WO2005029933A1 - Multilayer printed wiring board and method for manufacturing same - Google Patents
Multilayer printed wiring board and method for manufacturing same Download PDFInfo
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- WO2005029933A1 WO2005029933A1 PCT/JP2003/011937 JP0311937W WO2005029933A1 WO 2005029933 A1 WO2005029933 A1 WO 2005029933A1 JP 0311937 W JP0311937 W JP 0311937W WO 2005029933 A1 WO2005029933 A1 WO 2005029933A1
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- WIPO (PCT)
- Prior art keywords
- wiring board
- printed wiring
- multilayer printed
- positioning
- layer
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Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4679—Aligning added circuit layers or via connections relative to previous circuit layers
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09009—Substrate related
- H05K2201/09063—Holes or slots in insulating substrate not used for electrical connections
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/09781—Dummy conductors, i.e. not used for normal transport of current; Dummy electrodes of components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
- H05K2201/09918—Optically detected marks used for aligning tool relative to the PCB, e.g. for mounting of components
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4652—Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern
Definitions
- the present invention relates to a printed wiring board and a method of manufacturing the same, and more particularly, to a multilayer printed wiring board that can be easily densified / reduced and reduced in cost, and a method of manufacturing the same. . Background art
- the lamination process of a multilayer printed wiring board consists of a lamination (lay-up) process of an insulating material and a forming press process, and a mass lamination method and a pin lamination method are well known as lamination molding. ing.
- the mass lamination method is suitable for the production of low-cost printed wiring boards, since large-sized fixed-size ones can be laminated and formed, so that a large number of printed wiring boards can be obtained.
- it is usually difficult to align the inner layer pattern and the outer layer pattern, and there is a problem that it is becoming difficult to mass-produce a multilayer printed wiring board with high alignment accuracy between the layers.
- it requires high lamination accuracy and is difficult to apply to the production of multilayer printed wiring boards with small diameter vias, inner via holes (IVH) or fine patterns. Therefore, the mass laminating method is usually used during molding. It is used when it is not necessary to align the layers, and when alignment between the layers is necessary, it is used in the manufacture of multilayer printed wiring boards with four or less layers.
- a mass lamination method and a pin lamination method are used in combination.
- a lamination method There is a lamination method.
- the pin lamination method a core material formed by a mass lamination method having four or less layers is used.
- the pin lamination method enables multilayering with high lamination accuracy, but has the problem of increasing the number of manufacturing steps and increasing the cost of multilayer printed wiring boards. This is because the manufacturing and material costs are higher than in the case of the mass laminating method, and the reference pins are removed after heating, pressing and forming, and the resin adhering around the reference pins is removed. This is because workability deteriorates and productivity improvement is limited.
- the present invention has been made in order to solve the above problems, and has as its object to facilitate high-density multilayer printed wiring boards, and to easily reduce the size and cost. Disclosure of the invention
- the multilayer printed wiring board according to the present invention has six or more wiring layers aligned with each other, and is laminated and formed only by a mass luminescence method.
- a double-sided copper-clad laminate having a structure in which copper foil is adhered to the front and back surfaces of the insulating substrate is included as a core material for mass lamination.
- multilayer printed wiring boards with high lamination accuracy between wiring layers can be mass-produced at low cost, and electronic devices, particularly mobile devices such as mobile phones, can be made smaller, thinner, and lower in cost. This has the effect of greatly progressing.
- the multilayer printed wiring board As a hole for connecting each wiring layer, a build-up via for connecting to the outermost wiring layer, a through hole for penetrating the wiring board and connecting each wiring layer are provided. Only holes are formed. Further, the multilayer printed wiring board is used as a core material of mass lamination and is laminated and formed by mass lamination to form a multilayer. This has the effect of further increasing the density or miniaturization of the multilayer printed wiring board.
- the multilayer printed wiring board according to the present invention has, as a core material, an inner layer board provided with a positioning pattern used for positioning between wiring layers on a surface, and has a structure formed by lamination molding only by a mass lamination method. I have.
- the inner plate is formed of a double-sided copper-clad laminated plate having a structure in which a copper foil is adhered to the front and back surfaces of the insulating substrate.
- the wiring layers, vias or through holes of the wiring board are minutely formed. Even if the thickness is reduced, the positioning between the wiring layers can be performed with high accuracy, and an effect that a high-density multilayer printed wiring board can be manufactured at low cost is produced.
- the prepreg used for the insulating substrate or the mass lamination is a glass epoxy resin or a glass epoxy resin containing a glass cloth made of S glass fiber or E glass fiber.
- It is composed of a BT resin that includes a glass-like glass.
- the insulating substrate or the inner layer plate is strengthened, and in lamination molding using the mass lamination method, distortion due to heating and pressure or plastic deformation of the substrate that has expanded and contracted unevenly is significantly reduced. For this reason, in the alignment between the wiring layers in the process of forming the wiring layer, the area where the alignment shift occurs on the large-sized substrate is reduced, and the production yield of the multilayer printed wiring board of the present invention is reduced. The improvement is greatly improved. In addition, it is possible to further reduce the thickness of the inner layer board, and it is possible to obtain the effect of increasing the density and reducing the size of the multilayer printed wiring board.
- the positioning pattern is formed by etching a copper foil, and a plurality of types of positioning patterns corresponding to alignment between wiring layers are arranged on the insulating substrate surface. .
- the above-mentioned deformation of the wiring board becomes larger as the multilayer printed wiring board becomes more multilayered. Therefore, in the positioning between the wiring layers, the effect of the deformation is reduced by sequentially using the positioning patterns arranged inside the insulating substrate in accordance with the multilayering. Then, the production yield of the multilayer printed wiring board of the present invention is improved.
- the method of manufacturing a multilayer printed wiring board according to the present invention is a method of manufacturing a multilayer printed wiring board that is formed by lamination only using a mass lamination method, and in which copper foil is adhered to the front and back surfaces of an insulating substrate.
- Above structure of double-sided copper-clad laminate A process of forming a desired wiring pattern and a positioning pattern by etching a copper foil to form an inner layer plate, and sequentially laminating and forming a prepreg and an outer layer copper foil by mass lamination using the above inner layer plate as a core material. And multi-layering.
- the method for manufacturing a multilayer printed wiring board according to the present invention includes:
- a reference hole is formed in the copper foil for the outer layer or a part of the pre-preder below it based on the above positioning pattern. Then, using the reference holes for positioning between the wiring layers, the outer layer copper foil is etched to form a wiring pattern.
- the positioning pattern is detected by X-rays, and a through-hole for connecting the wiring layers is formed based on the positioning pattern. Also, the through-hole is used for positioning between wiring layers, and the outer layer copper foil is etched to form a wiring pattern.
- FIG. 1 is a cross-sectional view of a multilayer printed wiring board according to Embodiment 1 of the present invention in the order of manufacturing steps.
- FIG. 2 is a cross-sectional view of a multilayer printed wiring board in the order of the manufacturing process following the above manufacturing process.
- FIG. 3 is a sectional view of a multilayer printed wiring board according to Embodiment 2 of the present invention in the order of manufacturing steps.
- FIG. 4 is a cross-sectional view of the multilayer printed wiring board following the above manufacturing steps in the order of the manufacturing steps.
- FIG. 5 is a cross-sectional view of a multilayer printed wiring board according to Embodiment 3 of the present invention in a manufacturing process order.
- FIG. 6 is a cross-sectional view of a multilayer printed wiring board following the above manufacturing steps in the order of the manufacturing steps.
- FIG. 1 and 2 are cross-sectional views illustrating a first embodiment of the present invention in the order of manufacturing steps. In this description, the structure of the multilayer printed wiring board of the present invention is also shown.
- a two-layer core substrate 1 is formed from a double-sided copper-clad laminate as follows.
- the base material 2 which is an insulating substrate of the double-sided copper-clad laminate used in the present invention, is an epoxy material containing glass cloth made of glass fiber or BT resin.
- a copper foil having a thickness of about 20 m on the surface of the base material 2 is selectively etched using a resist mask formed by a well-known photolithography technique to form and position the first wiring pattern 3. Patterns 3 a and 3 b are formed on at least three places of the substrate 2.
- the copper foil on the back surface of the base material 2 is Using a resist mask formed by the luffy technique, selective etching is performed to form the second wiring pattern 4 and the positioning patterns 4a and 4b.
- the second wiring pattern 4 and the positioning patterns 4a and 4b are formed by using a well-known CCD camera alignment method in the exposure of the photolithography technology, so that the first wiring pattern 3 and the positioning patterns 3a and 3b Formed in alignment with.
- the prepregs 5 and 6 are made of an epoxy resin material having a glass cloth made of S glass fiber or E glass fiber and having a thickness of 0.03 mm or more or BT resin.
- the thickness of the copper foils 7 and 8 is arbitrary.
