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WO2004011367A1 - Dispositif de deplacement d'un fluide de travail - Google Patents

Dispositif de deplacement d'un fluide de travail Download PDF

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Publication number
WO2004011367A1
WO2004011367A1 PCT/JP2003/009421 JP0309421W WO2004011367A1 WO 2004011367 A1 WO2004011367 A1 WO 2004011367A1 JP 0309421 W JP0309421 W JP 0309421W WO 2004011367 A1 WO2004011367 A1 WO 2004011367A1
Authority
WO
WIPO (PCT)
Prior art keywords
working fluid
moving device
flow path
pair
deformable portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2003/009421
Other languages
English (en)
Japanese (ja)
Inventor
Masahiro Murasato
Ritsu Tanaka
Yuki Bessho
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to AU2003252682A priority Critical patent/AU2003252682A1/en
Publication of WO2004011367A1 publication Critical patent/WO2004011367A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H29/004—Operated by deformation of container
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H01H2057/006—Micromechanical piezoelectric relay

Definitions

  • the present invention relates to a switching device that can be used for switching between an electric path and an optical path and the like, a sensor that detects the position and the like of a pressing portion, and a device that can be used as a driving source for a cylinder and the like.
  • the present invention relates to a working fluid moving device that moves a working fluid. Background technology
  • FIG. 1 Conventionally, as this type of working fluid moving device, for example, FIG. 1
  • a device 100 having the structure shown in FIG. 14 is known.
  • the device 100 is composed of a flow passage 101 having a rectangular cross section, a first working fluid (moving body) 102 and a first working fluid 102 contained in the flow passage 101.
  • a second working fluid 103 having good wettability to the inner wall of the flow passage 101, and a pair of pump chambers 104, 105 arranged at both ends of the flow passage 101.
  • This device 100 moves the first working fluid 102 rightward in FIG. 14 by allowing the second working fluid 103 to flow out of the pump chamber 104 into the flow passage 101.
  • the first working fluid 102 is moved to the left in FIG. 14. In this case, the first working fluid 102 does not have good wettability to the inner wall of the flow passage 101 with respect to the second working fluid 103,
  • FIG. 15 which is a cross-sectional view of the flow path 101 cut along a plane along the line 1, as shown in FIG. 15, the first working fluid 102 and the inner wall surface of the corner of the flow path 101 Between them, a minute gap SP is formed. Therefore, the second working fluid 1
  • One of the pump chamber 104 and the pump chamber 105 is connected to the volume and the gap SP of the second working fluid 103 removed during the movement of the first working fluid 102.
  • An amount of the second working fluid 103 corresponding to the total volume of the second working fluid 103 is caused to flow into the flow passage 101, and the second working fluid 103 is supplied to the pump chambers 104 and 105.
  • the other one must remove the same amount of the second working fluid 103 as the second working fluid 103 from the flow passage 101.
  • the device 100 if the first working fluid 102 is to be moved at a high speed, a large amount of the second working fluid 103 needs to flow in a short time. There is a problem that the first working fluid 102 cannot be moved at high speed depending on the discharge performance of the chambers 104 and 105.
  • the device 100 changes the volume of the pump chambers 104 and 105 to cause the second working fluid 103 to flow into the flow passage 101, and as a result, the first working fluid 100 Move 2 Therefore, the driving force of the pump chambers 104, 105 is not directly applied to the first working fluid 102, but is indirectly propagated through the second working fluid 103. Therefore, there is a time delay before the first working fluid 102 is moved by the driving force of the pump chambers 104 and 105, and there is a problem that the response of the device 100 is not good. Also, since the loss of power (energy) is large until the driving force of the pump chambers 104 and 105 appears as the movement of the first working fluid 102, the device 100 consumes less energy. Also has the problem of being large.
  • FIG. 1 On the other hand, if the wettability of the first working fluid 102 with respect to the inner wall of the flow path 101 is made better than the wettability of the second working fluid 103 with the inner wall of the flow path 101, FIG.
  • the gap SP as shown is not generated, and the force generated by the pump chambers 104 and 105 is efficiently applied to the first working fluid 102.
  • the pump chambers 104 and 105 exert a larger force. It must be designed to cause this, and problems such as an increase in the size of the device 100 and an increase in energy consumption occur.
  • the present invention has been made to address the above-described problems, and one of its objects is to use a repulsive force based on wettability between a working fluid (fluid to be moved) and a flow path wall surface.
  • a working fluid transfer device comprising: a working fluid; a second working fluid; and a container including a flow passage and containing the first working fluid and the second working fluid in the flow passage.
  • the container has a deformable portion in which at least a part of a wall of the flow path is deformed to change a cross-sectional shape of the flow path, and the deformable portion is in a first state.
  • the first working fluid substantially contacts a part of the inner wall surface of the flow passage corresponding to the deformable portion
  • the second working fluid substantially contacts the remaining portion of the inner wall surface of the flow passage.
  • the first working fluid and the second working fluid are accommodated so that the first working fluid and the second working fluid are in contact with each other, and the first working fluid and the second working fluid have wettability of the first working fluid to an inner wall surface of the flow path.
  • the second working fluid has a better fluid than the wettability of the second working fluid on the inner wall surface of the channel.
  • the first working fluid substantially contacts the inner wall surface of the flow passage in the deformable portion when the deformable portion of the flow passage is in a first state such as an initial state.
  • the working fluid is substantially in contact with the inner wall surface of the flow channel in the other part of the flow channel.
  • the wettability of the first working fluid to the inner wall surface of the flow passage is lower than the wettability of the second working fluid to the inner wall surface of the flow passage. Therefore, when the deformable portion deforms from the first state to a second state different from the first state, The first working fluid receives a repulsive force from the inner wall surface based on the wettability with respect to the inner wall surface of the flow path, and moves in the flow path.
  • another working fluid moving device has a first working fluid, a second working fluid, and at least a pair of opposed wall surfaces, and is formed by the pair of opposed wall surfaces.
  • At least a portion of the deformable portion has a deformable portion in which the distance between the inner surfaces of the same pair of walls becomes a second distance shorter than the first distance and the first distance by deforming at least a portion of the same pair of walls.
  • the first working fluid When the distance between the inner surface sides of the pair of walls is the first distance, the first working fluid substantially contacts the inner surfaces of the same pair of walls in the deformable portion, and the second working fluid In the part where the first working fluid does not exist,
  • the first working fluid and the second working fluid are accommodated so as to touch, and the first working fluid and the second working fluid are wetted by the first working fluid with respect to inner surfaces of a pair of walls of the flow path.
  • the first working fluid is configured to move by a repulsive force based on wettability to the inner surfaces of the same pair of walls when the distance between the inner surfaces of the first pair changes from the first distance to the second distance.
  • the first working fluid when the distance between the inner surfaces of the pair of walls in the deformable portion of the flow path is the first distance, the first working fluid substantially contacts the inner surfaces of the pair of walls in the deformable portion.
  • the second working fluid is substantially in contact with the inner surfaces of the pair of walls of the flow channel in a portion where the first working fluid does not exist.
  • the wettability of the first working fluid to the inner surfaces of the pair of walls of the flow path is lower than the wettability of the second working fluid to the inner surfaces of the pair of walls of the same flow path. Therefore, when the deformable portion deforms and the distance between the inner surfaces of the pair of walls changes from the first distance to the second distance, the first working fluid wets the inner surfaces of the same pair of walls. Repulsive force from the same pair of walls is applied to move in the channel. 9421
  • any one of the above-described working fluid moving devices moves the first working fluid by using a repulsive force caused by poor wettability between the wall surface of the flow path and the first working fluid.
  • the deformation of the deformable portion is immediately converted to the movement of the first working fluid. Therefore, when the deformation of the deformable portion is caused by the work overnight, the first working fluid can be moved while suppressing the energy consumption of the work. Further, regardless of the presence or absence of the actuator, the deformation of the deformable portion changes to the movement of the first working fluid without delay, so that a working fluid moving device with excellent responsiveness is provided.
  • the container has a plurality of the deformable portions for one of the flow passages, and the same flow passage in each of the deformable portions due to the deformation of each of the deformable portions. It is preferable that the first working fluid substantially in contact with the inner wall surface is moved by the repulsive force.
  • substantially the same function can be achieved as when a plurality of working fluid moving devices each having one deformable portion formed in one flow path are used, and the number of flow paths is small.
  • the labor and labor required to fill the flow path with the second working fluid can be reduced.
  • the number of times of adjustment of the pressure in the flow path which is a factor for determining the moving speed of the first working fluid, can be reduced.
