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WO2004114352A1 - Photoelectric imaging device and electron-to-light converter used therefor - Google Patents

Photoelectric imaging device and electron-to-light converter used therefor Download PDF

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Publication number
WO2004114352A1
WO2004114352A1 PCT/JP2003/016101 JP0316101W WO2004114352A1 WO 2004114352 A1 WO2004114352 A1 WO 2004114352A1 JP 0316101 W JP0316101 W JP 0316101W WO 2004114352 A1 WO2004114352 A1 WO 2004114352A1
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WO
WIPO (PCT)
Prior art keywords
electron
light
incident
converting
imaging device
Prior art date
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Ceased
Application number
PCT/JP2003/016101
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French (fr)
Inventor
Yoichi Asaoka
Masato Sasaki
Keiichi Saito
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University of Tokyo NUC
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University of Tokyo NUC
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Filing date
Publication date
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Publication of WO2004114352A1 publication Critical patent/WO2004114352A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/50—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output
    • H01J31/506—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output tubes using secondary emission effect
    • H01J31/507—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output tubes using secondary emission effect using a large number of channels, e.g. microchannel plates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/50—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output
    • H01J31/501—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output with an electrostatic electron optic system
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2231/00—Cathode ray tubes or electron beam tubes
    • H01J2231/50—Imaging and conversion tubes
    • H01J2231/50005—Imaging and conversion tubes characterised by form of illumination
    • H01J2231/5001—Photons
    • H01J2231/50031—High energy photons
    • H01J2231/50036—X-rays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2231/00—Cathode ray tubes or electron beam tubes
    • H01J2231/50—Imaging and conversion tubes
    • H01J2231/50057—Imaging and conversion tubes characterised by form of output stage
    • H01J2231/50063—Optical

