WO2004077654A1 - Actuator element - Google Patents

Abstract

An actuator element (1) has a plurality of operating sections (2a, 2b, 2c, 2d). The operating sections perform flexing motion. The operating sections (2a, 2b, 2c, 2d) are laminates in which two electrode layers are laminated to each other with a high polymer electrolytic layer (3) interposed therebetween. The actuator element characterized in that the operating sections (2a, 2b, 2c, 2d) are disposed in a mutually substantially electrically insulated state is superior in practical application.

Description

 Specification

Takako Icchiyue

The present invention relates to an actuator driven by a combination of a plurality of bending operations and a driving method thereof.

 The nights of the actuary include the reciprocation of the mouth, which makes a circling motion, and the night of linear actuy, which makes a linear motion. These applications are used in various applications such as positioning devices that adjust direction and angle.

 At present, the integrated actuator element itself performs a bending motion. Currently, the conductive element that expands and contracts with the actuator element using an ion-exchange resin molded product in which an electrode layer is bonded to an ion-exchange resin. It is limited to a polymer actuator and a conductive polymer element in which a layer having a low expansion ratio is joined to the polymer layer. The polymer actuator element, in which the integrated actuator element itself bends and moves, uses an ion exchange resin molded product in which an electrode layer is bonded to an ion exchange resin for practical applications. There is known an example in which an overnight element is used for an introduction portion of a medical tube represented by a catheter. See JP-A-8-103336, page 115.

 The introduction section of the medical tubing, which is driven as an actor, only bends in one specific direction, and performs complicated operations such as moving in multiple directions at once. Never.

 However, there are many applications where polymer activator has not yet been applied to move in multiple directions at once. Therefore, in order to apply to these uses, it is necessary to obtain an actuating element having a structure capable of driving in a plurality of directions at a time.

In addition, the driving force of the introduction section of the above-mentioned medical tubing that is actually used is Since the force is generated by driving the single layer of the actuator element using the ON-exchange resin molded product, the generated force is limited. Therefore, in order to expand the applications of the polymer factory, it would be desirable if the driving force could be further improved. That is, an object of the present invention is to provide an actuator element which can be used for practical use. Invention

 Then, the present inventors have made intensive studies and as a first invention, an actuating element provided with a plurality of operating portions, wherein the operating portion performs a bending operation, and the operating portion includes two electrode layers. Is a laminated body laminated with a polymer electrolyte layer interposed therebetween, wherein the operating parts are arranged in a state of being substantially electrically insulated from each other. As a result, the present inventors have found that they can be driven in a plurality of directions at once, and have reached the present invention. The above-mentioned actuating element is preferably a tubular or bag-shaped actuating element, which is preferably used as an artificial organ which is an artificial product of an organ including a lung, a heart, a stomach, an intestine, a bladder, an oral cavity and a diaphragm. it can. The actuating element comprises an actuating part which makes a bending movement on the wall part, wherein the inner space part expands or contracts due to the bending movement of the operating part. The actuator element is suitable as an artificial organ because it can perform a stretching movement and a peristaltic movement.

 As a second invention, the inventors of the present invention can generate a large driving force by using an actuating element laminated body in which an actuating element that performs a bending operation is stacked, so that a practical driving method can be realized. The present inventors have found that they can be used for applications and have led to the present invention.

The present inventors, as a third invention, are an actuating element comprising a plurality of operating parts performing a bending motion, wherein two or more operating parts are arranged in a state where the bending direction axes of the operating parts are substantially parallel. An actuation element driving method comprising a lid connected to two or more of the operating parts arranged in the state, wherein the plurality of operating parts connected to the lid are bent in the same direction to form an opening forming part. To increase the area of the opening formed by the When the actuating element is driven by using the driving element driving method, the rear forming portion connected to the actuating element moves, so that the opening area increases and decreases. As a result, the present inventors have found that they can be used for practical use, and have reached the present invention.

 The present inventors provide, as a fourth invention, an actuating element having a plurality of legs connected to a top, wherein the legs include an operating portion that performs a bending motion, and the top has a circular shape. An elliptical or polygonal ring-shaped membrane, wherein the number of the legs is 3 or more, and the operating portions are arranged in a state of being substantially electrically insulated from each other. It was found that the use of an actuating element, which is characterized by the above, makes it possible to create a state like a human mouth with the top part spread left and right, and to perform a human-like operation. Also, in the above-mentioned legs, by setting the voltage applied to one leg to be out of phase with the adjacent leg, the ring-shaped top can make a wave-like motion. Therefore, the actuator device can be used as an alternative drive device for an ultrasonic actuator such as an ultrasonic motor, and can be used for practical use.

 According to a fifth aspect of the present invention, as a fifth aspect, there is provided an actuating head having a plurality of legs connected to a top, wherein the legs include an actuating portion that performs a bending motion, and the leg is connected to the legs. By adjusting the voltage applied through the provided lead, the top is moved in the horizontal direction by using the actuating and driving method, wherein the top is moved in the horizontal direction. Since it can be used as a walking device that can be used, it has been found that it can be used for practical use, and the present invention has been accomplished.

According to a sixth aspect of the present invention, there is provided an actuating element having a plurality of legs connected to a top portion, wherein the legs include an actuating portion that performs a bending motion; The number is three or more, and the actuator element included in the leg portion is held in a bent state, and the leg portion forms a ground portion and a plane substantially perpendicular to a vertical axis of the top portion. It has been found that the use of an actuating element characterized by a narrow angle of 15 ° to 60 ° allows fine adjustment of the direction or angle of the apex. Can be used for The present invention has been achieved.

