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WO2007091609A1 - Capteur ultrasonore - Google Patents

Capteur ultrasonore Download PDF

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Publication number
WO2007091609A1
WO2007091609A1 PCT/JP2007/052145 JP2007052145W WO2007091609A1 WO 2007091609 A1 WO2007091609 A1 WO 2007091609A1 JP 2007052145 W JP2007052145 W JP 2007052145W WO 2007091609 A1 WO2007091609 A1 WO 2007091609A1
Authority
WO
WIPO (PCT)
Prior art keywords
case
thickness
ultrasonic sensor
surface portion
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/052145
Other languages
English (en)
Japanese (ja)
Inventor
Taku Matsumoto
Junshi Ota
Masanaga Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2007557872A priority Critical patent/JPWO2007091609A1/ja
Publication of WO2007091609A1 publication Critical patent/WO2007091609A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
    • G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
    • G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means

Definitions

  • the present invention relates to an ultrasonic sensor, and more particularly to an ultrasonic sensor used in, for example, a back sonar for an automobile.
  • FIG. 10 is a front schematic view showing an example of a conventional ultrasonic sensor
  • FIG. 11 is a side schematic view of the ultrasonic sensor.
  • the ultrasonic sensor 1 includes a bottomed substantially quadrangular cylindrical case 2 made of aluminum or the like. Case 2 has a rectangular or oval opening.
  • One surface of the piezoelectric element 3 is bonded to the bottom surface inside the case 2.
  • one signal line 4a of the cable 4 is soldered to one electrode of the temperature compensating capacitor 5 and also to the inner surface of the case 2.
  • the other signal line 4 b of the cable 4 is soldered to the other electrode of the capacitor 5 and is also soldered to the electrode on the other surface of the piezoelectric element 3.
  • the piezoelectric element 3 and the temperature compensation capacitor 5 are connected in parallel between the signal lines 4a and 4b of the cable 4.
  • a sound absorbing material 6 made of felt is disposed on the other surface of the piezoelectric element 3.
  • the case 2 is filled with an insulating resin 7 having a strong force such as silicon rubber or urethane rubber. The insulating resin 7 seals the piezoelectric element 3 and the sound absorbing material 6 in a sealed state, and also insulates the signal lines 4a and 4b from the capacitor 5.
  • the piezoelectric element 3 When measuring the distance to the object to be detected using the ultrasonic sensor 1, the piezoelectric element 3 is excited by applying a drive voltage to the signal lines 4 a and 4 b of the cable 4. Due to the vibration of the piezoelectric element 3, the bottom surface of the case 2 also vibrates, and ultrasonic waves are emitted in a direction perpendicular to the bottom surface. When the ultrasonic wave emitted from the ultrasonic sensor 1 is reflected by the object to be detected and reaches the ultrasonic sensor 1, the piezoelectric element 3 vibrates and is converted into an electric signal, and the electric signal is transmitted from the signal lines 4a and 4b of the cable 4. A signal is output.
  • the distance from the ultrasonic sensor 1 to the object to be detected can be determined by measuring the time from when the drive voltage is applied until the electrical signal is output.
  • a reverberation characteristic with a small reverberation for detecting an obstacle at a short distance for example, when it is attached to a bumper of an automobile and used as a back sonar for detecting an obstacle, a reverberation characteristic with a small reverberation for detecting an obstacle at a short distance, Furthermore, in order not to detect the ground or curb, vertical and narrow horizontal directions are required, and wide directivity is required.
  • the thickness T1 of the side surface of the case 2 is made larger than the thickness T2 of the bottom surface of the case 2 in order to suppress the vibration of the side surface of the case 2 and reduce reverberation ( (See Patent Document 1).
  • Patent Document 1 Japanese Patent Laid-Open No. 9 284896
  • FIG. 12 shows a graph of the reverberation waveform in the case of using the case 2 made of aluminum, the sound absorbing material 6 made of felt, and the insulating resin 7 also having a silicon rubber force in the rectangular ultrasonic sensor 1.
  • a main object of the present invention is to provide a rectangular ultrasonic sensor excellent in reverberation characteristics and directivity.
  • An ultrasonic sensor includes a bottomed substantially quadrangular cylindrical case having a bottom surface portion and a side surface portion, and a piezoelectric element formed on the inner surface of the bottom surface portion of the case.
  • the case is formed thicker than the thickness of the bottom surface portion of the case, and the opening of the case is formed longer in the thickness direction of the opposite one side portion of the case side portion, and on the side portion of the case perpendicular to that direction. It is formed shorter in the thickness direction of the opposite other side portion, and the thickness of one side portion in the direction in which the opening is formed longer than the thickness of the other side portion in the direction in which the opening is formed shorter in the side surface portion of the case.
  • the thickness of the case is at least one side of the side of the case. It is an ultrasonic sensor that is formed to change in a slanting manner!
  • the thickness of the other side portion of the side surface portion of the case is also configured to change in an inclined manner in a direction parallel to the main surface of the bottom surface portion of the case. /! I like to do it! /
