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WO2006008747A3 - Inducteur sur puce - Google Patents

Inducteur sur puce Download PDF

Info

Publication number
WO2006008747A3
WO2006008747A3 PCT/IL2005/000781 IL2005000781W WO2006008747A3 WO 2006008747 A3 WO2006008747 A3 WO 2006008747A3 IL 2005000781 W IL2005000781 W IL 2005000781W WO 2006008747 A3 WO2006008747 A3 WO 2006008747A3
Authority
WO
WIPO (PCT)
Prior art keywords
inductor
values
nano
well
permeability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IL2005/000781
Other languages
English (en)
Other versions
WO2006008747A2 (fr
Inventor
Amikam Nemirovsky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BlueBird Optical MEMS Ltd
Original Assignee
BlueBird Optical MEMS Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BlueBird Optical MEMS Ltd filed Critical BlueBird Optical MEMS Ltd
Publication of WO2006008747A2 publication Critical patent/WO2006008747A2/fr
Publication of WO2006008747A3 publication Critical patent/WO2006008747A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type
    • H01F17/0006—Printed inductances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
    • H01F10/13—Amorphous metallic alloys, e.g. glassy metals
    • H01F10/138—Amorphous metallic alloys, e.g. glassy metals containing nanocrystallites, e.g. obtained by annealing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041—Printed circuit coils
    • H01F41/046—Printed circuit coils structurally combined with ferromagnetic material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5227—Inductive arrangements or effects of, or between, wiring layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type
    • H01F17/04—Fixed inductances of the signal type with magnetic core
    • H01F17/06—Fixed inductances of the signal type with magnetic core with core substantially closed in itself, e.g. toroid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type
    • H01F17/0006—Printed inductances
    • H01F2017/008—Electric or magnetic shielding of printed inductances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

La présente invention se rapporte à un inducteur et à un procédé de fabrication associé permettant d'obtenir des inducteurs sur puce intégrés de très petite taille, présentant des valeurs de facteur de qualité (Q) élevées, ainsi qu'une géométrie simple et à un niveau. Le procédé selon l'invention consiste à revêtir complètement une bande conductrice d'une matière ferromagnétique douce à forte résistivité électrique et dotée d'une perméabilité élevée. Une telle matière peut être une matière nanocristalline contenant Fe-Co-X-N, où X peut représenter, par exemple, Ta, Cu, Ta-Si, Cu-Si ou Si. La dimension linéaire de l'inducteur, la perméabilité de son revêtement, sa résistivité électrique et son épaisseur permettent d'obtenir des valeurs Q largement supérieures à 50 à des fréquences dépassant 1 gigahertz, et des valeurs d'inductance de plusieurs dizaines de nanohenry par millimètre sur la longueur de l'inducteur.
PCT/IL2005/000781 2004-07-22 2005-07-21 Inducteur sur puce Ceased WO2006008747A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US59059104P 2004-07-22 2004-07-22
US60/590,591 2004-07-22

Publications (2)

Publication Number Publication Date
WO2006008747A2 WO2006008747A2 (fr) 2006-01-26
WO2006008747A3 true WO2006008747A3 (fr) 2006-03-16

Family

ID=35785609

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2005/000781 Ceased WO2006008747A2 (fr) 2004-07-22 2005-07-21 Inducteur sur puce

Country Status (1)

Country Link
WO (1) WO2006008747A2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2937501B1 (fr) 2008-10-28 2010-12-24 Pac Vending Dispositif de conservation, de cuisson et de distribution automatique de produits a base de pate, notamment de pains
US9934176B2 (en) * 2014-12-24 2018-04-03 Intel Corporation Transceiver multiplexing over USB type-C interconnects
KR20220110816A (ko) * 2019-12-06 2022-08-09 램 리써치 코포레이션 통합된 rf 필터들을 가진 기판 지지부들

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227659A (en) * 1990-06-08 1993-07-13 Trustees Of Boston University Integrated circuit inductor
US20020005565A1 (en) * 1999-02-03 2002-01-17 Micron Technology, Inc. Inductor with magnetic material layers
US20020177013A1 (en) * 2000-09-11 2002-11-28 Masayoshi Hiramoto Magnetoresistive element, method for manufacturing the same, and method for forming a compound magnetic thin film
US20040103522A1 (en) * 1999-02-26 2004-06-03 Micron Technology, Inc. Open pattern inductor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227659A (en) * 1990-06-08 1993-07-13 Trustees Of Boston University Integrated circuit inductor
US20020005565A1 (en) * 1999-02-03 2002-01-17 Micron Technology, Inc. Inductor with magnetic material layers
US20040103522A1 (en) * 1999-02-26 2004-06-03 Micron Technology, Inc. Open pattern inductor
US20020177013A1 (en) * 2000-09-11 2002-11-28 Masayoshi Hiramoto Magnetoresistive element, method for manufacturing the same, and method for forming a compound magnetic thin film

Also Published As

Publication number Publication date
WO2006008747A2 (fr) 2006-01-26

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