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WO2003003361A1 - Optical recording medium - Google Patents

Optical recording medium Download PDF

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Publication number
WO2003003361A1
WO2003003361A1 PCT/JP2002/006440 JP0206440W WO03003361A1 WO 2003003361 A1 WO2003003361 A1 WO 2003003361A1 JP 0206440 W JP0206440 W JP 0206440W WO 03003361 A1 WO03003361 A1 WO 03003361A1
Authority
WO
WIPO (PCT)
Prior art keywords
recording medium
film
optical recording
recording
group
Prior art date
Application number
PCT/JP2002/006440
Other languages
French (fr)
Japanese (ja)
Inventor
Yuichi Sabi
Takashi Iwamura
Sakuya Tamada
Original Assignee
Sony Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corporation filed Critical Sony Corporation
Priority to JP2003509450A priority Critical patent/JPWO2003003361A1/en
Publication of WO2003003361A1 publication Critical patent/WO2003003361A1/en

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Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/007Arrangement of the information on the record carrier, e.g. form of tracks, actual track shape, e.g. wobbled, or cross-section, e.g. v-shaped; Sequential information structures, e.g. sectoring or header formats within a track
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor

Definitions

  • the present invention relates to an optical recording medium, and in particular, aims to improve reproduction characteristics in a phase modulation type optical recording medium.
  • optical disc of a large-capacity optical recording medium which is now regarded as a next-generation optical recording medium
  • recording is performed from the side of the light transmission protection film formed on the recording surface to the recording surface, that is, through the light transmission protection film.
  • Standardization of blue-violet light on the surface and a numerical aperture NA of the objective lens of 0.85 is under study.
  • a large-capacity optical recording medium intended for so-called “live recording”, that is, only one recording is performed, and the recording is stably maintained for many years without being erased.
  • the recording film is based on a phase-change material, but as a recording film for a write-once-type large-capacity optical recording medium, as in CD-R.
  • the recording film is made of an organic dye material, the characteristics of the organic dye material constituting the recording film may vary.
  • CD-R and DVD-R which differ in the optical constants due to the difference in the organic dye material of the recording film, simply the recesses formed in the substrate, for example, a continuous group for tracking or Changing the depth of the intermittent group according to this difference in wavelength cannot optimize for obtaining excellent reproduction characteristics.
  • the track pitch of a large capacity optical recording medium is much smaller than that of a conventional optical recording medium.
  • the track pitch in CD is 1.6 m
  • the track pitch in a large-capacity optical recording medium is, for example, about 0.0S ⁇ m.
  • the problem is the inclination of the side wall of the tracking dull formed on the disk substrate.
  • concavities and convexities of groups or pits in a normal CD or the like is achieved by injection molding using a stamper having a concavo-convex pattern corresponding to the groups or pits in the production of a disc substrate, and the 2P method (Photopolymeri zation method). ) And the like.
  • This stamper is manufactured by mastering, that is, by mastering using a photo resist.
  • Pattern exposure on the photo resist in this master ring usually uses blue light or ultraviolet light. .
  • the pattern exposure by light described above causes the side wall surface of the group to form a gentle slope. Pine.
  • An object of the present invention is to provide an optical recording medium having excellent reproduction characteristics including high reproduction output in the above-mentioned write-once large-capacity optical recording medium.
  • the optical recording medium according to the present invention is formed by forming at least a metal film and a recording film made of an organic dye material on a substrate in which a concave portion is formed.
  • An optical recording medium on which at least reproduction is performed, and the depth of the concave portion is 15 ⁇ ! ⁇ 50 nm.
  • the organic dye material of the recording film is composed of an organic dye material having a refractive index n of 1.9 or more before recording with respect to light having a wavelength of 380 nm to 450 nm and causing a change in the refractive index after recording. I do.
  • the recording film has the same thickness on both the bottom surface of the concave portion and the upper surface of the convex portion between the concave portions.
  • an optimum signal output can be obtained in a write-once, large-capacity optical recording medium in which reproduction is performed by the above-described phase modulation method.
  • FIG. 1 is a sectional view showing the basic structure of an optical recording medium according to the present invention.
  • FIG. 2 is a cross-sectional view of a concave portion of an optical recording medium for explaining the present invention
  • FIG. 3 is a diagram showing a relationship between a group width and a signal amplitude for explaining the present invention
  • FIG. FIG. 5 is a schematic plan view showing a recording state in the optical recording medium according to the present invention
  • FIG. 5 is a diagram showing a reproduction signal level in a track length direction of the optical recording medium for explanation of the present invention.
  • FIG. 6 is a diagram showing the dependence of the signal amplitude of the optical recording medium on the groove depth for explaining the present invention
  • FIG. 7 is a graph showing the reflectance and the modulation factor of the optical recording medium for explaining the present invention.
  • FIG. 8 is a diagram showing the group depth dependency
  • FIG. 8 is a diagram showing the group depth dependency of the signal amplitude of the optical recording medium used for explaining the present invention
  • FIG. 9 is used for explaining the present invention.
  • FIG. 4 is a diagram showing the group depth dependence of the reflectance and the degree of modulation of an optical recording medium according to the present invention.
  • the optical recording medium according to the present invention can form a write-once, large-capacity optical disk, that is, the numerical aperture N.A. of the optical system is 0.85 ⁇ 0.05, and the wavelength power is 380 nm or more.
  • the configuration is such that a reproduction mode or a reproduction and recording mode using a laser in a blue-violet region of 450 nm can be adopted.
  • An optical recording medium 10 as shown in a schematic cross-sectional view of an example in FIG. 1, includes a concave portion 2 on a substrate 1 on which a continuous group for tracking or an intermittent group is formed.
  • a metal film 3, a recording film 4, and a dielectric film 5 are formed, and a light-transmitting protective film 6 on which a light-transmitting resin film having a thickness of, for example, 0.1 mm is formed by a spin coat is formed. It is formed by adhesion. '
  • the above-mentioned laser beam 9 in the blue-violet region is incident on the optical recording medium 1 Q from the light transmission protective film 6 side via the objective lens 11.
  • the protruding part on the side is referred to as the concave portion 2 (group)
  • the surface between these concave portions 2 on the side close to the laser light 9 incidence surface is referred to as the convex portion 7 (land).
  • the depth D of the recess 2 shown in FIG. 2 is set to 15 nm to 50 nm.
  • the recording film 4 has a characteristic that the refractive index n is 1.9 or more before recording, and is made of an organic dye material that changes the refractive index after recording.
  • the film thickness of the recording film 4 is formed by, for example, a vapor deposition film having the same film thickness in both the concave portion, that is, the bottom surface of the group 2 and the convex portion, that is, the upper surface of the land 7.
  • the optical recording medium according to the present invention uses the land as a recording area. This is because, for example, when the organic dye material constituting the recording film is vapor-deposited, the homogeneity of the recording film tends to be impaired in the recesses (groups), and this inhomogeneity causes noise. It is a recording area.
