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WO2004094939A1 - Sonde magnétique - Google Patents

Sonde magnétique Download PDF

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Publication number
WO2004094939A1
WO2004094939A1 PCT/JP2003/005132 JP0305132W WO2004094939A1 WO 2004094939 A1 WO2004094939 A1 WO 2004094939A1 JP 0305132 W JP0305132 W JP 0305132W WO 2004094939 A1 WO2004094939 A1 WO 2004094939A1
Authority
WO
WIPO (PCT)
Prior art keywords
coil
subject
magnetic
detection
detection coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2003/005132
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English (en)
Japanese (ja)
Inventor
Kazuhiro Yamakawa
Kazuaki Tabata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azuma Systems Co Ltd
Original Assignee
Azuma Systems Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azuma Systems Co Ltd filed Critical Azuma Systems Co Ltd
Priority to AU2003235389A priority Critical patent/AU2003235389A1/en
Priority to JP2004571070A priority patent/JPWO2004094939A1/ja
Priority to PCT/JP2003/005132 priority patent/WO2004094939A1/fr
Publication of WO2004094939A1 publication Critical patent/WO2004094939A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables

Definitions

  • the present invention belongs to the technical field of magnetic probes used for surface inspection, flaw detection inspection, residual stress inspection, material inspection, etc. of an object containing a metal component, and in particular, freely forms according to the inspection object and required detection accuracy.
  • the present invention relates to a magnetic probe capable of performing high-precision inspection while using a detection coil that can be changed. Background art
  • Magnetic probes that use magnetism, particularly an alternating magnetic field, to perform various tests on a subject containing a metal component are known.
  • This type of magnetic probe has already been used for surface inspection, flaw detection inspection, residual stress inspection, material inspection, etc. of specimens containing metal components, but it is necessary to improve the detection accuracy in order to expand the range of use Is strongly desired. Therefore, a U-shaped core that forms a loop-shaped magnetic circuit in the interior of the subject and the surface space of the subject exists, and this core is AC-excited to produce the inside of the subject and the surface of the subject.
  • a magnetic probe has been proposed that includes an excitation coil that generates an AC magnetic field in space and a detection coil that locally detects a change in magnetic flux near the surface of the subject (for example, Japanese Patent Application Laid-Open No. 60-173). See No. 51.)
  • the magnetic probe configured as described above forms a magnetic circuit with the subject, it can generate a local strong magnetic field at a desired position on the subject, and the exciting unit and the detecting unit
  • the independent magnetic probe has an advantage that the detection coil can be miniaturized.
  • the above-described conventional magnetic probe has a disadvantage in that the detection coil is arranged such that the coil center line is directed perpendicular to the surface of the subject. Since the change in magnetic flux is detected using a general-purpose magnetic detection element such as a Hall element, there has been a problem that the detection accuracy is limited and the application of the magnetic probe is limited.
  • the AC magnetic field generated by the excitation coil is substantially parallel to the surface of the subject.
  • There is a magnetic change due to the surface shape or scratches of the subject mainly a force that appears as a change in magnetic flux along the surface of the subject.
  • a detection coil arranged perpendicular to the surface of the subject is a magnetic flux. Since only the vertical component of the change is detected, there is a drawback that it is not possible to detect even a minute change in the magnetic flux density along the surface of the subject.
  • the shape of the detection unit must be changed as appropriate according to the inspection target and the required detection accuracy.However, the size of a magnetic detection element such as a Hall element is specified in advance, and the shape can be freely changed. Due to the low degree of accuracy, there are drawbacks in that the applications of the magnetic probe are limited and the required accuracy cannot be secured.
  • An object of the present invention is to form a loop-shaped magnetic circuit by an excitation coil and a core, and to detect a change in magnetic flux locally near the surface of a subject without using a general-purpose magnetic detection element.
  • a magnetic probe that detects a change in magnetic flux near the surface of a subject has a plurality of subjects close to each other, and forms a loop-shaped magnetic circuit in the interior of the subject and in the space of the subject or the surface of the subject.
  • a ferromagnetic core an exciting coil that generates an alternating magnetic field along the surface of the subject in the subject and / or in a surface space of the subject by exciting the core with an alternating current; And a detection coil that is arranged so that the outer peripheral surface of the coil locally faces the surface of the subject and detects a change in magnetic flux near the surface of the subject.
  • a magnetic detection element such as a Hall element can be used to detect a local magnetic flux change near the surface of the subject while forming a loop-shaped magnetic circuit with the excitation coil and the core.
  • a detection coil that can be freely changed in shape, etc. according to the inspection object and required detection accuracy without using
  • the detection coil so that the coil center line is along the surface of the object and the coil outer peripheral surface is locally opposed to the surface of the object, the magnetic flux changes in the direction along the surface of the object. Can be detected with extremely high accuracy.
  • the detection coil arranged in this manner can be easily miniaturized in the direction along the surface of the subject, it is necessary to scan the magnetic probe (or move the subject) while inspecting the surface of the subject. The resolution can be easily improved.
  • the detection coil is a differential coil capable of detecting a differential voltage, and a pair of coils constituting the differential coil are arranged along the surface of the subject. In this case, the detection accuracy can be further improved by canceling the inherent error and the temperature error of the coil.
  • the detection coil is characterized in that it is formed using a spiral coil having a small thickness in a coil center line direction.
  • the resolution of the magnetic probe can be improved by performing the inspection while scanning the magnetic probe or the subject in the direction of the coil center line of the detection coil.
