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WO2003004981A3 - Spectrometre a emission equipe d'un detecteur a dispositif de transfert de charge - Google Patents

Spectrometre a emission equipe d'un detecteur a dispositif de transfert de charge Download PDF

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Publication number
WO2003004981A3
WO2003004981A3 PCT/US2002/020775 US0220775W WO03004981A3 WO 2003004981 A3 WO2003004981 A3 WO 2003004981A3 US 0220775 W US0220775 W US 0220775W WO 03004981 A3 WO03004981 A3 WO 03004981A3
Authority
WO
WIPO (PCT)
Prior art keywords
coupled device
charge coupled
emission spectrometer
detector
device detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2002/020775
Other languages
English (en)
Other versions
WO2003004981A2 (fr
WO2003004981A8 (fr
WO2003004981A9 (fr
Inventor
Mark Leonard Malczewski
Joseph Wegrzyn
Wayne Donald Martin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Praxair Technology Inc
Original Assignee
Praxair Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Praxair Technology Inc filed Critical Praxair Technology Inc
Priority to JP2003510908A priority Critical patent/JP4555565B2/ja
Priority to KR1020047000073A priority patent/KR100930437B1/ko
Priority to CA002452574A priority patent/CA2452574C/fr
Priority to EP02782486A priority patent/EP1412714A4/fr
Publication of WO2003004981A2 publication Critical patent/WO2003004981A2/fr
Publication of WO2003004981A3 publication Critical patent/WO2003004981A3/fr
Anticipated expiration legal-status Critical
Publication of WO2003004981A8 publication Critical patent/WO2003004981A8/fr
Publication of WO2003004981A9 publication Critical patent/WO2003004981A9/fr
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/443—Emission spectrometry

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Measuring Cells (AREA)

Abstract

L'invention concerne un analyseur destiné à réaliser une analyse de gaz en continu dans des applications de très haute pureté. L'analyseur combine une source d'émission de faible niveau et un spectromètre (10) à émission gazeuse équipé d'un réseau de diodes à dispositif de transfert de charge (CCD) servant de détecteur. Le détecteur CCD remplace un ou plusieurs photomultiplicateurs et des filtres à bande passante étroite habituellement utilisés dans les spectromètres. L'analyseur exécute diverses opérations de traitement pour évaluer et éliminer l'effet du niveau de lumière d'arrière-plan, ou les zones d'ombre.
PCT/US2002/020775 2001-07-06 2002-07-01 Spectrometre a emission equipe d'un detecteur a dispositif de transfert de charge Ceased WO2003004981A2 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2003510908A JP4555565B2 (ja) 2001-07-06 2002-07-01 電荷結合素子検出器を有する発光分光計
KR1020047000073A KR100930437B1 (ko) 2001-07-06 2002-07-01 전하 결합 소자 검출기를 구비하는 방출 분광계
CA002452574A CA2452574C (fr) 2001-07-06 2002-07-01 Spectrometre a emission equipe d'un detecteur a dispositif de transfert de charge
EP02782486A EP1412714A4 (fr) 2001-07-06 2002-07-01 Spectrometre a emission equipe d'un detecteur a dispositif de transfert de charge

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/899,875 US6594010B2 (en) 2001-07-06 2001-07-06 Emission spectrometer having a charge coupled device detector
US09/899,875 2001-07-06

Publications (4)

Publication Number Publication Date
WO2003004981A2 WO2003004981A2 (fr) 2003-01-16
WO2003004981A3 true WO2003004981A3 (fr) 2003-03-27
WO2003004981A8 WO2003004981A8 (fr) 2004-04-08
WO2003004981A9 WO2003004981A9 (fr) 2005-03-17

Family

ID=25411680

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/020775 Ceased WO2003004981A2 (fr) 2001-07-06 2002-07-01 Spectrometre a emission equipe d'un detecteur a dispositif de transfert de charge

Country Status (8)

Country Link
US (1) US6594010B2 (fr)
EP (2) EP2267421A1 (fr)
JP (3) JP4555565B2 (fr)
KR (1) KR100930437B1 (fr)
CN (1) CN100416239C (fr)
CA (1) CA2452574C (fr)
TW (1) TW536619B (fr)
WO (1) WO2003004981A2 (fr)

