardness value was measured in accordance with the following procedure specified in JIS K6767 (foamed plastic polyethylene test method).
- Figure 2 shows a conceptual diagram showing the measurement method.
- the 25% compression hardness value (MPa) is obtained from the cross-sectional area of the test boulder 2 and the load after 20 seconds using the following formula.
- Test wheel 2 Drop the steel ball 5 with a drop height force of 2 to 200 mm.
- Rebound resilience (%) Rebound height (mm) Z drop height (200mm) X 100
- Table 1 shows the physical property evaluation test results of the grinding stones manufactured in Examples 1-2 and Comparative Example 1.
- the rubber hardness is 84 in Example 1 and 75 in Example 2, which is lower than 98 in Comparative Example 1. there were. This result shows that the grindstone of the present invention is soft.
- the 25% compression hardness was 7.3 MPa in Example 1 and 4.4 MPa in Example 2, but in Comparative Example 1, the grindstone was broken and could not be measured. This result shows that the grindstone of the present invention is less brittle than the prior art turret of Comparative Example 1.
- Example 1 The rebound resilience was 16% in Example 1 and 13.5% in Example 2, which was a lower value than 25% in Comparative Example 1. This result shows that the turret of the present invention has a high ability to absorb impact or load.
- a grinding test was conducted using the test wheels manufactured in Examples 1 and 2 and Comparative Example 1.
- the grinding performance of the grinding wheel was measured by measuring the grinding resistance, the amount of work material removed, and the finished surface roughness. Was evaluated.
- a grinding test was performed according to the following conditions.
- the grinding performance of the grinding wheel was evaluated by measuring the grinding resistance, the amount of work material removed, and the finished surface roughness.
- Table 2 shows the results of grinding resistance.
- Table 4 shows the results of the finished surface roughness of the work material.
- the resinoid granules according to the present invention are excellent in that chipping and microcracks are prevented by using a flexible epoxy resin as a binder. It is considered that surface roughness has been achieved.
- a grindstone of the present invention was produced according to the same procedure as in Example 1 using the raw materials shown below.
- Binder Dimer acid diglycidyl ester liquid 423 parts by weight
- Curing agent 53 parts by weight of amine curing agent
- Aerosil silicon fine powder 1 part by weight
- Surfactant 10 parts by weight of non-ionic surfactant
- the composition of the manufactured grindstone was, based on the total volume of the grindstone, an abrasive volume ratio of 26%, a binder volume ratio of 37%, and a pore volume ratio of 37%.
- the present invention uses 75% by weight of bisphenol A type epoxy resin, which is a flexible epoxy resin, and 25% by weight of bisphenol F diglycidyl ether, which is not flexible.
- bisphenol A type epoxy resin which is a flexible epoxy resin
- bisphenol F diglycidyl ether which is not flexible.
- a grindstone of the present invention was produced according to the same procedure as in Example 1 using the raw materials shown below.
- Binder Bisphenol A type epoxy resin 209 parts by weight
- Curing agent 230 parts by weight of aliphatic polyamine curing agent
- Aerosil silicon fine powder 2 parts by weight
- the composition of the manufactured grindstone was, based on the total volume of the grindstone, an abrasive grain volume ratio of 29.3%, a binder volume ratio of 41.1%, and a pore volume ratio of 29.6%.
- a conventional grinding wheel disclosed in Japanese Patent Laid-Open No. 2004-160646 was manufactured using the following raw materials.
- Binder Bisphenol F diglycidyl ether liquid 755 parts by weight
- Curing agent 191 parts by weight of amine curing agent
- Surfactant 10 parts by weight of non-ionic surfactant
- Liquid foaming agent 30 parts by weight of diisopropyl azodicarboxylate
- the composition of the manufactured whetstone is based on the total volume of the whetstone, and the abrasive volume ratio is 19.9%, the binder volume ratio is 30.1%, the filler volume ratio is 5.3%, and the pore volume ratio is 52.7%. Met.
- Example 3 and Example 4 and Comparative Example 2 The mortar manufactured in Example 3 and Example 4 and Comparative Example 2 was subjected to a physical property evaluation test of the cartridge, compressive strength value, and elastic modulus according to the following procedure.
- the compressive strength value is measured in accordance with JIS R1608, and is calculated from the load when the specimen is broken by applying a compressive load, using the following formula.
- Compressive strength value 4 X (breaking load) / (test specimen area)
- test piece is compressed at a compression speed of 3. OmmZmin using the pressure measuring head of the testing machine with the pressure direction from top to bottom as the pressurization direction, and the load when it breaks is recorded.
- the elastic modulus is measured in accordance with JIS R1602, and the test piece is subjected to a bending test at three points, and the bending force of the test piece is obtained by the following equation.
- Elastic modulus ⁇ 3 X (length of specimen) X (load 2—load 1MZ [2 X (width of specimen) X (thickness of specimen) 2 X ⁇ (deflection dimension 2) — ( Deflection size 1) ⁇ ]
- Elastic modulus ⁇ 3 X (length of specimen) X (load 2—load 1MZ [2 X (width of specimen) X (test Piece thickness) 2 X ⁇ (deflection dimension 2) — (deflection dimension 1) ⁇ ]
- Table 5 shows the physical property evaluation test results of the turrets produced in Examples 3 and 4 and Comparative Example 2.
- Example 4 Compared to Example 3, the compressive strength value of Example 4 is about twice, the compressive strength value of Comparative Example 2 is about 4 times, the elastic modulus of Example 4 is the same, and the elastic modulus of Comparative Example 2 was about 4 times. We will examine how this difference in physical properties affects grinding performance.
- Example 3 Example 4 and Comparative Example 2 had the same raw material mixture composition, and a polishing test was conducted using a grindstone manufactured by changing the grain size of the abrasive grains from # 180 to # 220.
- a polishing test was performed according to the following conditions.
- Polishing conditions Grinding method Plane plunge grinding
- the grinding performance of the grinding wheel was evaluated by measuring the amount of work material cutting and the amount of grinding wheel consumption.
- the amount of work material cut was determined by measuring the dimensions of the TFT glass, which is the work material, before and after polishing.
- the grinding wheel consumption was determined by measuring the grinding wheel dimensions before and after grinding (mm).
- the turret of Comparative Example 2 was destroyed immediately after the start of the test.
- the turret of Comparative Example 2 has a high compressive strength value, so the durability of the turret is expected, and thus the expected force. It is thought that it was destroyed because it could not withstand the polishing pressure. In the grindstones of Example 3 and Example 4, the mortar was not destroyed and could be polished normally. This is a ratio The reason is that the elastic modulus was lower than that of the comparative example.
- Example 3 The amount of cutting in Example 3 and Example 4 was the same. This is considered to reflect this physical property value because the elastic modulus was the same in the physical property test.
- Example 4 has half the mortar consumption compared to Example 3 and has twice the durability. This is because the compressive strength value of Example 4 is twice that of Example 3 in terms of physical property values, and this physical property value is considered to reflect the durability of the grindstone.
- the resinoid grindstone according to the present invention can be used for cylindrical grinding
- As a work material force applicable to ferrous materials and non-ferrous materials, especially grinding hard and brittle materials such as carbide, silicon, alumina, carbide, nitride, sapphire, quartz, various glass, and other ceramic materials. It can be suitably applied to polishing, and is particularly preferably used for finish polishing of the edge of a TFT liquid crystal glass material.
- the resinoid mortar according to the present invention is also suitably used for deburring of press-punched metal parts, polishing of uneven thin plate-like workpieces, and control turrets for centerless grinding. be able to.
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Abstract
Description
明 細 書 Specification
レジノィ ド砥石 Resinoid grinding wheel
技術分野 Technical field
[0001] 本発明は、レジノイド砲石及びその製造方法に関する。より詳しくは、本発明は、特 に硬脆性材料の研磨にぉ 、てチッビングやマイクロクラックを発生することがなく、プ レス打ち抜きされた金属部品のバリ取り加工及び凹凸のある薄板状の被削物の研磨 にお ヽて良好な研磨面品位を確保する、エポキシ榭脂を結合剤とするレジノイド砥石 及びその製造方法に関する。 [0001] The present invention relates to a resinoid mortar and a method for producing the same. More specifically, the present invention is particularly suitable for polishing a hard and brittle material, without causing chipping or microcracking, and deburring a pressed metal part, and a thin plate-like work with unevenness. The present invention relates to a resinoid grindstone using an epoxy resin as a binder, and a method for producing the same, which ensures a good polished surface quality in the polishing of objects.
背景技術 Background art
[0002] レジノイド砲石は、切れ味がよぐ高能率研削であるため、広く使用されている研削 砥石である。レジノイド砥石に使用される有機質結合剤としては、一般に、フエノール 榭脂、エポキシ榭脂、 PVA、その他有機榭脂としてはウレタン榭脂、メラミン榭脂など が使用されている。それら有機質結合剤の中でも、エポキシ榭脂を使用したレジノィ ド砥石は、砥粒と結合剤との良好な濡れ性などの効果により、深切込みなどの高能 率研削に好適に用いられる。また、エポキシ榭脂は流し込み成型が簡易に実施でき 、これを用いたレジノイド砥石は製造し易 、と 、う特徴もある。 [0002] Resinoid mortar is a grinding wheel that is widely used because of its high-efficiency grinding. Generally, phenolic resin, epoxy resin, PVA are used as organic binders for resinoid grinding wheels, and urethane resin, melamine resin, etc. are used as other organic resins. Among these organic binders, resin grindstones using epoxy resin are suitably used for high-efficiency grinding such as deep cutting due to good wettability between the abrasive grains and the binder. In addition, epoxy resin can be easily cast-molded, and a resinoid grindstone using this can be easily manufactured.
[0003] レジノイド砥石に使用されるエポキシ榭脂の種類としては、ビスフエノール A型ェポ キシ榭脂又はビスフエノール F型エポキシ榭脂が一般的である。この理由としては、 例えば、これらのエポキシ榭脂は容易に入手できること、これらのエポキシ榭脂を結 合剤として使用することにより、砥石自体の硬さや耐熱性が向上すること、また、砥粒 接着力をある程度維持できることなどが挙げられる。エポキシ榭脂を用いたレジノイド 砥石は、例えば、特許文献 1及び 2などに開示されている。 [0003] As types of epoxy resins used for resinoid grinding wheels, bisphenol A type epoxy resins or bisphenol F type epoxy resins are generally used. This is because, for example, these epoxy resins can be easily obtained, the hardness and heat resistance of the grindstone itself can be improved by using these epoxy resins as a binder, The ability to maintain a certain amount of power. Resinoid grinding wheels using epoxy resin are disclosed in Patent Documents 1 and 2, for example.
[0004] 一方、研削抵抗が低ぐ良好な仕上げ面粗度を達成することができるレジノイド砲 石を得るために、結合剤としてエポキシ榭脂を使用したレジノイド砥石を多孔質ィ匕す る試みがなされている。例えば、特許文献 3においては、有機質結合剤として液状の エポキシ榭脂を用いたレジノイド砲石にお!、て、液状発泡剤の作用により 40体積% 以上、必要に応じて 60〜80体積%の気孔率が得られている。その結果、得られた砲 石を使用した場合に、低い研削抵抗及び良好な仕上げ面粗度が達成されている。こ れは高 、気孔率の他に砲石の弾性率の低下が寄与して 、るものと考えられる。 特許文献 1:特開昭 48 - 77489号公報 [0004] On the other hand, in order to obtain a resinoid stone that can achieve a good finished surface roughness with low grinding resistance, there has been an attempt to make a resinoid wheel that uses epoxy resin as a binder porous. Has been made. For example, in Patent Document 3, a resinoid mortar using liquid epoxy resin as an organic binder is used! More than 40% by volume due to the action of the liquid foaming agent, and if necessary, 60-80% by volume. The porosity is obtained. The resulting gun When using stone, low grinding resistance and good finished surface roughness are achieved. This is thought to be due to the contribution of a reduction in the elastic modulus of the turret in addition to the porosity. Patent Document 1: Japanese Patent Laid-Open No. 48-77489
特許文献 2:特開平 10— 202536号公報 Patent Document 2: Japanese Patent Laid-Open No. 10-202536
特許文献 3 :特開 2004— 160646号公報 Patent Document 3: Japanese Unexamined Patent Application Publication No. 2004-160646
発明の開示 Disclosure of the invention
発明が解決しょうとする課題 Problems to be solved by the invention
[0005] 近年、シリコンウェハー、ガラス加工等、 IT関連部品の研削研磨の需要が増大して おり、その加工特性の要求が厳しくなつてきている。 [0005] In recent years, the demand for grinding and polishing IT-related parts such as silicon wafers and glass processing has increased, and the requirements for the processing characteristics have become severe.
