WO2003065769A1 - Back sealing member for organic electroluminescence device, glass substrate for organic electroluminescence device, organic electroluminescence device, and methods for manufacturing sealing member and glass substrate - Google Patents
Back sealing member for organic electroluminescence device, glass substrate for organic electroluminescence device, organic electroluminescence device, and methods for manufacturing sealing member and glass substrate Download PDFInfo
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- WO2003065769A1 WO2003065769A1 PCT/JP2002/013674 JP0213674W WO03065769A1 WO 2003065769 A1 WO2003065769 A1 WO 2003065769A1 JP 0213674 W JP0213674 W JP 0213674W WO 03065769 A1 WO03065769 A1 WO 03065769A1
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- Prior art keywords
- glass substrate
- organic
- sealing member
- back sealing
- glass
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Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/02—Details
- H05B33/04—Sealing arrangements, e.g. against humidity
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/841—Self-supporting sealing arrangements
Definitions
- the present invention relates to a back sealing member for an organic electroluminescence element, a glass substrate for an organic electroluminescence element, an organic electroluminescence element, and a method for manufacturing the sealing member and a glass substrate.
- Organic electroluminescence (EL) devices have an organic multilayer film consisting of a hole transport layer, a light emitting layer, and an electron transport layer interposed between an anode and a cathode. This is a display element that performs charge injection recombination-type light-emitting operation. In addition to lowering the driving voltage, it can realize a wider range of emission colors due to the variety of organic materials.
- the organic EL device is used as a light source of an organic EL display.
- FIG. 5 is a cross-sectional view showing a schematic structure of a conventional organic EL device.
- a conventional organic EL element 100 has a glass substrate 101, an organic EL element 102 formed on the surface of the glass substrate 101, and an organic EL element 102 on both sides.
- a back sealing plate for organic EL elements (back sealing member) 105 bonded to the surface of the glass substrate 101 via the organic EL drive pattern forming portion 43.
- the material of the glass substrate 101 is soda glass or non-alkali glass
- the material of the rear sealing plate 105 is glass substrate 101 for metals such as SUS (stainless steel). Since the difference in thermal expansion between the back sealing plate 105 and the glass substrate 101 deteriorates due to a large difference in thermal expansion between them, soda glass or alkali glass is used.
- a plurality of matrix-like integratedly arranged organic EL elements 100 are used for mass production.
- the sealing plate member composed of the sealing plate 105 is bonded to a glass substrate member composed of a plurality of glass substrates 101 arranged integrally in the same matrix, the individual Glass that can be easily cut as the organic EL element 100 is preferable.
- soda lime glass is used as the material for the glass substrate 101 and the sealing plate 105
- the alkaline components elute from the glass over time, and the alkaline components elute from the glass. Accordingly, there is a problem that the organic EL element 102 is deteriorated and the life of the organic EL element 102 is shortened.
- alkali-free glass has low moldability compared to soda-lime glass because it has a low softening temperature, although the alkali components are less eluted.
- An object of the present invention is to provide a rear sealing member for an organic EL element capable of extending the life of an organic EL element, a glass substrate for an organic EL element, an organic electroluminescent element, Invention disclosure for providing a method for manufacturing a glass substrate
- an organic electroluminescent device sealed on a glass substrate so as to cover an organic electroluminescent element formed on the glass substrate.
- Back sealing for luminescence element In the member, the back surface sealing member is made of soda lime glass, and has a top surface layer and an inside layer following the top surface layer, and the alkali metal ion concentration of the top surface layer is the inside layer.
- the present invention provides a back surface sealing member for an organic electroluminescence element, wherein the back surface sealing member has a lower concentration than the metal ion concentration.
- the thickness of the outermost surface layer is 1 nm or more and 1 m or less.
- the thickness of the outermost surface layer is 10 nm or more and 100 nm or less.
- the average value of the alkaline earth metal ion concentration in the outermost surface layer is larger than the average value of the alkaline earth metal ion concentration in the inner layer. It is preferably at least 80%.
- an organic electroluminescent element is formed on an upper surface, and the organic electroluminescent element covers the organic electroluminescent element.
- the glass substrate for an organic electroluminescence element in which the back sealing member is sealed as described above the glass substrate is made of soda lime glass, and is formed of the outermost surface layer and the second surface layer. And an inner layer, wherein the concentration of the metallic ion of the outermost surface layer is lower than the concentration of the metallic ion of the inner layer.
- a glass substrate for an element is provided.
- the thickness of the outermost surface layer is 1 nm or more and 1 ⁇ m or less.