  • the optical recording medium according to the present invention will be described with reference to examples.
  • the concave portion 2 that is, the average width W of the group is 0.10 m to 0.14 m.
  • the average width W is set to 0.14 m.
  • the relationship between the average width W of the concave portion (group) and the reproduction signal amplitude is as shown in FIG. 3, and the average width W at which the reproduction signal amplitude is maximum is 0.10 im to 0.14 ⁇ m.
  • the width should be set as wide as possible in this range. The advantage is that even if the average width W deviates slightly from 0.14 m, there is almost no effect on the setting of the depth of the recess.
  • the track pitch is mainly involved in crosstalk, but the purpose of the present invention is to obtain the maximum output. In the present invention, a configuration for realizing this is specifically described. Is configured to set the depth of group 2.
  • the crosstalk can be made sufficiently small if the phase modulation mode with a narrow group width is used.
  • the track pitch is fixed to 0.6 m without crosstalk so that the detection signal can be easily evaluated. did.
  • the film thicknesses of the recording film 4 on the bottom surface of the group and the top surface of the land are made equal, they have the same complex reflectance with respect to the reflected light, that is, the returned light from these surfaces. .
  • the phase information of the reflected light can be the same as the case where the metal reflection film is simply formed.
  • the depth of the group is made deeper than 67 nm due to the above-described relationship to cope with such inconvenience, a problem arises in that the sidewall 2a is inclined in the formation of the group.
  • the inclination tan 0 of the side wall 2a shown in FIG. 2 is 1 to 2, and if the depth of the group is set to be deeper, for example, 100 nm, the average width W of the group is 0 If it is 14 m (140 nm), the land width will be 140 nm, and the slope of the side wall will occupy a considerable area.
  • the depth of the group that is, the concave portion 2 be as shallow as possible and that the side wall be as high as possible.
  • the present invention constitutes an optical recording medium which addresses such a point, and will be described with reference to examples.
  • a substrate 1 having irregularities on its surface is prepared by injection molding using a polycarbonate resin. That is, a concave portion 2 is formed by a tracking guide group having a depth of 20 nm on one main surface of the substrate 1, and a convex portion, that is, a land 7 is formed between adjacent concave portions 2 as a recording portion. did.
  • a metal film 3 of 30 nm in thickness of Ag is deposited, and a recording film 4 of an organic dye material with a thickness of 25 nm is formed thereon.
  • a dielectric film 5 of 100 nm thick SiN is formed thereon, and a light-transmitting protective film of 100 m thick ultraviolet curable resin is formed thereon. 6
  • An optical recording medium, that is, an optical disk in this example was produced by coating.
  • the dielectric film 5 serves as an isolation layer for preventing the reaction between the recording film 4 and the light-transmitting protective film 6 in an uncured state.
  • the optical constants of the organic dyes are expressed as n (refractive index) for the real part of the complex refractive index and k (extinction coefficient) for the imaginary part.
  • the thickness of the metal film 3 was sufficiently large, the reflectance of the recording film 4 before and after recording hardly changed, and the reflectance was about 50% in both cases.
  • the land 7 has 0.69 ⁇ ] 1 mark] ⁇ [and 0.69 ⁇ m space. This was recorded and reproduced.
  • Figure 5 shows the measurement results of the reproduced signal level.
  • the signal level is normalized with the light intensity incident on the optical disc as 1, and the horizontal axis represents the position X in the track length direction.
  • the largest modulation depth can be realized when the group depth D is around 2 Onm.
  • the reproduction signal characteristics are not optimized only by the signal amplitude. If the reflectivity is too low, focus and tracking servos cannot be applied. However, there is a problem that the shot noise of the light source becomes large and the servo becomes unstable.
  • a return light amount of at least 10% or more is required.
  • the modulation degree of a signal in an optical recording medium for example, an optical disc be 0.5 or more.
  • This degree of modulation is obtained by dividing the signal amplitude by the reflectance before recording. If the reflectance is high even if the signal amplitude is large, the return light after recording does not ideally decrease.
  • Figure 7 shows the results of measuring the depth of the group and the relationship between the reflectance (curve 71) and the modulation (curve 72) before recording.
  • the reflectivity decreases as the depth of the group increases, as the phase shift before recording approaches 7 ⁇ . It can be seen that in order for this reflectivity to be at least 10% as described above, the depth D of the group should be selected to be at most 40 nm.
  • the depth D at which the degree of modulation is 0.5 or more is 15 ⁇ m. That is, the depth D of the group, that is, the recess 2 is 15 ⁇ !
  • An ideal reproduction signal can be obtained by selecting a wavelength of about 40 nm.
  • the film thickness of the recording film 4 was about 25 nm in this embodiment, but this film thickness is extremely thin as compared with a film thickness of 200 nm or more in the case of CD-R. Therefore, such a configuration in which a sufficient modulation can be obtained with a thin film thickness is difficult to obtain with a conventional configuration. In other words, according to the present invention, there is an effect that the recording film can be made thin.
  • the return light amount of light irradiation on the optical recording medium is increased.
  • the thickness of the metal film 3 may be increased. However, if the thickness is too large, the recess 2, that is, the inside of the group is buried, which causes noise. In this example, the film configuration was changed.
  • Example 1 on a PC (polycarbonate) resin substrate 1 having grooves formed thereon, a 30 nm-thick Ag metal film 3 and an organic dye material 25 nm recording film 4, S
  • the dielectric film 5 and the light transmission protection film 6 are formed by 1 N.
  • the film thickness of the dielectric film 5 by SiN and the organic dye material of the recording film 4 are used. changed. That is, the thickness of the dielectric film 5 is
  • the substrate of the organic dye material of the recording film 4 was made of a triphenylamine derivative, the refractive index n for a wavelength of 450 nm before recording was 2.30, and the extinction coefficient was 0.134.
  • Figure 8 shows the measurement results of the relationship between the group depth D and the reproduced signal amplitude in this case.
  • FIG. 9 shows the measurement results of the group depth D and the relationship between the reflectance (curve 91) and the modulation factor (curve 92).
  • the amplitude is almost the same as that of the second embodiment, and the group depth D showing the maximum value is slightly shifted to about 25 nm.
  • the reflectivity is generally increased, and the group depth at which the reflectivity is 15% is about 50 nm, and the range where the modulation factor is 0.5 or more is about 25 nm.
  • an ideal reproduction signal can be obtained by selecting the depth D of the group, that is, the concave portion 2 from 25 nm to 50 nm.
  • the depth of the groove, that is, the concave portion 2 in the substrate 1 is in the range of 15 nm to 50 nm, and an optical recording medium from which a good reproduction signal can be obtained by selecting a film configuration. Is obtained.