  • the amount of pressure change (the amount of pressure decrease and / or the amount of pressure increase) is smaller than the amount of pressure change due to the deformation of the deformed channel in a working fluid transfer device in which one deformed channel is formed in one channel. It can be reduced.
  • the first working fluid is an incompressible fluid and the second working fluid is a compressible fluid. Further, it is preferable that the first working fluid is a liquid, and the second working fluid is a vapor of the first working fluid.
  • the first working fluid is a liquid metal made of mercury, a gallium alloy, or the like. According to this, for example, the conduction / non-conduction state between the switch terminals can be switched by the first working fluid.
  • any one of the working fluid moving devices includes an actuator that generates a force for deforming at least a part of a wall surface of the deformable portion, and at least a part of the deformed wall surface is formed by a diaphragm. It is preferred that there be. Further, it is also preferable that the deformable portion is formed by a pair of diaphragms whose deformable wall surfaces face each other, and a pair of actuators fixed to each of the pair of diaphragms is provided. According to these, the working fluid moving device can also be used as an active element such as a switching switch, a rodless cylinder, or an optical display element. In addition, as in the latter case, if a pair of actuators is provided, the amount of deformation of the deformable portion can be easily increased.
  • the actuator includes a film-type piezoelectric element including a piezoelectric / electrostrictive film or an antiferroelectric film.
  • the diaphragm, the deformable portion, or the inner wall surface of the deformable portion is made of ceramics. According to each of these, it is possible to provide a small and highly durable working fluid moving device as an active element.
  • the inner wall surface of the deformable portion is coated with a material having poor wettability to the first working fluid, or the inner wall surface of the deformable portion is poor wettability to the first working fluid. It is preferable to perform the modification so that According to each of these, it is possible to easily provide a working fluid moving device that generates a repulsive force based on the wettability, and it is possible to widen the selection range of the material of the container and the first working fluid.
  • the flow path of the container is formed as a closed space, and the container absorbs a volume change of the closed space due to the deformation of the deformable portion. It is preferable to provide a product change absorbing unit. According to this, the change in volume of the deformable portion can be easily absorbed without depending on the compressibility of the second working fluid, so that the selection range of the second working fluid can be expanded.
  • a device configured so that the first working fluid is separated from one fluid mass into two or more fluid masses as the deformable portion is deformed. be able to.
  • the first working fluid is a conductive fluid
  • the second working fluid is an insulating fluid
  • the deformable portion is deformed before the deformation. It becomes one of a conductive state and a non-conductive state via the first working fluid, and after the deformable portion is deformed, the conductive state moves and the non-conductive state follows as the first working fluid moves. It is preferable to provide at least one pair of terminals for attaining one of the other states. According to this, it is possible to provide a switching switch having extremely excellent responsiveness.
  • the working fluid moving device of the type including the pair of terminals is provided with a plurality of terminal conduction state switches including the deformable portion and the pair of terminals in one flow path.
  • This is a switching unit with multiple switches using one flow path.
  • one terminal can be used as a common electrode for two adjacent terminals so as to sandwich the same terminal. In this case, the number of terminals can be reduced, and the number of terminals can be reduced. Costs can be reduced.
  • the amount of increase in force can be smaller than the amount of pressure change due to the deformation of the flow path deforming part in the working fluid moving device in which one terminal conduction state switch is formed in one flow path.
  • FIG. 1A is a sectional view of the working fluid moving device according to the first embodiment of the present invention in an initial state.
  • FIG. 1B is a plan view of the working fluid moving device in the same initial state.
  • FIG. 2A is a sectional view of the working fluid moving device according to the first embodiment of the present invention in a driven state.
  • FIG. 2B is a plan view of the working fluid moving device in the same driving state.
  • FIG. 3A is a cross-sectional view of a working fluid moving device according to a second embodiment of the present invention in an initial state.
  • FIG. 3B is a longitudinal sectional view of the working fluid moving device in a driving state.
  • FIG. 4A is a sectional view of a working fluid moving device according to a third embodiment of the present invention in an initial state.
  • FIG. 4B is a longitudinal sectional view of the working fluid moving device in a driving state.
  • FIG. 5A is a plan view of a working fluid moving device according to a fourth embodiment of the present invention.
  • FIG. 5B is a cross-sectional view of the device cut along a plane along the line 414 shown in FIG. 5A when the device is in an initial state.
  • FIG. 5C is a cross-sectional view of the device cut along a plane taken along line 414 shown in FIG. 5A when the device is in a driving state.
  • FIG. 5D is a cross-sectional view of the device taken along a plane taken along line 4a-14a shown in FIG. 5A when the device is in an initial state.
  • FIG. 5E is a cross-sectional view of the device cut along a plane along line 4a-4a shown in FIG. 5A when the device is in a driving state.
  • FIG. 6A is a diagram conceptually showing a cross section in an initial state of a modification of the working fluid moving device according to the present invention.
  • FIG. 6B is a diagram conceptually showing a cross section in a driving state of a modified example of the working fluid moving device.
  • FIG. 7A is a plan view of a modification of the working fluid moving device according to the present invention.
  • FIG. 7B is a cross-sectional view of the working fluid moving device cut along a plane along line 5-5 in FIG. 7A when the working fluid moving device is in an initial state.
  • FIG. 7C is a cross-sectional view of the working fluid moving device cut along a plane along line 5-5 in FIG. 7A when the working fluid moving device is in a driving state.
  • FIG. 7D is a diagram showing functions of a modification of the working fluid moving device.
  • FIG. 8A is a view conceptually showing a cross section in an initial state of another modification of the working fluid moving device according to the present invention.
  • FIG. 8B is a diagram conceptually showing a cross section in a driving state of the working fluid moving device shown in FIG. 8A.
  • FIG. 8C is a diagram showing functions of the working fluid moving device shown in FIG. 8A.
  • FIG. 9A is a diagram conceptually showing a cross section in an initial state of another modification of the working fluid moving device according to the present invention.
  • FIG. 9B is a diagram conceptually showing a cross section of the working fluid moving device shown in FIG. 9A in a driving state.
  • FIG. 9C is a diagram showing functions of the working fluid moving device shown in FIG. 9A.
  • FIG. 10 is a conceptual plan view of the working fluid transfer device shown in FIGS. 9A and 9B.
  • FIG. 11A is a conceptual plan view of another modification of the working fluid moving device according to the present invention.
  • FIG. 11B shows the function of the working fluid transfer device shown in Figure 11A.
  • FIG. 12A is a conceptual plan view of another modification of the working fluid moving device according to the present invention.
  • FIG. 12B is a diagram showing functions of the working fluid moving device shown in FIG. 12A.
  • FIG. 13 is a conceptual diagram showing another modification of the working fluid moving device according to the present invention.
  • FIG. 14 is a conceptual diagram of a conventional working fluid moving device.
  • FIG. 15 is a sectional view of the flow path of the working fluid moving device shown in FIG. BEST MODE FOR CARRYING OUT THE INVENTION
  • FIG. 1A is a longitudinal sectional view of the working fluid moving device 10 according to the first embodiment of the present invention in an initial state (first state), and FIG. 1B is a plan view of the working fluid moving device 10. It is.
  • FIG. 1A is a cross-sectional view of the device 10 cut along a plane along line 2-2 in FIG. 1B.
  • FIG. 2A is a longitudinal sectional view of the working fluid moving device 10 in a driving state (when voltage is applied, in a second state)
  • FIG. 2B is a plan view of the working fluid moving device 10. It is.
  • FIG. 2A is a cross-sectional view of the device 10 cut along a plane along line 313 in FIG. 2B.
  • the working fluid moving device 10 functions as an on-off type switch, and has a substantially rectangular parallelepiped shape having sides extending along X-axis, Y-axis, and Z-axis directions orthogonal to each other. And a piezoelectric Z electrostrictive film 12 serving as an actuator. I have.
  • the container 11 has a channel 13 inside. The side of the container 11 along the Y axis is the longest, and the sides along the X and Z axes are shorter than the sides along the Y axis.
  • the container 11 is laminated in the positive direction of the Z-axis in order, and is constituted by a ceramic sheet (hereinafter, referred to as a “ceramic sheet”) 11a to 11c which are integrated by firing. ing.
  • the ceramic sheet 11a is highly rigid and has a pair of electrodes 11d, 11d penetrating in the Z-axis direction.
  • the electrodes 11 d and 1 Id correspond to the contacts of the switch and are formed along the upper surface of the ceramic sheet 11 a (the surface on the positive side in the Z-axis).