  • the thickness of the side surface portion of the case is made larger than the thickness of the bottom surface portion of the case in order to suppress the vibration of the side surface portion of the case and reduce reverberation.
  • the thickness of at least one thin side portion of the side surface portion of the case is formed so as to change in an inclined manner instead of being uniform, so that vibration of the side surface portion of the case is suppressed and reverberation is reduced.
  • Reverberation characteristics are improved.
  • the reverberation characteristics are improved in the ultrasonic sensor according to the present invention, it is possible to arbitrarily set the thickness of the one side portion having a small thickness on the side surface portion of the case, and the necessary directivity. It becomes easy to obtain.
  • the reason why reverberation is suppressed when the thickness of the one side portion of the case is formed so as to change in a slanting manner on the side surface portion of the case as in the case of an ultrasonic sensor that is powerful in the present invention is as follows. .
  • the case resonates at the natural vibration frequency determined by the thickness and width.
  • this resonance increases the reverberation.
  • the present inventors have found that the reverberation can be suppressed because it does not resonate by changing the thickness of the side surface of the case in an inclined manner like the ultrasonic sensor according to the present invention. It is.
  • the one side portion having a small thickness on the side surface portion of the case is on both sides in the longitudinal direction of the opening portion of the case, and the thickness V on the side surface portion of the case is increased.
  • the ultrasonic sensor according to the present invention if the thickness of the side surface portion of the case is formed so that the thickness of the other side portion is not uniform and changes in an inclined manner. The vibration of the side surface of the slab is further suppressed, and reverberation is further reduced. The invention's effect
  • a rectangular ultrasonic sensor having excellent reverberation characteristics and directivity can be obtained.
  • FIG. 1 is an illustrative front view showing an example of an ultrasonic sensor according to the present invention.
  • FIG. 2 is an illustrative side view of the ultrasonic sensor shown in FIG.
  • FIG. 3 Position of the side surface of the case in the ultrasonic sensor shown in Fig. 1 with a non-uniform thickness on the side of the case and the ultrasonic sensor shown in Fig. 10 with a uniform thickness ( It is a graph which shows the simulation result of the displacement amount with respect to (height).
  • FIG. 4 is a graph showing a reverberation waveform of the ultrasonic sensor shown in FIG.
  • FIG. 5 shows the vibration of an ultrasonic sensor in which the thickness of the other side portion in the direction in which the opening is formed shorter than the thickness of the one side portion in the direction in which the opening is formed longer on the side surface portion of the case. It is a figure of the simulation which shows a state.
  • FIG. 6 Ultrasound in which the thickness of the one side portion in the direction in which the opening is formed long and the thickness of the other side portion in the direction in which the opening is formed short have the same dimensions on the side surface of the case It is a figure of the simulation which shows the vibration state of a sensor.
  • FIG. 7 Vibration of an ultrasonic sensor in which the thickness of the other side portion in the direction in which the opening is formed shorter than the thickness of the one side portion in the direction in which the opening is formed longer on the side surface portion of the case It is a figure of the simulation which shows a state.
  • FIG. 8 is an illustrative front view showing another example of the ultrasonic sensor according to the present invention.
  • FIG. 9 is a side view of the ultrasonic sensor shown in FIG.
  • FIG. 10 is an illustration of a front view showing an example of a conventional ultrasonic sensor.
  • FIG. 11 is a side view of the ultrasonic sensor shown in FIG.
  • FIG. 12 is a graph showing a reverberation waveform of the ultrasonic sensor shown in FIG.
  • FIG. 1 is a front schematic view showing an example of an ultrasonic sensor that is useful in the present invention
  • FIG. 2 is a side schematic view of the ultrasonic sensor.
  • the ultrasonic sensor 10 includes a case 12 having a substantially quadrangular cylindrical shape with a bottom made of a metal such as aluminum. Case 12 is abbreviated
  • the opening 18 inside the case 12 is formed, for example, in a substantially oval cross section.
  • the outer shape of the bottom surface portion 14 is formed in a substantially quadrangular shape with four rounded corners of the square, and the outer shape of the side surface portion 16 is also substantially corresponding to the outer shape of the bottom surface portion 14. Formed into a quadrangular shape.
  • the thickness T1 of the thinnest portion of the side surface portion 16 is formed to be thicker than the thickness T2 of the bottom surface portion 14. That is, in the case 12, the side surface portion 16 is formed to have a thickness greater than that of the bottom surface portion 14.
  • the thickness of the one side portions 16a, 16a facing each other at the side surface portion 16 is made thinner than the thickness T3 of the other side portions 16b, 16b facing each other at the side surface portion 16. Therefore, in the side surface portion 16 of the case 12, the opposing one side portions 16a, 16a The thinnest part exists.
  • the inner peripheral surfaces of the thin one side portions 16a, 16a are formed to be recessed in a circular arc shape, and the one side portions 16a, 16a
