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WO2006005660A1 - Dispositif de determination et/ou de verification d'une grandeur de processus d'un fluide - Google Patents

Dispositif de determination et/ou de verification d'une grandeur de processus d'un fluide Download PDF

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Publication number
WO2006005660A1
WO2006005660A1 PCT/EP2005/052725 EP2005052725W WO2006005660A1 WO 2006005660 A1 WO2006005660 A1 WO 2006005660A1 EP 2005052725 W EP2005052725 W EP 2005052725W WO 2006005660 A1 WO2006005660 A1 WO 2006005660A1
Authority
WO
WIPO (PCT)
Prior art keywords
membrane
unit
rod
receiving unit
mechanically oscillatable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2005/052725
Other languages
German (de)
English (en)
Inventor
Sergej Lopatin
Jutta Kuhny
Alexander Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of WO2006005660A1 publication Critical patent/WO2006005660A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G01F23/28—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
    • G01F23/296—Acoustic waves
    • G01F23/2966—Acoustic waves making use of acoustical resonance or standing waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G01F23/28—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
    • G01F23/296—Acoustic waves
    • G01F23/2968—Transducers specially adapted for acoustic level indicators

Definitions

  • the invention relates to a device for determining and / or
  • the mechanically oscillatable unit is mechanically coupled at least with the membrane of the housing, with at least one excitation / Receiving unit, which stimulates the mechanically oscillating unit to generate mechanical vibrations and which receives the mechanical vibrations of the mechanically oscillating unit, with at least one control unit which controls the mechanical vibrations of the mechanically oscillatable unit and the process variable of the mechanically oscillatable unit Medium determined and / or monitored.
  • the process variable is, for example, the fill level, the density or the viscosity of a medium, for example a liquid in a tank.
  • the process variable is the fill level of a bulk material.
  • the level can be monitored, for example, by the fact that with liquids the frequency of the oscillations depends on whether the medium is in contact with the sensor or not. Thus, it is possible to conclude from a frequency change that the level has changed.
  • the viscosity or the density of the medium can be determined.
  • Such measuring devices are described in more detail in the patent documents and applications of the applicant: DE 33 36991 C2, EP 1 134038 A1 and WO 92/21945.
  • the mechanically oscillatable units shown there are so-called vibration forks.
  • vibration forks are attached to a membrane, which complete a cup-shaped housing.
  • the excitation / reception unit On the inside of the membrane is the excitation / reception unit, which are formed of different arrangements of stacks of piezoelectric elements.
  • the piezoelectric elements use is made of the fact that an electrical alternating voltage leads to a mechanical oscillation and conversely that a mechanical oscillation is transmitted to an alternating electrical voltage.
  • the document DE 33 36 991 C2 is a stack of piezoelectric elements
  • the vibration excitation and detection is carried out using a piezo stack, which is pressed by a pressure screw against the membrane.
  • the piezo stack consists of piezoelectric elements glued together, which are enclosed at the top and bottom of each of a stamp.
  • a temperature-resistant adhesive and a complex adhesive process are particularly required.
  • the piezoelectric drive which can be found in the document WO 92/21945, consists of a stack of piezoelectric elements which are mounted on a clamping screw and which are biased by a nut.
  • this embodiment is not suitable for bulk materials, since the lateral action of the bulk material on the tines and an associated approach of the tines, the bias is canceled and the piezoelectric elements have no positive contact with the membrane more.
  • the invention solves the problem in that the exciting / receiving unit has at least one rod, that the rod is bounded at one of the membrane end facing by a punch that the stamp is designed such that a side facing the membrane a has minimal support surface, that the exciting / receiving unit has at least one piezoelectric element, which is penetrated by the rod, that the exciting / receiving unit has a Dracksay, which is arranged in the direction away from the membrane above the piezo ⁇ electrical element on the rod , And that the pickup / receiving unit is clamped between a pressure screw and the membrane.
  • the inventive starting / receiving unit thus consists of at least one piezoelectric element which is inserted on a rod.
  • the rod is bounded in the direction of the membrane by a stamp, wherein the stamp on the membrane side has the smallest possible or minimum contact surface, so that the bias acts specifically only on a small area.
  • the contact surface should be so large that optimum and above all sufficient force Transmission between membrane and pickup / receiving unit can take place.
  • the support surface is thus to minimize, while it is possible to prevent that the support surface is connected to areas of the membrane, which are exposed to different forces, especially with respect to the direction of the forces.
  • Above the piezoelectric element is a thrust washer. This has a double task.
  • this thrust washer absorbs the pressure that is exerted by the pressure screw in the installed state.
  • the pressure screw is preferably screwed into the inner wall of the housing, so that an automatic guide and a centering of the pickup / receiving unit results, and so that the piezo unit is non-positively connected to the membrane.
  • the piezoelectric element or possibly also a multiplicity of such elements are thus arranged on a rod. Therefore, gluing is not necessary.
  • the rod ends on a punch, which serves the power transmission between the pickup / receiving unit and membrane and which is further designed so that the force transmission occurs only at the point of the membrane, attach to the forces acting from outside through the bulk material, so that the Preload can not be canceled.