- the four-layer plate is seen through the copper foil 7 with X-rays to detect the positioning pattern 3a.
- the plurality of positioning plates 3a are aligned with each other to form corresponding reference holes 9 respectively.
- the reference hole is formed by well-known laser processing, X-ray processing, or the like.
- a third wiring pattern 11 is formed by selectively etching the copper foil 7 using a resist mask formed by a known photolithography technique.
- the third wiring pattern 11 is different from the first wiring pattern 3. Positioning can be performed with high accuracy. The same can be said for patterns 4 and 12.
- a four-layer core substrate 13 having a wiring pattern with high accuracy of alignment between the layers is formed.
- the mass lamination method was used again. And laminate molding. Here, your material is the four-layer core substrate 13.
- Two prepregs 14 a and 14 b and a copper foil 15 for the outer layer are laminated on the surface of the four-layer core substrate 13, and two prepregs are also provided on the back surface of the four-layer core substrate 13.
- 16 a, 16 b and copper foil 17 for the outer layer are laminated.
- This laid-up insulating material is heated and pressed to form and press, and as shown in Fig. 2B, a six-layer board consisting of a four-layer core substrate 13, prepregs 14, 16 and copper foils 15, 17
- the prepregs 14 and 16 are made of an epoxy resin material or a BT resin having a glass cloth made of S glass fiber or E glass fiber and having a thickness of 0.03 mm or more.
- the thickness of the copper foils 15 and 17 is arbitrary.
- FIG. 2C drilling is performed based on the positioning pattern 3b or 4b as a position reference, and the first wiring pattern 3, the second wiring pattern 4, the third wiring pattern 11 and the fourth wiring pattern 11 are formed.
- a through hole 18 penetrating the wiring pattern 12 and the copper foils 15 and 17 is formed.
- a mask alignment with a photomask is performed based on the through hole 18 in the exposure transfer of the photolithography technology, (1)
- a fifth wiring pattern (19) and a sixth wiring pattern (20) aligned with the second wiring pattern (3), the second wiring pattern (4), the third wiring pattern (11), and the fourth wiring pattern (12) are formed.
- surface treatment using a solder resist is performed to complete a 6-layer printed wiring board with 6-layer through-holes.
- the first major feature of the present invention is that a two-layer core board is formed from a double-sided copper-clad laminate, and this is used as a core material to perform lamination molding by a mass lamination method to form a four-layer core board.
- the lamination molding by the mass lamination method is sequentially applied, such that the lamination molding by the mass lamination method using the four-layer core substrate as a core material to form a six-layer material.
- the second major feature of the present invention is that a positioning pattern is provided on an initial core material (in this case, a double-sided copper-clad laminate to a two-layer core substrate) in order to perform alignment between layers.
- the point is that a reference hole for alignment is formed based on this positioning pattern.
- the point is that all of the wiring layers to be multi-layered are positioned through the positioning pattern arranged on the surface of the core material at the earliest stage.
- the above-mentioned positioning pattern is used as a mask alignment mark that is detected by X-rays by exposure transfer of the pattern on the photomask to the photo resist in the photolithography technology, and the photomask is directly used. There is a method of aligning the position.
- the accuracy of the alignment between the multilayer wirings is greatly improved as compared with the conventional method.
- the above effects are remarkable as compared with the conventional method.
- the material containing glass cloth is used for the inner layer plate, the plastic deformation of the substrate that has been unevenly expanded and contracted in the lamination molding is greatly reduced, and misalignment occurs in the alignment between the wiring layers in the process of forming the wiring layer. Area to be reduced. Therefore, the production yield of the multilayer printed wiring board is improved. Then, the thickness of the inner layer plate can be further reduced. In this way, the multi-layer printed wiring board can be easily densified, miniaturized, and inexpensively combined with the above-described effect of the multi-printed wiring board in the mass lamination method. Mass production will be possible.
- FIG. 3 and FIG. 4 are cross-sectional views in the order of manufacturing steps for describing the second embodiment. It is.
- an eight-layer printed wiring board is formed.
- up to the six-layer plate 13 described in the first embodiment is formed in the same manner. That is, the six-layer plate 21 shown in FIG. 3A is almost the same as the six-layer plate 13 of FIG. 2B described in the first embodiment.
- the thickness of the copper foils 15 and 17 is as thick as about 20 ⁇ m.
- positioning patterns 3c, 4c are formed further inside positioning patterns 3b, 4b.
- the above-mentioned six-layer plate 21 is seen through the copper foil 15 with X-rays, and a positioning pattern 3b different from the positioning pattern 3a is detected.
- the reference holes 22 are respectively formed by aligning the plurality of positioning patterns 3b.
- the positioning patterns 3b and 4b are preferably formed on the same layer as the above-described positioning patterns 3a and 4a, and provided on the inner side away from the periphery of the six-layer plate 21.
- the inner layer board or the wiring board undergoes plastic deformation that is unevenly expanded and contracted by heating or pressing. Furthermore, such deformation increases as the wiring board is multi-layered, and particularly increases nearer the periphery of the wiring board. Therefore, when the positioning patterns 3b and 4b arranged farther from the periphery than the positioning patterns 3a and 4a arranged on the peripheral side of the insulating substrate are used in the alignment between the wiring layers, the above-described deformation alignment is achieved. This is because the effect on the environment can be reduced.
- the mask is aligned with the photomask based on the reference hole 22 and the copper foil 15 is etched as shown in FIG. 3C. 5 Form a wiring pattern 24.
- a mask is aligned with a photomask based on the reference hole 22, and the copper foil 17 is etched to form a sixth wiring pattern 25. In this way, between each layer A six-layer core substrate 26 having wiring patterns with high alignment accuracy is formed.
- the laminate is formed again using the mass lamination method.
- the core material is a six-layer core substrate 26.
- the subsequent steps are the same as those described in FIG. That is, the prepregs 27a and 27b and the copper foil 28 for the outer layer are laminated on the six-layer core substrate 26, and the prepregs 29a and 29b and the copper foil 30 for the outer layer are laminated on the back surface. Laminate. Then, forming and pressing are performed to form an eight-layer plate including a six-layer core substrate 26, prepregs 27 and 29, and copper foils 28 and 30.
- the prepregs 27 and 29 are made of an epoxy resin material having a glass cloth made of S glass fiber or E glass fiber and having a thickness of not less than 0.03 mm or BT resin. The thickness of the copper foil 28, 30 is arbitrary.
- FIG. 4C drilling is performed based on the positioning pattern 3c or 4c as a position reference, and the first wiring pattern 3, the second wiring pattern 4, the third wiring pattern 11, and the fourth wiring pattern are formed.
- a through hole 31 penetrating through the wiring pattern 12, the fifth wiring pattern 24, the sixth wiring pattern 25, and the copper foils 28, 30 is formed.
- a mask alignment with a photomask is performed based on the above-mentioned through hole 31 in the exposure transfer of the photolithography technology, and the first Wiring pattern 3, 2nd wiring pattern 4, 3rd wiring pattern 11, 4th wiring pattern 12, 5th wiring pattern 24, 7th wiring aligned with 6th wiring pattern 25
- the pattern 32 and the eighth wiring pattern 33 are formed. In this way, an eight-layer printed wiring board having eight through-holes is completed.
- another feature of the present invention is that the alignment between the layers is most important.
- Initial core material in this case, double-layer copper clad laminate
- a plurality of types of positioning patterns are arranged and provided on a substrate, and the core material becomes multilayered and the positioning patterns used from the periphery of the above-mentioned initial core material are used sequentially as the positioning patterns to be used. .
- the above-mentioned deformation of the wiring board increases.
- the inside of the insulating substrate is adjusted from the periphery of the insulating substrate in accordance with the multilayering.
- FIG. 5 and FIG. 6 are cross-sectional views in the order of the manufacturing steps for explaining the third embodiment.
- an 8-layer printed wiring board having a plurality of through holes, a one-stage build-up structure, and a method of manufacturing the same will be described.
- FIG. 5A is the same as that of FIG. 2C described in the first embodiment, which is referred to as a six-layer core substrate 41.
- the six-layer core substrate 41 is used as an inner layer plate and laminated by a mass lamination method using a core material.
- the prepreg in the lay-up stage is an epoxy resin material having a glass cloth made of S glass fiber or E glass fiber and BT resin, and is also filled in the inner via hole 18. I do.
- the prepregs 42, 43 which fill the inner via hole 18, sandwiching the six-layer core substrate 41, and the copper foils 44, 45 for the outer layer are formed.
- An eight-layer plate formed by lamination is formed.
- the thickness of the copper foils 44 and 45 is arbitrary, and the thickness of the prepregs 42 and 43 is not less than 0.03 mm.
- a drilling process is performed with the positioning pattern 3b or 4b as a position reference, and the copper foils 44, 45 and the inner layer wiring pattern are drilled. Form a through hole 4 6 through the turn.