  • the outer peripheral surface is formed in a flat shape. Accordingly, the thickness of the one side portions 16a, 16a is formed so as to gradually increase from the center which is not uniform toward the other side portions 16b, 16b on both sides, that is, the bottom surface of the case 12. It is formed so as to change in an inclined manner in a direction parallel to the main surface of the portion 14.
  • the inner peripheral surface and the outer peripheral surface of the thicker other side portion 16b, 16b are formed in a flat shape, respectively, and accordingly, the other side portion 16b, The thickness T3 of 16b is formed uniformly.
  • the opening 18 is formed long in the thickness direction of the one side portion 16a of the side surface portion 16, and the thickness direction of the other side portion 16b of the side surface portion 16 orthogonal to that direction is short. It is formed.
  • the piezoelectric element 20 is attached to the inner surface of the bottom surface portion 14.
  • the piezoelectric element 20 is formed by, for example, forming electrodes on both main surfaces of a disk-shaped piezoelectric substrate.
  • the piezoelectric element 20 is bonded to the bottom surface portion 14 with an electrode force conductive adhesive or the like on one main surface side.
  • an intermediate portion of one signal line 22a of the cable 22 is soldered to one electrode of a capacitor 24 for temperature compensation, and a tip portion of the signal line 22a is an inner surface of the side surface portion 16 of the case 12. Soldered to. Further, the intermediate force S of the other signal line 22b of the cable 22 is soldered to the other electrode of the capacitor 24, and the tip of the signal line 22b is soldered to the electrode on the other main surface side of the piezoelectric element 20. The Accordingly, the piezoelectric element 20 and the temperature compensation capacitor 24 are connected in parallel between the signal lines 22a and 22b of the cable 22.
  • the capacitor 24 is insulated.
  • the piezoelectric element 20 is excited by applying a drive voltage to the signal lines 22 a and 22 b of the cable 22. Due to the vibration of the piezoelectric element 20, the bottom surface portion 14 of the case 12 also vibrates, and ultrasonic waves are emitted in a direction orthogonal to the bottom surface portion 14.
  • the piezoelectric element 20 vibrates and is converted into an electric signal, and is transmitted from the signal lines 22a and 22b of the cable 22. An electrical signal is output. Therefore, the distance from the ultrasonic sensor 10 to the object to be detected can be measured by measuring the time from when the drive voltage is applied until the electrical signal is output.
  • the opening 18 of the case 12 is formed long in the thickness direction of the one side portion 16a of the side surface portion 16 of the case 12, and the other of the side surface portions 16 orthogonal to the direction. Since it is formed short in the thickness direction of the side portion 16b, it is narrow in the thickness direction of the one side portion 16a and wide in the thickness direction of the other side portion 16b, and has directivity. Therefore, when this ultrasonic sensor 10 is used, for example, as a back sonar for an automobile, the thickness direction of the one side portion 16a becomes the vertical direction on the side surface portion 16 of the case 12, and the thickness direction of the other side portion 16b. Are arranged in a horizontal direction.
  • the thickness of the side surface portion 16 of the case 12 is made larger than the thickness of the bottom surface portion 14 of the case 12 in order to suppress the vibration of the side surface portion 16 of the case 12 and reduce reverberation. ing.
  • the ultrasonic sensor 10 is formed such that the thickness of the one side portion 16a, 16a having a small thickness is not uniform in the side surface portion 16 of the case 12, but is changed in an inclined manner. Vibration of part 16 is suppressed, reverberation is reduced, and reverberation characteristics are improved.
  • FIG. 3 shows an ultrasonic sensor 10 shown in FIG. 1 in which the thickness of the thin side of the side surface of the case is made uneven in this way, and the ultrasonic sensor 1 shown in FIG. 10 in which the thickness is made uniform.
  • 6 is a graph showing a simulation result of a displacement amount with respect to a position (height) of a side surface portion of a case.
  • Fig. 3 shows the outline of the ultrasonic sensor 10, 1 using a case made of aluminum with a height of 10mm, a sound absorbing material made of felt, and an insulating grease made of silicon rubber. As is apparent from the graph of FIG. 3, in the ultrasonic sensor 10 shown in FIG.
  • the displacement amount is very small over the entire side surface portion 16 of the case 12.
  • the amount of displacement in the portion opposite to the piezoelectric element 3 in the side surface portion of the case 2 is very large.
  • FIG. 4 is a graph showing the reverberation waveform of the ultrasonic sensor 10 of FIG. 1, in which the graph of FIG. 3 shows the result of the displacement.
  • FIG. 12 is the graph of FIG. 11 is a graph showing a reverberation waveform of the ultrasonic sensor 1 of FIG.
  • the thickness T1 of the thinnest portion of the side surface portion 16 of the case 12 can be set to an arbitrary thickness, so that necessary directivity is obtained. This is easy.
  • the one side portion 16 a having a small thickness on the side surface portion 16 of the case 12 is on both sides in the longitudinal direction of the opening portion 18 of the case 12, and the side surface portion 16 of the case 12 has
  • the thickness of the other side portion 16b is on both sides in the short direction of the opening 18 of the case 12
  • the temperature compensating capacitor 24 is connected in parallel to the piezoelectric element 20, so that the temperature tracking is good and the temperature drift can be reduced.
