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WO2003031917A3 - Device for laminar restriction of a fluid, in particular for a flow rate controller - Google Patents

Device for laminar restriction of a fluid, in particular for a flow rate controller Download PDF

Info

Publication number
WO2003031917A3
WO2003031917A3 PCT/FR2002/003423 FR0203423W WO03031917A3 WO 2003031917 A3 WO2003031917 A3 WO 2003031917A3 FR 0203423 W FR0203423 W FR 0203423W WO 03031917 A3 WO03031917 A3 WO 03031917A3
Authority
WO
WIPO (PCT)
Prior art keywords
frusto
fluid
conical portion
flow rate
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/FR2002/003423
Other languages
French (fr)
Other versions
WO2003031917A2 (en
Inventor
Pascal Rudent
Richard Gozlan
Laurent Chaumette
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
QUALIFLOW SA
Qualiflow S A
Original Assignee
QUALIFLOW SA
Qualiflow S A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by QUALIFLOW SA, Qualiflow S A filed Critical QUALIFLOW SA
Priority to AU2002362792A priority Critical patent/AU2002362792A1/en
Publication of WO2003031917A2 publication Critical patent/WO2003031917A2/en
Publication of WO2003031917A3 publication Critical patent/WO2003031917A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)

Abstract

The invention concerns a device for frusto-conical laminar restriction of a fluid, in particular for a mass flow controller. Said device comprises an annular main channel (1) arranged between a frusto-conical portion (2) and the recess (3) of a bore (4), and means for axially positioning the frusto-conical portion (2) within the bore (4), to vary the deflected fluid flow rate. Said means for axially positioning the frusto-conical portion (2) consist of a set of axial spacers (5, 5', 5'') interposed between the ends of the frusto-conical portion (2) and the fluid intake (6) and discharge (7) chambers. The latter are formed by annular gaps arranged with open-worked rings (11, 11') for communicating their internal recess, with respect to the fluid intake (15) and discharge (16) conduits, with the fluid intake (6) and discharge (7) conduits.
PCT/FR2002/003423 2001-10-09 2002-10-08 Device for laminar restriction of a fluid, in particular for a flow rate controller Ceased WO2003031917A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002362792A AU2002362792A1 (en) 2001-10-09 2002-10-08 Device for laminar restriction of a fluid, in particular for a flow rate controller

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR01/12943 2001-10-09
FR0112943A FR2830615B1 (en) 2001-10-09 2001-10-09 LAMINARY RESTRICTION DEVICE OF A FLUID, IN PARTICULAR FOR FLOW CONTROLLER

Publications (2)

Publication Number Publication Date
WO2003031917A2 WO2003031917A2 (en) 2003-04-17
WO2003031917A3 true WO2003031917A3 (en) 2003-10-02

Family

ID=8868051

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2002/003423 Ceased WO2003031917A2 (en) 2001-10-09 2002-10-08 Device for laminar restriction of a fluid, in particular for a flow rate controller

Country Status (3)

Country Link
AU (1) AU2002362792A1 (en)
FR (1) FR2830615B1 (en)
WO (1) WO2003031917A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4193612B2 (en) * 2003-06-30 2008-12-10 オムロン株式会社 Rectifier mounting structure

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4450718A (en) * 1982-04-19 1984-05-29 Advanced Semiconductor Materials N.V. Flow meter including improved laminar flow restrictor device therefor
US4497202A (en) * 1983-05-31 1985-02-05 Dresser Industries, Inc. Laminar flowmeter
US4524616A (en) * 1983-09-02 1985-06-25 Tylan Corporation Adjustable laminar flow bypass
US5099881A (en) * 1990-08-31 1992-03-31 Nippon Tylan Corporation Flow dividing structure of mass flow controller
US5672821A (en) * 1994-12-12 1997-09-30 Mks Japan, Inc. Laminar flow device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4450718A (en) * 1982-04-19 1984-05-29 Advanced Semiconductor Materials N.V. Flow meter including improved laminar flow restrictor device therefor
US4497202A (en) * 1983-05-31 1985-02-05 Dresser Industries, Inc. Laminar flowmeter
US4524616A (en) * 1983-09-02 1985-06-25 Tylan Corporation Adjustable laminar flow bypass
US5099881A (en) * 1990-08-31 1992-03-31 Nippon Tylan Corporation Flow dividing structure of mass flow controller
US5672821A (en) * 1994-12-12 1997-09-30 Mks Japan, Inc. Laminar flow device

Also Published As

Publication number Publication date
FR2830615B1 (en) 2004-01-30
AU2002362792A1 (en) 2003-04-22
FR2830615A1 (en) 2003-04-11
WO2003031917A2 (en) 2003-04-17

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