  • the detection coil is formed as a thin-film circuit pattern on a base material made of an insulator. In this case, the thickness of the detection coil in the direction of the center line of the coil is remarkably reduced, and the resolution of the magnetic probe can be further increased.
  • the detection coil is a differential coil capable of detecting a differential voltage, and a pair of coils constituting the differential coil is formed in a laminated shape with the base material interposed therebetween. .
  • the resolution of the magnetic probe be drastically improved, but also the inherent error and temperature error of the coil can be offset to obtain highly reliable inspection data.
  • an extremely thin detection coil can be formed by the existing thin film substrate manufacturing technology.
  • a plurality of the detection coils are provided so as to be arranged along the surface of the subject.
  • two-dimensional detection data can be obtained by scanning the magnetic probe or the subject in a direction orthogonal to the arrangement direction of the detection coils. If arranged in a magnetic probe Two-dimensional detection data can be obtained without scanning the subject.
  • FIG. 1 is a side view showing a basic configuration of a magnetic probe.
  • FIG. 2 is a perspective view showing a basic form of a detection coil.
  • FIG. 3 is a block diagram showing a detection circuit.
  • FIGS. 6A to 6C are explanatory views showing various embodiments of the detection coil.
  • () Is a side view of the detection coil
  • (B) is a plan view of the detection coil
  • (C) is a side sectional view of the detection coil.
  • FIG. 7 (A) to 7 (C) are explanatory views showing various embodiments of the detection coil, (A) is a front view and a side view of the detection coil, (B) is a front view of the detection coil, (C) 3 is a plan view of a detection coil.
  • 8 (A) to 8 (E) are explanatory diagrams showing examples of arrangement of a core and a detection coil.
  • FIG. 1 is a side view showing a basic configuration of a magnetic probe.
  • the magnetic probe 1 shown in this figure generates at least a core 3 and an excitation coil 3 in order to detect a magnetic flux change near the surface of the subject 2 while generating an alternating magnetic field inside the subject 2 and a surface space containing a metal component. It comprises a coil 4 and a detection coil 5.
  • the core 3 has a plurality of specimen proximity portions 3a, and is formed using a ferromagnetic material so as to form a loop-shaped magnetic circuit, with the inside of the specimen 2 and a surface space. ing.
  • the exciting coil 4 is wound around the core 3, and an AC voltage having a predetermined frequency is applied.
  • an AC voltage is applied to the excitation coil 4, the core 3 is AC-excited, and the inside of the subject 2 and the
  • An alternating magnetic field along the surface of the subject 2 is generated in the surface space.
  • the magnetic flux of this AC magnetic field is determined by the material of the subject 2 (flux change factors: magnetic permeability, conductivity, etc.), the surface state (flux change factors: magnetic permeability, conductivity, eddy current, detection gap, leakage magnetic flux, etc.), internal It changes according to the state (magnetic flux change factors: permeability, conductivity, eddy current, leakage flux, etc.).
  • This change in magnetic flux includes a component parallel to the surface of the subject 2 and a component perpendicular to the surface of the subject 2.
  • a large change also occurs in the vertical component.
  • the vertical component In the case of a small change in magnetic flux, the vertical component hardly changes, and the change mainly appears in the parallel component.
  • the detection coil 5 is arranged so that the coil center line is along the surface of the subject 2 and the outer peripheral surface of the coil is locally opposed to the surface of the subject 2, and changes the magnetic flux near the surface of the subject 2.
  • the magnetic probe 1 of the present invention when forming a loop-shaped magnetic circuit by the exciting coil 4 and the core 3 and detecting a local magnetic flux change near the surface of the subject 2, includes the detecting coil 5
  • the coil center line is arranged along the surface of the subject 2 without being arranged perpendicular to the surface of the subject 2. This makes it possible to accurately detect even a small change in magnetic flux in which the vertical component hardly changes and the parallel component mainly changes.
  • FIG. 2 is a perspective view showing a basic form of a detection coil
  • FIG. 3 is a block diagram showing a detection circuit.
  • the detection coil 5 shown in FIG. 2 is a differential coil capable of detecting a differential voltage.
  • the pair of coils L1, L2 constituting the differential coil are connected in series so as to be arranged along the surface of the subject 2, and in addition to the terminals T1, T2 drawn from both ends thereof, It has a center tap terminal T 3 that is drawn out between the coils L l and L 2.
  • the coils L 1 and L 2 form a bridge circuit 6 with a pair of resistors R 1 and R 2 (or a variable resistor). Are output.
  • the resistance values of the resistors R1 and R2 are initially adjusted so that the differential output has a predetermined value.
  • the differential output of the bridge circuit 6 is amplified by the differential amplifier circuit 7 and then input to the synchronous detection circuit 8.
  • the synchronous detection circuit 8 inputs a synchronization signal from the AC excitation circuit section 10 of the excitation coil 4 via the 90 ° phase shifter 9 and, at the same time, outputs the differential signal at the cycle.
  • the detection circuit shown in FIG. 3 includes an integration circuit that performs an integration process using the scanning distance of the magnetic probe 1 as a parameter. Next, each part of the magnetic probe 1 will be described in detail.
  • FIG. 4 is an explanatory diagram showing various embodiments of the core.
  • Each of the cores 3 shown in this figure is a ferromagnetic material capable of forming a magnetic circuit, and is formed using, for example, ferrite.
  • the shape of the core 3 (side view) is a U-shape, a U-shape as shown in FIG. 4 (B), and a U-shape as shown in FIG. 4 (C).
  • a V-shape or a C-shape as shown in FIG. 4 (D) can be adopted.
  • the dimensions of the core 3 are set according to the excitation range (inspection range). For example, as shown in FIG.
  • FIG. 5 is an explanatory view showing various embodiments of the exciting coil.
  • Each of the excitation coils 4 shown in this figure is made of a conductive wire coated with an insulating material, and is wound around the core 3.
  • the winding position of the exciting coil 4 with respect to the core 3 is not limited to the upper part of the core 3 as shown in FIG. 5 (A), but may be the left and right legs of the core 3 as shown in FIG. 5 (B).
  • the excitation coil 4 may be wound around the upper part of the core 3 and the left and right legs.