  • the rod, the punch, the piezoelectric element or the piezoelectric elements and the pressure plate form a unit that allows easy installation.
  • An embodiment provides that the support surface of the punch is located substantially on the extension of the longitudinal axis of the rod.
  • the stability of the structure of the pick-up / receiving unit is increased by the point on which primarily the bias voltage is supported by the rod as possible in its full length.
  • An advantageous embodiment includes that the pressure screw, the rod and the pressure disk are designed and matched to one another such that the pressure screw essentially exerts pressure only on the outer edge of the pressure disk.
  • the pressure screw, the rod and the thrust washer, so generally the pickup / receiving unit and the means for their attachment in the housing are designed aus ⁇ such that the pressure of the pressure screw acts essentially only on the edge of the pressure plate. Due to the structure of this embodiment, the pressure is thus transmitted from the side edges of the rod on the small contact area of the punch on the membrane.
  • this device is also suitable for bulk materials, since in a flowing bulk material and thus an approach of the forks to each other, the bias is not canceled and thus there is the pickup / receiving unit always in contact with the membrane. Thus, the device does not fail due to lateral load, especially due to the moving bulk material.
  • An embodiment includes that the pressure screw is connected to the housing.
  • the pressure screw is screwed or screwed into a corresponding thread of the housing. This serves - as stated above - the centering and guiding the pickup / receiving unit.
  • the bias also depends on the attachment in the housing and thus the bias is generated by more area and also by symmetrically distributed surface. This is in contrast to the drive of WO 92/21945, in which the bias at the upper end is generated only by the mother.
  • An embodiment provides that the container, the pickup / receiving unit, the
  • Pressure screw and the mechanically oscillatable unit are designed and matched to one another such that the bearing surface is located on the center axis of the mechanically oscillatable unit.
  • center axis here is e.g. the longitudinal or symmetry axis understood with respect to reflection or the axis of the center of gravity.
  • the aim of this embodiment is that the bearing surface of the punch and thus the lower point of the bias is opposite to the point on which attach the laterally acting by a bulk material forces.
  • the mechanically oscillatable unit is a tuning fork with two fork teeth. The bearing surface on the membrane is thus in this case opposite the region of the membrane which lies in the (geometric or center of gravity) center between the two fork tines.
  • the device is optimal and reliable suitable for bulk materials.
  • An embodiment provides that within the housing at least one
  • Inner tube is mounted so that the inner tube surrounding the pickup / receiving unit, and that the pressure screw is connected to the inner tube.
  • a tubular Inner part is described for example in the published patent application DE 101 29 556 A1 of the applicant.
  • the pressure screw is thus advantageously screwed to the inner tube, which is connected to the housing and / or the membrane, and thus generates the bias voltage for the pickup / receiving unit.
  • the inner tube causes a thermal decoupling of the area of the pickup / receiving unit. This is important in temperature shocks. If the temperature changes very quickly, usually the outer and inner components are at different temperatures, since the temperature adjustment does not take place at the same speed. In conjunction with different expansion coefficients, there is a risk that the frictional connection is canceled. By the inner tube an un ⁇ uniform temperature distribution is avoided and even with a temperature shock, the optimum bias remains guaranteed.
  • An embodiment includes that the rod and the punch are made in one piece. If the rod and the punch are a fitting, then difficulties can be avoided that can occur at the connection or contact point.
  • An embodiment provides that at least the rod and / or the punch consist of a metal or a ceramic. This is also to be seen in connection with the one-piece design.
  • the advantage of a ceramic is that no insulating elements between the rod or stamp and the piezoelectric element or elements must be provided, as is required for a metal.
  • An embodiment includes that the pressure screw has a recess for the end remote from the membrane of the rod.
  • the pickup / receiving unit has at least two piezoelectric elements.
  • the elements may be a transmitting unit and a receiving unit, between which an insulating disk is located, depending on the electrical control.
  • a piezoelectric element is acted upon by the regulating / control unit with an alternating electrical voltage and the membrane vibrates the mechanically oscillatable unit, and that the other element receives the mechanical vibrations via the membrane and converts them into an electric current AC voltage - as a measuring signal or feedback signal for the fundamental excitation of the mechanically oscillatable unit thus - converts.
  • the mechanically oscillatable unit is excited by the piezoelectric element or the piezoelectric elements to resonance and the vibrations are conversely converted into electrical signals.
  • An embodiment includes that the mechanically oscillatable unit at the
  • the mechanically oscillatable unit is attached by welding to the membrane or it is integrally connected to the membrane by the same manufacturing process.
  • Tuning fork is.
  • Such a tuning fork usually has two spaced-apart tines, which oscillate in opposite directions to one another, so that as far as possible no resulting forces act on the clamping in the region of the membrane.
  • the invention is not limited to a number of subunits of the oscillatable unit. Between the tines there is also a middle or symmetrical line.
  • both tines are essentially of the same design at least with regard to their mass and their moment of inertia.
  • force components also act on the membrane, which result from the forces acting laterally on the tines by bulk materials. It can also be a single rod or a variety of prongs.
  • the mechanical oscillations of the mechanically oscillatable unit are bending oscillations.
