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WO2004112970A1 - Buse de pulverisation de liquide de type a tourbillon - Google Patents

Buse de pulverisation de liquide de type a tourbillon Download PDF

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Publication number
WO2004112970A1
WO2004112970A1 PCT/JP2004/007369 JP2004007369W WO2004112970A1 WO 2004112970 A1 WO2004112970 A1 WO 2004112970A1 JP 2004007369 W JP2004007369 W JP 2004007369W WO 2004112970 A1 WO2004112970 A1 WO 2004112970A1
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WO
WIPO (PCT)
Prior art keywords
liquid
gas
nozzle
fluororesin
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2004/007369
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English (en)
Japanese (ja)
Inventor
Masaaki Ikeda
Daisuke Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP2005507192A priority Critical patent/JP4659616B2/ja
Publication of WO2004112970A1 publication Critical patent/WO2004112970A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/10—Spray pistols; Apparatus for discharge producing a swirling discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/24—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas with means, e.g. a container, for supplying liquid or other fluent material to a discharge device
    • B05B7/2489—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas with means, e.g. a container, for supplying liquid or other fluent material to a discharge device an atomising fluid, e.g. a gas, being supplied to the discharge device

Definitions

  • the present invention relates to a nozzle that atomizes and sprays a liquid, and more particularly to a vortex-type liquid atomization nozzle suitable for semiconductor manufacturing, thin film precision coating, medical analysis, scientific analysis, and the like.
  • Nozzles that atomize and spray liquids have been used in a wide variety of industrial fields such as painting, granulation, combustion, spraying glaze in the ceramics industry, and precision thin film coating of magnetic disks and the like.
  • a vortex-type atomizing nozzle proposed in Japanese Patent Application Laid-Open Nos. Hei 4-21551 and Hei 4-59023, that is, a high-speed vortex is generated in the gas introduced into the inside of the nose,
  • the nozzles that pulverize and atomize the liquid by the high-speed vortex flow are widely used in various industrial fields because they can precisely and stably obtain desired ultrafine particles.
  • the present invention provides a synthetic resin fine-grained nose that has characteristics of chemical resistance and heat-resistance, and that is lightweight, and has excellent fine-graining characteristics.
  • a fine atomizing nozzle Patent Document 1
  • this is a hollow synthetic resin nosore body a having a gas injection port al opening forward and a gas introduction port a2 opening laterally, and a nozzle body a from the rear.
  • Insertion A liquid passage member b having a hollow shape and made of a synthetic resin and having a liquid ejection port bl facing the gas ejection port al at the front and a liquid introduction port b2 opening at the rear.
  • a swirl groove b2 is formed which generates a high-speed swirl vortex having a focal point in front of the liquid ejection port b1 in cooperation with the inner region of the tip of the nose body a.
  • Reference numeral d denotes a gas supply tube (air tube), which is connected to an attachment e attached to the gas inlet a2.
  • Reference numeral f denotes a liquid supply tube which is connected to an attachment g attached to the liquid inlet b2.
  • Patent Document 1 Japanese Patent Application Laid-Open No. H11-66307 (the entire specification, FIGS. 1 to 4)
  • the attachments e and g are screwed and integrated into the gas inlet a2 of the nozzle body a and the gas inlet b2 of the liquid passage member b, respectively.
  • the liquid passage and the gas passage have a recess b3 and screwed portions b4 and a4 exposed.
  • the flow stagnates in the concave portion b3 and the threaded portions b4 and a4, and the substances contained in the fluid (liquid or gas) accumulated in the stagnation portion accumulate in the concave portion b3 and the threaded portions b4 and a4. It may change (deterioration or denaturation), and this may be mixed as impurities into the fine particles of the liquid to be sprayed. Therefore, when this nozzle is used, for example, in a semiconductor manufacturing facility, there has been a problem that it cannot be adopted at all.
  • the present invention has been made in view of the above-mentioned problems of the related art, and an object of the present invention is to provide a liquid to be sprayed while not only dissolving metal ions but also having chemical resistance and heat resistance. It is an object of the present invention to provide a swirl type liquid atomizing nozzle which realizes a light weight without impurities being mixed in the fine particles.
  • a swirl type atomization nozzle has a hollow synthetic resin nozzle body having a gas injection port opened forward and a gas introduction port opened laterally.
