WO2005069364A1 - Mounted board, electronic component mounting method, electronic component, and wiring board - Google Patents
Mounted board, electronic component mounting method, electronic component, and wiring board Download PDFInfo
- Publication number
- WO2005069364A1 WO2005069364A1 PCT/JP2005/000213 JP2005000213W WO2005069364A1 WO 2005069364 A1 WO2005069364 A1 WO 2005069364A1 JP 2005000213 W JP2005000213 W JP 2005000213W WO 2005069364 A1 WO2005069364 A1 WO 2005069364A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electronic component
- central portion
- substrate
- bumps
- wiring board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/325—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by abutting or pinching, i.e. without alloying process; mechanical auxiliary parts therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0364—Conductor shape
- H05K2201/0367—Metallic bump or raised conductor not used as solder bump
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0364—Conductor shape
- H05K2201/0373—Conductors having a fine structure, e.g. providing a plurality of contact points with a structured tool
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10621—Components characterised by their electrical contacts
- H05K2201/10674—Flip chip
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10954—Other details of electrical connections
- H05K2201/10977—Encapsulated connections
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- H10W72/01225—
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- H10W72/01251—
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- H10W72/07236—
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- H10W72/073—
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- H10W72/90—
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- H10W72/9415—
Definitions
- the present invention relates to a mounted board having an electronic component mounted on a wiring board, an electronic component mounting method for manufacturing the mounted board, an electronic component used for the mounted board, and a wiring board About.
- Patent Document 1 describes the following method as a method of manufacturing a mounted board by the NSD method.
- a non-conductive film made of thermosetting resin is adhered on the substrate electrode of the wiring board.
- the electronic component on which the stud bump, which is a ball bump with a sharp tip, is formed is pressed against the wiring substrate with a predetermined load from above the non-conductive film by aligning the bump with the substrate electrode.
- the non-conductive film is pushed away at the tip of the bump, so that the bump and the substrate electrode are electrically connected.
- the non-conductive film is heated and cured in this state, and the electronic component and the wiring board are mechanically joined by the adhesive force of the non-conductive film.
- Patent Document 2 discloses a mounting method in which an anisotropic conductive paste is interposed, in which a plurality of minute protrusions are formed at the tip of a bump, and the protrusions penetrate an oxide film on a substrate electrode and cut into the bumps. It is described that the reliability of the electrical contact can be improved by connecting with.
- Patent Document 1 International Publication No. 98Z30073 pamphlet
- Patent Document 2 Japanese Patent Application Laid-Open No. 11-111761
- the bumps and tips that are flattened by crushing the tip when handling electronic components are leveled in advance, that is, the tip of the bump is crushed to some extent and flattened.
- the tip of the bump is crushed to some extent and flattened.
- the distance for pressing the bump against the substrate electrode increases and the load for pressing the bump against the substrate electrode increases.
- Patent Document 2 since the bump of the electronic component and the board electrode of the wiring board are joined with a conductive paste interposed therebetween, even if the bump and the land do not directly contact each other, However, conduction between the two is possible. Therefore, it is not necessary to consider the problem of the decrease in the reliability of the electrical connection when the non-conductive resin is interposed as described above.
- the present invention has been made in order to solve the above-mentioned problems, and has a mounted board and an electronic component mounting that can improve the reliability of electrical connection between a bump of an electronic component and a substrate electrode of a wiring board. It is an object to provide a method, an electronic component, and a wiring board.
- the present invention is configured as follows.
- a mounted board on which electronic components are mounted the wiring board having a plurality of board electrodes formed thereon, and the board being electrically connected to the plurality of board electrodes, respectively.
- An electronic component having a plurality of bumps formed thereon, and at least the plurality of A non-conductive resin for adhering the wiring board and the electronic component around the bumps, wherein a bonding region between each tip of the plurality of bumps and the substrate electrode facing the tip is There are a plurality of contact areas where the tip and the substrate electrode are in contact with each other, and a resin interposed area where the non-conductive resin is interposed around the plurality of contact areas.
- the plurality of contact regions may be regions where a plurality of protrusions formed at the tips of the plurality of bumps are crushed.
- the plurality of contact regions may be regions where a plurality of protrusions formed on the substrate electrode are crushed.
- the contact region may be formed densely at a central portion of the joining region, and may be formed coarser at a peripheral portion as compared with the central portion.
- the resin intervening region may extend radially from a central portion to a peripheral portion of the bonding region.
- the contact region may be formed in a staggered shape at a center portion of the bonding region, which is coarser at a peripheral portion than at the central portion. .
- the non-conductivity from the joining region is Considering the drainage of resin, it is preferable that the contact area is formed densely at the center of the joining area and coarsely at the peripheral edge.
- the reliability of the electrical connection is improved when the contact area is closer at the periphery of the bonding area.
- the countermeasures are inconsistent between the case where the non-conductive resin is discharged from the joint region and the case where the bump and the substrate electrode are misaligned.
- the bonding area is formed in a staggered shape, so that a non-conductive area is formed as compared with the case where the bonding area is formed randomly. Resin drainage can be improved. Therefore, the reliability of the electrical connection between the bump and the substrate electrode can be improved while considering the displacement between the bump and the substrate electrode.
- the mounted board according to the second aspect of the present invention is a mounted board on which electronic components are mounted
- a wiring board on which a plurality of board electrodes are formed
- An electronic component having a plurality of bumps electrically connected to the plurality of substrate electrodes, respectively.
- the contact area between each tip of the plurality of bumps and the substrate electrode facing the tip is a plurality of contact areas where the tip contacts the substrate electrode, and a non-contact area around the plurality of contact areas.
- the contact region can be formed densely at the central portion and coarser at the peripheral portion than at the central portion, and conversely, coarser at the central portion.
- the peripheral portion can be formed denser and staggered than the central portion.
- the resin intervening region may extend radially from the central portion toward the peripheral portion.
- An electronic component mounting method is an electronic component mounting method for mounting an electronic component on a wiring board, wherein each of the plurality of board electrodes formed on the wiring board has Forming a plurality of projections on each of the plurality of bumps formed on the electronic component, applying a non-conductive resin having adhesive property at least around the plurality of substrate electrodes, and applying the electronic component to the wiring board.
- the plurality of bumps are electrically connected to the plurality of substrate electrodes by pressing and curing the non-conductive resin.
- the protrusions when the plurality of protrusions are formed, the protrusions may be formed densely at a central portion of the bump or the substrate electrode, and may be formed coarsely at a peripheral portion as compared with the central portion. Alternatively, conversely, the protrusions may be formed densely in the central portion and in a staggered manner in the peripheral portion compared to the central portion.
- an electronic component is an electronic component mounted on a wiring board, wherein the component main body of the electronic component having a plurality of component electrodes and a non-conductive non-conductive material having an adhesive property.
- the maximum height Ry of the protrusion may be not less than 2 ⁇ m and not more than 15 m.
- the bump-formed surface of the bump may be convex toward the substrate electrode.
- the bumps may be formed densely at the center of the bump-formed surface of the bumps, and may be formed coarser at the periphery than at the center, or conversely, at the center.
- the portion may be formed denser and staggered than the central portion.
- the electronic component according to the fifth aspect of the present invention is an electronic component mounted on a wiring board.
- a component body of the electronic component having a plurality of component electrodes,
- Each of the plurality of bumps includes a plurality of protrusions on the uneven surface at the tip end,
- the protrusions have different formation densities at a central portion and a peripheral portion of the unevenness forming surface.
- the protrusion may be formed densely at the central portion and coarser at the peripheral portion than at the central portion. Conversely, the protrusion may be coarser at the central portion.
- the peripheral portion may be formed denser and staggered than the central portion.
- a wiring board according to a sixth aspect of the present invention is a wiring board for mounting an electronic component, wherein a plurality of wiring boards formed on the electronic component while sandwiching a non-conductive resin having an adhesive property with a substrate body are provided. And a plurality of substrate electrodes formed to be electrically connected to the bumps, and each of the plurality of substrate electrodes has a plurality of protrusions on the electrode surface.
- the maximum height Ry of the protrusion on the electrode surface may be not less than 2 ⁇ m and not more than 15 ⁇ m.
- the protrusion may be formed densely at a central portion of the electrode surface, and may be formed coarser at a peripheral portion as compared with the central portion.
- the peripheral portion may be formed densely and in a staggered shape as compared with the central portion.
- the wiring board according to a seventh aspect of the present invention is a wiring board for mounting electronic components, wherein:
- Each of the plurality of substrate electrodes includes a plurality of protrusions on the electrode surface
- the protrusions have different formation densities at a central portion and a peripheral portion of the surface.
- the protrusions may be formed densely at the central portion, and may be formed coarser at the peripheral portion than at the central portion.
- the perimeter The portion may be formed densely and in a staggered shape as compared with the central portion.
- the present invention since a plurality of contact regions and resin interposed regions are formed in the bonding region, the reliability of electrical connection between the bumps of the electronic component and the substrate electrodes of the wiring board is improved. However, a mounted board can be obtained.
- FIG. 1 is a flowchart showing a flow of mounting electronic components according to the first embodiment.
- FIG. 2 is a cross-sectional view showing a state in which bumps are formed on component electrodes of the component body.
- FIG. 3 is a cross-sectional view showing a state in which a mold is positioned on the bumps of the component body.
- FIG. 4 is a cross-sectional view showing a state where the mold is pressed against the bumps of the component body.
- FIG. 5 is a cross-sectional view showing a state where a plurality of protrusions are formed on the bumps of the component body
- FIG. 6 is a perspective view showing an uneven surface of a mold.
- FIG. 7 is a cross-sectional view showing a state in which non-conductive resin is applied to substrate electrodes of the wiring board.
- FIG. 8 is a cross-sectional view of a mounted board in which electronic components are mounted on the wiring board. Sectional view showing the configuration
- FIG. 9 is a plan view showing a contact area between a bump of an electronic component and a board electrode of a wiring board.
- FIG. 10 is a plan view showing another example of a contact area between a bump of an electronic component and a board electrode of a wiring board,
- FIG. 11 is a cross-sectional view showing a state where a bump having a sharp tip is displaced and is not sufficiently in contact with a substrate electrode.
- FIG. 12 is a cross-sectional view showing a state in which bumps having irregularities at the tips are displaced and are in contact with substrate electrodes.
- FIG. 13 is a cross-sectional view showing a state where a mold is positioned on a substrate electrode of a wiring board according to the second embodiment of the present invention.
- FIG. 14 is a cross-sectional view showing a state where a mold is pressed against a substrate electrode of a wiring board
- FIG. 15 is a cross-sectional view showing a configuration of the wiring board in a state where a plurality of protrusions are formed on the substrate electrode of the wiring board.
- FIG. 16 is a cross-sectional view showing a state in which a non-conductive resin is applied on the substrate electrode of the wiring board.
- FIG. 17 is a cross-sectional view showing a configuration of a mounted board in a state where electronic components are mounted on a wiring board.
- FIG. 18 is a modified example of the cross-sectional view shown in FIG. 5, showing a state in which a plurality of protrusions are formed on a bump having a convex-concave surface.
- FIG. 19 is a plan view showing another example of a contact area between a bump of an electronic component and a board electrode of a wiring board.
- FIG. 20 is a plan view showing still another example of a contact region between a bump of an electronic component and a board electrode of a wiring board;
- FIG. 21 is a plan view showing still another example of a contact region between a bump of an electronic component and a board electrode of a wiring board,
- FIG. 22 is a view corresponding to FIG. 19, showing the roughness and density of bumps and bumps formed on a substrate electrode,
- FIG. 23 is a view corresponding to FIG. 21, and is a view showing the roughness and density of bumps and bumps formed on a substrate electrode.
- FIG. 1 is a flowchart showing a flow of mounting an electronic component according to the first embodiment of the present invention, and includes a bump forming step which is a part of a manufacturing process of the electronic component.
- FIGS. 2 to 5 are views for explaining a state in which a plurality of projections are formed on bumps in a process of manufacturing an electronic component.
- step S11 a plurality of bumps 13 are formed on a plurality of component electrodes 12 formed on the component body 11, as shown in FIG.
- the component body 11 is a semiconductor bare chip, and the component electrode 12 is formed of aluminum.
- the bumps 13 are ball bumps with sharp tips, so-called stud bumps, which are formed by melting the tip of a gold wire by electric discharge, crimping the melted portion to the component electrode, and tearing the gold wire from the crimped portion. You.
- the tip 13 of the bump 13 formed in this manner is sharpened by tearing the gold wire.
- irregularities including a plurality of projections are formed on each of the tip portions 131 of the bumps 13 formed on the component body 11. As shown in FIG.
- the unevenness of the tip 131 is determined by positioning the uneven surface 81 of the mold 80 for forming the unevenness toward the tip 131 of the bump 13 on the component electrode 12 as shown in FIG. After pressing the surface 81 against the tip 131, the mold 80 is released to form the structure as shown in FIG. Thereby, the manufacture of the electronic component 10 with bumps for mounting is completed.
- FIG. 6 is a perspective view showing an uneven surface 81 of the mold 80.
- the mold 80 is formed of stainless steel, and as shown in FIG. 6, the uneven surface 81 has a large number of projections and depressions 82.
- the unevenness 82 can take various shapes such as a pyramid and a cone, and is not particularly limited. Further, a plurality of types of irregularities 82 may be mixed on one irregular surface 81.
- the concave-convex surface 81 has irregularities 82 formed at random by rubbing the surface of stainless steel with sandblast. Note that regular irregularities 82 may be formed by etching or the like.
- the portion of the bump 13 that contacts the component body 11 has a diameter of about 80 m, and the tip 131 has a diameter of about 40 m. Therefore, in order to form several or dozens of irregularities 82 according to the size of the tip 131, as shown in FIG. 5, the maximum height Ry of the surface roughness of the tip 131 is set as shown in FIG. It is more preferably from 2 ⁇ m to 15 ⁇ m, and still more preferably from 5 ⁇ m to 10 ⁇ m. Therefore, the maximum height of the surface roughness of the uneven surface 81 of the mold 80 is also 2 ⁇ m or more and 15 ⁇ m or less, preferably 5 ⁇ m or more and 10 ⁇ m or less. Then, by pressing the uneven surface 81 of the mold 80 against the tip 131 of the bump 13, the tip 131 has the preferable surface roughness.
- the surface roughness is preferably set to 5 ⁇ m or more and 10 ⁇ m or less, because the non-conductive resin interposed between the bump 13 and the substrate electrode 22 is used as described later.
- the above-mentioned surface roughness is also a force for improving the escape of the non-conductive resin 30 at the time of joining.
