[go: up one dir, main page]

WO2003031991A1 - Nanocapteur tunnel d'oscillations mecaniques et procede de fabrication correspondant - Google Patents

Nanocapteur tunnel d'oscillations mecaniques et procede de fabrication correspondant

Info

Publication number
WO2003031991A1
WO2003031991A1 PCT/RU2001/000410 RU0100410W WO03031991A1 WO 2003031991 A1 WO2003031991 A1 WO 2003031991A1 RU 0100410 W RU0100410 W RU 0100410W WO 03031991 A1 WO03031991 A1 WO 03031991A1
Authority
WO
WIPO (PCT)
Prior art keywords
προvοdyaτ
slοya
blagοροdnοgο
meτalla
nanotransducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/RU2001/000410
Other languages
English (en)
Russian (ru)
Inventor
Andrey Gennadievich Alexenko
Mikhail Arsenovich Ananyan
Valery Leonidovich Dshkhunyan
Vyacheslav Fedorovich Kolomeitzev
Petr Nikolaevich Luskinovich
Alexandr Borisovich Nevsky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ORLOV OLEG ALEKSEEWICH
Original Assignee
ORLOV OLEG ALEKSEEWICH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ORLOV OLEG ALEKSEEWICH filed Critical ORLOV OLEG ALEKSEEWICH
Priority to PCT/RU2001/000410 priority Critical patent/WO2003031991A1/fr
Priority to RU2002106452/28A priority patent/RU2212671C1/ru
Publication of WO2003031991A1 publication Critical patent/WO2003031991A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors

Definitions

  • the invention is subject to on-line measuring equipment and may be used to measure physical and non-disturbing environments.
  • the principle of the operation of the tunneling user is based on the measurement of the tunneling current, which occurs in the gap between the electrically sensitive element and the fixed value.
  • the tunnel handler supports the device between the probe and the membrane, - 2 - v ⁇ lyuchayuschee ⁇ l ⁇ nyayuschy ele ⁇ d, vy ⁇ lnenny of sl ⁇ ya blag ⁇ dn ⁇ g ⁇ me ⁇ alla, ⁇ sazhdenn ⁇ g ⁇ v ⁇ u ⁇ z ⁇ nda, usili ⁇ el ⁇ unneln ⁇ g ⁇ ⁇ a, v ⁇ lyu- chenny LKAU sl ⁇ em blag ⁇ dn ⁇ g ⁇ me ⁇ alla, nanesenn ⁇ g ⁇ on z ⁇ nd and ⁇ e ⁇ - vym v ⁇ d ⁇ m anal ⁇ g ⁇ -tsi ⁇ v ⁇ g ⁇ ⁇ e ⁇ b ⁇ az ⁇ va ⁇ elya ( ⁇ TSP).
  • the well-known method does not allow to achieve a high accuracy and the efficiency of the small-functional factor.
  • the essentials of the invention are inclusive of the fact that the tunnel of the mechanical vibrations is not connected to the systems, but the ⁇ tunnel mechanic - 4 - ⁇ si ⁇ ⁇ lebany, s ⁇ de ⁇ zhaschy chuvs ⁇ vi ⁇ elny elemei ⁇ , vy ⁇ lnenny as z ⁇ nda ⁇ y ⁇ g ⁇ sl ⁇ em blag ⁇ dn ⁇ g ⁇ me ⁇ alla over ⁇ ym with zaz ⁇ - ⁇ m magnitude ⁇ g ⁇ m ⁇ zhe ⁇ izmenya ⁇ sya ⁇ d ⁇ ley nan ⁇ me ⁇ a d ⁇ d ⁇ ley mi ⁇ na, ⁇ as ⁇ l ⁇ zhena g ⁇ i ⁇ vannaya memb ⁇ ana, ⁇ y ⁇ aya s ⁇ s ⁇ ny z ⁇ nda sl ⁇ em blag ⁇ dn ⁇ g ⁇ me ⁇ alla, ⁇ d ⁇ lyuchennym to the source of the
  • FIG. 1 a functional-structural tunneling scheme of a mechanical vibration oscillator is shown
  • ⁇ a ⁇ ig. 2 is a schematic diagram of the performance of a tunneling device for mechanical vibrations, explaining the method of excluding it, for the sake of clarity
  • a tuner for mechanical vibrations (Figs. 1 and 2) is implemented in the form of a multiple integrated circuit.
  • the probe 3 of the sensible element 2 is made from a wide range of silver in the area of the front 1 and is protected by 4 good metal, for example.
  • Low-temperature probe 3 is located on the outside of the electric 8, made from a good metal, for example gold. - 8 -
  • the tunnel handler for mechanical vibrations works the following way.
  • ⁇ is ⁇ dn ⁇ m s ⁇ stoyanii, ⁇ sle power
  • the ⁇ dachi, na ⁇ yazhenie on ⁇ - ⁇ sl ⁇ nyayuschem ele ⁇ de 8 us ⁇ ys ⁇ va 7 u ⁇ avleniya zaz ⁇ m z ⁇ nd ⁇ m between 3 and 5 memb ⁇ an ⁇ y ⁇ avn ⁇ zero, ⁇ ezul ⁇ a ⁇ e cheg ⁇ zaz ⁇ 16 sl ⁇ yami me ⁇ allizatsii between 4 and 6 z ⁇ nda 3 and 5 memb ⁇ any chuvs ⁇ vi ⁇ eln ⁇ g ⁇ elemen ⁇ a 2 d ⁇ s ⁇ a ⁇ chn ⁇ for veli ⁇ Then, you can run a tunnel tunnel.
  • the measurement of the tunneling current is more informative than the path of measuring the electric capacitance.
  • the tuner for mechanical vibrations has an excellent sensitivity of 10 5 to 10 8 ⁇ / ⁇ , with a frequency range of more than 150, which is close to 150 - 12 - for operation, a wide temperature range of -60 ° ⁇ to + 60 ° ⁇ is provided, which ensures the wide range of applications.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Acoustics & Sound (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Micromachines (AREA)