[0006] この分野における被削物は、従来の主たる研削研磨の被カ卩ェ物である鉄系の材料 ではなぐガラス、セラミック材料であり、これらの材料は鉄系材料と比較して加工が難 しい、いわゆる硬脆性材料である。固定砥粒工具による硬脆性材料の加工において は、チッビングやマイクロクラックが発生しやす 、と 、う問題がある。 [0006] Workpieces in this field are glass and ceramic materials that are different from conventional iron-based materials that are the main objects of grinding and polishing, and these materials can be processed compared to iron-based materials. It is a difficult so-called hard and brittle material. In the processing of hard and brittle materials with fixed abrasive tools, there is a problem that chipping and microcracks are likely to occur.
[0007] 硬脆性材料の加工の一例として、 TFT液晶ガラス素材にぉ 、ては、メタルボンド結 合剤のダイヤモンドホイールによるエッジ力卩ェが行われる力 その加工条痕に内在す るマイクロクラックが、その後の発塵を誘発しやすい。発塵は後工程におけるコンタミ ネーシヨンやスクラッチキズによるパネルの不良につながることから、エッジカ卩ェにお V、ては、条痕を滑らかにしてマイクロクラックの除去あるいは軽減をは力る仕上研磨 工程が追加されることが多 、。 [0007] As an example of processing of a hard and brittle material, the TFT liquid crystal glass material has an edge force applied by a diamond wheel of a metal bond binder. , Easy to induce subsequent dusting. Dust generation leads to panel failure due to contamination and scratches in the subsequent process. Therefore, the edge polishing has a finishing polishing process that smoothes the streaks and removes or reduces microcracks. Often added,
[0008] 前述の特許文献 1及び 2に記載された、エポキシ榭脂を結合剤として用いた砲石を ガラスの仕上研磨に使用する場合には、結合剤と砥粒間の良好な接着性により前カロ ェの条痕を除去する切れ味と砲石の耐久性とを確保することができるものの、砲石の 弾力性に乏しぐワークへの衝撃によるさらなるチッビングやマイクロクラックを発生さ せやすい。このため、その防止と細かい加工面粗さの確保のためには、砲石に使用 する砥粒の微細化や砥石の多孔質化、更には、加工切込み深さや被削材への圧着 力を小さくかつ厳密に制御する等、加工条件の設定 ·制御を行う必要がある。 [0008] When a mortar using epoxy resin as a binder described in Patent Documents 1 and 2 described above is used for finish polishing of glass, due to good adhesion between the binder and abrasive grains. Although the sharpness to remove the streak of the previous caloe and the durability of the turret can be secured, it is easy to generate further chipping and microcracks due to the impact on the work, which is poor in the resilience of the turret. For this reason, in order to prevent this and ensure a fine surface roughness, the abrasive grains used in the turret are made finer, the grinding wheel is made more porous, and the depth of cut and the pressure applied to the work material are reduced. It is necessary to set and control machining conditions such as small and strict control.
[0009] また、前述の特許文献 3に開示された多孔質性砥石を硬脆性材料の研磨に使用 する場合、ある程度の改善効果がみられたが、必ずしも充分ではない。 [0010] また、プレス打ち抜きされた金属部品のバリ取り加工及び凹凸のある薄板状の被削 物の研磨にぉ 、ても、前記硬脆性材料の研磨と同じく研磨面の品質の確保と砲石の 耐久性とが求められている。 [0009] Further, when the porous grindstone disclosed in Patent Document 3 described above is used for polishing hard brittle materials, a certain degree of improvement effect was observed, but this is not always sufficient. [0010] Further, in the deburring process of press-punched metal parts and the polishing of uneven thin plate-like workpieces, the quality of the polished surface is ensured and the mortar is the same as the polishing of the hard brittle material. Durability is required.
[0011] レジノイド砲石においてエポキシ榭脂以外で主に使用されている結合剤榭脂として は、例えばフエノール榭脂、ポリイミド榭脂、ポリウレタン榭脂、 PVA榭脂、ゴム系榭脂 などが挙げられるが、フエノール榭脂、ポリイミド榭脂は硬い樹脂で機械的強度に優 れており、砲石の耐久性の面においては問題ないが、榭脂自体に柔軟性がなぐ硬 脆'性材料の研削研磨には向!、て!ヽな 、。 [0011] Examples of binder resins mainly used in resinoid mortars other than epoxy resins include phenol resin, polyimide resin, polyurethane resin, PVA resin, rubber-based resin, and the like. However, phenol resin and polyimide resin are hard resins and excellent in mechanical strength, and there is no problem in terms of durability of the mortar, but grinding of hard and brittle materials that do not have flexibility in the resin itself. Suitable for polishing! ! Cunning.
[0012] ポリウレタン榭脂、 PVA榭脂、ゴム系榭脂は、榭脂自体に柔軟性があり、硬脆性材 料の研削研磨は可能である力 軟らかい榭脂であり砲粒保持力が弱いため、砲石の 耐久性が低ぐ砲石交換頻度が短くなり生産効率は悪い。 [0012] Polyurethane resin, PVA resin, and rubber-based resin are flexible, and are capable of grinding and polishing hard and brittle materials. Since the durability of the turret is low, the turret replacement frequency is shortened and the production efficiency is poor.
[0013] そこで、本発明は、上記の問題点に鑑みて、特に硬脆性材料の研削研磨カ卩ェにお V、てチッビングやマイクロクラックを発生することなぐ良好な切れ味と耐久性が得ら れるエポキシ榭脂を結合剤とするレジノイド砥石及びその製造方法を提供することを 課題とする。 [0013] Therefore, in view of the above-mentioned problems, the present invention has obtained a good sharpness and durability without generating V, chipping or microcracks, especially in a grinding and polishing case of a hard and brittle material. It is an object of the present invention to provide a resinoid grindstone using an epoxy resin as a binder and a method for producing the same.
課題を解決するための手段 Means for solving the problem
[0014] 上記課題を解決するため、本発明者らは鋭意研究を行った結果、エポキシ榭脂を 結合剤とする砥石に特定の柔軟特性を付与することにより、硬脆性材料の研磨加工 においても被削材に対する衝撃力が小さぐチッビングやマイクロクラックの発生を防 止しつつ、前加工面の条痕を除去できる研磨力と良好な耐久性を確保することがで きることを発見し、本発明を完成させた。 [0014] In order to solve the above-mentioned problems, the present inventors have conducted intensive research, and as a result, by imparting specific softness characteristics to a grindstone using an epoxy resin as a binder, it is possible to polish hard brittle materials. It was discovered that it was possible to ensure polishing power and good durability that could remove streaks on the pre-processed surface while preventing the occurrence of chipping and microcracks with low impact force on the work material. Completed the invention.
[0015] 本発明のレジノイド砥石は、砥粒がエポキシ榭脂で固定ィ匕され、該エポキシ榭脂が 可撓性エポキシ榭脂であることを特徴とする。前記レジノイド砥石は、圧縮強度値 CFI S R1608に準拠して測定)力 〜 20MPaかつ弾性率 (JIS R1602に準拠して測定) が 30〜40MPaであることが好ましい。また、前記可撓性エポキシ榭脂は、ダイマー 酸変成エポキシ榭脂であることが好まし 、。 [0015] The resinoid grindstone of the present invention is characterized in that the abrasive grains are fixed with an epoxy resin and the epoxy resin is a flexible epoxy resin. The resinoid grindstone preferably has a compressive strength value of CFI S R1608 (measured according to CFI S R1608) force and 20 MPa and an elastic modulus (measured according to JIS R1602) of 30 to 40 MPa. The flexible epoxy resin is preferably a dimer acid-modified epoxy resin.
[0016] 本発明のレジノイド砥石において、前記エポキシ榭脂は、芳香族グリシジルエーテ ル型エポキシ榭脂をエポキシ榭脂の全重量基準で 40重量%まで含むことが好まし い。また、前記芳香族グリシジルエーテル型エポキシ榭脂は、ビスフエノーノレ A型ェ ポキシ榭脂又はビスフエノール F型エポキシ榭脂であることが好ましい。 [0016] In the resinoid grindstone of the present invention, the epoxy resin preferably contains an aromatic glycidyl ether type epoxy resin up to 40% by weight based on the total weight of the epoxy resin. Yes. Further, the aromatic glycidyl ether type epoxy resin is preferably bisphenol A type epoxy resin or bisphenol F type epoxy resin.
[0017] また、本発明のレジノイド砥石は、粉末若しくは液状の発泡剤、無機質若しくは有機 質の気孔形成剤、又は界面活性剤を用いることにより多気孔とされていることが好ま しい。 [0017] Further, it is preferable that the resinoid grindstone of the present invention has a large pore by using a powder or liquid foaming agent, an inorganic or organic pore forming agent, or a surfactant.
[0018] 更に、本発明のレジノイド砥石にお!、て、該レジノイド砥石のゴム硬度は、ゴム硬度 [0018] Further, in the resinoid grindstone of the present invention, the rubber hardness of the resinoid grindstone is rubber hardness.
Aスケールにより測定して 50〜90であることが好ましい。 It is preferably 50 to 90 as measured by A scale.
[0019] また、該レジノイド砥石の 25%圧縮硬度 (JIS K6767)は、 1. 0〜35. OMPaであ ることが好ましい。 [0019] The resinoid grinding wheel preferably has a 25% compression hardness (JIS K6767) of 1.0 to 35. OMPa.
[0020] 更に、該レジノイド砲石の反発弾性率は 5〜20%であることが好ましい。 [0020] Furthermore, the resilience modulus of the resinoid mortar is preferably 5 to 20%.
発明の効果 The invention's effect
[0021] 本発明によれば、特に硬脆性材料の研削にお ヽてチッビングを発生することのな!/ヽ 、エポキシ榭脂を結合剤とするレジノイド砥石及びその製造方法が提供される。本発 明のレジノイド砥石は、エポキシ榭脂を使用して!/ヽるので結合剤と砥粒との接着性が 確保されて ヽるため耐久性の点では問題がな 、エポキシ榭脂を使用し、特に硬脆性 材料の研磨において、研削抵抗が低ぐチッビングが発生しない、言い換えれば良 好な仕上げ面粗度を付与することができる。 [0021] According to the present invention, there is provided a resinoid grindstone using an epoxy resin as a binder, and a method for producing the same, without generating any chipping particularly when grinding hard and brittle materials. The resinoid grindstone of the present invention uses an epoxy resin, so the adhesion between the binder and the abrasive grains is secured, so there is no problem in terms of durability, and the epoxy resin is used. In particular, when polishing hard and brittle materials, chipping with low grinding resistance does not occur, in other words, good finished surface roughness can be imparted.
図面の簡単な説明 Brief Description of Drawings
[0022] [図 1]図 1は、砥石の反発弾性率の測定方法を示す概念図である。 FIG. 1 is a conceptual diagram showing a method for measuring the rebound resilience of a grindstone.
[図 2]図 2は、砲石の 25%圧縮硬度値の測定方法を示す概念図である。 FIG. 2 is a conceptual diagram showing a method for measuring a 25% compression hardness value of a turret.
符号の説明 Explanation of symbols
[0023] 1 荷重測定 加圧ヘッド [0023] 1 Load measurement Pressure head
2 試験用砥石 2 Test wheel
3 下台 3 Lower platform
4 加圧方向(鉛直方向上から下) 4 Pressurization direction (vertical direction from top to bottom)
5 鋼球 5 Steel balls
発明を実施するための最良の形態 [0024] 以下、本発明のレジノイド砲石及びその製造方法の好適な実施形態について説明 する。 BEST MODE FOR CARRYING OUT THE INVENTION [0024] Hereinafter, preferred embodiments of the resinoid mortar of the present invention and the method for producing the same will be described.
[0025] まず、本発明のレジノイド砥石の好適な実施形態について説明する。 First, a preferred embodiment of the resinoid grindstone of the present invention will be described.
[0026] 本発明の課題を解決するために、砥石の物性面に着目すると、硬脆性材料の研磨 工程における衝撃緩和のため、柔軟特性が求められる。砥石がこのような特性を有 することにより、チッビングやマイクロクラックの発生を防止することができる。 [0026] In order to solve the problems of the present invention, focusing on the physical properties of the grindstone, a flexible characteristic is required to reduce the impact in the polishing process of the hard and brittle material. Since the grindstone has such characteristics, it is possible to prevent the occurrence of chipping and microcracks.
[0027] また、結合剤と砥粒の間の良好な接着性に加え、更に柔軟性が付与された砥石は 、プレス打ち抜きされた金属部品のバリ取り加工や、凹凸のある薄板状の被削物の研 磨においても、被削材に素早くなじむことができ、柔軟性をもたない従来技術の砲石 を使用する場合とは対照的に、被削物の均一な研削研磨面と砲石の耐久性を同時 に確保することができる。 [0027] Further, in addition to the good adhesion between the binder and the abrasive grains, the grindstone further imparted with flexibility can be used for deburring metal parts that have been punched out of stamping, and for thin plate-like workpieces with unevenness. Even when polishing a workpiece, it is easy to adapt to the work material, and in contrast to using a non-flexible prior art turret, the uniform ground and polished surface of the workpiece and the turret Can be ensured at the same time.