- the electronic component 10 includes the component body 11 having the plurality of component electrodes 12 and the plurality of bumps 13 formed on the plurality of component electrodes 12 of the component body 11.
- each of the plurality of bumps 13 has an unevenness 132 at the tip 131.
- a plurality of protrusions of the unevenness 132 of the tip 131 Used for electrical connection with the board.
- FIG. 7 and FIG. 8 are cross-sectional views showing how the electronic component 10 is mounted on the wiring board 20.
- the wiring board 20 having the board electrodes 22 formed on the board body 21 is prepared.
- an epoxy resin which is an adhesive thermosetting resin having a bonding property, is applied as a non-conductive resin 30 on the substrate electrode 22 at least around the substrate electrode 22.
- the substrate body 21 is formed of glass epoxy resin or polyimide resin, and the substrate electrode 22 is formed of copper as a part of a wiring pattern (not shown) formed on the substrate body 21. .
- the electronic component 10 and the board main body 21 are positioned so that the tip 131 of the bump 13 of the electronic component 10 can come into contact with the board electrode 22 of the wiring board 20.
- the electronic component 10 is pressed against the wiring board 20 with a predetermined load.
- the plurality of projections of the unevenness 132 of the tip 131 are pushed away while sandwiching the non-conductive resin 30 and come into contact with the substrate electrode 22, and are crushed to some extent on the surface of the substrate electrode 22, and It is electrically connected to.
- the electronic component 10 is heated, and the non-conductive resin 30 is hardened (Step S22).
- FIG. 9 is a plan view showing a bonding region 53 at a contact interface between the tip 131 of the bump 13 and the substrate electrode 22.
- a bonding region 53 at a contact interface between the tip 131 of the bump 13 and the substrate electrode 22.
- FIGS. 8 and 9 between the tip 131 of the bump 13 and the substrate electrode 22, there are a plurality of contact areas 51 where the tip 131 and the substrate electrode 22 are in contact, and a plurality of contact areas 51.
- a resin intervening region 52 in which the non-conductive resin 30 intervenes.
- the contact region 51 is a region where the plurality of protrusions 133 formed on the tip 131 of the bump 13 are crushed, and is a region where the bump 13 and the substrate electrode 22 are electrically connected.
- the contact regions 51 are regularly scattered in the resin intervening region 52 as illustrated in FIG.
- the non-conductive resin 30 slightly shrinks during curing, the non-conductive resin 30 is interposed between the component main body 11 and the substrate main body 21 and at the same time as the tip 131 of the bump 13 By interposing also in the resin interposed area 52 between the substrate electrode 22 and the non-conductive resin 30, The electronic component 10 and the wiring board 20 are mechanically joined by the adhesive force, and the bumps 13 and the board electrodes 22 are attracted to each other to be surely electrically connected.
- the mounted substrate 40 manufactured through the above steps is electrically connected to the wiring substrate 20 on which the plurality of substrate electrodes 22 are formed and the plurality of substrate electrodes 22 of the wiring substrate 20.
- the region between the tip 131 of the bump 13 and the corresponding substrate electrode 22 includes a plurality of contact regions 51 and a resin interposition region 52 around which the non-conductive resin 30 is interposed.
- the bump 13 and the substrate electrode 22 are formed by forming the plurality of protrusions 133 at the tip 131 of the bump 13 of the electronic component 10.
- the non-conductive resin 30 is prevented from being caught almost all over the contact surface of the electronic component 10, and the reliability of the electrical connection between the bump 13 of the electronic component 10 and the substrate electrode 22 of the wiring substrate 20 is improved.
- the non-conductive resin 30 intervenes around the plurality of contact regions 51 and the resin-intervening region 52 exists, the shrinkage of the non-conductive resin 30 during hardening causes the bump 13 and the substrate electrode 22 to contact each other. Are reliably attracted to each other.
- the reliability of the electrical connection between the bump 13 and the substrate electrode 22 is further improved. Further, the plurality of protrusions 133 formed on the tip 131 of the bump 13 are crushed, so that the tip 131 and the substrate electrode 22 come into contact with each other in a large area, and thereby, the contact between the bump 13 and the substrate electrode 22 is formed. The reliability of the electrical connection is further improved. Furthermore, the load at the time of mounting and the amount of crushing of the tip can be reduced as compared with the case where the tip of the bump 13 is sharp at one point.
- the tip of the bump 13 is sharp at one point, as shown in FIG. 11, when the bump 13 and the substrate electrode 22 are displaced by a distance 60 and the tip comes off the substrate electrode 22, The tip of the bump 13 is bent so as to fall off from the substrate electrode 22, and the bump 13 is not sufficiently contacted. That is, when the projection of the tip 131 is crushed to secure a contact area, the tip needs to be placed on the upper surface of the substrate electrode 22. Such poor contact is particularly remarkable when the wiring board 20 has flexibility.
- the tip portion 131 of the bump 13 has the unevenness 132 as in the electronic component 10 according to the first embodiment, as shown in FIG.
- the area at the tip of the bump 13 is reduced to one place by the formation of the unevenness 132. Since it is larger than the case where it is sharp, a part of the tip portion 131 is surely in contact with the surface of the substrate electrode 22, and the electrical connection between the bump 13 and the substrate electrode 22 is ensured.
- the tip portion 131 of the bump 13 has the concave and convex 132, the allowable amount of the positioning error between the bump 13 and the substrate electrode 22 increases. Thus, the yield of mounting the electronic component 10 can be improved.
- the bump 13 is formed by tearing the gold wire, the pedestal portion, which is a large-diameter portion, and the tip formed on the pedestal portion and having a smaller diameter than the pedestal portion.
- This is a two-stage shape composed of the portion 131 and the unevenness 132 is formed on the tip portion 131. Therefore, at the time of bonding between the bump 13 and the substrate electrode 22, the bump 13 has a shape that allows the non-conductive resin 30 to be easily displaced and pressed.
- step Sl12 and S12 instead of the step (steps Sl12 and S12) of forming bumps on the tip of the electronic component bump in the first embodiment, bumps are formed on the substrate electrodes of the wiring board. Is formed.
- FIGS. 13 to 15 are cross-sectional views illustrating a state in which a plurality of protrusions are formed on a substrate electrode as a part of a manufacturing process of a wiring board.
- the wiring board 20 before the formation of the irregularities is the same as that of the first embodiment, and a copper wiring pattern (not shown) is formed on a substrate body 21 formed of glass epoxy resin, polyimide resin, or the like.
- a substrate electrode 22 is formed as a part. Note that the substrate electrode 22 has a shape different from that of the first embodiment.
- the unevenness of the surface 221 of the substrate electrode 22 is determined by positioning the mold 80a on the substrate electrode 22 and pressing the mold 80a against the surface 221 of the substrate electrode 22 as shown in FIG. When separated, they are formed as shown in FIG.
- reference numeral 22a is assigned to the substrate electrode after the formation of the unevenness
- reference numeral 221a is assigned to the surface thereof.
- the mold 80a is formed of stainless steel, and the portion facing the substrate electrode 22 protrudes, as shown in FIG. When It has become.
- the surface 221a of the substrate electrode 22a has a maximum surface roughness Ry of 2 m or more and 15 ⁇ m or less as shown in FIG. 15 in the same manner as the tip portion 131 of the bump 13 of the first embodiment. It is more preferable that the distance be 5 m or more and 10 m or less. Therefore, the maximum height of the surface roughness of the uneven surface 81a of the mold 80a is also 2 ⁇ m or more and 15 m or less, preferably 5 ⁇ m or more and 10 m or less. Then, by pressing the uneven surface 81a of the mold 80a against the surface 221 of the substrate electrode 22, the substrate electrode 22a having the above-described surface roughness is obtained.
- the wiring substrate 20 includes the substrate main body 21 and the wiring pattern including the plurality of substrate electrodes 22a formed on the substrate main body 21.
- Each of the substrate electrodes 22a has irregularities 222 on the force surface 221a.
- a plurality of protrusions of the irregularities 222 on the surface 221a are used for electrical connection with electronic components described below.
- FIG. 16 and FIG. 17 are cross-sectional views showing how the electronic component 10 is mounted on the wiring board 20.
- an electronic component 10 having a bump 13 formed on a component electrode 12 of a component body 11 is prepared, and at least the substrate electrode 22a is formed on the substrate electrode 22a of the wiring board 20.
- Epoxy resin which is a paste-like thermosetting resin having adhesive properties around the periphery, is provided as a non-conductive resin 30.
- the bump 13 is formed by leveling the tip of a stud bump formed of gold, that is, flattening the tip by crushing the tip to some extent.
- the tip 131 a of the bump 13 of the electronic component 10 is positioned so as to be able to contact the board electrode 22 a of the wiring board 20, and the electronic component 10 is turned toward the wiring board 20. Is pressed with a predetermined load. As a result, the non-conductive resin 30 is sandwiched between the bump 13 and the substrate electrode 22a, and the non-conductive resin 30 is pushed away by the plurality of protrusions 223 on the surface 22la of the substrate electrode 22a.
- the tip portion 13la is electrically connected to the substrate electrode 22a while crushing a plurality of protrusions on the surface 221a of the substrate electrode 22a to some extent.
- the bonding area 53 at the contact interface between the tip 131a of the bump 13 and the substrate electrode 22a is formed by a plurality of contact areas where the tip 131a and the substrate electrode 22a are in contact, as in FIG.
- the contact region 51 is a region where a plurality of protrusions 223 included in the unevenness 222 formed on the surface 221a of the substrate electrode 22a are crushed, and are electrically connected between the bump 13 and the substrate electrode 22a. Area.
- the non-conductive resin 30 slightly shrinks during curing, the non-conductive resin 30 is interposed between the component main body 11 and the substrate main body 21 and the tip 13 la of the bump 13 is formed.
- the electronic component 10 and the wiring board 20 are mechanically joined by the adhesive force of the non-conductive resin 30 by interposing also in the resin intervening region 52 on the contact surface between the substrate and the substrate electrode 22a.
- the bump 13 and the substrate electrode 22a are attracted to each other and are reliably connected electrically.
- the mounted board 40 manufactured through the above steps is electrically connected to the wiring board 20 on which the plurality of board electrodes 22a are formed and the plurality of board electrodes 22a of the wiring board 20.
- An electronic component 10 having a plurality of bumps 13 connected thereto, respectively, and a non-conductive resin 30 for bonding the wiring board 20 and the electronic component 10 are provided.
- the region between the portion 131a and the substrate electrode 22a has a plurality of contact regions 51 and a resin interposed region 52 around which the non-conductive resin 30 is interposed.
- the bump 13 and the board electrode 2 are formed by forming the plurality of protrusions 223 on the surface 221a of the board electrode 22a of the wiring board 20.
- Non-conductive resin 30 is prevented from being pinched over almost the entire area between the bumps 2a and 2a, and the reliability of electrical connection between the bumps 13 of the electronic component 10 and the board electrodes 22a of the wiring board 20 is improved.
- the presence of the resin interposed area 52 in which the non-conductive resin 30 intervenes around the plurality of contact areas 51 allows the bump 13 and the substrate electrode 22a to be in contact with each other. The reliability of the electrical connection is further improved.
- the plurality of protrusions 223 formed on the surface 221a of the substrate electrode 22a are crushed, so that the front end 131a of the bump 13 and the substrate electrode 22a come into contact with a large area, and the reliability of the electrical connection is further improved Can be further enhanced.
- the bumps 13 formed in step S11 are not limited to so-called stud bumps formed by melting the tips of gold wires, but are ball bumps formed by other methods. May be! /.
- the plurality of protrusions 133 of the tip portion 131 of the bump 13 may be formed randomly or regularly, and extend along the tip surface. It may be a streak-like projection such as a straight line or a curve. Further, the plurality of protrusions 133 of the tip portion 131 of the bump 13 are not limited to the pressing of the mold 80, and may be formed by another method. Also in the second embodiment, the plurality of protrusions 223 on the surface 221a of the substrate electrode 22a may be formed randomly or regularly, and may be streaks extending along the surface. For example, it may be a linear or curved streak-like projection. Further, the plurality of protrusions 223 on the surface 221a of the substrate electrode 22a are not limited to the pressing of the mold, and may be formed by another method.
- the pointed tip 131 of the bump 13 illustrated in FIG. 3 is pressed against a flat surface in advance and crushed, that is, leveling is performed, and a plasma treatment is performed on the flat surface of the tip 131.
- the unevenness may be formed by processing, blasting, sanding, or the like.
- the bump 13 may be a flat metal bump formed on the component electrode 12 or even in this case, the bump is easily formed on the surface of the bump by pressing the mold having the unevenness. be able to.
- the bump growth rate may be varied on the component electrode 12 or the bump before the bump may be formed.
- a force that is normally in a state of contact between the bump 13 and the substrate electrodes 22 and 22a For example, if the bump 13 is formed of gold and the surface of the substrate electrode is also plated with gold, the bonding is performed during bonding. When the temperature is increased, the gold on the bumps 13 may diffuse and form a metal-bonded state at the atomic level. That is, the contact area 51 between the bump 13 and the substrate electrodes 22 and 22a in the above embodiment may be in a physical metal bonding state.
- the component body 11 of the electronic component 10 is not limited to a semiconductor chip, but may be, for example, a small component electronic component such as a packaged electronic component. Various other electronic components having poles may be used.
- the substrate body of the wiring board 20 is not limited to glass epoxy resin / polyimide resin, but may be made of other resin / ceramic, glass, or the like, for example.
- the non-conductive resin is not limited to a paste having fluidity, but may be a sheet-like resin.
- the sheet-like non-conductive resin is applied to the periphery of the substrate electrode by covering the substrate electrode and pasting it on the wiring board 20.
- the molds 80 and 80a are not limited to stainless steel, and may be made of any material that is harder than a pump or a substrate electrode. There may be.
- the electronic component before bump formation that is, the component body 11 is delivered to the mounting facility and the bump formation of the electronic component is performed at the mounting facility, a plurality of protrusions are formed on the bump 13.
- the mounting method according to the first embodiment is suitable, while an electronic component having leveled bumps is delivered to a mounting facility, and an electronic component having leveled bumps is mounted on a wiring board.
- the mounting method according to the second embodiment in which a plurality of protrusions are formed on the substrate electrode 22 of the wiring substrate 20 is preferable.
- the unevenness forming surface 134 of the bump 13 on which the unevenness 132 is formed has a convex shape, that is, a state in which the bump 13 and the substrate electrode 22 are joined, as shown in FIG.
- the shape may be convex toward the substrate electrode 22 side.
- the contact region 51 per unit area is so high that the peripheral portion 53b of the joining region 53 is formed coarser than the central portion 53a.
- the bumps 132 may be formed on the pump 13 or the bumps 222 may be formed on the substrate electrode 22a.