  • a gas passage for guiding the gas introduced into the gas introduction port to the gas injection port is defined between the inner region of the nozzle body and the liquid passage member, and a gas passage is formed around the front end of the liquid passage member.
  • a swirl groove for generating a high-speed swirling vortex having a focal point in front of the liquid outlet is formed in cooperation with a pointed inner region of the nozzle body, so that the liquid ejected from the liquid outlet is In the vortex-type liquid atomization nozzle, which is crushed and atomized by the high-speed swirling vortex injected from the gas injection port,
  • the nozzle body and the liquid passage member are made of fluororesin,
  • the gas inlet and the liquid inlet are each fitted with a tubular fluid supply path member made of fluororesin, and the fitting portions are fixed and sealed by welding, respectively.
  • the inner peripheral surface of the fluid supply path constituting member fixed to the gas inlet and the liquid inlet, respectively, and the inner peripheral surface of the gas passage or the liquid passage on the nozzle side are configured to be flush with each other.
  • the insertion portion between the nozzle body and the liquid passage member is sealed by sealing means such as a ring, sheet packing, welding, or the like, and the gas inlet and the liquid inlet and the respective fluid supply passages are sealed.
  • the fitting portions with the constituent members are fixed and sealed by welding, respectively, so that the air tightness of the gas inlet and the liquid inlet of the nozzle is ensured.
  • the nozzle body, the liquid passage member, and the respective fluid supply path constituting members are made of a fluororesin, the entire periphery of the nozzle including the nozzle can be lightened, and as in the case of the conventional metal nozzle, A chemical-resistant product that does not elute metal ions into the liquid to be atomized.Excellent in drug resistance.Used in the fields of semiconductor manufacturing, pharmaceutical manufacturing, chemical manufacturing, medical equipment, scientific analysis, etc. be able to.
  • the inner peripheral surface of the fluid supply path constituting member fixed to the gas inlet and the liquid inlet, respectively, and the inner peripheral surface of the gas passage or the liquid passage on the nozzle side are continuous with each other.
  • the gas inlet at the inlet and the liquid inlet at the liquid inlet As seen in the prior art, there is no concave-threaded portion that causes the flow to be stagnant and is apt to deposit and accumulate the substances contained in the fluid collected in the stagnation portion. For this reason, the flow of gas and liquid introduced from the fluid supply path constituent member into the gas inlet and the liquid inlet of the nozzle passes through the gas passage and the liquid passage in the nozzle that do not stagnate at the gas inlet and the liquid inlet. The liquid and the gas contained in the sprayed liquid fine particles are guided smoothly to the gas injection port and the liquid injection port, respectively.
  • a screwing portion, a fitting portion, and a connecting portion are provided at the attachment portion between the nozzle body and the liquid passage member, and these are exposed in the gas passage of the nozzle.
  • gas (contained material) which is almost viscous compared to liquid (contained material)
  • these parts screwd part and fitting part
  • gas inlets Since it is located at a position that hardly functions as a gas passage on the opposite side of the sandwiched gas injection port, there is a danger that the gas-containing substance will deposit and accumulate on the threaded part or the fitting part in the insertion part between the nozzle body and the liquid passage member. rare.
  • the fluid supply path constituting member according to the first aspect is configured by a fluid supply tube made of a fluororesin. That is, in claim 2, in the vortex atomizing nozzle according to claim 1, a fluororesin tube for feeding a pressurized gas supplied from a gas supply source is directly fixed to the gas inlet. The liquid inlet is directly fixed (fitted and fixed by welding) to the above-mentioned liquid inlet port.
  • one of the fluid supply path constituting members according to claim 1 is constituted by a fluid supply tube made of fluorine resin, and the other fluid supply path constituting member is constituted by a fluorine resin.
  • Fluorine resin Made of fluororesin with a fluid supply tube made of stainless steel connected and detachable is constituted by a fluorine resin.
  • a fluorine resin tube for feeding a pressurized gas supplied from a gas supply source is directly fixed to the gas inlet. (Fitting and welding and fixing), and a fluororesin attachment to which a fluororesin liquid feeding tube is detachably connected is fixed (fitting and welding and fixing) to the liquid inlet. Configured.
  • the other liquid can be atomized.
