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WO2006025138A1 - Piezoelectric electroacoustic transducer - Google Patents

Piezoelectric electroacoustic transducer Download PDF

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Publication number
WO2006025138A1
WO2006025138A1 PCT/JP2005/009746 JP2005009746W WO2006025138A1 WO 2006025138 A1 WO2006025138 A1 WO 2006025138A1 JP 2005009746 W JP2005009746 W JP 2005009746W WO 2006025138 A1 WO2006025138 A1 WO 2006025138A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric
intermediate layer
electroacoustic transducer
resin film
diaphragm
Prior art date
Application number
PCT/JP2005/009746
Other languages
French (fr)
Japanese (ja)
Inventor
Tetsuo Takeshima
Masakazu Yamauchi
Muneyuki Daidai
Manabu Sumita
Original Assignee
Murata Manufacturing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co., Ltd. filed Critical Murata Manufacturing Co., Ltd.
Publication of WO2006025138A1 publication Critical patent/WO2006025138A1/en

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Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00Piezoelectric transducers; Electrostrictive transducers
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K9/00Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
    • G10K9/12Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
    • G10K9/122Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
    • G10K9/125Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means with a plurality of active elements
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00Details of transducers, loudspeakers or microphones
    • H04R1/06Arranging circuit leads; Relieving strain on circuit leads
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/003Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor for diaphragms or their outer suspension
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2307/00Details of diaphragms or cones for electromechanical transducers, their suspension or their manufacture covered by H04R7/00 or H04R31/003, not provided for in any of its subgroups
    • H04R2307/023Diaphragms comprising ceramic-like materials, e.g. pure ceramic, glass, boride, nitride, carbide, mica and carbon materials

Definitions

  • the present invention relates to a piezoelectric electroacoustic transducer such as a piezoelectric resono piezoelectric sounder or a piezoelectric speaker.
  • piezoelectric electroacoustic transformation is widely used as a piezoelectric sounder or a piezoelectric receiver that generates an alarm sound or an operation sound in electronic devices, home appliances, mobile phones, and the like.
  • the conventional piezoelectric electroacoustic transducer has a problem that the resonance frequency becomes high because the piezoelectric diaphragm is accommodated in the case and the periphery of the piezoelectric diaphragm is fixed to the case.
  • the size of the piezoelectric diaphragm must be increased, and the case becomes larger.
  • there is a large drop in sound pressure between the primary resonance frequency and the secondary resonance frequency and an almost flat sound pressure characteristic cannot be obtained over a wide band! /.
  • the applicant of the present application has proposed a piezoelectric electroacoustic transducer that can achieve both a reduction in size and a low frequency, a large amount of displacement, and a substantially flat sound pressure characteristic in a wide band (patent) Reference 1).
  • a piezoelectric element having a smaller laminated structure is attached to one surface or both surfaces of a resin film, and the outer peripheral portion of the resin film is supported by a casing.
  • a piezoelectric element consists of two piezoelectric ceramic layers stacked with internal electrodes in between, and the polarization direction of each ceramic layer is the same direction, and an AC signal is generated between the main surface electrode provided on the front and back surfaces of the piezoelectric element and the inside. Is applied to generate flexural vibration.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2004-7400
  • a piezoelectric element having a two-layer structure is used.
  • a method of increasing the number of layers can be considered.
  • an object of the present invention is to provide a piezoelectric electroacoustic change with a wide and high sound pressure in a band.
  • the invention according to claim 1 is characterized in that a piezoelectric diaphragm smaller in size than the resin film is attached to the center of one surface of the resin film, and the peripheral part of the resin film is enclosed in a housing.
  • Each piezoelectric element has electrodes on the front and back main surfaces or inside, and by applying an AC signal between these electrodes, the two piezoelectric elements expand and contract in opposite directions in the plane direction, and the piezoelectric diaphragm as a whole vibrates and vibrates.
  • a piezoelectric type electroacoustic transducer characterized by generating the above is provided.
  • the piezoelectric diaphragm has a structure in which two piezoelectric elements are stacked with an intermediate layer therebetween, and each piezoelectric element expands and contracts in the opposite direction in the plane direction by an applied AC signal. Therefore, the piezoelectric diaphragm generates bending vibration as a whole.
  • a piezoelectric diaphragm is affixed to the resin film, and the periphery of the resin film is supported by the housing, so that the vibration of the piezoelectric diaphragm is not obstructed and has an almost flat sound pressure characteristic over a wide band. Acoustic variation is obtained.
  • the piezoelectric diaphragm is formed by laminating and bonding two piezoelectric elements with an intermediate layer in between, a high-order (secondary resonance) mode is greatly excited. As a result, high sound pressure electroacoustic transformation can be obtained in a wide band.
  • the intermediate layer of the present invention a resin adhesive having a smaller Young's modulus and density than the ceramic constituting the piezoelectric element is generally used.
  • the intermediate layer should have a uniform thickness.
  • the intermediate layer may be a resin adhesive containing a spherical filler having a uniform diameter.
  • the intermediate layer since the diameter of the filler determines the thickness of the intermediate layer, the intermediate layer has a uniform thickness. Can be obtained.
  • the intermediate layer is made by impregnating a fibrous sheet such as paper with a resin adhesive.
  • the thickness is almost determined by the fibrous sheet, and the upper and lower piezoelectric elements are bonded and fixed by the resin adhesive impregnated therein.
  • each of the two piezoelectric elements has a single piezoelectric ceramic layer, and main surface electrodes are provided on the front and back surfaces of the single piezoelectric ceramic layer.
  • An AC signal may be applied between the front and back main surface electrodes.
  • each of the two piezoelectric elements has a plurality of piezoelectric ceramic layers, and the surface of the plurality of piezoelectric ceramic layers.
  • the main surface electrode and the internal electrode are provided between the back surface and each piezoelectric ceramic layer, and the polarization directions of the adjacent piezoelectric ceramic layers are opposite to each other, and between the main surface electrode and the internal electrode on the front and back surfaces.
  • An AC signal may be applied.
  • a laminated piezoelectric vibration plate that generates flexural vibration is attached to one surface of the resin film, and the outer peripheral portion of the film is enclosed by a housing. Since it is supported by the body, the vibration of the piezoelectric diaphragm is not hindered, and an electroacoustic transducer having a broad and substantially flat sound pressure characteristic can be obtained.
  • the piezoelectric diaphragm is made by laminating and bonding two piezoelectric elements with an intermediate layer in between, the higher-order (resonance) mode is greatly excited, and electroacoustic change with high sound pressure is achieved over a wide band. Obtainable.
  • FIG. 1 is a perspective view of an example of piezoelectric electroacoustic transformation according to the present invention.
  • FIG. 2 is an exploded perspective view of the piezoelectric electroacoustic transducer shown in FIG.
  • FIG. 3 is an exploded perspective view of a piezoelectric diaphragm used in the piezoelectric electroacoustic transducer shown in FIG. 1.
  • FIG. 4 is a schematic cross-sectional view of a piezoelectric diaphragm used in the piezoelectric electroacoustic transducer shown in FIG.
  • FIG. 5 is a sound pressure characteristic diagram of a piezoelectric diaphragm having an intermediate layer and a piezoelectric diaphragm having no intermediate layer.
  • FIG. 6 A diagram showing the relationship between the thickness of the intermediate layer and the sound pressure obtained by the finite element method simulation.
  • FIG. 7 is a diagram showing the relationship between the intermediate layer thickness, resonance frequency fr, and electromechanical coupling coefficient K obtained by finite element method simulation.
  • FIG. 8 is a partial cross-sectional view of a second embodiment of a piezoelectric diaphragm.
  • FIG. 9 is a cross-sectional view of a third embodiment of a piezoelectric diaphragm including a resin film.
  • FIG. 10 is a cross-sectional view of a fourth embodiment of a piezoelectric diaphragm including a resin film.