- the prepreg is moved to reach the fifth wiring pattern 19a and the sixth wiring pattern 20a, respectively.
- 4 2 and 4 3 are provided with respective vias for build-up. Thereafter, copper plating with a film thickness of several m to several tens / m is applied.
- the mask is aligned with the photomask based on the through hole 46, and the first wiring pattern 3, the second wiring pattern 4, the third wiring pattern 11, A seventh wiring pattern 47 and an eighth wiring pattern 48 aligned with the fourth wiring pattern 12, the fifth wiring pattern 19, and the sixth wiring pattern 20 are formed. Also, a seventh wiring pattern 47a, which builds up from the fifth wiring pattern 19a, and an eighth wiring pattern 48a, which builds up from the sixth wiring pattern 20a, are formed thereon. In this way, an eight-layer printed wiring board having a structure having a plurality of through holes and a one-stage build-up is completed.
- the present invention it is easy to connect through the through holes between the multi-layered wirings or to form a gap between the wirings, and it is possible to further increase the density and miniaturization of the multi-layer printed wiring board with low cost. Can be formed.
- multilayer printed wiring boards having high alignment accuracy between wiring layers can be manufactured at low cost, and the miniaturization and cost reduction of portable devices such as mobile phones will be greatly advanced.
- the multilayer printed wiring board according to the present invention enables both high density / miniaturization and low cost. We will also provide inexpensive multilayer printed wiring boards for use in advanced personalized electronic and communication equipment.
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Abstract
Description
明 細 書 多層プリ ン ト配線板およびその製造方法 技術分野 Description Multilayer printed wiring board and method of manufacturing the same
この発明は、 プリ ン ト配線板とその製造方法に関するものであり、 更 に詳しくは、 高密度化/小型化およびコス ト低減が容易な多層プリ ン ト 配線板およびその製造方法に関するものである。 背景技術 The present invention relates to a printed wiring board and a method of manufacturing the same, and more particularly, to a multilayer printed wiring board that can be easily densified / reduced and reduced in cost, and a method of manufacturing the same. . Background art
近年、 多層プリ ン ト配線板においては、 電子機器の複合化、 システム 多機能化の中で、 更なる高密度実装、 S I P (システム · イ ン · パヅケ In recent years, multi-layer printed wiring boards have become increasingly complex and electronically multi-functional, with the need for higher density packaging and SIP (system-in-package).
—ジ) を可能にすべく、 配線板の高密度, 高精細化が強く求められてき ている。 また、 高度な電子機器や通信機器のパーソナル化が進み、 低コ ス 卜で小型化した多層プリ ン ト配線板が要求されている。 There is a strong demand for high-density and high-definition wiring boards to enable the above-mentioned requirements. Also, personalization of advanced electronic devices and communication devices is progressing, and low-cost, miniaturized multilayer printed wiring boards are required.
通常、 多層プリ ン ト配線板の積層工程は、 絶縁材料の重ね合わせ (レ ィアップ) 工程と成形プレス工程から成るが、 積層成形としてマスラ ミ ネーシヨ ン方式とピンラミネーシヨン方式とがよ く知られている。 Usually, the lamination process of a multilayer printed wiring board consists of a lamination (lay-up) process of an insulating material and a forming press process, and a mass lamination method and a pin lamination method are well known as lamination molding. ing.
マスラ ミネーシヨン方式は、 大きな定尺のものが積層成形できるこ と からプリ ン ト配線板が多数個取りでき、 低コス トのプリ ン ト配線板の製 造に適している。 しかし、 通常、 内層パターンと外層パターン間の位置 合わせをすることが難しく、 各層間の位置合わせ精度の高い多層プリ ン ト配線板の量産製造が難しく なつてきているという問題がある。 特に、 高い積層精度を必要とし、 小径ビア、 イ ンナーパイァホール ( I V H ) あるいは微細パターンを有する多層プリ ン ト配線板の製造に適用するの は難しい。 そこで、 マスラミネ一シヨン方式は、 通常では成形時に層間 の位置合わせが不要な場合に用いられ、 各層間の位置合わせが必要な場 合では、 4層以下の多層プリ ン ト配線板の製造に採用されている。 The mass lamination method is suitable for the production of low-cost printed wiring boards, since large-sized fixed-size ones can be laminated and formed, so that a large number of printed wiring boards can be obtained. However, it is usually difficult to align the inner layer pattern and the outer layer pattern, and there is a problem that it is becoming difficult to mass-produce a multilayer printed wiring board with high alignment accuracy between the layers. In particular, it requires high lamination accuracy and is difficult to apply to the production of multilayer printed wiring boards with small diameter vias, inner via holes (IVH) or fine patterns. Therefore, the mass laminating method is usually used during molding. It is used when it is not necessary to align the layers, and when alignment between the layers is necessary, it is used in the manufacture of multilayer printed wiring boards with four or less layers.
一方、 配線間の精確な位置合わせをして多層プリ ン ト配線板を形成す る場合には、 通常ではピンラミネーシヨン方式が用いられる。 On the other hand, when a multilayer printed wiring board is formed by performing precise alignment between wirings, a pin lamination method is usually used.
また、 その他の従来の多層プリン ト配線板の製造方法として、 例えば 特開平 6— 2 2 4 5 5 3 号公報に示されたように、 マスラミネーシヨン 方式とピンラミネーショ ン方式とを併用する積層法がある。 ここでは、 ピンラミネーシヨン方式において、 4層以下から成るマスラミネ一ショ ン方式で形成したコア材を用いるとしている。 As another conventional method for manufacturing a multilayer printed wiring board, for example, as shown in JP-A-6-224553, a mass lamination method and a pin lamination method are used in combination. There is a lamination method. Here, in the pin lamination method, a core material formed by a mass lamination method having four or less layers is used.
ピンラミネーション方式は高い積層精度の多層化を可能にするが、 そ の反面、 製造工程が増え、 多層プリ ン ト配線板が高コス トになるという 問題がある。 これは、 マスラミネ一シヨン方式の場合に比べて製造, 材 料コス トが高くなること と、 加熱 ·加圧し成形プレスした後の基準ピン 抜きあるいは基準ピン周りに付着する樹脂の除去等のために作業性が悪 くなり生産性向上に限界が生じるためである。 The pin lamination method enables multilayering with high lamination accuracy, but has the problem of increasing the number of manufacturing steps and increasing the cost of multilayer printed wiring boards. This is because the manufacturing and material costs are higher than in the case of the mass laminating method, and the reference pins are removed after heating, pressing and forming, and the resin adhering around the reference pins is removed. This is because workability deteriorates and productivity improvement is limited.
また、 このピンラミネ一シヨン方式で成形プレスする場合に、 生産性 を向上させるベく、 コア材を多数枚同時に積層して多層化すると、 例え ば各両面銅張積層板の銅残存率、 銅箔厚みの違いなどにより、 ピンラミ ネーションの基準孔の位置ズレが生じ易くなる。 このために各層間の位 置合わせ精度の向上と生産性の向上で二律相反してく るという問題があ る。 そして、 多層化と共にプリ ン ト配線板の薄層化が進み、 板厚 0 . 1 m m以下の両面銅張積層板のようなコア材への配線パターン形成の要求 が高まる中で、 通常の製造ライ ンのエッチング加工では配線パターン形 成は困難となる問題がある。 Also, when forming and pressing by this pin lamination method, in order to improve productivity, a large number of core materials are simultaneously laminated to form a multilayer, for example, the copper residual ratio of each double-sided copper-clad laminate, copper foil Due to differences in thickness, etc., the position of the reference hole of the pin lamination tends to shift. For this reason, there is a problem that there is a trade-off between improving the alignment accuracy between layers and improving productivity. With the progress of thinning of printed wiring boards along with the increase in the number of layers, the demand for forming wiring patterns on core materials, such as double-sided copper-clad laminates with a board thickness of 0.1 mm or less, has increased. There is a problem that it is difficult to form a wiring pattern by line etching.
上述したように、 従来の技術においては、 高密度化/小型化した多層 プリン ト配線板を安価に生産することが難しくなつている。 この発明は上記の問題点を解決するためになされたもので、 多層プリ ン ト配線板の高密度化/ /」、型化と低コス ト化とを容易にすることを目的 とする。 発明の開示 As described above, it is difficult to produce a high-density / miniaturized multilayer printed wiring board at a low cost in the conventional technology. The present invention has been made in order to solve the above problems, and has as its object to facilitate high-density multilayer printed wiring boards, and to easily reduce the size and cost. Disclosure of the invention
この発明に係る多層プリン ト配線板は、 6層以上の互いに位置合わせ した配線層を有し、 マスラミネ一ション方式のみで積層成形されている 。 ここで、 絶縁基板の表面および裏面に銅箔を張着した構造の両面銅張 積層板をマスラミネ一ショ ンのコア材として含む。 The multilayer printed wiring board according to the present invention has six or more wiring layers aligned with each other, and is laminated and formed only by a mass luminescence method. Here, a double-sided copper-clad laminate having a structure in which copper foil is adhered to the front and back surfaces of the insulating substrate is included as a core material for mass lamination.