- the thickness of the outermost surface layer is 10 nm or more and 100 nm or less.
- the average value of the alkaline earth metal ion concentration in the outermost surface layer is an alkaline earth metal ion in an inner layer following the outermost surface layer. It is preferable that the concentration is 80% or more with respect to the average value of the ion concentration.
- a back sealing member for manufacturing a back sealing member for an electoru luminescence element by heating and molding a glass substrate made of soda lime glass, the heat molded glass
- a method for manufacturing a back surface sealing member which comprises subjecting a base plate to a dealkalization treatment.
- the dealkalization treatment comprises immersing the glass plate in warm water.
- the temperature of the hot water is 70 ° C. or more and 100 ° C. or less.
- the polyvalent metal ion is an aluminum ion.
- the hot water has a pH of 3 or more and 10 or less.
- an organic electroluminescent device is formed on an upper surface, and the organic electroluminescent device covers the organic electroluminescent device.
- the dealkalizing treatment is performed on the glass base plate.
- it consists of immersing it in warm water.
- the temperature of the hot water is 70 ° C. or more and 100 I or less.
- the polyvalent metal ion is an aluminum ion.
- the hot water has a pH of 3 or more and 10 or less.
- a back sealing member for an organic electroluminescence element according to the first aspect of the present invention.
- An organic EL luminescent element is provided.
- the glass substrate for an organic electroluminescent element according to the second aspect of the present invention is provided.
- An organic electroluminescent element is provided.
- a back sealing member for an organic electroluminescence element according to the first aspect of the present invention And a glass substrate for an organic electroluminescent element according to the above aspect.
- An organic electroluminescent element is provided.
- FIG. 1 is a cross-sectional view of an organic EL device including a back sealing member and a glass substrate according to the first embodiment of the present invention.
- FIG. 2 is a cross-sectional view of an organic EL device including a back sealing member and a glass substrate according to a modified example of the first embodiment of the present invention.
- FIG. 3 is a cross-sectional view of an organic EL device including a back sealing member and a glass substrate according to a second embodiment of the present invention.
- FIG. 4 is a cross-sectional view of an organic EL device including a back sealing member and a glass substrate according to a third embodiment of the present invention.
- FIG. 5 is a cross-sectional view showing a schematic structure of a conventional organic EL device. BEST MODE FOR CARRYING OUT THE INVENTION
- the present inventor has conducted intensive studies to achieve the above object, and as a result, the back sealing member and the glass substrate of the soda lime glass back sealing member for an organic EL element and the glass substrate are respectively the most preferred.
- the concentration of alkali metal ions in the surface layer is lower than the concentration of alkali metal ions in the inner layer following the outermost layer, preferably when the thickness of the outermost layer is lnm or more and 1 m or less. More preferably, when the thickness of the outermost surface layer is 1 O nm or more and 100 nm or less, deterioration of the organic EL element due to alkali metal ions can be prevented. It was found that the lifetime of the organic EL element could be extended.
- the present inventor provides a manufacturing method for manufacturing a back sealing member for an organic EL element and a glass substrate by heating and molding a glass base plate made of soda lime glass.
- a de-alkaline treatment preferably, a treatment of immersing the glass base plate in warm water, it is possible to prevent the deterioration of the organic EL element due to the alkali metal ion, and the organic EL element is also used. It has been found that a back sealing member and a glass substrate that can extend the life of the element can be provided at low cost.
- the present invention has been made based on the results of the above research.
- FIG. 1 is a cross-sectional view of an organic EL device including a back sealing member for an organic EL device and a glass substrate according to a first embodiment of the present invention.
- an organic EL device 10 including a back sealing member for an organic EL device and a glass substrate is a soda lime glass substrate 11 for an organic EL device, and a glass substrate.
- An organic EL laminated film 12 formed on one surface of the substrate 11 and a pair of organic EL driving patterns formed on the surface of the glass substrate 11 at the outer peripheral edge of the organic EL laminated film 12 A glass substrate through an organic EL drive pattern forming section 13 by an adhesive layer 14 made of an ultraviolet curable epoxy resin or the like so as to house the organic EL laminated film 12 inside thereof.
- a back sealing plate (back sealing member) 20 made of soda lime glass adhered on the surface of No. 1.
- the glass substrate 11 is provided with a dealkalized part 15 on which the outermost layer has been dealkalized, and the rear sealing plate 20 has a dealkalized part on which the outermost layer has been dealkalized.
- Part 2 1 is provided.
- the back sealing plate 20 has a concave portion 23 formed in a part thereof, and the concave portion 23 stores a desiccant 24 such as an oxide barrier.