  • a fluororesin tube for feeding a liquid supplied from a liquid supply source is directly fixed to the liquid inlet. Fitting and welding and fixing), and a fluororesin attachment in which a gas supply tube is detachably connected to the gas inlet is fixed (fitting and welding and fixing).
  • the liquid can be atomized using another gas.
  • a fluorine resin attachment in which a gas feeding tube made of a fluororesin is detachably connected to the gas inlet port. Is fixed (fitted and welded and fixed), and a fluororesin attachment to which the liquid supply tube made of fluororesin is detachably connected is fixedly fitted (fitted and welded and fixed) to the liquid inlet. Configured. (Function) Since the liquid supply tube and the gas supply tube can be easily inserted into and detached from each of the attachments fixed to the nozzle, the liquid supply tube and the gas supply tube can be attached as necessary. By disconnecting the connection tube from the attachment, the tube connection portion of the attachment where the substance contained in the fluid may adhere and accumulate can be cleaned.
  • the other liquid is atomized.
  • the liquid can be atomized using another gas.
  • an attachment hole communicating with the gas injection port is provided at a rear end of the nozzle body.
  • the liquid passage member is screwed and fixed to the attachment hole via an O-ring serving as sealing means.
  • the nozzle By screwing the nozzle body and the liquid passage member in the direction in which the liquid passage member is inserted into the attachment hole, the nozzle can be easily fixed and integrated.
  • the airtightness of the insertion hole of the horn body into which the liquid passage member is inserted can be secured by the O-ring as the sealing means.
  • the nozzle body, the liquid passage member, and the respective members for forming the fluid supply path are made of a fluororesin, it is easy to handle as a nose by light weight siding, and is suitable for atomization. Since no metal ions are eluted in a liquid, it can be widely used in a wide range of fields such as semiconductor manufacturing, pharmaceutical manufacturing, drug manufacturing, medical equipment, and scientific analysis.
  • the air from the gas supply tube to the gas injection port of the nozzle is discharged.
  • the liquid supply path from the body supply path and the liquid supply tube to the liquid ejection port of the nozzle does not have any parts where the substances contained in the fluid may adhere and accumulate, so impurities can be reliably removed. It is possible to make the liquid ultra-fine particles without mixing.
  • the liquid supply tube can be easily attached to and detached from the attachment, the tube connection portion of the attachment to which the substance contained in the liquid may adhere and accumulate is appropriately cleaned, thereby spraying.
  • the liquid supply source together with the liquid supply tube it is possible to cope with various liquid fine particles.
  • the gas supply tube can be easily attached to and detached from the attachment, the tube connection portion of the attachment to which the substance contained in the gas may adhere and accumulate is appropriately cleaned, so that the gas is sprayed.
  • the gas supply source together with the gas supply tube, it is possible to use various gases and to cope with the atomization of liquids.
  • the liquid supply tube and the gas supply tube can be easily attached and detached from the attachment, so that the tube connection portion of the attachment in which the substance contained in the fluid may adhere and accumulate.
  • contamination of impurities can be dealt with, and various gases were used by replacing the liquid supply source with the liquid supply tube and the gas supply source with the gas supply tube. It can cope with various liquid particles.
  • the configuration is very simple, and the nozzle can be easily integrated as a nozzle by screwing the liquid passage member through the O-ring in the attachment hole of the nozzle body. Is easy to assemble.
  • FIGS. 14 to 14 show a liquid atomization nozzle according to a first embodiment of the present invention
  • FIG. 1 is a longitudinal sectional view of the nozzle
  • FIG. 2 is an exploded perspective view showing a component configuration of the nozzle
  • Fig. 3 is a partial perspective view showing the configuration of the upper end (front end) of the liquid passage member that forms the high-speed vortex generator.
  • Fig. 4 shows a specific example in which the nozzle is used to atomize the liquid. Show simplified layer FIG.
  • reference numeral 1 denotes a nozzle body of a liquid atomization nozzle, and its outer configuration is a hollow fluororesin nozzle body having a tapered tapered head 203. 2 and a liquid passage member 3 made of fluororesin screwed inside the nozzle body 2.
  • a gas supply tube 15 made of fluororesin is directly connected to the nozzle body 2.
  • a liquid supply tube 5 made of fluororesin is connected to the liquid passage member 3 via an attachment 4 made of fluororesin.