このことによって、 配線層間の積層精度が高い多層プリン ト配線板が 低コス トで量産製造できるようになり、 電子機器特に携帯電話のような 携帯機器の小型化, 薄型ィ匕および低コス ト化が大幅に進展するという効 果が生じる。 As a result, multilayer printed wiring boards with high lamination accuracy between wiring layers can be mass-produced at low cost, and electronic devices, particularly mobile devices such as mobile phones, can be made smaller, thinner, and lower in cost. This has the effect of greatly progressing.
この発明に係る多層プリ ン ト配線板は、 各配線層間を接続させるため の孔として、 最外層の配線層と接続させるためのビルドアヅプビア、 配 線板を貫通し各配線層を接続させるためのスルーホールのみが形成され ている。 また、 上記多層プリン ト配線板をマスラミネーシヨンのコア材 としマスラミネ一ション方式で積層成形され更に多層化されている。 このことによって、 多層プリン ト配線板は更に高密度化あるいは小型 化されるという効果がある。 In the multilayer printed wiring board according to the present invention, as a hole for connecting each wiring layer, a build-up via for connecting to the outermost wiring layer, a through hole for penetrating the wiring board and connecting each wiring layer are provided. Only holes are formed. Further, the multilayer printed wiring board is used as a core material of mass lamination and is laminated and formed by mass lamination to form a multilayer. This has the effect of further increasing the density or miniaturization of the multilayer printed wiring board.
この発明に係る多層プ リ ント配線板は、 配線層間の位置合わせに使用 する位置決めパターンを表面に備えた内層板をコァ材として有し、 マス ラミネ一シヨン方式のみで積層成形した構造になっている。 そして、 内 層板は、 絶縁基板の表面: ¾よび裏面に銅箔を張着した構造の両面銅張積 層板から形成されている。 The multilayer printed wiring board according to the present invention has, as a core material, an inner layer board provided with a positioning pattern used for positioning between wiring layers on a surface, and has a structure formed by lamination molding only by a mass lamination method. I have. The inner plate is formed of a double-sided copper-clad laminated plate having a structure in which a copper foil is adhered to the front and back surfaces of the insulating substrate.
このことによって、 配線板の配線層、 ビアあるいはスルーホールが微 細化しても配線層間の位置合わせが高精度に行え、 高密度な多層プリ ン ト配線板が低コス トで製造できるという効果が生じる。 As a result, the wiring layers, vias or through holes of the wiring board are minutely formed. Even if the thickness is reduced, the positioning between the wiring layers can be performed with high accuracy, and an effect that a high-density multilayer printed wiring board can be manufactured at low cost is produced.
この発明に係る多層プリ ン ト配線板では、 上記の絶縁基板あるいはマ スラミネーシヨンに用いるプリプレグは、 Sガラス繊維からあるいは E ガラス繊維から成るガラスクロスを含むガラスェポキシ樹脂あるいはこ In the multilayer printed wiring board according to the present invention, the prepreg used for the insulating substrate or the mass lamination is a glass epoxy resin or a glass epoxy resin containing a glass cloth made of S glass fiber or E glass fiber.
I I
のようなガラスク 口スを含む B Tレジンで構成されている。 It is composed of a BT resin that includes a glass-like glass.
このことによって、 絶縁基板あるいは内層板が強固になり、 マスラミ ネーシヨン方式での積層成形において、 加熱、 加圧による歪みあるいは 不均一に伸縮した基板の塑性変形は大幅に低減する。 このために、 配線 層を形成する工程での配線層間の位置合わせで、 大きな定尺の上記基板 上で位置合わせズ レを起こす領域が少なくなり、 本発明の多層プリン ト 配線板の製造歩留ま りが大幅に向上する。 また、 内層板の更なる薄膜化 が可能となり、 多層プリ ン ト配線板を高密度化および小型化できるとい う効果が生じる。 As a result, the insulating substrate or the inner layer plate is strengthened, and in lamination molding using the mass lamination method, distortion due to heating and pressure or plastic deformation of the substrate that has expanded and contracted unevenly is significantly reduced. For this reason, in the alignment between the wiring layers in the process of forming the wiring layer, the area where the alignment shift occurs on the large-sized substrate is reduced, and the production yield of the multilayer printed wiring board of the present invention is reduced. The improvement is greatly improved. In addition, it is possible to further reduce the thickness of the inner layer board, and it is possible to obtain the effect of increasing the density and reducing the size of the multilayer printed wiring board.
この発明に係る多層プリ ン ト配線板では、 上記位置決めパターンは銅 箔のエッチング加工で形成されており、 配線層間の位置合わせに対応し た複数種の位置決めパターンが絶縁基板面に配置されている。 In the multilayer printed wiring board according to the present invention, the positioning pattern is formed by etching a copper foil, and a plurality of types of positioning patterns corresponding to alignment between wiring layers are arranged on the insulating substrate surface. .
マスラミネ一シ ョン方式の積層成形では、 多層プリン ト配線板を多層 化していくに従い配線板の上述したような変形は大きくなる。 そこで、 配線層間の位置合わせにおいて、 上記多層化に合わせて絶縁基板の内側 に配置する位置決めパターンを順次に使用することで、 上記変形の影響 が低減するという効果がある。 そして、 本発明の多層プリン ト配線板の 製造歩留ま りが向上するようになる。 In the lamination molding of the mass lamination method, the above-mentioned deformation of the wiring board becomes larger as the multilayer printed wiring board becomes more multilayered. Therefore, in the positioning between the wiring layers, the effect of the deformation is reduced by sequentially using the positioning patterns arranged inside the insulating substrate in accordance with the multilayering. Then, the production yield of the multilayer printed wiring board of the present invention is improved.
この発明に係る多層プリン ト配線板の製造方法は、 マスラミネーショ ン方式のみで積層成形する多層プリ ン ト配線板の製造方法であって、 絶 縁基板の表面および裏面に銅箔を張着した構造の両面銅張積層板の上記 銅箔をエツチング加工し所望の配線パターンと位置決めパターンとを形 成し内層板とする工程と、 上記内層板をコア材として含め、 プリプレグ と外層用銅箔をマスラミネ一ション方式で順次に積層成形し多層化する 工程とを含む。 The method of manufacturing a multilayer printed wiring board according to the present invention is a method of manufacturing a multilayer printed wiring board that is formed by lamination only using a mass lamination method, and in which copper foil is adhered to the front and back surfaces of an insulating substrate. Above structure of double-sided copper-clad laminate A process of forming a desired wiring pattern and a positioning pattern by etching a copper foil to form an inner layer plate, and sequentially laminating and forming a prepreg and an outer layer copper foil by mass lamination using the above inner layer plate as a core material. And multi-layering.
このことによって、 配線層間の高精度な位置合わせを有する多層プリ ン ト配線板の製造が低コス ト化すると共にその歩留まりが向上するとい う効果がある。 This has the effect of reducing the cost of manufacturing a multilayer printed wiring board having highly accurate alignment between wiring layers and improving the yield.
この発明に係る多層プリ ン ト配線板の製造方法は、 上記位置決めパ夕 The method for manufacturing a multilayer printed wiring board according to the present invention includes:
—ンを X線で検出し、 上記位置決めパターンを基準として外層用銅箔あ るいはその下のプリプレダの一部に基準穴を形成する。 そして、 上記基 準穴を配線層間の位置合わせに用いて外層用銅箔をエッチングし配線パ ターンを形成する。 -X-rays are detected, and a reference hole is formed in the copper foil for the outer layer or a part of the pre-preder below it based on the above positioning pattern. Then, using the reference holes for positioning between the wiring layers, the outer layer copper foil is etched to form a wiring pattern.
このことによって、 マスラミネ一シヨン方式による多層プリン ト配線 板の多層化において、 配線層間の確実な位置合わせが可能になるという 効果がある。 As a result, there is an effect that it is possible to surely position the wiring layers in a multilayer printed wiring board using the mass lamination method.
この発明に係る多層プリ ン ト配線板の製造方法は、 上記位置決めパ夕 ーンを X線で検出し、 上記位置決めパターンを基準として各配線層間を 接続するための貫通するスルーホールを形成する。 また、 上記スルーホ —ルを配線層間の位置合わせに用いて外層用銅箔をエツチングし配線パ ターンを形成する。 In the method for manufacturing a multilayer printed wiring board according to the present invention, the positioning pattern is detected by X-rays, and a through-hole for connecting the wiring layers is formed based on the positioning pattern. Also, the through-hole is used for positioning between wiring layers, and the outer layer copper foil is etched to form a wiring pattern.