- the unevenness 132 is formed densely in the central portion 134a of the unevenness forming surface 134, and the unevenness 132 is formed coarsely in the peripheral portion 134b as compared with the central portion 134a.
- the substrate electrode 22a as shown in FIG.
- the unevenness 222 is formed densely in the central portion 221c of the surface 221 and the unevenness 222 is formed coarsely in the peripheral portion 221d as compared with the central portion 221c.
- the central portion 53a and the peripheral portion 53b of the joining region 53 are not clearly defined regions.
- the central portion 53a of the joining region 53 has a central force up to approximately half the radius of the joining region 53.
- a region up to approximately half the radius and up to the outer periphery of the joining region 53 can be defined as a peripheral portion 53b.
- the definition of the central portion and the peripheral portion of the bump 13 and the substrate electrode 22a also corresponds to the definition of the central portion 53a and the peripheral portion 53b in the bonding region 53.
- the bumps 13 and the substrate electrodes 22 and 22a are joined while pushing away the non-conductive resin 30 interposed therebetween, the bumps 13 and the irregularities 132 are formed so that the peripheral portion 53b is rougher than the central portion 53a.
- the unevenness 222 By forming the unevenness 222, the escape of the non-conductive resin 30 at the time of joining is improved. Therefore, the reliability of the electrical connection between the bump 13 and the substrate electrodes 22 and 22a can be further improved.
- the shape of the contact region 51 is shown as being substantially circular for convenience, but the shape is not limited to a circle.
- the contact region 51 and the resin intervening region 52 are provided to improve the escape of the non-conductive resin 30 when the bump 13 and the substrate electrodes 22 and 22a are joined.
- the bumps 132 and the bumps 222 may be formed on the bump 13 and the substrate electrode 22 so as to form the use passage 52a.
- the non-conductive resin 30 is easily discharged to the outside of the bonding region 53 by passing through the resin discharge passage 52a, so that the electrical connection between the bump 13 and the substrate electrode 22 is made. Reliability can be further improved.
- the contact area 5 1 at the center 53 a is smaller than the peripheral area 53 b of the joining area 53.
- the contact region 51 at the peripheral portion 53b of the joining region 53 becomes dense, and the contact region 51 at the central portion 53a is compared with the peripheral portion 53b.
- the contact area 51 is formed in a staggered manner at the peripheral edge 53b.
- 132 and unevenness 222 may be formed.
- the central portion 134a of the concave / convex forming surface 134 roughens the concave / convex 132.
- the peripheral edge 134b forms the concave / convex 132 denser and staggered than the central portion 134a.
- the central portion 221c of the surface 221 roughens the irregularities 222 at the peripheral portion 221d.
- the irregularities 222 are formed densely and staggered at the peripheral edge 221d as compared with the central portion 221c.
- the present invention relates to a mounted board having an electronic component mounted on a wiring board, an electronic component mounting method for manufacturing the mounted board, an electronic component used for the mounted board, and a wiring board Applicable to
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Abstract
Description
明 細 書 Specification
実装済基板、電子部品実装方法、電子部品、及び配線基板 Mounted board, electronic component mounting method, electronic component, and wiring board
技術分野 Technical field
[0001] 本発明は、電子部品を配線基板に実装した実装済基板、該実装済基板を製造す るための電子部品実装方法、並びに、前記実装済基板に用いられる電子部品、及 び配線基板に関する。 The present invention relates to a mounted board having an electronic component mounted on a wiring board, an electronic component mounting method for manufacturing the mounted board, an electronic component used for the mounted board, and a wiring board About.
背景技術 Background art
[0002] 近年、電気製品の小型化に伴!、、半導体のベアチップ等の電子部品を、微小ピッ チにて電極が形成された配線基板に実装する技術が利用されている。この種の実装 では、電子部品の電極にバンプを形成し、このバンプを介して電子部品の電極(以 下、「部品電極」という。)と、配線基板の電極 (以下、「基板電極」という。)とを電気的 に接続する手法が多くの場合採用されており、さらに、電子部品と配線基板との間に 非導電性フィルム(NCF: Non-Conductive Film)を介在させて、非導電性フィルムの 接着力により電子部品と配線基板とを機械的に接合する、 NSD (Non-Conductive Film Stud-Bump Direct Interconnection)工法と呼ばれるものも知られている。 In recent years, along with miniaturization of electric products, a technique of mounting electronic components such as semiconductor bare chips on a wiring board on which electrodes are formed with minute pitches has been used. In this type of mounting, bumps are formed on the electrodes of the electronic component, and the electrodes of the electronic component (hereinafter referred to as “component electrodes”) and the electrodes of the wiring board (hereinafter referred to as “board electrodes”) are formed via the bumps. In many cases, a method of electrically connecting the non-conductive film (NCF) between the electronic component and the wiring board is used. There is also known a method called NSD (Non-Conductive Film Stud-Bump Direct Interconnection) method of mechanically joining an electronic component and a wiring board by the adhesive force of a film.
[0003] 例えば、特許文献 1には、 NSD工法による実装済基板の製造方法として、以下の 方法が記載されている。まず、配線基板の基板電極上に、熱硬化性榭脂から成る非 導電性フィルムを貼り付ける。次に、先端が尖ったボールバンプであるスタッドバンプ を形成した電子部品を、バンプと基板電極とを位置合わせして非導電性フィルムの 上から所定の荷重で配線基板に押圧し、これにより、バンプの先端で非導電性フィル ムを押し退けて、バンプと基板電極とを電気的に接続された状態とする。そして、この 状態で非導電性フィルムを加熱して硬化させ、電子部品と配線基板とを非導電性フ イルムの接着力により機械的に接合する。 [0003] For example, Patent Document 1 describes the following method as a method of manufacturing a mounted board by the NSD method. First, a non-conductive film made of thermosetting resin is adhered on the substrate electrode of the wiring board. Next, the electronic component on which the stud bump, which is a ball bump with a sharp tip, is formed is pressed against the wiring substrate with a predetermined load from above the non-conductive film by aligning the bump with the substrate electrode. The non-conductive film is pushed away at the tip of the bump, so that the bump and the substrate electrode are electrically connected. Then, the non-conductive film is heated and cured in this state, and the electronic component and the wiring board are mechanically joined by the adhesive force of the non-conductive film.
[0004] なお、電子部品を微細な基板電極に実装する手法としては、電子部品のバンプと 配線基板の基板電極との間に、絶縁性の榭脂に複数の細カゝ ヽ銀片を混入させたも のである異方導電性のフィルムやペーストを介在させて、バンプと基板電極とを電気 的に接続すると共に、電子部品と配線基板とを機械的に接合するものも知られている 。例えば、特許文献 2には、異方導電性ペーストを介在させる実装方法として、バン プの先端に微小な複数の突起を形成し、この突起を基板電極上の酸化膜を突き破 つて食い込んだ状態で接続させることにより、電気的接触の信頼性を高めることが記 載されている。 [0004] As a method of mounting an electronic component on a fine substrate electrode, a plurality of fine silver particles are mixed into insulating resin between a bump of the electronic component and a substrate electrode of a wiring board. It is also known to electrically connect the bump and the board electrode and to mechanically connect the electronic component and the wiring board with an anisotropic conductive film or paste interposed therebetween. . For example, Patent Document 2 discloses a mounting method in which an anisotropic conductive paste is interposed, in which a plurality of minute protrusions are formed at the tip of a bump, and the protrusions penetrate an oxide film on a substrate electrode and cut into the bumps. It is described that the reliability of the electrical contact can be improved by connecting with.
特許文献 1:国際公開第 98Z30073号パンフレット Patent Document 1: International Publication No. 98Z30073 pamphlet
特許文献 2:特開平 11-111761号公報 Patent Document 2: Japanese Patent Application Laid-Open No. 11-111761
発明の開示 Disclosure of the invention
発明が解決しょうとする課題 Problems to be solved by the invention
[0005] ところで、上述した従来の NSD工法による実装方法において、電子部品の取扱時 に先端が潰れて平らになったバンプや先端を予めレべリング、つまりバンプの先端を ある程度潰して平坦化したバンプを使用すると、バンプの先端と基板電極との間の大 部分に非導電性榭脂が挟まってしまい、電気的接続の信頼性が低下してしまう。また 、 NSD法ではバンプの先端を尖らせる必要があるため、バンプを基板電極に押し付 ける距離が長くなるとともにバンプを基板電極に押し付ける荷重が大きくなる。電子部 品を基板に実装する場合は、押圧時の荷重はなるべく小さ 、方が好ま 、。 [0005] By the way, in the above-described mounting method using the conventional NSD method, the bumps and tips that are flattened by crushing the tip when handling electronic components are leveled in advance, that is, the tip of the bump is crushed to some extent and flattened. When bumps are used, most of the non-conductive resin is caught between the tip of the bumps and the substrate electrode, and the reliability of the electrical connection is reduced. Further, in the NSD method, since the tip of the bump needs to be sharpened, the distance for pressing the bump against the substrate electrode increases and the load for pressing the bump against the substrate electrode increases. When mounting electronic components on a board, the load at the time of pressing is preferably as small as possible.
[0006] 又、前記特許文献 2では、電子部品のバンプと配線基板の基板電極とは、導電性 のペーストを介在させて接合することから、たとえバンプとランドとが直接に接触して いなくても、両者間での導通は可能である。したがって、上述のような非導電性榭脂 を介在させる場合における電気的接続の信頼性低下という問題を考慮する必要が無 い。 In Patent Document 2, since the bump of the electronic component and the board electrode of the wiring board are joined with a conductive paste interposed therebetween, even if the bump and the land do not directly contact each other, However, conduction between the two is possible. Therefore, it is not necessary to consider the problem of the decrease in the reliability of the electrical connection when the non-conductive resin is interposed as described above.
本発明は、前記課題を解決するためになされたものであり、電子部品のバンプと配 線基板の基板電極との電気的接続の信頼性を向上することができる実装済基板、電 子部品実装方法、電子部品、及び配線基板を提供することを目的とする。 The present invention has been made in order to solve the above-mentioned problems, and has a mounted board and an electronic component mounting that can improve the reliability of electrical connection between a bump of an electronic component and a substrate electrode of a wiring board. It is an object to provide a method, an electronic component, and a wiring board.
課題を解決するための手段 Means for solving the problem
[0007] 前記目的を達成するために、本発明は以下のように構成する。 [0007] In order to achieve the above object, the present invention is configured as follows.
本発明の第 1態様の実装済基板によれば、電子部品が実装された実装済基板で あって、複数の基板電極が形成された配線基板と、前記複数の基板電極に電気的 にそれぞれ接続される複数のバンプが形成された電子部品と、少なくとも前記複数 のバンプの周囲にて前記配線基板と前記電子部品とを接着する非導電性榭脂とを 備え、前記複数のバンプのそれぞれの先端と前記先端に対向する基板電極との間 の接合領域が、前記先端と前記基板電極とが接触する複数の接触領域と、前記複 数の接触領域の周囲において前記非導電性榭脂が介在する榭脂介在領域とを有 する。 According to the mounted board of the first aspect of the present invention, a mounted board on which electronic components are mounted, the wiring board having a plurality of board electrodes formed thereon, and the board being electrically connected to the plurality of board electrodes, respectively. An electronic component having a plurality of bumps formed thereon, and at least the plurality of A non-conductive resin for adhering the wiring board and the electronic component around the bumps, wherein a bonding region between each tip of the plurality of bumps and the substrate electrode facing the tip is There are a plurality of contact areas where the tip and the substrate electrode are in contact with each other, and a resin interposed area where the non-conductive resin is interposed around the plurality of contact areas.
[0008] 前記第 1態様の実装済基板であって、前記複数の接触領域は、前記複数のバンプ のそれぞれの前記先端に形成された複数の突起が押し潰された領域であるとしても 良い。 [0008] In the mounted substrate according to the first aspect, the plurality of contact regions may be regions where a plurality of protrusions formed at the tips of the plurality of bumps are crushed.
[0009] 前記第 1態様の実装済基板であって、前記複数の接触領域は、前記基板電極に 形成された複数の突起が押し潰された領域であるとしても良い。 [0009] In the mounted substrate according to the first aspect, the plurality of contact regions may be regions where a plurality of protrusions formed on the substrate electrode are crushed.
[0010] 又、前記第 1態様の実装済基板において、前記接触領域は、前記接合領域の中央 部では密に、周縁部では前記中央部に比して粗く形成してもよい。 [0010] Further, in the mounted board of the first aspect, the contact region may be formed densely at a central portion of the joining region, and may be formed coarser at a peripheral portion as compared with the central portion.
[0011] このように接合領域における単位面積当たりの接触領域の形成密度を接合領域内 で変化させることで、非導電性榭脂を押し退けながらバンプと基板電極とを接合させ るとき、接合領域カゝら押し出される非導電性榭脂における流動抵抗が低減され、接 合するバンプと基板電極との間に非導電性榭脂が封じ込まれてバンプと基板電極と の導通が妨げられることを低減することができ、電気的接続の信頼性を向上させるこ とがでさる。 [0011] By changing the formation density of the contact region per unit area in the bonding region in the bonding region in this way, when the bump and the substrate electrode are bonded while pushing off the non-conductive resin, the bonding region power is reduced. The flow resistance of the non-conductive resin extruded is reduced, and the non-conductive resin is sealed between the bump and the substrate electrode to prevent the conduction between the bump and the substrate electrode from being hindered. And improve the reliability of the electrical connection.
[0012] 又、前記第 1態様の実装済基板において、前記榭脂介在領域は、前記接合領域の 中央部から周縁部に向けて放射状に延在させてもよい。 [0012] In the mounted board according to the first aspect, the resin intervening region may extend radially from a central portion to a peripheral portion of the bonding region.
[0013] このように構成することで、非導電性榭脂を押し退けながらバンプと基板電極とを接 合させるとき、接合領域力も押し出される非導電性榭脂を効率的に排出することがで きる。よって、接合するバンプと基板電極との間に非導電性榭脂が封じ込まれてバン プと基板電極との導通が妨げられることを低減することができ、電気的接続の信頼性 を向上させることができる。 [0013] With this configuration, when the bump and the substrate electrode are joined together while pushing away the non-conductive resin, the non-conductive resin that also extrudes the bonding area force can be efficiently discharged. . Therefore, it is possible to reduce the possibility that the non-conductive resin is sealed between the bump to be bonded and the substrate electrode to prevent conduction between the bump and the substrate electrode, thereby improving the reliability of the electrical connection. be able to.