  • the nose body 2 includes a gas inlet 202 formed by vertically hollowing a hollow outer peripheral portion 207 opening front and rear, and an opening formed at the tip of the pointed head 203.
  • a gas injection port 201 for jetting out the gas A introduced from the gas introduction port 202 to the front and outside, and an opening formed at the rear end of the body 2 and a core-shaped liquid passage member 3 are attached. It is configured to have an external appearance such as a through hole 205 and a pair of concave flat portions 204 (see FIG. 2) formed facing the outer peripheral portion 207 of the nose body 2.
  • the pair of concave flat portions 204 is used to sandwich the atomizing nozzle 1 with a gripping member to facilitate fixing to peripheral members, or to be a portion to be gripped by a wrench to facilitate assembling of a nozzle. It is provided in
  • the liquid passage member 3 is inserted and integrated into the hollow interior of the nose body 2 to define an air passage 7 in cooperation with the inside of the nozzle body 2, and extends forward and rearward inside.
  • the liquid passage 8 is formed.
  • the liquid passage member 3 includes a cylindrical tube portion 305 serving as the passage 8 for the liquid R, a liquid outlet 301 formed at the front end of the tube portion 305, and discharging the liquid R to the outside.
  • a ring portion 302 provided with a plurality of swirling flow forming grooves 304 for projecting in a ring shape in the circumferential direction of the pipe portion 305 at a position slightly behind the liquid ejection port 301 and for vortexing the gas A;
  • a ring-shaped groove portion 303 is formed in an inner region surrounded by a circle so as to communicate with the vortex flow forming groove 304 and opens forward, and is provided around a rear portion of the tube portion 305 to form a mounting hole 205 of the nozzle body 2.
  • Reference numeral 312a is a flat spanner hook provided on the outer peripheral surface of the flange 312.
  • Reference numeral 317 denotes a ring interposed between the nozzle body 2 and the liquid passage member 3 (the step 310 of the liquid passage member 3).
  • Reference numeral 318 denotes a welding portion, which acts to secure the fixing between the nozzle body 2 and the liquid passage member 3 and the sealing of the fixing hole 205. It is to be noted that the fixing between the nozzle body 2 and the liquid passage member 3 and the sealing of the attachment hole 205 are sufficient only with the screwing portions 206 and 308 and the O-ring 317 described above. is not.
  • the attachment 4 is formed in a cylindrical shape as a whole, and a liquid passage 401 is formed therein, and a cylindrical front portion extending forward of the attachment base 402 at the center in the longitudinal direction.
  • the front extending portion 403 of the attachment 4 is fitted into the liquid introduction port 316 of the liquid passage member 3, and the peripheral portion of the liquid introduction port 316 is welded to attach the liquid passage member 3 to the attachment. 4 is fixed and the fitting portion (liquid inlet 316) is sealed, so that the liquid passage 8 of the liquid passage member 3 and the liquid passage 401 of the attachment 4 communicate with each other.
  • Reference numeral 410 indicates a welded portion.
  • the inner peripheral surface 403a of the front extension portion 403 of the attachment 4 (the inner peripheral surface of the liquid passage 401) and the inner peripheral surface 8a of the liquid passage 8 of the liquid passage member 3 are flush with each other.
  • the tube insertion sleeve 405 can be inserted into the distal end of the tube 5 using a special jig.
  • the inner peripheral surface of the attached sleeve 405 and the inner peripheral surface of the tube 5 are substantially It is flush.
  • the sleeve 405 connected to the tube 5 is inserted into the rear extension portion 404 of the attachment 4, and the nut 406 is tightened, so that the tip of the liquid supply tube 5 is connected to the tube 5 as shown in FIG.
  • the outer peripheral surface of the attachment sleeve 405 and the inner peripheral surface of the rear extension 404 can be held in a gripped state, whereby the liquid supply tube 5 can be connected and integrated with the rear end of the attachment 4.
  • connection between the attachment 4 and the liquid supply tube 5 may cause a flow of liquid, such as a step 401 a between the liquid passage 401 of the attachment 4 and the inner peripheral surface of the sleeve 405.
  • Force with stepped portion The liquid supply tube 5 can be easily inserted into and removed from the attachment 4 integrated with the nozzle 1, so if necessary, the liquid supply tube 5 with a sleeve can be connected to the attachment 4. May be released and the tube connection of the attachment 4 where the substance contained in the liquid may adhere and deposit may be washed.
  • a gas feeding tube 15 made of a fluororesin is directly fixed to the gas inlet 202 of the horn body 2. That is, the distal end portion of the gas supply tube 15 extending from the gas supply source is fitted into the gas introduction port 202, and the fitted portion is fixed and sealed by welding, so that the inside of the gas supply tube 15 and the gas introduction
