[go: up one dir, main page]

WO2007010076A1 - Systeme capteur de carbure de silicium semi-isolant, procede de fabrication et ses applications - Google Patents

Systeme capteur de carbure de silicium semi-isolant, procede de fabrication et ses applications Download PDF

Info

Publication number
WO2007010076A1
WO2007010076A1 PCT/ES2006/070104 ES2006070104W WO2007010076A1 WO 2007010076 A1 WO2007010076 A1 WO 2007010076A1 ES 2006070104 W ES2006070104 W ES 2006070104W WO 2007010076 A1 WO2007010076 A1 WO 2007010076A1
Authority
WO
WIPO (PCT)
Prior art keywords
microsystem
semi
layer
sic
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/ES2006/070104
Other languages
English (en)
Spanish (es)
Inventor
José MILLÁN GÓMEZ
Philippe Godignon
Iván ERILL SAGALÉS
Rodrigo GÓMEZ MARTÍNEZ
Jordi AGUILÓ LLOBET
Rosa Villa Sanz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Consejo Superior de Investigaciones Cientificas CSIC
Original Assignee
Consejo Superior de Investigaciones Cientificas CSIC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consejo Superior de Investigaciones Cientificas CSIC filed Critical Consejo Superior de Investigaciones Cientificas CSIC
Publication of WO2007010076A1 publication Critical patent/WO2007010076A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6846—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive
    • A61B5/6847—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive mounted on an invasive device
    • A61B5/685—Microneedles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/487—Physical analysis of biological material of liquid biological material
    • G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value ; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue
    • A61B5/14542—Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value ; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue for measuring blood gases
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value ; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue
    • A61B5/1468—Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value ; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue using chemical or electrochemical methods, e.g. by polarographic means
    • A61B5/1473—Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value ; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue using chemical or electrochemical methods, e.g. by polarographic means invasive, e.g. introduced into the body by a catheter
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value ; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue
    • A61B5/1468—Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value ; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue using chemical or electrochemical methods, e.g. by polarographic means