Abstract

Le nanocapteur tunnel d'oscillations mécaniques appartient au domaine des microsystèmes utilisés dans les équipements de contrôle et de mesure. Le nanocapteur comprend un élément sensible se présentant comme une sonde en silicium monocristallin recouverte d'une couche de métal noble. Sous la sonde, on a disposé avec un intervalle compris entre plusieurs fractions de nanomètre et plusieurs fractions de micromètre une membrane en silicium polycristallin, ondulée sur les bords et recouverte du côté de la sonde d'une couche de métal noble. La sonde est branchée sur une source de tension d'entrée. Le nanocapteur comprend également un dispositif de régulation de l'intervalle, une électrode de déviation disposée autour de la sonde, ladite électrode étant faite d'un métal noble, un amplificateur de courant tunnel et un dispositif limitateur de courant tunnel. Le procédé de fabrication du nanocapteur tunnel est basé sur des méthodes de la technologie à semi-conducteurs planaires.
PCT/RU2001/000410 2001-10-11 2001-10-11 Nanocapteur tunnel d'oscillations mecaniques et procede de fabrication correspondant Ceased WO2003031991A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/RU2001/000410 WO2003031991A1 (fr) 2001-10-11 2001-10-11 Nanocapteur tunnel d'oscillations mecaniques et procede de fabrication correspondant
RU2002106452/28A RU2212671C1 (ru) 2001-10-11 2001-10-11 Туннельный нанодатчик механических колебаний и способ его изготовления

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/RU2001/000410 WO2003031991A1 (fr) 2001-10-11 2001-10-11 Nanocapteur tunnel d'oscillations mecaniques et procede de fabrication correspondant

Publications (1)

Publication Number Publication Date
WO2003031991A1 true WO2003031991A1 (fr) 2003-04-17

Family

ID=20129655

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/RU2001/000410 Ceased WO2003031991A1 (fr) 2001-10-11 2001-10-11 Nanocapteur tunnel d'oscillations mecaniques et procede de fabrication correspondant

Country Status (2)

Country Link
RU (1) RU2212671C1 (fr)
WO (1) WO2003031991A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10194463B2 (en) 2004-07-21 2019-01-29 Qualcomm Incorporated Efficient signaling over access channel

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2362221C1 (ru) * 2007-10-31 2009-07-20 Федеральное государственное унитарное предприятие "Ордена Трудового Красного Знамени Научно-исследовательский физико-химический институт имени Л.Я. Карпова" Туннельный наносенсор механических колебаний и способ его изготовления
RU2391673C2 (ru) * 2008-06-30 2010-06-10 Государственное образовательное учреждение высшего профессионального образования "Санкт-Петербургский государственный университет Аэрокосмического приборостроения" Наноэлектромеханический датчик ускорения
RU2388682C1 (ru) * 2008-10-14 2010-05-10 Федеральное государственное унитарное предприятие "Ордена Трудового Красного Знамени Научно-исследовательский физико-химический институт имени Л.Я. Карпова" Способ изготовления туннельного сенсора механических колебаний
US10424712B2 (en) 2013-01-18 2019-09-24 Yale University Methods for making a superconducting device with at least one enclosure
CA2898598C (fr) 2013-01-18 2023-01-03 Yale University Dispositif supraconducteur ayant au moins une enveloppe
EP3058618B1 (fr) 2013-10-15 2020-09-02 Yale University Amplificateur directionnel à faible bruit fondé sur jonction de josephson
US9948254B2 (en) 2014-02-21 2018-04-17 Yale University Wireless Josephson bifurcation amplifier
EP3262762B1 (fr) 2015-02-27 2021-11-10 Yale University Circulateurs à base de jonction josephson et systèmes et procédés associés
CA2977968C (fr) 2015-02-27 2023-10-17 Yale University Techniques de production d'amplificateurs quantiques et systemes et procedes associes
CA2977662A1 (fr) 2015-02-27 2016-09-01 Yale University Techniques de couplage de bits quantiques planaires a des resonateurs non planaires, systemes et procedes associes
WO2016168642A1 (fr) 2015-04-17 2016-10-20 Yale University Convertisseur paramétrique josephson sans fil
HK1258844A1 (zh) 2016-01-15 2019-11-22 Yale University 用於操纵双量子位量子态的技术及相关系统和方法
WO2019118442A1 (fr) 2017-12-11 2019-06-20 Yale University Élément inductif asymétrique non linéaire supraconducteur et systèmes et procédés associés
US11223355B2 (en) 2018-12-12 2022-01-11 Yale University Inductively-shunted transmon qubit for superconducting circuits
US11791818B2 (en) 2019-01-17 2023-10-17 Yale University Josephson nonlinear circuit