  • FIGS. 1 to 4 show examples of the piezoelectric force that is the first embodiment of the piezoelectric electroacoustic transformation according to the present invention.
  • This embodiment includes a piezoelectric diaphragm A, a resin film B on which the piezoelectric diaphragm A is pasted, and a housing that stores the resin film B.
  • the housing has a lower cover 30 having a large number of sound emission holes 30a, a frame-shaped lower case 31, a U-shaped upper case 32, and a number of sound emission holes 33a, similar to the lower cover 30. It consists of an upper cover 33.
  • the piezoelectric diaphragm A is formed by laminating and bonding two piezoelectric elements 1 and 10 with an intermediate layer 20 therebetween, and is formed in a rectangular shape as a whole. Yes.
  • the upper piezoelectric element 1 is formed by laminating two piezoelectric ceramic layers la and lb.
  • Main surface electrodes 2 and 3 are formed on the front and back main surfaces of the piezoelectric element 1, and between the ceramic layers la and lb.
  • An internal electrode 4 is formed on the substrate.
  • the two ceramic layers la and lb are polarized in opposite directions in the thickness direction as indicated by an arrow P.
  • the lower piezoelectric element 10 has the same structure as the upper piezoelectric element 1, but the polarization direction P is opposite. That is, two piezoelectric ceramic layers 10a and 10b are laminated, main surface electrodes 12 and 13 are formed on the front and back main surfaces, and an internal electrode 14 is formed between the ceramic layers 10a and 10b.
  • the two ceramic layers 10a and 10 are polarized in the opposite direction in the thickness direction as indicated by the arrow P !.
  • the ceramic layers la, lb, 10a and 10b rectangular PZT ceramics having an outer dimension of 24 ⁇ 12 mm and a thickness of one layer of 15 m were used.
  • the intermediate layer 20 in this example uses a fibrous sheet such as Japanese paper impregnated with epoxy resin. Its thickness is about 40 m.
  • the intermediate layer 20 should have a Young's modulus and density smaller than ceramics. Specifically, the Young's modulus is 1 X 10 2 to 1 X 10 4 MPa, and the density is 0.8 to 2. Okg / m 3 Good thing.
  • the piezoelectric ceramic used in this example had a Young's modulus of 6.3 ⁇ 10 4 MPa and a density of 7.8 ⁇ 10 3 kg / m 3 .
  • the front-side main surface electrode 2 and the back-side main surface electrode 3 of the piezoelectric element 1, and the front-side main surface electrode 12 and the back-side main surface electrode 13 of the piezoelectric element 10 are one end face of the piezoelectric elements 1 and 10. And they are connected to each other through an end face electrode 5 formed on one end face of the intermediate layer 20.
  • the internal electrode 4 of the piezoelectric element 1 and the internal electrode 14 of the piezoelectric element 10 are connected to the other end face of the piezoelectric elements 1 and 10 and the end face electrode 6 formed on the other end face of the intermediate layer 20.
  • a part of the main surface electrode 2 of the upper piezoelectric element 1 is cut off, and an auxiliary electrode 7 connected to the end face electrode 6 is formed in the cut portion.
  • the end face electrodes 5 and 6 are shown separated by the piezoelectric elements 1 and 10 and the intermediate layer 20, but in actuality, the piezoelectric elements 1 and 10 and the intermediate layer 20 are laminated and bonded continuously. Formed.
  • the front and back surfaces of the piezoelectric diaphragm A are covered with resin layers 8 and 9, as shown in FIG.
  • the resin layers 8 and 9 have a role as a protective layer for preventing the piezoelectric elements 1 and 10 from cracking due to a drop impact, and are provided as necessary.
  • a notch 8a where a part of the main surface electrode 2 is exposed and a notch 8b where the auxiliary electrode 7 is exposed are formed.
  • similar notches 9a and 9b are formed in the backside resin layer 9, but these notches are provided to eliminate directionality and can be omitted.
  • the piezoelectric diaphragm A is affixed to a substantially central portion of the surface of the rectangular resin film B having a larger size.
  • the pressure-sensitive adhesive for example, a silicone-based or acrylic-based pressure-sensitive adhesive is used. However, it is not limited to adhesion, and adhesion or heat welding may be used.
  • the resin film B is thinner than the piezoelectric diaphragm A and is formed of a resin material having a Young's modulus of 1 to 200 MPa. Specifically, a resin material such as ethylene propylene rubber or styrene butadiene rubber is used.
  • ethylene propylene rubber having an outer dimension of 31.2 X 15.5 mm and a thickness of 70 m was used.
  • the upper and lower surfaces of the peripheral portion of the resin film B are bonded and supported by upper and lower cases 31, 32.
  • the cases 31 and 32 are formed of a metal plate or a resin plate having a thickness (for example, 0.25 to 0.35 mm) that can secure the vibration space of the piezoelectric diaphragm A.
  • a terminal portion 34 is attached to the upper surface of the resin film B, and the terminal portion 34 is exposed on the side portion of the upper cover 33.
  • the terminal portion 34 is provided with terminal electrodes 35 and 36 for connecting the outside and the piezoelectric diaphragm A on an insulating substrate such as a glass epoxy substrate.
  • the electrodes 2 and 7 exposed from the layer 8 are connected to each other through force leads 37 and 38.
  • the lead portions 37 and 38 may be thin film electrodes or thick film electrodes.
  • An electric signal is input to the piezoelectric diaphragm A via the terminal portion 34.
  • the upper case 32 is formed in a U shape with one end side opened.
  • the terminal portion 34 is provided on both end sides of the resin film B.
  • the upper case 32 can be constituted by a pair of parallel walls.
  • a resin film B with a piezoelectric diaphragm A attached thereto is bonded and supported by frame-like cases 31, 32 from above and below, and the openings of these cases 31, 32 are covered with a thin plate. Since it is configured to close at 30, 33, it is possible to configure a thin (less than lmm) electroacoustic transformation as a whole. Since the terminal portion 34 is provided on one end side of the electroacoustic transducer, the external connection can be made from one direction.
  • FIG. 5 shows the sound pressure characteristics of a piezoelectric electroacoustic transducer using a piezoelectric diaphragm having an intermediate layer, and a piezoelectric electroacoustic transducer using a piezoelectric diaphragm without an intermediate layer! This is shown in contrast with the sound pressure characteristics of.
  • the piezoelectric diaphragm used here has two piezoelectric ceramic layers on one side in the same way as in FIG. 4, and the intermediate layer is 40 m thick and paper is impregnated with grease.
  • Table 1 is a table comparing dimensions and sound pressure characteristics of a piezoelectric diaphragm having an intermediate layer and a piezoelectric diaphragm having no intermediate layer.
  • the piezoelectric diaphragm used here is the same as in FIG.
  • the average sound pressure is increased by 4.9 dB in the piezoelectric diaphragm with the intermediate layer compared to the piezoelectric diaphragm without the intermediate layer.
  • Fig. 6 shows the relationship between the thickness of the intermediate layer and the sound pressure by finite element simulation.
  • Fig. 7 shows the relationship between the thickness of the intermediate layer, the resonance frequency fr, and the electromechanical coupling coefficient K. It was obtained by finite element method simulation.
  • the resin film used here is a circle with a diameter of 20 mm, and the piezoelectric diaphragm is formed by laminating a circular ceramic layer with a diameter of 18 mm and a thickness of 15 m on two sides.
  • the Young's modulus of the intermediate layer lOOMPa The density was 1. Okg / m 3 .
  • the resonance frequency increases as the thickness of the intermediate layer increases, but the rate of increase of the secondary resonance frequency is greater than that of the primary resonance frequency.
  • the electromechanical coupling coefficient K it can be seen that as the thickness of the intermediate layer increases, the K of the primary resonance decreases while the K of the secondary resonance increases.
  • the thickness of the intermediate layer is 0.07 mm or less, the primary resonance K is larger than the secondary resonance K, but when it exceeds 0.07 mm, the secondary resonance K is larger than the K of the secondary resonance.