  • the ceramic sheet l i b has a rectangular through portion having a major axis and a minor axis along the Y-axis and the X-axis, respectively.
  • the ceramic sheet 11 c is thinner than the ceramic sheet 11 a and 1 lb (short in the Z-axis direction) and has low rigidity, so it forms a deformable diaphragm (ceramic diaphragm). are doing.
  • the penetrating portion of the ceramic sheet lib is closed by the upper surface of the ceramic sheet 11a and the lower surface of the ceramic sheet 11c, thereby forming a flow path 13.
  • the channel 13 is defined by the side wall surface of the penetration part of the ceramic sheet 11b, the upper surface of the ceramic sheet 11a, and the lower surface of the ceramic sheet 11c, and the major axis is defined.
  • a section cut along a plane along the Y-axis and orthogonal to the same long axis is a hollow space formed of a rectangle having sides along the X-axis and the Z-axis.
  • the piezoelectric / electrostrictive film 12 is integrated with the upper surface of the ceramic sheet 11 c by firing, and the upper electrode and the lower electrode formed on the upper and lower surfaces of the piezoelectric Z electrostrictive film 12 are respectively formed.
  • a voltage is applied between the lower electrodes (when a potential difference is applied)
  • a force is generated that deforms the center of the ceramic sheet 11c in the Y-axis direction.
  • the first working fluid 14 and the second working fluid 15 are accommodated in the flow path 13.
  • the first working fluid 14 is applied to the inner wall surface of the flow path 13, more specifically, a pair of opposed inner wall surfaces of the flow path 13 (in this case, the upper surface of the ceramic sheet 11 a and the ceramic sheet).
  • the contact angle of the first working fluid 14 with the inner wall surface of the flow path 13 is larger than the contact angle of the second working fluid 15 with the inner wall surface of the flow path 13.
  • the first working fluid 14 has conductivity and incompressibility.
  • the second working fluid 15 has an insulating property and is compressible.
  • the first working fluid 14 is liquid mercury, which is a liquid metal
  • the second working fluid 15 is mercury vapor.
  • the working fluid moving device 10 When no driving voltage is applied to the upper electrode and the lower electrode of the piezoelectric / electrostrictive membrane 12, the working fluid moving device 10 has the initial state shown in FIGS. The state is also referred to as a “first state” in this specification.).
  • the first working fluid 14 becomes one fluid mass (vacuum) with its surface area being minimized, and the Y-axis direction of the flow path 13 In the vicinity of the center, it substantially contacts the inner wall surface of the same channel 13.
  • the second working fluid 15 substantially contacts the inner wall surface of the flow channel 13 in a portion in the flow channel 13 where the first working fluid 14 does not exist.
  • the pair of electrode portions l ldl, l ldl are simultaneously covered with the conductive first working fluid 14 to be in a conductive state.
  • the distance between the upper surface of the ceramic sheet 11a and the lower surface of the ceramic sheet 11c at the center of the container 11 in the Y-axis direction in the initial state is referred to as a first distance for convenience.
  • the distance between the upper surface of the ceramic sheet 11a and the lower surface of the ceramic sheet 1lc at the center of the container 11 in the Y-axis direction is referred to as a second distance for convenience. Further, such a state in which the cross-sectional shape of the flow path 13 is changed is also referred to as a “second state” in this specification.
  • the first working fluid 14 since the first working fluid 14 has less wettability with respect to the wall of the flow path 13 than the second working fluid 15, the first working fluid 14 receives a repulsive force from the same wall and has a large cross-sectional area to minimize the surface area.
  • the flow path 13 is divided (separated) at both ends in the Y-axis direction and moves to form one fluid mass at each end.
  • the second working fluid 15 is compressed at both ends of the Y-axis of the flow path 13, and at the same time, the first working fluid and the inner wall surface of the flow path 13 (particularly, the inner wall corner) are compressed. Flow into the center of the flow path 13 in the Y-axis direction through the gap formed between them (a gap similar to the gap SP in Fig.
  • the pair of electrode portions 1 1 d 1 and 1 1 d 1 are not covered by the first working fluid 14, but are covered by the insulating second working fluid 15 and become non-conductive. .
  • the ceramic sheet 11 c and the piezoelectric Z electrostrictive film 12 are restored, and the working fluid moving device 10 is moved to the position shown in FIG. It returns to the initial state shown in A and Fig. 1B.
  • the first working fluid 14 moves toward the center in the Y-axis direction of the flow channel 13 and forms a single fluid mass in the same.
  • the pair of electrode portions 11 d 1, 11 d 1 is again covered with the conductive first working fluid 14 and becomes conductive. The above is the operation of the present embodiment.
  • the working fluid moving device 10 according to the first embodiment can achieve the following effects.
  • the electric energy applied to the piezoelectric / electrostrictive film 12 is efficiently used for moving the first working fluid 14.
  • the energy conversion loss associated with the movement of the first working fluid 14 is small, a working fluid moving device with low power consumption is provided.
  • the working fluid moving device 10 uses the surface tension of the first working fluid 14, that is, the property of minimizing the surface area of the first working fluid 14, the first working fluid
  • the deformation of the flow path 13 disappears after the separation once and the shape of the flow path 13 is restored, the flow is surely integrated again into one fluid mass.
  • a device is provided.
  • the working fluid moving device 10 divides the first working fluid 14 using the repulsive force that the first working fluid 14 receives from the wall surface of the flow path 13. Further, the divided first working fluid 14 becomes one fluid mass due to the surface tension, so that stable operation is possible.
  • FIG. 3A is a longitudinal sectional view of the working fluid moving device 20 in an initial state (first state), and FIG. 3B is a driving state of the working fluid moving device 20 (in the second state when a voltage is applied.
  • FIG. The plan view of the working fluid moving device 20 is the same as FIG. 1B when in the initial state, and is the same as FIG.
  • the electrodes 11 d and 11 d are not shown.
  • the working fluid moving device 20 is configured such that the ceramic sheet 11 a constituting a part (lower wall surface) of the flow path 13 of the working fluid moving device 10 described above is combined with the piezoelectric Z electrostrictive film of the device 10. It differs from the device 10 only in that it is replaced with a deformable one similar to the ceramic chip 11 c provided with 12.
  • the working fluid moving device 20 includes a pair of ceramic sheets 11 c and 11 c in which the piezoelectric Z electrostrictive film 12 is integrated by firing, and a pair of ceramic sheets 11 c , 11c, the same pair of ceramic sheets 11c, 11c, and a 1-lb integrated ceramic sheet 21b.
  • a flow path 22 is formed by the side wall surface of the through hole and each wall of the pair of ceramic sheets 11 c and 11 c on which the piezoelectric Z electrostrictive film 12 is not formed.
  • the first working fluid 14 and the second working fluid 15 are accommodated in the flow path 22.
  • the working fluid moving device 20 configured as described above operates in the same manner as the working fluid moving device 10. That is, when no drive voltage is applied to the upper electrode and the lower electrode of the piezoelectric Z electrostrictive film 12, the working fluid moving device 20 maintains the initial state shown in FIG.
  • the working fluid 14 becomes one fluid mass at the center of the flow path 22 in the Y-axis direction so as to minimize its surface area.
  • the first working fluid 14 substantially contacts the inner wall surface of the flow path 22 near the center in the Y-axis direction of the flow path 22.
  • the second working fluid 15 substantially contacts the inner wall surface of the flow path 22 in a portion of the flow path 22 where the first working fluid 14 does not exist.
  • the container 2 1 in the initial state The distance between the inner wall surfaces of the pair of ceramic sheets 11c and 11c at the center in the Y-axis direction is referred to as a first distance for convenience.
  • each piezoelectric Z electrostrictive film 12 moves in the lateral direction (ie, in the XY plane).
  • the center of each of the ceramic sheets lie and 11 c (the portion where the piezoelectric Z-electrostrictive film 12 is fixed) as shown in FIG. ) Bend and deform so that they approach each other.
  • the cross-sectional shape of the flow path 22 changes, and the cross-sectional area of the flow path 22 at the center in the Y-axis direction decreases.
  • the distance between the inner wall surfaces of the pair of ceramic sheets 11c and 11c is referred to as a second distance for convenience.
  • the first working fluid 14 since the first working fluid 14 has less wettability with respect to the wall of the flow path 22 than the second working fluid 15, the first working fluid 14 receives a repulsive force from the same wall, and the cross-sectional area is reduced to minimize the surface area.
  • the large flow path 22 moves while being divided at both ends in the Y-axis direction, and forms a single fluid mass at each end.