[0028] 本発明のレジノイド砥石は、砥粒がエポキシ榭脂で固定ィ匕された砥石である。本発 明において使用することができるエポキシ榭脂は、可撓性エポキシ榭脂である。可撓 性エポキシ榭脂を用いることにより、砲石を製造するための前駆体組成物であるェポ キシ系熱硬化性榭脂組成物と、その硬化物である砥石は、充分な柔軟性を有するこ とができる。この柔軟性により、本発明のレジノイド砥石は、低温域から高温域までの 広 、温度範囲にわたって高 、伸度を発現することができる。 The resinoid grindstone of the present invention is a grindstone in which abrasive grains are fixed with an epoxy resin. The epoxy resin that can be used in the present invention is a flexible epoxy resin. By using a flexible epoxy resin, an epoxy-based thermosetting resin composition that is a precursor composition for producing a turret and a grindstone that is a cured product have sufficient flexibility. You can have it. Due to this flexibility, the resinoid grindstone of the present invention can exhibit a high degree of elongation over a wide temperature range from a low temperature range to a high temperature range.
[0029] 更に、本発明のレジノイド砥石は、 JIS R1608 (ファインセラミックスの圧縮強さ試験 方法)に準拠して測定して、圧縮強度値が 5〜20MPaであり、かつ、 JIS R1602 (フ ァインセラミックスの弾性率試験方法)に準拠して測定して、弾性率が 30〜40MPa であることが好ましい。 [0029] Further, the resinoid grindstone of the present invention has a compressive strength value of 5 to 20 MPa as measured according to JIS R1608 (Method for testing compressive strength of fine ceramics), and JIS R1602 (Fine It is preferable that the elastic modulus is 30 to 40 MPa as measured according to the elastic modulus test method of ceramics).
[0030] 本発明の課題である、ガラス、シリコンウェハー及びセラミック材料などの 、わゆる 硬脆性材料の研削研磨加工にぉ ヽて良好な性能を得るためには、砥粒と結合剤と の良好な濡れ性を実現し、かつ製造し易いエポキシ榭脂を用いて柔軟性と耐久性を 付与することが重要である。力かる特徴を砲石に提供するために鋭意検討した結果、 砲石物性値として、圧縮強度値 (JIS R1608に準拠して測定)が 5〜20MPaであり、 かつ弾性率 (JIS R1602に準拠して測定)が 30〜40MPaであることが好ましいこと が分かった。 [0031] 一般的には、圧縮強度値が高くなるとそれに比例して弾性率も高くなる。圧縮強度 値が高くなると、砥粒保持力が増し砥石の耐久性は向上する力 弾性率もこれに比 例して上昇すると砥石の柔軟性が喪失される。このような砥石で硬脆性材料を研削 すると、弾性率が高いため研削研磨時の衝撃により硬脆性材料が破壊したり、あるい はチッビングやマイクロクラックが発生する。このため、ガラス、シリコンウェハー及び セラミック材料などの 、わゆる脆性材料の研削研磨加工にぉ 、ては良好な研削性能 を得ることができない。この問題に対処するため弾性率を低くすると、圧縮強度値も 低くなるため砲石の消耗が大きくなり、砲石の交換頻度が多くなり生産効率が下がつ てしまう。そこで、本発明者らは、砥石結合剤として可撓性エポキシ榭脂を用い、砥 石物性値として圧縮強度値と弾性率に着目して、これらの物性を適正な範囲に調整 することにより良好な研削性能を有するレジノイド砲石を提供できると考え、圧縮強度 値 (JIS R1608に準拠して測定)が 5〜20MPaかつ弾性率 (JIS R1602に準拠して 測定)が 30〜40MPaである場合に良好な研削性能を発揮することを見出した。 [0030] In order to obtain good performance over the grinding / polishing processing of the hard and brittle materials such as glass, silicon wafers and ceramic materials, which is the subject of the present invention, the abrasive and the binder must be excellent. It is important to provide flexibility and durability using an epoxy resin that achieves excellent wettability and is easy to manufacture. As a result of diligent research to provide powerful features to the boulder, as a boulder physical property value, the compressive strength value (measured in accordance with JIS R1608) is 5 to 20 MPa, and the elastic modulus (in accordance with JIS R1602) (Measurement) was found to be preferably 30 to 40 MPa. [0031] Generally, as the compressive strength value increases, the elastic modulus increases in proportion thereto. As the compressive strength value increases, the holding power of the abrasive grains increases and the durability of the grinding wheel improves, and the elastic modulus of the grinding wheel rises proportionally, and the flexibility of the grinding wheel is lost. When grinding a brittle material with such a grindstone, the elastic modulus is so high that the hard brittle material is destroyed by the impact during grinding or polishing, or chipping and microcracks are generated. For this reason, good grinding performance cannot be obtained for grinding and polishing of brittle materials such as glass, silicon wafers and ceramic materials. If the elastic modulus is lowered to cope with this problem, the compressive strength value also becomes lower, so that the consumption of the turret increases, the replacement frequency of the mortar increases, and the production efficiency decreases. Therefore, the present inventors use a flexible epoxy resin as a grindstone binder, pay attention to the compressive strength value and the elastic modulus as the grindstone physical properties, and adjust these physical properties to an appropriate range. If the compressive strength value (measured according to JIS R1608) is 5-20 MPa and the elastic modulus (measured according to JIS R1602) is 30-40 MPa It has been found that it exhibits good grinding performance.
[0032] 圧縮強度値は、 JIS R1608に準拠して測定され、試験片に圧縮荷重をかけて破壊 したときの荷重から、次式により求められる。 [0032] The compressive strength value is measured in accordance with JIS R1608, and is determined from the load when the test piece is broken by applying a compressive load by the following equation.
[0033] 圧縮強度値 =4 X (破壊荷重) / (試験片面積) [0033] Compressive strength value = 4 X (Fracture load) / (Specimen area)
弾性率は、 JIS R1602に準拠して測定され、試験片に 3点の曲げのテストを実施し 、試験片のたわみ力 次式により求められる。 The elastic modulus is measured in accordance with JIS R1602, and the test piece is subjected to a bending test at three points, and the bending force of the test piece is obtained by the following equation.
[0034] 弾性率 = {3 X (試験片の長さ) X (荷重 2—荷重 1MZ〔2 X (試験片の幅) X (試験 片の厚さ) 2 X { (たわみ寸法 2)—(たわみ寸法 1) }〕 [0034] Elastic modulus = {3 X (length of specimen) X (load 2—load 1MZ [2 X (width of specimen) X (thickness of specimen) 2 X {(deflection dimension 2) — ( Deflection size 1)}]
圧縮強度値は、 5〜20MPaであることが好ましい。圧縮強度値が 5MPaより小さい と、砲石の耐久性が損なわれ、砲石の消耗が大きくなり生産効率が悪くなる。圧縮強 度値が 20MPaより大きいと、砲粒の保持力が高くなりすぎ、摩耗して切れ刃を形成し な!ヽ砥粒が脱落せず砥石に保持されてしまうので切れ味が低下する。圧縮強度値は 、より好ましくは、 7〜18MPaである。 The compressive strength value is preferably 5 to 20 MPa. If the compressive strength value is less than 5MPa, the durability of the turret will be impaired, the consumption of the mortar will increase, and the production efficiency will deteriorate. If the compressive strength value is greater than 20 MPa, the holding power of the cannon will become too high and it will not wear out to form a cutting edge! The abrasive will not fall off and will be held on the grindstone, resulting in poor sharpness. The compressive strength value is more preferably 7 to 18 MPa.
[0035] 弾性率は、 30〜40MPaであることが好ましい。弾性率が 30MPaより小さいと、弹 力性が大きすぎ、切れ刃となる砲粒が砲石内部に凹んで切れ味が悪くなる。弾性率 力 OMPaより大きいと、砲石の弾力性が不足し硬脆性材料が破壊したり、あるいは チッビングやマイクロクラックが発生する。弾性率は、より好ましくは、 35〜40MPaで あり、更により好ましくは、 37〜39MPaである。 [0035] The elastic modulus is preferably 30 to 40 MPa. If the elastic modulus is less than 30 MPa, the repulsive force is too high, and the barrel that becomes the cutting edge is recessed inside the turret, resulting in poor sharpness. If the modulus of elasticity is greater than OMPa, the resilience of the turret is insufficient and the brittle material is destroyed, or Chipping and microcracks occur. The elastic modulus is more preferably 35 to 40 MPa, and even more preferably 37 to 39 MPa.
[0036] 可撓性エポキシ榭脂としては、エポキシ榭脂硬化剤により硬化させた後においても 、柔軟性を発現し得るものであれば特に限定されない。使用することができる可撓性 エポキシ榭脂としては、これらに限定されないが、ポリエチレングリコールのジグリシジ ルエーテル、ポリプロピレングリコールのジグリシジルエーテル、炭素数が 2〜9 (好ま しくは 2〜4)のアルキレン基を含むポリオキシアルキレングリコールやポリテトラメチレ ンエーテルグリコール等を含む長鎖ポリオールのポリグリシジルエーテル;グリシジル[0036] The flexible epoxy resin is not particularly limited as long as it can exhibit flexibility even after being cured with an epoxy resin hardener. Examples of flexible epoxy resins that can be used include, but are not limited to, polyethylene glycol diglycidyl ether, polypropylene glycol diglycidyl ether, and alkylene groups having 2 to 9 carbon atoms (preferably 2 to 4 carbon atoms). A polyglycidyl ether of a long-chain polyol containing polyoxyalkylene glycol containing polytetraalkylene ether glycol, etc .; glycidyl
(メタ)アタリレートと、エチレン、酢酸ビュルもしくは (メタ)アクリル酸エステル等のラジ カル重合性モノマーとの共重合体;共役ジェン化合物を主体とする(共)重合体又は その部分水添物の(共)重合体における不飽和炭素の二重結合をエポキシィヒしたも の; 1分子当たり 1個以上、好ましくは 2個以上のエポキシ基を有するポリエステル榭 脂;ウレタン結合やポリ力プロラタトン結合を導入した、ウレタン変成エポキシ榭脂ゃポ リカプロラタトン変成エポキシ榭脂;ダイマー酸又はその誘導体の分子内にエポキシ 基を導入したダイマー酸変成エポキシ榭脂; NBR、 CTBN、ポリブタジエン、アクリル ゴム等のゴム成分の分子内にエポキシ基を導入したゴム変成エポキシ榭脂などが挙 げられる。 Copolymer of (meth) acrylate and a radically polymerizable monomer such as ethylene, butyl acetate or (meth) acrylic acid ester; (co) polymer mainly composed of conjugated gen compound or partially hydrogenated product thereof (Co) Polymer double bond of unsaturated carbon in epoxy; Polyester resin having 1 or more, preferably 2 or more epoxy groups per molecule; Urethane bond or poly force prolataton bond introduced , Urethane modified epoxy resin, Polycaprolatatone modified epoxy resin; Dimer acid modified epoxy resin with an epoxy group introduced into the molecule of dimer acid or its derivatives; NBR, CTBN, polybutadiene, acrylic rubber, etc. Examples include rubber-modified epoxy resins with an epoxy group introduced into the molecule.
[0037] 可撓性付与剤を添加したエポキシ榭脂も使用することができる。可撓性付与剤は、 架橋密度を下げて架橋点間分子量を大きくすることにより、エポキシ榭脂硬化物に柔 軟性を付与するものである。可撓性付与剤として使用される化合物は、モノェポキサ イド、ジェポキサイド、ポリオール、ポリチオール、ポリエチレングリコール、ポリプロピ レンダリコールなどが挙げられる。 [0037] An epoxy resin added with a flexibility-imparting agent can also be used. The flexibility imparting agent imparts flexibility to the cured epoxy resin by decreasing the crosslinking density and increasing the molecular weight between the crosslinking points. Examples of the compound used as the flexibility-imparting agent include monoepoxide, gepoxide, polyol, polythiol, polyethylene glycol, and polypropylene glycol.
[0038] また、硬化剤において長鎖の飽和又は不飽和の脂肪酸 (例えば Cが 10以上)を導 入しても同様な効果が得られる。 [0038] The same effect can be obtained by introducing a long-chain saturated or unsaturated fatty acid (for example, C is 10 or more) into the curing agent.