  • an optical recording medium that can be applied to an optical system having the above-described short wavelength, ie, 380 ⁇ 111 to 450 0 11111, and high., Ie, 0.85 ⁇ 0.05, is realized. As a result, high-density recording becomes possible.
  • the optical recording medium is not limited to the above-described embodiment, but can be modified and changed. You can also take
  • the optical recording medium using the organic dye material according to the present invention as a recording film can be configured so as to obtain a sufficient reproduction output by selecting the depth of the concave portion of the substrate to be small.
  • the fabrication of the substrate is facilitated, and the problem of generation of noise due to inclination and roughness of the side wall when the depth of the concave portion is large is avoided.
  • the thickness of the recording film can be reduced to 20 nm on such a substrate, cost can be reduced, throughput can be improved, and cost can be reduced.
  • the thermal characteristics can be easily optimized, and a film can be formed by vapor deposition. In this way, according to the present invention, an optical recording medium applicable to the above-described short wavelength, high NA optical system can be realized, and high-density recording, that is, a large-capacity optical recording medium can be configured. It can be done.

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  • Optical Record Carriers And Manufacture Thereof (AREA)

Abstract

An optical recording medium comprising at least a metal film (3) and a recording film (4) of an organic pigment material sequentially formed on a substrate (1) formed with recesses (2), wherein a WORM type next-generation optical recording medium comprises recesses having depths selected to be 15 nm-50 nm, and has excellent reproducing features including a high reproduction output.

Description

' 明 細 書  ' Specification
光記録媒体  Optical recording medium
技術分野  Technical field
本発明は、 光記録媒体に関わり、 特に位相変調型の光記録媒体 における再生特性の改善を図る。 背景技術  The present invention relates to an optical recording medium, and in particular, aims to improve reproduction characteristics in a phase modulation type optical recording medium. Background art
追記型の光ディ スク用記録材料としては、 現在、 機能性有機色 素材料が広く用いられており、 特に追記型のコンパク トディ スク (C D— R) として安価に大量に生産されている。 . また、 DVD(Digital Versatile Disc)の光学系でも、 追記型 の DV D (DVD - R) として追記型の規格がまとめられ、 発売 されるに至っている。  At present, functional organic color materials are widely used as write-once type optical disc recording materials, and are especially produced in large quantities at low cost as write-once type compact discs (CD-R). In the optical system of DVD (Digital Versatile Disc), the write-once standard has been put together as write-once DV D (DVD-R), and has been released.
更に、 現在、 次世代光記録媒体とされている大容量光記録媒体 の光ディ スク として、 記録面上に形成された光透過保護膜側から 記録面に対して、 すなわち光透過保護膜を通じて記録面に対し、 青紫色光を用い、 対物レンズの開口数 N. A. を 0. 8 5とする 規格化検討がなされている。  Furthermore, as an optical disc of a large-capacity optical recording medium, which is now regarded as a next-generation optical recording medium, recording is performed from the side of the light transmission protection film formed on the recording surface to the recording surface, that is, through the light transmission protection film. Standardization of blue-violet light on the surface and a numerical aperture NA of the objective lens of 0.85 is under study.
ところで、 この大容量光記録媒体においても、 いわゆるァ一力 イブ目的の大容量光記録媒体、 すなわち 1回の記録のみがなされ 、 かつその記録が消去されずに長年に渡って安定に保持すること のできる追記型の大容量光記録媒体の必要性が高まっている。 上述した大容量光記録媒体で検討されている規格においては、 その記録膜が相変化材料をベースとしているものであるが、 追記 型の大容量光記録媒体における記録膜として、 C D— Rにおける ように、 有機色素材料を用いることが、 製造の簡易化、 コス トの 低廉化において望ましい。  By the way, even in this large-capacity optical recording medium, a large-capacity optical recording medium intended for so-called “live recording”, that is, only one recording is performed, and the recording is stably maintained for many years without being erased. There is an increasing need for a write-once, large-capacity optical recording medium that can be used. In the standards examined for the large-capacity optical recording medium described above, the recording film is based on a phase-change material, but as a recording film for a write-once-type large-capacity optical recording medium, as in CD-R. In addition, it is desirable to use an organic dye material in order to simplify the production and reduce the cost.
しかしながら、 このような追記型の大容量光記録媒体において 、 従来の各追記型の C D — Rや、 D V D - Rにおける知見を適用 することには問題がある。 However, in such a recordable large-capacity optical recording medium, However, there is a problem in applying the knowledge of conventional write-once CD-R and DVD-R.
すなわち、 大容量光記録媒体において用いられる光源としては 、 高記録密度化、 すなわち高解像度化から、 短波長 3 8 0 η π!〜 4 5 0 n m、 例えば 4 0 5 ± 5 n mの上述した青紫色光源を適用 するが、 記録膜として、 有機色素材料による構成とする場合、 そ の記録膜を構成する有機色素材料の特性が、 C D— Rや、 D V D ― Rと相違するものであって、 記録膜の有機色素材料の相違によ る光学定数の相違、 単に基板に形成される凹部、 例えばトラツキ ング用の連続したグループあるいは断続的グループの深さを、 こ の波長の相違に応じて変更するという対応では、 優れた再生特性 を得る最適化ができない。  That is, as a light source used in a large-capacity optical recording medium, short wavelength 380 ηπ! The above-mentioned blue-violet light source of up to 450 nm, for example, 450 ± 5 nm, is applied.If the recording film is made of an organic dye material, the characteristics of the organic dye material constituting the recording film may vary. , CD-R and DVD-R, which differ in the optical constants due to the difference in the organic dye material of the recording film, simply the recesses formed in the substrate, for example, a continuous group for tracking or Changing the depth of the intermittent group according to this difference in wavelength cannot optimize for obtaining excellent reproduction characteristics.
また、 大容量光記録媒体において、 トラック ピッチが従来の光 記録媒体におけるそれに比して格段に小さい。 例えば C Dにおけ る トラ ック ピッチは、 1 . 6 mであるに比し、 大容量光記録媒 体における トラ ック ピッチは、 例えば 0 . S β m程度である。 こ の場合、 問題となってく るのが、 ディ スク基板に形成される トラ ッキング用ダル一ブの側壁の傾きである。  Also, the track pitch of a large capacity optical recording medium is much smaller than that of a conventional optical recording medium. For example, while the track pitch in CD is 1.6 m, the track pitch in a large-capacity optical recording medium is, for example, about 0.0Sβm. In this case, the problem is the inclination of the side wall of the tracking dull formed on the disk substrate.
通常の C D等におけるグループあるいはピッ トの凹凸の形成は 、 ディ スク基板の作製において、 グループやピッ トに対応する凹 凸パターンを有するスタンパを用いた射出成形、 2 P法 (Photop olymeri zat ion 法) 等によつて形成するものである。  The formation of concavities and convexities of groups or pits in a normal CD or the like is achieved by injection molding using a stamper having a concavo-convex pattern corresponding to the groups or pits in the production of a disc substrate, and the 2P method (Photopolymeri zation method). ) And the like.