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US7123361B1 (en) 2003-03-05 2006-10-17 Verionix Incorporated Microplasma emission spectrometer
US7233393B2 (en) * 2004-08-05 2007-06-19 Applera Corporation Signal noise reduction for imaging in biological analysis
US7126820B2 (en) * 2003-11-11 2006-10-24 Intel Corporation Modular platform system and apparatus
JP5276317B2 (ja) * 2004-03-10 2013-08-28 ウオーターズ・テクノロジーズ・コーポレイシヨン 選択的に飛ばされたピクセルを含む自己走査型フォトダイオードアレイ
US7309842B1 (en) 2004-03-19 2007-12-18 Verionix Incorporated Shielded monolithic microplasma source for prevention of continuous thin film formation
US7453566B2 (en) * 2006-08-31 2008-11-18 Massachusetts Institute Of Technology Hybrid plasma element monitor
JP5150939B2 (ja) * 2008-10-15 2013-02-27 大塚電子株式会社 光学特性測定装置および光学特性測定方法
JP5171564B2 (ja) * 2008-11-14 2013-03-27 キヤノン株式会社 音響光学トモグラフィー測定装置および測定方法
US8218924B1 (en) * 2009-04-30 2012-07-10 Lockheed Martin Corporation Fiber optic cable with a plurality of optical events to define a signature specific to the fiber optic cable
US8645082B2 (en) * 2010-09-13 2014-02-04 Mks Instruments, Inc. Monitoring, detecting and quantifying chemical compounds in a sample
JP6316064B2 (ja) * 2014-03-31 2018-04-25 株式会社日立ハイテクサイエンス Ｉｃｐ発光分光分析装置
JP6893668B2 (ja) * 2014-08-29 2021-06-23 株式会社アロマビット 嗅覚システム、匂い識別方法、匂い識別装置、携帯デバイス、ウェアラブルデバイス、空調機器、及び匂い情報識別プログラム
WO2016031080A1 (fr) * 2014-08-29 2016-03-03 株式会社アロマビット Système de détection d'odeurs, dispositif d'identification d'odeurs, et procédé d'identification d'odeurs
JP2018128326A (ja) * 2017-02-07 2018-08-16 大塚電子株式会社 光学スペクトル測定装置および光学スペクトル測定方法
JP6823555B2 (ja) * 2017-07-05 2021-02-03 アークレイ株式会社 プラズマ分光分析方法
CN209432703U (zh) * 2018-07-16 2019-09-24 成都艾立本科技有限公司 一种基于等离子体射流固体烧蚀直接分析的装置
GB2583897A (en) * 2019-04-05 2020-11-18 Servomex Group Ltd Glow plasma stabilisation
GB2589367B (en) 2019-11-29 2022-01-12 Thermo Fisher Scient Ecublens Sarl Improvements in optical emission spectrometry
TWI793609B (zh) * 2021-05-20 2023-02-21 盛翊興有限公司 光譜整合校正方法及多光譜光譜儀
US12174071B2 (en) 2022-05-13 2024-12-24 Verity Instruments, Inc. System, apparatus, and method for improved background correction and calibration of optical devices
JP2025536187A (ja) * 2022-10-11 2025-11-05 アクリマ・インコーポレーテッド メタンのクラスタおよび発生源の特定
CN119779486A (zh) * 2025-03-10 2025-04-08 上海唯视锐光电技术有限公司 一种成像色度测量方法及基于该测量方法的测量装置

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US3600091A (en) * 1970-05-13 1971-08-17 Atomic Energy Commission Bright-line emission source for absorption spectroscopy
US5831728A (en) * 1993-03-24 1998-11-03 Praxair Technology, Inc. Gas emission spectrometer and method
US6069695A (en) * 1996-07-01 2000-05-30 Emtec Magnetics Gmbh Process and arrangement for laser-induced spectral analysis
US6107627A (en) * 1995-09-29 2000-08-22 Nikkiso Company Limited Apparatus for analysis of mixed gas components

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US3032654A (en) * 1958-02-10 1962-05-01 Union Carbide Corp Emission spectrometer
US2943223A (en) * 1958-05-02 1960-06-28 Union Carbide Corp Silent electric discharge light source
US5347460A (en) 1992-08-25 1994-09-13 International Business Machines Corporation Method and system employing optical emission spectroscopy for monitoring and controlling semiconductor fabrication
JPH0720043A (ja) * 1993-07-06 1995-01-24 Kubota Corp 分光分析装置
FI98410C (fi) * 1993-12-16 1997-06-10 Instrumentarium Oy Kaasuseosten analysointiin käytettävä mittausanturi ja mittausjärjestely
DE19505104A1 (de) * 1995-02-15 1996-08-22 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Verfahren und Anordnung zur Bestimmung der Reinheit und/oder des Drucks von Gasen für elektrische Lampen
DE19617100B4 (de) * 1996-04-19 2007-06-06 Berthold Gmbh & Co. Kg Verfahren zur Konzentrationsbestimmung mittels Kontinuums-Atomabsorptionsspektroskopie
JP4105251B2 (ja) * 1996-12-17 2008-06-25 富士フイルム株式会社 測色値の測定方法
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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3600091A (en) * 1970-05-13 1971-08-17 Atomic Energy Commission Bright-line emission source for absorption spectroscopy
US5831728A (en) * 1993-03-24 1998-11-03 Praxair Technology, Inc. Gas emission spectrometer and method
US6107627A (en) * 1995-09-29 2000-08-22 Nikkiso Company Limited Apparatus for analysis of mixed gas components
US6069695A (en) * 1996-07-01 2000-05-30 Emtec Magnetics Gmbh Process and arrangement for laser-induced spectral analysis

Also Published As

Publication number Publication date
EP1412714A2 (fr) 2004-04-28
WO2003004981A2 (fr) 2003-01-16
WO2003004981A8 (fr) 2004-04-08
US6594010B2 (en) 2003-07-15
CA2452574A1 (fr) 2003-01-16
JP2004522168A (ja) 2004-07-22
EP2267421A1 (fr) 2010-12-29
JP2010133970A (ja) 2010-06-17
EP1412714A4 (fr) 2007-10-31
WO2003004981A9 (fr) 2005-03-17
US20030007146A1 (en) 2003-01-09
CA2452574C (fr) 2008-04-22
CN100416239C (zh) 2008-09-03
CN1551978A (zh) 2004-12-01
TW536619B (en) 2003-06-11
JP4829995B2 (ja) 2011-12-07
JP2009186485A (ja) 2009-08-20
JP4555565B2 (ja) 2010-10-06
KR20040015328A (ko) 2004-02-18
KR100930437B1 (ko) 2009-12-08

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