Definitions

  • This invention is part of the semiconductor technology sector in terms of material and manufacturing process and in the biomedical sector in terms of application.
  • the objective of the present invention is the use of Semi-Insulating SiC as a substrate of any microsystem or microdevice for biomedical monitoring and recording applications and that at least partially resolves the inconveniences and limitations of the systems made on other semiconductor substrates for biomedical applications.
  • the present invention relates to systems for recording and monitoring biological signals originating in living entities, whether cells or cell cultures, tissues, organs or entire organisms.
  • the present invention refers to the use of new materials in physical devices for simultaneous and / or multi-frequency uptake of different biological signals.
  • the registration of biological signals is a very important activity in the development of medical devices and for the exploration of living beings.
  • microsystems have been developed capable of monitoring different physicochemical parameters on a single platform and simultaneously.
  • these types of devices allow measuring various physiological parameters (eg temperature, electrical impedance, pH and [K +]) of a cell culture or an organ simultaneously, minimally invasive and spatially located, facilitating the extraction of correlations useful for diagnosis and prognosis between the monitored parameters [1] [2] [3].
  • physiological parameters eg temperature, electrical impedance, pH and [K +]
  • the ultrapure crystalline Si is the material par excellence in microelectronics and, therefore, also in the development of microsystems.
  • Si also has strong disadvantages. Its opacity to ultraviolet and visible radiation, for example, makes optical inspection difficult and its coupling with fluorescence detection systems in applications such as cell cultures.
  • its relative fragility greatly hinders its management in clinical applications and poses a risk in its introduction and / or implantation in living beings.
  • the resistivity of the Si substrate distorts the electrical register at certain frequencies, since the currents applied to the register partially leak through the substrate. This phenomenon also reduces the effectiveness of necessary techniques in the creation of recording electrodes, such as electromigration platinization, and prevents their use as a device in other analytical techniques of interest that require significant voltages, such as electrophoresis.
  • Si there are alternatives to Si to solve these problems.
  • Different materials such as glass or various types of plastic polymers and silicones such as PMMA, PMMS or polymides, and combinations among them have been used as substrates for, for example, the creation of electrophoresis microsystems, the manufacture of devices for cell culture or for local monitoring of various parameters in living tissue
  • substrates require various manufacturing techniques, such as the photolithographic process of wet glass etching, hot-embossing and polymer molding techniques, etc. Even so, and despite their proven functionality, these devices do not solve some of the Si problems and even introduce some of their own.
  • Neither glass nor polymers allow to create the whole range of three-dimensional structures available in Si technologies.
  • neither of these two types of substrate allows the integration of microelectronic, photoelectronic or nanotechnology circuitry.
  • Many polymers are strongly opaque at visible and ultraviolet wavelengths, and the glass is remarkably opaque to the latter.
  • the majority of polymers do not allow the deposition of metals for electrodes or their platinization by standard techniques, reducing their ability.
  • the increase in mechanical strength is not excessively significant in glass, and is achieved in exchange for high flexibility in most polymers, making them poorly indicated for penetration into living tissues.
  • SiC is a semiconductor material with a long history as an abrasive material in the industry. However, it has not been until the last decade of the twentieth century when, thanks to the development of new processes to obtain ultra pure SiC (microelectronic quality), this material has reached a remarkable relevance in the area of microelectronics as a new substrate for the creation of high power, high frequency and high temperature devices.
  • the SiC has numerous properties that make it suitable for this type of applications: large electronic gap width, high thermal conductivity, high breaking voltage, high saturation speed of the load carriers, high thermal stability, low coefficient of thermal expansion, low density and high inactivity and chemical resistivity [4].
  • SiC also has other characteristics that make it suitable for use in the biomedical field. Both the Si substrate and SiC are considered as biocompatible materials such as titanium and therefore ideal for implantable systems, for example. But in addition, SiC has advantages over Si as it has lower protein adhesion and lower platelet aggregation, when it comes into contact with blood) [6]. Because it is also very chemically inert and very resistant in extreme mechanical and environmental conditions, much has begun to be used for surface coatings for implantable joint prostheses and lately as a coating for stents and other in-vascular prostheses due to its good hemocompatibility (lower adhesion of proteins and lower platelet aggregation)
  • SiC has superior mechanical and tribological properties (hardness, resistance to friction and prolonged use) that make it an ideal material for orthopedic use compared to other materials commonly used for these applications such as chromium alloys -cobalt and molybdenum (CoCrMo) or that of titanium-6 aluminum-4 vanadium T ⁇ -6A1-4V and even that of 316L stainless steel (SS 316L) [7].