Definitions

  • the present invention relates to a photoelectric imaging device and an electron-to-light converters used therefor, which are utilized in an ultra high-resolution medical-purpose X-ray diagnostic equipment, a non-destructive test equipment, a night- vision camera, a wide-field monitor, a wide-field reflecting telescope, or the like.
  • the term "light” means an electromagnetic wave in a certain wavelength range, such as visible light and an X-ray.
  • Such a photoelectric imaging device comprises: an incident section for converting incident light into an electron; an electrostatic converging system (for example, an electron lens system) for converging the converted electron; and an output section, with a flat surface on which the electron converged by the electrostatic converging system is, for converting the incident electron into light to form an image; and is realized as an X-ray image intensifier, for example (e. g. see Non-patent Document 1).
  • An X-ray image intensifier for example (e. g. see Non-patent Document 1).
  • One of the most important performance of the photoelectric imaging device is the resolution thereof. A major factor determining the resolution is an astigmatism in the electrostatic converging system such as the electron lens system.
  • the electrostatic converging system should be adjusted (in case of the electron lens system, the electrodes constituting the electron lens system should be adjusted and/or the voltage applied to the electrodes should be adjusted) but also the shape of the incident section should have a predetermined shape, and thus, it is almost impossible to design the shape of the incident section freely. Also, even if an optimum shape of the incident section is designed in order to achieve the remarkable reduction of the astigmatism, it is impossible to achieve the remarkable reduction of the astigmatism at a peripheral section of an image, and thus the resolution at the peripheral section of the formed image decreases.
  • a photoelectric imaging device comprising: light-to-electron converting means, with a plane of incidence on which light is incident, for converting the incident light into an electron; electrostatic converging means for converging the electron converted by the light-to-electron converting means; and electron-to-light converting and image forming means, with a curved surface on which the electron converged by the electrostatic converging means is incident, for converting the incident electron into the light to form an image on a flat surface.
  • the surface on which the electron is incident is not a flat surface in the prior art, but is the curved surface, and the incident electron is converted into the light to form the image on the flat surface. Therefore, in order to achieve the remarkable reduction of the astigmatism, by adopting the curved surface as the surface on which the electron is incident instead of designing the surface on which the light is incident with an appropriate shape, a remarkable reduction of the astigmatism is achieved. As a result, it is possible to have a free design of the incident section without reducing the resolution. When reducing the astigmatism by adopting the curved surface as the surface on which the electron is incident, the resolution at the peripheral section of the formed image does not decrease.
  • the light plane of incidence may be a partially spherical surface, a flat surface, or the like.
  • the light plane of incidence is a partially spherical surface, it is easy to enlarge the aperture of the photoelectric imaging device having the incident section with a glass or the like for which the formation of a curved surface except for a spherical surface is difficult and it is possible to constitute the plane of incidence on which the light is incident at a reasonable price.
  • the plane of incidence on which the light is incident is a flat surface, it is possible to arrange a photoelectric surface on the imaging plane, which is generally a flat surface.
  • the electrostatic converging means has an electron lens system, for example.
  • the electron-to-light converting and image-forming means has; a fiber optic plate with the curved surface on which the electron is incident and the flat surface on which an image is formed; and an electron-to-light converting material provided on the curved surface. More preferably, a conductive material is provided on the electron-to-light converting material, and thus the charge-up of the electron is sufficiently suppressed at the curved surface on which the electron-to-light converting material is provided.
  • an electron-to-light converter for a photoelectric imaging device comprising: a fiber optic plate having a curved surface on which an electron is incident and a flat surface on which an image corresponding to the incident electron is formed; and an electron-to-light converting material provided on the curved surface.
  • a conductive material is provided on the electron-to-light converting material, and thus the charge-up of the electron is sufficiently suppressed at the curved surface on which the electron-to-light converting material is provided.
  • Fig. 1 is a view showing one embodiment of a photoelectric imaging device according to the present invention.