[0014] 又、前記第 1態様の実装済基板において、前記接触領域は、前記接合領域の中央 部では粗ぐ周縁部では前記中央部に比して密でかつ千鳥状に形成してもよい。 [0014] In the mounted board according to the first aspect, the contact region may be formed in a staggered shape at a center portion of the bonding region, which is coarser at a peripheral portion than at the central portion. .
[0015] 上述したように、バンプと基板電極とを接合させるときの、接合領域からの非導電性 榭脂の排出性を考えると、前記接触領域は、接合領域の中央部で密に、周縁部で粗 く形成されるのが好ましい。一方、バンプと基板電極とが位置ずれした場合を考慮す ると、接触領域は、接合領域の周縁部で密になる方が電気的接続の信頼性は向上 する。このように、接合領域からの非導電性榭脂の排出性と、バンプと基板電極とが 位置ずれした場合とでは、対処方法が相反する。そこで、前記位置ずれの場合を考 慮して、接触領域を接合領域の周縁部で密にするときには、接合領域を千鳥状に形 成することで、ランダムに形成する場合に比べて非導電性榭脂の排出性を向上させ ることができる。よって、バンプと基板電極との位置ずれを考慮しつつバンプと基板電 極との電気的接続の信頼性を向上させることもできる。 [0015] As described above, when the bump and the substrate electrode are joined, the non-conductivity from the joining region is Considering the drainage of resin, it is preferable that the contact area is formed densely at the center of the joining area and coarsely at the peripheral edge. On the other hand, considering the case where the bump and the substrate electrode are displaced from each other, the reliability of the electrical connection is improved when the contact area is closer at the periphery of the bonding area. As described above, the countermeasures are inconsistent between the case where the non-conductive resin is discharged from the joint region and the case where the bump and the substrate electrode are misaligned. Therefore, when the contact area is made dense at the peripheral edge of the bonding area in consideration of the above-described position shift, the bonding area is formed in a staggered shape, so that a non-conductive area is formed as compared with the case where the bonding area is formed randomly. Resin drainage can be improved. Therefore, the reliability of the electrical connection between the bump and the substrate electrode can be improved while considering the displacement between the bump and the substrate electrode.
[0016] 又、本発明の第 2態様における実装済基板は、電子部品が実装された実装済基板 であって、 Further, the mounted board according to the second aspect of the present invention is a mounted board on which electronic components are mounted,
複数の基板電極が形成された配線基板と、 A wiring board on which a plurality of board electrodes are formed,
前記複数の基板電極に電気的にそれぞれ接続される複数のバンプが形成された 電子部品とを備え、 An electronic component having a plurality of bumps electrically connected to the plurality of substrate electrodes, respectively.
前記複数のバンプのそれぞれの先端と前記先端に対向する基板電極との間の接 合領域が、前記先端と前記基板電極とが接触する複数の接触領域と、前記複数の 接触領域の周囲において非導電性榭脂が介在する榭脂介在領域とを有し、 前記接合領域の中央部と周縁部とにおいて前記接触領域の占める割合を異なら せる。 The contact area between each tip of the plurality of bumps and the substrate electrode facing the tip is a plurality of contact areas where the tip contacts the substrate electrode, and a non-contact area around the plurality of contact areas. A resin-intervening region in which conductive resin intervenes, wherein the contact area occupies different portions in a central portion and a peripheral portion of the joining region.
[0017] 前記第 2態様において、前記接触領域は、前記中央部では密に、前記周縁部では 前記中央部に比して粗く形成することができ、又、逆に、前記中央部では粗ぐ前記 周縁部では前記中央部に比して密でかつ千鳥状に形成することができる。 [0017] In the second aspect, the contact region can be formed densely at the central portion and coarser at the peripheral portion than at the central portion, and conversely, coarser at the central portion. The peripheral portion can be formed denser and staggered than the central portion.
又、前記第 2態様において、前記榭脂介在領域は、前記中央部から前記周縁部に 向けて放射状に延在させてもよい。 Further, in the second aspect, the resin intervening region may extend radially from the central portion toward the peripheral portion.
[0018] このように接合領域における単位面積当たりの接触領域の形成密度を接合領域内 で変化させることで、非導電性榭脂を介在させてバンプと基板電極とを接合させると き、接合領域カゝら押し出される非導電性榭脂における流動抵抗が低減され、接合す るバンプと基板電極との間に非導電性榭脂が封じ込まれてバンプと基板電極との導 通が妨げられることを低減することができ、電気的接続の信頼性を向上させることが できる。 [0018] By changing the formation density of the contact region per unit area in the bonding region in the bonding region in this manner, when the bump and the substrate electrode are bonded with the non-conductive resin interposed therebetween, the bonding region is formed. The flow resistance of the non-conductive resin extruded is reduced, and the non-conductive resin is sealed between the bump to be bonded and the substrate electrode so that the conduction between the bump and the substrate electrode is reduced. It is possible to reduce the hindrance of communication and improve the reliability of the electrical connection.
[0019] 本発明の第 3態様における電子部品実装方法は、電子部品を配線基板上に実装 する電子部品実装方法であって、配線基板上に形成された複数の基板電極のそれ ぞれ、又は、電子部品に形成された複数のバンプのそれぞれに複数の突起を形成し 、少なくとも前記複数の基板電極の周囲に接着性を有する非導電性榭脂を付与し、 前記電子部品を前記配線基板に押圧するとともに前記非導電性榭脂を硬化させるこ とにより、前記複数の基板電極に前記複数のバンプをそれぞれ電気的に接続する。 An electronic component mounting method according to a third aspect of the present invention is an electronic component mounting method for mounting an electronic component on a wiring board, wherein each of the plurality of board electrodes formed on the wiring board has Forming a plurality of projections on each of the plurality of bumps formed on the electronic component, applying a non-conductive resin having adhesive property at least around the plurality of substrate electrodes, and applying the electronic component to the wiring board. The plurality of bumps are electrically connected to the plurality of substrate electrodes by pressing and curing the non-conductive resin.
[0020] 前記第 3態様の電子部品実装方法であって、前記複数の突起を形成するとき、前 記複数のバンプ又は前記複数の基板電極に凹凸が形成された型が押圧されるよう にしてもよい。 [0020] In the electronic component mounting method according to the third aspect, when the plurality of protrusions are formed, a mold having irregularities formed on the plurality of bumps or the plurality of substrate electrodes is pressed. Is also good.
[0021] 前記第 3態様において、前記複数の突起を形成するとき、前記バンプ又は前記基 板電極の中央部では密に、周縁部では前記中央部に比して粗く前記突起を形成し てもよく、又、逆に、前記中央部では粗ぐ前記周縁部では前記中央部に比して密に かつ千鳥状に前記突起を形成してもよ ヽ。 [0021] In the third aspect, when the plurality of protrusions are formed, the protrusions may be formed densely at a central portion of the bump or the substrate electrode, and may be formed coarsely at a peripheral portion as compared with the central portion. Alternatively, conversely, the protrusions may be formed densely in the central portion and in a staggered manner in the peripheral portion compared to the central portion.
[0022] 又、本発明の第 4態様の電子部品は、配線基板に実装される電子部品であって、 複数の部品電極を有する前記電子部品の部品本体と、接着性を有する非導電性榭 脂を挟み込みつつ配線基板上に形成された複数の基板電極と電気的に接続するた めに前記複数の部品電極上に形成された複数のバンプとを備え、前記複数のバン プのそれぞれが、先端部に複数の突起を備える。 Further, an electronic component according to a fourth aspect of the present invention is an electronic component mounted on a wiring board, wherein the component main body of the electronic component having a plurality of component electrodes and a non-conductive non-conductive material having an adhesive property. A plurality of bumps formed on the plurality of component electrodes for electrical connection with a plurality of board electrodes formed on the wiring board while sandwiching grease, wherein each of the plurality of bumps is A plurality of protrusions are provided at the tip.
[0023] 前記第 4態様の電子部品であって、前記突起の最大高さ Ryが、 2 μ m以上 15 m 以下であるようにしてもよい。 [0023] In the electronic component according to the fourth aspect, the maximum height Ry of the protrusion may be not less than 2 μm and not more than 15 m.
[0024] 又、前記第 4態様において、前記バンプの凹凸形成面は、前記基板電極側へ凸状 としてもよい。又、前記突起は、前記バンプの凹凸形成面の中央部では密に、周縁 部では前記中央部に比して粗く形成してもよぐ又、逆に、前記中央部では粗ぐ前 記周縁部では前記中央部に比して密でかつ千鳥状に形成してもよい。 [0024] In the fourth aspect, the bump-formed surface of the bump may be convex toward the substrate electrode. The bumps may be formed densely at the center of the bump-formed surface of the bumps, and may be formed coarser at the periphery than at the center, or conversely, at the center. The portion may be formed denser and staggered than the central portion.
[0025] 又、本発明の第 5態様の電子部品では、配線基板に実装される電子部品であって 複数の部品電極を有する前記電子部品の部品本体と、 The electronic component according to the fifth aspect of the present invention is an electronic component mounted on a wiring board. A component body of the electronic component having a plurality of component electrodes,
配線基板上に形成された複数の基板電極と電気的に接続するために前記複数の 部品電極上に形成された複数のバンプと、を備え、 A plurality of bumps formed on the plurality of component electrodes for electrically connecting to a plurality of substrate electrodes formed on the wiring board,
前記複数のバンプのそれぞれが、先端部における凹凸形成面に複数の突起を備 え、 Each of the plurality of bumps includes a plurality of protrusions on the uneven surface at the tip end,
前記突起は、前記凹凸形成面における中央部と周縁部とにおいて形成密度を異な らせている。 The protrusions have different formation densities at a central portion and a peripheral portion of the unevenness forming surface.
[0026] 前記第 5態様において、前記突起は、前記中央部では密に、前記周縁部では前記 中央部に比して粗く形成してもよぐ又、逆に、前記中央部では粗ぐ前記周縁部で は前記中央部に比して密でかつ千鳥状に形成してもよい。 [0026] In the fifth aspect, the protrusion may be formed densely at the central portion and coarser at the peripheral portion than at the central portion. Conversely, the protrusion may be coarser at the central portion. The peripheral portion may be formed denser and staggered than the central portion.
[0027] 又、本発明の第 6態様の配線基板は、電子部品実装用の配線基板であって、基板 本体と、接着性を有する非導電性榭脂を挟み込みつつ電子部品に形成された複数 のバンプと電気的に接続するために形成された複数の基板電極とを備え、前記複数 の基板電極のそれぞれが、電極表面に複数の突起を備える。 A wiring board according to a sixth aspect of the present invention is a wiring board for mounting an electronic component, wherein a plurality of wiring boards formed on the electronic component while sandwiching a non-conductive resin having an adhesive property with a substrate body are provided. And a plurality of substrate electrodes formed to be electrically connected to the bumps, and each of the plurality of substrate electrodes has a plurality of protrusions on the electrode surface.
[0028] 前記第 6態様の配線基板であって、前記電極表面の前記突起の最大高さ Ryが、 2 μ m以上 15 μ m以下であるようにしてもよい。 [0028] In the wiring substrate according to the sixth aspect, the maximum height Ry of the protrusion on the electrode surface may be not less than 2 μm and not more than 15 μm.
[0029] 又、前記第 6態様において、前記突起は、前記電極表面の中央部では密に、周縁 部では前記中央部に比して粗く形成してもよぐ又、逆に、前記中央部では粗ぐ前 記周縁部では前記中央部に比して密にかつ千鳥状に形成してもよい。 [0029] In the sixth aspect, the protrusion may be formed densely at a central portion of the electrode surface, and may be formed coarser at a peripheral portion as compared with the central portion. The peripheral portion may be formed densely and in a staggered shape as compared with the central portion.
[0030] 又、本発明の第 7態様の配線基板では、電子部品実装用の配線基板であって、 基板本体と、 [0030] The wiring board according to a seventh aspect of the present invention is a wiring board for mounting electronic components, wherein:
電子部品に形成された複数のバンプと電気的に接続するために形成された複数の 基板電極と、を備え、 A plurality of substrate electrodes formed for electrical connection with a plurality of bumps formed on the electronic component,
前記複数の基板電極のそれぞれが、電極表面に複数の突起を備え、 Each of the plurality of substrate electrodes includes a plurality of protrusions on the electrode surface,
前記突起は、前記表面における中央部と周縁部とにおいて形成密度を異ならせる The protrusions have different formation densities at a central portion and a peripheral portion of the surface.
[0031] 又、前記第 7態様において、前記突起は、前記中央部では密に、前記周縁部では 前記中央部に比して粗く形成してもよぐ又、逆に、前記中央部では粗ぐ前記周縁 部では前記中央部に比して密にかつ千鳥状に形成してもよい。 [0031] In the seventh aspect, the protrusions may be formed densely at the central portion, and may be formed coarser at the peripheral portion than at the central portion. The perimeter The portion may be formed densely and in a staggered shape as compared with the central portion.
発明の効果 The invention's effect
[0032] 本発明によれば、接合領域にお 1、て、複数の接触領域及び榭脂介在領域を形成 したことから、電子部品のバンプと配線基板の基板電極との電気的接続の信頼性が 高 、実装済基板を得ることができる。 According to the present invention, since a plurality of contact regions and resin interposed regions are formed in the bonding region, the reliability of electrical connection between the bumps of the electronic component and the substrate electrodes of the wiring board is improved. However, a mounted board can be obtained.
図面の簡単な説明 Brief Description of Drawings
[0033] [図 1]図 1は、第 1の実施の形態における電子部品実装の流れを示すフローチャート FIG. 1 is a flowchart showing a flow of mounting electronic components according to the first embodiment.
[図 2]図 2は、部品本体の部品電極上にバンプを形成した状態を示す断面図、 圆 3]図 3は、部品本体のバンプに型を位置決めした状態を示す断面図、 圆 4]図 4は、部品本体のバンプに型を押圧した状態を示す断面図、 [FIG. 2] FIG. 2 is a cross-sectional view showing a state in which bumps are formed on component electrodes of the component body. FIG. 3] FIG. 3 is a cross-sectional view showing a state in which a mold is positioned on the bumps of the component body. FIG. 4 is a cross-sectional view showing a state where the mold is pressed against the bumps of the component body.
圆 5]図 5は、部品本体のバンプに複数の突起を形成した状態を示す断面図、 圆 5] FIG. 5 is a cross-sectional view showing a state where a plurality of protrusions are formed on the bumps of the component body,
[図 6]図 6は、型の凹凸面の様子を示す斜視図、 [FIG. 6] FIG. 6 is a perspective view showing an uneven surface of a mold.
