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WO2005065438A3 - Cantilever microprobes for contacting components and methods for making such probes - Google Patents

Cantilever microprobes for contacting components and methods for making such probes Download PDF

Info

Publication number
WO2005065438A3
WO2005065438A3 PCT/US2005/000088 US2005000088W WO2005065438A3 WO 2005065438 A3 WO2005065438 A3 WO 2005065438A3 US 2005000088 W US2005000088 W US 2005000088W WO 2005065438 A3 WO2005065438 A3 WO 2005065438A3
Authority
WO
WIPO (PCT)
Prior art keywords
structures
cantilever
probes
directed
methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2005/000088
Other languages
French (fr)
Other versions
WO2005065438A2 (en
Inventor
Richard T Chen
Ezekiel J J Kruglick
Christopher A Bang
Dennis R Smalley
Pavel B Lembrikov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Microfabrica Inc
Original Assignee
Microfabrica Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/772,943 external-priority patent/US20050104609A1/en
Priority claimed from US10/949,738 external-priority patent/US20060006888A1/en
Application filed by Microfabrica Inc filed Critical Microfabrica Inc
Publication of WO2005065438A2 publication Critical patent/WO2005065438A2/en
Publication of WO2005065438A3 publication Critical patent/WO2005065438A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06727—Cantilever beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06744—Microprobes, i.e. having dimensions as IC details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

Embodiments disclosed herein are directed to compliant probe structures (102a, 102b) for making temporary or permanent contact with electronic circuits and the like. In particular, embodiments are directed to various designs of cantilever-like probe structures (104). Some embodiments are directed to methods for fabricating such cantilever structures. In some embodiments, for example, cantilever probes have extended base structures (112), slide in mounting structures (540A-504C), multi-beam configurations (722), offset bonding locations to allow closer positioning of adjacent probes, compliant elements with tensional configurations (882), improved over travel, improved compliance, improved scrubbing capability, and/or the like.
PCT/US2005/000088 2003-12-31 2005-01-03 Cantilever microprobes for contacting components and methods for making such probes Ceased WO2005065438A2 (en)

Applications Claiming Priority (20)

Application Number Priority Date Filing Date Title
US53394703P 2003-12-31 2003-12-31
US53393303P 2003-12-31 2003-12-31
US60/533,933 2003-12-31
US60/533,947 2003-12-31
US53686504P 2004-01-15 2004-01-15
US60/536,865 2004-01-15
US54051104P 2004-01-29 2004-01-29
US60/540,511 2004-01-29
US10/772,943 2004-02-04
US10/772,943 US20050104609A1 (en) 2003-02-04 2004-02-04 Microprobe tips and methods for making
US58268904P 2004-06-23 2004-06-23
US58269004P 2004-06-23 2004-06-23
US60/582,690 2004-06-23
US60/582,689 2004-06-23
US60971904P 2004-09-13 2004-09-13
US60/609,719 2004-09-13
US61178904P 2004-09-20 2004-09-20
US60/611,789 2004-09-20
US10/949,738 US20060006888A1 (en) 2003-02-04 2004-09-24 Electrochemically fabricated microprobes
US10/949,738 2004-09-24

Publications (2)

Publication Number Publication Date
WO2005065438A2 WO2005065438A2 (en) 2005-07-21
WO2005065438A3 true WO2005065438A3 (en) 2005-09-29

Family

ID=34754085

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/000088 Ceased WO2005065438A2 (en) 2003-12-31 2005-01-03 Cantilever microprobes for contacting components and methods for making such probes

Country Status (2)

Country Link
TW (1) TW200536039A (en)
WO (1) WO2005065438A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200739083A (en) * 2005-09-30 2007-10-16 Sv Probe Pte Ltd Cantilever probe structure for a probe card assembly
TWI404936B (en) * 2009-12-30 2013-08-11 Korea Mach & Materials Inst Cantilever-type micro contact probe with hinge structure
JP4883215B1 (en) * 2010-10-29 2012-02-22 オムロン株式会社 Terminal and connector using the same
CN112362922A (en) * 2020-11-25 2021-02-12 广州国显科技有限公司 Lighting test fixture, fixing piece and lighting test device
CN115480082B (en) * 2021-06-15 2025-09-19 芯卓科技(浙江)有限公司 Elastic probe element, component and testing device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4965865A (en) * 1989-10-11 1990-10-23 General Signal Corporation Probe card for integrated circuit chip
US5286208A (en) * 1991-02-19 1994-02-15 Yamaichi Electric Co., Ltd. Contact in electric part socket
US6215196B1 (en) * 1997-06-30 2001-04-10 Formfactor, Inc. Electronic component with terminals and spring contact elements extending from areas which are remote from the terminals
US6672875B1 (en) * 1998-12-02 2004-01-06 Formfactor, Inc. Spring interconnect structures
US6811406B2 (en) * 2001-04-12 2004-11-02 Formfactor, Inc. Microelectronic spring with additional protruding member

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4965865A (en) * 1989-10-11 1990-10-23 General Signal Corporation Probe card for integrated circuit chip
US5286208A (en) * 1991-02-19 1994-02-15 Yamaichi Electric Co., Ltd. Contact in electric part socket
US6215196B1 (en) * 1997-06-30 2001-04-10 Formfactor, Inc. Electronic component with terminals and spring contact elements extending from areas which are remote from the terminals
US6672875B1 (en) * 1998-12-02 2004-01-06 Formfactor, Inc. Spring interconnect structures
US6811406B2 (en) * 2001-04-12 2004-11-02 Formfactor, Inc. Microelectronic spring with additional protruding member

Also Published As

Publication number Publication date
TW200536039A (en) 2005-11-01
WO2005065438A2 (en) 2005-07-21

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