[0039] 好ま 、可撓性エポキシ榭脂は、可撓性付与の効果が大きくかつ入手が容易なダ イマ一酸又はその誘導体の分子内にエポキシ基を導入したダイマー酸変成エポキシ 榭脂である。具体的には、これらに限定されないが、下記の化学式で代表されるダイ マー酸ジグリシジルエステルが好まし 、。 [0040] [化 1] [0039] Preferably, the flexible epoxy resin is a dimer acid modified epoxy resin in which an epoxy group is introduced into the molecule of dimer acid or its derivative, which has a large effect of imparting flexibility and is easily available. . Specifically, although not limited thereto, dimer acid diglycidyl ester represented by the following chemical formula is preferred. [0040] [Chemical 1]
[0041] また、本発明のレジノイド砲石にぉ 、ては、耐熱性の付与及び Z又は弾力性の調 整のために、前記可撓性エポキシ榭脂とともに、芳香族グリシジルエーテル型ェポキ シ榭脂を使用してもよい。芳香族グリシジルエーテル型エポキシ榭脂は、使用するェ ポキシ榭脂の全重量基準で、 40重量%まで使用することができる。芳香族グリシジル エーテル型エポキシ榭脂の量力 使用するエポキシ榭脂の全重量基準で 40重量% を超えると、砲石の弾力性が失われ、本発明の効果を損なうことから不都合である。 [0041] Further, the resinoid mortar of the present invention, for the purpose of imparting heat resistance and adjusting Z or elasticity, together with the flexible epoxy resin, is an aromatic glycidyl ether type epoxy resin. Fats may be used. Aromatic glycidyl ether type epoxy resin can be used up to 40% by weight based on the total weight of epoxy resin used. Amount of aromatic glycidyl ether type epoxy resin If it exceeds 40% by weight based on the total weight of the epoxy resin used, the resilience of the turret is lost, which is disadvantageous because the effect of the present invention is impaired.
[0042] 芳香族グリシジルエーテル型エポキシ榭脂は、芳香族ジグリシジルエーテル類、芳 香族トリグリシジルエーテル類及び芳香族ポリグリシジルエーテル類等がある。 [0042] The aromatic glycidyl ether type epoxy resin includes aromatic diglycidyl ethers, aromatic triglycidyl ethers and aromatic polyglycidyl ethers.
[0043] 芳香族グリシジルエーテル型エポキシ榭脂の代表的な例としては、これらに限定さ れな 、が、芳香族ジグリシジルエーテル類である次式: [0043] Representative examples of aromatic glycidyl ether type epoxy resins include, but are not limited to, the following formulas that are aromatic diglycidyl ethers:
[0044] [化 2] [0044] [Chemical 2]
[0045] のビスフエノール Aジグリシジルェ テル及び次式: [0045] Bisphenol A diglycidyl ester and the following formula:
[0046] [化 3] [0046] [Chemical 3]
[0047] のビスフ ノール Fジグリシジルエーテルが挙げられる。これらは、砲粒に対して良好 な接着を示し、入手の容易であることから、本発明において好適に用いることができ る。 [0047] Bisphenol F diglycidyl ether of These are good against the barrel It can be suitably used in the present invention because it exhibits excellent adhesion and is readily available.
[0048] 他の芳香族ジグリシジルエーテル類としては、ビスフエノール Sジグリシジルエーテ ル、レゾルシノールジグリシジルエーテル、フタル酸ジグリシジルエーテル等が挙げら れる。 [0048] Examples of other aromatic diglycidyl ethers include bisphenol S diglycidyl ether, resorcinol diglycidyl ether, and diglycidyl ether phthalate.
[0049] 芳香族トリグリシジルエーテル類としては、トリヒドロキシフエ-ルプロパンのトリグリシ ジルエーテル、パラーァミノフエノールのグリシジルエーテルジグリシジルァミン、 4, 4 —ビス(4—ヒドロキシフエ-ルペンタノイツク酸)のジグリシジルエーテルグリシジルェ ステル、芳香族ポリグリシジルエーテル類としては、テトラフエ-レンェタンのテトラグ シリジルエーテル、テトラグリシジルジアミノジフエニルメタン、テトラグリシジルメタキシ レンジァミン、クレゾ一ルノボラックポリグリシジルエーテル等が挙げられる。 [0049] Aromatic triglycidyl ethers include triglycidyl ether of trihydroxyphenol propane, glycidyl ether diglycidylamine of para-aminophenol, 4, 4-bis (4-hydroxyphenol pentanoic acid) di- Examples of the glycidyl ether glycidyl ester and aromatic polyglycidyl ethers include tetraphenyl-leneethane tetraglycidyl ether, tetraglycidyldiaminodiphenylmethane, tetraglycidylmetaxylenediamine, cresolyl novolac polyglycidyl ether, and the like.
[0050] また、本発明の効果を損なわない限り、上記に例示した以外のエポキシ榭脂も使用 することができる。 [0050] In addition, epoxy resins other than those exemplified above can be used as long as the effects of the present invention are not impaired.
[0051] 本発明のレジノイド砥石は、 5〜20MPaの圧縮強度値 (JIS R1608に準拠して測 定)及び 30〜40MPaの弾性率 (JIS R1602に準拠して測定)に代表される特定の 柔軟性を有することを特徴とする。可撓性エポキシ榭脂としてダイマー酸変成ェポキ シ榭脂を使用する場合は、本発明のレジノイド砥石の柔軟性は、以下の 3つのパラメ ータ (ゴム硬度、 25%圧縮硬度、反発弾性率)〖こよっても規定することができる。 [0051] The resinoid grindstone of the present invention has a specific flexibility represented by a compressive strength value of 5 to 20 MPa (measured according to JIS R1608) and an elastic modulus of 30 to 40 MPa (measured according to JIS R1602). It has the property. When dimer acid modified epoxy resin is used as the flexible epoxy resin, the flexibility of the resinoid grinding wheel of the present invention is determined by the following three parameters (rubber hardness, 25% compression hardness, rebound resilience) It can be defined even if it is called.
1.ゴム硬度 1. Rubber hardness
ゴム硬度は、ゴム硬度計 (Aスケール)を用いて測定する。 Rubber hardness is measured using a rubber hardness meter (A scale).
2. 25%圧縮硬度 2. 25% compression hardness
25%圧縮硬度は、 JIS K6767 (発泡プラスチック—ポリエチレン—試験方法)に規 定された以下の手順にしたがい測定する。測定方法を示す概念図を図 2に示す。 The 25% compression hardness is measured according to the following procedure specified in JIS K6767 (Foamed Plastics-Polyethylene-Test Method). Figure 2 shows a conceptual diagram showing the measurement method.
(1)試験用砲石 2を適する試験機の下台 3に設置する。 (1) Place the test stone 2 on the base 3 of a suitable testing machine.
(2)鉛直方向上から下を加圧方向 4として、試験機の荷重測定加圧ヘッド 1により、圧 縮速度 lOmmZminで試験用砥石 2のはじめの厚さの 25%だけ圧縮して停止し、 2 0秒後の荷重 (N)を測定する。 (2) With the pressing direction 4 from the top to the bottom in the vertical direction, the tester's load measurement pressurizing head 1 compresses it by 25% of the initial thickness of the test wheel 2 at a compression speed lOmmZmin and stops. 2 Measure the load (N) after 0 seconds.
(3)試験用砲石 2の断面積と 20秒後の荷重から、次式により 25%圧縮硬度値 (MPa )を求める。 (3) From the cross-sectional area of test boulder 2 and the load after 20 seconds, the 25% compression hardness value (MPa )
[0052] 25%圧縮硬度値 (MPa) = 20秒後の荷重 (N) Z試験用砲石の断面積 (mm2) 3.反発弾性率 [0052] 25% compression hardness value (MPa) = Load after 20 seconds (N) Cross-sectional area of Z test turret (mm 2 ) 3. Rebound resilience
反発弾性率は、 JIS K6255 (加硫ゴム及び熱可塑性ゴムの反発弾性試験方法)を 参考にした以下の手順にしたカ^、測定する。測定方法を示す概念図を図 1に示す。 The impact resilience is measured using the following procedure with reference to JIS K6255 (Rebound resilience test method for vulcanized rubber and thermoplastic rubber). Figure 1 shows a conceptual diagram showing the measurement method.
(1)ロックウェル硬度測定用の 1Z4インチ鋼球 5を用意する。 (1) Prepare 1Z4 inch steel ball 5 for Rockwell hardness measurement.
(2)試験用砥石 2を設置する。 (2) Install the test wheel 2.
(3)試験用砥石 2から 200mmの落下高さ力も鋼球 5を落下させる。 (3) Test wheel 2 Drop the steel ball 5 with a drop height force of 2 to 200 mm.
(4) 1Z4インチ鋼球 5が試験用砲石 2に当り、跳ね返った反発高さを測定する。 (4) The 1Z4 inch steel ball 5 hits the test boulder 2 and the bounce height is measured.
(5)落下高さと反発高さから、次式により反発弾性率 (%)を求める。 (5) From the drop height and rebound height, obtain the rebound resilience (%) by the following formula.
[0053] 反発弾性率 (%) =反発高さ (mm) Z落下高さ(200mm) X 100 [0053] Rebound resilience (%) = Rebound height (mm) Z drop height (200mm) X 100
本発明のレジノイド砲石において、ゴム硬度は、ゴム硬度計 Aスケールにより測定し て 50〜90であることが好ましい。ゴム硬度が 50未満であると、砥石が軟ら力べなり、 研磨力が不足することから不都合である。一方、ゴム硬度が 90より大きくなると、砲石 が硬くなり、柔軟性がなくなり、チッビングやマイクロクラックが発生しやすくなることか ら不都合である。本発明のレジノイド砲石において、硬度は、ゴム硬度計 Aスケール により測定して、より好ましくは、 55〜90であり、最も好ましくは、 60〜90である。 In the resinoid mortar of the present invention, the rubber hardness is preferably 50 to 90 as measured by a rubber hardness meter A scale. If the rubber hardness is less than 50, the grindstone becomes soft and strong, which is inconvenient because the polishing power is insufficient. On the other hand, if the rubber hardness is higher than 90, the turret becomes hard, the flexibility is lost, and chipping and microcracks tend to occur. In the resinoid mortar of the present invention, the hardness is more preferably 55 to 90, and most preferably 60 to 90, as measured by a rubber hardness meter A scale.
[0054] 本発明のレジノイド砲石にぉ 、て、反発弾性率は 5〜20%であることが好まし 、。 [0054] The resinoid mortar of the present invention preferably has a rebound resilience of 5 to 20%.
反発弾性率が 5%未満であると、砲石が軟らかくなり、研磨圧力に対して圧力応答性 が悪くなり、切れ味が低下することから不都合である。また、研磨圧力を変更したとき の圧力応答性が悪くなることからも好ましくない。一方、反発弾性率が 20%を超える と、砲石が硬くなりチッビングやマイクロクラックが発生することから不都合である。 If the impact resilience is less than 5%, the turret becomes soft, the pressure responsiveness to the polishing pressure becomes poor, and the sharpness is lowered, which is inconvenient. Further, it is not preferable because the pressure response when the polishing pressure is changed is deteriorated. On the other hand, if the impact resilience exceeds 20%, the turret becomes hard and chipping and microcracks occur.
[0055] 本発明のレジノイド砥石において、 25%圧縮硬度 (JIS K6767)は、 1. 0〜35MP aであることが好ましい。 25%圧縮硬度が 1. OMPa未満であると、砥石が軟ら力べなり 、研磨力が不足することから不都合である。一方、 25%圧縮硬度が 35MPaより大き いと、砲石が硬くなり研磨圧力に対して圧力応答性が悪くなり、チッビングやマイクロ クラックが発生し、場合により砲石が破壊することから不都合である。本発明のレジノ イド砥石において、 25%圧縮硬度は、より好ましくは、 1. 0〜25MPaであり、更によ り好ましく ίま、 1. 5〜20MPaであり、最も好ましく ίま、 2. 0〜18MPaである。 [0055] In the resinoid grindstone of the present invention, the 25% compression hardness (JIS K6767) is preferably 1.0 to 35 MPa. A 25% compression hardness of less than 1. OMPa is inconvenient because the grindstone softens and lacks polishing power. On the other hand, if the 25% compression hardness is greater than 35 MPa, the boulder is hard and pressure responsiveness to the polishing pressure is deteriorated, chipping and micro cracks are generated, and the boulder may be destroyed in some cases. In the resinoid grindstone of the present invention, the 25% compression hardness is more preferably 1.0 to 25 MPa. More preferably, it is 1.5 to 20 MPa, and most preferably it is 2.0 to 18 MPa.