  • the maximum length in the longitudinal direction of the opening 18 of the case 12 is set to 12 mm
  • the length in the short direction is set to 6 mm
  • the simulation of the vibration state when the thickness of the side surface portions 16 facing each other is changed. Went.
  • FIG. 5 shows the direction in which the opening 18 is formed shorter than the thickness of the one side portion 16a in the direction in which the opening 18 is formed long in the side surface 16 of the case 12 (the minimum thickness is 0.5 mm, for example).
  • FIG. 6 is a simulation diagram showing a vibration state of the ultrasonic sensor 10 in which the thickness of the other side portion 16b is increased to 4 mm, for example.
  • FIG. 6 shows the minimum thickness of the one side portion 16a in the direction in which the opening 18 is formed long in the side surface portion 16 of the case 12, and the thickness of the other side portion 16b in the direction in which the opening 18 is formed short.
  • the vibration state of the ultrasonic sensor 10 with the same dimensions, for example, 0.5 mm It is a figure of the simulation shown.
  • FIG. 7 shows the minimum thickness of one side portion 16a in the direction in which the opening 18 is formed longer in the side surface portion 16 of the case 12, for example, the other side in the direction in which the opening 18 is formed shorter than 0.5 mm.
  • FIG. 6 is a simulation diagram showing the vibration state of the ultrasonic sensor 10 in which the thickness of the portion 16b is formed to be thin, for example, 0.25 mm.
  • the state in which the case 12 is most deformed by vibration is indicated by a solid line, and the state in which the case 12 is not deformed is indicated by a two-dot chain line.
  • the thickness of the other side portion 16b in the direction in which the opening 18 is formed short in the side surface portion 16 of the case 12 is made larger than the thickness of the one side portion 16a, vibration is generated at the end portion of the case 12. 6 and 7, as shown in FIGS. 6 and 7, the thickness of the other side portion 16b in the direction in which the opening 18 is formed short in the side surface portion 16 of the case 12 is equal to or less than the thickness of the one side portion 16a. If it is formed to have a thickness of 5 mm, vibration will increase at the end of the case 12, and the reverberation will increase due to the vibration.
  • the amount of displacement in the vicinity of the opening of the side surface portion 16 of the case 12 relative to the amount of displacement of the bottom surface portion 14 was compared.
  • the amount of displacement is a combination of the amount of displacement in the vertical direction and the amount of displacement in the parallel direction with respect to the bottom surface portion 14 of the case 12.
  • the displacement near the opening of the side surface portion 16 with respect to the bottom surface portion 14 of the case 12 is as large as 0.8.
  • the amount of displacement near the opening of the side surface portion 16 with respect to the bottom surface portion 14 of 12 is as large as 1.0, and the vibration of the side surface portion 16 of the case 12 generates the same vibration as the side surface portion 14 of the case 12, respectively. I was strong.
  • FIG. 8 is a front view solution view showing another example of the ultrasonic sensor according to the present invention
  • FIG. 9 is a side view solution view of the ultrasonic sensor. In the ultrasonic sensor 10 shown in FIG. 8, compared to the ultrasonic sensor 10 shown in FIG.
  • the intermediate portion of the inner peripheral surface of the other side portions 16 b and 16 b is recessed in a circular arc shape. It is formed as follows. Accordingly, in the side surface portion 16 of the case 12, the thickness of the intermediate portion of the other side portions 16b, 16b is formed so as to gradually increase from the center toward the one side portions 16a, 16a on both sides, that is, The case 12 is formed so as to change in an inclined manner in a direction parallel to the main surface of the bottom surface portion 14.
  • the central portion where the piezoelectric element 20 is provided and the thin side portions 16a and 16a of the side surface portion 16 of the case 12 are provided.
  • the thickness of the substantially oval plate-like end portions 14a, 14a between the two is less than the thickness T2 of the central portion of the bottom surface portion 14 of the case 12.
  • the thicknesses of the other side portions 16b and 16b having a large thickness in the side surface portion 16 of the case 12 are not uniform as compared with the ultrasonic sensor 10 shown in FIG. Since it is formed so as to change in an inclined manner, vibration of the side surface portion 16 of the case 12 is further suppressed, and reverberation is further reduced.
  • the side surface portion 16 of the case 12 has a thinner one side portion in the bottom surface portion 14 of the case 12. Since the end portions 14a and 14a, which are the portions on the 16a and 16a sides, are formed thin, it is possible to improve characteristics such as directivity and reverberation characteristics.
  • each part is defined by a specific size, shape, arrangement, material, and number, but in the present invention, these may be arbitrarily changed. By changing in this way, characteristics such as directivity and reverberation characteristics may be further improved.
  • the signal lines 22a and 22b are used for electrical connection with the outside.
  • Pin terminals are used for electrical connection with the outside. It's good. Industrial applicability
  • the ultrasonic sensor according to the present invention is used in, for example, a pack sonar for an automobile.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)