このスタ ンパの作製は、 原盤作製すなわちフォ ト レジス トを用 いたマスタ リ ングによるものであるが、 このマスタ リ ングにおけ るフォ ト レジス トに対するパターン露光は、 通常青色光、 紫外光 を用いる。 しかしながら、 上述した大容量光記録媒体におけるよ うに、 狭小な トラック ピッチにおいては、 上述した光によるパタ ―ン露光では、 グループの側壁面がゆるやかな傾斜面となつてし ま つ。 This stamper is manufactured by mastering, that is, by mastering using a photo resist. Pattern exposure on the photo resist in this master ring usually uses blue light or ultraviolet light. . However, in the case of a narrow track pitch, as in the above-described large-capacity optical recording medium, the pattern exposure by light described above causes the side wall surface of the group to form a gentle slope. Pine.
そこで、 フォ ト レジス トに対するパターン露光を、 電子線描画 によって行う とか、 光学系において、 集光レンズを露光面に近接 配置する、 いわゆる二ァフィ 一ルド構成とすることによってスポ ッ ト径の縮小化を図るなど、 グループの側壁面を急峻化する方法 などの改善化が図れているが、 未だ十分な再生出力の改善が図ら れていない。 発明の開示  Therefore, pattern exposure for the photo resist is performed by electron beam lithography, or the spot diameter is reduced by using a so-called two-field configuration in which a condenser lens is placed close to the exposure surface in the optical system. However, there has been no improvement in the reproduction output, such as a method of steepening the side wall surface of the group. Disclosure of the invention
本発明においては、 上述した追記型の大容量光記録媒体におい て、 高い再生出力をはじめとする、 すぐれた再生特性を有する光 記録媒体を提供するものである。  An object of the present invention is to provide an optical recording medium having excellent reproduction characteristics including high reproduction output in the above-mentioned write-once large-capacity optical recording medium.
本発明による光記録媒体は、 凹部が形成された基板上に、 少な く とも金属膜と有機色素材料による記録膜とが順次形成されて成 り、 3 8 0 n m〜 4 5 0 n m波長光によって少なく とも再生がな される光記録媒体であつて、 凹部の深さを 1 5 η π!〜 5 0 n mに 選定した構成とする。  The optical recording medium according to the present invention is formed by forming at least a metal film and a recording film made of an organic dye material on a substrate in which a concave portion is formed. An optical recording medium on which at least reproduction is performed, and the depth of the concave portion is 15 ηπ! ~ 50 nm.
また、 その記録膜の有機色素材料は、 3 8 0 n m〜 4 5 0 n m 波長光に対する記録前における屈折率 nが 1 . 9以上で、 記録後 において、 屈折率変化を生じる有機色素材料によって構成する。 記録膜は、 凹部の底面と、 凹部間の凸部の上面との双方におい て、 同一膜厚とする構成とする。  The organic dye material of the recording film is composed of an organic dye material having a refractive index n of 1.9 or more before recording with respect to light having a wavelength of 380 nm to 450 nm and causing a change in the refractive index after recording. I do. The recording film has the same thickness on both the bottom surface of the concave portion and the upper surface of the convex portion between the concave portions.
この本発明構成による光記録媒体によれば、 前述した位相変調 方式による再生がなされる追記型の大容量光記録媒体において、 最適な信号出力を得ることができた。 図面の簡単な説明  According to the optical recording medium of the present invention, an optimum signal output can be obtained in a write-once, large-capacity optical recording medium in which reproduction is performed by the above-described phase modulation method. BRIEF DESCRIPTION OF THE FIGURES
図 1 は、 本発明による光記録媒体の基本構造を示す断面図であ り、 図 2 は、 本発明の説明に供する光記録媒体の凹部の断面図で あり、 図 3 は、 本発明の説明に供するグループ幅と信号振幅の関 係を示す図であり、 図 4 は、 本発明による光記録媒体における記 録状態を示す模式的平面図であり、 図 5は、 本発明の説明に供す る光記録媒体の トラ ック長方向の再生信号レベルを示す図でありFIG. 1 is a sectional view showing the basic structure of an optical recording medium according to the present invention. FIG. 2 is a cross-sectional view of a concave portion of an optical recording medium for explaining the present invention, FIG. 3 is a diagram showing a relationship between a group width and a signal amplitude for explaining the present invention, and FIG. FIG. 5 is a schematic plan view showing a recording state in the optical recording medium according to the present invention, and FIG. 5 is a diagram showing a reproduction signal level in a track length direction of the optical recording medium for explanation of the present invention.
、 図 6 は、 本発明の説明に供する光記録媒体の信号振幅のグルー ブ深さ依存性を示す図であり、 図 7は、 本発明の説明に供する光 記録媒体の反射率および変調度のグループ深さ依存性を示す図で あり、 図 8 は、 本発明の説明に供する光記録媒体の信号振幅のグ ループ深さ依存性を示す図であり、 図 9 は、 本発明の説明に供す る光記録媒体の反射率および変調度のグループ深さ依存性を示す 図である。 発明を実施するための最良の形態 FIG. 6 is a diagram showing the dependence of the signal amplitude of the optical recording medium on the groove depth for explaining the present invention, and FIG. 7 is a graph showing the reflectance and the modulation factor of the optical recording medium for explaining the present invention. FIG. 8 is a diagram showing the group depth dependency, FIG. 8 is a diagram showing the group depth dependency of the signal amplitude of the optical recording medium used for explaining the present invention, and FIG. 9 is used for explaining the present invention. FIG. 4 is a diagram showing the group depth dependence of the reflectance and the degree of modulation of an optical recording medium according to the present invention. BEST MODE FOR CARRYING OUT THE INVENTION
本発明による光記録媒体は、 追記型の大容量光ディスクを構成 することができる、 すなわち光学系の開口数 N . A . が 0 . 8 5 ± 0 . 0 5、 波長ス力 3 8 0 n m〜 4 5 0 n mの青紫色領域のレ 一ザによる再生態様、 ないしは再生および記録態様を採ることが できる構成とするものである。  The optical recording medium according to the present invention can form a write-once, large-capacity optical disk, that is, the numerical aperture N.A. of the optical system is 0.85 ± 0.05, and the wavelength power is 380 nm or more. The configuration is such that a reproduction mode or a reproduction and recording mode using a laser in a blue-violet region of 450 nm can be adopted.