  • electroacoustic transducers are often used in the region where K of primary resonance is larger than K of secondary resonance, and the product of resonance frequency and electromechanical coupling coefficient affects sound pressure.
  • the thickness of the intermediate layer is 0.02 to 0.0.
  • FIG. 8 shows a cross-sectional structure of a second embodiment of the piezoelectric diaphragm.
  • an intermediate layer 21 in which a spherical filler 23 having a diameter of 30 ⁇ m is dispersed and mixed in a resin adhesive 22 such as an epoxy resin is used.
  • the filler 23 may be an insulating material or a metal material.
  • the thickness of the intermediate layer 21 is limited by the diameter of the filler 23, and the uniform thickness (about 40 ⁇ m) of intermediate layer 21 can be obtained.
  • FIG. 9 shows a third embodiment of the piezoelectric diaphragm.
  • the piezoelectric elements 1 and 10 bonded with the intermediate layer 20 in between have been described as having two piezoelectric ceramic layers, but the piezoelectric diaphragm A1 of the third embodiment In this case, the piezoelectric elements 1 and 10 bonded with the intermediate layer 20 therebetween have one piezoelectric ceramic layer la and 10a.
  • Arrow P indicates the direction of polarization.
  • the main surface electrodes 2 and 3 are provided on the front and back surfaces of the piezoelectric ceramic layers la and 10a, and the front surface main surface electrode 2 of the piezoelectric element 1 and the back surface main surface electrode 13 of the piezoelectric element 10 form the end surface electrode 6.
  • the back side main surface electrode 3 of the piezoelectric element 1 and the front side main surface electrode 12 of the piezoelectric element 10 are connected to each other. It is connected via the end face electrode 5.
  • FIG. 10 shows a fourth embodiment of the piezoelectric diaphragm.
  • the piezoelectric diaphragm A2 of this example has piezoelectric ceramic layers la to lc and 10a to 10c of piezoelectric elements 1, 10 force S3 layers bonded with the intermediate layer 20 therebetween.
  • Arrow P indicates the direction of polarization.
  • the main surface electrode and the internal electrode are alternately drawn out to different end portions and connected to the end surface electrodes 5 and 6. Since the number of piezoelectric ceramic layers constituting the piezoelectric elements 1 and 10 is increased, the sound pressure is higher than that of the piezoelectric diaphragm shown in FIGS. 4 and 9, and the presence of the intermediate layer 20 causes the secondary resonance sound. The pressure also increases, and an electroacoustic transducer with a wide band and high sound pressure can be obtained.
  • the structure of the housing is not limited to a frame type case and a flat plate cover that are bonded to the upper and lower surfaces of the resin film as in the embodiment.
  • the frame type case and the flat plate cover are integrated. It is also possible to adhere the concave case to the upper and lower surfaces of the resin film! / Since it is composed of a concave case that contains the resin film and a flat cover that covers the opening on the upper surface. Good.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)

Abstract

[PROBLEMS] To provide a piezoelectric electroacoustic transducer having high sound pressure over a wide range. [MEANS FOR SOLVING PRPBLEMS] The piezoelectric electroacoustic transducer is manufactured by sticking a piezoelectric diaphragm (A) smaller than a resin film (B) to the central part on one side of the resin film, and supporting the peripheral part of the resin film (B) on the case. The piezoelectric diaphragm (A) is formed by bonding upper and lower piezoelectric elements (1, 10), having an intermediate layer (20) sandwiches in between. Each piezoelectric element has a piezoelectric ceramics layer polarized in the thickness direction, and electrodes are provided on the front and rear major surfaces of each piezoelectric element. Each piezoelectric element elongates/contracts reversely in the plane direction when an AC signal is applied between these electrodes, and the piezoelectric diaphragm generates bending vibration as a whole. Sound pressure of secondary resonance is increased by the intermediate layer (20) and high sound pressure can be obtained over a wide band.

Description

明 細 書  Specification
圧電型電気音響変換器  Piezoelectric electroacoustic transducer
技術分野  Technical field
[0001] 本発明は圧電レシ一ノ^圧電サゥンダ、圧電スピーカなどの圧電型電気音響変換器 に関するものである。  [0001] The present invention relates to a piezoelectric electroacoustic transducer such as a piezoelectric resono piezoelectric sounder or a piezoelectric speaker.
背景技術  Background art
[0002] 従来、電子機器、家電製品、携帯電話機などにおいて、警報音や動作音を発生する 圧電サゥンダあるいは圧電レシーバとして圧電型電気音響変翻が広く用いられて いる。  Conventionally, piezoelectric electroacoustic transformation is widely used as a piezoelectric sounder or a piezoelectric receiver that generates an alarm sound or an operation sound in electronic devices, home appliances, mobile phones, and the like.
従来の圧電型電気音響変換器は、ケースの中に圧電振動板を収容し、圧電振動板 の周囲をケースに固定しているため、共振周波数が高くなるという問題がある。共振 周波数を低くするには圧電振動板のサイズを大きくせざるを得ず、ケースも大型化し てしまう。また、一次共振周波数と二次共振周波数との間で、音圧の落ち込みが大き く、広帯域でほぼフラットな音圧特性が得られな!/、。  The conventional piezoelectric electroacoustic transducer has a problem that the resonance frequency becomes high because the piezoelectric diaphragm is accommodated in the case and the periphery of the piezoelectric diaphragm is fixed to the case. In order to reduce the resonance frequency, the size of the piezoelectric diaphragm must be increased, and the case becomes larger. In addition, there is a large drop in sound pressure between the primary resonance frequency and the secondary resonance frequency, and an almost flat sound pressure characteristic cannot be obtained over a wide band! /.
[0003] そこで、本願出願人は、小型化と低周波化とを両立でき、変位量が大きぐかつ広帯 域でほぼフラットな音圧特性を得る圧電型電気音響変換器を提案した (特許文献 1) 。この電気音響変翻は、榭脂フィルムの片面あるいは両面に、これより小形の積層 構造の圧電素子を貼り付け、榭脂フィルムの外周部を筐体で支持したものである。圧 電素子は 2層の圧電セラミックス層を内部電極を間にして積層し、各セラミックス層の 分極方向を同方向とし、圧電素子の表裏面に設けた主面電極と内部との間に交流 信号を印加することにより、屈曲振動を発生させるものである。  [0003] Therefore, the applicant of the present application has proposed a piezoelectric electroacoustic transducer that can achieve both a reduction in size and a low frequency, a large amount of displacement, and a substantially flat sound pressure characteristic in a wide band (patent) Reference 1). In this electroacoustic transformation, a piezoelectric element having a smaller laminated structure is attached to one surface or both surfaces of a resin film, and the outer peripheral portion of the resin film is supported by a casing. A piezoelectric element consists of two piezoelectric ceramic layers stacked with internal electrodes in between, and the polarization direction of each ceramic layer is the same direction, and an AC signal is generated between the main surface electrode provided on the front and back surfaces of the piezoelectric element and the inside. Is applied to generate flexural vibration.
このように榭脂フィルムを介して圧電素子を支持することで、共振周波数の低周波化 と、広帯域でほぼフラットな音圧特性とを得ることが可能である。  Thus, by supporting the piezoelectric element through the resin film, it is possible to obtain a low resonance frequency and a substantially flat sound pressure characteristic in a wide band.
特許文献 1:特開 2004— 7400号公報  Patent Document 1: Japanese Patent Application Laid-Open No. 2004-7400
[0004] 上記の圧電型電気音響変換器では、 2層構造の圧電素子を用いているが、その音 圧を高めるには、積層数を増やす方法が考えられる。しかし、積層数を増やすだけで は、二次共振付近の音圧特性の改善効果が小さぐ広い帯域で音圧の高い電気音 響変 を得ることが難しかった。 [0004] In the above-described piezoelectric electroacoustic transducer, a piezoelectric element having a two-layer structure is used. To increase the sound pressure, a method of increasing the number of layers can be considered. However, by simply increasing the number of layers, electrical sound with a high sound pressure in a wide band where the effect of improving the sound pressure characteristics near the secondary resonance is small. It was difficult to get Hibiki.