  • SiC nanoporous structures have been created that allow its use as a semi-permeable material for the creation of membranes that can act as an interface in vivo in applications Biomedical For this reason, it can be used, for example, for use in artificial implantation of the pancreas, kidney or for oral implantable drug dispenser [8].
  • Semi-insulating SiC has other characteristics, in addition to those mentioned above (biocompatibility and resistance), which can be very useful in the biomedical field. Characteristics such as that it has a remarkably high intrinsic resistivity, although it can be doped to reach semiconduction levels typical of Si and although it presents a multitude of polytypes with different surface characteristics (eg, polar, non-polar), it is manipulable at nanometric scales , and allows the integration of active components of greater resistance and range of application than Si itself. Another feature is that the semi-insulating SiC is transparent in the visible and infrared range. All these features can be very useful depending on which biomedical microdevices. No reference has been found for its use as a substrate for devices for biomedical applications and specifically for the monitoring of biological signals. Its use can improve the benefits currently presented by devices made in Si substrate for biomedical monitoring and recording applications.
  • Patent ES 2 154 241 Al Multisensor microsystem based on Si.
  • Nanoporous SiC A Semi-Permeable Candidate Material for
  • the present invention relates to the manufacture and use of devices made with microelectronic technologies on a semi-insulating SiC substrate for monitoring the biological behavior of organic organs, tissues, cells or molecules.
  • the novelty of this invention is that by means of microelectronic technologies and the use of semi-insulating SiC as a substrate, sensor microsystems have been obtained for medical devices that offer better performance compared to other substrates currently used as Si, SiC non-semi-insulating etc.
  • the advantages offered by semi-insulating SiC as a new biocompatible material for use in devices for monitoring the biological behavior of organs, tissues, cells or organic molecules, are the following: • Transparency at visible and infrared wavelengths.
  • an object of the invention is a microsystem useful as a biological signal sensor, hereinafter microsystem of the invention, comprising semi-insulating SiC as a substrate for Biomedical applications for monitoring organs, tissues, cells or organic molecules.
  • microsystem of the invention may include other necessary elements, defined and known by a technician in the field of art, for the final application of the microsystem as a sensor.
  • a particular object of the present invention is the microsystem of the invention which includes one or more electrodes or other sensors, made with microelectronic technologies, for the monitoring of physical, chemical, optical, electrical and biological parameters. in different ranges and frequencies.
  • Another particular object of the present invention is the microsystem of the invention in which a device and / or nanotechnological processes are included to improve or increase the performance for the monitoring of physical, chemical, electrical and biological parameters (such as the incorporation of carbon nanotubes such as nanoelectrodes, adhesion of polymeters to functionalize the surface etc), or an integrated or external battery power system, network connection or radio frequency carrier wave; or integrated circuitry in the same substrate for acquisition, treatment, amplification, process, multiplexing or telemetry sending of the captured signals.
  • a device and / or nanotechnological processes are included to improve or increase the performance for the monitoring of physical, chemical, electrical and biological parameters (such as the incorporation of carbon nanotubes such as nanoelectrodes, adhesion of polymeters to functionalize the surface etc), or an integrated or external battery power system, network connection or radio frequency carrier wave; or integrated circuitry in the same substrate for acquisition, treatment, amplification, process, multiplexing or telemetry sending of the captured signals.
  • a specific embodiment of the present invention is a microneedle-shaped microsystem, as shown in example 1.
  • Another specific embodiment of the present invention is a plate-shaped microsystem for cell cultures or "in vitro" tissue cultures such and as shown in example 2.
  • Another particular object of the present invention is the microsystem of the invention in which an integrated or external battery power system, network connection or radio frequency carrier wave is included.
  • Another particular object of the present invention is the microsystem of the invention in which integrated circuitry is included in the same substrate for acquisition, treatment, amplification, process, multiplexing or telemetry sending of the captured signals.
  • Another object of the present invention is a method of manufacturing the microsystem of the invention characterized by the following steps: a. Cleaning the semi-insulating SiC substrate with suitable solvents and acids, b. Deposit of a dielectric layer: this layer can be composed of one or several stacked dielectric materials; such as silicon oxide, silicon nitride, aluminum nitride, alumina, high K dielectrics, etc., c. Deposit of a metallic layer for the formation of the electrodes: this layer can be composed of one or several stacked metals such as Titanium, Platinum, Gold or Cobalt, d. Engraving of the metallic layer, e. Deposit of the passivation layer: this layer can be composed of one or several stacked dielectric materials. F. Opening contacts in the passivation layer, and g. Separation of the components by sawing the processed substrate.