本発明による光記録媒体 1 0 は、 図 1にその一例の概略断面図 を示すように、 凹部 2例えばトラ ツキング用の連続的グループあ るいは断続的グループ等が形成された基板 1上に、 金属膜 3、 記 録膜 4、 誘電体膜 5が形成され、 この上に例えば厚さ 0 . 1 m m で光透過性樹脂膜がスビンコ一トによつて成膜された光透過保護 膜 6が被着形成されて成る。 '  An optical recording medium 10 according to the present invention, as shown in a schematic cross-sectional view of an example in FIG. 1, includes a concave portion 2 on a substrate 1 on which a continuous group for tracking or an intermittent group is formed. A metal film 3, a recording film 4, and a dielectric film 5 are formed, and a light-transmitting protective film 6 on which a light-transmitting resin film having a thickness of, for example, 0.1 mm is formed by a spin coat is formed. It is formed by adhesion. '
この光記録媒体 1 Q に対して、 光透過保護膜 6側から、 対物レ ンズ 1 1を介して上述の青紫色領域のレーザ光 9が入射される。 この構成において、 レーザ光 9の入射側とは反対側への突出部を 、 凹部 2 (グループ) と呼称し、 これら凹部 2間の、 レーザ光 9 の入射面に近接する側の面を凸部 7 (ラン ド) と呼称する。 The above-mentioned laser beam 9 in the blue-violet region is incident on the optical recording medium 1 Q from the light transmission protective film 6 side via the objective lens 11. In this configuration, the protruding part on the side The concave portion 2 (group) is referred to as the concave portion 2 (group), and the surface between these concave portions 2 on the side close to the laser light 9 incidence surface is referred to as the convex portion 7 (land).
そして、 特に本発明においては、 図 2で示す、 凹部 2の深さ D を 1 5 n m〜 5 0 n mとする。  In the present invention, in particular, the depth D of the recess 2 shown in FIG. 2 is set to 15 nm to 50 nm.
また、 記録膜 4 は、 記録前において、 屈折率 nが 1. 9以上の 特性を有し、 記録後において、 屈折率変化を生じる有機色素材料 によつて構成される。  The recording film 4 has a characteristic that the refractive index n is 1.9 or more before recording, and is made of an organic dye material that changes the refractive index after recording.
また、 この記録膜 4の膜厚は、 凹部すなわちグループ 2の底面 と、 凸部すなわちラン ド 7上面との双方において、 同一膜厚の例 えば蒸着膜によつて形成される。  The film thickness of the recording film 4 is formed by, for example, a vapor deposition film having the same film thickness in both the concave portion, that is, the bottom surface of the group 2 and the convex portion, that is, the upper surface of the land 7.
本発明による光記録媒体は、 そのラン ド.を記録領域とする。 これは、 記録膜を構成する有機色素材料を例えば蒸着した場合 、 凹部 (グループ) 内で記録膜の均質性が損なわれがちで、 この 不均質性はノィズの原因になることから、 ラン ドを記録領域とす る ものである。  The optical recording medium according to the present invention uses the land as a recording area. This is because, for example, when the organic dye material constituting the recording film is vapor-deposited, the homogeneity of the recording film tends to be impaired in the recesses (groups), and this inhomogeneity causes noise. It is a recording area.
本発明による光記録媒体を、 実施例を挙げて説明する。 例えば 波長 4 0 5 ± 5 n m、 N. A. 0. 8 5 ± 0. 0 5に関する光記 録媒体について考察すると、 凹部 2すなわちグループの平均幅 W は、 0. 1 0 m〜 0. 1 4 mとすることが望まれるものであ り、 実施例においては、 この平均幅 Wを 0. 1 4 mに設定した The optical recording medium according to the present invention will be described with reference to examples. For example, considering the optical recording medium with a wavelength of 4.55 ± 5 nm and NA 0.85 ± 0.05, the concave portion 2, that is, the average width W of the group is 0.10 m to 0.14 m. In this embodiment, the average width W is set to 0.14 m.
。 これは、 位相変調モー ドによる場合、 その凹部 (グループ) の 平均幅 Wと、 再生信号振幅の関係をみると、 図 3に示す曲線とな り、 再生信号振幅が最大となる平均幅 Wは、 0. 1 0 i m〜 0. 1 4 〃 mとなること、 このような細いグループを形成するには現 段階では技術的に工夫が必要で、 この範囲でなるべく広い幅に設 定することが有利であること、 また、 平均幅 Wが、 0. 1 4 m から多少ずれても、 凹部の深さ設定への影響は殆どないことに因 また、 トラック ピッチは、 主にクロス トークに関与するもので あるが、 本発明における目的とするところは、 最大出力を得るこ とであり、 本発明においては、 これを実現する構成、 具体的には グループ 2の深さを設定する構成とするものである。 . In the case of the phase modulation mode, the relationship between the average width W of the concave portion (group) and the reproduction signal amplitude is as shown in FIG. 3, and the average width W at which the reproduction signal amplitude is maximum is 0.10 im to 0.14〃m. To form such a thin group, technical measures are needed at this stage, and the width should be set as wide as possible in this range. The advantage is that even if the average width W deviates slightly from 0.14 m, there is almost no effect on the setting of the depth of the recess. The track pitch is mainly involved in crosstalk, but the purpose of the present invention is to obtain the maximum output. In the present invention, a configuration for realizing this is specifically described. Is configured to set the depth of group 2.
クロス トークについては、 グループ幅を狭く した位相変調モー ドあれば十分小さ くできるものであり、 実施例においては、 検出 信号を評価しやすいように、 クロス トークのない トラック ピッチ 0 . 6 mに固定した。  The crosstalk can be made sufficiently small if the phase modulation mode with a narrow group width is used.In this embodiment, the track pitch is fixed to 0.6 m without crosstalk so that the detection signal can be easily evaluated. did.
また、 上述したように、 グループの底面およびランドの上面の 記録膜 4の各膜厚は同等とされることから、 これらの面からの反 射光、 すなわち戻り光に対し、 同じ複素反射率を有する。  Further, as described above, since the film thicknesses of the recording film 4 on the bottom surface of the group and the top surface of the land are made equal, they have the same complex reflectance with respect to the reflected light, that is, the returned light from these surfaces. .
つま り、 反射光の位相情報としては、 単純に金属反射膜が成膜 されている場合と同じとすることができる。 この状態でグループ から得る トラ ッキングエラ一信号は、 グループの深さがス / 4 ( 具体的には例えば光記録媒体の基板がポリカーボネー ト (P C ) 樹脂であり、 波長; I = 4 0 0 n mにおいては、 グループ深さは 6 7 n m ) であるとき、 位相が丁度 だけずれることになる。  That is, the phase information of the reflected light can be the same as the case where the metal reflection film is simply formed. In this state, the tracking error signal obtained from the group has a group depth of 4/4 (specifically, for example, the substrate of the optical recording medium is made of polycarbonate (PC) resin, and the wavelength; I = 400 nm). In, when the group depth is 67 nm), the phase is just shifted.
したがって、 ラン ドとグループとからの反射光量が同一である 場合、 両者からの反射光は打ち消しあって反射光量 (戻り光量) は原理的にはゼロとなる。  Therefore, if the amount of reflected light from the land and the group is the same, the reflected light from both will cancel each other out, and the amount of reflected light (return light) will be zero in principle.