[0056] 本発明において使用することができる砲粒は、これらに限定されないが、一般的に は、アルミナ系砥粒、炭化ケィ素系砥粒、ジルコユア系砥粒、酸化セリウム、シリカ、 酸ィ匕クロム、 CBN砥粒、及びダイヤモンド砥粒の群カゝら選択される 1種類以上である 。その組合せは、研削等の条件及び被研削材の材質に応じて適宜選択することがで きる。また、本発明の効果を損なわない限り、上記に例示した以外の砲粒も使用する ことができる。 [0056] The bullets that can be used in the present invention are not limited to these, but in general, alumina-based abrasive grains, silicon carbide-based abrasive grains, zirconia-based abrasive grains, cerium oxide, silica, oxide 1 One or more types selected from the group of chromium, CBN abrasives, and diamond abrasives. The combination can be appropriately selected according to conditions such as grinding and the material of the material to be ground. Further, as long as the effects of the present invention are not impaired, the other than those exemplified above can be used.
[0057] 砥粒の粒径は、 JIS R6001 (研削と!/、し用研磨材の粒度)で規定される F4 (3段目 のふるい目開き 4. 75mm)から 1 μ m未満、最小粒径 0. 1 μ mまで適用できる。 [0057] The grain size of the abrasive grains is less than 1 μm from F4 (3rd stage sieve opening 4.75mm) specified in JIS R6001 (Gritiness of grinding and grinding abrasives). Applicable to diameters up to 0.1 μm.
[0058] 本発明のレジノイド砥石には、充填剤が含まれて!/ヽてもよ ヽ。充填剤としては、例え ば、シリカ、タルク、クリオライト、硫酸バリウム、硫酸カリウム、炭酸カルシウム等が挙 げられるが、研削条件等により適宜選択することができる。 [0058] The resinoid grindstone of the present invention may contain a filler! Examples of the filler include silica, talc, cryolite, barium sulfate, potassium sulfate, calcium carbonate, and the like, which can be appropriately selected depending on grinding conditions and the like.
[0059] 更に、本発明のレジノイド砲石は、その効果を相乗的に高めるために、多孔質化さ れていてもよい。砥石中の気孔量を増加させ、砥石を多孔質化することにより、研削 抵抗が低減され、研削焼けの防止を図ることができる。気孔は、砥石の前駆体組成 物に、界面活性剤、固体 (例えば、発泡スチロール、ポリメチルメタタリレート、ゴム又 はプラスチック製の発泡剤)及び Z又は液状 (例えば、ジイソプロピルァゾジカルボキ シレート)の気孔形成剤を加えることにより形成することができる。界面活性剤及び気 孔形成剤の材質は、本発明の効果を損なわない限り特に限定されない。また、気孔 は、砥石の前駆体組成物を攪拌して、強制的に気泡を同伴させることによって形成し てもよい。 [0059] Further, the resinoid mortar of the present invention may be made porous in order to synergistically enhance its effect. By increasing the amount of pores in the grindstone and making the grindstone porous, grinding resistance can be reduced and grinding burn can be prevented. The pores can be found in the precursor composition of the wheel, surfactant, solid (eg, foamed polystyrene, polymethylmethacrylate, rubber or plastic foaming agent) and Z or liquid (eg, diisopropylazodicarboxylate). It can be formed by adding a pore forming agent. The materials of the surfactant and the pore forming agent are not particularly limited as long as the effects of the present invention are not impaired. The pores may be formed by stirring the precursor composition of the grindstone and forcibly entraining the bubbles.
[0060] 本発明のレジノイド砥石にぉ 、て、砥粒体積率は、 5体積%〜55体積0 /0であり、気 孔体積率は、 5体積%〜80体積%であり、結合剤率は、 100%から砥粒体積率と気 孔体積率を減じた値であることが好まし ヽ。 [0060] Te resinoid grindstone Nio, the present invention, the abrasive volume ratio is 5 vol% to 55 vol 0/0, air pore volume ratio is 5 vol% to 80 vol%, binder ratio Is preferably a value obtained by subtracting the abrasive volume ratio and the pore volume ratio from 100%.
[0061] 次に、本発明のレジノイド砲石の製造方法の好適な実施形態について説明する。 Next, a preferred embodiment of the method for producing a resinoid mortar according to the present invention will be described.
[0062] まず、可撓性エポキシ榭脂と、場合により芳香族グリシジルエーテル型エポキシ榭 脂とを、液状に調製して混合する。次いで、これらの混合物に、エポキシ榭脂のェポ キシ当量に基づく量の硬化剤を添加し、均一になるまで混合する。更に必要に応じ て、充填剤、界面活性剤、液状及び Z又は固体の気孔形成剤を添加'混合して均一 な混合物を得る。この混合物に、砥粒、必要に応じて、その他の充填剤、固体気孔 形成剤等を加えて攪拌し、均一な分散物を得る。次いで、この分散物を任意の型に 流し込み、 40〜90°Cで約 2〜6時間加温して、一次硬化物を得る。一次硬化物を脱 型後、更に 120〜160°Cで約 3〜9時間加熱して硬化反応を終了させると、本発明に したがったレジノイド砥石が得られる。気孔形成剤を使用する場合には、加熱工程に より多孔質化が促進される。 [0062] First, a flexible epoxy resin and optionally an aromatic glycidyl ether type epoxy resin are prepared in a liquid state and mixed. Next, an amount of curing agent based on the epoxy equivalent of epoxy resin is added to these mixtures and mixed until uniform. Further if necessary The filler, surfactant, liquid and Z or solid pore former are added and mixed to obtain a uniform mixture. To this mixture, abrasive grains, and if necessary, other fillers, solid pore-forming agents and the like are added and stirred to obtain a uniform dispersion. Next, this dispersion is poured into an arbitrary mold and heated at 40 to 90 ° C. for about 2 to 6 hours to obtain a primary cured product. After demolding the primary cured product, when the curing reaction is completed by heating at 120-160 ° C. for about 3-9 hours, a resinoid grindstone according to the present invention is obtained. When a pore forming agent is used, the heating process promotes the formation of a porous structure.
[0063] 以下、本発明を、実施例および比較例により更に詳細に説明する力 これらは本発 明の実施可能性及び有用性を例証するものであり、本発明の構成を限定するもので はない。 [0063] Hereinafter, the present invention will be described in more detail with reference to examples and comparative examples. These illustrate the feasibility and usefulness of the present invention, and do not limit the configuration of the present invention. Absent.
実施例 Example
[0064] (実施例 1) [0064] (Example 1)
結合剤として可撓性エポキシ榭脂であるダイマー酸ジグリシジルエステル 80重量 %及びビスフエノール Fジグリシジルエーテル 20重量0 /0を用いた本発明のレジノイド 砥石の製造 Production of resinoid grinding wheel of the present invention using the dimer acid diglycidyl ester 80 wt% and bisphenol F diglycidyl ether 20 weight 0/0 is a flexible epoxy榭脂as binder
以下に示す原材料を用いて本発明の砥石を製造した。 The grindstone of this invention was manufactured using the raw material shown below.
砥粒: GC # 220 1000重量部 Abrasive: GC # 220 1000 parts by weight
結合剤:ダイマー酸ジグリシジルエステル液状 372重量部 Binder: Dimer acid diglycidyl ester liquid 372 parts by weight
(東都化成社製、品番 YD— 171) (Toto Kasei Co., Ltd., part number YD—171)
ビスフエノール Fジグリシジルエーテル液状 93重量部 Bisphenol F diglycidyl ether liquid 93 parts by weight
(東都化成社製、品番 YDF— 170) (Toto Kasei Co., Ltd., product number YDF—170)
硬化剤:アミン系硬化剤 59重量部 Curing agent: 59 parts by weight of amine curing agent
充填剤:ァエロジル (シリカ微粉) 1重量部 Filler: Aerosil (silica fine powder) 1 part by weight
界面活性剤:非イオン (ノ-オン)界面活性剤 10重量部 Surfactant: 10 parts by weight of non-ionic surfactant
まず、液状に調製した所定の重量部のダイマー酸ジグリシジルエステル及びビスフ ェノール Fジグリシジルエーテルと、エポキシ当量に基づ ヽた重量部の硬化剤とを攪 拌容器に投入し、次いで、所定の重量部のァエロジルをカ卩えて、均一になるまで混 合した。次いで、この混合物に所定の重量部の砲粒をカ卩えて均一になるまで混合し た。得られた混合物を所定寸法の成型金型に流し込み、 70°Cで約 4時間加温するこ とにより一次硬化物を得た。一次硬化物を脱型後、更に 145°Cで約 6時間加熱し、硬 化反応を終了させた。得られた硬化物に仕上げ加工を施し、砥石を得た。製造され た砥石の組成は、砥石の全体積を基準として、砥粒体積率 28%、結合剤体積率 40 %、気孔体積率 32%であった。 First, a predetermined part by weight of dimer acid diglycidyl ester and bisphenol F diglycidyl ether prepared in a liquid state and a part by weight of a curing agent based on the epoxy equivalent are put into a stirring vessel, and then a predetermined part. Weight part of Aerosil was mixed and mixed until uniform. Next, add a predetermined weight part of the barrel to this mixture and mix until uniform. It was. The obtained mixture was poured into a molding die having a predetermined size and heated at 70 ° C. for about 4 hours to obtain a primary cured product. After demolding the primary cured product, it was further heated at 145 ° C for about 6 hours to complete the curing reaction. The resulting cured product was finished to obtain a grindstone. The composition of the produced grindstone was 28% abrasive volume, 40% binder, and 32% pore volume based on the total volume of the grindstone.
(実施例 2) (Example 2)
結合剤として可撓性エポキシ榭脂であるダイマー酸ジグリシジルエステル 90重量 %及びビスフエノール Fジグリシジルエーテル 10重量0 /0を用 、た本発明のレジノイド 砥石の製造 Production of resinoid grindstone use, was present invention flexible 90 wt% dimer acid diglycidyl ester epoxy榭脂as a binder and a bisphenol F diglycidyl ether 10 weight 0/0
以下に示す原材料を用いて、実施例 1と同様の手順にしたがって、本発明の砥石 を製造した。 A grindstone of the present invention was produced according to the same procedure as in Example 1 using the raw materials shown below.
砥粒: GC # 220 1000重量部 Abrasive: GC # 220 1000 parts by weight
結合剤:ダイマー酸ジグリシジルエステル液状 423重量部 Binder: Dimer acid diglycidyl ester liquid 423 parts by weight
(東都化成社製、品番 YD— 171) (Toto Kasei Co., Ltd., part number YD—171)
ビスフエノール Fジグリシジルエーテル液状 47重量部 Bisphenol F diglycidyl ether liquid 47 parts by weight
(東都化成社製、品番 YDF— 170) (Toto Kasei Co., Ltd., product number YDF—170)
硬化剤:アミン系硬化剤 53重量部 Curing agent: 53 parts by weight of amine curing agent
充填剤:ァエロジル (シリカ微粉) 1重量部 Filler: Aerosil (silica fine powder) 1 part by weight
界面活性剤:非イオン (ノ-オン)界面活性剤 10重量部 Surfactant: 10 parts by weight of non-ionic surfactant
製造された砥石の組成は、砥石の全体積を基準として、砥粒体積率 26%、結合剤 体積率 37%、気孔体積率 37%であった。 The composition of the manufactured grindstone was, based on the total volume of the grindstone, an abrasive volume ratio of 26%, a binder volume ratio of 37%, and a pore volume ratio of 37%.
(比較例 1) (Comparative Example 1)
結合剤としてビスフエノール Fジグリシジルエーテルを用いた多孔質レジノイド砥石 の製造 Production of porous resinoid wheel using bisphenol F diglycidyl ether as binder
以下に示す原材料を用いて、特開 2004— 160646号に開示される従来技術の砥 石を製造した。 A conventional grinding wheel disclosed in Japanese Patent Laid-Open No. 2004-160646 was manufactured using the following raw materials.