  • the frequency of the AC voltage applied to the exciting coil 4 is set in consideration of the skin effect of the subject 2 due to the AC magnetic field. For example, when inspecting the surface of the subject 2, it is preferable to increase the frequency of the AC voltage, and when inspecting the inside or back surface of the subject 2, it is preferable to decrease the frequency of the AC voltage.
  • FIGS. 6 and 7 are explanatory diagrams showing various embodiments of the detection coil.
  • the detection coils 5 shown in these figures are all air-core coils.
  • Figure 6 (a) is explanatory diagrams showing various embodiments of the detection coil.
  • the detection coil 5 (equivalent to that shown in FIG. 2) of A) has coils L 1 and L 2 formed by winding a non-magnetic core material 5 a with an insulated conductor.
  • 6 (B) is a biaxial type in which a pair of detection coils 5 are integrated in a cross shape, and both detection coils 5 are arranged along the surface of the subject 2. . According to the two-axis type configured in this manner, even if one of the detection coils 5 is parallel to a linear defect (a crack or the like) of the subject 2, the other detection coil 5 does not respond to the linear defect. Since they intersect, linear defects can be reliably detected without overlooking them.
  • FIG. 6 (C) shows the detection coil 5 formed so that the thickness in the coil center line direction is as small as possible.
  • a coil winding groove having a predetermined width for example, 50 ⁇ m
  • the detection coil 5 is formed by winding a multi-layered conductive wire in each coil winding groove.
  • the detection coil 5 thus configured has a small thickness in the coil center line direction and a small interval between the coils L 1 and L 2, so that the resolution in the coil center line direction can be significantly improved.
  • the detection coil 5 shown in FIG. 7 is formed as a thin-film circuit pattern (spiral coil) on a base material 5c made of an insulator.
  • a detection coil 5 can be formed by, for example, an existing thin-film substrate manufacturing technology. However, if a semiconductor manufacturing technology or a micromachining technology is used, a finer and thinner detection coil can be formed.
  • the detection coil 5 shown in FIG. 7 uses a base material 5c (for example, a ceramic substrate) for a thin film substrate, and forms a conductor layer (for example, a copper foil) formed on the front and back thereof based on a circuit pattern.
  • the thin-film coils Ll and L2 are formed by vapor deposition.
  • a pair of coils L 1 and L 2 constituting the differential coil are formed in a laminated shape with the extremely thin base material 5 c interposed therebetween, so that the resolution in the coil center line direction can be drastically improved. become.
  • the detection coil 5 in which a plurality of coils Ll and L2 are one-dimensionally arranged may be juxtaposed in the scanning direction of the magnetic probe 1.
  • the coils L 1 and L 2 formed on the front and rear detection coils 5 at a half pitch from each other, it is possible to eliminate a gap in the one-dimensional array direction and prevent detection leakage.
  • a plurality of detection coils 5 may be arranged in two dimensions. In this case, two-dimensional detection data can be obtained without scanning the magnetic probe 1 or the subject 2.
  • FIG. 8 is an explanatory diagram showing an example of arrangement of a core and a detection coil.
  • the arrangement relationship between the core 3 and the detection coil 5 can be arbitrarily set according to the form of the subject 2, the inspection location, and the purpose of the inspection.
  • FIG. 8 (A) shows a basic arrangement relationship, wherein the detection coil 5 is arranged between the core 3 and the vicinity 3a of the subject.
  • FIG. 8 (B) shows an example of an arrangement in which a C-shaped core 3 is used, and is suitable for an end face inspection of the subject 2 and the like.
  • FIG. 8 (C) shows an arrangement suitable for inspecting the outer peripheral surface of a round bar or a pipe, and the detection coil 5 is arranged so as to sandwich the subject 2.
  • FIG. 8D shows an example in which the core 3 and the detection coil 5 are arranged with the subject 2 interposed therebetween.
  • FIG. 8 (E) shows an arrangement suitable for inspection of an end face of a round bar or the like.
  • the magnetic probe 1 configured as described above detects a local magnetic flux change near the surface of the subject 2 while forming a loop-shaped magnetic circuit by the excitation coil 4 and the core 3, such as a Hall element.
  • the detection coil 5 whose shape can be freely changed according to the inspection target and the required detection accuracy is used without using the magnetic detection element, the detection coil 5 and the coil center line are By arranging the coil along the surface and with the coil outer peripheral surface being locally opposed to the surface of the subject 2, it is possible to detect a magnetic flux change in the direction along the surface of the subject 2 with extremely high accuracy. .
  • the detection coil 5 arranged in this manner can be easily miniaturized in the direction along the surface of the subject 2, it is possible to scan the magnetic probe 1 (or move the subject).
  • the detection coil 5 is a differential coil capable of detecting a differential voltage, and a pair of coils L constituting the differential coil In the case where 1, 1 and L 2 are arranged along the surface of the subject 2, the inherent errors and temperature errors of the coils L 1 and L 2 are canceled out, so that the detection accuracy can be further improved.
  • the magnetic probe 1 or the subject 2 is inspected while scanning in the direction of the coil center line of the detection coil 5. By doing so, the resolution of the magnetic probe 1 can be increased.
  • the detection coil 5 When the detection coil 5 is formed as a thin-film circuit pattern on the base material 5c made of an insulator, the thickness of the detection coil 5 in the direction of the coil center line is dramatically reduced, and the magnetic probe 1 The resolution can be further increased.
  • the pair of coils Ll and L2 can be formed in a laminated shape with the base member 5c interposed therebetween, the differential output type detection coil 5 can be dramatically thinned. If the base material 5c for a thin film substrate is used, the detection coil 5 can be easily formed using the existing thin film substrate manufacturing technology.
  • the present invention relates to a magnetic probe used for surface inspection, flaw detection inspection, residual stress inspection, material inspection, and the like of an object containing a metal component, and in particular, freely adjusts a shape and the like according to an inspection object and a required detection accuracy. This is useful for performing high-precision inspections using a changeable detection coil.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