  • Fig. 2 is an enlarged view showing an incident section shown in Fig. 1.
  • Fig. 3a is an enlarged view showing the upper surface of an electron-to-light converter shown in Fig. 1
  • Fig. 3b is an enlarged view showing a cross-section of the electron-to-light converter shown in Fig. 1.
  • Figs. 4 are charts for explaining the resolutions of a photoelectric imaging device according to the present invention and a conventional photoelectric imaging device.
  • Fig. 5 is an enlarged view showing a modified example of an incident section shown in Fig. 1.
  • Fig. 1 is a view showing one embodiment of a photoelectric imaging device according to the present invention.
  • This photoelectric imaging device comprises a vacuum vessel 1, electrodes 2 to 6 arranged in the vacuum vessel 1, and an electron-to-light converter 7.
  • Fig. 1 a cross section of the electron-to-light converter 8 is shown.
  • the vacuum vessel 1 has an incident section 11 having a plane of incidence with a shape of partially spherical surface, and a material 12 that causes a photoelectric effect such as a bialkali is vapor-deposited on the plane of incidence (Fig. 2).
  • a predetermined voltage is applied to the electrodes 2 to 6, and an electrons lens system is constituted thereby.
  • An electron-to-light converter 7 has a fiber optic plate (FOP) 21 having a curved surface 21a formed on one surface and a flat surface 21b formed on another surface, an electron-to-light converting material 22 such as a fluorescent material coated on the curved surface 21a, and a conductive material 23 such as aluminum or carbon vapor-deposited on one of the surfaces of the FOP 21 including the curved surface 21a (Fig. 3).
  • the curved surface 21a is formed so as to match the focal point of the electron lens system with the image plane substantially, for example, in order to reduce the astigmatism remarkably.
  • the operation of the embodiment is described.
  • the light incident on the incident section 11 is converted into the electron 8.
  • the electron 8 is converged by the electron lens system constituted by the electrodes 2 to 6, and is incident on the curved surface 21a of the electron-to-light converter 7.
  • the electron 8 incident on the curved surface 21a is converted into the light 24 by the fluorescent material 22, and an image is formed on the flat surface 21b.
  • the conductive material 23 a charge-up of the electron 8 is sufficiently suppressed in the electron-to-light converting material 22.
  • Fig. 4A is a characteristic chart for illustrating the relationship between the input radius and the resolution of the incident light on the incident section 11 of the photoelectric imaging device according to the present invention
  • Fig. 4B is a characteristic chart for illustrating the relationship between the input radius and the resolution of the incident light on the incident section 11 of a conventional photoelectric imaging device.
  • a curve a represents a range including 68.3% of the light emission result from the electron beam
  • a curve b represents a range including 84.1% of the light emission result from the electron beam
  • a curve c represents a range including 68.3% of the light emission result from the electron beam
  • a curve d represents a range including 84.1% of the light emission result from the electron beam.
  • the resolution is constant even if the input radius of the incident light changes within a range of 0 to 200 mm. That is, according to the photoelectric imaging device of the present invention, the resolution does not decrease even in a peripheral section of the formed image.
  • the resolution remarkably increases. That is, according to the conventional photoelectric imaging device, the resolution decrease in the peripheral section of the formed image.
  • the embodiment instead of designing an appropriate shape of the surface on which electrons are incident in the prior in order to achieve the reduction of the astigmatism remarkably, by forming the surface on which electrons are incident as the curved surface, it is possible to reduce the astigmatism remarkably. As a result, it is possible to design the incident section freely without reducing the resolution. Moreover, when reducing the astigmatism by forming the surface on which the electron is incident as the curved surface, the resolution at the peripheral section of the formed image does not decrease.
  • the surface on which the light is incident is a partially spherical surface, it is easy to enlarge the aperture of the photoelectric imaging device having the incident section 11 with a glass or the like for which the formation of a curved surface except for a spherical surface is difficult and it is possible to constitute the incidence section 11 at a reasonable price.
  • the shape of the incident section may be other shapes than the partially spherical surface; for example, it may be a flat surface as shown in Fig. 5, in this case, it is possible to arrange a photoelectric surface on the imaging plane, which is generally a flat surface. It is also possible to constitute the electrostatic converging system by any other systems than the electron lens system.
  • the shape of the curved surface of the electron-to-light converter may be any other curved shape than the curved surface as shown in Fig. 3.