そして、 記録によつて記録膜の屈折率が変化することにより、 この記録部において位相のずれが生じる。 これによつて、 戻り光 すなわち反射光量が上昇し、 記録前の前述した反射光量がゼロの 状態から、 反射光量が大となる方向に変化するいわゆる Low to H igh による記録の読み出しがなされる。  Then, a change in the refractive index of the recording film due to recording causes a phase shift in the recording portion. As a result, the return light, that is, the amount of reflected light increases, and the recording is read by so-called Low to High, in which the amount of reflected light changes from the above-mentioned state of zero before recording to the direction in which the amount of reflected light increases.
しかしながら、 この場合、 未記録状態では、 反射光量がゼロで あることから、 記録前の状態ではフォーカシングゃトラツキング エラ一信号を得ることができず、 フォーカシングゃ トラッキング サ一ボをかけることができないという不都合や、 他の光記録媒体 との互換性が得られないという不都合が生じる。 However, in this case, since the amount of reflected light is zero in an unrecorded state, a focusing / tracking error signal cannot be obtained in a state before recording, and the focusing / tracking cannot be performed. Inconveniences such as inability to apply a servo and incompatibility with other optical recording media arise.
このような不都合に対処してグループの深さを上述した関係に よる 6 7 n mより も深くする場合は、 グループの形成において、 側壁 2 aに傾きが発生するという問題が生じて来る。  If the depth of the group is made deeper than 67 nm due to the above-described relationship to cope with such inconvenience, a problem arises in that the sidewall 2a is inclined in the formation of the group.
つまり、 現状では、 図 2で示す側壁 2 aの傾き t a n 0が 1〜 2であり、 これよりグループの深さを深く例えば 1 0 0 n mとす ると、 グループの平均幅 Wを上述した 0 . 1 4 m ( 1 4 0 n m ) とすると、 ラン ド幅が 1 4 0 n mとなり、 側壁の傾きの部分が 無視できない面積を占めることになる。  In other words, at present, the inclination tan 0 of the side wall 2a shown in FIG. 2 is 1 to 2, and if the depth of the group is set to be deeper, for example, 100 nm, the average width W of the group is 0 If it is 14 m (140 nm), the land width will be 140 nm, and the slope of the side wall will occupy a considerable area.
このように、 傾いた側壁が占める割合が大き く なると、 この部 分に成膜された記録膜からの信号成分が大きく なり、 ノイズが大 き く なる。  As described above, when the proportion occupied by the inclined side wall increases, the signal component from the recording film formed in this portion increases, and the noise increases.
そこで、 グループすなわち凹部 2の深さはできるだけ浅く して 、 側壁ができるだけ屹立する面とすることが望まれる。  Therefore, it is desirable that the depth of the group, that is, the concave portion 2 be as shallow as possible and that the side wall be as high as possible.
本発明においては、 このような点に対処した光記録媒体を構成 するものであり、 実施例を挙げて説明する。  The present invention constitutes an optical recording medium which addresses such a point, and will be described with reference to examples.
〔実施例 1〕  (Example 1)
この実施例においては、 ポリカーボネー ト樹脂を用いて、 射出 成形により、 表面に凹凸が形成された基板 1が用意される。 すな わち基板 1 の 1主面に、 深さ 2 0 n mの トラッキングガイ ド用グ ループによる凹部 2を形成し、 隣り合う凹部 2間を記録部とする 凸部すなわちラ ン ド 7を形成した。  In this embodiment, a substrate 1 having irregularities on its surface is prepared by injection molding using a polycarbonate resin. That is, a concave portion 2 is formed by a tracking guide group having a depth of 20 nm on one main surface of the substrate 1, and a convex portion, that is, a land 7 is formed between adjacent concave portions 2 as a recording portion. did.
この基板 1 の上述した凹凸が形成された主面上に、 厚さ 3 0 n mの A gによる金属膜 3が蒸着され、 この上に、 厚さ 2 5 n mに 有機色素材料による記録膜 4が蒸着によって成膜され、 更に、 こ の上に厚さ 1 0 O n mの S i Nによる誘電体膜 5が形成され、 こ の上に厚さ 1 0 0 mの紫外線硬化樹脂による光透過保護膜 6を 被覆して光記録媒体、 この例では光ディスクを作製した。 On the main surface of the substrate 1 on which the above-mentioned irregularities are formed, a metal film 3 of 30 nm in thickness of Ag is deposited, and a recording film 4 of an organic dye material with a thickness of 25 nm is formed thereon. A dielectric film 5 of 100 nm thick SiN is formed thereon, and a light-transmitting protective film of 100 m thick ultraviolet curable resin is formed thereon. 6 An optical recording medium, that is, an optical disk in this example was produced by coating.
この例において、 誘電体膜 5 は、 記録膜 4 と未硬化状態での光 透過保護膜 6 との反応を阻止する隔離層となる。  In this example, the dielectric film 5 serves as an isolation layer for preventing the reaction between the recording film 4 and the light-transmitting protective film 6 in an uncured state.
記録膜 4 と しては、 その有機色素の光学定数が、 複素屈折率の 実部を n (屈折率) 、 虚部を k (消光係数) と表記すると、 波長 For the recording film 4, the optical constants of the organic dyes are expressed as n (refractive index) for the real part of the complex refractive index and k (extinction coefficient) for the imaginary part.
4 0 5 n mに対する記録前における ( n, k) は、 ( 2. 3 5, 0. 0 5 ) であり、 記録後が、 ( 1. 5, 0 ) と変化する有機色 素材料ト リ フヱニルアミ ン誘導体を用いた。 (N, k) before recording for 405 nm is (2.35, 0.05), and after recording, the organic pigment material triphenylamine changes to (1.5, 0). Derivative was used.
この場合、 金属膜 3の厚さを十分大としていることから、 記録 膜 4 において、 記録前および記録後において、 反射率に殆ど変化 なく、 この反射率は共に 5 0 %程度であつた。  In this case, since the thickness of the metal film 3 was sufficiently large, the reflectance of the recording film 4 before and after recording hardly changed, and the reflectance was about 50% in both cases.
この実施例による光ディ スクに対して図 4に概略平面図を示す よ うに、 ラ ン ド 7に 0. 6 9 〃 ] 1マ一ク ]\[と 0. 6 9 〃 mスぺ —スの繰り返しによって記録し、 これを再生した。 この再生信号 レベルの測定結果を図 5 に示す。  As shown in a schematic plan view in FIG. 4 for the optical disc according to this embodiment, the land 7 has 0.69〃] 1 mark] \ [and 0.69〃m space. This was recorded and reproduced. Figure 5 shows the measurement results of the reproduced signal level.
この場合、 信号レベルは光ディ スクに対して入射する光強度を 1 と して規格化したものであり、 横軸に、 トラック長方向位置 X を採ったものである。  In this case, the signal level is normalized with the light intensity incident on the optical disc as 1, and the horizontal axis represents the position X in the track length direction.