[図 7]図 7は、配線基板の基板電極上に非導電性榭脂を付与した状態を示す断面図 圆 8]図 8は、配線基板に電子部品を実装した状態である実装済基板の構成を示す 断面図、 [FIG. 7] FIG. 7 is a cross-sectional view showing a state in which non-conductive resin is applied to substrate electrodes of the wiring board. [8] FIG. 8 is a cross-sectional view of a mounted board in which electronic components are mounted on the wiring board. Sectional view showing the configuration,
[図 9]図 9は、電子部品のバンプと配線基板の基板電極との接触領域を示す平面図 [FIG. 9] FIG. 9 is a plan view showing a contact area between a bump of an electronic component and a board electrode of a wiring board.
[図 10]図 10は、電子部品のバンプと配線基板の基板電極との接触領域の他の例を 示す平面図、 FIG. 10 is a plan view showing another example of a contact area between a bump of an electronic component and a board electrode of a wiring board,
[図 11]図 11は、先端部が尖って ヽるバンプが位置ずれして基板電極と十分に接触し ていない状態を示す断面図、 [FIG. 11] FIG. 11 is a cross-sectional view showing a state where a bump having a sharp tip is displaced and is not sufficiently in contact with a substrate electrode.
[図 12]図 12は、先端部に凹凸を有するバンプが位置ずれして基板電極と接触してい る状態を示す断面図、 [FIG. 12] FIG. 12 is a cross-sectional view showing a state in which bumps having irregularities at the tips are displaced and are in contact with substrate electrodes.
[図 13]図 13は、本発明の第 2の実施の形態において配線基板の基板電極に型を位 置決めした状態を示す断面図、 FIG. 13 is a cross-sectional view showing a state where a mold is positioned on a substrate electrode of a wiring board according to the second embodiment of the present invention;
[図 14]図 14は、配線基板の基板電極に型を押圧した状態を示す断面図、 圆 15]図 15は、配線基板の基板電極に複数の突起を形成した状態における配線基 板の構成を示す断面図、 FIG. 14 is a cross-sectional view showing a state where a mold is pressed against a substrate electrode of a wiring board, [15] FIG. 15 is a cross-sectional view showing a configuration of the wiring board in a state where a plurality of protrusions are formed on the substrate electrode of the wiring board.
[図 16]図 16は、配線基板の基板電極上に非導電性榭脂を付与した状態を示す断面 図、 [FIG. 16] FIG. 16 is a cross-sectional view showing a state in which a non-conductive resin is applied on the substrate electrode of the wiring board.
圆 17]図 17は、配線基板に電子部品を実装した状態である実装済基板の構成を示 す断面図、 17] FIG. 17 is a cross-sectional view showing a configuration of a mounted board in a state where electronic components are mounted on a wiring board.
[図 18]図 18は、図 5に示す断面図の変形例であって凹凸形成面が凸状であるバン プに複数の突起を形成した状態を示す断面図、 FIG. 18 is a modified example of the cross-sectional view shown in FIG. 5, showing a state in which a plurality of protrusions are formed on a bump having a convex-concave surface.
[図 19]図 19は、電子部品のバンプと配線基板の基板電極との接触領域の別の例を 示す平面図、 FIG. 19 is a plan view showing another example of a contact area between a bump of an electronic component and a board electrode of a wiring board.
[図 20]図 20は、電子部品のバンプと配線基板の基板電極との接触領域のさらに別の 例を示す平面図、 FIG. 20 is a plan view showing still another example of a contact region between a bump of an electronic component and a board electrode of a wiring board;
[図 21]図 21は、電子部品のバンプと配線基板の基板電極との接触領域のさらに他の 例を示す平面図、 FIG. 21 is a plan view showing still another example of a contact region between a bump of an electronic component and a board electrode of a wiring board,
[図 22]図 22は、図 19に対応した図であり、バンプ及び基板電極に形成された凹凸の 粗、密を示す図、 [FIG. 22] FIG. 22 is a view corresponding to FIG. 19, showing the roughness and density of bumps and bumps formed on a substrate electrode,
[図 23]図 23は、図 21に対応した図であり、バンプ及び基板電極に形成された凹凸の 粗、密を示す図である。 FIG. 23 is a view corresponding to FIG. 21, and is a view showing the roughness and density of bumps and bumps formed on a substrate electrode.
符号の説明 Explanation of symbols
10 電子部品 10 Electronic components
11 部品本体 11 Parts body
12 部品電極 12 Component electrode
13 バンプ 13 Bump
131, 131a ノ ンプの先端部 131, 131a Tip of the pump
133 突起 133 protrusion
134 凹凸形成面 134 Uneven surface
134a 中央部 134a center
134b 周縁部 20 配線基板 134b Perimeter 20 Wiring board
21 基板本体 21 Board body
22,: 22a 基板電極 22 ,: 22a substrate electrode
30 非導電性樹脂 30 Non-conductive resin
40 実装済基板 40 Mounted board
51 接触領域 51 Contact area
52 榭脂介在領域 52 Resin intervening area
53 接合領域 53 bonding area
53a 中央部 53a center
53b 周縁部 53b Perimeter
80, 80a 型 80, 80a type
221 電極表面 221 electrode surface
222 凹凸 222 irregularities
223 突起 223 protrusion
発明を実施するための最良の形態 BEST MODE FOR CARRYING OUT THE INVENTION
[0035] 本発明における実施形態について、図面を参照して以下に説明する。尚、各図に お!、て同じ部品につ!/、ては同じ参照符号を付して 、る。 An embodiment of the present invention will be described below with reference to the drawings. In each figure, the same parts! /, And the same reference numerals.
[0036] 図 1は、本発明の第 1の実施の形態における電子部品実装の流れを示すフローチ ヤートであり、電子部品の製造工程の一部であるバンプ形成工程を含んでいる。図 2 乃至図 5は電子部品の製造工程においてバンプに複数の突起を形成する様子を説 明するための図である。 FIG. 1 is a flowchart showing a flow of mounting an electronic component according to the first embodiment of the present invention, and includes a bump forming step which is a part of a manufacturing process of the electronic component. FIGS. 2 to 5 are views for explaining a state in which a plurality of projections are formed on bumps in a process of manufacturing an electronic component.
[0037] バンプ形成では、まずステップ S11にて、図 2に示すように、部品本体 11に形成さ れた複数の部品電極 12上に複数のバンプ 13が形成される。部品本体 11は、半導 体のベアチップであり、部品電極 12は、アルミニウムにより形成されている。バンプ 1 3は、先端が尖ったボールバンプ、いわゆるスタッドバンプであり、金ワイヤの先端を 放電により溶融させ、その溶融部分を部品電極に圧着した後に、金ワイヤを圧着部 分から引きちぎることにより形成される。このように形成されたバンプ 13は、金ワイヤが 引きちぎられることにより、先端部 131が尖ったものとなる。 [0038] 次に、ステップ S 12にて、部品本体 11に形成されたバンプ 13の先端部 131のそれ ぞれに複数の突起を含む凹凸が形成される。先端部 131の凹凸は、図 3に示すよう に凹凸形成用の型 80の凹凸面 81を部品電極 12上のバンプ 13の先端部 131に対 向して位置決めし、図 4に示すように凹凸面 81を先端部 131に押圧した後、型 80を 離すことにより図 5に示すように形成される。これにより、実装用のバンプ付き電子部 品 10の製造が完了する。 In the bump formation, first, in step S11, a plurality of bumps 13 are formed on a plurality of component electrodes 12 formed on the component body 11, as shown in FIG. The component body 11 is a semiconductor bare chip, and the component electrode 12 is formed of aluminum. The bumps 13 are ball bumps with sharp tips, so-called stud bumps, which are formed by melting the tip of a gold wire by electric discharge, crimping the melted portion to the component electrode, and tearing the gold wire from the crimped portion. You. The tip 13 of the bump 13 formed in this manner is sharpened by tearing the gold wire. Next, in step S 12, irregularities including a plurality of projections are formed on each of the tip portions 131 of the bumps 13 formed on the component body 11. As shown in FIG. 3, the unevenness of the tip 131 is determined by positioning the uneven surface 81 of the mold 80 for forming the unevenness toward the tip 131 of the bump 13 on the component electrode 12 as shown in FIG. After pressing the surface 81 against the tip 131, the mold 80 is released to form the structure as shown in FIG. Thereby, the manufacture of the electronic component 10 with bumps for mounting is completed.
[0039] 図 6は型 80の凹凸面 81の様子を示す斜視図である。型 80は、ステンレス鋼により 形成されており、図 6に示すように、凹凸面 81は多数の突起状の凹凸 82を有してい る。凹凸 82は、角錐、円錐等の種々の形状を採ることができ、特に限定するものでは ない。又、一つの凹凸面 81に複数種類の形状の凹凸 82が混在していてもよい。凹 凸面 81は、ステンレス鋼の表面をサンドブラストで擦ることによりランダムに凹凸 82が 形成されている。なお、エッチングなどにより規則的な凹凸 82が形成されてもよい。 一般的に、バンプ 13の部品本体 11に接する部分は直径約 80 mとされ、先端部 1 31は直径約 40 mとされる。このことから、先端部 131の大きさに合わせて数個ない し数十個の凹凸 82を形成するには、図 5に示すように、先端部 131の表面粗さの最 大高さ Ryが 2 μ m以上 15 μ m以下とされることが好ましぐ 5 μ m以上 10 μ m以下と されることがさらに好ましい。従って、型 80の凹凸面 81の表面粗さの最大高さも、 2 μ m以上 15 μ m以下、好ましくは 5 μ m以上 10 μ m以下となっている。そして、型 80の 凹凸面 81をバンプ 13の先端部 131に押圧することにより、先端部 131が前記好まし い表面粗さとされる。 FIG. 6 is a perspective view showing an uneven surface 81 of the mold 80. The mold 80 is formed of stainless steel, and as shown in FIG. 6, the uneven surface 81 has a large number of projections and depressions 82. The unevenness 82 can take various shapes such as a pyramid and a cone, and is not particularly limited. Further, a plurality of types of irregularities 82 may be mixed on one irregular surface 81. The concave-convex surface 81 has irregularities 82 formed at random by rubbing the surface of stainless steel with sandblast. Note that regular irregularities 82 may be formed by etching or the like. Generally, the portion of the bump 13 that contacts the component body 11 has a diameter of about 80 m, and the tip 131 has a diameter of about 40 m. Therefore, in order to form several or dozens of irregularities 82 according to the size of the tip 131, as shown in FIG. 5, the maximum height Ry of the surface roughness of the tip 131 is set as shown in FIG. It is more preferably from 2 μm to 15 μm, and still more preferably from 5 μm to 10 μm. Therefore, the maximum height of the surface roughness of the uneven surface 81 of the mold 80 is also 2 μm or more and 15 μm or less, preferably 5 μm or more and 10 μm or less. Then, by pressing the uneven surface 81 of the mold 80 against the tip 131 of the bump 13, the tip 131 has the preferable surface roughness.
上述のように表面粗さを 5 μ m以上 10 μ m以下とするのが好まし 、理由は、後述す るように、バンプ 13と基板電極 22との間に介在する非導電性榭脂 30を押し退けてバ ンプ 13と基板電極 22とは接合する力 上述の表面粗さとすることで、接合時におけ る非導電性榭脂 30の逃げが良好となる力もである。 As described above, the surface roughness is preferably set to 5 μm or more and 10 μm or less, because the non-conductive resin interposed between the bump 13 and the substrate electrode 22 is used as described later. A force for displacing the bump 13 and the substrate electrode 22 by joining the above-mentioned surface roughness. The above-mentioned surface roughness is also a force for improving the escape of the non-conductive resin 30 at the time of joining.
[0040] 以上の工程を経ることにより、電子部品 10は、複数の部品電極 12を有する部品本 体 11と、部品本体 11の複数の部品電極 12上に形成された複数のバンプ 13とを備 え、複数のバンプ 13のそれぞれが先端部 131に凹凸 132を有するものとなっている 。バンプ 13では、先端部 131の凹凸 132の複数の突起部分が次に説明する配線基 板との電気的接続に利用される。 Through the above steps, the electronic component 10 includes the component body 11 having the plurality of component electrodes 12 and the plurality of bumps 13 formed on the plurality of component electrodes 12 of the component body 11. In addition, each of the plurality of bumps 13 has an unevenness 132 at the tip 131. In the bump 13, a plurality of protrusions of the unevenness 132 of the tip 131 Used for electrical connection with the board.
[0041] 図 7及び図 8は電子部品 10を配線基板 20へ実装する様子を示す断面図である。 FIG. 7 and FIG. 8 are cross-sectional views showing how the electronic component 10 is mounted on the wiring board 20.
バンプ 13の先端部 131に凹凸 132が形成された電子部品 10が準備されると、図 7に 示すように、基板本体 21上に基板電極 22が形成された配線基板 20が準備され、ス テツプ S21では、基板電極 22上、少なくとも基板電極 22の周囲に接着性を有するぺ 一スト状の熱硬化性榭脂であるエポキシ榭脂が、非導電性榭脂 30として付与される 。基板本体 21は、ガラスエポキシ榭脂ゃポリイミド榭脂により形成されており、基板電 極 22は、基板本体 21に形成された配線パターン(図示省略)の一部として銅にて形 成されている。 When the electronic component 10 having the bumps 13 formed with the projections 132 at the tips 131 is prepared, as shown in FIG. 7, the wiring board 20 having the board electrodes 22 formed on the board body 21 is prepared. In step S21, an epoxy resin, which is an adhesive thermosetting resin having a bonding property, is applied as a non-conductive resin 30 on the substrate electrode 22 at least around the substrate electrode 22. The substrate body 21 is formed of glass epoxy resin or polyimide resin, and the substrate electrode 22 is formed of copper as a part of a wiring pattern (not shown) formed on the substrate body 21. .
[0042] 次に、図 8に示すように、電子部品 10のバンプ 13の先端部 131が配線基板 20の 基板電極 22と接触し得るように、電子部品 10と基板本体 21とが位置決めされ、電子 部品 10が配線基板 20に向けて所定の荷重で押圧される。これにより、先端部 131の 凹凸 132の複数の突起部分が、非導電性榭脂 30を挟み込みつつ押し退けて基板 電極 22と接触し、基板電極 22の表面にて、ある程度押し潰され、基板電極 22と電気 的に接続される。同時に、電子部品 10が加熱され、非導電性榭脂 30が硬化する (ス テツプ S22)。 Next, as shown in FIG. 8, the electronic component 10 and the board main body 21 are positioned so that the tip 131 of the bump 13 of the electronic component 10 can come into contact with the board electrode 22 of the wiring board 20. The electronic component 10 is pressed against the wiring board 20 with a predetermined load. As a result, the plurality of projections of the unevenness 132 of the tip 131 are pushed away while sandwiching the non-conductive resin 30 and come into contact with the substrate electrode 22, and are crushed to some extent on the surface of the substrate electrode 22, and It is electrically connected to. At the same time, the electronic component 10 is heated, and the non-conductive resin 30 is hardened (Step S22).