  • the port 202 communicates with the gas, and the gas inlet 202 is kept airtight.
  • Reference numeral 320 indicates a welded portion.
  • the inner peripheral surface 15a of the gas supply tube 15 and the inner peripheral surface 7a of the gas passage 7 on the nozzle 1 side are configured to be flush with each other.
  • the screw portions 206 and 308 between the nozzle body 2 and the liquid passage member 3 are exposed, but the viscosity is almost lower than that of the liquid (containing substance).
  • gas (contained substance) is unlikely to adhere and accumulate on these portions, and the force is also small.
  • the screw portions 206 and 308 are located on the opposite side of the gas injection port 201 across the gas introduction port 202, and are almost Since it is in a position where it does not function, there is almost no possibility that a gas-containing substance will adhere to the screwed portions 206 and 308. Therefore, the presence S of the threaded portions 206 and 308 and the aging of the substance contained in the gas A in the sprayed liquid microparticles do not become a factor of mixing as impurities.
  • the attachment 4 , the liquid supply tube 5, and the gas supply tube 15 are also made of fluororesin, and are atomized.
  • Metal ions eg, iron ions, copper ions, aluminum ions, etc.
  • the entire area around the nozzle including the nozzle body 1 is lightened, and chemical resistance and chemical resistance are reduced. Excellent chemical resistance. It can be widely used in the fields of semiconductor manufacturing, pharmaceutical manufacturing, chemical manufacturing, medical equipment, scientific analysis, etc.
  • the liquid supply tube 5 with the sleeve can be easily attached and detached, the liquid supply tube with the sleeve extending from another liquid supply source is connected to the attachment 4, so that the other liquid can be atomized. Can be easily handled.
  • the high-speed vortex generating portion W includes a vortex forming groove 304 formed in the ring portion 302 of the liquid passage member 3, a ring-shaped groove 303 communicating with the vortex forming groove 304, and the ring-shaped groove 303.
  • a region extending to the injection port 201, the inner peripheral wall of the pointed head 203 of the nozzle body 2, and a force are also configured, and these members and the region cooperate to generate the high-speed vortex gas T.
  • the swirl flow forming grooves 304 are formed by spirally cutting grooves in the ring portion 302. In the present embodiment, the swirling flow forming grooves 304 are formed at a total of six places and at equal intervals.
  • the liquid discharged from the liquid ejection port 301 comes into contact with the high-speed vortex gas T and is crushed, atomized into the liquid Rm, and sprayed forward.
  • a required amount of liquid (pure water) R to be atomized which is sent from the liquid supply tube 5 to the nozzle 1, is stored in the liquid tank 504. Then, after the liquid (pure water) R is filtered by the tank 504 and the strainer 503, the liquid is adjusted by the liquid supply pump 502 by the pressure of the liquid supply pump 502 and adjusted by the liquid supply adjustment valve (orifice or electromagnetic valve) 501 to make the nozzle Send to 1.
  • Reference numeral 505 denotes a return pipe for returning the excess liquid (pure water) R to the liquid tank 504 again in the liquid feeding amount adjustment process.
  • the gas (air) A for atomizing the liquid (pure water) is supplied from the air compressor 903, via the on-off valve 902 and the pressure fine adjustment valve 901, and from the gas introduction hole 202 of the nozzle 1 to the nozzle. 1Sent inside.
  • the method of sending the liquid (pure water) R and the gas (air) A to the nozzle 1 is not limited to the above-described embodiment, and the liquid tank 504 is supplied with the gas introduced from the air compressor 903.
  • a tank pressurizing method or the like, in which the pressure is increased by a pressure and the liquid is sent to the nozzle 1 via a pressure adjusting valve, may be adopted.
  • FIG. 5 is a longitudinal sectional view of a liquid atomizing nozzle according to a second embodiment of the present invention.
  • the gas supply tube 15 is directly fixed to the gas inlet 202 of the nozzle 1 by welding, and the attachment 4 is fixed to the liquid inlet 316 of the nozzle 1 by welding.
  • the liquid supply tube 5 is connected so that it can be attached and detached.
  • a fluorine resin gas supply tube 15 is detachably connected to a fluorine resin attachment 4A fixed to the gas introduction 202 of the nozzle 1.
  • Reference numeral 320 indicates a welded portion.
  • the attachment 4A is bent at a right angle, penetrates the gas passage 401A, a cylindrical front extension 403A extending forward of the attachment base 402A, and a lateral extension of the attachment base 402A.