このことに よって、 低コス トでしかも多層プリント配線板を高密度化 および小型化できるという効果がある。 図面の簡単な説明 This has the effect of reducing the cost and increasing the density and size of the multilayer printed wiring board. Brief Description of Drawings
第 1図は、 本発明の実施の形態 1の多層プリン ト配線板の製造工程順 の断面図であ る。 第 2図は、 上記製造工程に続く多層プリン ト配線板の製造工程順の断 面図である。 FIG. 1 is a cross-sectional view of a multilayer printed wiring board according to Embodiment 1 of the present invention in the order of manufacturing steps. FIG. 2 is a cross-sectional view of a multilayer printed wiring board in the order of the manufacturing process following the above manufacturing process.
第 3図は、 本発明の実施の形態 2の多層プリ ント配線板の製造工程順 の断面図である。 FIG. 3 is a sectional view of a multilayer printed wiring board according to Embodiment 2 of the present invention in the order of manufacturing steps.
第 4図は、 上記製造工程に続く多層プリ ン ト配線板の製造工程順の断 面図である。 FIG. 4 is a cross-sectional view of the multilayer printed wiring board following the above manufacturing steps in the order of the manufacturing steps.
第 5図は、 本発明の実施の形態 3の多層プリ ン ト配線板の製造工程順 の断面図である。 FIG. 5 is a cross-sectional view of a multilayer printed wiring board according to Embodiment 3 of the present invention in a manufacturing process order.
第 6図は、 上記製造工程に続く多層プリン ト配線板の製造工程順の断 面図である。 発明を実施する ための最良の形態 FIG. 6 is a cross-sectional view of a multilayer printed wiring board following the above manufacturing steps in the order of the manufacturing steps. BEST MODE FOR CARRYING OUT THE INVENTION
以下、 この発明をより詳細に説明するために、 この発明を実施するた めの最良の形態について、 添付の図面にしたがって説明する。 Hereinafter, in order to explain this invention in greater detail, the preferred embodiments of the present invention will be described with reference to the accompanying drawings.
実施の形態 1 . Embodiment 1
第 1図と第 2 図は本発明の実施の形態 1を説明するための製造工程順 の断面図である。 なお、 この説明の中で本発明の多層プリン ト配線板の 構造も示される。 1 and 2 are cross-sectional views illustrating a first embodiment of the present invention in the order of manufacturing steps. In this description, the structure of the multilayer printed wiring board of the present invention is also shown.
第 1図 Aにおいて、 初めに、 両面銅張積層板から 2層コア基板 1を次 のようにして形成する。 ここで、 本発明に用いる両面銅張積層板の絶縁 基板である基材 2は、 ガラス繊維でできたガラスクロスを含むエポキシ 材料あるいは B T レジンである。 上記基材 2の表面の膜厚 2 0 m程度 の銅箔を、 周知のフォ ト リソグラフィ技術で形成したレジス トマスクを 用いて選択的にエッチングし、 第 1配線パターン 3を形成すると共に位 置決めパターン 3 a, 3 bを基材 2の少なく とも 3箇所にそれそれに形 成する。 同様に して、 上記基材 2の裏面の銅箔を、 周知のフォ ト リソグ ラフィ技術で形成したレジス トマスクを用いて選択的にエツチングし、 第 2配線パターン 4を形成すると共に位置決めパターン 4 a, 4 bを形 成する。 ここで、 第 2配線パターン 4および位置決めパターン 4 a , 4 bは、 フォ ト リソグラフィ技術の露光において周知の C C Dカメラ位置 合わせ法を用いることで、 第 1配線パターン 3および位置決めパターン 3 a , 3 Toに位置合わせして形成する。 In FIG. 1A, first, a two-layer core substrate 1 is formed from a double-sided copper-clad laminate as follows. Here, the base material 2, which is an insulating substrate of the double-sided copper-clad laminate used in the present invention, is an epoxy material containing glass cloth made of glass fiber or BT resin. A copper foil having a thickness of about 20 m on the surface of the base material 2 is selectively etched using a resist mask formed by a well-known photolithography technique to form and position the first wiring pattern 3. Patterns 3 a and 3 b are formed on at least three places of the substrate 2. Similarly, the copper foil on the back surface of the base material 2 is Using a resist mask formed by the luffy technique, selective etching is performed to form the second wiring pattern 4 and the positioning patterns 4a and 4b. Here, the second wiring pattern 4 and the positioning patterns 4a and 4b are formed by using a well-known CCD camera alignment method in the exposure of the photolithography technology, so that the first wiring pattern 3 and the positioning patterns 3a and 3b Formed in alignment with.
次に、 公知のマスラミネーシヨン方式により、 上述の内層板である 2 層コア基板 1をコア材にして積層成形し、 第 1図 Bに示すような 2層コ ァ基板 1、 プリプレダ 5, 6、 外層用の銅箔 7 , 8から成る 4層板を形 成する。 ここで、 プリプレグ 5 , 6は Sガラス繊維あるいは Eガラス繊 維から成るガラスクロスを有する膜厚が 0 . 0 3 m m以上のエポキシ樹 脂材料あるいは B Tレジンから成る。 また、 銅箔 7 , 8の膜厚は任意で ある。 Next, by a known mass lamination method, the two-layer core substrate 1, which is the above-mentioned inner layer plate, is laminated and formed into a core material, and the two-layer core substrate 1, the pre-readers 5, 6 as shown in FIG. Then, a four-layer plate composed of copper foils 7 and 8 for the outer layer is formed. Here, the prepregs 5 and 6 are made of an epoxy resin material having a glass cloth made of S glass fiber or E glass fiber and having a thickness of 0.03 mm or more or BT resin. The thickness of the copper foils 7 and 8 is arbitrary.
次に、 銅箔 7上から X線で上記 4層板を透視し、 位置決めパターン 3 aを検出する。 そして、 第 1図 Cに示すように、 複数の位置決めパ夕一 ン 3 aに位置合わせしてそれそれ対応する基準穴 9を形成する。 この場 合、 基準穴の形成は、 周知のレーザ加工、 X線加工等で行う。 Next, the four-layer plate is seen through the copper foil 7 with X-rays to detect the positioning pattern 3a. Then, as shown in FIG. 1C, the plurality of positioning plates 3a are aligned with each other to form corresponding reference holes 9 respectively. In this case, the reference hole is formed by well-known laser processing, X-ray processing, or the like.
次に、 第 1図 Dに示すように、 周知のフォ ト リソグラフィ技術で形成 したレジス トマスクを用いて銅箔 7を選択的にエッチングし第 3配線パ 夕一ン 1 1を形成する。 このフォ ト リソグラフィ技術の露光転写の工程 において、 上記基準穴 9をマスク合わせマークにしてフォ トマスクとの 位置合わせを行うことができるために、 第 3配線パターン 1 1は、 第 1 配線パターン 3 と高い精度で位置合わせできる。 同様のことがパターン 4とパターン 1 2にも言える。 このようにして、 各層間で互いに位置合 わせ精度の高い配線パターンを有する 4層コア基板 1 3が形成される。 次に、 第 2図 A、 Bに示すように再びマスラミネ一シヨン方式を用い て積層成形する。 ここで、 ユア材は 4層コア基板 1 3 となる。 この 4層 コァ基板 1 3の表面上に 2枚のプリプレグ 1 4 a, 1 4 b と外層用の銅 箔 1 5 を積層し、 更に 4層コア基板 1 3の裏面にも 2枚のプリ プレダ 1 6 a, 1 6 b と外層用の銅箔 1 7を積層する。 このレイアツプした絶縁 材料を加熱 · 加圧し成形プレスし、 第 2図 Bに示すような 4層コア基板 1 3、 プ リ プレグ 1 4 , 1 6、 銅箔 1 5, 1 7から成る 6層板を形成す る。 ここで、 プリプレグ 1 4, 1 6は Sガラス繊維あるいは Eガラス繊 維から成るガラスクロスを有する膜厚が 0 . 0 3 m m以上のエポキシ樹 脂材料あるいは B Tレジンから成る。 また、 銅箔 1 5 , 1 7の膜厚は任 意である。 Next, as shown in FIG. 1D, a third wiring pattern 11 is formed by selectively etching the copper foil 7 using a resist mask formed by a known photolithography technique. In the exposure and transfer process of the photolithography technology, since the reference hole 9 can be used as a mask alignment mark to perform alignment with the photomask, the third wiring pattern 11 is different from the first wiring pattern 3. Positioning can be performed with high accuracy. The same can be said for patterns 4 and 12. In this way, a four-layer core substrate 13 having a wiring pattern with high accuracy of alignment between the layers is formed. Next, as shown in Figs. 2A and 2B, the mass lamination method was used again. And laminate molding. Here, your material is the four-layer core substrate 13. Two prepregs 14 a and 14 b and a copper foil 15 for the outer layer are laminated on the surface of the four-layer core substrate 13, and two prepregs are also provided on the back surface of the four-layer core substrate 13. 16 a, 16 b and copper foil 17 for the outer layer are laminated. This laid-up insulating material is heated and pressed to form and press, and as shown in Fig. 2B, a six-layer board consisting of a four-layer core substrate 13, prepregs 14, 16 and copper foils 15, 17 To form Here, the prepregs 14 and 16 are made of an epoxy resin material or a BT resin having a glass cloth made of S glass fiber or E glass fiber and having a thickness of 0.03 mm or more. The thickness of the copper foils 15 and 17 is arbitrary.