[0043] 図 9はバンプ 13の先端部 131と基板電極 22との接触界面における接合領域 53を 示す平面図である。バンプ 13の先端部 131と基板電極 22との間は、図 8及び図 9に 示すように、先端部 131と基板電極 22とが接触している複数の接触領域 51と、複数 の接触領域 51の周囲において非導電性榭脂 30が介在する榭脂介在領域 52とを有 する状態になっている。接触領域 51は、バンプ 13の先端部 131に形成された複数 の突起 133が押し潰された領域であり、バンプ 13と基板電極 22との間で電気的に接 続されている領域である。なお、エッチング等によりバンプ 13に規則的な凹凸が形成 される場合〖こは、図 10に例示するように接触領域 51は榭脂介在領域 52中に規則的 に散在することとなる。 FIG. 9 is a plan view showing a bonding region 53 at a contact interface between the tip 131 of the bump 13 and the substrate electrode 22. As shown in FIGS. 8 and 9, between the tip 131 of the bump 13 and the substrate electrode 22, there are a plurality of contact areas 51 where the tip 131 and the substrate electrode 22 are in contact, and a plurality of contact areas 51. And a resin intervening region 52 in which the non-conductive resin 30 intervenes. The contact region 51 is a region where the plurality of protrusions 133 formed on the tip 131 of the bump 13 are crushed, and is a region where the bump 13 and the substrate electrode 22 are electrically connected. When regular bumps are formed on the bumps 13 by etching or the like, the contact regions 51 are regularly scattered in the resin intervening region 52 as illustrated in FIG.
[0044] ここで、非導電性榭脂 30が硬化時に若干収縮することから、非導電性榭脂 30が部 品本体 11と基板本体 21との間に介在するとともにバンプ 13の先端部 131と基板電 極 22との間における榭脂介在領域 52にも介在することにより、非導電性榭脂 30の 接着力により電子部品 10と配線基板 20とが機械的に接合され、さらに、バンプ 13と 基板電極 22とが互 ヽに引き寄せられて確実に電気的に接続される。 Here, since the non-conductive resin 30 slightly shrinks during curing, the non-conductive resin 30 is interposed between the component main body 11 and the substrate main body 21 and at the same time as the tip 131 of the bump 13 By interposing also in the resin interposed area 52 between the substrate electrode 22 and the non-conductive resin 30, The electronic component 10 and the wiring board 20 are mechanically joined by the adhesive force, and the bumps 13 and the board electrodes 22 are attracted to each other to be surely electrically connected.
[0045] 以上の工程を経て製造された実装済基板 40は、図 8に示すように、複数の基板電 極 22が形成された配線基板 20と、配線基板 20の複数の基板電極 22に電気的にそ れぞれ接続される複数のバンプ 13が形成された電子部品 10と、配線基板 20と電子 部品 10とを接着する非導電性榭脂 30とを備えたものとなっており、各バンプ 13の先 端部 131と対応する基板電極 22との間の領域は、複数の接触領域 51と、複数の接 触領域 51の周囲において非導電性榭脂 30が介在する榭脂介在領域 52とを有する As shown in FIG. 8, the mounted substrate 40 manufactured through the above steps is electrically connected to the wiring substrate 20 on which the plurality of substrate electrodes 22 are formed and the plurality of substrate electrodes 22 of the wiring substrate 20. Electronic component 10 on which a plurality of bumps 13 connected to each other are formed, and a non-conductive resin 30 for bonding the wiring board 20 and the electronic component 10 to each other. The region between the tip 131 of the bump 13 and the corresponding substrate electrode 22 includes a plurality of contact regions 51 and a resin interposition region 52 around which the non-conductive resin 30 is interposed. Having
[0046] 以上のように、第 1の実施の形態に係る実装済基板 40では、電子部品 10のバンプ 13の先端部 131に複数の突起 133を形成することにより、バンプ 13と基板電極 22と の接触面のほぼ全域に亘つて非導電性榭脂 30が挟まってしまうことが防止され、電 子部品 10のバンプ 13と配線基板 20の基板電極 22との電気的接続の信頼性が高め られる。し力も、複数の接触領域 51の周囲において非導電性榭脂 30が介在する榭 脂介在領域 52が存在することにより、非導電性榭脂 30の硬化時の収縮によりバンプ 13と基板電極 22とが確実に相互に引き寄せられる。その結果、バンプ 13と基板電 極 22の電気的接続の頼性がより一層高められる。また、バンプ 13の先端部 131に形 成された複数の突起 133が押し潰されることにより広い面積で先端部 131と基板電 極 22とが接触し、これにより、バンプ 13と基板電極 22との電気的接続の信頼性がよ り一層高められる。さらに、バンプ 13の先端部が 1力所で尖っている場合に比べて実 装時の荷重及び先端部の押し潰し量を低減することができる。 As described above, in the mounted substrate 40 according to the first embodiment, the bump 13 and the substrate electrode 22 are formed by forming the plurality of protrusions 133 at the tip 131 of the bump 13 of the electronic component 10. The non-conductive resin 30 is prevented from being caught almost all over the contact surface of the electronic component 10, and the reliability of the electrical connection between the bump 13 of the electronic component 10 and the substrate electrode 22 of the wiring substrate 20 is improved. . Since the non-conductive resin 30 intervenes around the plurality of contact regions 51 and the resin-intervening region 52 exists, the shrinkage of the non-conductive resin 30 during hardening causes the bump 13 and the substrate electrode 22 to contact each other. Are reliably attracted to each other. As a result, the reliability of the electrical connection between the bump 13 and the substrate electrode 22 is further improved. Further, the plurality of protrusions 133 formed on the tip 131 of the bump 13 are crushed, so that the tip 131 and the substrate electrode 22 come into contact with each other in a large area, and thereby, the contact between the bump 13 and the substrate electrode 22 is formed. The reliability of the electrical connection is further improved. Furthermore, the load at the time of mounting and the amount of crushing of the tip can be reduced as compared with the case where the tip of the bump 13 is sharp at one point.
[0047] ところで、例えばバンプ 13の先端部が 1力所で尖っている場合、図 11に示すように 、バンプ 13と基板電極 22とが距離 60だけずれて先端が基板電極 22から外れると、 バンプ 13の先端が基板電極 22から脱落するように曲がって十分に接触しない状態 となってしまう。すなわち、先端部 131の突起を潰して接触領域を確保する場合には 、先端が基板電極 22の上面に載る必要がある。このような接触不良は配線基板 20 が可撓性を有する場合に特に顕著となる。これに対して、第 1の実施の形態に係る電 子部品 10のようにバンプ 13の先端部 131が凹凸 132を有する場合、図 12に示すよ うに、バンプ 13と基板電極 22とが距離 60だけずれてバンプ 13の中央が基板電極 2 2に載らない場合であっても、前記凹凸 132の形成によりバンプ 13の先端における 面積が 1力所で尖っている場合に比べて大きいことから、先端部 131の一部が基板 電極 22の表面と確実に接触し、バンプ 13と基板電極 22との電気的接続が確保され る。 By the way, for example, when the tip of the bump 13 is sharp at one point, as shown in FIG. 11, when the bump 13 and the substrate electrode 22 are displaced by a distance 60 and the tip comes off the substrate electrode 22, The tip of the bump 13 is bent so as to fall off from the substrate electrode 22, and the bump 13 is not sufficiently contacted. That is, when the projection of the tip 131 is crushed to secure a contact area, the tip needs to be placed on the upper surface of the substrate electrode 22. Such poor contact is particularly remarkable when the wiring board 20 has flexibility. On the other hand, when the tip portion 131 of the bump 13 has the unevenness 132 as in the electronic component 10 according to the first embodiment, as shown in FIG. As described above, even when the bump 13 and the substrate electrode 22 are displaced by the distance 60 and the center of the bump 13 is not placed on the substrate electrode 22, the area at the tip of the bump 13 is reduced to one place by the formation of the unevenness 132. Since it is larger than the case where it is sharp, a part of the tip portion 131 is surely in contact with the surface of the substrate electrode 22, and the electrical connection between the bump 13 and the substrate electrode 22 is ensured.
[0048] すなわち、第 1の実施の形態に係る電子部品 10は、バンプ 13の先端部 131が凹 凸 132を有することにより、バンプ 13と基板電極 22との位置決め誤差の許容量が大 きくなり、電子部品 10の実装の歩留りを向上することができる。 That is, in the electronic component 10 according to the first embodiment, since the tip portion 131 of the bump 13 has the concave and convex 132, the allowable amount of the positioning error between the bump 13 and the substrate electrode 22 increases. Thus, the yield of mounting the electronic component 10 can be improved.
[0049] 又、上述したように、バンプ 13は、金ワイヤを引きちぎって形成されることから、大径 部である台座部分と、該台座部分上に形成され台座部分に比べて小径である先端 部 131とから構成された 2段形状であり、凹凸 132は、先端部 131に形成される。した がって、バンプ 13と基板電極 22との接合時において、バンプ 13は、非導電性榭脂 3 0を押し退け易ぐかつ加圧し易い形状である。 Also, as described above, since the bump 13 is formed by tearing the gold wire, the pedestal portion, which is a large-diameter portion, and the tip formed on the pedestal portion and having a smaller diameter than the pedestal portion. This is a two-stage shape composed of the portion 131 and the unevenness 132 is formed on the tip portion 131. Therefore, at the time of bonding between the bump 13 and the substrate electrode 22, the bump 13 has a shape that allows the non-conductive resin 30 to be easily displaced and pressed.
[0050] 次に、本発明の第 2の実施の形態について説明する。第 2の実施の形態における 電子部品実装では、第 1の実施の形態における電子部品のバンプの先端部に凹凸 を形成する工程 (ステップ Sl l, S12)に代えて、配線基板の基板電極に凹凸を形成 する工程が設けられる。 Next, a second embodiment of the present invention will be described. In the electronic component mounting according to the second embodiment, instead of the step (steps Sl12 and S12) of forming bumps on the tip of the electronic component bump in the first embodiment, bumps are formed on the substrate electrodes of the wiring board. Is formed.
[0051] 図 13乃至図 15は配線基板の製造工程の一部として基板電極に複数の突起が形 成される様子を説明する断面図である。凹凸形成前の配線基板 20は、第 1の実施の 形態と同様のものであり、ガラスエポキシ榭脂ゃポリイミド榭脂等により形成された基 板本体 21上に銅の配線パターン(図示省略)の一部として基板電極 22が形成されて いる。尚、基板電極 22について、第 1の実施の形態の場合とは異なる形状のものを 例示している。基板電極 22の表面 221に対する凹凸は、図 13に示すように、型 80a を基板電極 22に位置決めし、図 14に示すように型 80aを基板電極 22の表面 221に 押圧した後、型 80aを離すことにより図 15に示すように形成される。以下の説明では 、凹凸形成後の基板電極に符号 22aを付し、その表面に符号 221aを付す。 FIGS. 13 to 15 are cross-sectional views illustrating a state in which a plurality of protrusions are formed on a substrate electrode as a part of a manufacturing process of a wiring board. The wiring board 20 before the formation of the irregularities is the same as that of the first embodiment, and a copper wiring pattern (not shown) is formed on a substrate body 21 formed of glass epoxy resin, polyimide resin, or the like. A substrate electrode 22 is formed as a part. Note that the substrate electrode 22 has a shape different from that of the first embodiment. As shown in FIG. 13, the unevenness of the surface 221 of the substrate electrode 22 is determined by positioning the mold 80a on the substrate electrode 22 and pressing the mold 80a against the surface 221 of the substrate electrode 22 as shown in FIG. When separated, they are formed as shown in FIG. In the following description, reference numeral 22a is assigned to the substrate electrode after the formation of the unevenness, and reference numeral 221a is assigned to the surface thereof.
[0052] 型 80aは、第 1の実施の形態と同様に、ステンレス鋼により形成されており、図 13に 示すように基板電極 22に対向する部分が突出しており、その先端面が凹凸面 81aと なっている。基板電極 22aの表面 221aは、第 1の実施の形態のバンプ 13の先端部 1 31と同様で図 15に示すように表面粗さの最大高さ Ryが 2 m以上 15 μ m以下とさ れることが好ましぐ 5 m以上 10 m以下とされることがさらに好ましい。従って、型 80aの凹凸面 81aの表面粗さの最大高さも、 2 μ m以上 15 m以下、好ましくは 5 μ m以上 10 m以下となっている。そして、型 80aの凹凸面 81aを基板電極 22の表面 221に押圧することにより、前記好ま 、表面粗さの基板電極 22aとされる。 As in the first embodiment, the mold 80a is formed of stainless steel, and the portion facing the substrate electrode 22 protrudes, as shown in FIG. When It has become. The surface 221a of the substrate electrode 22a has a maximum surface roughness Ry of 2 m or more and 15 μm or less as shown in FIG. 15 in the same manner as the tip portion 131 of the bump 13 of the first embodiment. It is more preferable that the distance be 5 m or more and 10 m or less. Therefore, the maximum height of the surface roughness of the uneven surface 81a of the mold 80a is also 2 μm or more and 15 m or less, preferably 5 μm or more and 10 m or less. Then, by pressing the uneven surface 81a of the mold 80a against the surface 221 of the substrate electrode 22, the substrate electrode 22a having the above-described surface roughness is obtained.
尚、基板電極 22aの表面 221aにおける表面粗さを上述の値とする理由は、バンプ 13につ!/、て上述した理由に同じである。 The reason why the surface roughness of the surface 221a of the substrate electrode 22a is set to the above value is the same as the reason described above for the bump 13!
[0053] 以上の工程を経ることにより、図 15に示すように、配線基板 20は、基板本体 21と、 基板本体 21に形成された複数の基板電極 22aを含む配線パターンとを備え、複数 の基板電極 22aのそれぞれ力 表面 221aに凹凸 222を有するものとなっている。基 板電極 22aでは、表面 221aの凹凸 222の複数の突起部分が次に説明する電子部 品との電気的接続に利用される。 By performing the above steps, as shown in FIG. 15, the wiring substrate 20 includes the substrate main body 21 and the wiring pattern including the plurality of substrate electrodes 22a formed on the substrate main body 21. Each of the substrate electrodes 22a has irregularities 222 on the force surface 221a. In the substrate electrode 22a, a plurality of protrusions of the irregularities 222 on the surface 221a are used for electrical connection with electronic components described below.