  • the front extending portion 403A of the attachment 4A is fitted into the gas inlet 202, and the peripheral portion of the gas inlet 202 is welded, so that the fitting portion is fixed and sealed.
  • the gas passage 401A of the attachment 4A communicates with the gas passage 7 of the nozzle 1.
  • the inner peripheral surface 403a of the forward extension 403A of the attachment 4A (the inner peripheral surface of the gas passage 401A) and the inner peripheral surface 7a of the gas passage 7 of the nozzle 1 are formed so as to be flush with each other.
  • the gas guided from the gas passage 401A of 4A to the gas passage 7 of the nozzle 1 is smoothly guided to the gas injection port 201 in the front without stagnating on the way.
  • a tube insertion sleeve 405A is inserted and integrated with the end of the gas supply tube 15 using a special jig, and the inner peripheral surface of the tube 15 and the inner peripheral surface of the sleeve 405 are substantially flush with each other.
  • the distal end of the gas supply tube 15 is connected to the tube mounting sleeve.
  • the outer peripheral surface of the 405A and the inner peripheral surface of the rear extension 404A can be held so that the gas supply tube 15 can be integrally connected to the rear end of the attachment 4A.
  • the connecting portion between the attachment 4A and the gas supply tube 15 has a step that causes a gas flow stagnation, such as a step 401b between the gas passage 401A of the attachment 4A and the inner peripheral surface of the sleeve 405A. Department exists, If necessary, the connection of the gas supply tube 15 with the sleeve to the attachment 4A may be released, and the tube connection portion of the attachment 4A to which the substance contained in the gas may adhere may be washed.
  • the gas supply tube 15 with a sleeve can be easily attached to and detached from the attachment 4A, the gas supply tube 15 with a sleeve can be connected to another gas supply tube extending from another gas supply source. By replacement, the liquid can be atomized using another gas.
  • the welding portion 318 provided in the first embodiment is not provided, and the fixing and sealing between the nozzle body 2 and the liquid passage member 3 are not performed. It comprises only screw portions 206, 308 between the nozzle body 2 and the liquid passage member 3 and a ring 317.
  • FIG. 6 is a longitudinal sectional view of a liquid atomizing nozzle according to a third embodiment of the present invention.
  • the fixing means for fixing the attachment portion between the nozzle body 2 and the liquid passage member 3 is constituted by at least the threaded portions 206 and 308 and the O-ring 317.
  • the insertion portion between the nozzle body 2 and the liquid passage member 3 is fixed and sealed only by the welding portion 312.
  • the inner peripheral surface of the nozzle body 2 and the outer peripheral surface of the liquid passage member 3 are provided with female screw portions 206
  • step portions 209 and 309 which are engaged with each other in the axial direction and have a portion corresponding to the male screw portion 308 are provided.
  • the gas supply tube 15 is fixed directly to the gas inlet 202 of the nozzle 1, and the liquid is supplied to the attachment 4 fixed to the liquid inlet 316 of the nozzle 1.
  • the supply tube 5 is connected so as to be detachable, in the third embodiment, the liquid supply tube 5 is also directly fixed to the liquid introduction port 316 of the nozzle 1.
  • the distal end of the fluororesin liquid supply tube 5 extending from the liquid supply source is fitted into the liquid introduction port 316, and the fitting portion is fixed and sealed by welding to supply the liquid.
  • the inside of the supply tube 5 and the liquid inlet 316 are continuous, and the airtightness of the liquid inlet 316 is confirmed. Is maintained.
  • the inner peripheral surface 5a of the liquid supply tube 5 and the inner peripheral surface 8a of the liquid passage 8 on the nozzle 1 side are configured to be flush with each other, and the liquid from the liquid supply tube 5 to the nozzle 1 side is formed.
  • the liquid guided to the passage 8 is smoothly guided to the liquid ejection port 301 in front without stagnation on the way.
  • FIG. 1 is a longitudinal cross-sectional view of a liquid atomized nozzle according to a first embodiment of the present invention.
  • FIG. 2 is an exploded perspective view showing a part configuration of the atomized nose.
  • FIG. 3 is a partial perspective view showing a configuration of an upper end portion (front end portion) of a liquid passage member forming a high-speed eddy current generating portion.
  • FIG. 4 is a simplified layout diagram showing a specific example in which liquid is atomized using the same nozzle.
  • FIG. 5 is a vertical cross-sectional view of a liquid atomized nozzle according to a second embodiment of the present invention.
  • FIG. 6 is a vertical cross-sectional view of a liquid atomized nozzle according to a third embodiment of the present invention.
  • FIG. 7 is a longitudinal sectional view of a conventional liquid atomization nozzle.