 Note that, in the above-mentioned invention of the present application, the state of substantially electrically insulated indicates a state in which no short circuit occurs in the actuator element when a voltage is applied to each operating portion. Simple description of the garden

FIG. 1 is a schematic view of an embodiment of the actuator device of the first invention as viewed obliquely.

FIG. 2 (a) is a schematic diagram showing a state in which no voltage is applied to each of the actuating elements of the actuator element of FIG. (B) is a schematic diagram showing one state in which a voltage is applied to each of the actuating parts of the actuator element of FIG. (C) is a schematic diagram showing another state in which a voltage is applied to each of the actuating parts of the actuator element of FIG. 1.

FIG. 3 is a top view showing a pattern of forming an insulating portion of the factorial device of the first invention.

FIG. 4 is a sectional view of an actuating element stack according to the second invention. FIG. 5 (a) is a schematic view of one embodiment of the third invention of the present application. (B) is a schematic diagram of the driven state of the embodiment example of (a).

FIG. 6 is a schematic diagram of an embodiment of the fourth invention of the present application.

FIG. 7 (a) is a schematic view of an embodiment of the actuating element of the fifth invention as viewed obliquely. (B) is a top view of a state in which no voltage is applied to the legs of the actuator element of FIG. 7 (a).

FIG. 8 (a) is a schematic diagram showing one embodiment of the actuator element of the sixth invention. (B) is a schematic A-A cross-sectional view of the actuator element of FIG. 8 (a).

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The present invention will be described below with reference to the drawings, but the present invention is not limited thereto. It is not something to be done. (First invention)

 According to a first aspect of the present invention, there is provided an actuating element including a plurality of operating portions, wherein the operating portion performs a bending operation, and the operating portion includes two electrode layers laminated via a polymer electrolyte layer. The actuating element is an actuating element characterized in that the operating parts are arranged substantially in a state of being electrically insulated from each other.

 FIG. 1 is a schematic view of an embodiment of an actuating element of the first invention of the present application, as viewed obliquely. The actuator 1 is composed of four working parts 2a, 2b, 2c, 2d, and each working part is arranged on the same plane.

 In each operating section, electrode layers are formed on both surfaces of the membrane-shaped polymer electrolyte layer 3. The operating part 2 a is formed as a laminate in which the electrode layers 4 a and 4 b are laminated via the polymer electrolyte layer 3 on both sides of the membrane-like polymer electrolyte layer 3. In addition, the operating portion 2b is formed as a laminate in which the electrode layers 4c and 4d are laminated via the membrane-shaped polymer electrolyte layer 3. Also for the working part 2c and the working part 2d, a laminate of two electrode layers and a polymer electrolyte layer such that the polymer electrolyte layer 3 is an electrolyte layer and the polymer electrolyte layer is an intermediate layer. It is formed as. It is also formed on the electrode layer formed below the polymer electrolyte layer 3. The number of the operating parts is not limited to four, and a plurality of desired operating parts can be provided to perform a desired movement.

 The actuator 1 shown in FIG. 1 has four operating parts 2a, 2b, 2c and 2d in which the insulating part 6a which is a vertical groove and the insulating part which is a horizontal groove in FIG. Partitioned by part 6b. Each electrode layer in each operation section is provided with a voltage application section so that a voltage is applied to each electrode layer. In FIG. 1, voltage applying portions 5a, 5b, 5c, and 5d are formed on the electrode layer formed on the upper side of the polymer electrolyte layer, respectively. Are formed on each of the electrode layers on which is formed.

Since the operating parts of the actuator element 1 are insulated from each other, each operating part can bend independently. For that reason, 1 is not only a bending motion in a specific direction as a whole, but also a motion that wraps around a specific surface as shown in Fig. 2 (b) and a wavy motion as in Fig. 2 (c). You can also.

 FIG. 2 is a schematic diagram showing a state in which no voltage is applied to each operating portion and a state in which a voltage is applied to each operating portion, for the actuator element 1 of FIG.

 FIG. 2 (a) shows a state in which no voltage is applied to each operating section of the actuator 1. When a voltage is applied to each of the actuating sections 2a, 2b, 2c, and 2d so as to protrude outward, as shown in FIG. The side is wrapped around. In addition, by applying a voltage having a phase opposite to the voltage applied to each of the operation parts to each of the operation parts so as to bring the element 1 into the state as shown in FIG. 2 (b), The element 1 is in a state opposite to the state shown in FIG. 2 (b). The element 1 is wrapped around the lower surface. The actuation unit of the actuating element is applied to the operating part of the actuating element by applying a voltage of the same phase to the electrode layer on the same side. The actuator element can be used as, for example, a capturing device, a driving device for changing the facial expression such as a pump diaphragm or a robot for asperity behavior, or a lifting device.

Fig. 2 (c) shows that, of the actuator element 1 having four operating parts, two adjacent operating parts are taken as one set, and the specific set and the other set are in opposite phases. This is a state in which a voltage is applied to each operating unit. FIG. 2 (c) shows that the operating part 2a and the operating part 2c are paired and voltages are applied in the same phase. In addition, assuming that the operating part 2b and the operating part 2d are another set, a voltage having a phase opposite to the voltage applied to the pair of the operating part 2a and the operating Applied to one set. Adjacent actuating parts are taken as a set, and the drive element 1 is driven by applying a voltage to each actuating part so that the specific set and the adjacent set have opposite phases. Can be driven. Further, in the driving method, a voltage applied to another set adjacent to the specific set is set to a voltage having a phase opposite to a voltage applied to the specific set, and the voltage applied to the specific set is changed with time Apply voltage to each actuator so that a sinusoidal curve By applying the voltage, the actuator element can move by its driving. Therefore, according to the driving method, the actuating device including the actuating device is used as a driving device that changes a facial expression, such as a wave-making device, a linear motion device, a self-propelled device, a transport device, a robot, and the like. be able to.