[0054] 図 16及び図 17は電子部品 10を配線基板 20へ実装する様子を示す断面図である 。第 2の実施の形態では、図 16に示すように、部品本体 11の部品電極 12にバンプ 1 3を形成した電子部品 10が準備され、配線基板 20の基板電極 22a上、少なくとも基 板電極 22aの周囲に接着性を有するペースト状の熱硬化性榭脂であるエポキシ榭脂 力 非導電性榭脂 30として付与される。該動作は、図 1に示すステップ S21に相当す る。なお、第 1の実施の形態と異なり、バンプ 13は、金により形成されたスタッドバンプ の先端をレべリング、つまり前記先端をある程度潰して平坦ィ匕したものである。 FIG. 16 and FIG. 17 are cross-sectional views showing how the electronic component 10 is mounted on the wiring board 20. In the second embodiment, as shown in FIG. 16, an electronic component 10 having a bump 13 formed on a component electrode 12 of a component body 11 is prepared, and at least the substrate electrode 22a is formed on the substrate electrode 22a of the wiring board 20. Epoxy resin, which is a paste-like thermosetting resin having adhesive properties around the periphery, is provided as a non-conductive resin 30. This operation corresponds to step S21 shown in FIG. Unlike the first embodiment, the bump 13 is formed by leveling the tip of a stud bump formed of gold, that is, flattening the tip by crushing the tip to some extent.
[0055] 次に、図 17に示すように、電子部品 10のバンプ 13の先端部 131aが配線基板 20 の基板電極 22aと接触し得るように位置決めされ、電子部品 10が配線基板 20に向 けて所定の荷重で押圧される。これにより、非導電性榭脂 30がバンプ 13と基板電極 22aとの間に挟み込まれて非導電性榭脂 30が基板電極 22aの表面 22 laの複数の 突起部分 223により押し退けられ、バンプ 13の先端部 13 laは、基板電極 22aの表 面 221aの複数の突起部分をある程度押し潰しつつ基板電極 22aと電気的に接続さ れる。同時に、電子部品 10が加熱され、非導電性榭脂 30が硬化する (ステップ S22) [0056] このとき、バンプ 13の先端部 131aと基板電極 22aとの間の接触界面における接合 領域 53は、図 9と同様に、先端部 131aと基板電極 22aとが接触している複数の接触 領域 51と、複数の接触領域 51の周囲にお ヽて非導電性榭脂 30が介在する榭脂介 在領域 52とを有する状態になっている。接触領域 51は、基板電極 22aの表面 221a に形成された凹凸 222に含まれる複数の突起 223が押し潰された領域であり、バン プ 13と基板電極 22aとの間で電気的に接続されている領域である。 Next, as shown in FIG. 17, the tip 131 a of the bump 13 of the electronic component 10 is positioned so as to be able to contact the board electrode 22 a of the wiring board 20, and the electronic component 10 is turned toward the wiring board 20. Is pressed with a predetermined load. As a result, the non-conductive resin 30 is sandwiched between the bump 13 and the substrate electrode 22a, and the non-conductive resin 30 is pushed away by the plurality of protrusions 223 on the surface 22la of the substrate electrode 22a. The tip portion 13la is electrically connected to the substrate electrode 22a while crushing a plurality of protrusions on the surface 221a of the substrate electrode 22a to some extent. At the same time, the electronic component 10 is heated and the non-conductive resin 30 is cured (Step S22) At this time, the bonding area 53 at the contact interface between the tip 131a of the bump 13 and the substrate electrode 22a is formed by a plurality of contact areas where the tip 131a and the substrate electrode 22a are in contact, as in FIG. There is a region 51 and a resin-interposed region 52 around which the non-conductive resin 30 is interposed around the plurality of contact regions 51. The contact region 51 is a region where a plurality of protrusions 223 included in the unevenness 222 formed on the surface 221a of the substrate electrode 22a are crushed, and are electrically connected between the bump 13 and the substrate electrode 22a. Area.
[0057] ここで、非導電性榭脂 30が硬化時に若干収縮することから、非導電性榭脂 30が部 品本体 11と基板本体 21との間に介在するとともにバンプ 13の先端部 13 laと基板電 極 22aとの接触面における榭脂介在領域 52にも介在することにより、非導電性榭脂 3 0の接着力により電子部品 10と配線基板 20とが機械的に接合され、さらに、バンプ 1 3と基板電極 22aとが互 、に引き寄せられて確実に電気的に接続される。 Here, since the non-conductive resin 30 slightly shrinks during curing, the non-conductive resin 30 is interposed between the component main body 11 and the substrate main body 21 and the tip 13 la of the bump 13 is formed. The electronic component 10 and the wiring board 20 are mechanically joined by the adhesive force of the non-conductive resin 30 by interposing also in the resin intervening region 52 on the contact surface between the substrate and the substrate electrode 22a. The bump 13 and the substrate electrode 22a are attracted to each other and are reliably connected electrically.
[0058] 以上の工程を経て製造された実装済基板 40は、図 17に示すように、複数の基板 電極 22aが形成された配線基板 20と、配線基板 20の複数の基板電極 22aに電気的 にそれぞれ接続される複数のバンプ 13が形成された電子部品 10と、配線基板 20と 電子部品 10とを接着する非導電性榭脂 30とを備えたものとなっており、各バンプ 13 の先端部 131aと基板電極 22aとの間の領域は、複数の接触領域 51と、複数の接触 領域 51の周囲において非導電性榭脂 30が介在する榭脂介在領域 52とを有する。 As shown in FIG. 17, the mounted board 40 manufactured through the above steps is electrically connected to the wiring board 20 on which the plurality of board electrodes 22a are formed and the plurality of board electrodes 22a of the wiring board 20. An electronic component 10 having a plurality of bumps 13 connected thereto, respectively, and a non-conductive resin 30 for bonding the wiring board 20 and the electronic component 10 are provided. The region between the portion 131a and the substrate electrode 22a has a plurality of contact regions 51 and a resin interposed region 52 around which the non-conductive resin 30 is interposed.
[0059] 以上のように、第 2の実施の形態に係る実装済基板 40では、配線基板 20の基板電 極 22aの表面 221aに複数の突起 223を形成することにより、バンプ 13と基板電極 2 2aとの間のほぼ全域に亘つて非導電性榭脂 30が挟まることが防止され、電子部品 1 0のバンプ 13と配線基板 20の基板電極 22aとの電気的接続の信頼性が高められる 。し力も、第 1の実施の形態と同様に、複数の接触領域 51の周囲において非導電性 榭脂 30が介在する榭脂介在領域 52が存在することにより、バンプ 13と基板電極 22 aとの電気的接続の信頼性がより一層高められる。また、基板電極 22aの表面 221a に形成された複数の突起 223が押し潰されることにより、広い面積でバンプ 13の先 端部 131aと基板電極 22aとが接触し、電気的接続の信頼性がより一層高められる。 As described above, in the mounted board 40 according to the second embodiment, the bump 13 and the board electrode 2 are formed by forming the plurality of protrusions 223 on the surface 221a of the board electrode 22a of the wiring board 20. Non-conductive resin 30 is prevented from being pinched over almost the entire area between the bumps 2a and 2a, and the reliability of electrical connection between the bumps 13 of the electronic component 10 and the board electrodes 22a of the wiring board 20 is improved. Similarly to the first embodiment, the presence of the resin interposed area 52 in which the non-conductive resin 30 intervenes around the plurality of contact areas 51, as in the first embodiment, allows the bump 13 and the substrate electrode 22a to be in contact with each other. The reliability of the electrical connection is further improved. In addition, the plurality of protrusions 223 formed on the surface 221a of the substrate electrode 22a are crushed, so that the front end 131a of the bump 13 and the substrate electrode 22a come into contact with a large area, and the reliability of the electrical connection is further improved Can be further enhanced.
[0060] 以上、本発明の実施の形態について説明してきたが、本発明は前記実施の形態に 限定されるものではなぐ様々な変形が可能である。 第 1の実施の形態において、ステップ S 11にて形成されるバンプ 13は、金ワイヤの 先端を溶融して形成される、いわゆる、スタッドバンプに限られず、他の手法により形 成されたボールバンプであってもよ!/、。 The embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and various modifications can be made. In the first embodiment, the bumps 13 formed in step S11 are not limited to so-called stud bumps formed by melting the tips of gold wires, but are ball bumps formed by other methods. May be! /.
[0061] 第 1の実施の形態において、バンプ 13の先端部 131の複数の突起 133は、ランダ ムに形成されていても規則的に形成されていてもよぐまた、先端面に沿って伸びる 筋状、例えば直線、曲線等の筋状の突起であってもよい。また、バンプ 13の先端部 1 31の複数の突起 133は、型 80の押圧に限られず、他の方法によって形成されてもよ い。第 2の実施の形態においても、基板電極 22aの表面 221aの複数の突起 223は、 ランダムに形成されていても規則的に形成されていてもよぐまた、表面に沿って伸 びる筋状、例えば直線、曲線等の筋状の突起であってもよい。また、基板電極 22aの 表面 221aの複数の突起 223は、型の押圧に限られず、他の方法によって形成され てもよい。 [0061] In the first embodiment, the plurality of protrusions 133 of the tip portion 131 of the bump 13 may be formed randomly or regularly, and extend along the tip surface. It may be a streak-like projection such as a straight line or a curve. Further, the plurality of protrusions 133 of the tip portion 131 of the bump 13 are not limited to the pressing of the mold 80, and may be formed by another method. Also in the second embodiment, the plurality of protrusions 223 on the surface 221a of the substrate electrode 22a may be formed randomly or regularly, and may be streaks extending along the surface. For example, it may be a linear or curved streak-like projection. Further, the plurality of protrusions 223 on the surface 221a of the substrate electrode 22a are not limited to the pressing of the mold, and may be formed by another method.
[0062] 例えば、図 3に例示するバンプ 13の尖った先端部 131を予め平らな面に押圧して 潰しておき、すなわちレべリングを行っておき、先端部 131の平らな面にプラズマ処 理、ブラスト処理、ヤスリ掛け等により凹凸が形成されてもよい。また、バンプ 13は部 品電極 12上に形成される平らなメツキバンプであってもよぐこの場合であっても凹凸 が形成された型を押圧することによりバンプの表面に容易に凹凸を形成することがで きる。なお、メツキバンプの場合においてもプラズマ処理、ブラスト処理、ヤスリ掛け等 により凹凸が形成されてもよぐさらには、部品電極 12上においてメツキの成長速度 にばらつきを与えることにより、あるいは、メツキ前の部品電極 12上にエッチング等に より凹凸を形成しておくことにより、凹凸を有するバンプを形成することも可能である。 For example, the pointed tip 131 of the bump 13 illustrated in FIG. 3 is pressed against a flat surface in advance and crushed, that is, leveling is performed, and a plasma treatment is performed on the flat surface of the tip 131. The unevenness may be formed by processing, blasting, sanding, or the like. Also, the bump 13 may be a flat metal bump formed on the component electrode 12 or even in this case, the bump is easily formed on the surface of the bump by pressing the mold having the unevenness. be able to. In the case of a bump, even if bumps are formed by plasma treatment, blasting, filing, or the like, the bump growth rate may be varied on the component electrode 12 or the bump before the bump may be formed. By forming irregularities on the electrode 12 by etching or the like, bumps having irregularities can be formed.
[0063] なお、バンプ 13と基板電極 22, 22aとの間は通常は接触状態である力 例えば、 バンプ 13が金で形成され、基板電極の表面にも金メッキが施されている場合は接合 時に温度を上げるとバンプ 13の金が拡散して原子レベルでの金属接合状態となる 場合もある。すなわち、前記実施の形態におけるバンプ 13と基板電極 22, 22aとの 間の接触領域 51では物理的な金属接合状態となっていてもよい。 [0063] A force that is normally in a state of contact between the bump 13 and the substrate electrodes 22 and 22a. For example, if the bump 13 is formed of gold and the surface of the substrate electrode is also plated with gold, the bonding is performed during bonding. When the temperature is increased, the gold on the bumps 13 may diffuse and form a metal-bonded state at the atomic level. That is, the contact area 51 between the bump 13 and the substrate electrodes 22 and 22a in the above embodiment may be in a physical metal bonding state.
第 1及び第 2の実施の形態において、電子部品 10の部品本体 11は、半導体のベ ァチップに限られず、例えば、パッケージィ匕された電子部品の様に、微小な部品電 極を有する他の様々な電子部品であってよい。配線基板 20の基板本体は、ガラスェ ポキシ榭脂ゃポリイミド榭脂に限られず、例えば、他の榭脂ゃセラミック、ガラス等によ り形成されたものであってもょ 、。 In the first and second embodiments, the component body 11 of the electronic component 10 is not limited to a semiconductor chip, but may be, for example, a small component electronic component such as a packaged electronic component. Various other electronic components having poles may be used. The substrate body of the wiring board 20 is not limited to glass epoxy resin / polyimide resin, but may be made of other resin / ceramic, glass, or the like, for example.
[0064] 第 1及び第 2の実施の形態において、非導電性榭脂は、流動性を有するペースト状 ものに限られず、シート状に形成されたものが用いられてもよい。この場合、シート状 の非導電性榭脂は、基板電極を覆って配線基板 20上に貼り付けることにより、基板 電極の周囲に付与される。 [0064] In the first and second embodiments, the non-conductive resin is not limited to a paste having fluidity, but may be a sheet-like resin. In this case, the sheet-like non-conductive resin is applied to the periphery of the substrate electrode by covering the substrate electrode and pasting it on the wiring board 20.
[0065] 第 1及び第 2の実施の形態において、型 80, 80aは、ステンレス鋼に限られず、ノ ンプ又は基板電極よりも硬 、材料であれば、どのような材料により形成されたもので あってもよい。 [0065] In the first and second embodiments, the molds 80 and 80a are not limited to stainless steel, and may be made of any material that is harder than a pump or a substrate electrode. There may be.
[0066] なお、バンプ形成前の電子部品、つまり部品本体 11が実装施設に納入されて、電 子部品のバンプ形成を実装施設にて行う場合には、バンプ 13に複数の突起を形成 する第 1の実施の形態に係る実装方法が好適であり、一方、レべリング済みのバンプ を有する電子部品が実装施設に納入されて、レべリング済みのバンプを有する電子 部品が配線基板に実装される場合には、配線基板 20の基板電極 22に複数の突起 を形成する第 2の実施の形態に係る実装方法が好適である。 In the case where the electronic component before bump formation, that is, the component body 11 is delivered to the mounting facility and the bump formation of the electronic component is performed at the mounting facility, a plurality of protrusions are formed on the bump 13. The mounting method according to the first embodiment is suitable, while an electronic component having leveled bumps is delivered to a mounting facility, and an electronic component having leveled bumps is mounted on a wiring board. In this case, the mounting method according to the second embodiment in which a plurality of protrusions are formed on the substrate electrode 22 of the wiring substrate 20 is preferable.