Abstract

L'invention concerne un capteur rectangulaire ultrasonore ayant d'excellentes caractéristiques de réverbération et de directivité. Le capteur ultrasonore (10) comprend un boîtier (12) présentant une forme de tube à fond généralement rectangulaire, composé d'une partie de fond (14) présentant une forme de plaque généralement rectangulaire et d'une partie de surfaces latérales (16) en forme de tube généralement rectangulaire. L'épaisseur de la partie de surfaces latérales (16) est supérieure à celle de la partie de fond (14). L'épaisseur des pièces latérales opposées (16a, 16a) de la partie de surfaces latérales est inférieure à celle des autres pièces latérales opposées (16b, 16b) de celle-ci. La surface intérieure des pièces (16a, 16a) est concave et présentant une section transversale en forme d'arc de cercle. Par conséquent, l'épaisseur des pièces (16a, 16a) change progressivement. Un élément piézoélectrique (20) est utilisé sur la partie de fond (14) du boîtier (12). Des fils de signal (22a, 22b) d'un câble (22) sont reliés électriquement à l'élément piézoélectrique (20), et un condensateur (24), destiné à une compensation en température, est relié en parallèle à l'élément piézoélectrique (20). Un matériau absorbant les sons (26) est disposé sur l'élément piézoélectrique (20), et une résine d'isolation (28) est placée à l'intérieur du boîtier (12).
PCT/JP2007/052145 2006-02-10 2007-02-07 Capteur ultrasonore Ceased WO2007091609A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007557872A JPWO2007091609A1 (ja) 2006-02-10 2007-02-07 超音波センサ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006033213 2006-02-10
JP2006-033213 2006-02-10