 In FIGS. 1 and 2, each operating part of the actuator element is installed so as to be adjacent via an insulating part. However, the actuating element can drive each operating unit independently by increasing the area of the operating unit so that the distance between the voltage applying unit and the adjacent operating unit is sufficiently large. it can. If the voltage applying part of a specific operating part and the electrode applying part of the adjacent operating part are sufficiently separated, the voltage applied to the voltage applying part of the specific operating part will cause the resistance or the resistance of the operating part to change. Due to the electric drop of the voltage, there is no apparent effect of hindering the driving of the adjacent working part. In other words, it is only necessary that the operating parts of the factor-element in the first invention of the present application be arranged in a state where they are substantially electrically insulated. In the driving method of the actuating element, the insulating element is not formed in the element and the voltage is applied so that the element is substantially electrically insulated. Therefore, it is preferable from the viewpoint of workability. For example, when a voltage of 1.5 V is applied to each working part, the distance between the voltage applying parts of adjacent working parts should be about 5 mm, and a voltage of 4.5 V should be applied. In this case, the distance between the voltage applying sections of the adjacent operating sections with respect to the voltage applying section can be set to about 30 mm.

 The electrode layer is not particularly limited as long as it is a layer having electrical conductivity. Since the electrode layer can be easily formed by applying plating to the polymer electrolyte, copper (Cu), gold (Au), silver (Ag), and platinum ( Preferably, the metal electrode layer mainly contains a conductive metal such as Pt), and the metal electrode layer contains at least one metal selected from the group consisting of gold, platinum, palladium, and rhodium. Is more preferred. It is particularly preferable that the electrode layer is a gold electrode, since flexibility can be imparted to the electrode layer.

The method for obtaining the laminate is not particularly limited, but may be as follows: Method. A method for forming a gold electrode on the surface of a film-like ion exchange resin will be described. (1) Adsorption step: immerse in phenanthrin gold chloride aqueous solution for 24 hours to adsorb phenanthrin gold complex in the molded article. (2) Deposition step: reduce adsorbed phenanthrin gold complex in aqueous solution containing sodium sulfite. Then, a gold electrode is formed on the surface of the membrane ion exchange resin. At this time, the temperature of the aqueous solution is set to 60 to 80 ° C., and the phenanthrin gold complex is reduced for 6 hours while sodium sulfite is gradually added. Next, (3) washing step: the membrane ion exchange resin having the gold electrode formed on the surface is taken out and washed with water at 70 ° C for 1 hour. By repeating the above steps (1) to (3) for 7 cycles, a bonded body of the polymer electrolyte layer and the metal electrode layer, which is the above-mentioned laminate, can be obtained.

 In addition, the actuating element of the first invention of the present application provides an insulating portion between the operating portion and the operating portion adjacent to the operating portion, so that the displacement due to driving can be reduced as compared with the case where the insulating portion is not provided. Is large and can cause a distinct shape change operation. In the case where an insulating portion is provided, the method is a method of forming a film-shaped element. In the method, the insulating element, an insulating section, an operating section, and a voltage applying section have a predetermined behavior in the element. And a method for forming an actuator element, wherein the operating portion is a laminate in which two electrode layers are laminated with a polymer electrolyte layer interposed therebetween. it can.

The insulating portions of the actuator elements of FIGS. 1 and 2 are formed without the electrode layer formed on the polymer electrolyte layer. There is no particular limitation on the method of forming the insulating portion of the factor device of FIGS. 1 and 2, and for example, the electrode layer formed by the above-described method of forming a laminate may be cut with a sharp blade. It may be good or it may be cut by laser irradiation. In the method for forming a laminate described above, in the (1) adsorption step and the Z or (2) deposition step, an insulating portion may be formed by not forming an electrode layer by masking. In FIGS. 1 and 2, the insulating portion of the actuator element is formed without an electrode layer formed on the polymer electrolyte layer, but is formed of an electrically insulating resin. The insulating section may be formed by providing the formed insulating layer between the adjacent operating section. FIG. 3 is a top view of the factor device 1 of FIG. 1 showing a formation pattern of an insulating portion. As shown in FIG. 3 (a) and FIG. 3 (b), an operating portion having an equal area may be formed by forming an intersecting insulating groove as an insulating portion. As shown in Fig. 3 (d), by forming an insulating groove as an insulating portion, an operating portion in which a part of the operating portion divided by the insulating portion is not equally divided may be formed.

(Second invention)

 Further, the second invention of the present application is a laminate of an actuating element in which an actuating element performing a bending operation is laminated via an insulating layer. FIG. 4 is a cross-sectional view of an actuating element stack 21 in which an actuating element that performs a bending operation and that is used for the above-mentioned actuating element stack is laminated via an insulating layer. The actuator element assembly 21a in FIG. 4 (a) includes six actuator elements 22a, 22b, 22c, 22d, 22e, and 22f, and includes three actuators. Each of the element elements 22a, 22b and 22c has a flexible insulating layer 23a and 23b between each element. The three actuator elements 22d, 22e, and 22f include flexible insulating layers 23d and 23e between the actuator elements. The insulating layer 23c is provided between the actuator element 22c and the actuator element 22d, but may be an insulating layer formed of a base.