  • Another particular object of the invention is the manufacturing process of the microsystem of the invention, described above, in which, given the intrinsic nature of the semi-insulating SiC substrate, step b) of depositing a dielectric layer in the process is obviated manufacturing, unlike other substrates semiconductors such as silicon.
  • the thickness of this layer can vary between 0 (in the case of absence of dielectric layer) and 3 micrometers.
  • Another particular object of the invention is the manufacturing process of the microsystem of the invention described above, in which the definition of the motifs of the electrodes and their interconnection tracks is carried out by a photolithographic process with photosensitive resin or using a metal mask . In the case of a lithographic process, this can be done before or after the deposit of the metals.
  • Another particular object of the invention is the manufacturing process of the microsystem of the invention described above, in which the engraving of the metal layer d) can be done by the "lift-off" technique, by means of a wet etching with acids or by dry plasma etching (RIE / ICP / DECR).
  • Another particular object of the present invention is the method of manufacturing the microsystem, the invention in which the stacking dielectric material described in e) belongs to the following group: silicon oxide, silicon nitride, aluminum nitride, alumina, dielectric high K, etc.
  • Another particular object of the invention is the manufacturing method of the microsystem of the invention described above, in which the definition of the contact areas of the Contact Opening stage in the passivation layer (f )) is performed by a photolithographic process with photosensitive resin.
  • the engraving can be of the wet type with acids, or dry type by plasma (RIE / ICP / DECR).
  • Another particular object of the present invention is the manufacturing process of the microsystem of the invention in which the stacking dielectric material of b) belongs to the following group: silicon oxide, silicon nitride, aluminum nitride, alumina, dielectrics of high K.
  • another object of the invention is the use of the microsystem of the invention in biological signal measurement procedures with biomedical applications for monitoring organic organs, tissues, cells or molecules.
  • Another particular object of the present invention is the use of the microsystem of the invention in an invasive or non-invasive manner on the biological sample.
  • Another particular object of the present invention is the use of the microsystem of the invention by implantation in living beings and / or tissues temporarily or permanently.
  • Another particular object of the present invention is the use of the microsystem of the invention by implantation in a human being.
  • Figure 1 Diagram of the needle designed to be manufactured with microelectronic technologies with semiconductor substrates (Si y ).
  • Figure 2. Manufacturing process and cutting section of the needle made with SiC substrate.
  • the diagram indicates the architecture of the technological process.
  • Figure 3 "In iter" study of needles with Si substrate. The results of the behavior of needles with semi-insulating SiC substrate immersed in physiological serum simulating a biological medium are shown
  • Figure 4 "In iter" study with semi-insulating SiC substrate. The results of the behavior of needles with Si substrate immersed in physiological serum simulating a biological medium are shown.
  • Figure 5.- (A) Mask for the manufacture of microsystems or semi-insulating SiC devices for biomedical applications such as cell culture monitoring platforms (B) Detail of one of these platforms that in this example contains 16 electrodes of platinum. (C) Cutting scheme of the manufacturing process. (D) Experimental results of monitoring a cell culture at different frequencies.
  • FIG. 6 Scheme of the proposed generic device. Electrophoresis device with T-injection, four cuvettes and two channels.
  • Figure 7. Detail of an area of the cross in the electrophoresis channels made in semi-insulating SiC by dry attack by RIE.
  • Example 1 Microneedle sensor in semi-insulating SiC substrate.
  • the novelty presented in this first example is the semi-insulating realization in SiC of a needle-shaped microdevice in which one or more electrical, chemical or optical sensors can be integrated by micro or nano technological processes.
  • a needle-type microdevice is shown, made with semi-insulating SiC microelectronic processes with the following dimensions: 15 mm in length, 525 ⁇ m in width and
  • FIG. 2 shows the scheme of the technological process for the realization of this device.
  • the microdevice has been developed with the procedure described in the detailed description.
  • Figure 3 shows the results of the behavior of needles with semi-insulating SiC substrate immersed in physiological serum simulating a biological medium.
  • Figure 4 shows the results of the behavior of needles with semi-insulating SiC substrate immersed in physiological serum simulating a biological medium. Both results show that the semi-insulating SiC offers the following advantages over the Si in the needle-shaped micro system to monitor the bioimpedance of living organs, tissues or cells:
  • the novelty presented in this second example is the realization of a semi-insulating SiC substrate micro device for cell culture monitoring.