  • the pickup / receiver unit first bends the membrane and via this the oscillatory unit is excited to vibrate.
  • One embodiment provides that it is the density or the viscosity of the medium is the process variable to the filling level, ⁇ .
  • FIG. 1 shows the schematic structure of a measurement with the invention
  • FIG. 2 a cross-section through the pickup / receiving unit of the invention
  • FIG. 3 shows a cross section through an inventive starting / receiving unit installed in the housing
  • FIG. 4 a schematic representation of the forces acting on the device according to the invention by a bulk material
  • FIG. 5 shows a schematic representation of an additional variant of the installation of the inventive starting / receiving unit into the housing.
  • Fig. 1 shows the basic structure of an application of an inventive
  • a medium 5 is located in a container 6. On the wall of the container 6, the device 1 is mounted, so that the mechanically oscillatable unit 10 can come into contact with the medium 5.
  • the mechanical oscillatable unit 10 is excited by the pickup / receiving unit 30 to vibrate and the vibrations of the unit 10 are received by the pickup / receiving unit 30 again, converted into an electrical alternating voltage and fed to the control / evaluation unit 20. If the medium 5 reaches the mechanically oscillatable unit 10, this has an effect on the vibrations and thus it can be seen that the filling height predetermined by the installation height and orientation of the device during installation has been reached. The detection of falling below this level is also possible accordingly.
  • the density or the viscosity of the medium 5 can also be determined in the case of a liquid as medium from the oscillations, eg amplitude, frequency and phase be determined.
  • FIG. 2 shows the pickup / receiving unit 30 according to the invention.
  • the unit 30 itself is preferably designed to be rotationally symmetrical.
  • a rod 35 is bounded on a side 35.1 by a punch 40.
  • the punch 40 has on its end face 40.1 a spherical surface, so that the contact surface between the membrane (see Fig. 3) and the pickup / receiving unit 30 is as small as possible. Possibly. can also be provided a flattening, so that the contact area between the punch 40 and diaphragm 16 is slightly increased. This surface is also - as can be seen - on the extension of the longitudinal axis of the rod 35.
  • piezoelectric elements 45 are attached on the rod 35.
  • the elements separately take over the task of transmitter and receiver, so that between these insulating discs are attached.
  • the piezoelectric elements 45 are likewise electrically insulated from the punch 40 and the pressure disk 50.
  • the insulation with respect to the rod 35 is effected by a - not shown here - plastic tube which is slipped over the rod 35.
  • electrical contacts for contacting the piezoelectric elements 45 are also provided.
  • the stack of piezoelectric elements 45 is bounded upwardly by the aforesaid thrust washer 50.
  • the pickup / receiving unit 30 can be manufactured and transported as a single piece, without individual piezoelectric elements 45 could fall off.
  • a spring or a snap ring is provided at the top, so that the pressure plate 50 weakly presses against the piezoelectric elements 45.
  • the thrust washer 50 is used to install the excitation / reception unit 30 by applying pressure to it, or more precisely by applying the pressure on its edge region 50.1, which leads to the biasing of the excitation / reception unit 30 on the diaphragm. Due to its design is the Pickup / receiving unit 30 an independent component, which is manufactured in a suitable number of pieces and then installed.
  • the housing 15 can be seen, which is completed by the membrane 16 on the process side. On the membrane 16, the two prongs of the mechanically oscillatable unit 10 are attached.
  • the pressure screw 60 is screwed by a thread into the housing 15.
  • the screw 60 has a recess 60.1 in which just the upper end 35.2 of the rod 35 fits.
  • the pressure screw 60 is further configured such that its pressure acts only on the outer edge 50.1 of the thrust washer 50. Furthermore, a slight edge on the pressure screw 60 can be seen, so that a centering of the pickup / receiving unit 30 is achieved during assembly.
  • the contact surface 40.2 on the membrane 16 opposes the region which lies on the longitudinal axis and here also on the axis of symmetry of the piston mechanically oscillatable unit 10 is located.
  • the device 1 is also suitable for bulk materials. If the medium 5 pushes the forks together and thus together, this does not reduce the prestressing in the starting / receiving unit 30.
  • the pickup / receiving unit 30 is an independent unit that is introduced into the finished housing 15. This is e.g. important if the housing 15 is provided with a special coating, which may need to be applied with such temperatures, which are above the temperatures at which the piezoelectric elements lose their polarization. At the same time the design is so space-saving that the meter can be made very small.
  • FIG. 4 the acting forces (indicated by arrows) are shown, which can occur through a bulk material. If the bulk material comes into contact with the mechanically oscillatable unit 10, this causes in most cases that the distance between the fork tines becomes smaller, ie the tines are compressed together. The force of the bulk material is indicated by the lateral arrows. These forces cause a force component, which acts in the direction of the pickup / receiving unit 30, to occur between the fork prongs on the membrane 16. However, this component is just compensated by the design of the pickup / receiving unit 30. The resulting component acts at the (center of gravity) center between the two prongs.
  • FIG. 5 shows a further possible embodiment.
  • the pickup / receiving unit 30 is mounted in an inner tube 65. This can improve the behavior of the sensor during a temperature shock. At a rapid temperature change, the inner and outer parts of the sensor / the device 1 are not at the same temperatures, ie there is a temperature difference between inside and outside.
  • the inner tube 65 shown here prevents an uneven temperature distribution of the sensor parts, so that the pickup / receiving unit 30 remains under optimal bias even during a Temperaturschicks.