By providing such a structure, as shown in FIG. 4 (b), an aggregate including the actuating element 22a, the actuating element 22b, and the actuating element 22c is formed as a fourth element. The assembly including the drive element 22d, the drive element 22e, and the drive element 22f is driven to the right in FIG. 4 (b) and driven to the left in FIG. 4 (b). Can be. By driving the assembly including the three actuator elements to bend in the same direction, it is possible to obtain a large driving force for three actuator elements.Therefore, the laminated body 2 la of the actuator elements is: The drive power for six elements can be obtained. By adopting the structure of the above-mentioned multilayer element, the structure is simple, and A large driving force can be easily obtained. For this reason, in the laminate of the actuating element element using the above-mentioned actuating element element aggregate, the driving in which the one actuating element element laminated part and the other actuating element element laminated part are bent in the opposite lamination direction. Depending on the method, it can be used as a linear actuator that generates a larger driving force. If each actuator element has an electrode layer on the outside as shown in Fig. 4 (a), and the electrode contacts between adjacent actuator elements, a short circuit occurs in the element. It is preferable to provide an insulating layer between each element of an assembly (actuator element laminated portion) including two actuator elements. In Figs. 4 (a) and (b), the buffering effect of force is reduced by thinning the flexible insulating layer between each element so that the thickness is, for example, 10 zm or less. Thus, it is possible to prevent a reduction in driving force due to bending of the actuator element. It is sufficient that each insulating layer does not cause a short circuit between the element and the element, and has only to have a substantial insulating property.

 The actuating element 22 a in FIGS. 4A and 4B has electrode layers 25 a and 25 b on both sides of the polymer electrolyte layer 24. For each actuating element, a laminate in which two electrode layers are laminated via a polymer electrolyte layer can be used. In order to drive each actuator element, power is attached to each of two electrode layers included in each actuator element via a lead, and a voltage is applied to the electrode layers. By applying this voltage, each actuator element is driven independently, and a large driving force can be obtained.

The actuator assembly 21b shown in FIG. 4 (c) has four actuator elements 22g, 22h, 22i and 22j in a cylinder 29, and two cylinders. An insulating layer 26a is provided between 22 g and 22 h of the cutout element. Similarly, an insulating layer 26c, which is a space layer, is provided between the two actuator elements 22i and 22j, and the insulation is provided between the two element elements 22h and 22i. Layer 26b is provided. Each actuator element is slidably arranged within the cylinder in contact with the inner wall surface of the cylinder. The actuator element 22 g has electrode layers 27 a and 27 b on both sides of the polymer electrolyte layer 28, and the other electrode layers also have the polymer electrolyte layer on the other actuator elements. Through the stacked products A layered body can be used.

 Fig. 4 (d) shows the two actuator elements 22g and 22h bent so that the convex parts when bent are directed toward each other, and the two element elements 22i and 22h. FIG. 6 is a cross-sectional view of the actuating element 21 b when j is bent so that convex portions are bent toward each other. When the actuator element 22g, the actuator element 22h and the insulating layer 27a are formed into one assembly, the assembly in the left and right direction in Fig. 4 (d) becomes one assembly. A displacement twice as large as the displacement due to the bending motion of the actuator can be obtained. Also, when the actuator element 22i, the actuator element 22j and the insulating layer 27b are formed as one assembly, the assembly in the left and right direction in FIG. It is possible to obtain twice the amount of displacement due to the bending motion of the element. Therefore, the actuating element of the second invention of the present application can obtain a displacement amount that is n times the bending amount of the actuating element when the number of actuating element elements is n. In order to drive each of the actuating elements, a power source is attached to each of the two electrode layers included in each of the actuating elements via leads, and a voltage is applied to the electrode layers. By applying this voltage, each actuator element is driven independently, and a large driving width can be obtained. In addition, it is also possible to adopt a configuration in which the driving force is transmitted by the laminated body of the actuator elements, such as by attaching a shaft to the actuator element on the opening side of the cylinder in FIG. 4 (d).

 In addition, each of the insulating layers is not required to cause a short circuit between the actuator and the element, and may have a substantial insulating property. Each insulating layer may be an insulating layer having a fixed shape using a known insulating resin.

In FIGS. 4 (c) and 4 (d), an insulating layer is provided between each of the actuating elements, but it is not necessary to provide an insulating layer between all of the actuating elements. For example, if each element is a device having gold electrode layers on both sides in the thickness direction of the ion-exchange resin membrane, when the device is driven by applying voltage to the electrodes, The electrode on the convex side becomes the cathode, and the electrode on the concave side on the outside becomes the anode. In this case, the laminated body 21b of the actuating element is driven to bend and fluctuate so that the bending movement by the driving of the enzymatic element is in the opposite direction. According to the method, when each element is driven, the adjacent electrodes of the adjacent element have the same polarity. In this case, since a short circuit is unlikely to occur, an insulating layer does not have to be provided between each element. In the case of performing adjustment for changing the amount of bending in each of the actuating elements, it is preferable to provide an insulating layer between the actuating elements. In the case of using the configuration in which the laminated body of the actuator element is provided inside the cylinder, which is one embodiment of the second invention of the present application, the means for applying the power source of the actuator element is not particularly limited. For example, a groove is provided in the inner wall of the actuator in the direction of lamination of the actuator, a lead for applying a voltage is slidably accommodated in the groove, and the actuator element is inserted through the lead. A configuration in which the electrode and the power supply are connected can be used. In this configuration, the lead can move following the actuator element, so that the voltage can be continuously applied to the electrode layer of the actuator element.