砥粒: GC # 1000 1000重量部 Abrasive: GC # 1000 1000 parts by weight
結合剤:ビスフエノール Fジグリシジルエーテル液状 755重量部 (東都化成社製、品番 YDF— 170) Binder: Bisphenol F diglycidyl ether liquid 755 parts by weight (Toto Kasei Co., Ltd., product number YDF—170)
硬化剤:アミン系硬化剤 191重量部 Curing agent: 191 parts by weight of amine curing agent
界面活性剤:非イオン (ノ-オン)界面活性剤 10重量部 Surfactant: 10 parts by weight of non-ionic surfactant
充填剤:タルク 380重量部 Filler: 380 parts by weight of talc
液状発泡剤:ジイソプロピルァゾジカルボキシレート 30重量部 Liquid foaming agent: 30 parts by weight of diisopropyl azodicarboxylate
まず、所定の重量部の液状エポキシ榭脂(ビスフエノール Fジグリシジルエーテル) 、硬化剤及び界面活性剤を、攪拌容器に投入して、均一になるまで混合した。次い で、所定の重量部のタルク及び砲粒をカ卩えて、均一になるまで混合した。次いで、所 定の重量部のジイソプロピルァゾジカルボキシレートをカ卩えて、更に所望の気泡巻き 込み状態となるまで攪拌し、均一になるまで混合した。得られた混合物を流し込み成 型用の金型に充填し、 90°Cで 1時間加熱することにより一次硬化物を得た。一次硬 化物を脱型後、更に 150°Cで約 6時間加熱し、硬化反応を終了させた。得られた硬 化物に仕上げ加工を施し、砥石を得た。製造された砥石の組成は、砥石の全体積を 基準として、砥粒体積率 7. 5%、結合剤体積率 22. 5%、気孔体積率 70%であった First, a predetermined part by weight of liquid epoxy resin (bisphenol F diglycidyl ether), a curing agent and a surfactant were put into a stirring vessel and mixed until uniform. Next, a predetermined part by weight of talc and barrels were collected and mixed until uniform. Next, a predetermined part by weight of diisopropyl azodicarboxylate was collected, and further stirred until a desired bubble entrainment state was obtained, and mixed until uniform. The obtained mixture was poured into a mold for casting and heated at 90 ° C. for 1 hour to obtain a primary cured product. After demolding the primary cured product, it was further heated at 150 ° C for about 6 hours to complete the curing reaction. The obtained hardened material was finished to obtain a grindstone. The composition of the manufactured whetstone was, based on the total volume of the whetstone, an abrasive volume ratio of 7.5%, a binder volume ratio of 22.5%, and a pore volume ratio of 70%.
(物性評価試験) (Physical property evaluation test)
実施例 1〜2及び比較例 1にお 、て製造した砥石にっ ヽて、以下の手順にしたが い、ゴム硬度、反発弾性率及び 25%圧縮硬度の物性評価試験を行った。 In Examples 1 to 2 and Comparative Example 1, the physical properties evaluation tests of rubber hardness, rebound resilience and 25% compression hardness were conducted according to the following procedures.
1.物性評価手順 1. Physical property evaluation procedure
1 - 1.ゴム硬度 1-1. Rubber hardness
ゴム硬度計 (Aスケール)を用いて硬度を測定した。 Hardness was measured using a rubber hardness meter (A scale).
1 - 2. 25%圧縮硬度 1-2.25% compression hardness
JIS K6767 (発泡プラスチック ポリエチレン 試験方法)に規定された以下の手 順にしたがい、 25%圧縮硬度値を測定した。測定方法を示す概念図を図 2に示す。 The 25% compression hardness value was measured in accordance with the following procedure specified in JIS K6767 (foamed plastic polyethylene test method). Figure 2 shows a conceptual diagram showing the measurement method.
(1)実施例及び比較例で得られた砲石を 127 X 35 X 85mmの直方体に切り出し試 験用砥石 2として用意する。 (1) Cut out the turrets obtained in the examples and comparative examples into 127 x 35 x 85 mm rectangular parallelepipeds and prepare them as test wheels 2.
(2)試験用砥石 2の 127 X 35mm面を圧縮面とし、島津製作所製オートグラフ AG— 10TD試験機の下台 3に設置する。 (3)鉛直方向上から下を加圧方向 4として、試験機の荷重測定加圧ヘッド 1により、圧 縮速度 lOmmZminで試験用砥石 2のはじめの厚さの 25%だけ圧縮して停止し、 2 0秒後の荷重 (N)を測定する。 (2) Set the 127 x 35 mm surface of the test wheel 2 as the compression surface and place it on the lower base 3 of the Autograph AG-10TD testing machine manufactured by Shimadzu Corporation. (3) With the pressure direction 4 from the top to the bottom in the vertical direction, the load measuring pressure head 1 of the test machine compresses by 25% of the initial thickness of the test stone 2 at the compression speed lOmmZmin and stops. 2 Measure the load (N) after 0 seconds.
(4)試験用砲石 2の断面積と 20秒後の荷重から、次式により 25%圧縮硬度値 (MPa )を求める。 (4) The 25% compression hardness value (MPa) is obtained from the cross-sectional area of the test boulder 2 and the load after 20 seconds using the following formula.
[0065] 25%圧縮硬度 (MPa) = 20秒後の荷重 (N) Z試験用砲石の断面積 (mm2) [0065] 25% compression hardness (MPa) = load after 20 seconds (N) cross section of Z test turret (mm 2 )
1 - 3.反発弾性率 1-3. Rebound resilience
JIS K6255 (加硫ゴム及び熱可塑性ゴムの反発弾性試験方法)を参考にした以下 の手順にしたがい、反発弾性率を測定した。測定方法を示す概念図を図 1に示す。 The rebound resilience was measured according to the following procedure with reference to JIS K6255 (Rebound resilience test method for vulcanized rubber and thermoplastic rubber). Figure 1 shows a conceptual diagram showing the measurement method.
(1)ロックウェル硬度測定用の 1Z4インチ鋼球 5を用意する。 (1) Prepare 1Z4 inch steel ball 5 for Rockwell hardness measurement.
(2)実施例及び比較例で得られた砲石を 127 X 35 X 85mmの直方体に切り出し試 験用砥石 2として用意する。 (2) The turret obtained in the example and the comparative example is cut into a 127 × 35 × 85 mm rectangular parallelepiped and prepared as a test wheel 2.
(3)試験用砥石 2から 200mmの落下高さ力も鋼球 5を落下させる。 (3) Test wheel 2 Drop the steel ball 5 with a drop height force of 2 to 200 mm.
(4) 1Z4インチ鋼球 5が試験用砲石 2に当り、跳ね返った反発高さを測定する。 (4) The 1Z4 inch steel ball 5 hits the test boulder 2 and the rebound height bounced is measured.
(5)落下高さと反発高さから、次式により反発弾性率 (%)を求める。 (5) From the drop height and rebound height, obtain the rebound resilience (%) by the following formula.
[0066] 反発弾性率 (%) =反発高さ (mm) Z落下高さ(200mm) X 100 [0066] Rebound resilience (%) = Rebound height (mm) Z drop height (200mm) X 100
2.試験結果 2.Test results
実施例 1〜2及び比較例 1にお ヽて製造した砥石の物性評価試験結果を表 1に示 す。 Table 1 shows the physical property evaluation test results of the grinding stones manufactured in Examples 1-2 and Comparative Example 1.
[0067] [表 1] 表 1 物性麵式験の結果 [0067] [Table 1] Table 1 Physical property test results
[0068] 2— 1.ゴム硬度値 [0068] 2— 1. Rubber hardness value
ゴム硬度は、実施例 1は 84、実施例 2は 75であり、比較例 1の 98と比べて低い値で あった。この結果は、本発明の砥石が軟らカ 、ことを示している。 The rubber hardness is 84 in Example 1 and 75 in Example 2, which is lower than 98 in Comparative Example 1. there were. This result shows that the grindstone of the present invention is soft.
2- 2. 25%圧縮硬度 2- 2. 25% compression hardness
25%圧縮硬度は、実施例 1は 7. 3MPa、実施例 2は 4. 4MPaであったが、比較例 1では砥石が破壊され測定不可能であった。この結果は、本発明の砥石は比較例 1 の従来技術の砲石に比べて脆性が低 、ことを示して 、る。 The 25% compression hardness was 7.3 MPa in Example 1 and 4.4 MPa in Example 2, but in Comparative Example 1, the grindstone was broken and could not be measured. This result shows that the grindstone of the present invention is less brittle than the prior art turret of Comparative Example 1.
2- 3.反発弾性率 2- 3. Rebound resilience
反発弾性率は、実施例 1は 16%、実施例 2は 13. 5%であり、比較例 1の 25%と比 ベて低い値であった。この結果は、本発明の砲石は衝撃又は荷重を吸収する能力が 高いことを示している。 The rebound resilience was 16% in Example 1 and 13.5% in Example 2, which was a lower value than 25% in Comparative Example 1. This result shows that the turret of the present invention has a high ability to absorb impact or load.
(研削試験) (Grinding test)
実施例 1〜2及び比較例 1にお ヽて製造した試験用砥石を用いて研削試験を行!ヽ 、研削抵抗、被削材除去量及び仕上げ面粗度を測定して、砥石の研削性能を評価 した。 A grinding test was conducted using the test wheels manufactured in Examples 1 and 2 and Comparative Example 1. The grinding performance of the grinding wheel was measured by measuring the grinding resistance, the amount of work material removed, and the finished surface roughness. Was evaluated.
1.研削条件 1. Grinding conditions
以下の条件にしたがって研削試験を行った。 A grinding test was performed according to the following conditions.
砥石 寸法:外径 200mm X厚さ 15mm X孔径 50. 8mm Grinding wheel Dimensions: Outer diameter 200mm X Thickness 15mm X Hole diameter 50.8mm
形状: 1 Aタイプ Shape: 1 A type
被削材 材質: TFT LCD用ガラス Work Material: TFT LCD glass
寸法:長さ 100mm X幅 100mm (切り出し) Dimensions: Length 100mm X Width 100mm (cut out)
研削液 名称:タレカット NS 201 Grinding fluid Name: Sauce cut NS 201
濃度: 2% Concentration: 2%
流量: 500mlZs (301/min) Flow rate: 500mlZs (301 / min)
研削盤 種類:岡本工作製横軸平面研削盤 Grinding machine Type: Horizontal axis surface grinding machine manufactured by Okamoto
型式: CNC— 52B (7. 5kw) Model: CNC—52B (7.5 kw)
ツル一イング、ドレッシング条件 Touring and dressing conditions
ツルーァ:多石ドレッサ Trua: Taishi Dresser
砥石周速度: 40mZs Wheel peripheral speed: 40mZs
ツル一イング送り速度: 8. 3mm/s ッノレーイングリード: 0. 16mm/rev Crane feeding speed: 8.3 mm / s Knolling Reed: 0.16mm / rev
研削条件 研削方式:平面プランジ研削 Grinding conditions Grinding method: Plane plunge grinding
砥石周速度: 40mZs Wheel peripheral speed: 40mZs
テープノレ速度: 83. 3mm/s Tape glue speed: 83.3 mm / s
切: iAみ : 0. 5 μ / pass Off: iA: 0.5 μ / pass
研削試験前の被削材面粗度 : 3. Ο μ mR¾[ISに調整 Surface roughness before grinding test: 3. Ο μ mR¾ [adjusted to IS
2.試験結果 2.Test results
研削抵抗、被削材除去量及び仕上げ面粗度を測定して、砥石の研削性能を評価 した。 The grinding performance of the grinding wheel was evaluated by measuring the grinding resistance, the amount of work material removed, and the finished surface roughness.
2—1.研削抵抗 2-1 Grinding resistance
研削抵抗の結果を表 2に示す。 Table 2 shows the results of grinding resistance.
[0069] [表 2] 表 2 研削抵抗 (NZmm) [0069] [Table 2] Table 2 Grinding resistance (NZmm)
[0070] 比較例 1の砲石を用いた研削試験においては、設定切込み 100 mで研削抵抗 が増加して異常値を示したため、それ以降の研削試験は中止した。この結果は、比 較例 1の砥石は多孔質ィ匕された砥石である力 結合剤として可撓性のなレ、エポキシ 樹脂を使用しているために、結合剤成分により設定切込みを吸収することができず異 常荷重の状態となったことによるものと考えられる。一方、実施例 1及び 2の本発明に したがったレジノイド砲石は、比較例 1の砲石より気孔率が小さいにもかかわらず、研 削抵抗の異常増加は見られな力 た。この結果は、結合剤として可撓性エポキシ榭 脂を使用しているために、結合剤成分により設定切込みが吸収されたことによるもの と考えられる。 [0070] In the grinding test using the turret of Comparative Example 1, the grinding resistance increased at a set depth of 100 m and showed an abnormal value. Therefore, the subsequent grinding tests were stopped. This result shows that the grindstone in Comparative Example 1 is a porous grindstone. Because the flexible ladle and epoxy resin are used as the binder, the set depth is absorbed by the binder component. This is thought to be due to abnormal load conditions. On the other hand, although the resinoid mortar according to the present invention of Examples 1 and 2 had a smaller porosity than the calculus of Comparative Example 1, no abnormal increase in polishing resistance was observed. This result is considered to be due to the fact that the set incision was absorbed by the binder component because a flexible epoxy resin was used as the binder.
2- 2.被削材除去量 被削材除去量の結果を表 3に示す。 2- 2.Work material removal amount Table 3 shows the results of the amount of work material removed.