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Electromagnetism (AREA)
  • Thermal Sciences (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne un dispositif (1) de détermination et/ou de vérification d'une grandeur de processus d'un fluide (5), comprenant une unité (10) capable d'osciller mécaniquement, un boîtier en forme de récipient (15), au moins une unité d'excitation-réception (30), laquelle excite l'unité (10) de manière à provoquer des oscillations et qui reçoit ces oscillations. L'invention est caractérisée en ce que l'unité d'excitation-réception (30) présente un barreau (35) qui est délimité par un poinçon (40), en ce que le poinçon (40) présente une surface d'appui minimale, en ce que l'unité d'excitation-réception (30) présente au moins un élément piézo-électrique (45) qui est traversé par le barreau (35), en ce que l'unité d'excitation-réception (30) présente un disque de butée (50) qui est disposé au-dessus de l'élément piézo-électrique (45), et en ce que l'unité d'excitation-réception (30) est enserrée entre une vis de serrage (60) et la membrane (16).
PCT/EP2005/052725 2004-07-08 2005-06-14 Dispositif de determination et/ou de verification d'une grandeur de processus d'un fluide Ceased WO2006005660A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004033311.4 2004-07-08
DE200410033311 DE102004033311B4 (de) 2004-07-08 2004-07-08 Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgröße eines Mediums