次に、 第 2図 Cにおいて、 位置決めパターン 3 bあるいは 4 bを位置 基準にした ド リル加工を行い、 第 1配線パターン 3、 第 2配線パターン 4、 第 3酉己線パターン 1 1、 第 4配線パターン 1 2および銅箔 1 5 , 1 7を貫通するスルーホール 1 8 を形成する。 そして、 膜厚数/ m〜数十 〃mの銅メ ツキを行った後に、 フォ ト リソグラフィ技術の露光転写にお いて上記スルーホール 1 8 を基準にフォ トマスクとのマスク合わせを行 い、 第 1酉己線パターン 3、 第 2配線パターン 4、 第 3配線パターン 1 1 、 第 4配線パターン 1 2 に位置合わせした第 5配線パターン 1 9、 第 6 配線パターン 2 0を形成する。 その後の工程で、 ソルダーレジス トを用 いた表面処理等を施し、 6層貫通スルーホールを有する 6層プリ ン ト配 線板を完成させる。 Next, in FIG. 2C, drilling is performed based on the positioning pattern 3b or 4b as a position reference, and the first wiring pattern 3, the second wiring pattern 4, the third wiring pattern 11 and the fourth wiring pattern 11 are formed. A through hole 18 penetrating the wiring pattern 12 and the copper foils 15 and 17 is formed. Then, after performing a copper plating with a film thickness of several m / s to several tens of m, a mask alignment with a photomask is performed based on the through hole 18 in the exposure transfer of the photolithography technology, (1) A fifth wiring pattern (19) and a sixth wiring pattern (20) aligned with the second wiring pattern (3), the second wiring pattern (4), the third wiring pattern (11), and the fourth wiring pattern (12) are formed. In the subsequent steps, surface treatment using a solder resist is performed to complete a 6-layer printed wiring board with 6-layer through-holes.
以上に 明したように、 本発明の第 1の大きな特徴は、 両面銅張積層 板から 2層コァ基板を形成し、 これをコア材にしてマスラミネーシヨ ン 方式による積層成形を施して 4層コア基板を形成し、 更にこの 4層コア 基板をコァ材にしたマスラ ミネ一シヨン方式による積層成形で 6層材と するように、 マスラ ミネーシヨ ン方式による積層成形を順次に適用し多 層化していく ところにある。 そして、 本発明の第 2の大きな特徴は、 各 層間の位置合わせをするために、 一番初期のコア材 (今の場合、 両面銅 張積層板から 2層コア基板) に位置決めパターンを設け、 この位置決め パターンを元にして位置合わせの基準穴を形成する点にある。 そして、 多層化する配線層は全て一番初期のコア材の表面に配置した位置決めパ ターンを通して位置合わせする点にある。 As described above, the first major feature of the present invention is that a two-layer core board is formed from a double-sided copper-clad laminate, and this is used as a core material to perform lamination molding by a mass lamination method to form a four-layer core board. The lamination molding by the mass lamination method is sequentially applied, such that the lamination molding by the mass lamination method using the four-layer core substrate as a core material to form a six-layer material. There is stratification. The second major feature of the present invention is that a positioning pattern is provided on an initial core material (in this case, a double-sided copper-clad laminate to a two-layer core substrate) in order to perform alignment between layers. The point is that a reference hole for alignment is formed based on this positioning pattern. The point is that all of the wiring layers to be multi-layered are positioned through the positioning pattern arranged on the surface of the core material at the earliest stage.
なお、 上記配線層間の位置合わせをする手法としては、 実施の形態で 示す以外にも種々の方法がある。 ここで、 上述した基準穴を用いること なく、 フォ ト リソグラフィ技術におけるフォ トマスク上パターンのフォ トレジス トへの露光転写で、 上記位置決めパターンを X線で検出するマ スク合わせマークとし、 直接にフォ トマスクとの位置合わせを行う方法 ¾ある。 Note that there are various methods for aligning the wiring layers, other than the method described in the embodiment. Here, without using the above-described reference holes, the above-mentioned positioning pattern is used as a mask alignment mark that is detected by X-rays by exposure transfer of the pattern on the photomask to the photo resist in the photolithography technology, and the photomask is directly used. There is a method of aligning the position.
本発明では、 従来の方法に比べて、 多層配線間の位置合わせの精度が 大幅に向上するようになる。 特に、 6層以上の配線層の形成において、 従来の方法に比較し上記の効果は顕著である。 また、 ガラスクロス入り 材料を内層板に用いることから、 積層成形において不均一に伸縮した基 板の塑性変形は大幅に低減し、 配線層を形成する工程での配線層間の位 置合わせにおいて位置ズレする領域が少なくなる。 このために、 多層プ リ ン ト配線板の製造歩留まりが向上する。 そして、 内層板の更なる薄膜 化が可能となる。 このようにして、 マスラミネ一シヨン方式での上述し たプリ ン ト配線板の多数個取り特有の効果も相まって、 多層プリン ト配 線板が容易に高密度化、 小型化でき、 しかも、 安価に量産製造できるよ うになる。 実施の形態 2 . According to the present invention, the accuracy of the alignment between the multilayer wirings is greatly improved as compared with the conventional method. In particular, in the formation of six or more wiring layers, the above effects are remarkable as compared with the conventional method. In addition, since the material containing glass cloth is used for the inner layer plate, the plastic deformation of the substrate that has been unevenly expanded and contracted in the lamination molding is greatly reduced, and misalignment occurs in the alignment between the wiring layers in the process of forming the wiring layer. Area to be reduced. Therefore, the production yield of the multilayer printed wiring board is improved. Then, the thickness of the inner layer plate can be further reduced. In this way, the multi-layer printed wiring board can be easily densified, miniaturized, and inexpensively combined with the above-described effect of the multi-printed wiring board in the mass lamination method. Mass production will be possible. Embodiment 2
第 3図と第 4図は実施の形態 2を説明するための製造工程順の断面図 である。 この実施の形態では 8層プリ ン ト配線板を形成する。 この場合も、 実施の形態 1で説明した 6層板 1 3 までは同様にして形 成する。 すなわち、 第 3図 Aに示す 6層板 2 1は、 実施の形態 1で説明 した第 2図 Bの 6層板 1 3 とほぼ同じである。 但し、 ここでは、 銅箔 1 5 , 1 7の膜厚は 2 0〃m程度と厚い。 また、 位置決めパターン 3 b , 4 bの更に内側に位置決めパターン 3 c, 4 cが形成されている。 そし て、 実施の形態 1 と同様にして、 銅箔 1 5上から X線で上記 6層板 2 1 を透視し、 位置決めパターン 3 aとは別種の位置決めパターン 3 bを検 出する。 そして、 第 3図 Bに示すように、 複数の位置決めパターン 3 b に位置合わせしてそれぞれ対応する基準穴 2 2 を形成する。 ここで、 位 置決めパターン 3 b , 4 bは、 上述した位置決めパターン 3 a , 4 a と 同一層に形成され、 6層板 2 1の周辺から離れた内部側に設けられる と よい。 FIG. 3 and FIG. 4 are cross-sectional views in the order of manufacturing steps for describing the second embodiment. It is. In this embodiment, an eight-layer printed wiring board is formed. In this case as well, up to the six-layer plate 13 described in the first embodiment is formed in the same manner. That is, the six-layer plate 21 shown in FIG. 3A is almost the same as the six-layer plate 13 of FIG. 2B described in the first embodiment. However, here, the thickness of the copper foils 15 and 17 is as thick as about 20 μm. Further, positioning patterns 3c, 4c are formed further inside positioning patterns 3b, 4b. Then, in the same manner as in the first embodiment, the above-mentioned six-layer plate 21 is seen through the copper foil 15 with X-rays, and a positioning pattern 3b different from the positioning pattern 3a is detected. Then, as shown in FIG. 3B, the reference holes 22 are respectively formed by aligning the plurality of positioning patterns 3b. Here, the positioning patterns 3b and 4b are preferably formed on the same layer as the above-described positioning patterns 3a and 4a, and provided on the inner side away from the periphery of the six-layer plate 21.