[0067] 又、第 1実施形態において、凹凸 132が形成されるバンプ 13の凹凸形成面 134は 、図 18に示すように、凸状、つまりバンプ 13と基板電極 22とが接合される状態にお いて基板電極 22側へ凸状とすることもできる。このように構成することで、バンプ 13と 基板電極 22とが接合するとき、まず最初にバンプ 13の中央部分が基板電極 22に接 触し、その後、バンプ 13の周縁部に向力つて接触していく。よって、バンプ 13と基板 電極 22との間に介在する非導電性榭脂 30は、バンプ 13と基板電極 22との間に閉じ 込められることなぐバンプ 13の外側へスムーズに排出可能である。したがって、バン プ 13と基板電極 22との電気的接続の信頼性をより向上させることができる。尚、前記 凸状の凹凸形成面 134の形成は、凹状の型を用いることで可能となる。 Further, in the first embodiment, the unevenness forming surface 134 of the bump 13 on which the unevenness 132 is formed has a convex shape, that is, a state in which the bump 13 and the substrate electrode 22 are joined, as shown in FIG. In addition, the shape may be convex toward the substrate electrode 22 side. With this configuration, when the bump 13 and the substrate electrode 22 are joined, first, the central portion of the bump 13 contacts the substrate electrode 22 and then contacts the peripheral portion of the bump 13 with a force. To go. Therefore, the non-conductive resin 30 interposed between the bump 13 and the substrate electrode 22 can be smoothly discharged to the outside of the bump 13 without being confined between the bump 13 and the substrate electrode 22. Therefore, the reliability of the electrical connection between the bump 13 and the substrate electrode 22 can be further improved. In addition, the formation of the convex-shaped uneven surface 134 can be achieved by using a concave mold.
[0068] 又、第 1及び第 2の実施の形態において、図 19に示すように、バンプ 13と基板電極 22, 22aとの接合領域 53の中央部 53aでは、単位面積当たりの接触領域 51の数を 密に、接合領域 53の周縁部 53bでは中央部 53aに比べて粗く形成されるように、ノ ンプ 13に凹凸 132を、又は基板電極 22aに凹凸 222を形成するようにしてもよい。つ まり、バンプ 13では、図 22に示すように、凹凸形成面 134の中央部 134aでは凹凸 1 32を密に、その周縁部 134bでは中央部 134aに比べて粗く凹凸 132が形成される。 基板電極 22aでは、図 22〖こ示すよう〖こ、その表面 221の中央部 221cでは凹凸 222 を密に、その周縁部 221dでは中央部 221cに比べて粗く凹凸 222が形成される。尚 、接合領域 53の中央部 53a及び周縁部 53bは、明確に規定される領域ではないが、 例えば、接合領域 53の中心力も接合領域 53の半径のほぼ半分までの領域を中央 部 53aとし、前記半径のほぼ半分カゝら接合領域 53の外周までの領域を周縁部 53bと することができる。又、バンプ 13及び基板電極 22aにおける中央部及び周縁部の定 義も、接合領域 53における上述の中央部 53a及び周縁部 53bの定義に対応する。 In the first and second embodiments, as shown in FIG. 19, in the central portion 53a of the bonding region 53 between the bump 13 and the substrate electrodes 22, 22a, the contact region 51 per unit area The number is so high that the peripheral portion 53b of the joining region 53 is formed coarser than the central portion 53a. The bumps 132 may be formed on the pump 13 or the bumps 222 may be formed on the substrate electrode 22a. In other words, in the bump 13, as shown in FIG. 22, the unevenness 132 is formed densely in the central portion 134a of the unevenness forming surface 134, and the unevenness 132 is formed coarsely in the peripheral portion 134b as compared with the central portion 134a. In the substrate electrode 22a, as shown in FIG. 22, the unevenness 222 is formed densely in the central portion 221c of the surface 221 and the unevenness 222 is formed coarsely in the peripheral portion 221d as compared with the central portion 221c. The central portion 53a and the peripheral portion 53b of the joining region 53 are not clearly defined regions.For example, the central portion 53a of the joining region 53 has a central force up to approximately half the radius of the joining region 53. A region up to approximately half the radius and up to the outer periphery of the joining region 53 can be defined as a peripheral portion 53b. The definition of the central portion and the peripheral portion of the bump 13 and the substrate electrode 22a also corresponds to the definition of the central portion 53a and the peripheral portion 53b in the bonding region 53.
[0069] 上述したように、バンプ 13及び基板電極 22、 22aは、介在する非導電性榭脂 30を 押し退けながら接合することから、中央部 53aに比べて周縁部 53bが粗くなるように 凹凸 132及び凹凸 222を形成することで、接合時における非導電性榭脂 30の逃げ が良好となる。よって、バンプ 13と基板電極 22、 22aとの電気的接続の信頼性をより 向上させることができる。尚、図 19では、接触領域 51の形状を、便宜上ほぼ円形に て図示しているが、その形状は円形に限定されるものではない。 As described above, since the bump 13 and the substrate electrodes 22 and 22a are joined while pushing away the non-conductive resin 30 interposed therebetween, the bumps 13 and the irregularities 132 are formed so that the peripheral portion 53b is rougher than the central portion 53a. By forming the unevenness 222, the escape of the non-conductive resin 30 at the time of joining is improved. Therefore, the reliability of the electrical connection between the bump 13 and the substrate electrodes 22 and 22a can be further improved. In FIG. 19, the shape of the contact region 51 is shown as being substantially circular for convenience, but the shape is not limited to a circle.
[0070] 又、第 1及び第 2の実施の形態において、バンプ 13及び基板電極 22、 22aの接合 時における非導電性榭脂 30の逃げを良くするため、接触領域 51及び榭脂介在領域 52を接合領域 53の全域にわたりランダムに形成するのではなぐ図 20に示すよう〖こ 、接合領域 53の中央部 53aから周縁部 53bに向けて放射状に榭脂介在領域 52が 延在する榭脂排出用通路 52aを形成するように、凹凸 132及び凹凸 222をバンプ 13 及び基板電極 22に形成してもよい。該構成によっても、接合時に、非導電性榭脂 30 は榭脂排出用通路 52aを通ることで容易に接合領域 53の外部へ排出されることから 、バンプ 13と基板電極 22との電気的接続の信頼性をより向上させることができる。 In the first and second embodiments, the contact region 51 and the resin intervening region 52 are provided to improve the escape of the non-conductive resin 30 when the bump 13 and the substrate electrodes 22 and 22a are joined. Rather than being formed randomly over the entire joining region 53, as shown in FIG. 20, the resin drainage in which the resin interposed region 52 extends radially from the central portion 53a of the joining region 53 toward the peripheral edge 53b. The bumps 132 and the bumps 222 may be formed on the bump 13 and the substrate electrode 22 so as to form the use passage 52a. Also according to this configuration, at the time of bonding, the non-conductive resin 30 is easily discharged to the outside of the bonding region 53 by passing through the resin discharge passage 52a, so that the electrical connection between the bump 13 and the substrate electrode 22 is made. Reliability can be further improved.
[0071] 又、接合時における非導電性榭脂 30の逃げを考慮したときには、図 19を参照して 上述したように、接合領域 53の周縁部 53bに比べて中央部 53aにおける接触領域 5 1の数を多くするのが好ましいが、一方、図 11に示すように、バンプ 13と基板電極 22 、 22aとが位置ずれしたときでも両者の電気的接続の信頼性を確保するためには、接 合領域 53の中央部 53aに比べて周縁部 53bにおける接触領域 51の数を多くするの が好ましい。そこで、第 1及び第 2の実施の形態において、図 21に示すように、接合 領域 53の周縁部 53bにおける接触領域 51が密となり、その中央部 53aにおける接 触領域 51を周縁部 53bに比べて粗くなるようにするとともに、周縁部 53bでは、非導 電性榭脂 30が排出される際の流動抵抗を低減し逃げ易くするため、接触領域 51が 千鳥状の配置となるように、凹凸 132及び凹凸 222を形成してもよい。つまり、バンプ 13では、図 23に示すように、凹凸形成面 134の中央部 134aでは凹凸 132を粗ぐ その周縁部 134bでは中央部 134aに比べて密にかつ千鳥状に凹凸 132が形成され る。基板電極 22aでは、図 23に示すように、その表面 221の中央部 221cでは凹凸 2 22を粗ぐその周縁部 221dでは中央部 221cに比べて密にかつ千鳥状に凹凸 222 が形成される。 When the escape of the non-conductive resin 30 at the time of joining is considered, as described above with reference to FIG. 19, the contact area 5 1 at the center 53 a is smaller than the peripheral area 53 b of the joining area 53. However, as shown in FIG. 11, even if the bump 13 and the substrate electrodes 22 and 22a are displaced, as shown in FIG. It is preferable to increase the number of contact regions 51 in the peripheral portion 53b as compared with the central portion 53a of the joining region 53. Therefore, in the first and second embodiments, as shown in FIG. 21, the contact region 51 at the peripheral portion 53b of the joining region 53 becomes dense, and the contact region 51 at the central portion 53a is compared with the peripheral portion 53b. In order to reduce the flow resistance when the non-conductive resin 30 is discharged and to make it easy to escape, the contact area 51 is formed in a staggered manner at the peripheral edge 53b. 132 and unevenness 222 may be formed. In other words, in the bump 13, as shown in FIG. 23, the central portion 134a of the concave / convex forming surface 134 roughens the concave / convex 132.The peripheral edge 134b forms the concave / convex 132 denser and staggered than the central portion 134a. . In the substrate electrode 22a, as shown in FIG. 23, the central portion 221c of the surface 221 roughens the irregularities 222 at the peripheral portion 221d. The irregularities 222 are formed densely and staggered at the peripheral edge 221d as compared with the central portion 221c.
[0072] なお、前記様々な実施形態のうちの任意の実施形態を適宜組み合わせることにより 、それぞれの有する効果を奏するようにすることができる。 [0072] Note that by appropriately combining any of the various embodiments, the effects of the respective embodiments can be achieved.
本発明は、添付図面を参照しながら好ましい実施形態に関連して充分に記載され ているが、この技術の熟練した人々にとつては種々の変形や修正は明白である。そ のような変形や修正は、添付した請求の範囲による本発明の範囲から外れない限り において、その中に含まれると理解されるべきである。 Although the present invention has been fully described in connection with preferred embodiments thereof with reference to the accompanying drawings, various changes and modifications will be apparent to those skilled in the art. It is to be understood that such changes and modifications are intended to be included therein without departing from the scope of the invention as set forth in the appended claims.
産業上の利用可能性 Industrial applicability
[0073] 本発明は、電子部品を配線基板に実装した実装済基板、該実装済基板を製造す るための電子部品実装方法、並びに、前記実装済基板に用いられる電子部品、及 び配線基板に適用可能である。 The present invention relates to a mounted board having an electronic component mounted on a wiring board, an electronic component mounting method for manufacturing the mounted board, an electronic component used for the mounted board, and a wiring board Applicable to
Claims
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005517029A JPWO2005069364A1 (en) | 2004-01-13 | 2005-01-12 | Mounted board, electronic component mounting method, electronic component, and wiring board |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004005271 | 2004-01-13 | ||
| JP2004-005271 | 2004-01-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2005069364A1 true WO2005069364A1 (en) | 2005-07-28 |
Family
ID=34792092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2005/000213 Ceased WO2005069364A1 (en) | 2004-01-13 | 2005-01-12 | Mounted board, electronic component mounting method, electronic component, and wiring board |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2005069364A1 (en) |
| WO (1) | WO2005069364A1 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007266555A (en) * | 2006-03-30 | 2007-10-11 | Denso Corp | Bump bonded body manufacturing method |
| JP2007324278A (en) * | 2006-05-31 | 2007-12-13 | Fujitsu Ltd | Semiconductor device and manufacturing method thereof |
| JP2009278050A (en) * | 2008-05-19 | 2009-11-26 | Dainippon Printing Co Ltd | Electronic module, wiring board, method for manufacturing electronic module, and method for manufacturing wiring board |
| JP2010212599A (en) * | 2009-03-12 | 2010-09-24 | Nec Tokin Corp | Electronic component-mounted body and method of manufacturing the same |
| CN102612265A (en) * | 2007-11-01 | 2012-07-25 | 大日本印刷株式会社 | Component built-in wiring board and manufacturing method of component built-in wiring board |
| CN103140052A (en) * | 2007-08-21 | 2013-06-05 | 精工爱普生株式会社 | Electronic module |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0513419A (en) * | 1991-07-03 | 1993-01-22 | Rohm Co Ltd | Method for forming bump portion of semiconductor element |
| JP2000235990A (en) * | 1999-02-17 | 2000-08-29 | Nec Kansai Ltd | Semiconductor device |
| JP2003133357A (en) * | 2001-10-24 | 2003-05-09 | Seiko Epson Corp | Semiconductor device, semiconductor device mounting structure, and mounting connection member |
-
2005
- 2005-01-12 WO PCT/JP2005/000213 patent/WO2005069364A1/en not_active Ceased
- 2005-01-12 JP JP2005517029A patent/JPWO2005069364A1/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0513419A (en) * | 1991-07-03 | 1993-01-22 | Rohm Co Ltd | Method for forming bump portion of semiconductor element |
| JP2000235990A (en) * | 1999-02-17 | 2000-08-29 | Nec Kansai Ltd | Semiconductor device |
| JP2003133357A (en) * | 2001-10-24 | 2003-05-09 | Seiko Epson Corp | Semiconductor device, semiconductor device mounting structure, and mounting connection member |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007266555A (en) * | 2006-03-30 | 2007-10-11 | Denso Corp | Bump bonded body manufacturing method |
| JP2007324278A (en) * | 2006-05-31 | 2007-12-13 | Fujitsu Ltd | Semiconductor device and manufacturing method thereof |
| CN103140052A (en) * | 2007-08-21 | 2013-06-05 | 精工爱普生株式会社 | Electronic module |
| CN102612265A (en) * | 2007-11-01 | 2012-07-25 | 大日本印刷株式会社 | Component built-in wiring board and manufacturing method of component built-in wiring board |
| JP2009278050A (en) * | 2008-05-19 | 2009-11-26 | Dainippon Printing Co Ltd | Electronic module, wiring board, method for manufacturing electronic module, and method for manufacturing wiring board |
| JP2010212599A (en) * | 2009-03-12 | 2010-09-24 | Nec Tokin Corp | Electronic component-mounted body and method of manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2005069364A1 (en) | 2007-12-27 |
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