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WO2004082037A3 - A motor combining a resonant vibration mode, a stepping mode and a direct positioning mode - Google Patents

A motor combining a resonant vibration mode, a stepping mode and a direct positioning mode Download PDF

Info

Publication number
WO2004082037A3
WO2004082037A3 PCT/BE2004/000034 BE2004000034W WO2004082037A3 WO 2004082037 A3 WO2004082037 A3 WO 2004082037A3 BE 2004000034 W BE2004000034 W BE 2004000034W WO 2004082037 A3 WO2004082037 A3 WO 2004082037A3
Authority
WO
WIPO (PCT)
Prior art keywords
mode
motor
positioning
accurate
stepping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/BE2004/000034
Other languages
French (fr)
Other versions
WO2004082037A2 (en
Inventor
Kristof Decoster
Volder Michael De
Steven Devos
Dominiek Reynaerts
Filips Schillebeeckx
Brussel Hendrik Van
De Vijver Wim Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Katholieke Universiteit Leuven
Original Assignee
Katholieke Universiteit Leuven
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0305331A external-priority patent/GB0305331D0/en
Priority claimed from GB0321183A external-priority patent/GB0321183D0/en
Priority claimed from GB0321195A external-priority patent/GB0321195D0/en
Application filed by Katholieke Universiteit Leuven filed Critical Katholieke Universiteit Leuven
Publication of WO2004082037A2 publication Critical patent/WO2004082037A2/en
Publication of WO2004082037A3 publication Critical patent/WO2004082037A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

Present invention describes a new motor the allows very accurate and fast positioning. The motor comprises a fixed frame (9, 9a), two actuators (6, 7), and a stator (8) that can operate in three operation modes. The first operation mode is called the “resonant vibration mode”, in this operation mode the motor can be classified as a bimodal ultrasonic motor. The second is called the “stepping mode”, in which the motor operates as a walking drive. Finally, the third operation mode is called the “direct positioning mode”, in which the motor can be classified as a flexure nanopositioner. Each of these three operation modes has its own specific characteristics: the resonant vibration mode allows fast, but coarse positioning with a large stroke. The stepping mode allows accurate, but slow positioning with a large stroke and the direct positioning mode allows very accurate and fast positioning with a small stroke. Combining these three operation modes results in a compact, accurate and fast motor.
PCT/BE2004/000034 2003-03-10 2004-03-08 A motor combining a resonant vibration mode, a stepping mode and a direct positioning mode Ceased WO2004082037A2 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
GB0305331.1 2003-03-10
GB0305331A GB0305331D0 (en) 2003-03-10 2003-03-10 Piezoelectric drive
GB0321183.6 2003-09-10
GB0321183A GB0321183D0 (en) 2003-09-10 2003-09-10 Motor
GB0321195A GB0321195D0 (en) 2003-09-11 2003-09-11 Motor
GB0321195.0 2003-09-11

Publications (2)

Publication Number Publication Date
WO2004082037A2 WO2004082037A2 (en) 2004-09-23
WO2004082037A3 true WO2004082037A3 (en) 2005-01-27

Family

ID=32995433

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/BE2004/000034 Ceased WO2004082037A2 (en) 2003-03-10 2004-03-08 A motor combining a resonant vibration mode, a stepping mode and a direct positioning mode

Country Status (1)

Country Link
WO (1) WO2004082037A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105958861A (en) * 2016-06-12 2016-09-21 吉林大学 Piezoelectric motor equipped with half-falcate elastic bodies

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2216837A1 (en) * 2009-02-07 2010-08-11 Physik Instrumente (PI) GmbH & Co. KG Piezoelectric motor
DE102011113277A1 (en) 2011-09-06 2013-03-07 Bastian Keller Multi-coordinate piezoelectric drive for ultrasonic motor, has rotatable symmetric dome portion that is held in close proximity with base surface, and its tip performs multi-dimensional movement

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0313072A1 (en) * 1987-10-23 1989-04-26 Hitachi, Ltd. Method of and apparatus for conveying object by utilizing vibration
US5233258A (en) * 1991-03-28 1993-08-03 Nec Corporation Ultrasonic sheet feeder, low-profile ultrasonic motor, and method of driving the same
US5532540A (en) * 1993-08-18 1996-07-02 Figest B.V. Electric motor with vibrating elements and elastic coupling
US5900691A (en) * 1994-12-21 1999-05-04 Marco Systemanalyse Und Entwicklung Gmbh Piezoelectrically actuated driving and adjusting element
US6147436A (en) * 1996-06-27 2000-11-14 Cedrat-Recherche Piezoactive motor based on independent stator modules
US20020067105A1 (en) * 2000-08-08 2002-06-06 Akira Kosaka Ultrasonic driving mechanism

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0313072A1 (en) * 1987-10-23 1989-04-26 Hitachi, Ltd. Method of and apparatus for conveying object by utilizing vibration
US5233258A (en) * 1991-03-28 1993-08-03 Nec Corporation Ultrasonic sheet feeder, low-profile ultrasonic motor, and method of driving the same
US5532540A (en) * 1993-08-18 1996-07-02 Figest B.V. Electric motor with vibrating elements and elastic coupling
US5900691A (en) * 1994-12-21 1999-05-04 Marco Systemanalyse Und Entwicklung Gmbh Piezoelectrically actuated driving and adjusting element
US6147436A (en) * 1996-06-27 2000-11-14 Cedrat-Recherche Piezoactive motor based on independent stator modules
US20020067105A1 (en) * 2000-08-08 2002-06-06 Akira Kosaka Ultrasonic driving mechanism

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105958861A (en) * 2016-06-12 2016-09-21 吉林大学 Piezoelectric motor equipped with half-falcate elastic bodies
CN105958861B (en) * 2016-06-12 2017-10-24 吉林大学 A kind of piezo-electric motor with half-crescent shape elastomer

Also Published As

Publication number Publication date
WO2004082037A2 (en) 2004-09-23

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