上述したように、 マスラミネーシヨン方式での積層成形において、 内 層板あるいは配線板は、 加熱あるいは加圧によ り不均一に伸縮した塑性 変形をする。 そし七、 このような変形は、 配線板を多層化していく に従 い増大し、 特に配線板の周辺に近いほど大きくなる。 そこで、 配線層間 の位置合わせにおいて、 絶縁基板の周辺側に配置する位置決めパターン 3 a , 4 aよ り も周辺から離れて配置した位置決めパターン 3 b、 4 b を使用すれば、 上記変形の位置合わせへの影響を低減することができる ようになるからである。 As described above, in lamination molding using the mass lamination method, the inner layer board or the wiring board undergoes plastic deformation that is unevenly expanded and contracted by heating or pressing. Furthermore, such deformation increases as the wiring board is multi-layered, and particularly increases nearer the periphery of the wiring board. Therefore, when the positioning patterns 3b and 4b arranged farther from the periphery than the positioning patterns 3a and 4a arranged on the peripheral side of the insulating substrate are used in the alignment between the wiring layers, the above-described deformation alignment is achieved. This is because the effect on the environment can be reduced.
後は、 第 1図 Dで説明したのと同様に上記基準穴 2 2 を基準にしたフ オ トマスクとのマスク合わせを行い、 第 3図 Cに示すように、 銅箔 1 5 をエッチングし第 5配線パターン 2 4を形成する。 同様に上記基準穴 2 2 を基準にしたフォ トマスクとのマスク合わせを行い、 銅箔 1 7をエツ チングし第 6配線パ夕一ン 2 5を形成する。 このようにして、 各層間で 互いに位置合わせ精度の高い配線パターンを有する 6層コア基板 2 6 を 形成する。 After that, in the same manner as described with reference to FIG. 1D, the mask is aligned with the photomask based on the reference hole 22 and the copper foil 15 is etched as shown in FIG. 3C. 5 Form a wiring pattern 24. Similarly, a mask is aligned with a photomask based on the reference hole 22, and the copper foil 17 is etched to form a sixth wiring pattern 25. In this way, between each layer A six-layer core substrate 26 having wiring patterns with high alignment accuracy is formed.
次に、 第 4図 A、 Bに示すように再びマスラ ミネーシヨン方式を用い て積層成形する。 ここで、 コア材は 6層コア基板 2 6 となる。 以後のェ 程は第 2図で説明したのと同様である。 すなわち、 6層コア基板 2 6上 にプリプレグ 2 7 a , 2 7 b と外層用の銅箔 2 8を積層し、 その裏面に プリプレグ 2 9 a , 2 9 b と外層用の銅箔 3 0を積層する。 そして、 成 形プレスし 6層コァ基板 2 6、 プリ プレグ 2 7, 2 9、 銅箔 2 8 , 3 0 から成る 8層板を形成する。 ここで、 プリプレグ 2 7 , 2 9は Sガラス 繊維あるいは Eガラス繊維から成るガラスクロスを有する膜厚が 0 . 0 3 m m以上のェポキシ樹脂材料あるいは B Tレジンから成る。 そして、 銅箔 2 8, 3 0の膜厚は任意である。 Next, as shown in FIGS. 4A and 4B, the laminate is formed again using the mass lamination method. Here, the core material is a six-layer core substrate 26. The subsequent steps are the same as those described in FIG. That is, the prepregs 27a and 27b and the copper foil 28 for the outer layer are laminated on the six-layer core substrate 26, and the prepregs 29a and 29b and the copper foil 30 for the outer layer are laminated on the back surface. Laminate. Then, forming and pressing are performed to form an eight-layer plate including a six-layer core substrate 26, prepregs 27 and 29, and copper foils 28 and 30. Here, the prepregs 27 and 29 are made of an epoxy resin material having a glass cloth made of S glass fiber or E glass fiber and having a thickness of not less than 0.03 mm or BT resin. The thickness of the copper foil 28, 30 is arbitrary.
そして、 第 4図 Cにおいて、 位置決めパターン 3 cあるいは 4 cを位 置基準にした ド.リル加工を行い、 第 1配線パターン 3、 第 2配線パター ン 4、 第 3配線パターン 1 1、 第 4配線パターン 1 2、 第 5配線パター ン 2 4、 第 6配線パターン 2 5および銅箔 2 8 , 3 0 を貫通するスルー ホール 3 1 を形成する。 そして、 膜厚数/ m〜数十〃 mの銅メ ツキを行 つた後に、 フォ ト リソグラフィ技術の露光転写において上記スル一ホー ル 3 1 を基準にフォ トマスクとのマスク合わせを行い、 第 1配線パ夕一 ン 3、 第 2配線パ夕一ン 4、 第 3配線パターン 1 1、 第 4配線パターン 1 2、 第 5配線パターン 2 4、 第 6配線パターン 2 5 に位置合わせした 第 7配線パターン 3 2、 第 8配線パターン 3 3を形成する。 このよう に して、 8層貫通スルーホールを有する 8層プリ ン ト配線板を完成させる 以上に説明したように、 本発明の別の特徴は、 各層間の位置合わせを するために、 一番初期のコア材 (今の場合、 両面銅張積層板から 2層コ ァ基板) に複数種の位置決めパターンを配置して設け、 コア材が多層に なると共に使用する位置決めパターンとして上記初期のコア材の周辺か ら内側に配置したものを順次に用いていく点にある。 Then, in FIG. 4C, drilling is performed based on the positioning pattern 3c or 4c as a position reference, and the first wiring pattern 3, the second wiring pattern 4, the third wiring pattern 11, and the fourth wiring pattern are formed. A through hole 31 penetrating through the wiring pattern 12, the fifth wiring pattern 24, the sixth wiring pattern 25, and the copper foils 28, 30 is formed. Then, after performing a copper plating with a film thickness of several m / s to several tens of m, a mask alignment with a photomask is performed based on the above-mentioned through hole 31 in the exposure transfer of the photolithography technology, and the first Wiring pattern 3, 2nd wiring pattern 4, 3rd wiring pattern 11, 4th wiring pattern 12, 5th wiring pattern 24, 7th wiring aligned with 6th wiring pattern 25 The pattern 32 and the eighth wiring pattern 33 are formed. In this way, an eight-layer printed wiring board having eight through-holes is completed. As described above, another feature of the present invention is that the alignment between the layers is most important. Initial core material (in this case, double-layer copper clad laminate A plurality of types of positioning patterns are arranged and provided on a substrate, and the core material becomes multilayered and the positioning patterns used from the periphery of the above-mentioned initial core material are used sequentially as the positioning patterns to be used. .
通常、 多層プリ ン ト配線板を多層化していく に従い配線板の上述した ような変形が増大するが、 本発明では、 配線層間の位置合わせにおいて 、 上記多層化に合わせて絶縁基板の周辺から内側に配置する位置決めパ ターンを順次に使用することで、 上記変形の影響が低減し、 本発明の多 層プリ ン ト配線板の製造歩留ま りが向上する。 実施の形態 3 . Usually, as the multilayer printed wiring board is multi-layered, the above-mentioned deformation of the wiring board increases. However, in the present invention, in positioning between the wiring layers, the inside of the insulating substrate is adjusted from the periphery of the insulating substrate in accordance with the multilayering. By sequentially using the positioning patterns to be arranged at the same time, the influence of the deformation is reduced, and the production yield of the multilayer printed wiring board of the present invention is improved. Embodiment 3.
第 5図と第 6図は実施の形態 3を説明するための製造工程順の断面図 である。 この実施の形態は、 複数の貫通するスルーホールと 1段ビル ド アップ構造の 8層プリ ン ト配線板とその製造方法について説明する。 第 5図 Aは、 実施の形態 1で説明した第 2図 Cのものと同じものであ り、 これを 6層コア基板 4 1 とする。 そして、 6層コア基板 4 1 を内層 板にしてコア材としたマスラ ミネーショ ン方式で積層成形する。 ここで 、 図示しないが、 レイアップ段階でのプリ プレグは Sガラス繊維あるい は Eガラス繊維からなるガラスクロスを有するェポキシ樹脂材料および B Tレジンであり、 イ ンナーバイァホール 1 8内にも充填する。 このよ うにして、 第 5図 Bに示すように、 6層コア基板 4 1 を挟みイ ンナ一バ ィァホール 1 8を埋めるプリプレグ 4 2 , 4 3、 外層用の銅箔 4 4, 4 5 を積層成形した 8層板を形成する。 ここで、 銅箔 4 4 , 4 5の膜厚は 任意であり、 プリプレグ 4 2 , 4 3の膜厚は、 それそれ 0 . 0 3 m m以 上である。 FIG. 5 and FIG. 6 are cross-sectional views in the order of the manufacturing steps for explaining the third embodiment. In this embodiment, an 8-layer printed wiring board having a plurality of through holes, a one-stage build-up structure, and a method of manufacturing the same will be described. FIG. 5A is the same as that of FIG. 2C described in the first embodiment, which is referred to as a six-layer core substrate 41. Then, the six-layer core substrate 41 is used as an inner layer plate and laminated by a mass lamination method using a core material. Here, although not shown, the prepreg in the lay-up stage is an epoxy resin material having a glass cloth made of S glass fiber or E glass fiber and BT resin, and is also filled in the inner via hole 18. I do. In this way, as shown in Fig. 5B, the prepregs 42, 43, which fill the inner via hole 18, sandwiching the six-layer core substrate 41, and the copper foils 44, 45 for the outer layer are formed. An eight-layer plate formed by lamination is formed. Here, the thickness of the copper foils 44 and 45 is arbitrary, and the thickness of the prepregs 42 and 43 is not less than 0.03 mm.