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0005] そこで、本発明の目的は、広 、帯域で音圧の高 、圧電型電気音響変 を提供す ることにめる。  [0005] Therefore, an object of the present invention is to provide a piezoelectric electroacoustic change with a wide and high sound pressure in a band.
課題を解決するための手段  Means for solving the problem
[0006] 上記目的を達成するため、請求項 1に係る発明は、榭脂フィルムの片面中央部に当 該榭脂フィルムより小形の圧電振動板を貼り付け、上記榭脂フィルムの周辺部を筐体 に支持してなる圧電型電気音響変換器にお!ヽて、上記圧電振動板は 2つの圧電素 子を中間層を間にして積層接着したものであり、上記各圧電素子は厚み方向に分極 された単一または複数の圧電セラミックス層を有し、上記各圧電素子の表裏主面また は内部に電極を持ち、これら電極間に交流信号を印加することにより 2つの圧電素子 は平面方向に逆方向に伸縮し、上記圧電振動板は全体として屈曲振動を発生する ことを特徴とする圧電型電気音響変換器を提供する。  In order to achieve the above object, the invention according to claim 1 is characterized in that a piezoelectric diaphragm smaller in size than the resin film is attached to the center of one surface of the resin film, and the peripheral part of the resin film is enclosed in a housing. A piezoelectric electroacoustic transducer supported by the body! The piezoelectric diaphragm is formed by laminating and bonding two piezoelectric elements with an intermediate layer therebetween, and each piezoelectric element has a single or a plurality of piezoelectric ceramic layers polarized in the thickness direction. Each piezoelectric element has electrodes on the front and back main surfaces or inside, and by applying an AC signal between these electrodes, the two piezoelectric elements expand and contract in opposite directions in the plane direction, and the piezoelectric diaphragm as a whole vibrates and vibrates. A piezoelectric type electroacoustic transducer characterized by generating the above is provided.
[0007] 圧電振動板は 2つの圧電素子を中間層を間にして積層した構造であり、各圧電素子 は印加される交流信号により平面方向に逆方向に伸縮する。そのため、圧電振動板 は全体として屈曲振動を発生する。圧電振動板を榭脂フィルムに貼り付け、この榭脂 フィルムの周辺部を筐体に支持してあるため、圧電振動板の振動が阻害されず、広 帯域でほぼフラットな音圧特性を持つ電気音響変 が得られる。  The piezoelectric diaphragm has a structure in which two piezoelectric elements are stacked with an intermediate layer therebetween, and each piezoelectric element expands and contracts in the opposite direction in the plane direction by an applied AC signal. Therefore, the piezoelectric diaphragm generates bending vibration as a whole. A piezoelectric diaphragm is affixed to the resin film, and the periphery of the resin film is supported by the housing, so that the vibration of the piezoelectric diaphragm is not obstructed and has an almost flat sound pressure characteristic over a wide band. Acoustic variation is obtained.
また、圧電振動板は 2つの圧電素子を中間層を間にして積層接着したものであるか ら、高次(二次共振)のモードが大きく励振されるようになる。その結果、広い帯域で 音圧の高!ヽ電気音響変翻を得ることができる。  In addition, since the piezoelectric diaphragm is formed by laminating and bonding two piezoelectric elements with an intermediate layer in between, a high-order (secondary resonance) mode is greatly excited. As a result, high sound pressure electroacoustic transformation can be obtained in a wide band.
本発明の中間層とは、圧電素子を構成するセラミックスよりヤング率および密度が小 さいものがよぐ一般的には榭脂接着剤が用いられる。中間層の厚みは、均一な厚 みであるものがよい。  As the intermediate layer of the present invention, a resin adhesive having a smaller Young's modulus and density than the ceramic constituting the piezoelectric element is generally used. The intermediate layer should have a uniform thickness.
[0008] 請求項 2のように、中間層は均一な直径を有する球状フィラーを含有した榭脂接着剤 でもよい。  [0008] As in claim 2, the intermediate layer may be a resin adhesive containing a spherical filler having a uniform diameter.
この場合は、フィラーの直径が中間層の厚みを決定するので、均一な厚みの中間層 を得ることができる。 In this case, since the diameter of the filler determines the thickness of the intermediate layer, the intermediate layer has a uniform thickness. Can be obtained.
[0009] 請求項 3のように、中間層は紙などの繊維状シートに榭脂接着剤を含浸させたもので ちょい。  [0009] As in claim 3, the intermediate layer is made by impregnating a fibrous sheet such as paper with a resin adhesive.
この場合も、繊維状シートによって厚みがほぼ決定され、ここに含浸された榭脂接着 剤によって上下の圧電素子が接着固定される。  Also in this case, the thickness is almost determined by the fibrous sheet, and the upper and lower piezoelectric elements are bonded and fixed by the resin adhesive impregnated therein.
[0010] 圧電振動板の構造としては、請求項 4のように、 2つの圧電素子がそれぞれ単一の圧 電セラミックス層を有し、単一の圧電セラミック層の表裏面に主面電極が設けられ、表 裏の主面電極間に交流信号が印加されるものでもよいし、請求項 5のように、 2つの 圧電素子がそれぞれ複数の圧電セラミックス層を有し、複数の圧電セラミックス層の 表裏面と各層の圧電セラミックス層の間にそれぞれ主面電極と内部電極とが設けら れ、隣合う圧電セラミックス層の分極方向は逆方向であり、表裏の主面電極と内部電 極との間に交流信号が印加されるものでもよい。 [0010] As a structure of the piezoelectric diaphragm, as in claim 4, each of the two piezoelectric elements has a single piezoelectric ceramic layer, and main surface electrodes are provided on the front and back surfaces of the single piezoelectric ceramic layer. An AC signal may be applied between the front and back main surface electrodes. As in claim 5, each of the two piezoelectric elements has a plurality of piezoelectric ceramic layers, and the surface of the plurality of piezoelectric ceramic layers. The main surface electrode and the internal electrode are provided between the back surface and each piezoelectric ceramic layer, and the polarization directions of the adjacent piezoelectric ceramic layers are opposite to each other, and between the main surface electrode and the internal electrode on the front and back surfaces. An AC signal may be applied.
いずれの場合も、圧電振動板に大きな屈曲振動を発生させることができる。  In either case, a large flexural vibration can be generated in the piezoelectric diaphragm.
発明の効果  The invention's effect
[0011] 以上の説明で明らかなように、請求項 1に係る発明によれば、榭脂フィルムの片面に 屈曲振動を発生する積層型の圧電振動板を貼り付け、このフィルムの外周部を筐体 で支持するので、圧電振動板の振動が阻害されず、広帯域でほぼフラットな音圧特 性を持つ電気音響変換器が得られる。  As is apparent from the above description, according to the invention of claim 1, a laminated piezoelectric vibration plate that generates flexural vibration is attached to one surface of the resin film, and the outer peripheral portion of the film is enclosed by a housing. Since it is supported by the body, the vibration of the piezoelectric diaphragm is not hindered, and an electroacoustic transducer having a broad and substantially flat sound pressure characteristic can be obtained.
また、圧電振動板は 2つの圧電素子を中間層を間にして積層接着したものであるか ら、高次に次共振)のモードが大きく励振され、広い帯域で音圧の高い電気音響変 を得ることができる。  In addition, since the piezoelectric diaphragm is made by laminating and bonding two piezoelectric elements with an intermediate layer in between, the higher-order (resonance) mode is greatly excited, and electroacoustic change with high sound pressure is achieved over a wide band. Obtainable.
図面の簡単な説明  Brief Description of Drawings
[0012] [図 1]本発明に係る圧電型電気音響変翻の一例の斜視図である。 FIG. 1 is a perspective view of an example of piezoelectric electroacoustic transformation according to the present invention.