図 5で見られるように、 再生レーザ光が記録マーク Mを通過す るときにマ一ク M中の反射光の位相が変化することで周辺からの 反射光との干渉が生じ、 戻り光量が低下していることが分かる。 これは基本的には、 C D— Rや、 D V D— Rの記録モー ドと同じ であ。。  As can be seen in FIG. 5, when the reproduction laser beam passes through the recording mark M, the phase of the reflected light in the mark M changes, causing interference with the reflected light from the surroundings, and the amount of returned light is reduced. It can be seen that it has decreased. This is basically the same as the CD-R or DVDR-R recording mode. .
このように、 理想的な再生信号が得られた。  Thus, an ideal reproduced signal was obtained.
〔実施例 2〕  (Example 2)
この実施例においては、 実施例 1 と同じ条件で、 グループ 2 の 深さ Dを 1 0 n m, 2 0 n m , 3 0 n m, 4 0 n m , 5 0 n mと 変更した光ディ スクを作製した。 これら深さ Dを変更した各光デ イ スクによる再生信号のマーク中心部とスペース中心部の間の信 号強度差、 すなわち信号振幅を縦軸に採った結果を図 6に示す。 図 6 に示すように、 実施例 1 の膜構成において、 信号振幅は、 グループ深さ Dが 2 0 n m前後で最大値を採り、 これより深さが 小、 あるいは大で信号振幅が低下している。 In this example, under the same conditions as in Example 1, optical disks were produced in which the depth D of group 2 was changed to 10 nm, 20 nm, 30 nm, 40 nm, and 50 nm. Each light source with these depths D changed Figure 6 shows the signal strength difference between the center of the mark and the center of the space in the reproduced signal due to the disk, that is, the signal amplitude taken on the vertical axis. As shown in FIG. 6, in the film configuration of Example 1, the signal amplitude reaches its maximum value when the group depth D is around 20 nm, and the signal amplitude decreases when the group depth D is smaller or larger. I have.
すなわち、 グループ深さ Dが 2 O n m近傍で、 最も大きな変調 度が実現できることが分かる。  In other words, it can be seen that the largest modulation depth can be realized when the group depth D is around 2 Onm.
ところで、 再生信号特性は、 信号振幅のみによって最適化され る ものではなく、 反射率が低すぎては、 フォ一カスサ一ボや トラ ッキングサ一ボをかけることができないとか、 電気回路における アンプノイズや、 光源のショ ッ トノィズが大となってサ一ボが不 安定になるという問題が生じる。  By the way, the reproduction signal characteristics are not optimized only by the signal amplitude. If the reflectivity is too low, focus and tracking servos cannot be applied. However, there is a problem that the shot noise of the light source becomes large and the servo becomes unstable.
このような問題が回避されてサ一ボを確実にかけるためには、 最低 1 0 %以上の戻り光量が必要となる。  In order to avoid such a problem and to apply the servo reliably, a return light amount of at least 10% or more is required.
一方、 光記録媒体、 例えば光ディ スクにおける信号の変調度は 0 . 5以上あることが望ま しいとされている。  On the other hand, it is said that it is desirable that the modulation degree of a signal in an optical recording medium, for example, an optical disc be 0.5 or more.
この変調度とは、 信号振幅を記録前の反射率で割ったものであ り、 信号振幅が大き くても反射率が高い場合、 記録後の戻り光は 理想的に低下しない。  This degree of modulation is obtained by dividing the signal amplitude by the reflectance before recording. If the reflectance is high even if the signal amplitude is large, the return light after recording does not ideally decrease.
図 7 は、 グループの深さと、 記録前の反射率 (曲線 7 1 ) と変 調度 (曲線 7 2 ) との関係を測定した結果を示したものである。  Figure 7 shows the results of measuring the depth of the group and the relationship between the reflectance (curve 71) and the modulation (curve 72) before recording.
反射率は、 グループの深さが深くなるにつれて、 記録前の位相 のずれが 7Γに近づく ために低下する。 この反射率が上述した 1 0 %以上であるためには、 グループの深さ Dは 4 0 n m以下に選定 すればよいことが分かる。  The reflectivity decreases as the depth of the group increases, as the phase shift before recording approaches 7Γ. It can be seen that in order for this reflectivity to be at least 10% as described above, the depth D of the group should be selected to be at most 40 nm.
そして、 変調度を上述した 0 . 5以上とする深さ Dは、 1 5 η mとなる。 つま り、 グループすなわち凹部 2の深さ Dは、 1 5 η π!〜 4 0 n mに選定することによつて理想的な再生信号が得られる。 The depth D at which the degree of modulation is 0.5 or more is 15 ηm. That is, the depth D of the group, that is, the recess 2 is 15 ηπ! An ideal reproduction signal can be obtained by selecting a wavelength of about 40 nm.
また、 記録膜 4の膜厚は、 この実施例では約 2 5 n mと したが 、 この膜厚は、 C D — Rの場合の 2 0 0 n m以上の膜厚であるこ とに比較すると、 きわめて薄いものであり、 このように薄い膜厚 で十分な変調が取れる構成は、 従来の構成では得難いものである 。 言い換えれば、 本発明によれば、 記録膜を薄く構成することが できるという効果をもたらすものである。  The film thickness of the recording film 4 was about 25 nm in this embodiment, but this film thickness is extremely thin as compared with a film thickness of 200 nm or more in the case of CD-R. Therefore, such a configuration in which a sufficient modulation can be obtained with a thin film thickness is difficult to obtain with a conventional configuration. In other words, according to the present invention, there is an effect that the recording film can be made thin.
〔実施例 3〕  (Example 3)
この実施例においては、 光記録媒体に対する光照射の戻り光量 を大とする場合である。  In this embodiment, the return light amount of light irradiation on the optical recording medium is increased.
戻り光量を大とするには金属膜 3 の膜厚を大とすればよいが、 この膜厚が余り大となると凹部 2すなわちグループ内を埋込んで しまう ことになり、 ノイズの原因となる。 この実施例においては 、 膜構成を変更した。  To increase the amount of return light, the thickness of the metal film 3 may be increased. However, if the thickness is too large, the recess 2, that is, the inside of the group is buried, which causes noise. In this example, the film configuration was changed.