  • the second working fluid 15 is compressed at both ends of the Y-axis of the flow path 22 and the first working fluid 14 and the inner wall surface of the flow path 22 (particularly, the inner wall corner).
  • the fluid flows into a substantially central portion of the flow path 22 through a gap formed between the flow path 22 and the central part, and is compressed also in the central part to absorb a change in volume of the flow path 22.
  • the working fluid moving device 20 has the same effects (1) to (5) that the working fluid moving device 10 has. Further, the pair of ceramic sheets 11 c and 11 c having the piezoelectric / electrostrictive film 12 can increase the amount of deformation of the flow path 22 (the difference between the first distance and the second distance). Can be increased) 1 There is an effect that the working fluid 14 can be surely divided (third embodiment)
  • FIGS. 4A and 4B are longitudinal sectional views of the working fluid moving device 30 in an initial state (first state), and FIG. 4B is a driving state of the working fluid moving device 30 (when a voltage is applied, the second state).
  • (State) is a longitudinal sectional view.
  • the plan view of the working fluid transfer device 30 is the same as that in Fig.1B when in the initial state, except that the first working fluid 14 is separated into three parts when in the driving state. The description is omitted because it is similar to The electrodes l id and l id are not shown.
  • the flow path 13 of the working fluid moving device 10 described above has a recess (a groove or a notch) at the lower wall surface and in the center in the Y-axis direction.
  • the device is structurally different from the device 10 in this respect. More specifically, the working fluid moving device 30 replaces the ceramic sheet 11a of the working fluid moving device 10 with a ceramic sheet 31a having a recess 31al near the center in the Y-axis direction.
  • the device 10 is different from the device 10 only in that the container 3 1 includes a flow path 32.
  • the working fluid moving device 30 thus configured maintains the initial state shown in FIG. 4A when no driving voltage is applied to the upper electrode and the lower electrode of the piezoelectric electrostrictive film 12.
  • the first working fluid 14 becomes one fluid mass at the center in the Y-axis direction of the flow path 32 in order to minimize the surface area.
  • the fluid mass of ⁇ exists in the entire area of the groove 31 a 1.
  • the distance between the upper surface of the groove 31a1 of the ceramic sheet 31a at the center of the container 31 in the Y-axis direction and the lower surface of the ceramic sheet 11c in the initial state is referred to as a first distance for convenience. Call.
  • the first working fluid 14 since the first working fluid 14 has less wettability with respect to the wall of the flow path 32 than the second working fluid 15, the first working fluid 14 receives a repulsive force from the same wall and partially breaks to minimize the surface area.
  • the large flow passage 32 is divided and moved at both ends in the Y-axis direction of the flow passage 32, and forms a single fluid mass at both ends and the center of the flow passage 32. That is, the first working fluid 14 is separated into three fluid masses.
  • the second working fluid 15 is compressed at both ends of the Y-axis of the flow path 32, and the first working fluid 14 and the inner wall surface (particularly, the inner wall corner) of the flow path 32 are compressed. Through the gap formed between the first working fluid 14 and the fluid mass at the center of the flow path 32 of the first working fluid 14 and the fluid at both ends of the flow path 32 It is compressed between the lumps and absorbs the volume change of the flow path 32.
  • the working fluid moving device 30 similarly provides the effects (1) to (5) of the working fluid moving device 10.
  • the groove 31 a1 is formed, the first working fluid 14 surely exists near the center of the flow path 32 and forms one fluid mass in the initial state. The effect is obtained that the movement of the first working fluid 14 is further stabilized.
  • FIG. 5A is a plan view of the working fluid moving device 40.
  • Figures 5B and 5C When the fluid moving device 40 is in the initial state (the first state) and in the driving state (when the voltage is applied, the second state), the device moves along the plane along the line 414 shown in FIG. 5A.
  • FIG. 3 is a cross-sectional view of the working fluid moving device 40 cut through the same.
  • FIGS. 5D and 5E show the states shown in FIG. 5A when the working fluid moving device 40 is in the initial state (first state) and in the driving state (when voltage is applied and in the second state).
  • FIG. 3 is a cross-sectional view of the working fluid moving device 40 cut along a plane along the line a-4a.
  • the working fluid moving device 40 includes a container 41 made of a substantially rectangular parallelepiped ceramic having sides extending along the X-axis, the Y-axis, and the Z-axis orthogonal to each other, and a piezoelectric member as an actuator. / Electrostrictive film 42.
  • the container 41 has a flow path 43 inside thereof, and the flow path 43 has a first working fluid 14 which is liquid mercury and a second working fluid which is vapor of mercury as in the above embodiments. Accommodates 1 5 and.
  • the length of the side along each axis of the container 41 is the longest along the Y-axis, the longest along the X-axis, and the shortest along the Z-axis.
  • the container 41 is composed of ceramic sheets 41a to 41c which are sequentially laminated in the positive Z-axis direction and integrated by firing.
  • the ceramic sheet 41a has high rigidity, and is located on the upper surface and at a predetermined distance from the center in the Y-axis direction of the flow path 43 (outside positions of the thin plate part 41c1 in plan view).
  • a pair of thin film portions 41al and 41al for holding the position of the working fluid which are made of a material having good wettability with the first working fluid 14 (for example, platinum, gold, etc.), are provided.
  • the ceramic sheet 41b is actually composed of a ceramic sheet 41b1 and a ceramic sheet 4lb2 laminated on the ceramic sheet 41b1.
  • the ceramic sheet 4 lb has a rectangular through portion at the center in a plan view with the major axis and the minor axis along the Y-axis and X-axis directions, respectively.
  • the ceramic sheet 41c has an oval thin plate portion 41c1 at the center in plan view and a thick plate portion 41c2 around the thin plate portion 41c1. . Since the thin plate part 4 1 c 1 has low rigidity, a deformable diaphragm (ceramic Diaphragm).
  • the ceramic sheet 41b1 has the rectangular through-hole only at the center in the X-axis direction.
  • the ceramic sheet 41b2 has the rectangular through portion at the center in the X-axis direction.
  • the rectangular penetrating portion of the ceramic sheet 41b1 and the rectangular penetrating portion of the ceramic sheet 41b2 match in a plan view, forming a penetrating portion of the ceramic sheet 41b.
  • the ceramic sheet 41b2 is provided with an oblong penetrating part so as to correspond to the thin plate part 41c1.
  • the penetrating portion of the ceramic sheet 41 b constitutes a flow path 43 together with the upper surface of the ceramic sheet 41 a and the lower surface of the ceramic sheet 41 c.
  • the above-mentioned oblong penetrating portion of the ceramic sheet 4 lb 2 has the piezoelectric Z electrostrictive film 42 and the thin plate portion 4 1 c 1 together with the upper surface of the ceramic sheet 4 lb 1 and the lower surface of the ceramic sheet 41 c. Forms a clearance for deformation. Since the clearance is narrow, the first working fluid 14 does not enter the clearance.
  • the flow path 43 has a deformable portion because the thin plate portion 41c1 of the ceramic sheet 41c is deformable.
  • the piezoelectric Z electrostrictive film 42 has an oval shape slightly smaller than the thin plate portion 41 c 1 of the ceramic sheet 41 c in plan view, and has an upper surface of the thin plate portion 41 c 1.
  • a voltage is applied between the upper electrode and the lower electrode formed on the upper and lower surfaces of the piezoelectric / electrostrictive film 42, the flow of the thin plate portion 41c1
  • the road 43 generates a force for deforming the portion forming the upper surface downward.
  • the working fluid moving device 40 thus configured operates similarly to the working fluid moving device 10. Further, since the working fluid moving device 40 includes the thin film portions 41 a 1 and 41 a 1 for holding the working fluid position, in the initial state, the first working fluid 14 is in the flow path 43. It surely exists at the center in the Y-axis direction and forms one fluid mass. In the driving state, the piezoelectric / electrostrictive film 42 is deformed downward. At this time, the lower surface of the thin plate portion 4 1 c 1 is approximately in the X-axis direction on the upper surface of the ceramic sheet 4 1 b 1. Contact at the center.
  • the working fluid moving device 40 has an effect that the movement of the first working fluid 14 is further stabilized in addition to the effects (1) to (5) of the working fluid moving device 10. .
  • the first working fluid 14 may be a liquid metal such as a gallium alloy, a liquid such as water or oil, or a gas such as an inert gas, in addition to mercury.
  • the second working fluid 15 may be any fluid that does not combine and react with the first working fluid 14 and that is not easily dissolved in the first working fluid 14.
  • a magnetic material For example, a magnetic material , A liquid metal such as a gallium alloy, water, oil, an inert gas, or the like.