[図 2]図 1に示す圧電型電気音響変換器の分解斜視図である。  2 is an exploded perspective view of the piezoelectric electroacoustic transducer shown in FIG.
[図 3]図 1に示す圧電型電気音響変換器で使用される圧電振動板の分解斜視図で ある。  FIG. 3 is an exploded perspective view of a piezoelectric diaphragm used in the piezoelectric electroacoustic transducer shown in FIG. 1.
[図 4]図 1に示す圧電型電気音響変換器で使用される圧電振動板の概略断面図で ある。 [図 5]中間層を有する圧電振動板と中間層を有しない圧電振動板との音圧特性図で ある。 4 is a schematic cross-sectional view of a piezoelectric diaphragm used in the piezoelectric electroacoustic transducer shown in FIG. FIG. 5 is a sound pressure characteristic diagram of a piezoelectric diaphragm having an intermediate layer and a piezoelectric diaphragm having no intermediate layer.
[図 6]有限要素法シミュレーションで求めた中間層の厚みと音圧との関係を示す図で ある。  [Fig. 6] A diagram showing the relationship between the thickness of the intermediate layer and the sound pressure obtained by the finite element method simulation.
[図 7]有限要素法シミュレーションで求めた中間層の厚みと共振周波数 fr、電気機械 結合係数 Kとの関係を示す図である。  FIG. 7 is a diagram showing the relationship between the intermediate layer thickness, resonance frequency fr, and electromechanical coupling coefficient K obtained by finite element method simulation.
[図 8]圧電振動板の第 2実施例の部分断面図である。  FIG. 8 is a partial cross-sectional view of a second embodiment of a piezoelectric diaphragm.
[図 9]榭脂フィルムを含む圧電振動板の第 3実施例の断面図である。  FIG. 9 is a cross-sectional view of a third embodiment of a piezoelectric diaphragm including a resin film.
[図 10]榭脂フィルムを含む圧電振動板の第 4実施例の断面図である。  FIG. 10 is a cross-sectional view of a fourth embodiment of a piezoelectric diaphragm including a resin film.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0013] 以下に、本発明の好ましい実施の形態を、実施例を参照して説明する。 Hereinafter, preferred embodiments of the present invention will be described with reference to examples.
実施例 1  Example 1
[0014] 図 1〜図 4は本発明にかかる圧電型電気音響変翻の第 1実施例である圧電スピー 力の例を示す。  FIGS. 1 to 4 show examples of the piezoelectric force that is the first embodiment of the piezoelectric electroacoustic transformation according to the present invention.
この実施例は、圧電振動板 Aと、圧電振動板 Aを貼り付けた榭脂フィルム Bと、榭脂フ イルム Bを収納した筐体とを備えている。ここでは、筐体は、多数の放音穴 30aを持つ 下カバー 30と、枠型の下ケース 31と、コ字形の上ケース 32と、下カバー 30と同様に 多数の放音穴 33aを持つ上カバー 33とで構成されて 、る。  This embodiment includes a piezoelectric diaphragm A, a resin film B on which the piezoelectric diaphragm A is pasted, and a housing that stores the resin film B. Here, the housing has a lower cover 30 having a large number of sound emission holes 30a, a frame-shaped lower case 31, a U-shaped upper case 32, and a number of sound emission holes 33a, similar to the lower cover 30. It consists of an upper cover 33.
[0015] 圧電振動板 Aは、図 3,図 4に示すように、 2つの圧電素子 1, 10を中間層 20を間に して積層接着したものであり、全体として長方形状に形成されている。上側の圧電素 子 1は、 2層の圧電セラミックス層 la, lbを積層したものであり、圧電素子 1の表裏主 面には主面電極 2, 3が形成され、セラミックス層 la, lbの間には内部電極 4が形成 されている。 2つのセラミックス層 la, lbは、矢印 Pで示すように厚み方向において逆 方向に分極されている。下側の圧電素子 10も上側の圧電素子 1と同様な構造を有 するが、分極方向 Pが逆方向となっている。すなわち、 2層の圧電セラミックス層 10a, 10bを積層し、表裏主面には主面電極 12, 13が形成され、セラミックス層 10a, 10b の間には内部電極 14が形成されている。 2つのセラミックス層 10a, 10は、矢印 Pで 示すように厚み方向にぉ 、て逆方向に分極されて!、る。 ここでは、セラミックス層 la, lb, 10a, 10bとして、外形寸法が 24 X 12mm、 1層の 厚みが 15 mの長方形状の PZT系セラミックスを使用した。 [0015] As shown in Figs. 3 and 4, the piezoelectric diaphragm A is formed by laminating and bonding two piezoelectric elements 1 and 10 with an intermediate layer 20 therebetween, and is formed in a rectangular shape as a whole. Yes. The upper piezoelectric element 1 is formed by laminating two piezoelectric ceramic layers la and lb. Main surface electrodes 2 and 3 are formed on the front and back main surfaces of the piezoelectric element 1, and between the ceramic layers la and lb. An internal electrode 4 is formed on the substrate. The two ceramic layers la and lb are polarized in opposite directions in the thickness direction as indicated by an arrow P. The lower piezoelectric element 10 has the same structure as the upper piezoelectric element 1, but the polarization direction P is opposite. That is, two piezoelectric ceramic layers 10a and 10b are laminated, main surface electrodes 12 and 13 are formed on the front and back main surfaces, and an internal electrode 14 is formed between the ceramic layers 10a and 10b. The two ceramic layers 10a and 10 are polarized in the opposite direction in the thickness direction as indicated by the arrow P !. Here, as the ceramic layers la, lb, 10a and 10b, rectangular PZT ceramics having an outer dimension of 24 × 12 mm and a thickness of one layer of 15 m were used.
[0016] この実施例の中間層 20は、和紙などの繊維状シートにエポキシ榭脂などを含浸させ たものを使用している。その厚みは約 40 mである。中間層 20としては、ヤング率お よび密度がセラミックスより小さいものがよぐ具体的にはヤング率が 1 X 102〜1 X 1 04 MPa、密度が 0. 8〜2. Okg/m3のものがよい。なお、本実施例で使用した圧電 セラミックスはヤング率が 6. 3 X 104 MPa、密度が 7. 8 X 103 kg/m3であった。 The intermediate layer 20 in this example uses a fibrous sheet such as Japanese paper impregnated with epoxy resin. Its thickness is about 40 m. The intermediate layer 20 should have a Young's modulus and density smaller than ceramics. Specifically, the Young's modulus is 1 X 10 2 to 1 X 10 4 MPa, and the density is 0.8 to 2. Okg / m 3 Good thing. The piezoelectric ceramic used in this example had a Young's modulus of 6.3 × 10 4 MPa and a density of 7.8 × 10 3 kg / m 3 .
[0017] 圧電素子 1の表側の主面電極 2と裏側の主面電極 3、および圧電素子 10の表側の 主面電極 12と裏側の主面電極 13は、圧電素子 1, 10の一方の端面および中間層 2 0の一方の端面に形成された端面電極 5を介して相互に接続されている。また、圧電 素子 1の内部電極 4および圧電素子 10の内部電極 14は、圧電素子 1, 10の他方の 端面および中間層 20の他方の端面に形成された端面電極 6に接続されている。上 側の圧電素子 1の主面電極 2の一部は切除されており、この切除部に端面電極 6と 接続された補助電極 7が形成されている。なお、図 3では端面電極 5, 6を圧電素子 1 , 10と中間層 20とで分離して記載したが、実際には圧電素子 1, 10と中間層 20とを 積層接着した後で連続的に形成される。  [0017] The front-side main surface electrode 2 and the back-side main surface electrode 3 of the piezoelectric element 1, and the front-side main surface electrode 12 and the back-side main surface electrode 13 of the piezoelectric element 10 are one end face of the piezoelectric elements 1 and 10. And they are connected to each other through an end face electrode 5 formed on one end face of the intermediate layer 20. The internal electrode 4 of the piezoelectric element 1 and the internal electrode 14 of the piezoelectric element 10 are connected to the other end face of the piezoelectric elements 1 and 10 and the end face electrode 6 formed on the other end face of the intermediate layer 20. A part of the main surface electrode 2 of the upper piezoelectric element 1 is cut off, and an auxiliary electrode 7 connected to the end face electrode 6 is formed in the cut portion. In FIG. 3, the end face electrodes 5 and 6 are shown separated by the piezoelectric elements 1 and 10 and the intermediate layer 20, but in actuality, the piezoelectric elements 1 and 10 and the intermediate layer 20 are laminated and bonded continuously. Formed.