L'invention concerne une sonde magnétique comprenant une bobine de détection dont on peut modifier librement la forme en fonction d'un objet d'essai ou une exactitude de détection requise qui détecte avec précision un changement au niveau du flux magnétique sur la surface de l'objet en question. Une sonde magnétique (1), qui détecte un changement au niveau du flux magnétique à proximité de la surface d'un objet (2) tout en générant un champ magnétique CA à l'intérieur de l'objet (2) contenant un composant métallique et/ou dans l'espace sur la surface de l'objet (2), comprend un noyau ferromagnétique (2) ayant des sections (3a) de proximité de l'objet, formant un circuit magnétique en boucle traversant l'intérieur de l'objet (2) et/ou l'espace sur la surface de l'objet (2), une bobine d'excitation (4) qui excite en courant alternatif le noyau (3) et qui génère un champ magnétique CA sur la surface de l'objet à l'intérieur de l'objet (2) et/ou dans l'espace sur la surface de l'objet (2), et une bobine de détection (5) dont la ligne centrale s'étend le long de la surface de l'objet (2), dont la face externe regarde localement la surface de l'objet (2), et qui détecte un changement au niveau du flux magnétique à proximité de la surface de l'objet (2).
PCT/JP2003/005132 2003-04-22 2003-04-22 Sonde magnétique Ceased WO2004094939A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AU2003235389A AU2003235389A1 (en) 2003-04-22 2003-04-22 Magnetic probe
JP2004571070A JPWO2004094939A1 (ja) 2003-04-22 2003-04-22 磁気プローブ
PCT/JP2003/005132 WO2004094939A1 (fr) 2003-04-22 2003-04-22 Sonde magnétique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2003/005132 WO2004094939A1 (fr) 2003-04-22 2003-04-22 Sonde magnétique