- the thickness of each of the glass substrate 11 and the back sealing plate 20 is 0.7 mm, preferably 0.3 to 1.1 mm. If the thickness of each of the glass substrate 11 and the rear sealing plate 20 is less than 0.3 mm, the strength of each of the glass substrate 11 and the rear sealing plate 20 becomes insufficient, and If the thickness exceeds 1.1 mm, the organic EL element 10 becomes heavy.
- the glass substrate 11 is formed by subjecting a soda lime glass substrate of the same shape and the same size as the glass substrate 11 to a dealkaline treatment, and the rear sealing plate 20 is first made of a soda lime glass.
- the glass base plate is formed by heat molding, and the heat formed glass base plate is subjected to dealkalization treatment. As a result, the alkali metal ion concentration of the dealkalized part 15 of the glass base plate 11 is increased.
- the alkali metal ion concentration of the inner layer 16 is smaller than the alkali metal ion concentration of the inner layer 16, and the alkali metal ion concentration of the alkali-free portion 21 of the rear sealing plate 20 is changed to the alkali metal ion concentration of the inner portion 22. It becomes smaller than the ion concentration.
- the heat forming is performed by, for example, hot pressing using a forming die.
- the hot press is carried out by inserting soda lime glass of 80 mm x 80 mm in thickness of 0.9 mm between the upper and lower molds, putting it into a heating furnace at 950 ° C, and molding. After cooling to 200 ° C or less, the molded product is paid out. Since the surface of the hot press forming die has fine irregularities of 1 to 10 m in Ra, the back sealing plate 20 formed by hot pressing has Fine irregularities are transferred to the surface, and the non-glare effect is enhanced.
- the above-mentioned degraving is performed by immersing the glass plate in hot water. This makes it possible to dissolve the alkali metal ions in the outermost surface layer of the glass plate into warm water.
- the temperature of the hot water is preferably not less than 70 ° C and not more than 100 ° C (boiling point). If the temperature of the hot water is set to less than 70, the efficiency of the decalcification process is reduced, and boiling exceeds 100 ° C (boiling point).
- the time of the dealkalization treatment depends on the required performance of the glass substrate 11 and the back sealing plate 20, but is preferably 1 minute or more and 3 hours or less.
- the polyvalent metal ion when a polyvalent metal ion is added to the above-mentioned warm water, the polyvalent metal ion is adsorbed on the surface of the glass skeleton, which is the skeletal component of the glass of the glass plate, to prevent the melting of the silica force. Therefore, damage to the outermost surface layer of the glass base plate can be suppressed, and the dealkalizing treatment can be performed efficiently.
- the polyvalent metal ion aluminum nitrate or aluminum ion (trivalent) is preferable.
- aluminum ion has high silica dissolution inhibiting effect and high safety. It is inexpensive.
- the concentration of the polyvalent metal ion is preferably about 10 ppm to about 0.1%.
- the pH of the warm water is preferably 3 or more and 10 or less. Hot water If the pH is 3 or less, the alkaline earth metal ion is easily eluted from the glass plate, and if the pH exceeds 10, the alkali metal ion becomes difficult to elute. The dissolution of silica is promoted, and damage is easily generated in the outermost surface layer of the glass plate.
- the thickness and the metal ion concentration of the outermost layer 15 of the outermost layer of the glass substrate 11 and the outermost layer 21 of the outermost layer of the rear sealing plate 20 are as follows. Each is as follows.
- the glass substrate 1 made of soda lime glass is used. Even if it is 1, the alkali metal ion is less likely to elute on the surface of the glass substrate 11.
- the rear sealing plate 20 is also made of soda lime glass.
- the sealing plate 20 It hardly elutes on the surface of the sealing plate 20, and the deterioration of the organic EL laminated film 12 due to alkali metal ions eluted from the glass substrate 11 and the back sealing plate 20 can be prevented. In addition, the formation of dark spots in the organic EL laminated film 12 is prevented. Since the material of the glass substrate 11 and the material of the back sealing plate 20 are both soda lime glass, the adhesiveness between the back sealing plate 20 and the glass substrate 11 is improved. be able to.
- the thickness of the dealkalized parts 15 and 21 is preferably 1 nm or more and 1 nm or less, more preferably 10 nm or more and 100 nm or less. If the thickness of the decalcified portions 15 and 21 is less than 1 nm, the elution of alkali metal ions cannot be sufficiently prevented.If the thickness exceeds 10 m, the glass substrates 11 and 21 cannot be removed. The surface strength of the back sealing plate 20 decreases.