 In the second invention of the present application, a laminated body in which two electrode layers are laminated via a polymer electrolyte layer can be used for an actuating element. The laminate is not particularly limited as long as it has a polymer electrolyte layer and an electrode layer. However, the laminate in which the polymer electrolyte layer and the electrode layer are bonded to each other may be an electrode layer. Is preferred because it does not peel off. The laminate in which the two electrode layers are laminated via the polymer electrolyte layer is the same as the laminate according to the first invention. (Third invention)

 A third invention according to the present application is an actuating element having a plurality of operating portions that perform bending motion, wherein two or more operating portions are arranged in a state where the bending direction axes of the operating portions are substantially parallel. This is an actuating element that has a lid connected to two or more of the actuating parts arranged in the box.

FIG. 5 (a) is a schematic view of an embodiment of the fourth invention of the present application. The actuator element 31 includes operating portions 32a and 32b. The lid 33a is connected to two operating portions 32a and 32b via a frame 34a. Similarly, the lid portion 33b is connected to two operating portions 32a... 32b via a frame portion 34b. Actuator 32 a leads at lead connection 36 a. To the power supply 37a via the leads 35a and 35b. Similarly, the operating portion 32b is connected to the lead 35b at the lead connecting portion 36b, and to the power source 37b via leads 35c and 35d.

 In FIG. 5 (a), the working portion 32a has a structure in which electrode layers 38a and 38b are laminated via a polymer electrolyte layer 40. The operating portion 32a makes a bending motion so as to be convex or concave in the upward direction of the axis X1 perpendicular to the upper plane 3221 of the operating portion. Like the operating portion 32a, the operating portion 32b has a structure in which the polymer electrolyte layer 39 is an intermediate layer and electrode layers 38a and 38b are laminated. The operating portion 32b also bends so as to be convex or concave upward on the axis X perpendicular to the upper surface 322 of the operating portion. In a state where the bending direction axes XI and X2 of the operating portion are substantially parallel to each other, two operating portions are arranged on the actuator element 31 and a lid portion connected to the operating portion via a frame portion is provided. Since the actuator element 31 is provided, the actuator element 31 has a driving method for driving the two operating portions 32 a and the operating portion 32 b so as to bend in the same direction. In this case, an opening 39 is formed as shown in FIG. 5 (b). With such a driving method, the actuator element 31 can form a large opening, is silent and lightweight, and can be suitably used practically as an excellent electrical switching device. It can also be used as a human eyelid.

 In the embodiment of the third invention shown in FIG. 5, the operating portions 32a, 32b and the frame portions 34a, 34b are integrated, but the operating portion, the frame portion and An insulating groove may be formed near the boundary of. The insulating groove forms an insulating portion between the operating portion and the frame portion. The insulating portion can be formed by cutting the electrode layer by cutting with a sharp blade or laser irradiation. And an insulating layer may be interposed therebetween. If the voltage applied to the operating section is 1.5 V, which is the voltage applied to a normal polymer factory, the voltage between the lead connection section and the voltage application section is If the distance is about 5 mm, the frame does not bend, and only moves following the change in the shape of the operating part. When the operating part makes a bending movement, the lid is opened. Will work.

In the embodiment shown in FIG. 5, the lid and the frame are separate components. Although it is installed, the lid and the frame may be integrated, and the frame may be a separate component from the operating part. For example, a trapezoidal lid integrated with the frame may be directly connected to the operating part, and an insulating layer may be interposed between the lid and the operating part. The insulating layer is not particularly limited, but an insulating resin layer can be suitably used because it is easy to form.

 In the third aspect of the invention, the operating portion may use a laminate in which two electrode layers are laminated via a polymer electrolyte layer, and the laminate includes a polymer electrolyte layer and an electrode layer. There is no particular limitation as long as it is provided, but it is preferable that the polymer electrolyte layer and the electrode layer are joined because the electrode layer does not peel off. The laminate in which the two electrode layers are laminated via the polymer electrolyte layer is the same as the laminate according to the first invention. The operating section can be used as an actuating section by using a conductive polymer actuating element as a bendable actuating element in which a layer having a low expansion and contraction rate is joined to the conductive polymer layer. (Fourth invention)

 Further, the fourth invention of the present application is an actuary having a plurality of legs connected to a top portion, wherein the legs include an actuating portion in which a bending motion is performed, and the top portion is circular, oval or polygonal. A film-like body formed in a ring shape, wherein the number of the legs is three or more, and the actuating elements are arranged in a state of being substantially electrically insulated from each other. It's also a night of the act.

 FIG. 6 shows an actuator element used in one embodiment of the fourth invention. The actuator element 41 has a top part 42 which is a square ring-shaped membrane, and has legs 43a, 43b, 43c and 43d inside the top part. . The leg is grounded in a state where no voltage is applied to the electrode layer, and a state where the leg is bent inwardly.

The legs 43a, 43b, 43c, and 43d are composed of a laminate in which two electrode layers are laminated via a polymer electrolyte layer, and a lead is connected to the electrode layer of each leg via a lead. Power supply is connected to each leg, and voltage can be applied to each leg independently. Each leg has a large radius of curvature when the voltage is applied to the electrode layer. It can be operated in a state (shallow bending) or in a state where the radius of curvature of bending is small (deep bending). By causing such an operation to be performed on the legs, the top portion, which is a rectangular ring-shaped membrane, can be displaced in the vertical direction around the connection with the operating leg. The number of the legs is not limited to four, and a plurality of desired legs can be provided in order to perform a desired movement.

