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WO2004064098A3 - Detector for environmental scanning electron microscope - Google Patents

Detector for environmental scanning electron microscope Download PDF

Info

Publication number
WO2004064098A3
WO2004064098A3 PCT/GB2004/000080 GB2004000080W WO2004064098A3 WO 2004064098 A3 WO2004064098 A3 WO 2004064098A3 GB 2004000080 W GB2004000080 W GB 2004000080W WO 2004064098 A3 WO2004064098 A3 WO 2004064098A3
Authority
WO
WIPO (PCT)
Prior art keywords
detector
electron microscope
scanning electron
electron beam
environmental scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/GB2004/000080
Other languages
French (fr)
Other versions
WO2004064098A2 (en
Inventor
Frank Baker
Milos Toth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cambridge University Technical Services Ltd CUTS
Original Assignee
Cambridge University Technical Services Ltd CUTS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cambridge University Technical Services Ltd CUTS filed Critical Cambridge University Technical Services Ltd CUTS
Publication of WO2004064098A2 publication Critical patent/WO2004064098A2/en
Publication of WO2004064098A3 publication Critical patent/WO2004064098A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method
    • H01J2237/2806—Secondary charged particle

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

A detector system for use in a scanning electron microscope. The detector system comprises means for supplying a primary electron beam to the surface of a sample positioned in the detector in use. A specimen is support positioned in the path of the primary electron beam; and first and second electrodes arranged to create an asymmetric field such that secondary electrons are attracted in use to the first electrode and excess ions are removed in use by the second electrode from the region of the sample which is irradiated by the primary electron beam. There is also means for amplifying the output of one of the electrodes to produce a detection signal.
PCT/GB2004/000080 2003-01-09 2004-01-09 Detector for environmental scanning electron microscope Ceased WO2004064098A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0300474.4 2003-01-09
GB0300474A GB0300474D0 (en) 2003-01-09 2003-01-09 Detector for enviromental scanning electron microscope

Publications (2)

Publication Number Publication Date
WO2004064098A2 WO2004064098A2 (en) 2004-07-29
WO2004064098A3 true WO2004064098A3 (en) 2004-10-21

Family

ID=9950885

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2004/000080 Ceased WO2004064098A2 (en) 2003-01-09 2004-01-09 Detector for environmental scanning electron microscope

Country Status (2)

Country Link
GB (1) GB0300474D0 (en)
WO (1) WO2004064098A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008098084A1 (en) * 2007-02-06 2008-08-14 Fei Company High pressure charged particle beam system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5466936A (en) * 1992-11-30 1995-11-14 Nikon Corporation Charged particle microscope
US6365898B1 (en) * 1996-11-15 2002-04-02 Leo Electron Microscopy Limited Scanning electron microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5466936A (en) * 1992-11-30 1995-11-14 Nikon Corporation Charged particle microscope
US6365898B1 (en) * 1996-11-15 2002-04-02 Leo Electron Microscopy Limited Scanning electron microscope

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
TOTH, M. ET AL.: "Electric fields produced by electron irradiation of insulators in a low vacuum environment.", JOURNAL OF APLIED PHYSICS, vol. 91, no. 7, 1 April 2002 (2002-04-01), pages 4492 - 4499, XP001182569 *
TOTH, M. ET AL.: "The role of induced contrast in images obtained using the environmental scanning electron microscope.", SCANNING, vol. 22, no. 6, December 2000 (2000-12-01), USA, pages 370 - 379, XP009034058, ISSN: 0161-0457, Retrieved from the Internet <URL:http://eolit.internal.epo.org/edo/day21/XP009034058.PDF> [retrieved on 20040720] *

Also Published As

Publication number Publication date
GB0300474D0 (en) 2003-02-12
WO2004064098A2 (en) 2004-07-29

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