  • the second working fluid 15 is an inert gas
  • a fluid such as a gallium alloy which easily reacts with oxygen or water to form an oxide film.
  • the first working fluid 14 it is preferable to fill the first working fluid 14 in a state where oxygen and water in the flow path are completely removed. By doing so, the mobility (ease of movement) of each working fluid can be favorably maintained over a long period of time.
  • liquid metal or the like can be easily injected into the flow channel using a dispenser or the like.
  • a hole having a predetermined diameter (or a predetermined cross-sectional shape) for injecting a working fluid that communicates the flow path with the outside and a working fluid injection hole that communicates the flow path with the outside are provided in the container. And the difference between the pressure in the flow path and the pressure applied to the working fluid injected through the working fluid injection hole.
  • the working fluid may be injected into the flow channel by pressure. According to this, the amount of the working fluid to be injected can be adjusted with high accuracy by adjusting the differential pressure and / or the diameter (or cross-sectional shape) of the working fluid injection hole.
  • the piezoelectric / electrostrictive films 12 and 42 of each of the above embodiments may be a stacked piezoelectric Z-electrostrictive element in which a plurality of piezoelectric Z-electrostrictive films sandwiched between electrodes are stacked.
  • the deformable portions (diaphragms) of the flow paths 13, 22, 32, and 43 may be pressed and deformed by deformation of the piezoelectric Z electrostrictive film. In this case, the piezoelectric Z electrostrictive film and the deformable portion need not be integrated by firing.
  • a film-type piezoelectric element made of an anti-ferroelectric film can be used instead of the piezoelectric / electrostrictive films 12 and 42.
  • the electrostatic force generated between the electrodes facing each other through the gap and the deformation force generated in the shape memory alloy due to energized heating are applied to the deformation force of the piezoelectric film.
  • the deformable portion may be deformed by these forces.
  • the inner wall surfaces of the flow paths 13, 22, 32, and 43 including the inner wall surface of the deformable portion may be coated with a material having poor wettability with the first working fluid 14. Further, even if the inner wall surfaces of the flow paths 13, 22, 32, and 43 including the inner wall surface of the deformable portion are modified so as to have poor wettability with the first working fluid 14. Good. Further, the first working fluid 14 is provided with the first working fluid 14 so that the wettability of the inner walls of the flow paths 13, 22, 32, 43 including the deformable portion becomes poor.
  • the first working fluid 14 may be modified by adding a wettability modifier. In this case, as the wettability modifying agent for the first working fluid 14, an appropriate alloy (one or a composition of a plurality of alloys adjusted) can be used.
  • the deformable portions may be arranged and formed in a straight line or a matrix shape, or may be arranged and formed so as to be scattered at arbitrary positions.
  • the second working fluid 15 has compressibility, but may be incompressible.
  • the channels 13, 22, 32 and 43 are absorbed. It is preferable to provide at both ends in the Y-axis direction or at one end in the Y-axis direction a deformable volume change absorbing portion made of a diaphragm or the like.
  • the device of each of the above embodiments is configured as an on-off type switch, it can be applied to a relay, and the piezoelectric / electrostrictive films 12 and 42 are removed and deformed by the detection target. By configuring so that the possible portion is pressed, it can be used as a position detection sensor.
  • the working fluid moving device according to the present invention can be used as a device for micromachining a so-called rodless cylinder.
  • a rodless cylinder is a moving part (herein referred to as U.S. Pat. No. 3,779,401) in which the working part of the cylinder is completely sealed and moves in a sealed space.
  • the working part connected to the first working fluid 14) by magnetic force makes a reciprocating motion outside the sealed space, and can move the moving part to the outside of the rodless cylinder. Therefore, if the first working fluid 14 of the present invention is formed of a magnetic material and an externally-connected working portion is formed with the first working fluid 14 by magnetic force, the working fluid moving device of the present invention is suitable.
  • the micro rodless cylinder used can be obtained.
  • the cross-sectional area on the positive side becomes larger than the cross-sectional area on the positive side in the Y-axis, and when the drive state (second state) is reached, the cross-sectional area on the negative side of the axis becomes the cross-sectional area on the positive side. It is preferable to make the configuration smaller. According to this, in each of the first and second states, the first working fluid can reliably remain at the intended position. (Modification 9) ''
  • the working fluid moving device selects, for example, a material having a light-transmitting property on a part or the entirety of the wall surface forming the flow paths 13, 22, 22, 32, 43, and performs the first operation.
  • the fluid 14 is composed of air bubbles, a vacuole of a colored liquid or a fluorescent liquid, or a minute metal body capable of reflecting light, an optical display element can be obtained.
  • the working fluid moving device can be used as one memory element.
  • a gyro or other Sensors can also be formed.
  • the container is formed by firing and integrating a plurality of ceramic green sheets.
  • fired ceramics or glass sheets are processed using laser processing, sand blasting, etching, photolithography, etc., and the processed sheets are bonded (joined).
  • the container can be manufactured.
  • a thermosetting resin, an ultraviolet (UV) curable resin, or the like can be used as an adhesive.
  • these adhesives are applied to the bonding surface using a spinner or the like so as to form a uniform film, it is possible to perform bonding with higher confidentiality.
  • FIG. 7D which is a conceptual diagram
  • the modified example 11 has a single pole (Single Pole) having one pole (Pole) and another pole ( ⁇ ! ⁇ ).
  • FIG. 7A is a plan view of such a working fluid moving device 50.
  • FIG. 7B shows a state in which the working fluid moving device 50 is cut in a plane along the line 5-5 in FIG. 7A when the working fluid moving device 50 is in an initial state (first state). It is sectional drawing.
  • Fig. 7C shows the working fluid moving device 50 in a plane along line 5-5 in Fig. 7A when the working fluid moving device 50 is in the driving state (when voltage is applied, the second state). It is sectional drawing which cut
  • the working fluid moving device 50 is a container including a flow path 52 formed by replacing the ceramic sheet 41 a of the working fluid moving device 40 shown in FIG. 5 with the ceramic sheet 51 a. It differs from the device 40 only in that it has 51.
  • the ceramic sheet 51a has high rigidity and includes an electrode 53 and an electrode 54 penetrating in the Z-axis direction.
  • the electrodes 53, 54 are made of a conductive material (for example, platinum, gold, etc.) having good wettability with the first working fluid 14, and are made of the same material as the thin film portions 41 al and 41 a 1 described above. It has a function to keep the position of 1 working fluid 14.
  • the electrode 53 constitutes a pole (Pole) of the SPST switch, and the electrode 54 constitutes a throw of the SPST switch.
  • the electrodes 53 and 54 are provided with electrode portions (terminals) 53a and 54a, respectively, formed along the upper surface of the ceramic sheet 5la (surface on the positive side of the Z axis). ing.
  • the electrode portions 53 a and 54 a are arranged at positions (a plan view, both outer positions of the thin plate portion 41 c 1) away from the center of the flow path 52 in the Y-axis direction by a predetermined distance.
  • the electrodes 53 and 54 have connection portions 53 b and 54 b formed on the lower surface of the ceramic sheet 51 a along the lower surface, respectively.
  • the working fluid moving device 50 thus configured operates substantially the same as the working fluid moving device 10. That is, the working fluid moving device 50 maintains the initial state shown in FIG. 7B when no driving voltage is applied to the upper electrode and the lower electrode of the piezoelectric / electrostrictive film 42. In this case, the first working fluid 14 is concentrated at the center of the flow path 52.
  • the electrode portion 53a and the electrode portion 54a are simultaneously covered by the conductive first working fluid 14 forming one fluid mass, so that the electrode 53 and the electrode 54 become conductive. Become.
  • the first working fluid 14 receives repulsive force from the wall of the flow path 52 and is separated (separated) at both ends in the Y-axis direction of the flow path 52 having a large cross-sectional area in order to minimize the surface area and move. Then, a fluid mass is formed at each end. As a result, the electrode portion 53a and the electrode portion 54a are covered with the fluid mass of the first working fluid 14 which is separated into two. However, since the insulating second working fluid 15 exists between the fluid masses of the first working fluid 14 separated into two, the electrode 53 and the electrode 54 are not electrically connected. State.
  • each fluid mass of the first working fluid 14 that has been separated into two is also subjected to the force from the second working fluid 15 that has been compressed at both ends in the Y-axis direction of the flow path 52. 2 moves toward the center in the Y-axis direction, where it becomes one fluid mass.
  • the electrodes 53 and 54 become conductive again.
  • the flow channel deformed portion (the thin plate portion 41 c 1 and the piezoelectric / electrostrictive film 42 exposed to the flow channel 52 (and the first working fluid 14)) is connected to the SPST switch.