 FIG. 6 (b) is a schematic diagram of the embodiment of FIG. 6 (a) of the fourth invention when the leg of the actuator 41 is driven. The state of the actuator element in FIG. 6 (b) is a state in which the leg 43a is operated in a state where the radius of curvature is small (a state in which the bending is deep). Legs 4 3b and 4 3d are in a state of operation with a large radius of curvature (shallow bending). The leg 43c remains as it is. By driving such legs individually, it is possible to create a state like a human mouth with the top part spread left and right, and to perform a human-like operation. For this reason, the actuator element in the fourth invention can be a human model. Also, in the legs, by making the voltage applied to one leg out of phase with the adjacent legs, the ring-shaped top can make a wave-like motion, It is possible to drive in the same manner as in the Ultrasonic Factory. When the actuator element of the fourth invention is used as an alternative drive unit for the ultrasonic actuator unit, it is lightweight, silent, and low in vibration, so that it can be used as an environmentally superior drive unit. it can.

In the embodiment shown in FIG. 6 (a), the legs are formed of a laminate in which two electrode layers are laminated with a polymer electrolyte layer interposed therebetween. If sufficient operation can be performed, the laminate may be used for a part of the leg. In the laminate used for the leg, two electrode layers may be provided via a polymer electrolyte layer. The laminate is not particularly limited as long as the laminate includes a polymer electrolyte layer and an electrode layer. The polymer electrolyte layer and the electrode layer are not particularly limited. Is preferable because the electrode layer does not peel off. The laminate in which the two electrode layers are laminated via the polymer electrolyte layer is the same as the laminate according to the first invention. Also, as the legs, A bimorph conductive polymer actuating element may be used in which a layer having a low degree of expansion and contraction is joined to a conductive polymer layer that expands and contracts.

 In the embodiment of FIG. 6, the legs and the top are integrated, but they may be separate and independent components. The top is not particularly limited as long as it has the flexibility to move following the movement of the legs. Further, an insulating portion may be provided near a boundary between the leg portion and the top portion, and the leg portion and the top portion may be substantially electrically insulated. When the legs and the top are integrated by the laminated body laminated via the electrolyte layer, the operating portions included in the legs are substantially electrically insulated from each other. It only needs to be able to apply a voltage.

(Fifth invention)

 A fifth invention according to the present application is an actuating element having a plurality of legs connected to a top thereof, wherein the legs include an actuating portion in which the legs perform a bending motion, and a lead connected to the legs. And adjusting the applied voltage to move the top in the horizontal direction. FIG. 7 (a) is a schematic view of the actuating element in an embodiment of the fifth aspect of the fifth invention as viewed obliquely. The actuator element 51 has three legs 52a, 52b, 52c, and the element 53 is formed by the top 53 connected to the legs. In FIG. 7 (a), the actuator element 54 is in a state where each leg is bent. FIG. 7 (b) is a top view of the state where no voltage is applied to the legs of the actuator element of FIG. 7 (a).

The actuator element 53 has a planar shape as shown in FIG. 7 (b) when no voltage is applied to each leg, but in FIG. 7 (a), each leg has a voltage. Is applied, a downward force is generated in the actuator element, and the top 53 is lifted by each leg. The height of the top 53 can be changed by adjusting the voltage applied to each leg. Each leg is connected to a power supply via a lead and can adjust the applied voltage. Each leg The part presses the ground at the grounding points 55a, 55b and 55c. When a voltage is further applied to each leg, a bending operation occurs in which each ground point moves to the inside of the actuator 54. Reducing the voltage applied to each leg causes each ground point to move outward and extend. By adjusting the voltage applied to each leg, each leg performs a bending operation and a stretching operation, and the actuator 54 can perform a walking operation in which the top is moved in a horizontal direction. . Note that the number of the legs is not limited to three, and a plurality of desired legs can be provided to perform a desired movement.

 Also, the actuator element shown in Fig. 7 has a lens 56.If the ground is printed matter, the focus of the lens 56 is adjusted by raising and lowering the voltage applied to each leg simultaneously. can do. Also, by adjusting the voltage applied to each leg, it is possible to perform a walking motion in which the top is moved in the horizontal direction and see the object to be magnified by the lens.

 In the fifth invention of the present application, the actuating element 54 in FIG. 7 has a triangular shape, but includes an operating portion in which the leg portion performs a bending motion, and includes a plurality of leg portions connected to the top portion. It is not particularly limited as long as it exists. For example, each corner may be a leg as a square actuating element, and a star actuating element may be used.

 The actuator element shown in FIG. 7 is composed of a laminate in which the top and the leg are integrally formed, and two electrode layers are laminated via a polymer electrolyte layer. Since the leg is made of the laminate, the leg can perform a bending motion. The actuator element used in the fifth invention of the present application is not limited to the one in which the top and the leg are integrated, and the top and the leg may be independent parts. A recording section such as an insulating groove may be provided near the boundary between the leg and the top. When the leg is a component independent of the top, the leg may include an actuating portion that performs a bending motion. The laminate in which the two electrode layers are laminated via the polymer electrolyte layer is the same as the laminate according to the first invention. Further, as the legs, a layer having a low degree of expansion and contraction was joined to the conductive polymer layer which expands and contracts.