端面電極 5, 6間に交流信号を印加すれば、一方の圧電素子が平面方向に拡張し、 他方の圧電素子が平面方向に収縮する。つまり、両方の圧電素子 1, 10が平面方向 に逆方向に伸縮するので、圧電振動板 Aを全体として屈曲振動させることができる。  When an AC signal is applied between the end face electrodes 5 and 6, one piezoelectric element expands in the plane direction, and the other piezoelectric element contracts in the plane direction. That is, since both the piezoelectric elements 1 and 10 expand and contract in the direction opposite to the plane direction, the piezoelectric diaphragm A can be flexibly vibrated as a whole.
[0018] 圧電振動板 Aの表裏面は、図 3に示すように榭脂層 8, 9で覆われている。この榭脂 層 8, 9は、落下衝撃による圧電素子 1, 10の割れを防止する保護層としての役割を 有するものであり、必要に応じて設けられる。表側の榭脂層 8の 1つの短辺の両コー ナ部には、主面電極 2の一部が露出する切欠部 8aと、補助電極 7が露出する切欠部 8bとが形成されている。また、裏側の榭脂層 9にも同様な切欠部 9a, 9bが形成され ているが、これら切欠部は方向性をなくすために設けたものであり、省略可能である。  [0018] The front and back surfaces of the piezoelectric diaphragm A are covered with resin layers 8 and 9, as shown in FIG. The resin layers 8 and 9 have a role as a protective layer for preventing the piezoelectric elements 1 and 10 from cracking due to a drop impact, and are provided as necessary. At both corners of one short side of the front-side resin layer 8, a notch 8a where a part of the main surface electrode 2 is exposed and a notch 8b where the auxiliary electrode 7 is exposed are formed. In addition, similar notches 9a and 9b are formed in the backside resin layer 9, but these notches are provided to eliminate directionality and can be omitted.
[0019] 圧電振動板 Aは、これより大形な長方形の榭脂フィルム Bの表面の略中央部に貼り 付けられている。粘着剤としては、例えばシリコーン系、アクリル系などの粘着剤が使 用される。但し、粘着に限らず、接着または熱溶着でもよい。 榭脂フィルム Bは、圧電振動板 Aより薄肉で、かつヤング率が l〜200MPaの榭脂材 料で形成されている。具体的には、エチレンプロピレンゴム、スチレンブタジエンゴム などの榭脂材料が使用される。 [0019] The piezoelectric diaphragm A is affixed to a substantially central portion of the surface of the rectangular resin film B having a larger size. As the pressure-sensitive adhesive, for example, a silicone-based or acrylic-based pressure-sensitive adhesive is used. However, it is not limited to adhesion, and adhesion or heat welding may be used. The resin film B is thinner than the piezoelectric diaphragm A and is formed of a resin material having a Young's modulus of 1 to 200 MPa. Specifically, a resin material such as ethylene propylene rubber or styrene butadiene rubber is used.
ここでは、外形寸法が 31. 2 X 15. 5mm、厚みが 70 mのエチレンプロピレンゴムを 使用した。  Here, ethylene propylene rubber having an outer dimension of 31.2 X 15.5 mm and a thickness of 70 m was used.
[0020] 榭脂フィルム Bの周辺部の上下面は、上下のケース 31, 32によって接着支持される 。接着に代えて粘着や熱溶着を用いてもよい。ケース 31, 32は圧電振動板 Aの振動 空間を確保しうる厚み (例えば 0. 25〜0. 35mm)の金属板あるいは榭脂板で形成 されている。榭脂フィルム Bの上面には、圧電振動板 A以外に端子部 34が貼り付けら れ、この端子部 34は上カバー 33の側部に露出している。端子部 34はガラスェポキ シ基板のような絶縁基板の上に、外部と圧電振動板 Aとの接続のための端子電極 35 , 36が設けられ、端子電極 35, 36と圧電振動板 Aの榭脂層 8から露出した電極 2, 7 と力 リード部 37, 38を介して接続されている。リード部 37, 38は薄膜電極であって もよいし、厚膜電極であってもよい。端子部 34を介して圧電振動板 Aに電気信号が 入力される。  [0020] The upper and lower surfaces of the peripheral portion of the resin film B are bonded and supported by upper and lower cases 31, 32. Instead of adhesion, adhesion or heat welding may be used. The cases 31 and 32 are formed of a metal plate or a resin plate having a thickness (for example, 0.25 to 0.35 mm) that can secure the vibration space of the piezoelectric diaphragm A. In addition to the piezoelectric diaphragm A, a terminal portion 34 is attached to the upper surface of the resin film B, and the terminal portion 34 is exposed on the side portion of the upper cover 33. The terminal portion 34 is provided with terminal electrodes 35 and 36 for connecting the outside and the piezoelectric diaphragm A on an insulating substrate such as a glass epoxy substrate. The electrodes 2 and 7 exposed from the layer 8 are connected to each other through force leads 37 and 38. The lead portions 37 and 38 may be thin film electrodes or thick film electrodes. An electric signal is input to the piezoelectric diaphragm A via the terminal portion 34.
この実施例では、榭脂フィルム Bの一端側に端子部 34を設けたため、上ケース 32を 一端側が開口したコ字形としたが、榭脂フィルム Bの両端側に端子部 34を設けた場 合には、上ケース 32は平行な一対の壁で構成することもできる。  In this embodiment, since the terminal portion 34 is provided on one end side of the resin film B, the upper case 32 is formed in a U shape with one end side opened. However, when the terminal portion 34 is provided on both end sides of the resin film B, In addition, the upper case 32 can be constituted by a pair of parallel walls.
[0021] この実施例は、圧電振動板 Aを貼り付けた榭脂フィルム Bを、枠状のケース 31, 32で 上下から挟んで接着支持し、これらケース 31, 32の開口部を薄板状カバー 30, 33 で閉じるように構成してあるので、全体として薄型(lmm以下)の電気音響変 を 構成できる。しカゝも、電気音響変^^の一端側に端子部 34が設けられているので、 外部との接続を一方向から行うことができる。  [0021] In this embodiment, a resin film B with a piezoelectric diaphragm A attached thereto is bonded and supported by frame-like cases 31, 32 from above and below, and the openings of these cases 31, 32 are covered with a thin plate. Since it is configured to close at 30, 33, it is possible to configure a thin (less than lmm) electroacoustic transformation as a whole. Since the terminal portion 34 is provided on one end side of the electroacoustic transducer, the external connection can be made from one direction.