すなわち、 実施例 1 におけるように、 グルーブが形成された P C (ポリ 力一ボネー ト) 樹脂基板 1上に、 厚さ 3 0 n mの A gに よる金属膜 3、 有機色素材料による厚さ 2 5 n mの記録膜 4、 S That is, as in Example 1, on a PC (polycarbonate) resin substrate 1 having grooves formed thereon, a 30 nm-thick Ag metal film 3 and an organic dye material 25 nm recording film 4, S
1 Nによる誘電体膜 5、 光透過保護膜 6を成膜するものであるが 、 この実施例においては、 S i Nによる誘電体膜 5 の膜厚と、 記 録膜 4 の有機色素材料を変更した。 すなわち誘電体膜 5の膜厚をIn this embodiment, the dielectric film 5 and the light transmission protection film 6 are formed by 1 N. In this embodiment, the film thickness of the dielectric film 5 by SiN and the organic dye material of the recording film 4 are used. changed. That is, the thickness of the dielectric film 5 is
2 0 n mとし、 記録膜 4の有機色素材料の基体を ト リフヱニルァ ミ ン誘導体で記録前の波長 4 0 5 n mに対する屈折率 nが 2 . 3 0、 消光係数 0 . 1 3 4 と した。 20 nm, the substrate of the organic dye material of the recording film 4 was made of a triphenylamine derivative, the refractive index n for a wavelength of 450 nm before recording was 2.30, and the extinction coefficient was 0.134.
この場合のグループ深さ Dと再生信号の振幅との関係の測定結 果を図 8 に示す。  Figure 8 shows the measurement results of the relationship between the group depth D and the reproduced signal amplitude in this case.
また、 図 9 にグループ深さ Dと、 反射率 (曲線 9 1 ) と変調度 (曲線 9 2 ) との関係の測定結果を示す。 これら図 8および図 9から明らかなように、 振幅に関しては実 施例 2 と殆ど変わることがなく、 その最大値を示すグループ深さ Dが幾分シフ 卜 して 2 5 n m程度となる。 しかしながら、 反射率 が全般的に高く され、 反射率 1 5 %を示すグループ深さが 5 0 n m程度、 変調度 0. 5以上の範囲が 2 5 n m程度となる。 FIG. 9 shows the measurement results of the group depth D and the relationship between the reflectance (curve 91) and the modulation factor (curve 92). As is apparent from FIGS. 8 and 9, the amplitude is almost the same as that of the second embodiment, and the group depth D showing the maximum value is slightly shifted to about 25 nm. However, the reflectivity is generally increased, and the group depth at which the reflectivity is 15% is about 50 nm, and the range where the modulation factor is 0.5 or more is about 25 nm.
つまり、 グループすなわち凹部 2の深さ Dは、 2 5 n m〜 5 0 n mに選定することによって理想的な再生信号が得られる。  That is, an ideal reproduction signal can be obtained by selecting the depth D of the group, that is, the concave portion 2 from 25 nm to 50 nm.
すなわち、 実施例 2および実施例 3から基板 1におけるグルー ブすなわち凹部 2の深さは、 1 5 n m〜 5 0 n mにおいて、 膜構 成の選定によつて良好な再生信号が得られる光記録媒体が得られ るものである。  That is, according to the second and third embodiments, the depth of the groove, that is, the concave portion 2 in the substrate 1 is in the range of 15 nm to 50 nm, and an optical recording medium from which a good reproduction signal can be obtained by selecting a film configuration. Is obtained.
すなわち、 本発明によれば、 上述した短波長すなわち 3 8 0 η 111〜 4 5 0 11 111、 高 . Α. すなわち 0 . 8 5 ± 0 . 0 5による 光学系に適用できる光記録媒体が実現され、 高密度記録が可能と なる。  That is, according to the present invention, an optical recording medium that can be applied to an optical system having the above-described short wavelength, ie, 380 η 111 to 450 0 11111, and high., Ie, 0.85 ± 0.05, is realized. As a result, high-density recording becomes possible.
尚、 本発明構成において、 光記録媒体は、 上述した実施例に限 定されるものではなく、 変形変更を行うことができるものであり 、 例えば記録膜の成膜を蒸着によらない成膜方法をとることもで さる。  Incidentally, in the configuration of the present invention, the optical recording medium is not limited to the above-described embodiment, but can be modified and changed. You can also take
上述したように、 本発明による有機色素材料を記録膜として用 いる光記録媒体は、 その基板凹部の深さを浅く選定して十分な再 生出力が得られる構成とすることができたことから、 基板の作製 が容易となり、 また、 凹部の深さが深い場合の、 側壁の傾き、 荒 れによるノィズの発生の問題が回避される。  As described above, the optical recording medium using the organic dye material according to the present invention as a recording film can be configured so as to obtain a sufficient reproduction output by selecting the depth of the concave portion of the substrate to be small. In addition, the fabrication of the substrate is facilitated, and the problem of generation of noise due to inclination and roughness of the side wall when the depth of the concave portion is large is avoided.
また、 このような基板において、 記録膜の膜厚を 2 0 n mとい う膜厚にできることから、 コス トの低減化、 スループッ トの改善 が図られ、 コス トの低減化を図ることができるものであり、 更に 熱特性の最適化が容易になり、 蒸着による成膜が可能となる。 このようにして、 本発明によれば、 上述した短波長、 高 N . A . による光学系に適用できる光記録媒体が実現され、 高密度記録 、 すなわち大容量の光記録媒体を構成することができるものであ る。 In addition, since the thickness of the recording film can be reduced to 20 nm on such a substrate, cost can be reduced, throughput can be improved, and cost can be reduced. In addition, the thermal characteristics can be easily optimized, and a film can be formed by vapor deposition. In this way, according to the present invention, an optical recording medium applicable to the above-described short wavelength, high NA optical system can be realized, and high-density recording, that is, a large-capacity optical recording medium can be configured. It can be done.

Claims

請 求 の 範 囲 The scope of the claims
1. 凹部が形成された基板上に、 少なく とも金属膜と有機色素材 料による記録膜とが順次形成されて成り、 波長が 3 8 0 n m〜 4 5 0 n mの光によって少なく とも再生がなされる光記録媒体にあ つて、 1. At least a metal film and a recording film made of an organic color material are sequentially formed on a substrate having a concave portion, and at least reproduction is performed by light having a wavelength of 380 nm to 450 nm. Optical recording media
上記凹部の深さが 1 5 n m〜 5 0 n mに選定され、  The depth of the recess is selected from 15 nm to 50 nm,
上記記録膜の有機色素材料は、 記録前において上記波長に対す る屈折率 nが 1. 9以上で、 記録後において屈折率変化を生じる 有機色素材料とされ、  The organic dye material of the recording film is an organic dye material having a refractive index n of 1.9 or more at the wavelength before recording and causing a change in the refractive index after recording,
上記記録膜は、 上記凹部の底面と、 上記凹部間の凸部の上面と の双方において、 同一膜厚とされたことを特徵とする光記録媒体 o  An optical recording medium characterized in that the recording film has the same thickness on both the bottom surface of the concave portion and the upper surface of the convex portion between the concave portions.
2. 上記記録膜は、 上記有機色素材料の蒸着膜によって形成され たことを特徵とする請求の範囲第 1項に記載の光記録媒体。  2. The optical recording medium according to claim 1, wherein the recording film is formed by a deposition film of the organic dye material.
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