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)

Abstract

A photoelectric imaging device includes: light-to-electron converting means, with a plane of incidence on which light is incident, for converting the incident light into an electron; electrostatic converging means for converging the electron converted by the light-to-electron converting means; and electron-to-light converting and image forming means, with a curved surface on which the electron converged by the electrostatic converging means is incident, for converting the incident electron into the light to form an image on a flat surface.

Description

DESCRIPTION
PHOTOELECTRIC IMAGING DEVICE AND ELECTRON-TO-LIGHT CONVERTER USED THEREFOR
TECHNICAL FIELD
The present invention relates to a photoelectric imaging device and an electron-to-light converters used therefor, which are utilized in an ultra high-resolution medical-purpose X-ray diagnostic equipment, a non-destructive test equipment, a night- vision camera, a wide-field monitor, a wide-field reflecting telescope, or the like. In the specification, the term "light" means an electromagnetic wave in a certain wavelength range, such as visible light and an X-ray. BACKGROUND ART
Such a photoelectric imaging device comprises: an incident section for converting incident light into an electron; an electrostatic converging system (for example, an electron lens system) for converging the converted electron; and an output section, with a flat surface on which the electron converged by the electrostatic converging system is, for converting the incident electron into light to form an image; and is realized as an X-ray image intensifier, for example (e. g. see Non-patent Document 1). One of the most important performance of the photoelectric imaging device is the resolution thereof. A major factor determining the resolution is an astigmatism in the electrostatic converging system such as the electron lens system. [Non-patent Document 1]
"X-ray image intensifier", [online], 22 May 2003, Hamamatsu Photonics K.K., [accessed on 28 May 2003.], Internet (URL: http://www.hpk.co.jp/Jpn/products/ETD/pdf/X-II%20techinfoj.pdQ.
In order to achieve the remarkable reduction of the astigmatism, not only the electrostatic converging system should be adjusted (in case of the electron lens system, the electrodes constituting the electron lens system should be adjusted and/or the voltage applied to the electrodes should be adjusted) but also the shape of the incident section should have a predetermined shape, and thus, it is almost impossible to design the shape of the incident section freely. Also, even if an optimum shape of the incident section is designed in order to achieve the remarkable reduction of the astigmatism, it is impossible to achieve the remarkable reduction of the astigmatism at a peripheral section of an image, and thus the resolution at the peripheral section of the formed image decreases.
It is an object of the present invention to provide a photoelectric imaging device and an electron-to-light converter used therefore which is capable of designing the incident section freely without reducing the resolution and does not reduce the resolution the even in the peripheral section of the formed image. DISCLOSURE OF THE INVENTION
According to the present invention, there is provided a photoelectric imaging device comprising: light-to-electron converting means, with a plane of incidence on which light is incident, for converting the incident light into an electron; electrostatic converging means for converging the electron converted by the light-to-electron converting means; and electron-to-light converting and image forming means, with a curved surface on which the electron converged by the electrostatic converging means is incident, for converting the incident electron into the light to form an image on a flat surface.
According to the invention, the surface on which the electron is incident is not a flat surface in the prior art, but is the curved surface, and the incident electron is converted into the light to form the image on the flat surface. Therefore, in order to achieve the remarkable reduction of the astigmatism, by adopting the curved surface as the surface on which the electron is incident instead of designing the surface on which the light is incident with an appropriate shape, a remarkable reduction of the astigmatism is achieved. As a result, it is possible to have a free design of the incident section without reducing the resolution. When reducing the astigmatism by adopting the curved surface as the surface on which the electron is incident, the resolution at the peripheral section of the formed image does not decrease.
In the photoelectric imaging device of the present invention, it is possible to design the shape of the plane of incidence on which the light is incident freely, and thus the light plane of incidence may be a partially spherical surface, a flat surface, or the like. When the light plane of incidence is a partially spherical surface, it is easy to enlarge the aperture of the photoelectric imaging device having the incident section with a glass or the like for which the formation of a curved surface except for a spherical surface is difficult and it is possible to constitute the plane of incidence on which the light is incident at a reasonable price. When the plane of incidence on which the light is incident is a flat surface, it is possible to arrange a photoelectric surface on the imaging plane, which is generally a flat surface. The electrostatic converging means has an electron lens system, for example.
Preferably, the electron-to-light converting and image-forming means has; a fiber optic plate with the curved surface on which the electron is incident and the flat surface on which an image is formed; and an electron-to-light converting material provided on the curved surface. More preferably, a conductive material is provided on the electron-to-light converting material, and thus the charge-up of the electron is sufficiently suppressed at the curved surface on which the electron-to-light converting material is provided.
According to the present invention, there is provided an electron-to-light converter for a photoelectric imaging device, comprising: a fiber optic plate having a curved surface on which an electron is incident and a flat surface on which an image corresponding to the incident electron is formed; and an electron-to-light converting material provided on the curved surface.
According to the present invention, it is possible to design the incident section freely without reducing the resolution and the resolution does not decrease even in the peripheral section of the formed image. Preferably, a conductive material is provided on the electron-to-light converting material, and thus the charge-up of the electron is sufficiently suppressed at the curved surface on which the electron-to-light converting material is provided. BRIEF DESCRIPTION OF THE DRAWINGS