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Abstract

L'invention concerne une buse de pulvérisation de type à tourbillon (1) comprenant un corps creux (2) possédant une sortie de gaz (201) ouverte sur sa partie avant et une entrée de gaz (202) ouverte sur son côté ainsi qu'un élément creux (3) inséré dans le corps (2) à partir du côté arrière et renfermant un passage de liquide permettant à une sortie de liquide avant (301) de communiquer avec une entrée de liquide arrière (316). Un passage de gaz (7) permettant à l'entrée de gaz (202) de communiquer avec la sortie de gaz (201) est défini entre le corps (2) et l'élément (3). Une rainure tournante (304) générant un écoulement tourbillonnaire tournant à l'avant de la sortie de liquide (301) en association avec le corps (2) est formée dans la périphérie extérieure d'extrémité avant de l'élément (3), et l'écoulement tourbillonnaire tournant écrase et pulvérise le liquide éjecté à partir de la sortie de liquide (301). Le corps (2) et l'élément (3) sont constitués d'une fluororésine, des éléments structuraux de passage d'écoulement de fluororésine (5, 15 et 4, 4A) étant montés sur l'entrée de gaz (202) et l'entrée de liquide (316), les parties montées étant fixées et scellées par soudage de sorte que les surfaces périphériques intérieures (15a, 403a) des éléments structuraux de passage d'écoulement fixées à l'entrée de gaz (202) et à l'entrée de liquide (316) soient continûment alignées avec les surfaces périphériques intérieures (7a, 8a) du passage de gaz (7) et du passage de liquide (8) sur le côté de la buse (1). Ainsi, du fait de l'absence d'une partie évidée et d'une partie de vis permettant l'adhésion et l'empilement de la substance contenue dans le liquide à l'intérieur du passage d'entrée de liquide de la buse (1), les impuretés ne se mélangent pas dans les particules de liquide pulvérisé.
PCT/JP2004/007369 2003-06-23 2004-05-28 Buse de pulverisation de liquide de type a tourbillon Ceased WO2004112970A1 (fr)

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JP2005507192A JP4659616B2 (ja) 2003-06-23 2004-05-28 渦流式液体微粒化ノズル

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Application Number Priority Date Filing Date Title
JP2003-178318 2003-06-23
JP2003178318 2003-06-23

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WO2004112970A1 true WO2004112970A1 (fr) 2004-12-29

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005313049A (ja) * 2004-04-28 2005-11-10 Atomakkusu:Kk 微粒子噴射装置
JP2008546524A (ja) * 2005-06-13 2008-12-25 ヴィクトリック カンパニー 高速低圧エミッタ
JP2011212269A (ja) * 2010-03-31 2011-10-27 Yoshino Kogyosho Co Ltd 粉体吸入デバイス
CN103846172A (zh) * 2012-11-28 2014-06-11 山东中烟工业有限责任公司青岛卷烟厂 外混式双介质雾化喷嘴

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CN103657913A (zh) * 2013-11-30 2014-03-26 无锡大阿福信息科技有限公司 一种喷雾器喷嘴结构

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JPH1152392A (ja) * 1997-08-08 1999-02-26 Toshiba Electron Eng Corp 液晶表示装置の製造装置
JP2000254554A (ja) * 1999-03-12 2000-09-19 Kimitoshi Mato 微粒化ノズル

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Publication number Priority date Publication date Assignee Title
JP2005313049A (ja) * 2004-04-28 2005-11-10 Atomakkusu:Kk 微粒子噴射装置
JP2008546524A (ja) * 2005-06-13 2008-12-25 ヴィクトリック カンパニー 高速低圧エミッタ
JP2011212269A (ja) * 2010-03-31 2011-10-27 Yoshino Kogyosho Co Ltd 粉体吸入デバイス
CN103846172A (zh) * 2012-11-28 2014-06-11 山东中烟工业有限责任公司青岛卷烟厂 外混式双介质雾化喷嘴

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