A type conductive polymer actuator element may be used. The legs are arranged substantially insulated from each other. If there is no insulating part such as an insulating groove near the boundary between the leg and the top, for example, when applying 1.5 V to each working part, the distance between the legs should be 5 mm, each leg can operate independently.When a voltage of 5 V is applied, each leg can operate independently by setting the distance between the legs to about 30 mm. I can do it. If a higher voltage is to be applied to the legs, the provision of insulating parts such as insulating grooves near the boundary between the legs and the top makes it easy to drive each leg independently. Is preferred. (Sixth invention)

 A sixth invention of the present application is an actuating element having a plurality of legs connected to a top thereof, wherein the legs include an operating portion performing a bending motion, and the number of the legs is three or more. The actuator element included in the leg portion is held in a bent state, and the leg portion has a narrow angle of 15 between a grounding portion and a plane substantially perpendicular to a vertical axis of the top portion. An actuating element which is characterized by an angle of from 60 ° to 60 °. FIG. 8 is a schematic diagram showing an embodiment of the actuator device of the sixth invention. The actuator element 61 has legs 63a, 63b, 63c and 63d connected to the top 62. The actuator element is grounded at grounding portions 64a, 64b, 64c and 64d.

FIG. 8 (b) is a sectional view taken along the line AA of the actuator element 61 of FIG. 8 (a). The leg portion 6 3a connected to the top portion 6 2 has a narrow angle 0 of 15 ° to 60 ° which forms a plane 65 substantially perpendicular to the vertical axis Y of the top portion 62 at the grounding portion 64a. Is within the range. Similarly, for the leg portion 63c, the narrow angle ,, which forms a plane 65 substantially perpendicular to the vertical axis Y of the top portion 62 at the grounding portion 64c, is 15 ° to 60 °. Within range. The legs are held in a bent state, and a narrow angle between each leg and a plane that is substantially perpendicular to the vertical axis of the top at the ground contact portion is within a range of 15 ° to 60 °. By applying a voltage to each leg, the top is caused to bend, respectively, so that the upper side of the top can be directed in any direction in the upper direction. The number of the legs is not limited to four. Instead, a plurality of desired legs can be provided to perform a desired movement. The leg may include an operating portion capable of performing a bending motion, but is preferably formed only of the operating portion because molding is easy. The operating part may use a laminate in which two electrode layers are laminated via a polymer electrolyte layer. The laminate is not particularly limited as long as it has a polymer electrolyte layer and an electrode layer.However, a laminate in which the polymer electrolyte layer and the electrode layer are joined, but the electrode layer is peeled off This is preferable because it does not occur. The laminate in which the two electrode layers are laminated via the polymer electrolyte layer is the same as the laminate according to the first invention. The operating section can be used as an operating section by using a conductive polymer actuating element formed by joining a conductive polymer layer having a low elasticity ratio as a bendable actuating element.

 In FIG. 7 (a), insulating grooves 66a and 66b are formed as insulating portions in the top 62, but the area of the top is wider than the applied voltage of the legs, and Each leg can be driven independently provided that is substantially electrically isolated. If the voltage applied to each leg is higher than the area of the top to minimize the size of the element, or if you want to finely control the movement of the top, it is necessary to insulate each leg. It is preferable to provide an insulating part.

 The actuator element is suitable as an angle adjusting device because the upper side of the apex can be oriented in any direction in the upper direction. In particular, when a CCD camera is mounted on the top of the actuator element, the vibration is not transmitted to the image because it does not vibrate because it is driven electrochemically, and the size is reduced to about 5 mm square. Since it is easy, it is suitable as an angle adjusting device or a direction adjusting device. In addition, when an artificial eyeball is attached to the apex, it is silent and can perform a smoother eye movement compared to driving by a mouse, so that it is also suitable as a driving device for an artificial eyeball. Availability in birth

The actuating element according to the present invention is an actuating element having a plurality of actuating parts, wherein the actuating part performs a bending operation, and the actuating part has two electrode layers formed of a polymer electrode. A laminated body laminated via a degrading layer, wherein the operating portions are arranged in a substantially electrically insulated state from each other; Can be driven in multiple directions. The actuate element is a tubular or bag-shaped actuate element, which can be used as an artificial organ which is an artificial product of an organ containing these, such as the heart, bladder, gall, stomach, lung, intestine, oral cavity, diaphragm, etc. It can be suitably used.

 Further, the invention of the present application is a laminate of an actuating element in which a bending element that performs a bending operation is laminated via an insulating layer, and by using the laminate, a large driving force can be generated. Because it is possible, it is suitable for practical use.

 Further, the invention of the present application is an actuating element comprising a plurality of operating portions performing a bending motion, wherein two or more operating portions are arranged in a state in which the bending direction axes of the operating portions are substantially parallel, and are arranged in the state. A driving method of an actuator element having a lid connected to two or more of the operating parts. The driving method is suitable for practical use because it can perform a motion of increasing or decreasing the opening area.

 The present invention is also an actuating element having a plurality of legs connected to a top, wherein the legs include an actuating portion that performs a bending motion, and the top is a circular, oval, or polygonal ring. Wherein the number of the leg portions is three or more, and the operating portions are substantially electrically insulated from each other. It is an evening element and can be used in applications such as a human mouth with the top extended to the left and right, or as an alternative drive device for ultrasonic actuators that make wavy movements, and can be used in practical applications. it can.

 Further, the present invention provides an actuating element having a plurality of legs connected to the top, and an actuating element having a plurality of legs connected to the top, wherein the legs have a bending motion. Wherein the number of the legs is three or more, the actuating element included in the legs is held in a bent state, and the legs have a ground axis and a vertical axis of the top. Since it is an actuating element characterized by a narrow angle between 15 ° and 60 ° formed by a plane substantially perpendicular to the element, it can be used for practical applications such as an angle adjusting device.

