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WO2004036623A3 - Nanoscopic tunnel and method of making same - Google Patents

Nanoscopic tunnel and method of making same Download PDF

Info

Publication number
WO2004036623A3
WO2004036623A3 PCT/US2003/032829 US0332829W WO2004036623A3 WO 2004036623 A3 WO2004036623 A3 WO 2004036623A3 US 0332829 W US0332829 W US 0332829W WO 2004036623 A3 WO2004036623 A3 WO 2004036623A3
Authority
WO
WIPO (PCT)
Prior art keywords
tunnel
nanoscopic
substrate
making same
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2003/032829
Other languages
French (fr)
Other versions
WO2004036623A2 (en
Inventor
Bernhard Vogeli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nantero Inc
Original Assignee
Nantero Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/272,892 external-priority patent/US20040077107A1/en
Priority claimed from US10/272,683 external-priority patent/US20040075159A1/en
Application filed by Nantero Inc filed Critical Nantero Inc
Priority to AU2003301479A priority Critical patent/AU2003301479A1/en
Publication of WO2004036623A2 publication Critical patent/WO2004036623A2/en
Anticipated expiration legal-status Critical
Publication of WO2004036623A3 publication Critical patent/WO2004036623A3/en
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00055—Grooves
    • B81C1/00071—Channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0009—RRAM elements whose operation depends upon chemical change
    • G11C13/0014—RRAM elements whose operation depends upon chemical change comprising cells based on organic memory material
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0009—RRAM elements whose operation depends upon chemical change
    • G11C13/0014—RRAM elements whose operation depends upon chemical change comprising cells based on organic memory material
    • G11C13/0019—RRAM elements whose operation depends upon chemical change comprising cells based on organic memory material comprising bio-molecules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0896—Nanoscaled
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Composite Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)

Abstract

A nanoscopic tunnel is disclosed. The tunnel can be formed in or on a substrate, such as a semiconductor. Methods of making nanoscopic tunnels are provided. An article defining a nanoscopic tunnel is made by providing a substrate, providing a tunnel template of sacrificial material on the substrate, and covering the tunnel template with a material. The sacrificial material is removed from the article, forming a space between the covering material and the substrate. The space defines the nanoscopic tunnel.
PCT/US2003/032829 2002-10-17 2003-10-16 Nanoscopic tunnel and method of making same Ceased WO2004036623A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003301479A AU2003301479A1 (en) 2002-10-17 2003-10-16 Nanoscopic tunnel and method of making same

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US10/272,892 US20040077107A1 (en) 2002-10-17 2002-10-17 Method of making nanoscopic tunnel
US10/272,683 2002-10-17
US10/272,683 US20040075159A1 (en) 2002-10-17 2002-10-17 Nanoscopic tunnel
US10/272,892 2002-10-17

Publications (2)

Publication Number Publication Date
WO2004036623A2 WO2004036623A2 (en) 2004-04-29
WO2004036623A3 true WO2004036623A3 (en) 2006-03-09

Family

ID=32109816

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/032829 Ceased WO2004036623A2 (en) 2002-10-17 2003-10-16 Nanoscopic tunnel and method of making same

Country Status (2)

Country Link
AU (1) AU2003301479A1 (en)
WO (1) WO2004036623A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104546669B (en) 2008-11-14 2018-01-05 得克萨斯大学体系董事会 Nanochannel device and correlation technique

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5525190A (en) * 1993-03-29 1996-06-11 Martin Marietta Corporation Optical light pipe and microwave waveguide interconnects in multichip modules formed using adaptive lithography
US6384519B1 (en) * 1996-10-30 2002-05-07 Nanosciences Corporation Micro-dynode integrated electron multiplier
US20030178693A1 (en) * 2002-03-25 2003-09-25 Micron Technology, Inc. Scalable high performance antifuse structure and process

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5525190A (en) * 1993-03-29 1996-06-11 Martin Marietta Corporation Optical light pipe and microwave waveguide interconnects in multichip modules formed using adaptive lithography
US6384519B1 (en) * 1996-10-30 2002-05-07 Nanosciences Corporation Micro-dynode integrated electron multiplier
US20030178693A1 (en) * 2002-03-25 2003-09-25 Micron Technology, Inc. Scalable high performance antifuse structure and process

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PARK M ET AL: "Block copolymer lithography: periodic arrays of 1011 holes in 1 square centimeter.", SCIENCE., vol. 276, no. 5317, 30 May 1997 (1997-05-30), pages 1401 - 1404, XP002941359 *

Also Published As

Publication number Publication date
WO2004036623A2 (en) 2004-04-29
AU2003301479A8 (en) 2004-05-04
AU2003301479A1 (en) 2004-05-04

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