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AU (1) AU2003235389A1 (fr)
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102305755A (zh) * 2011-07-26 2012-01-04 北京航空航天大学 一种基于径向磁场的在线磨粒监测传感器及其监测方法
US20130181702A1 (en) * 2012-01-13 2013-07-18 Polyresearch Ag Active mechanical force and axial load sensor

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57161631A (en) * 1981-03-31 1982-10-05 Toshiba Corp Detecting device for surface stress
JPS61258161A (ja) * 1985-03-21 1986-11-15 ロツクウエル　インタ−ナシヨナル　コ−ポレ−シヨン 無接触検知方法及び検知器
JPS63177053A (ja) * 1987-01-19 1988-07-21 Nippon Steel Corp 鋼材の表面疵探傷方法および装置
JPH08105860A (ja) * 1994-10-06 1996-04-23 Nippon Steel Corp 導電体の疵検出装置
US6201391B1 (en) * 1998-10-07 2001-03-13 Southwest Research Institute Nonlinear harmonics method and system for measuring degradation in protective coatings
JP2003156307A (ja) * 2001-11-20 2003-05-30 Kazuhiro Yamakawa 表面形状検出方法、表面形状検出センサ、表面形状検出装置、硬貨識別方法、硬貨識別装置、表面欠陥検査方法、表面欠陥検査装置および表面形状可視化装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57161631A (en) * 1981-03-31 1982-10-05 Toshiba Corp Detecting device for surface stress
JPS61258161A (ja) * 1985-03-21 1986-11-15 ロツクウエル　インタ−ナシヨナル　コ−ポレ−シヨン 無接触検知方法及び検知器
JPS63177053A (ja) * 1987-01-19 1988-07-21 Nippon Steel Corp 鋼材の表面疵探傷方法および装置
JPH08105860A (ja) * 1994-10-06 1996-04-23 Nippon Steel Corp 導電体の疵検出装置
US6201391B1 (en) * 1998-10-07 2001-03-13 Southwest Research Institute Nonlinear harmonics method and system for measuring degradation in protective coatings
JP2003156307A (ja) * 2001-11-20 2003-05-30 Kazuhiro Yamakawa 表面形状検出方法、表面形状検出センサ、表面形状検出装置、硬貨識別方法、硬貨識別装置、表面欠陥検査方法、表面欠陥検査装置および表面形状可視化装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102305755A (zh) * 2011-07-26 2012-01-04 北京航空航天大学 一种基于径向磁场的在线磨粒监测传感器及其监测方法
CN102305755B (zh) * 2011-07-26 2013-04-10 北京航空航天大学 一种基于径向磁场的在线磨粒监测传感器及其监测方法
US20130181702A1 (en) * 2012-01-13 2013-07-18 Polyresearch Ag Active mechanical force and axial load sensor
US9494556B2 (en) * 2012-01-13 2016-11-15 Polyresearch Ag Active mechanical force and axial load sensor

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AU2003235389A1 (en) 2004-11-19
JPWO2004094939A1 (ja) 2006-07-13

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