[0071] [表 3] 被削材 量 (輝) [0071] [Table 3] Amount of work material (brightness)
[0072] 研削試験の条件は、仕上げ加工を目的とするものであるため、通常の場合と比較 すると総体的に被削材除去量は少なめであった。研削試験を中止した比較例 1を除 外すると、実施例 1の砥石を使用した場合に実施例 2と比較して被削材除去量が多 かった。この結果は、結合剤として使用した可撓性エポキシ榭脂と芳香族グリシジル エーテル型エポキシ樹脂の量的割合が、研削条件に合致していたことによるものと考 えられる。したがって、本発明においては、可撓性エポキシ榭脂と芳香族グリシジル エーテル型エポキシ樹脂の量的割合を適宜変更することにより、研削条件により適合 した砥石を提供することができる。 [0072] Since the conditions of the grinding test are intended for finishing, the amount of work material removal was generally small compared to the normal case. Excluding Comparative Example 1 where the grinding test was stopped, the amount of work material removed was greater when Example 1 was used than when Example 2 was used. This result can be attributed to the fact that the quantitative ratio of the flexible epoxy resin used as the binder to the aromatic glycidyl ether type epoxy resin matched the grinding conditions. Therefore, in the present invention, by appropriately changing the quantitative ratio between the flexible epoxy resin and the aromatic glycidyl ether type epoxy resin, it is possible to provide a grindstone suitable for the grinding conditions.
2 - 3.仕上げ面粗度 2-3. Finished surface roughness
被削材の仕上げ面粗度の結果を表 4に示す。 Table 4 shows the results of the finished surface roughness of the work material.
[0073] [表 4] 仕上 (umR z J I S ) [0073] [Table 4] Finishing (umR z J I S)
一般的に、砥粒の粒径と仕上げ面粗度の関係においては、砥粒の平均粒径が大 きいほど仕上げ面粗度が粗くなるのが通常である。し力しながら、表 4の結果をみると 、平均粒径の大きい # 220の砲粒が使用された実施例 1及び 2の砥石では、平均粒 径の小さい # 1000の砲粒が使用された比較例 1の砲石と比較して、特に設定切込 み 300 mまで研削して、ほぼ同等の仕上げ面粗度が得られた。 In general, in the relationship between the grain size of the abrasive grains and the finished surface roughness, it is normal that the finished surface roughness becomes rougher as the average grain size of the abrasive grains becomes larger. However, when looking at the results in Table 4, the grindstones of Examples 1 and 2 in which the # 220 barrel with a large average particle size was used, the average particle size Compared with the turret of Comparative Example 1 in which a small diameter # 1000 cannon was used, grinding to a set depth of 300 m gave almost the same finished surface roughness.
従来チッビングやマイクロクラックを防止するには平均粒径の小さい砲粒を使用す るのが一般的であり、 # 1000の砲粒を使用すれば、チッビングの影響は最小限に抑 えられると考えられる。研削試験の結果によれば、仕上げ面粗度が、平均粒径の大き V、 # 220の砲粒が使用された実施例 1及び 2と粒径の小さ!/、 # 1000の砲粒が使用 された比較例 1とが同等であったことから、本発明にしたがったレジノイド砲粒は、結 合剤として可撓性エポキシ榭脂を用いることにより、チッビングやマイクロクラックが防 止されて良好な面粗度が達成されたと考えられる。 Conventionally, to prevent chipping and microcracks, it is common to use a small average particle size, and using the # 1000 particle size will minimize the effect of chipping. It is done. According to the results of grinding tests, the finished surface roughness is V with a large average grain size, and Examples 1 and 2 where # 220 barrels are used and the grain size is small! /, # 1000 barrels are used. Therefore, the resinoid granules according to the present invention are excellent in that chipping and microcracks are prevented by using a flexible epoxy resin as a binder. It is considered that surface roughness has been achieved.
(実施例 3) (Example 3)
結合剤として可撓性エポキシ榭脂であるダイマー酸ジグリシジルエステル 90重量 %及びビスフエノール Fジグリシジルエーテル 10重量0 /0を用 、た本発明のレジノイド 砥石の製造 Production of resinoid grindstone use, was present invention flexible 90 wt% dimer acid diglycidyl ester epoxy榭脂as a binder and a bisphenol F diglycidyl ether 10 weight 0/0
以下に示す原材料を用いて、実施例 1と同様の手順にしたがって、本発明の砥石 を製造した。 A grindstone of the present invention was produced according to the same procedure as in Example 1 using the raw materials shown below.
砥粒: GC # 180 1000重量部 Abrasive: GC # 180 1000 parts by weight
結合剤:ダイマー酸ジグリシジルエステル液状 423重量部 Binder: Dimer acid diglycidyl ester liquid 423 parts by weight
(東都化成社製、品番 YD— 171) (Toto Kasei Co., Ltd., part number YD—171)
ビスフエノール Fジグリシジルエーテル液状 47重量部 Bisphenol F diglycidyl ether liquid 47 parts by weight
(東都化成社製、品番 YDF— 170) (Toto Kasei Co., Ltd., product number YDF—170)
硬化剤:アミン系硬化剤 53重量部 Curing agent: 53 parts by weight of amine curing agent
充填剤:ァエロジル (シリカ微粉) 1重量部 Filler: Aerosil (silica fine powder) 1 part by weight
界面活性剤:非イオン (ノ-オン)界面活性剤 10重量部 Surfactant: 10 parts by weight of non-ionic surfactant
製造された砥石の組成は、砥石の全体積を基準として、砥粒体積率 26%、結合剤 体積率 37%、気孔体積率 37%であった。 The composition of the manufactured grindstone was, based on the total volume of the grindstone, an abrasive volume ratio of 26%, a binder volume ratio of 37%, and a pore volume ratio of 37%.
(実施例 4) (Example 4)
結合剤として可撓性エポキシ榭脂であるビスフエノール A型エポキシ榭脂 75重量 %と可撓性のな 、ビスフエノール Fジグリシジルエーテル 25重量%を用いた本発明 のレジノイド砥石の製造 The present invention uses 75% by weight of bisphenol A type epoxy resin, which is a flexible epoxy resin, and 25% by weight of bisphenol F diglycidyl ether, which is not flexible. Of resinoid grinding wheels
以下に示す原材料を用いて、実施例 1と同様の手順にしたがって、本発明の砥石 を製造した。 A grindstone of the present invention was produced according to the same procedure as in Example 1 using the raw materials shown below.
砥粒: GC # 180 1000重量部 Abrasive: GC # 180 1000 parts by weight
結合剤:ビスフエノール A型エポキシ榭脂 209重量部 Binder: Bisphenol A type epoxy resin 209 parts by weight
(ナガセケムテック社製、品番 XN1019、加熱硬化型可撓性エポキシ榭脂) ビスフエノール Fジグリシジルエーテル液状 70重量部 (Nagase Chemtech Co., Ltd., product number XN1019, heat-curing flexible epoxy resin) Bisphenol F diglycidyl ether liquid 70 parts by weight
(東都化成社製 品番 YDF— 170) (Product number YDF—170, manufactured by Tohto Kasei Co., Ltd.)
硬化剤:脂肪族ポリアミン系硬化剤 230重量部 Curing agent: 230 parts by weight of aliphatic polyamine curing agent
(ナガセケムテック社製、品番 XN 1124 加熱硬化型可撓性エポキシ榭脂 品 番 XN1019と併用) (Nagase Chemtech Co., Ltd., part number XN 1124 Heat-curing flexible epoxy resin part number XN1019)
充填剤:ァエロジル (シリカ微粉) 2重量部 Filler: Aerosil (silica fine powder) 2 parts by weight
界面活性剤:シランカップリング剤 2重量部 Surfactant: 2 parts by weight of silane coupling agent
(信越化学工業社製 品番 KBM— 403) (Product number KBM-403, manufactured by Shin-Etsu Chemical Co., Ltd.)
製造された砥石の組成は、砥石の全体積を基準として、砥粒体積率 29. 3%、結合 剤体積率 41. 1%、気孔体積率 29. 6%であった。 The composition of the manufactured grindstone was, based on the total volume of the grindstone, an abrasive grain volume ratio of 29.3%, a binder volume ratio of 41.1%, and a pore volume ratio of 29.6%.
(比較例 2) (Comparative Example 2)
結合剤としてビスフエノール Fジグリシジルエーテルを用いた多孔質レジノイド砥石 の製造 Production of porous resinoid wheel using bisphenol F diglycidyl ether as binder
以下に示す原材料を用いて、特開 2004— 160646号に開示される従来技術の砥 石を製造した。 A conventional grinding wheel disclosed in Japanese Patent Laid-Open No. 2004-160646 was manufactured using the following raw materials.
砥粒: GC # 180 1000重量部 Abrasive: GC # 180 1000 parts by weight
結合剤:ビスフエノール Fジグリシジルエーテル液状 755重量部 Binder: Bisphenol F diglycidyl ether liquid 755 parts by weight
(東都化成社製、品番 YDF— 170) (Toto Kasei Co., Ltd., product number YDF—170)
硬化剤:アミン系硬化剤 191重量部 Curing agent: 191 parts by weight of amine curing agent
界面活性剤:非イオン (ノ-オン)界面活性剤 10重量部 Surfactant: 10 parts by weight of non-ionic surfactant
充填剤:タルク 380重量部 Filler: 380 parts by weight of talc
液状発泡剤:ジイソプロピルァゾジカルボキシレート 30重量部 製造された砥石の組成は、砥石の全体積を基準として、砥粒体積率 11. 9%、結合 剤体積率 30. 1%、充填剤体積率 5. 3%、気孔体積率 52. 7%であった。 Liquid foaming agent: 30 parts by weight of diisopropyl azodicarboxylate The composition of the manufactured whetstone is based on the total volume of the whetstone, and the abrasive volume ratio is 19.9%, the binder volume ratio is 30.1%, the filler volume ratio is 5.3%, and the pore volume ratio is 52.7%. Met.
(物性評価試験) (Physical property evaluation test)
実施例 3及び実施例 4、ならびに比較例 2において製造した砲石について、以下の 手順にしたカ^ヽ、圧縮強度値及び弾性率の物性評価試験を行った。 The mortar manufactured in Example 3 and Example 4 and Comparative Example 2 was subjected to a physical property evaluation test of the cartridge, compressive strength value, and elastic modulus according to the following procedure.
1.物性評価手順 1. Physical property evaluation procedure
1 - 1.圧縮強度値 1-1. Compressive strength value
圧縮強度値は、 JIS R1608に準拠して測定され、試験片に圧縮荷重をかけて破壊 したときの荷重から、次式により求められる。 The compressive strength value is measured in accordance with JIS R1608, and is calculated from the load when the specimen is broken by applying a compressive load, using the following formula.
[0076] 圧縮強度値 =4 X (破壊荷重) / (試験片面積) [0076] Compressive strength value = 4 X (breaking load) / (test specimen area)
(1)実施例及び比較例で製作された各砲石を 16 X 16 X 12mmの直方体に切り出し 試験片として用意する。 (1) Cut each turret manufactured in Examples and Comparative Examples into a 16 x 16 x 12 mm cuboid and prepare as test pieces.
(2)試験片の 16 X 16mm面を圧縮面とし、島津製作所製オートグラフ AG— 10TD 試験機の下台に設置する。 (2) Set the 16 x 16 mm surface of the test piece as the compression surface, and place it on the bottom of the Autograph AG-10TD testing machine manufactured by Shimadzu Corporation.
(3)鉛直方向上から下を加圧方向として、試験機の荷重測定加圧ヘッドにより、圧縮 速度 3. OmmZminで試験片を圧縮し、破壊した時の荷重を記録する。 (3) The test piece is compressed at a compression speed of 3. OmmZmin using the pressure measuring head of the testing machine with the pressure direction from top to bottom as the pressurization direction, and the load when it breaks is recorded.
(4)圧縮強度値 =4 X (破壊荷重) Z (試験片面積) (4) Compressive strength value = 4 X (Fracture load) Z (Specimen area)
1 - 2.弾性率 1-2. Elastic modulus
弾性率は、 JIS R1602に準拠して測定され、試験片に 3点の曲げのテストを実施し 、試験片のたわみ力 次式により求められる。 The elastic modulus is measured in accordance with JIS R1602, and the test piece is subjected to a bending test at three points, and the bending force of the test piece is obtained by the following equation.
[0077] 弾性率 = {3 X (試験片の長さ) X (荷重 2—荷重 1MZ〔2 X (試験片の幅) X (試験 片の厚さ) 2 X { (たわみ寸法 2)—(たわみ寸法 1) }〕 [0077] Elastic modulus = {3 X (length of specimen) X (load 2—load 1MZ [2 X (width of specimen) X (thickness of specimen) 2 X {(deflection dimension 2) — ( Deflection size 1)}]
(1)前記で製作された各砲石を 16 X 12 X 100mmの直方体に切り出し試験片として 用意する。 (1) Cut each turret manufactured above into a 16 x 12 x 100 mm cuboid and prepare it as a test piece.