  • They are microsystems that consist of a semi-insulating SiC platform of dimensions adapted to culture media, with one or more electrical, chemical or optical sensors incorporated by micro or nano technological processes on which the cell culture is based.
  • the cultures can be of different cell types and toxic chemicals, drugs or other substances of interest can be added to them to analyze their influence on the culture medium. This influence will be monitored through the micro device.
  • the novelty presented in this third example is the realization of a semi-insulating SiC microdevice with microchannels and cuvettes made with micro or nanotechnological processes to be applied as biomolecule analysis systems.
  • the possibility of applying large voltages and its ease of assembly with glass by ⁇ nodic bonding is added.
  • the system presented in this example corresponds to a microsystem for electrophoresis by cross injection.
  • the system is filled with buffer solution and / or electrophoresis gel (eg acrylamide, agarose, etc.) by injection through the different receptacles.
  • the substance to be analyzed is deposited in well 1 and is typically injected by applying a voltage between electrodes 1 and 2.
  • a high voltage is then applied (from 0.2 to 5 kV) between electrodes 3 and 4 for the electrophoretic separation of solute in the separation channel.
  • the usual dimensions of the channels are 1-2 cm for the injection and 3-6 cm for the separation, and the cuvettes They usually have an approximate diameter of 1 cm, although none of these dimensions is limiting.
  • the system is made of semi-insulating SiC.
  • the semi-insulating SiC has been recorded to define the channels to a depth of ⁇ 20 m by dry etching by RIE (Reactive Ion Etching), although the channels can also be obtained by wet etching techniques.
  • the depth of the channels has been established in this case for a proposed application (protein electrophoresis) but may vary depending on the application between 0.5 and 200 m and in no case is it limited by the technological process used here.
  • the system is covered by an insulating substrate (glass) that has been glued tightly (to avoid leaks) to the semi-insulating SiC by means of the anodic welding technique.
  • the technique used to pierce the glass in this case has been an attack in HF solution, although alternative techniques (such as sandblasting, ultrasonic drill or laser) can be used. It is also possible, although not recommended, to perform this type of systems in open (without coverage).
  • Detection of the separated sample is typically performed at the end of the separation channel.
  • a laser-induced fluorescence system has been used, marking the molecules to be separated and then detecting them with a confocal microscope and photomultiplier.
  • the sample can be labeled in many other ways (eg radioactivity) and detected with optical, radioactive, electromechanical or electrical measurement systems.
  • the design shown in the figure corresponds to a simple microsystem for protein electrophoresis, which could also be used for the separation of DNA by inserting a separation gel, or of any other molecule capable of being electrophoretically separated.
  • This basic design can be expanded and improved in many ways. For example, injection / separation channels can be added to perform multiple parallel electrophoresis or two-dimensional electrophoresis, the separation channel can also be modified to convert it into a wide slab-gel type separation zone.
  • injection wells can be modified to become wells where a polymerase chain reaction (PCR), a ligation, a restriction, a phosphorylation or a cell lysis (among other reactions) takes place, by including electrodes and / or resistors to carry out thermal cycles or apply voltages locally, and by adding the required reagents to the well.
  • the channels can also be adapted to become immuno-magnetic capture channels of cells or molecules, solute distribution channels such as fluorescent markers, etc.
  • Detectors can also be integrated to perform on-site detection, such as photodiodes, electrodes or radioactivity counters.
  • the microsystem described here can be expanded and improved to give rise to a microsystem of total analysis (m-TAS), in which other reactions (apart from electrophoresis) of importance for the analysis or preparation of the sample take place, such as PCR or other amplification, hybridization, ligation, restriction, magneto- capture, phosphorylation, radioactive, fluorescent or other types of marking, and much more.
  • m-TAS microsystem of total analysis
  • semi-insulating SiC semi-insulating silicon carbide
  • the semi-insulating SiC is clearly superior in its electrical resistance, which allows the application of high voltages (e.g. 1 kV), a fact that gives rise to high-resolution electrophoresis and very fast.
  • the semi-insulating SiC is transparent to the wavelengths typically used in detection and this greatly improves the quality of this compared to opaque substrates such as silicon. Its low thermal resistivity allows a more effective heat dissipation than in silicon and much more effective than in glass and polymers, minimizing the Joule effects of local heating due to the applied electric field that distort electrophoresis badnas.
  • the semi-insulating SiC has the advantage of being fully integrable in a microtechnological process environment, which allows the integration of active and control devices on the same substrate, as well as all types of sensors, such as photodiodes or chemical sensors for the detection of the molecules to be separated.
  • microsystems or microdevices that manufactured with semi-insulating SiC substrates have novel advantages over the current ones, which makes it possible to improve and expand their biomedical applicability as monitoring of living beings.

