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WO2006126880A3 - Scanning transmission electron microscope - Google Patents

Scanning transmission electron microscope Download PDF

Info

Publication number
WO2006126880A3
WO2006126880A3 PCT/NL2006/050120 NL2006050120W WO2006126880A3 WO 2006126880 A3 WO2006126880 A3 WO 2006126880A3 NL 2006050120 W NL2006050120 W NL 2006050120W WO 2006126880 A3 WO2006126880 A3 WO 2006126880A3
Authority
WO
WIPO (PCT)
Prior art keywords
electron
detector
scanning transmission
electron microscope
transmission electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/NL2006/050120
Other languages
French (fr)
Other versions
WO2006126880A2 (en
Inventor
Pieter Kruit
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Technische Universiteit Delft
Original Assignee
Technische Universiteit Delft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technische Universiteit Delft filed Critical Technische Universiteit Delft
Publication of WO2006126880A2 publication Critical patent/WO2006126880A2/en
Publication of WO2006126880A3 publication Critical patent/WO2006126880A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2802—Transmission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

The invention relates to a scanning transmission electron microscope comprising an electron source (1) , an electron accelerator (4) and deflection means (5) for directing electrons emitted by the electron source at an object (2) to be examined, and in addition a detector (7) for detecting electrons coming from the object and, connected to the detector, a device for processing the detected electrons so as to form an object image, wherein a beam splitter (3) is provided for dividing the electron beam from the electron source into beamlets to be directed at the object to be examined, and wherein the detector is designed for the detection of separate electron patterns that correspond to said beamlets .
PCT/NL2006/050120 2005-05-25 2006-05-19 Scanning transmission electron microscope Ceased WO2006126880A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1029129 2005-05-25
NL1029129A NL1029129C2 (en) 2005-05-25 2005-05-25 Scanning transmission electron microscope.

Publications (2)

Publication Number Publication Date
WO2006126880A2 WO2006126880A2 (en) 2006-11-30
WO2006126880A3 true WO2006126880A3 (en) 2007-03-29

Family

ID=35512017

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/NL2006/050120 Ceased WO2006126880A2 (en) 2005-05-25 2006-05-19 Scanning transmission electron microscope

Country Status (2)

Country Link
NL (1) NL1029129C2 (en)
WO (1) WO2006126880A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013014976A1 (en) * 2013-09-09 2015-03-12 Carl Zeiss Microscopy Gmbh Particle-optical system

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4209698A (en) * 1971-12-28 1980-06-24 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Transmission-type charged particle beam apparatus
JPH0381939A (en) * 1989-08-25 1991-04-08 Hitachi Ltd Scanning type interferential electron microscope
US5892224A (en) * 1996-05-13 1999-04-06 Nikon Corporation Apparatus and methods for inspecting wafers and masks using multiple charged-particle beams
WO2000011702A1 (en) * 1998-08-24 2000-03-02 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
US20030085360A1 (en) * 1999-11-23 2003-05-08 Multibeam Systems, Inc. Electron optics for multi-beam electron beam lithography tool

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4209698A (en) * 1971-12-28 1980-06-24 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Transmission-type charged particle beam apparatus
JPH0381939A (en) * 1989-08-25 1991-04-08 Hitachi Ltd Scanning type interferential electron microscope
US5892224A (en) * 1996-05-13 1999-04-06 Nikon Corporation Apparatus and methods for inspecting wafers and masks using multiple charged-particle beams
WO2000011702A1 (en) * 1998-08-24 2000-03-02 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
US20030085360A1 (en) * 1999-11-23 2003-05-08 Multibeam Systems, Inc. Electron optics for multi-beam electron beam lithography tool

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 015, no. 254 (E - 1083) 27 June 1991 (1991-06-27) *

Also Published As

Publication number Publication date
WO2006126880A2 (en) 2006-11-30
NL1029129C2 (en) 2006-11-28

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Legal Events

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DPE1 Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101)
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