Fig. 1 is a view showing one embodiment of a photoelectric imaging device according to the present invention.
Fig. 2 is an enlarged view showing an incident section shown in Fig. 1.
Fig. 3a is an enlarged view showing the upper surface of an electron-to-light converter shown in Fig. 1, and Fig. 3b is an enlarged view showing a cross-section of the electron-to-light converter shown in Fig. 1.
Figs. 4 are charts for explaining the resolutions of a photoelectric imaging device according to the present invention and a conventional photoelectric imaging device.
Fig. 5 is an enlarged view showing a modified example of an incident section shown in Fig. 1. BEST MODE FOR CARRYING OUT THE INVENTION
A preferred embodiment of a photoelectric imaging device and an electron-to-light converter used therefor according to the present invention are described in detail with reference to the drawings.
Fig. 1 is a view showing one embodiment of a photoelectric imaging device according to the present invention. This photoelectric imaging device comprises a vacuum vessel 1, electrodes 2 to 6 arranged in the vacuum vessel 1, and an electron-to-light converter 7. In Fig. 1, a cross section of the electron-to-light converter 8 is shown.
The vacuum vessel 1 has an incident section 11 having a plane of incidence with a shape of partially spherical surface, and a material 12 that causes a photoelectric effect such as a bialkali is vapor-deposited on the plane of incidence (Fig. 2). A predetermined voltage is applied to the electrodes 2 to 6, and an electrons lens system is constituted thereby. An electron-to-light converter 7 has a fiber optic plate (FOP) 21 having a curved surface 21a formed on one surface and a flat surface 21b formed on another surface, an electron-to-light converting material 22 such as a fluorescent material coated on the curved surface 21a, and a conductive material 23 such as aluminum or carbon vapor-deposited on one of the surfaces of the FOP 21 including the curved surface 21a (Fig. 3). The curved surface 21a is formed so as to match the focal point of the electron lens system with the image plane substantially, for example, in order to reduce the astigmatism remarkably.
The operation of the embodiment is described. The light incident on the incident section 11 is converted into the electron 8. Thereafter, the electron 8 is converged by the electron lens system constituted by the electrodes 2 to 6, and is incident on the curved surface 21a of the electron-to-light converter 7. The electron 8 incident on the curved surface 21a is converted into the light 24 by the fluorescent material 22, and an image is formed on the flat surface 21b. It should be noted that, by the conductive material 23, a charge-up of the electron 8 is sufficiently suppressed in the electron-to-light converting material 22.
Fig. 4A is a characteristic chart for illustrating the relationship between the input radius and the resolution of the incident light on the incident section 11 of the photoelectric imaging device according to the present invention, and Fig. 4B is a characteristic chart for illustrating the relationship between the input radius and the resolution of the incident light on the incident section 11 of a conventional photoelectric imaging device. In Fig.4A, a curve a represents a range including 68.3% of the light emission result from the electron beam, and a curve b represents a range including 84.1% of the light emission result from the electron beam. In Fig. 4B, a curve c represents a range including 68.3% of the light emission result from the electron beam, and a curve d represents a range including 84.1% of the light emission result from the electron beam.
As the photoelectric imaging device according to the present invention, that having the configuration shown in Fig. 1 was used, whereas as the conventional photoelectric imaging device, that having the same configuration shown in Fig. 1 was used except that a flat surface is used instead of the curved surface 21a of the electron-to-light converter 7. As shown in Fig. 4A, in both of the curves a and b, the resolution is constant even if the input radius of the incident light changes within a range of 0 to 200 mm. That is, according to the photoelectric imaging device of the present invention, the resolution does not decrease even in a peripheral section of the formed image. On the other hand, as shown in Fig. 4B, in both of the curves c and d, if the input radius of the incident light exceeds 175 mm, the resolution remarkably increases. That is, according to the conventional photoelectric imaging device, the resolution decrease in the peripheral section of the formed image.
According to the embodiment, instead of designing an appropriate shape of the surface on which electrons are incident in the prior in order to achieve the reduction of the astigmatism remarkably, by forming the surface on which electrons are incident as the curved surface, it is possible to reduce the astigmatism remarkably. As a result, it is possible to design the incident section freely without reducing the resolution. Moreover, when reducing the astigmatism by forming the surface on which the electron is incident as the curved surface, the resolution at the peripheral section of the formed image does not decrease. Furthermore, since the surface on which the light is incident is a partially spherical surface, it is easy to enlarge the aperture of the photoelectric imaging device having the incident section 11 with a glass or the like for which the formation of a curved surface except for a spherical surface is difficult and it is possible to constitute the incidence section 11 at a reasonable price.
While the present invention has been described above with reference to a certain preferred embodiment, it should be noted that they were present by way of an example only and various changes and/or modifications may be made without departing from the scope of the invention. For example, the shape of the incident section may be other shapes than the partially spherical surface; for example, it may be a flat surface as shown in Fig. 5, in this case, it is possible to arrange a photoelectric surface on the imaging plane, which is generally a flat surface. It is also possible to constitute the electrostatic converging system by any other systems than the electron lens system. Furthermore, the shape of the curved surface of the electron-to-light converter may be any other curved shape than the curved surface as shown in Fig. 3.