Publications (1)

Publication Number Publication Date
WO2007091609A1 true WO2007091609A1 (fr) 2007-08-16

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PCT/JP2007/052145 Ceased WO2007091609A1 (fr) 2006-02-10 2007-02-07 Capteur ultrasonore

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JP (1) JPWO2007091609A1 (fr)
WO (1) WO2007091609A1 (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101095848B1 (ko) 2010-09-30 2011-12-21 주성대학산학협력단 초음파센서의 제조방법
US20120192652A1 (en) * 2011-01-28 2012-08-02 Texmag Gmbh Vertriebsgesellschaft Device for detecting a selvage of a material web
CN102768355A (zh) * 2011-05-05 2012-11-07 同致电子企业股份有限公司 超音波感测器
US20130049535A1 (en) * 2011-08-22 2013-02-28 Samsung Electro-Mechanics Co., Ltd. Ultrasonic sensor
GB2536723A (en) * 2015-03-27 2016-09-28 Bae Systems Plc Acoustic Transducer
WO2016189812A1 (fr) * 2015-05-25 2016-12-01 パナソニックＩｐマネジメント株式会社 Dispositif à ultrasons et capteur à ultrasons l'utilisant
US10702888B2 (en) 2015-03-27 2020-07-07 Bae Systems Plc Acoustic transducer
WO2021256047A1 (fr) * 2020-06-17 2021-12-23 パナソニックＩｐマネジメント株式会社 Dispositif de capteur ultrasonore et véhicule

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3034685U (ja) * 1996-08-12 1997-02-25 日本セラミック株式会社 超音波送受波器
JPH09284896A (ja) * 1996-04-17 1997-10-31 Murata Mfg Co Ltd 超音波送受波器

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0334685U (fr) * 1989-08-14 1991-04-04

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09284896A (ja) * 1996-04-17 1997-10-31 Murata Mfg Co Ltd 超音波送受波器
JP3034685U (ja) * 1996-08-12 1997-02-25 日本セラミック株式会社 超音波送受波器

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101095848B1 (ko) 2010-09-30 2011-12-21 주성대학산학협력단 초음파센서의 제조방법
US20120192652A1 (en) * 2011-01-28 2012-08-02 Texmag Gmbh Vertriebsgesellschaft Device for detecting a selvage of a material web
US8789421B2 (en) * 2011-01-28 2014-07-29 Texmag Gmbh Vertriebsgesellschaft Device for detecting a selvage of a material web
CN102768355A (zh) * 2011-05-05 2012-11-07 同致电子企业股份有限公司 超音波感测器
CN102768355B (zh) * 2011-05-05 2014-06-25 同致电子企业股份有限公司 超音波感测器
US20130049535A1 (en) * 2011-08-22 2013-02-28 Samsung Electro-Mechanics Co., Ltd. Ultrasonic sensor
GB2536723A (en) * 2015-03-27 2016-09-28 Bae Systems Plc Acoustic Transducer
US10702888B2 (en) 2015-03-27 2020-07-07 Bae Systems Plc Acoustic transducer
WO2016189812A1 (fr) * 2015-05-25 2016-12-01 パナソニックＩｐマネジメント株式会社 Dispositif à ultrasons et capteur à ultrasons l'utilisant
WO2021256047A1 (fr) * 2020-06-17 2021-12-23 パナソニックＩｐマネジメント株式会社 Dispositif de capteur ultrasonore et véhicule

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