[0022] 上記説明では、圧電型電気音響変翻単体の構造について説明したが、実際の製 造に際しては、広 、面積の榭脂フィルム Bの上に複数の圧電振動板 Aおよび端子部 34を接着し、この榭脂フィルム Bの上下面に集合基板状態のケース 31, 32を接着し 、その上下に集合基板状態のカバー 30, 33を接着した後、単体の圧電型電気音響 変翻に分離カットすることで、量産することもできる。 [0023] 図 5は、中間層を有する圧電振動板を用いた圧電型電気音響変換器の音圧特性と、 中間層を有しな!/ヽ圧電振動板を用いた圧電型電気音響変換器の音圧特性とを対比 して示したものである。ここで使用した圧電振動板は、図 4と同様に片側 2層の圧電セ ラミックス層を有するものであり、中間層は厚み 40 mで紙に榭脂を含浸させたもの である。 In the above description, the structure of the piezoelectric electroacoustic transformation unit has been described. However, in actual production, a plurality of piezoelectric diaphragms A and terminal portions 34 are formed on a wide-area resin film B. Glue the adhesive film case B to the upper and lower surfaces of the resin film B, and then cover the upper and lower sides of the aggregate board state cover 30, 33, and then separate it into a single piezoelectric electroacoustic transformation. It can also be mass-produced by cutting. FIG. 5 shows the sound pressure characteristics of a piezoelectric electroacoustic transducer using a piezoelectric diaphragm having an intermediate layer, and a piezoelectric electroacoustic transducer using a piezoelectric diaphragm without an intermediate layer! This is shown in contrast with the sound pressure characteristics of. The piezoelectric diaphragm used here has two piezoelectric ceramic layers on one side in the same way as in FIG. 4, and the intermediate layer is 40 m thick and paper is impregnated with grease.
図 5力ら明ら力なように、 lOOOHz付近の一次共振だけでなく、 3000〜4000Hz付 近の二次共振においても、音圧が上昇していることがわかる。特に、図 5に Xで示す 二次共振における音圧上昇が顕著である。  As can be seen from Fig. 5, the sound pressure rises not only at the primary resonance near lOOOHz, but also at the secondary resonance around 3000-4000Hz. In particular, the increase in sound pressure at the secondary resonance indicated by X in Fig. 5 is remarkable.
[0024] 表 1は、中間層を有する圧電振動板と中間層を有しない圧電振動板との寸法および 音圧特性を比較した表である。ここで使用した圧電振動板も、図 5と同様である。 表 1から明らかなように、中間層を有する圧電振動板では、中間層を有しない圧電振 動板に比べて、平均音圧が 4. 9dB上昇していることがわかる。  [0024] Table 1 is a table comparing dimensions and sound pressure characteristics of a piezoelectric diaphragm having an intermediate layer and a piezoelectric diaphragm having no intermediate layer. The piezoelectric diaphragm used here is the same as in FIG. As can be seen from Table 1, the average sound pressure is increased by 4.9 dB in the piezoelectric diaphragm with the intermediate layer compared to the piezoelectric diaphragm without the intermediate layer.
[0025] [表 1]  [0025] [Table 1]
Figure imgf000009_0001
Figure imgf000009_0001
[0026] 図 6は中間層の厚みと音圧との関係を有限要素法シミュレーションで求めたものであ り、図 7は中間層の厚みと共振周波数 fr、電気機械結合係数 Kとの関係を有限要素 法シミュレーションで求めたものである。 [0026] Fig. 6 shows the relationship between the thickness of the intermediate layer and the sound pressure by finite element simulation. Fig. 7 shows the relationship between the thickness of the intermediate layer, the resonance frequency fr, and the electromechanical coupling coefficient K. It was obtained by finite element method simulation.
但し、ここで使用した榭脂フィルムは φ 20mmの円形であり、圧電振動板は直径 φ 1 8mm、厚み 15 mの円形セラミックス層を片側 2層に積層したものであり、中間層の ヤング率 lOOMPa,密度 1. Okg/m3とした。 However, the resin film used here is a circle with a diameter of 20 mm, and the piezoelectric diaphragm is formed by laminating a circular ceramic layer with a diameter of 18 mm and a thickness of 15 m on two sides. The Young's modulus of the intermediate layer lOOMPa The density was 1. Okg / m 3 .
図 6力ら明ら力なように、中 層の厚み力 SOmm, 0. 02mm, O. 04mm, O. 06mm, 0. 08m, 0. 1mmの 6種類の圧電振動板の中で、 Omm (中間層なし)に比べて中間 層を有するものの方が一次共振および二次共振ともに音圧が高くなつていることがわ かる。 Fig. 6 Thickness of the middle layer SOmm, 0.02mm, O.04mm, O.06mm, 0.08m, 0.1mm It can be seen that the sound pressure is higher in the primary resonance and the secondary resonance in the case of having the intermediate layer than in the case of having no intermediate layer. Karu.
図 7に示すように、中間層の厚みが厚くなるに従い共振周波数は上昇するが、一次 共振周波数に比べて二次共振周波数の上昇率の方が大き 、。  As shown in Fig. 7, the resonance frequency increases as the thickness of the intermediate layer increases, but the rate of increase of the secondary resonance frequency is greater than that of the primary resonance frequency.
また、電気機械結合係数 Kについてみると、中間層の厚みが厚くなるに従い一次共 振の Kは低下しているのに対し、二次共振の Kは上昇していることがわかる。中間層 の厚みが 0. 07mm以下では一次共振の Kが二次共振の Kより大きいが、 0. 07mm を越えると二次共振の Kがー次共振の Kより大きくなつている。  In addition, regarding the electromechanical coupling coefficient K, it can be seen that as the thickness of the intermediate layer increases, the K of the primary resonance decreases while the K of the secondary resonance increases. When the thickness of the intermediate layer is 0.07 mm or less, the primary resonance K is larger than the secondary resonance K, but when it exceeds 0.07 mm, the secondary resonance K is larger than the K of the secondary resonance.
一般に、電気音響変換器では一次共振の Kが二次共振の Kより大きい領域で使用 することが多ぐしかも共振周波数と電気機械結合係数との積が音圧に影響するので In general, electroacoustic transducers are often used in the region where K of primary resonance is larger than K of secondary resonance, and the product of resonance frequency and electromechanical coupling coefficient affects sound pressure.
、広い帯域でほぼフラットでかつ高い音圧を得るには、中間層の厚みが 0. 02〜0. 0In order to obtain a nearly flat and high sound pressure in a wide band, the thickness of the intermediate layer is 0.02 to 0.0.
6mmの範囲、さらに好ましくは 0. 03〜0. 05mmの範囲で使用するのがよい。 It should be used in the range of 6 mm, more preferably in the range of 0.03 to 0.05 mm.
実施例 2  Example 2
[0027] 図 8は圧電振動板の第 2実施例の断面構造を示す。  FIG. 8 shows a cross-sectional structure of a second embodiment of the piezoelectric diaphragm.
この実施例では、中間層 21として、エポキシ系などの榭脂接着剤 22の中に直径 30 μ mの球状フィラー 23を分散して混入させたものを使用している。フィラー 23として は、絶縁材料であってもよ 、し金属材料であってもよ 、。  In this embodiment, an intermediate layer 21 in which a spherical filler 23 having a diameter of 30 μm is dispersed and mixed in a resin adhesive 22 such as an epoxy resin is used. The filler 23 may be an insulating material or a metal material.
この場合は、フィラー 23が上下に重ならないので、中間層 21を間にして上下の圧電 素子 1, 10を圧着すると、中間層 21の厚みがフィラー 23の直径によって制限され、 均一厚み (約 40 μ m)の中間層 21を得ることができる。  In this case, since the filler 23 does not overlap vertically, when the upper and lower piezoelectric elements 1 and 10 are pressure-bonded with the intermediate layer 21 in between, the thickness of the intermediate layer 21 is limited by the diameter of the filler 23, and the uniform thickness (about 40 μm) of intermediate layer 21 can be obtained.
実施例 3  Example 3
[0028] 図 9は圧電振動板の第 3実施例を示す。  FIG. 9 shows a third embodiment of the piezoelectric diaphragm.
第 1実施例の圧電振動板 Aでは、中間層 20を間にして接着される圧電素子 1, 10が 2層の圧電セラミックス層を有するものについて説明したが、第 3実施例の圧電振動 板 A1では、中間層 20を間にして接着される圧電素子 1, 10が 1層の圧電セラミックス 層 la, 10aを有している。矢印 Pは分極方向を示す。  In the piezoelectric diaphragm A of the first embodiment, the piezoelectric elements 1 and 10 bonded with the intermediate layer 20 in between have been described as having two piezoelectric ceramic layers, but the piezoelectric diaphragm A1 of the third embodiment In this case, the piezoelectric elements 1 and 10 bonded with the intermediate layer 20 therebetween have one piezoelectric ceramic layer la and 10a. Arrow P indicates the direction of polarization.