  • a switch in the conductive state (switch in the terminal conductive state) is configured.
  • the working fluid moving device 50 like the working fluid moving device 40, has the electrode portions 53a and 54a which also function as thin film portions for holding the first working fluid position. , The first working fluid 14 surely exists at the center of the flow path 52 in the Y-axis direction Form a lump.
  • the working fluid moving device 50 is more stable because the movement of the first working fluid 14 is more stable.
  • the SPST switch is capable of switching and has a stable switching operation.
  • the electrode sections 53 a and 54 a are always kept in a state of being covered with the first working fluid 14. Therefore, there is also obtained an advantage that the electrode portions 53a and 54a are hardly deteriorated.
  • FIG. 8C which is a conceptual diagram
  • the modified example 12 has one common terminal (COM), one normally closed (normally closed, NC) terminal, and one normally open (normally open, N ⁇ )
  • COM common terminal
  • NC normally closed
  • N ⁇ normally open
  • FIG. 8A is a longitudinal sectional view when the working fluid moving device 60 is in an initial state.
  • FIG. 8B is a longitudinal sectional view when the working fluid moving device 60 is in an operating state (switching state).
  • This working fluid moving device 60 has substantially the same configuration as that in which two of the working fluid moving devices 50 shown in FIG. 7 are arranged adjacent to each other in the Y-axis direction and their housings are integrated. ing. More specifically, the container 61 of the working fluid moving device 60 includes two flow paths 62 and 63 along the Y axis.
  • the flow path shown on the left side of FIGS. 8A and 8B is called a left flow path (first flow path) 62, and the flow path shown on the right side of FIGS. 8A and 8B. Is called the right side channel (second channel) 63.
  • the first working fluid 14 and the second working fluid 15 are stored in the flow paths 62 and 63, respectively.
  • a piezoelectric / electrostrictive film 64 is provided above a central portion of the left flow path 62, and the piezoelectric electrostrictive film 64 is a thin plate portion 6 which forms a deformable portion of the left flow path 62. 5 is fixed to the upper surface.
  • the piezoelectric Z electrostrictive film 64 and the thin plate portion 65 have the same configuration as the piezoelectric Z electrostrictive film 42 and the thin plate portion 41c1 of the working fluid moving device 50.
  • a piezoelectric Z-electrostrictive film 66 is provided above the center of the right flow path 63, and the piezoelectric Z-electrostrictive film 66 is provided. 2003/009421
  • Numeral 6 is fixed to the upper surface of a thin plate portion 67 that constitutes the deformable portion of the right channel 63.
  • the piezoelectric Z electrostrictive film 66 and the thin plate portion 67 also have the same configuration as the piezoelectric Z electrostrictive film 42 and the thin plate portion 41 c 1 of the working fluid moving device 50.
  • the container 61 has a total of four electrodes 62 a, 62 b, 63 a, 63 b.
  • the pair of electrodes 62a and 62b have electrode portions 62a1 and 62b1 arranged along the lower surface of the left channel 62, respectively. Further, the pair of electrodes 62 a and 62 b have connection portions 62 a 2 and 62 b 2 formed along the lower surface of the container 61, respectively.
  • the positional relationship between the pair of electrodes 62 a and 62 b with respect to the flow path 62 is the same as the positional relationship between the pair of electrodes 53 and 54 of the working fluid moving device 50 with respect to the flow path 52.
  • the pair of electrodes 63 a and 63 b are provided with electrode portions 63 a 1 and 63 b 1, respectively, arranged along the lower surface of the side channel 63.
  • the pair of electrodes 63 a and 63 b include connection portions 63 a 2 and 63 b 2 formed along the lower surface of the container 61, respectively.
  • the positional relationship between the pair of electrodes 63 a and 63 b with respect to the channel 63 is the same as the positional relationship between the pair of electrodes 53 and 54 of the working fluid moving device 50 with respect to the channel 52.
  • connection 6 2 b 2 of the electrode 6 2 b on the right side of the left passage 6 2 is connected to the connection 6 3 a 2 of the electrode 6 3 a 2 on the left side of the right passage 6 3 and the outer side of the container 6 1. And are electrically connected.
  • This connection point constitutes the common terminal COM of the SPDT switch.
  • the operation of the working fluid moving device 60 will be described.
  • the working fluid moving device 60 when the working fluid moving device 60 is in the initial state, no voltage is applied between the upper electrode and the lower electrode of the piezoelectric film 64 of the left flow path 62 (the The status is 1.) Therefore, the first working fluid 14 in the left channel 62 becomes one fluid mass at the center of the left channel 62, and this one fluid mass is composed of the electrode portion 62 a1 and the electrode portion 6. Cover 2 b 1 at the same time. As a result, the electrode 62 a and the electrode 62 b become conductive.
  • the working fluid moving device 60 when the working fluid moving device 60 is in the initial state, a voltage is applied between the upper electrode and the lower electrode of the piezoelectric Z electrostrictive film 66 in the right channel 63 (the second state). )). Therefore, the thin plate portion 67 is bent downward by the operation of the piezoelectric Z electrostrictive film 66, and the cross-sectional area of the right channel 63 at the center in the Y-axis direction is reduced. As a result, the first working fluid 14 in the right flow path 63 receives a repulsive force from the wall surface of the right flow path 63 and becomes two separated fluid masses.
  • the left working fluid mass of the first working fluid 14 in the right flow path 63 covers the left electrode portion 63 a1.
  • the fluid mass of the right first working fluid 14 in the right flow path 63 covers the right electrode part 63 b 1.
  • the electrodes 63 a and the electrodes 63 b Becomes non-conductive.
  • a voltage is applied between the upper electrode and the lower electrode of the piezoelectric electrostrictive film 64 of the left flow path 62 (the second state), and the piezoelectric Z electrostrictive film of the right flow path 63 is applied. 66. Stop applying the voltage to the upper electrode and lower electrode in step 6 (first state).
  • This state is called a switching state for convenience.
  • the operation of the piezoelectric Z electrostrictive film 64 causes the thin plate portion 65 to bend and deform downward, and the center of the left channel 62 in the Y-axis direction to break. The area becomes smaller.
  • the first working fluid 14 in the left flow path 62 receives a repulsive force from the wall surface of the left flow path 62 and becomes two separated fluid masses.
  • the fluid mass of the left first working fluid 14 covers the left electrode portion 62 a 1 of the left flow path 62.
  • the fluid mass of the first working fluid 14 on the side covers the right electrode portion 6 2 b 1 of the left channel 62.
  • the electrode 6 2a and the electrode 6 2b Becomes non-conductive.
  • the piezoelectric Z electrostrictive film 66 in the right channel 63 is restored, and the thin plate portion 67 is also returned to the normal state (planar shape).
  • the first working fluid 14 of the right side channel 63 becomes one fluid mass at the center, and this one fluid mass Covers the electrode portion 63 a1 and the electrode portion 63b1 at the same time.
  • the electrode 63 a and the electrode 63 b are brought into conduction.
  • the electrode 62b and the electrode 63a are maintained in a conductive state regardless of the initial state or the switching state.
  • the electrode 62 a and the electrode 62 b are in a conductive state in the initial state, and are in a non-conductive state in the switching state. Therefore, the electrode 62a constitutes a normally closed (normally closed) terminal.
  • the electrode 63a and the electrode 63b are in a non-conductive state in an initial state, and are in a conductive state in a switching state. Therefore, the electrode 63b constitutes a normally open (normally open) terminal.
  • the working fluid moving device 60 utilizes two working fluid moving devices 50. Therefore, the working fluid moving device 60 is an SPDT switch having all the advantages of the working fluid moving device 50 such as high-speed response.
  • a voltage must be applied between the upper electrode and the lower electrode of the piezoelectric / electrostrictive film 66 in the initial state.
  • the piezoelectric / electrostrictive film 66 and the thin plate portion 67 are bent downward and deformed in advance to obtain the state shown in FIG. 8A.
  • a voltage is applied between the upper electrode and the lower electrode of the piezoelectric electrostrictive film 66 to deform the piezoelectric / electrostrictive film 66 and the thin plate 67 upward, as shown in Figure 8B. You may be comprised so that it may be in a state where it fell.
  • Modified example 13 is a working fluid moving device 70 including an SPDT switch as shown in FIG. 9C, which is a conceptual diagram, similarly to Modified Example 12.
  • FIG. 9A shows that the working fluid moving device 70 is in the initial state.
  • FIG. 9B is a longitudinal sectional view when the working fluid moving device 70 is in an operating state (switching state).