(2)島津製作所製オートグラフ AG— 10TD試験機を用い 3点曲げ強度を行う。 (2) Perform three-point bending strength using an autograph AG-10TD tester manufactured by Shimadzu Corporation.
(3)ヘッドスピード 3. Omm/min,スパン間距離 60mmとして荷重をかける。 (3) Head speed 3. Apply load with Omm / min, span distance 60mm.
(4)試験片のたわみを測定し、次式により弾性率を求める。 (4) Measure the deflection of the test piece and obtain the elastic modulus according to the following formula.
[0078] 弾性率 = { 3 X (試験片の長さ) X (荷重 2—荷重 1MZ〔2 X (試験片の幅) X (試験 片の厚さ) 2 X { (たわみ寸法 2)—(たわみ寸法 1) }〕 [0078] Elastic modulus = {3 X (length of specimen) X (load 2—load 1MZ [2 X (width of specimen) X (test Piece thickness) 2 X {(deflection dimension 2) — (deflection dimension 1)}]
2.試験結果 2.Test results
実施例 3及び 4、ならびに比較例 2にお 、て製造した砲石の物性評価試験結果を 表 5に示す。 Table 5 shows the physical property evaluation test results of the turrets produced in Examples 3 and 4 and Comparative Example 2.
[0079] [表 5] 表 5 物性 ! ffiii^の結果 [0079] [Table 5] Table 5 Physical properties! Results of ffiii ^
[0080] 実施例 3と比較して、実施例 4の圧縮強度値は約 2倍、比較例 2の圧縮強度値は約 4倍、実施例 4の弾性率は同等、比較例 2の弾性率は約 4倍であった。この物性の差 が研削性能にどのような影響を与えるかを検証する。 [0080] Compared to Example 3, the compressive strength value of Example 4 is about twice, the compressive strength value of Comparative Example 2 is about 4 times, the elastic modulus of Example 4 is the same, and the elastic modulus of Comparative Example 2 Was about 4 times. We will examine how this difference in physical properties affects grinding performance.
(研磨試験) (Polishing test)
実施例 3、実施例 4及び比較例 2の原材料混合組成は同一として、砥粒の粒度を # 180から # 220にそれぞれ変更して製造した砥石を使用して、研磨試験を実施した Example 3, Example 4 and Comparative Example 2 had the same raw material mixture composition, and a polishing test was conducted using a grindstone manufactured by changing the grain size of the abrasive grains from # 180 to # 220.
1.研磨条件 1. Polishing conditions
以下の条件にしたがって研磨試験を行った。 A polishing test was performed according to the following conditions.
砥石 寸法:外径 200mm X厚さ 15mm X孔径 50. 8mm Grinding wheel Dimensions: Outer diameter 200mm X Thickness 15mm X Hole diameter 50.8mm
形状: 1 Aタイプ Shape: 1 A type
被削材 材質: TFTガラス Work Material: TFT glass
寸法:厚み 0. 5mm X高さ 7mm X長さ 40mm Dimensions: Thickness 0.5mm X Height 7mm X Length 40mm
研削液 防鲭剤入り水道水 Grinding fluid Tap water with fungicide
研削盤 種類:岡本工作製横軸平面研削盤 Grinding machine Type: Horizontal axis surface grinding machine manufactured by Okamoto
型式: CNC— 52B (7. 5kw) ツル一イング、ドレッシング条件 Model: CNC—52B (7.5 kw) Touring and dressing conditions
ツルーァ:多石ドレッサ Trua: Taishi Dresser
砥石周速度: 33mZs Wheel peripheral speed: 33mZs
ツル一イング送り速度: 8. 3mm/s Crane feeding speed: 8.3 mm / s
ツル一イングリード: 0. 16mm/rev A crane lead: 0.16mm / rev
研磨条件 研削方式:平面プランジ研削 Polishing conditions Grinding method: Plane plunge grinding
砥石周速度: 33mZs Wheel peripheral speed: 33mZs
送り速度: 8mmZs Feeding speed: 8mmZs
切り込み圧力: 0. 8kg X 80pass Cutting pressure: 0.8 kg X 80pass
研磨試験前の被削材面粗度 : 3. Ο μ mR¾[ISに調整 Surface roughness before grinding test: 3. Ο μ mR¾ [adjusted to IS
2.試験結果 2.Test results
被削材削量及び砥石消耗量を測定して、砥石の研削性能を評価した。 The grinding performance of the grinding wheel was evaluated by measuring the amount of work material cutting and the amount of grinding wheel consumption.
[0081] 被削材削量は、被削材である TFTガラスの研磨前と研磨後の寸法を測定しその差 [0081] The amount of work material cut was determined by measuring the dimensions of the TFT glass, which is the work material, before and after polishing.
(mm)とした。砥石消耗量は、研磨前と研磨後の砥石寸法を測定しその差 (mm)とし た。 (mm). The grinding wheel consumption was determined by measuring the grinding wheel dimensions before and after grinding (mm).
[0082] 結果を表 6に示す。 The results are shown in Table 6.
[0083] [表 6] 研鷉式験の結果 [0083] [Table 6] Results of study
[0084] 比較例 2の砲石は試験開始直後に破壊した。比較例 2の砲石は、圧縮強度値が高 V、ので砲石の耐久性にっ 、ては期待された力 これに比例して弾性率も高 、値であ つたため砥石に柔軟性がなぐ研磨圧力に耐えきれず破壊したものと考えられる。実 施例 3及び実施例 4の砥石では、砲石破壊が起こらず正常に研磨できた。これは比 較例と比べて弾性率が低い値であったことが要因と考えられる。 [0084] The turret of Comparative Example 2 was destroyed immediately after the start of the test. The turret of Comparative Example 2 has a high compressive strength value, so the durability of the turret is expected, and thus the expected force. It is thought that it was destroyed because it could not withstand the polishing pressure. In the grindstones of Example 3 and Example 4, the mortar was not destroyed and could be polished normally. This is a ratio The reason is that the elastic modulus was lower than that of the comparative example.
[0085] 実施例 3と実施例 4の削量は同等であった。これは物性試験において弾性率が同 等であったため、この物性値が反映したものと考えられる。 [0085] The amount of cutting in Example 3 and Example 4 was the same. This is considered to reflect this physical property value because the elastic modulus was the same in the physical property test.
[0086] 実施例 4は、実施例 3と比較して砲石消耗量が半分であり、 2倍の耐久性があるとい える。これは物性値において実施例 4の圧縮強度値が実施例 3の 2倍であり、この物 性値が砥石耐久性に反映したものと考えられる。 [0086] It can be said that Example 4 has half the mortar consumption compared to Example 3 and has twice the durability. This is because the compressive strength value of Example 4 is twice that of Example 3 in terms of physical property values, and this physical property value is considered to reflect the durability of the grindstone.
産業上の利用可能性 Industrial applicability
[0087] 本発明にしたがったレジノイド砥石は、粗研削及び仕上げ研磨を目的とした、円筒 研肖 |J、平面研削及び内面研削に使用することができ、更にホーユング等の最終仕上 げにも応用することができる。被削材としては、鉄系材料及び非鉄系材料に適用でき る力 特に、超硬、シリコン、アルミナ、炭化物、窒化物、サファイア、石英、各種ガラ ス、その他セラミック材料などの硬脆性材料の研削研磨に好適に適用することができ 、特に好適には TFT液晶ガラスの素材におけるエッジの仕上研磨に用いられる。そ の他、本発明にしたがったレジノイド砲石は、プレス打ち抜きされた金属部品のバリ 取り加工、凹凸のある薄板状の被削物の研磨、センタレス研削のコントロール用砲石 にも好適に使用することができる。 [0087] The resinoid grindstone according to the present invention can be used for cylindrical grinding | J, surface grinding and internal grinding for the purpose of rough grinding and finish grinding, and also applied to final finishing such as hounging. be able to. As a work material, force applicable to ferrous materials and non-ferrous materials, especially grinding hard and brittle materials such as carbide, silicon, alumina, carbide, nitride, sapphire, quartz, various glass, and other ceramic materials. It can be suitably applied to polishing, and is particularly preferably used for finish polishing of the edge of a TFT liquid crystal glass material. In addition, the resinoid mortar according to the present invention is also suitably used for deburring of press-punched metal parts, polishing of uneven thin plate-like workpieces, and control turrets for centerless grinding. be able to.
Claims
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
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| JP2005-227806 | 2005-08-05 | ||
| JP2005227806A JP2008272835A (en) | 2005-08-05 | 2005-08-05 | Resinoid grinding wheel and its manufacturing method |
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| WO2007018074A1 true WO2007018074A1 (en) | 2007-02-15 |
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| PCT/JP2006/315195 Ceased WO2007018074A1 (en) | 2005-08-05 | 2006-08-01 | Resinoid grinding wheel |
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| JP (1) | JP2008272835A (en) |
| TW (1) | TW200711790A (en) |
| WO (1) | WO2007018074A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009045728A (en) * | 2007-07-20 | 2009-03-05 | Fujitsu Ltd | Polishing method and semiconductor device manufacturing method |
| WO2009107567A1 (en) * | 2008-02-27 | 2009-09-03 | 住友電気工業株式会社 | Method for machining nitride semiconductor wafer, nitride semiconductor wafer, process for producing nitride semiconductor device, and nitride semiconductor device |
| JP2009231833A (en) * | 2008-02-27 | 2009-10-08 | Sumitomo Electric Ind Ltd | Nitride semiconductor wafer |
| US8420745B2 (en) | 2008-12-30 | 2013-04-16 | Industrial Technology Research Institute | Thermally curable solder resist composition |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013030368A (en) * | 2011-07-28 | 2013-02-07 | Toshiba Corp | Resin-cast article and method of manufacturing the same |
| CN103509519A (en) * | 2013-04-06 | 2014-01-15 | 连新兰 | Epoxy resin abrasive paste |
| CN106217275A (en) * | 2016-07-29 | 2016-12-14 | 无锡市三峰仪器设备有限公司 | A kind of resin wheel of high porosity |
| CN108673355A (en) * | 2018-05-22 | 2018-10-19 | 安徽全兆光学科技有限公司 | A kind of resin ground disk |
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|---|---|---|---|---|
| JPS61230871A (en) * | 1985-04-05 | 1986-10-15 | Noritake Co Ltd | Grinder element using flexible resin |
| JPH07137208A (en) * | 1993-11-18 | 1995-05-30 | Nitto Denko Corp | Adhesive sheet for thin plate reinforcement |
-
2005
- 2005-08-05 JP JP2005227806A patent/JP2008272835A/en active Pending
-
2006
- 2006-08-01 WO PCT/JP2006/315195 patent/WO2007018074A1/en not_active Ceased
- 2006-08-03 TW TW095128518A patent/TW200711790A/en unknown
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61230871A (en) * | 1985-04-05 | 1986-10-15 | Noritake Co Ltd | Grinder element using flexible resin |
| JPH07137208A (en) * | 1993-11-18 | 1995-05-30 | Nitto Denko Corp | Adhesive sheet for thin plate reinforcement |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009045728A (en) * | 2007-07-20 | 2009-03-05 | Fujitsu Ltd | Polishing method and semiconductor device manufacturing method |
| WO2009107567A1 (en) * | 2008-02-27 | 2009-09-03 | 住友電気工業株式会社 | Method for machining nitride semiconductor wafer, nitride semiconductor wafer, process for producing nitride semiconductor device, and nitride semiconductor device |
| JP2009231814A (en) * | 2008-02-27 | 2009-10-08 | Sumitomo Electric Ind Ltd | Method for machining nitride semiconductor wafer |
| JP2009231833A (en) * | 2008-02-27 | 2009-10-08 | Sumitomo Electric Ind Ltd | Nitride semiconductor wafer |
| US7872331B2 (en) | 2008-02-27 | 2011-01-18 | Sumitomo Electric Industries, Ltd. | Nitride semiconductor wafer |
| US8101523B2 (en) | 2008-02-27 | 2012-01-24 | Sumitomo Electric Industries, Ltd. | Method of processing of nitride semiconductor wafer, nitride semiconductor wafer, method of producing nitride semiconductor device and nitride semiconductor device |
| US8183669B2 (en) | 2008-02-27 | 2012-05-22 | Sumitomo Electric Industries, Ltd. | Nitride semiconductor wafer having a chamfered edge |
| CN101884094B (en) * | 2008-02-27 | 2013-02-13 | 住友电气工业株式会社 | Method for processing nitride semiconductor wafer and nitride semiconductor wafer |
| US8420745B2 (en) | 2008-12-30 | 2013-04-16 | Industrial Technology Research Institute | Thermally curable solder resist composition |
Also Published As
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| TW200711790A (en) | 2007-04-01 |
| JP2008272835A (en) | 2008-11-13 |
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