Claims

The scope of the claims 1. An actuator element having a plurality of operating parts, The actuating part performs a bending operation, The operating part is a laminate in which two electrode layers are stacked via a polymer electrolyte layer, and the operating parts are arranged in a substantially electrically isolated state from each other. . 2. An actuating element having an operating part that is electrically insulated from other operating parts by arranging a plurality of operating parts via an insulating part. 3. The device of claim 1, wherein the polymer electrolyte is an ion-exchange resin membrane. 4. The actuating element according to claim 2, wherein the polymer electrolyte is an ion exchange resin membrane. 5. The activator according to claim 3, wherein the electrode layer is a layer having electrical conductivity. 6. The actuator device according to claim 3, wherein the electrode layer is a metal electrode layer containing at least one metal selected from the group consisting of gold, platinum, palladium, and rhodium. 7. The actuating element according to claim 3, wherein the electrode layer is a gold electrode layer formed on an ion exchange resin membrane by an electroless plating method. 8. The activator according to claim 4, wherein the electrode layer is a layer having electrical conductivity. 9. The element according to claim 4, wherein the electrode layer is a metal electrode layer containing at least one metal selected from the group consisting of gold, platinum, palladium, and rhodium. 10. The actuating element according to claim 4, wherein the electrode layer is a gold electrode layer formed on the ion exchange resin membrane by an electroless plating method. 11. A method for forming a film-shaped actuator element, wherein the actuator element is provided with a predetermined action so that an insulating part, an operating part, and a voltage applying part give a predetermined behavior to the actuator element. Arrangement and The operating portion is a laminate in which two electrode layers are laminated via a polymer electrolyte layer. A method for forming an element. 1 2. A stack of actuators in which actuating elements that bend are stacked. 13. The laminate according to claim 8, wherein the element is laminated with an insulating layer interposed therebetween. 14. The laminate according to claim 12, wherein the polymer electrolyte is an ion exchange resin membrane. 15. The device according to claim 15, wherein the electrode layer is a metal electrode layer formed on the ion exchange resin film by an electroless plating method. 1 6. An actuator in which a bending element that bends is stacked via an insulating layer. A method of driving a stacked element device, wherein the actuating element is caused to bend so that an adjacent element is bent in a direction opposite to that of the actuating element. Method. 17. A method for driving a multilayer of actuating elements that bends, wherein the actuating element stack including a plurality of laminated actuating elements is arranged so that each actuating element is oriented in the same direction. A method of driving a stacked body of actuators and elements that are displaced in the same direction by being bent in the same direction. 18. The above-mentioned laminated actuator element stack includes a plurality of actuator element stacked sections each including a plurality of stacked actuator elements, and bending one actuator element stacked section in one stacking direction. 18. The method for driving a laminate of an actuating element according to claim 17, wherein the other element stacking unit is bent in another laminating direction. 19. An actuating element provided with a plurality of actuating parts that perform a bending motion, wherein two or more actuating parts are arranged in a state where the bending direction axes of the actuating parts are substantially parallel, and are arranged in the state described above. Actuator device with a lid connected to two or more operating parts. 20. The actuator element according to claim 19, wherein the polymer electrolyte is an ion exchange resin membrane. 21. The element according to claim 19, wherein the electrode layer is a metal electrode layer formed on the ion exchange resin membrane by an electroless plating method. 22. An actuator element comprising a plurality of operating portions that perform a bending motion, wherein two or more operating portions are arranged in a state in which the bending direction axes of the operating portions are substantially parallel, and two or more of the operating portions arranged in the above state. Actuator with a lid connected to the actuator A method for driving an actuator element, comprising: bending a plurality of operating portions connected to a lid in the same direction to increase an area of an opening formed by the opening forming portion. 23. An actuating element having a plurality of legs connected to a top thereof. _{S The} legs include an actuating part performing a bending motion, The top is a film formed in a circular, elliptical or polygonal ring shape, and the number of the legs is 3 or more, The actuating element is arranged in a state where the actuating parts are substantially electrically insulated from each other. 24. The actuating element according to claim 23, wherein the polymer electrolyte is an ion exchange resin membrane. 25. The actuating element according to claim 23, wherein said electrode layer is a metal electrode layer formed on an ion exchange resin film by an electroless plating method. 26. An actuating element having a plurality of legs connected to a top thereof, wherein the legs include an actuating part performing a bending motion. A method of driving an actuator element that moves the top in a horizontal direction by applying a voltage via a lead connected to the leg. 27. The method of driving an actuating element according to claim 26, wherein the polymer electrolyte is an ion exchange resin membrane. 28. The method for driving an actuator element according to claim 27, wherein said electrode layer is a metal electrode layer formed on an ion exchange resin film by an electroless plating method. 2 9. An actuator element having a plurality of legs connected to the top, The leg includes an actuating part that performs a bending motion, The number of legs is 3 or more, The legs are held in a bent state, The leg has a narrow angle of 15 ° to 60 ° with a plane substantially perpendicular to the vertical axis of the top in the ground contact portion. Actuator element. 30. The element of claim 29, wherein the polymer electrolyte is an ion exchange resin membrane. 31. The actuator device according to claim 30, wherein said electrode layer is a metal electrode layer formed on an ion exchange resin film by an electroless plating method. 32. An angle adjusting device using the actuator element according to claim 29. 3. A cylindrical or bag-shaped actuator element having a plurality of operating portions, wherein the operating portion bends, The operating part is a laminate in which two electrode layers are stacked with a polymer electrolyte layer interposed therebetween, and the operating parts are arranged in a state of being substantially electrically insulated from each other, An actuating element that includes an operating portion that performs a bending motion on a wall portion, and the inner space expands or contracts due to the bending motion of the operating portion. 34. A bag-shaped or cylindrical artificial organ including an artificial heart, bladder, gallbladder, stomach, lung, intestine, oral cavity, diaphragm, and the like, using the element of claim 33.