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5315247A (en) * 1987-11-09 1994-05-24 California Institute Of Technology Method and apparatus for measuring a magnetic field using a deflectable energized loop and a tunneling tip
FR2700065A1 (fr) * 1992-12-28 1994-07-01 Commissariat Energie Atomique Procédé de fabrication d'accéléromètres utilisant la technologie silicium sur isolant.
US5449909A (en) * 1987-11-09 1995-09-12 California Institute Of Technology Tunnel effect wave energy detection
RU94044849A (ru) * 1994-12-22 1996-04-27 Л.А. Левин Электростатический акселерометр с вакуумным туннельным датчиком
US5563344A (en) * 1992-10-28 1996-10-08 California Institute Of Technology Dual element electron tunneling accelerometer
RU2152044C1 (ru) * 1997-12-22 2000-06-27 Казанский государственный технический университет им. А.Н. Туполева Датчик параметров механических колебаний

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5315247A (en) * 1987-11-09 1994-05-24 California Institute Of Technology Method and apparatus for measuring a magnetic field using a deflectable energized loop and a tunneling tip
US5449909A (en) * 1987-11-09 1995-09-12 California Institute Of Technology Tunnel effect wave energy detection
US5563344A (en) * 1992-10-28 1996-10-08 California Institute Of Technology Dual element electron tunneling accelerometer
FR2700065A1 (fr) * 1992-12-28 1994-07-01 Commissariat Energie Atomique Procédé de fabrication d'accéléromètres utilisant la technologie silicium sur isolant.
RU94044849A (ru) * 1994-12-22 1996-04-27 Л.А. Левин Электростатический акселерометр с вакуумным туннельным датчиком
RU2152044C1 (ru) * 1997-12-22 2000-06-27 Казанский государственный технический университет им. А.Н. Туполева Датчик параметров механических колебаний

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10194463B2 (en) 2004-07-21 2019-01-29 Qualcomm Incorporated Efficient signaling over access channel
US10237892B2 (en) 2004-07-21 2019-03-19 Qualcomm Incorporated Efficient signaling over access channel
US10517114B2 (en) 2004-07-21 2019-12-24 Qualcomm Incorporated Efficient signaling over access channel
US10849156B2 (en) 2004-07-21 2020-11-24 Qualcomm Incorporated Efficient signaling over access channel
US11039468B2 (en) 2004-07-21 2021-06-15 Qualcomm Incorporated Efficient signaling over access channel

Also Published As

Publication number Publication date
RU2212671C1 (ru) 2003-09-20

Similar Documents

Publication Publication Date Title
WO2003031991A1 (fr) Nanocapteur tunnel d'oscillations mecaniques et procede de fabrication correspondant
EP0973012B1 (fr) Capteur
US8490495B2 (en) Capacitive pressure sensor with vertical electrical feedthroughs and method to make the same
JPH08136577A (ja) 導電性キャップおよび基板を含む電子素子エンクロージャ
JP4048444B2 (ja) 水素ガスセンサー
US11519848B2 (en) Photoacoustic gas sensor and pressure sensor
US9261610B2 (en) High purity germanium detector
JP5867046B2 (ja) 極紫外露光マスク用防塵装置及び極紫外露光装置
CN111103466B (zh) 具有集成空间电荷检测器的电缆接头
CN113109636A (zh) 一种单芯片三维电场传感器
US4337658A (en) Humidity sensor
JP2001091205A (ja) 物体搭載装置
JP4527663B2 (ja) センサ、センサ機構、および測定方法
KR101787876B1 (ko) 정전용량 변화를 이용한 플라즈마 밀도 측정 방법 및 장치, 그리고 측정용 탐침
JPH10206458A (ja) 外力計測装置およびその製造方法
JP6353900B2 (ja) 異種放射線測定センサー
JP2004301786A (ja) センサ素子パッケージおよび角速度センサ
JP4073484B2 (ja) トートワイヤー式アラインメント装置における軸方向偏位を測定する方法および装置
CN110514698B (zh) 一种气体感测装置和气体检测设备
WO2002029361A1 (fr) Gyroscope statique a logique ondulatoire
Takao et al. A monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers
JP2011113917A (ja) プラズマ監視用プローブ、プラズマ監視装置及びプラズマ処理装置
JP3680514B2 (ja) 感震装置
SU681396A1 (ru) Устройство дл измерени магнитных полей
Baxter Miniature hybrid preamplifier for CdTe detectors

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): JP KR RU

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB IE IT LU MC NL PT SE TR

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP