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WO2007067339A3 - Fixed volume valve system - Google Patents

Fixed volume valve system Download PDF

Info

Publication number
WO2007067339A3
WO2007067339A3 PCT/US2006/044908 US2006044908W WO2007067339A3 WO 2007067339 A3 WO2007067339 A3 WO 2007067339A3 US 2006044908 W US2006044908 W US 2006044908W WO 2007067339 A3 WO2007067339 A3 WO 2007067339A3
Authority
WO
WIPO (PCT)
Prior art keywords
valve
flow passage
valve seat
diaphragm
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2006/044908
Other languages
French (fr)
Other versions
WO2007067339A2 (en
WO2007067339B1 (en
Inventor
Iraj Gashgaee
George Gonnella
James Cedrone
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of WO2007067339A2 publication Critical patent/WO2007067339A2/en
Publication of WO2007067339A3 publication Critical patent/WO2007067339A3/en
Publication of WO2007067339B1 publication Critical patent/WO2007067339B1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B7/00—Piston machines or pumps characterised by having positively-driven valving
    • F04B7/02—Piston machines or pumps characterised by having positively-driven valving the valving being fluid-actuated
    • F04B7/0266—Piston machines or pumps characterised by having positively-driven valving the valving being fluid-actuated the inlet and discharge means being separate members
    • F04B7/0275—Piston machines or pumps characterised by having positively-driven valving the valving being fluid-actuated the inlet and discharge means being separate members and being deformable, e.g. membranes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Details Of Valves (AREA)
  • Reciprocating Pumps (AREA)
  • Lift Valve (AREA)

Abstract

Embodiments of the present invention provide valves that provide for uniform holdup volume. An embodiment of the present invention provides a valve comprising a valve body (e.g., one or more pieces) that defines a valve chamber having a valve seat, an inlet flow passage, an outlet flow passage and a diaphragm control flow passage intersecting the valve seat. The valve seat is shaped so that the valve has a fixed holdup volume when at least a threshold vacuum is applied to the diaphragm control flow passage. The valve further comprises a diaphragm movable towards and away from the valve seat. According to one embodiment of the present invention, the valve seat can have a semi-hemispherical shape to which the diaphragm conforms when a minimum vacuum is applied to the diaphragm control flow passage.
PCT/US2006/044908 2005-12-02 2006-11-20 Fixed volume valve system Ceased WO2007067339A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US74214705P 2005-12-02 2005-12-02
US60/742,147 2005-12-02

Publications (3)

Publication Number Publication Date
WO2007067339A2 WO2007067339A2 (en) 2007-06-14
WO2007067339A3 true WO2007067339A3 (en) 2007-09-20
WO2007067339B1 WO2007067339B1 (en) 2007-11-22

Family

ID=38123366

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/044908 Ceased WO2007067339A2 (en) 2005-12-02 2006-11-20 Fixed volume valve system

Country Status (3)

Country Link
US (1) US20070128061A1 (en)
TW (1) TW200726916A (en)
WO (1) WO2007067339A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10393276B2 (en) 2013-12-10 2019-08-27 Semba Biosciences, Inc. High-flow fluid valve block
US10344876B2 (en) 2015-06-23 2019-07-09 Entegris, Inc. Oblong diaphragm valves
KR102604074B1 (en) 2021-09-02 2023-11-22 세메스 주식회사 pump, apparatus of supplying chemical liquid and apparatus for treating substrate

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US5653251A (en) * 1995-03-06 1997-08-05 Reseal International Limited Partnership Vacuum actuated sheath valve
US5743293A (en) * 1994-06-24 1998-04-28 Robertshaw Controls Company Fuel control device and methods of making the same

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Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5262068A (en) * 1991-05-17 1993-11-16 Millipore Corporation Integrated system for filtering and dispensing fluid having fill, dispense and bubble purge strokes
US5743293A (en) * 1994-06-24 1998-04-28 Robertshaw Controls Company Fuel control device and methods of making the same
US5653251A (en) * 1995-03-06 1997-08-05 Reseal International Limited Partnership Vacuum actuated sheath valve

Also Published As

Publication number Publication date
WO2007067339A2 (en) 2007-06-14
WO2007067339B1 (en) 2007-11-22
US20070128061A1 (en) 2007-06-07
TW200726916A (en) 2007-07-16

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