次に、 第 6図 Aに示すように、 位置決めパターン 3 bあるいは 4 bを 位置基準にした ド リル加工を行い、 銅箔 4 4 , 4 5および内層の配線パ ターンを貫通するスルーホール 4 6 を形成する。 そして、 第 6図 Bに示 すように、 スルーホール 4 6 を基準にした位置合わせを用いて、 第 5配 線パターン 1 9 aおよび第 6配線パターン 2 0 aにそれそれ達するよう に、 プリプレグ 4 2 , 4 3にそれそれのビルドアップ用ビアを設ける。 その後に、 膜厚数 m〜数十/ mの銅メ ツキを施す。 そして、 フォ ト リ ソグラフィ技術の露光転写において上記スルーホール 4 6 を基準にフォ トマスクとのマスク合わせを行い、 第 1配線パターン 3、 第 2配線パ夕 —ン 4、 第 3配線パターン 1 1、 第 4配線パターン 1 2、 第 5配線パ夕 ーン 1 9、 第 6配線パターン 2 0に位置合わせした第 7配線パターン 4 7、 第 8配線パターン 4 8を形成する。 また、 第 5配線パターン 1 9 a から ビル ドァヅプする第 7配線パターン 4 7 a、 第 6配線パ夕一ン 2 0 aからビル ドアヅ プする第 8配線パターン 4 8 aをそれそれに形成する 。 このようにして、 複数の貫通するスルーホールと 1段ビル ドアップを 有する構造の 8層プリ ン ト配線板が完成する。 Next, as shown in Fig. 6A, a drilling process is performed with the positioning pattern 3b or 4b as a position reference, and the copper foils 44, 45 and the inner layer wiring pattern are drilled. Form a through hole 4 6 through the turn. Then, as shown in FIG. 6B, using the alignment based on the through hole 46, the prepreg is moved to reach the fifth wiring pattern 19a and the sixth wiring pattern 20a, respectively. 4 2 and 4 3 are provided with respective vias for build-up. Thereafter, copper plating with a film thickness of several m to several tens / m is applied. Then, in the exposure transfer of the photolithography technology, the mask is aligned with the photomask based on the through hole 46, and the first wiring pattern 3, the second wiring pattern 4, the third wiring pattern 11, A seventh wiring pattern 47 and an eighth wiring pattern 48 aligned with the fourth wiring pattern 12, the fifth wiring pattern 19, and the sixth wiring pattern 20 are formed. Also, a seventh wiring pattern 47a, which builds up from the fifth wiring pattern 19a, and an eighth wiring pattern 48a, which builds up from the sixth wiring pattern 20a, are formed thereon. In this way, an eight-layer printed wiring board having a structure having a plurality of through holes and a one-stage build-up is completed.
このようにして、 本発明では多層化した配線間のスルーホールを通し た接続あるいは配線間のビル ドアツプ形成が容易になり、 多層プリ ン ト 配線板の更なる高密度化ノ小型化が低コス トに形成できる。 また、 配線 層間の高い位置合わせ精度を有する多層プリ ン ト配線板が低コス トに製 造できるようになり、 携帯電話のような携帯機器の小型化および低コス ト化が大幅に進展する。 In this manner, in the present invention, it is easy to connect through the through holes between the multi-layered wirings or to form a gap between the wirings, and it is possible to further increase the density and miniaturization of the multi-layer printed wiring board with low cost. Can be formed. In addition, multilayer printed wiring boards having high alignment accuracy between wiring layers can be manufactured at low cost, and the miniaturization and cost reduction of portable devices such as mobile phones will be greatly advanced.
本発明の実施の形態は、 マスラミネーション方式の積層成形において 、 コア材の上下にそれそれ 2枚のプリ プレダをレイアップしているが、 この数に制約されるものではない。 また、 本発明は、 チップ · サイズ - パッケージ ( C S P ) に用いるイ ン夕一ポーザーの形成にも同様に適用 できる。 産業上の利用可能性 . 以上のように、 この発明に係る多層プリン ト配線板は、 その高密度化 /小型化および低コス ト化を共に可能にする。 そして、 パーソナル化し た高度な電子機器や通信機器に使用する安価な多層プリン ト配線板を提 供する。 In the embodiment of the present invention, in the lamination molding of the mass lamination method, two pre-predas are laid up and down on the core material respectively, but the number is not limited. Further, the present invention can be similarly applied to formation of an instantaneous poser used for a chip size-package (CSP). INDUSTRIAL APPLICABILITY As described above, the multilayer printed wiring board according to the present invention enables both high density / miniaturization and low cost. We will also provide inexpensive multilayer printed wiring boards for use in advanced personalized electronic and communication equipment.
Claims
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2003/011937 WO2005029933A1 (en) | 2003-09-18 | 2003-09-18 | Multilayer printed wiring board and method for manufacturing same |
| TW092128979A TW200513158A (en) | 2003-09-18 | 2003-10-20 | Multilayer printed wiring board and method for manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2003/011937 WO2005029933A1 (en) | 2003-09-18 | 2003-09-18 | Multilayer printed wiring board and method for manufacturing same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2005029933A1 true WO2005029933A1 (en) | 2005-03-31 |
Family
ID=34362494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2003/011937 Ceased WO2005029933A1 (en) | 2003-09-18 | 2003-09-18 | Multilayer printed wiring board and method for manufacturing same |
Country Status (2)
| Country | Link |
|---|---|
| TW (1) | TW200513158A (en) |
| WO (1) | WO2005029933A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2016010083A1 (en) * | 2014-07-18 | 2017-04-27 | 三菱瓦斯化学株式会社 | LAMINATE, SEMICONDUCTOR DEVICE MOUNTING SUBSTRATE, AND METHOD FOR PRODUCING THEM |
| CN117545198A (en) * | 2024-01-10 | 2024-02-09 | 深圳市众阳电路科技有限公司 | Method and system for producing multilayer printed circuit board |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5516479B2 (en) * | 1974-04-15 | 1980-05-02 | ||
| JPH02197192A (en) * | 1989-01-26 | 1990-08-03 | Toshiba Corp | Manufacture of multi-board multilayer printed wiring board |
| JPH0327595A (en) * | 1989-06-23 | 1991-02-05 | Toshiba Chem Corp | Formation of reference hole in multilayer laminated board |
| JPH05206652A (en) * | 1992-08-31 | 1993-08-13 | Hitachi Ltd | Machining method for multilayer printed board |
| JP2002329964A (en) * | 2001-04-27 | 2002-11-15 | Mitsubishi Paper Mills Ltd | Manufacturing method of multilayer printed wiring board |
-
2003
- 2003-09-18 WO PCT/JP2003/011937 patent/WO2005029933A1/en not_active Ceased
- 2003-10-20 TW TW092128979A patent/TW200513158A/en unknown
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5516479B2 (en) * | 1974-04-15 | 1980-05-02 | ||
| JPH02197192A (en) * | 1989-01-26 | 1990-08-03 | Toshiba Corp | Manufacture of multi-board multilayer printed wiring board |
| JPH0327595A (en) * | 1989-06-23 | 1991-02-05 | Toshiba Chem Corp | Formation of reference hole in multilayer laminated board |
| JPH05206652A (en) * | 1992-08-31 | 1993-08-13 | Hitachi Ltd | Machining method for multilayer printed board |
| JP2002329964A (en) * | 2001-04-27 | 2002-11-15 | Mitsubishi Paper Mills Ltd | Manufacturing method of multilayer printed wiring board |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2016010083A1 (en) * | 2014-07-18 | 2017-04-27 | 三菱瓦斯化学株式会社 | LAMINATE, SEMICONDUCTOR DEVICE MOUNTING SUBSTRATE, AND METHOD FOR PRODUCING THEM |
| US10964552B2 (en) | 2014-07-18 | 2021-03-30 | Mitsubishi Gas Chemical Company, Inc. | Methods for producing laminate and substrate for mounting a semiconductor device |
| CN117545198A (en) * | 2024-01-10 | 2024-02-09 | 深圳市众阳电路科技有限公司 | Method and system for producing multilayer printed circuit board |
| CN117545198B (en) * | 2024-01-10 | 2024-05-07 | 深圳市众阳电路科技有限公司 | Method and system for producing multilayer printed circuit board |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200513158A (en) | 2005-04-01 |
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