  • FIG. 10 is a diagram conceptually showing a plan view of the working fluid moving device 70.
  • the working fluid moving device 70 constitutes an SPDT switch by providing three electrode portions (terminals) in one flow path. More specifically, the container 71 of the working fluid moving device 70 has one linear flow path 72 extending along the Y axis.
  • the flow path 72 contains the first working fluids 14a and 14b and the second working fluid 15.
  • the first working fluid exists as two fluid masses 14a and 14b in any of an initial state and a switching state described later.
  • the lump of the first working fluid located on the left and right sides of the flow path 72 is called a left first working fluid 14a and a right first working fluid 14b, respectively.
  • the second working fluid 15 fills a portion where the first working fluid 14 does not exist.
  • the container 71 has a piezoelectric Z electrostrictive film 74 on the upper left side in FIG. 9 of the center of the channel 72.
  • the piezoelectric Z electrostrictive film 74 is fixed to the upper surface of a thin plate portion 75 that constitutes a deformable portion formed on the left side of FIG. 9 from the center of the flow path 72.
  • the piezoelectric Z electrostrictive film 74 and the thin plate portion 75 have the same configuration as the piezoelectric / electrostrictive film 42 and the thin plate portion 41c1 of the working fluid moving devices 40, 50.
  • the container 71 is provided with a piezoelectric Z electrostrictive film 76 above the right side in FIG. 9 of the center of the flow channel 72.
  • the piezoelectric / electrostrictive film 76 is fixed to the upper surface of a thin plate portion 7 7 ′ that constitutes a deformable portion formed on the right side of FIG.
  • the piezoelectric / electrostrictive film 76 and the thin plate portion 77 have the same configuration as the piezoelectric / electrostrictive film 42 and the thin plate portion 41c1 of the working fluid moving devices 40 and 50.
  • the container 71 has a total of three electrodes 72a, 72b, 72c in order from the left in FIG.
  • the electrodes 72 a, 72 b, and 72 c have electrode portions 72 a 1, 72 b 1, and 72 c 1, respectively, arranged along the lower surface of the flow path 72.
  • Electrode part 7 2 a 1 is slightly to the left of just below thin plate part 75
  • electrode part 7 2 b 1 is thin plate part 75 and thin plate part
  • the electrode portion 72c1 is formed slightly below the portion between the thin plate portion 77 and right below the portion between the thin plate portion 77.
  • the electrodes 72 a, 72 b, and 72 c have connection parts 72 a2, 72 b2, and 72 c2 formed along the lower surface of the container 71, respectively. .
  • the operation of the working fluid moving device 70 will be described.
  • FIG. 9A when the working fluid moving device 70 is in the initial state, no voltage is applied between the upper electrode and the lower electrode of the piezoelectric Z electrostrictive film 74.
  • the left first working fluid 14a becomes one relatively long fluid mass, and simultaneously covers the electrode portion 71 2 and the electrode portion 72b1.
  • the electrode 72a and the electrode 72b are brought into conduction.
  • the working fluid moving device 70 when the working fluid moving device 70 is in the initial state, a voltage is applied between the upper electrode and the lower electrode of the piezoelectric Z electrostrictive film 76. Therefore, the thin plate portion 77 is bent downward by the operation of the piezoelectric / electrostrictive film 76, and the cross-sectional area of the flow path 72 below the thin plate portion 77 is reduced. As a result, the first working fluid 14b on the right side receives a repulsive force from the wall of the flow channel 7 (the lower surface of the thin plate portion 77) and does not exist directly below the thin plate portion 77, and the flow path 7 2 At the right end in Fig. 9 there is one fluid mass.
  • the right first working fluid 14b covers the electrode portion 72c1, but does not cover the electrode portion 72b1. Also, an insulating second working fluid 15 exists between the left first working fluid 14a and the right working fluid 14b. As a result, the electrode 72c and the electrode 72b enter a non-conductive state.
  • a voltage is applied between the upper electrode and the lower electrode of the piezoelectric electrostrictive film 74, and the application of the voltage to the upper electrode and the lower electrode of the piezoelectric / electrostrictive film 76 is stopped.
  • This state is called a switching state for convenience.
  • the thin plate portion 75 is bent downward by the operation of the piezoelectric Z electrostrictive film 74, and the cross-sectional area of the flow path 72 below the thin plate portion 75 is reduced. It becomes smaller.
  • the left first working fluid 14a receives a repulsive force from the wall of the flow channel 72 (the lower surface of the thin plate portion 75) and separates into two.
  • One is the left end of the flow channel 72 in FIG.
  • the fluid becomes a relatively short fluid mass at, and the other moves rightward in FIG. Side 1st working fluid 14b.
  • the left first working fluid 14a covers the electrode portion 72a1, but does not cover the electrode portion 72b1.
  • an insulating second working fluid 15 exists between the left first working fluid 14a and the right working fluid 14b.
  • the electrode 72a and the electrode 72b enter a non-conductive state.
  • the piezoelectric electrostrictive film 76 is restored, and the thin plate portion 77 is also returned to the normal state (flat shape).
  • the first working fluid 14b on the right side becomes one relatively long fluid mass, and this one fluid mass simultaneously covers the electrode portion 72b1 and the electrode portion 72c1. Therefore, the electrode 72b and the electrode 72c are brought into conduction.
  • the electrode 72b and the electrode 72a maintain a conductive state, and the electrode 72b and the electrode 72c are in a non-conductive state.
  • the electrode 72b and the electrode 72a are turned off, and the electrode 72b and the electrode 72c are turned on. Therefore, the electrode 72a constitutes a normally closed (normally closed) terminal, and the electrode 72c constitutes a normally open (normally open) terminal.
  • the working fluid moving device 70 uses the repulsive force to move the first working fluid in the same manner as the working fluid moving device 50, so that the high-speed response of the working fluid moving device 50 is achieved. It is an SPDT switch that combines all of the advantages described above.
  • a voltage must be applied between the upper electrode and the lower electrode of the piezoelectric electrostrictive film 76 in the initial state.
  • the piezoelectric / electrostrictive film 76 and the thin plate portion 77 were previously bent so as to bend downward and become the state shown in FIG. 9A.
  • a voltage is applied between the upper electrode and the lower electrode of the piezoelectric / electrostrictive film 76 to deform the thin plate portion 77 upward to obtain the state shown in FIG. 9B. May be.
  • Modified example 14 is a working fluid transfer device in which a plurality of switches are provided in one (identical) flow path, as in Modified example 13. That is, the working fluid moving device 80 according to the modified example 14 has one flow path 82 and a shape corresponding to the flow path 82 as shown in FIG. 11A which is a conceptual plan view. Four switches 84-87 formed, electrodes 82-82f, and flow path
  • a throttle portion 83 formed at the center of 82 to reduce the cross-sectional area of the flow path 82 and prevent the passage of the first working fluid.
  • the switch 84 is provided between the electrodes 82a and 82b, and the switch 85 is provided between the electrode 82b and the electrode 82c. These parts including the switches 84 and 85 and the electrodes 82a to 82c are substantially the same as the working fluid moving device 70 shown in Fig. 10 and constitute one SPDT switch. are doing.
  • the switch 86 is provided between the electrodes 82d and 82e, and the switch 87 is provided between the electrodes 82e and 82f.
  • These parts including the switches 86 and 87 and the electrodes 8201 to 82 are substantially the same as the working fluid moving device 70 and constitute one SPDT switch shown in FIG. I have.
  • the working fluid moving device 80 configures two SPDT switches shown in FIG. 11B using one channel 82.
  • another working fluid moving device 90 has one flow path 92 and six flow paths formed for the flow path 92. Switches 93-98, electrodes 92a-92i, and flow paths
  • Narrowing sections 92-1 and 92-2 formed in the flow path 92 to reduce the cross-sectional area of the flow path 91 and prevent the passage of the first working fluid.
  • the electrodes 92a to 92i are formed in order from the left of the channel 92 in FIG. 12A.
  • the apertures 92-1 and 92-2 are respectively provided between the electrode 92c and the electrode 92d and between the electrode 92f and the electrode 92g.
  • the switch 93 is provided between the electrodes 92a and 92b, and the switch 94 is It is provided between the electrode 92b and the electrode 92c.
  • the switch 95 is provided between the electrodes 92 d and 92 e, and the switch 96 is provided between the electrodes 92 e and 92 f.
  • the portions including the switches 95 and 96 and the electrodes 92 d to 92 f are substantially the same as the working fluid moving device 70 and constitute one SPDT switch.