Publications (1)

Publication Number Publication Date
WO2006005660A1 true WO2006005660A1 (fr) 2006-01-19

Family

ID=34971971

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2005/052725 Ceased WO2006005660A1 (fr) 2004-07-08 2005-06-14 Dispositif de determination et/ou de verification d'une grandeur de processus d'un fluide

Country Status (2)

Country Link
DE (1) DE102004033311B4 (fr)
WO (1) WO2006005660A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009110988A3 (fr) * 2008-03-01 2009-11-05 Mobrey Limited Appareil à élément vibratoire
CN102507369A (zh) * 2011-10-10 2012-06-20 北京航空航天大学 一种电磁激励检测的谐振式音叉液体密度传感器
US8456060B2 (en) 2008-03-01 2013-06-04 Mobrey Limited Vibrating element flow measurement apparatus
CN105190258A (zh) * 2013-05-15 2015-12-23 Vega格里沙贝两合公司 物位测量装置

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006013255A1 (de) * 2006-03-21 2007-09-27 Endress + Hauser Gmbh + Co. Kg Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgröße
DE102006046251A1 (de) * 2006-09-28 2008-04-03 Vega Grieshaber Kg Piezoelektrisch erregbare Schwingvorrichtung
DE102007041349A1 (de) 2007-08-30 2009-03-05 Vega Grieshaber Kg Füllstandsmessvorrichtung zum Bestimmen und/oder Überwachen eines Füllstandes
DE102008043764A1 (de) 2008-11-14 2010-05-20 Endress + Hauser Gmbh + Co. Kg Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgröße
DE202012003185U1 (de) 2012-03-29 2012-05-18 Vega Grieshaber Kg Schwingvorrichtung für eine Füllstandsmesseinheit
DE102022113065A1 (de) 2022-05-24 2023-11-30 Vega Grieshaber Kg Vibrationssensor mit keramischem Druckstück
DE102024114994A1 (de) * 2024-05-28 2025-12-04 Vega Grieshaber Kg Vibrationssensor zur Füllstandmessung und Verfahren zum Betrieb eines Vibrationssensors

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US4594584A (en) * 1983-10-11 1986-06-10 Endress U. Hauser Gmbh U. Co. Device for determining and/or monitoring a predetermined filling level in a container
DE4429236A1 (de) * 1994-08-18 1996-03-14 Grieshaber Vega Kg Verfahren und Vorrichtung zur Füllstandauswertung
US20040056612A1 (en) * 2000-03-08 2004-03-25 Jutta Kuhny Device for determining and/or monitoring a predetermined level in a container

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DE4118793C2 (de) * 1991-06-07 1995-02-09 Endress Hauser Gmbh Co Vorrichtung zur Feststellung und/oder Überwachung eines vorbestimmten Füllstandes in einem Behälter
GB9807910D0 (en) * 1998-04-14 1998-06-10 Klinger Fluid Instrumentation Apparatus for sensing the level of contents in a container
EP1134038A1 (fr) * 2000-03-08 2001-09-19 Endress + Hauser GmbH + Co. Dispositif pour la détermination et/ou la surveillance d'un niveau prédéterminé dans un réservoir
CN1330014C (zh) * 2000-04-27 2007-08-01 恩德莱斯和豪瑟尔两合公司 用于测量装置的压电陶瓷多层元件及其制造方法
DE10129556A1 (de) * 2001-06-19 2003-01-09 Endress & Hauser Gmbh & Co Kg Vorrichtung zur Bestimmung und/oder Überwachung des Füllstandes eines Mediums in einem Behälter

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4594584A (en) * 1983-10-11 1986-06-10 Endress U. Hauser Gmbh U. Co. Device for determining and/or monitoring a predetermined filling level in a container
DE4429236A1 (de) * 1994-08-18 1996-03-14 Grieshaber Vega Kg Verfahren und Vorrichtung zur Füllstandauswertung
US20040056612A1 (en) * 2000-03-08 2004-03-25 Jutta Kuhny Device for determining and/or monitoring a predetermined level in a container

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009110988A3 (fr) * 2008-03-01 2009-11-05 Mobrey Limited Appareil à élément vibratoire
US8390177B2 (en) 2008-03-01 2013-03-05 Mobrey Limited Vibrating element apparatus
US8456060B2 (en) 2008-03-01 2013-06-04 Mobrey Limited Vibrating element flow measurement apparatus
CN102507369A (zh) * 2011-10-10 2012-06-20 北京航空航天大学 一种电磁激励检测的谐振式音叉液体密度传感器
CN102507369B (zh) * 2011-10-10 2013-10-09 北京航空航天大学 一种电磁激励检测的谐振式音叉液体密度传感器
CN105190258A (zh) * 2013-05-15 2015-12-23 Vega格里沙贝两合公司 物位测量装置
CN105190258B (zh) * 2013-05-15 2019-05-10 Vega格里沙贝两合公司 物位测量装置

Also Published As

Publication number Publication date
DE102004033311B4 (de) 2010-07-22
DE102004033311A1 (de) 2006-01-26

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