Claims

1. A photoelectric imaging device comprising: light-to-electron converting means, with a plane of incidence on which light is incident, for converting the incident light into an electron; electrostatic converging means for converging the electron converted by the light-to-electron converting means; and electron-to-light converting and image forming means, with a curved surface on which the electron converged by the electrostatic converging means is incident, for converting the incident electron into the light to form an image on a flat surface.
2. The device according to claim 1, characterized in that said plane of incidence is a partially spherical surface.
3. The device according to claim 1, characterized in that said plane of incidence is a flat surface.
4. The device according to any one of claims 1 to 3, characterized in that said electrostatic converging means has an electron lens system.
5. The device according to any one of claims 1 to 4, characterized in that: said electron-to-light converting and image-forming means has; a fiber optic plate with said curved surface on which said electron is incident and said flat surface on which an image is formed; and an electron-to-light converting material provided on said curved surface.
6. The device according to claim 5, characterized in that a conductive material is provided on said electron-to-light converting material.
7. An electron-to-light converter for a photoelectric imaging device, comprising: a fiber optic plate having a curved surface on which an electron is incident and a flat surface on which an image corresponding to the incident electron is formed; and an electron-to-light converting material provided on said curved surface.
8. The converter according to claim 7, characterized in that a conductive material is provided on said electron-to-light converting material.
PCT/JP2003/016101 2003-06-17 2003-12-16 Photoelectric imaging device and electron-to-light converter used therefor Ceased WO2004114352A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003-172067 2003-06-17
JP2003172067A JP2005011568A (en) 2003-06-17 2003-06-17 Photoelectric imaging device and electro-optical conversion element used therefor

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WO2004114352A1 true WO2004114352A1 (en) 2004-12-29

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JP5948324B2 (en) * 2011-05-27 2016-07-06 真人 佐々木 Vacuum container and method for manufacturing the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1092922A (en) * 1964-08-06 1967-11-29 Eltro G M B H & Co Ges Fur Str Device for producing an image in a light-optical electronic-optical image forming system
US4849000A (en) * 1986-11-26 1989-07-18 The United States Of America As Represented By The Secretary Of The Army Method of making fiber optic plates for wide angle and graded acuity intensifier tubes
EP0536833A1 (en) * 1991-10-10 1993-04-14 Koninklijke Philips Electronics N.V. X-ray examination apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1092922A (en) * 1964-08-06 1967-11-29 Eltro G M B H & Co Ges Fur Str Device for producing an image in a light-optical electronic-optical image forming system
US4849000A (en) * 1986-11-26 1989-07-18 The United States Of America As Represented By The Secretary Of The Army Method of making fiber optic plates for wide angle and graded acuity intensifier tubes
EP0536833A1 (en) * 1991-10-10 1993-04-14 Koninklijke Philips Electronics N.V. X-ray examination apparatus

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