  • the switch 97 is provided between the electrodes 92g and 92h, and the switch 98 is provided between the electrodes 92h and 92i.
  • These portions including the switches 97 and 98 and the electrodes 92 g to 92 i are substantially the same as the working fluid moving device 70 and constitute one SPDT switch.
  • the working fluid moving device 90 uses the one flow path 92 to constitute the three SPDT switches shown in FIG. 12B.
  • the working fluid moving devices 70 to 90 described above are connected to each other by a plurality of electrode portions (first working fluids 14, 14 a, 14 b) in one (identical) flow path. And a switch for switching between a non-conductive state and a non-conductive state). That is, these devices are in one of a conducting state and a non-conducting state via the first working fluid before the deformable portion (thin plate portion) of each flow path is deformed. After the first working fluid moves, the working fluid moves to another one of a conductive state and a non-conductive state with movement of the first working fluid.
  • a plurality of terminal conducting state switches (switching devices) each including the deformable portion and the pair of terminals are formed in one flow path. This is a switching unit in which a plurality of switches are configured using one flow path.
  • the same switching function as when a plurality of working fluid moving devices each having one terminal conduction state switch formed in one flow path can be achieved, and the number of flow paths is small.
  • the labor and labor required for filling the second working fluid into the flow path can be reduced.
  • one terminal (electrode part) sandwiches the same terminal It is also possible to use it as a common electrode for two adjacent terminals (for example, electrodes 72b, 82b, 82e, 92b ..., etc.). In this case, the number of terminals can be reduced. Since it is possible, the cost of the device can be reduced.
  • the flow The (maximum) pressure change in the channel is the pressure associated with the deformation of the flow path deformation part in the working fluid moving device that has one switching device in one flow path. Less than the change (or less than or equal to).
  • each of the containers 71, 81, and 91 has a plurality of deformable portions described above for one flow path 72, 82, and 92.
  • the first working fluid that substantially contacts the inner wall surface of the same flow path in each deformable portion by the deformation of each deformable portion is configured to move by the repulsive force received from the inner wall surface. You can also say.
  • substantially the same function can be achieved as when a plurality of working fluid moving devices each having one deformable portion formed in one flow path are used, and the number of flow paths is small.
  • the labor and labor required for filling the second working fluid into the flow path can be reduced.
  • the number of times of adjustment of the pressure in the flow path which is a factor for determining the moving speed of the first working fluid, can be reduced.
  • Modification 15 is an example in which a working fluid moving device in which the deformable portions (ie, switches) described in Modification 4 are arranged in a matrix is applied to a test apparatus. More specifically, the working fluid moving device 200 (switching unit 200) has a matrix shape (in this example, a matrix having 4 rows and 4 columns) as shown in FIG. It is provided with a plurality of working fluid moving devices 50 arranged in a (trices) manner.
  • the pair of terminals of the first device under test 201 are connected to connection lines LA and LB constituting the rows A and B, respectively.
  • Second device under test 2 0 2 Are connected to connection lines LC and LD constituting the C and D rows, respectively.
  • the first signal source 2 11 and the second signal source 2 12 are connected to connection lines L 1 and L 2 respectively forming the first and second columns.
  • the first measuring device 22 1 and the second measuring device 22 2 are connected to connection lines L 3 and L 4 respectively forming the third and fourth columns.
  • Each working fluid transfer device 50 is arranged between the signal lines of each column and each row.
  • one working fluid moving device 50 is arranged between the connecting line LA in the row A and the connecting line L 1 in the first column, and the working fluid moving device 50 is connected between the connecting lines LA and L 1.
  • the conduction state can be switched. That is, one working fluid transfer device 50 is arranged between the connection line Ln of the nth row (n is A to D) and the connection line Lm of the mth column (m is 1 to 4), The working state of the connection line L n and the connection line L m is switched by the working fluid moving device 50.
  • a signal is supplied to the first device under test 201 using the first signal source 211, and the state (output) of the first device under test 201 at that time is set to the first signal.
  • the working fluid moving device 50 in the B row and the 1st column is operated to bring the connection line LB and the connection line L 1 into the conducting state, and the working fluid in the A row and the 3rd column Activate the moving device 50 to make the connection lines LA and L3 conductive.
  • the signal from the first signal source 211 is supplied to the first device under test 201 via the connection line L 1, the working fluid moving device 50 in row B, column 1 and the connection line LB.
  • the output of the first device under test 201 is supplied to the first measuring device 222 through the connection line LA, the working fluid moving device 50 in the third row of row A, and the connection line L3.
  • the working fluid moving device 200 of the present modified example is a switching unit that switches the connecting lines used by arranging the working fluid moving devices 50 in a matrix. I have. Since the working fluid moving device according to the present invention can utilize the ceramic lamination process, a plurality of working fluid moving devices such as the working fluid moving device 200 can be used. Switches can be economically formed in the same plane. Further, according to the present invention, since a characteristic variation (variation in switching performance) between a plurality of working fluid moving devices formed in one switching unit is small, a highly reliable switching unit is provided. be able to.
  • switching unit working fluid moving device 200
  • the first working fluid 14 has moved or separated (divided) reliably in the driving state and whether the first working fluid 14 has been integrated when returning to the initial state It is preferable to configure so that it can be confirmed whether or not it has been performed.
  • a part or all of the container is made of a transparent material (made of a light-transmitting material) so that light can reach the flow path from the outside of the container.
  • the position, Z, or state of the first working fluid 14 can be confirmed using an optical position detection device. If the first working fluid 14 is a liquid metal, the position and the state of the first working fluid 14 are detected by detecting the eddy current generated by the movement of the liquid metal in the electric field. Can be confirmed. Further, the position, the Z, or the state of the first working fluid 14 can be confirmed by applying an ultrasonic wave to the flow path and detecting the reflected wave.
  • the working fluid moving device is a device that can move the working fluid with low energy conversion loss and high responsiveness.
  • the embodiments and the modifications described above may be used in appropriate combinations.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)

Abstract

Un dispositif (10) de déplacement de fluide de travail se présente sous forme d'un corps feuilleté constitué de feuilles de céramique (11a-11c) qui forment un chemin d'écoulement (13). La feuille de céramique (11c) forme un film et un film piézo-électrique/électrostrictif (12) est formé d'un seul tenant sur la face supérieure de la feuille de céramique (11c). Dans le chemin d'écoulement (13) se trouvent un premier fluide de travail (14) et un deuxième fluide de travail (15). La mouillabilité du premier fluide de travail par rapport à la face de paroi intérieure du chemin d'écoulement est inférieure à la mouillabilité du deuxième fluide de travail. Lorsqu'on applique de la tension sur le film piézo-électrique/électrostrictif, la partie centrale de la feuille de céramique (11c) se courbe et se déplace pour réduire la surface en section transversale du chemin d'écoulement. Le premier fluide de travail (14), en présence d'une masse de fluide dans la partie centrale du chemin d'écoulement, est séparé en deux lorsque le fluide subit une force de répulsion, provoquée par la mouillabilité inférieure du fluide, qui s'applique sur la surface de la paroi du chemin d'écoulement et circule dans le chemin d'écoulement.
PCT/JP2003/009421 2002-07-26 2003-07-25 Dispositif de deplacement d'un fluide de travail Ceased WO2004011367A1 (fr)

Priority Applications (1)

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AU2003252682A AU2003252682A1 (en) 2002-07-26 2003-07-25 Operation fluid movement device

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JP2002-218175 2002-07-26
JP2002218175 2002-07-26
JP2003084485 2003-03-26
JP2003-84485 2003-03-26

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1829074A4 (fr) * 2004-12-22 2009-05-06 Agilent Technologies Inc Commutateur metal liquide integrant des structures d'un systeme microelectromecanique (mems) pour actionner ledit commutateur

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973676A (fr) * 1972-11-18 1974-07-16
US4200779A (en) * 1977-09-06 1980-04-29 Moscovsky Inzhenerno-Fizichesky Institut Device for switching electrical circuits
WO2000070224A1 (fr) * 1999-05-17 2000-11-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pompe micromecanique

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973676A (fr) * 1972-11-18 1974-07-16
US4200779A (en) * 1977-09-06 1980-04-29 Moscovsky Inzhenerno-Fizichesky Institut Device for switching electrical circuits
WO2000070224A1 (fr) * 1999-05-17 2000-11-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pompe micromecanique

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1829074A4 (fr) * 2004-12-22 2009-05-06 Agilent Technologies Inc Commutateur metal liquide integrant des structures d'un systeme microelectromecanique (mems) pour actionner ledit commutateur

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