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Biophysics (AREA)
  • Chemical & Material Sciences (AREA)
  • Veterinary Medicine (AREA)
  • Public Health (AREA)
  • Animal Behavior & Ethology (AREA)
  • Surgery (AREA)
  • Medical Informatics (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Optics & Photonics (AREA)
  • Medicinal Chemistry (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Hematology (AREA)
  • Food Science & Technology (AREA)
  • Urology & Nephrology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

Ces dispositifs sont obtenus par le biais de technologies micro-électroniques sur un substrat de carbure de Si semi-isolant pour la surveillance du comportement biologique d'organes, tissus, cellules ou molécules organiques. On prévoit leur procédé de fabrication.
PCT/ES2006/070104 2005-07-15 2006-07-13 Systeme capteur de carbure de silicium semi-isolant, procede de fabrication et ses applications Ceased WO2007010076A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ESP200501736 2005-07-15
ES200501736A ES2278508B1 (es) 2005-07-15 2005-07-15 Sistema sensor en carburo de silicio (sic) semiaislante, procedimiento de elaboracion y sus aplicaciones.

Publications (1)

Publication Number Publication Date
WO2007010076A1 true WO2007010076A1 (fr) 2007-01-25

Family

ID=37668461

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/ES2006/070104 Ceased WO2007010076A1 (fr) 2005-07-15 2006-07-13 Systeme capteur de carbure de silicium semi-isolant, procede de fabrication et ses applications

Country Status (2)

Country Link
ES (1) ES2278508B1 (fr)
WO (1) WO2007010076A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009055312A1 (fr) * 2007-10-22 2009-04-30 Dfb Pharmaceuticals, Inc. Procédé de fabrication d'un gel de poloxamère

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013138275A1 (fr) * 2012-03-12 2013-09-19 University Of South Florida Capteurs biocompatibles implantables au carbure de silicium

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030032892A1 (en) * 2001-04-25 2003-02-13 Erlach Julian Van Nanodevices, microdevices and sensors on in-vivo structures and method for the same
JP2003172602A (ja) * 2001-12-05 2003-06-20 Sharp Corp 表面形状検出素子及び表面形状検出装置
WO2004041996A2 (fr) * 2002-11-06 2004-05-21 Ramot At Tel Aviv University Ltd. Systeme et procede de positionnement de cellules et determination d'activite cellulaire de celles-ci
US20050123680A1 (en) * 2003-12-05 2005-06-09 Kang Sun K. Micro reference electrode of implantable continous biosensor using iridium oxide, manufacturing method thereof, and implantable continuous biosensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030032892A1 (en) * 2001-04-25 2003-02-13 Erlach Julian Van Nanodevices, microdevices and sensors on in-vivo structures and method for the same
JP2003172602A (ja) * 2001-12-05 2003-06-20 Sharp Corp 表面形状検出素子及び表面形状検出装置
WO2004041996A2 (fr) * 2002-11-06 2004-05-21 Ramot At Tel Aviv University Ltd. Systeme et procede de positionnement de cellules et determination d'activite cellulaire de celles-ci
US20050123680A1 (en) * 2003-12-05 2005-06-09 Kang Sun K. Micro reference electrode of implantable continous biosensor using iridium oxide, manufacturing method thereof, and implantable continuous biosensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009055312A1 (fr) * 2007-10-22 2009-04-30 Dfb Pharmaceuticals, Inc. Procédé de fabrication d'un gel de poloxamère

Also Published As

Publication number Publication date
ES2278508A1 (es) 2007-08-01
ES2278508B1 (es) 2008-06-16

Similar Documents

Publication Publication Date Title
JP6151644B2 (ja) 操作装置、堆積方法、注入方法、検出装置及び検出方法
CN104303056B (zh) 用于改进疾病检测的微器件
CN106929401B (zh) 肿瘤细胞检测仪
ES2823456T3 (es) Método y sistema para utilizar postes unidos a una superficie accionados para evaluar la reología de fluidos biológicos
CN105074458B (zh) 杂化纳米孔及其用于检测分析物的用途
Cerea et al. Selective intracellular delivery and intracellular recordings combined in MEA biosensors
Privorotskaya et al. Rapid thermal lysis of cells using silicon–diamond microcantilever heaters
Johnson et al. Integration of multiple components in polystyrene-based microfluidic devices part I: fabrication and characterization
US12070307B2 (en) Electrically functional polymer microneedle array
Gourley Brief overview of BioMicroNano technologies
Hébert et al. Boron doped diamond biotechnology: from sensors to neurointerfaces
CN1417574A (zh) 芯片上的微电子检测器
Toccafondi et al. Thin nanoporous alumina-based SERS platform for single cell sensing
WO2014143427A1 (fr) Surveillance in vivo de cibles moléculaires
Menon et al. The applications of bioMEMS in diagnosis, cell biology, and therapy: a review
Pandya et al. Towards an automated MEMS-based characterization of benign and cancerous breast tissue using bioimpedance measurements
Karadurmuz et al. Electrochemical DNA biosensors in drug analysis
US8921093B2 (en) Arrangement for on-line measurements on cells
Saddow et al. 3C-SiC on Si: A bio-and hemo-compatible material for advanced nano-bio devices
Özsoylu et al. Electrochemical cell-based biosensors for biomedical applications
Dittami et al. A multilayer MEMS platform for single-cell electric impedance spectroscopy and electrochemical analysis
ES2278508B1 (es) Sistema sensor en carburo de silicio (sic) semiaislante, procedimiento de elaboracion y sus aplicaciones.
Judy Biomedical applications of MEMS
US20240110137A1 (en) Multiorgan-on-a-chip device with integrated microbiosensors, methods and uses thereof
Liu et al. Analytical methods in studying cell force sensing: principles, current technologies and perspectives

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application
NENP Non-entry into the national phase

Ref country code: DE

WWW Wipo information: withdrawn in national office

Country of ref document: DE

122 Ep: pct application non-entry in european phase

Ref document number: 06764402

Country of ref document: EP

Kind code of ref document: A1