この実施例では、圧電セラミックス層 la, 10aの表裏面に主面電極 2, 3が設けられ、 圧電素子 1の表側主面電極 2と圧電素子 10の裏側主面電極 13とが端面電極 6を介 して接続され、圧電素子 1の裏側主面電極 3と圧電素子 10の表側主面電極 12とが 端面電極 5を介して接続される。 In this embodiment, the main surface electrodes 2 and 3 are provided on the front and back surfaces of the piezoelectric ceramic layers la and 10a, and the front surface main surface electrode 2 of the piezoelectric element 1 and the back surface main surface electrode 13 of the piezoelectric element 10 form the end surface electrode 6. The back side main surface electrode 3 of the piezoelectric element 1 and the front side main surface electrode 12 of the piezoelectric element 10 are connected to each other. It is connected via the end face electrode 5.
この場合も、端面電極 5, 6間に交流信号を印加すると、一方の圧電素子が平面方向 に拡張したとき、他方の圧電素子が平面方向に収縮する。つまり、両方の圧電素子 1 , 10が平面方向に逆方向に伸縮するので、圧電振動板 A1を全体として屈曲振動さ せることができる。  Also in this case, when an AC signal is applied between the end face electrodes 5 and 6, when one piezoelectric element expands in the plane direction, the other piezoelectric element contracts in the plane direction. That is, since both the piezoelectric elements 1 and 10 expand and contract in the direction opposite to the plane direction, the piezoelectric diaphragm A1 can be flexibly vibrated as a whole.
実施例 4  Example 4
[0029] 図 10は圧電振動板の第 4実施例を示す。  FIG. 10 shows a fourth embodiment of the piezoelectric diaphragm.
この実施例の圧電振動板 A2では、中間層 20を間にして接着される圧電素子 1, 10 力 S3層の圧電セラミックス層 la〜lc, 10a〜10cを有するものである。矢印 Pは分極方 向を示す。  The piezoelectric diaphragm A2 of this example has piezoelectric ceramic layers la to lc and 10a to 10c of piezoelectric elements 1, 10 force S3 layers bonded with the intermediate layer 20 therebetween. Arrow P indicates the direction of polarization.
この実施例では、主面電極と内部電極とが交互に異なる端部に引き出され、端面電 極 5, 6に接続されている。圧電素子 1, 10を構成する圧電セラミックス層の積層数が 多くなるので、図 4,図 9に示す圧電振動板に比べて音圧が高くなるとともに、中間層 20の存在によって二次共振の音圧も高くなり、広帯域で高い音圧の電気音響変換 器を得ることができる。  In this embodiment, the main surface electrode and the internal electrode are alternately drawn out to different end portions and connected to the end surface electrodes 5 and 6. Since the number of piezoelectric ceramic layers constituting the piezoelectric elements 1 and 10 is increased, the sound pressure is higher than that of the piezoelectric diaphragm shown in FIGS. 4 and 9, and the presence of the intermediate layer 20 causes the secondary resonance sound. The pressure also increases, and an electroacoustic transducer with a wide band and high sound pressure can be obtained.
[0030] 本発明は上記実施例に限定されるものではなぐ本発明の趣旨を逸脱しない範囲で 変更可能である。  [0030] The present invention is not limited to the above-described embodiments, but can be modified without departing from the spirit of the present invention.
筐体の構造は、実施例のように榭脂フィルムの上下面に接着される枠型ケースと平 板状カバーとで構成されるものに限らず、例えば枠型ケースと平板状カバーが一体 になった凹型ケースを榭脂フィルムの上下面に接着する構成でもよ!/ヽし、榭脂フィル ムを収容する凹型のケースとその上面開口部を覆う平板状カバーとで構成されたも のでもよい。  The structure of the housing is not limited to a frame type case and a flat plate cover that are bonded to the upper and lower surfaces of the resin film as in the embodiment. For example, the frame type case and the flat plate cover are integrated. It is also possible to adhere the concave case to the upper and lower surfaces of the resin film! / Since it is composed of a concave case that contains the resin film and a flat cover that covers the opening on the upper surface. Good.

Claims

請求の範囲 The scope of the claims
[1] 榭脂フィルムの片面中央部に当該榭脂フィルムより小形の圧電振動板を貼り付け、 上記榭脂フィルムの周辺部を筐体に支持してなる圧電型電気音響変換器において、 上記圧電振動板は 2つの圧電素子を中間層を間にして積層接着したものであり、 上記各圧電素子は厚み方向に分極された単一または複数の圧電セラミックス層を有 し、  [1] A piezoelectric electroacoustic transducer in which a piezoelectric diaphragm smaller than the resin film is attached to the center of one surface of the resin film, and the periphery of the resin film is supported by a housing. The diaphragm is made by laminating and bonding two piezoelectric elements with an intermediate layer in between, and each of the piezoelectric elements has a single or a plurality of piezoelectric ceramic layers polarized in the thickness direction.
上記各圧電素子の表裏主面または内部に電極を持ち、これら電極間に交流信号を 印加することにより 2つの圧電素子は平面方向に逆方向に伸縮し、上記圧電振動板 は全体として屈曲振動を発生することを特徴とする圧電型電気音響変換器。  Each piezoelectric element has electrodes on the front and back main surfaces or inside, and by applying an AC signal between these electrodes, the two piezoelectric elements expand and contract in opposite directions in the plane direction, and the piezoelectric diaphragm as a whole undergoes bending vibration. A piezoelectric electroacoustic transducer characterized by being generated.
[2] 上記中間層は、均一な直径を有する球状フィラーを含有した榭脂接着剤であることを 特徴とする請求項 1に記載の圧電型電気音響変換器。  [2] The piezoelectric electroacoustic transducer according to [1], wherein the intermediate layer is a resin adhesive containing a spherical filler having a uniform diameter.
[3] 上記中間層は、紙などの繊維状シートに榭脂接着剤を含浸させたものであることを特 徴とする請求項 1に記載の圧電型電気音響変換器。  3. The piezoelectric electroacoustic transducer according to claim 1, wherein the intermediate layer is a fibrous sheet such as paper impregnated with a resin adhesive.
[4] 上記 2つの圧電素子は、それぞれ単一の圧電セラミックス層を有し、  [4] Each of the two piezoelectric elements has a single piezoelectric ceramic layer,
上記圧電セラミック層の表裏面に主面電極が設けられ、  Main surface electrodes are provided on the front and back surfaces of the piezoelectric ceramic layer,
表裏の主面電極間に交流信号が印加されることを特徴とする請求項 1ないし 3のいず れかに記載の圧電型電気音響変換器。  4. The piezoelectric electroacoustic transducer according to claim 1, wherein an AC signal is applied between the front and back main surface electrodes.
[5] 上記 2つの圧電素子は、それぞれ複数の圧電セラミックス層を有し、 [5] Each of the two piezoelectric elements has a plurality of piezoelectric ceramic layers,
上記複数の圧電セラミックス層の表裏面と各層の圧電セラミックス層の間にそれぞれ 主面電極と内部電極とが設けられ、  A main surface electrode and an internal electrode are provided between the front and back surfaces of the plurality of piezoelectric ceramic layers and the piezoelectric ceramic layers of each layer,
隣合う圧電セラミックス層の分極方向は逆方向であり、  The direction of polarization of adjacent piezoelectric ceramic layers is opposite,
表裏の主面電極と内部電極との間に交流信号が印加されることを特徴とする請求項 1な!、し 3の 、ずれかに記載の圧電型電気音響変^^。  2. An AC signal is applied between the front and back main surface electrodes and the internal electrode. The piezoelectric electro-acoustic deformation described in 3 or 3 is ^^.
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