- the average of the alkaline earth metal ion concentrations in the dealkalized part 15 is The average value of the alkaline earth metal ion concentration of the removal part 21 is compared with the average value of the alkaline earth metal ion concentration of the inner layer 16.
- the average value of the earth metal ion concentration is 80% or less, the surface of each of the dealkalized parts 15 and 21 becomes porous. Alkali metal ions easily accumulate and easily move, so if the concentration of alkaline earth metal ions in the de-alkali parts 15 and 21 drops significantly, Alkali metal ions are easily eluted from the glass substrate 11 and the back sealing plate 20.
- the average value of the alkaline earth metal ion concentration in the dealkalized part 15 is larger than the average value of the alkaline earth metal ion concentration in the inner layer 16.
- the average value of the alkaline earth metal ion concentration of 1 is preferably 80% or more with respect to the average value of the alkaline earth metal ion concentration of the inner layer 22.
- FIG. 2 is a cross-sectional view of an organic EL device including a back sealing member for an organic EL device and a glass substrate according to a modification of the first embodiment of the present invention.
- an organic EL element 30 including a back sealing member for an organic EL element and a glass substrate according to a modification of the first embodiment of the present invention has the same structure.
- the configuration is basically the same as that of the organic EL element 10 in FIG. 1.
- the organic EL element 10 is replaced by a glass substrate 11 on a glass substrate 31, and a back sealing plate (back sealing member) 2 0 is replaced with a back sealing plate 32, and the same components are denoted by the same reference numerals, and redundant description will be omitted. Only different portions will be described below.
- the organic EL element 30 shown in Fig. 2 is a sealed structure in which a plurality of soda-lime glass back sealing plates 32 are integrally arranged in a matrix for mass production of the organic EL element 30.
- a plurality of soda lime glass substrates 31 each comprising an organic EL laminated film 12 and an organic EL driving pattern forming portion 13 were integrally arranged in the same matrix in the plate member. It is formed by bonding to a glass substrate member with an adhesive layer 14 and then cutting into individual organic EL elements 30.
- the glass substrate 31 has, on its outermost surface layer, a dealkalized part 33 similar to the dealkalized part 15 of the glass substrate 11 in FIG. Unlike the glass substrate 11 in that the rear sealing plate 32 is not provided, the rear sealing plate 32 is provided on the outermost surface layer thereof with the same dealkalizing part 21 as the dealkalizing portion 21 of the rear sealing plate 20 in FIG. It is different from the rear sealing plate 20 in that it is provided with a recessed portion 35 but is not provided with a decalcified portion 35 on the cut end surface 36. .
- the cut end face 34 of the glass substrate 31 not having the alkali removal part 33 and the cut end face 36 of the back sealing plate 32 not having the alkali removal part 35 are formed. However, since the organic EL element 12 is outside the portion where the organic EL element 12 is sealed, the organic EL element 12 does not deteriorate even if the cut end faces 34 and 36 are not subjected to the removal processing. .
- FIG. 3 is a cross-sectional view of an organic EL device including a back sealing member for an organic EL device and a glass substrate according to a second embodiment of the present invention.
- the glass substrate 41 is made of soda lime glass, and has the same shape and size as the glass substrate 11 in the organic EL element 10 in FIG.
- the SiO 2 film 43 is laminated on the surface.
- the back sealing plate 42 is made of soda lime glass, has the same shape and the same size as the back sealing plate 20 of the organic EL element 10 of FIG. 1, and has a SiO 2 film on its surface. 4 4 are stacked.
- the S i 0 2 film 4 3 does not need to be laminated on the entire surface of the glass substrate 4 1, and in the organic EL element 40, the surface defining the inside 4 5 where the organic EL laminated film 12 is formed rather i as long as is stacked, also, S i 0 2 film 4 4 needs to be laminated on the entire surface of the rear seal plate 4 2 rather than, laminated on the surface defining the interior 4 5 Anything can be used.
- the organic EL element 4 according to the second embodiment 0, has formed the rear sealing member 4 2 and the glass substrate 4 both 1 'S i 0 2 film, the back sealing member 4 2 ⁇ Pi glass substrate 4 1 only, preferably the back sealing member 4 2 only S i 0 2 film may be formed.
- FIG. 4 is a cross-sectional view of an organic EL device including a back sealing member for an organic EL device and a glass substrate according to a third embodiment of the present invention.
- an organic EL element 50 including a back surface sealing member for an organic EL element and a glass substrate has a configuration basically similar to that of the organic EL element 10 of FIG. It is the same, and differs from the first embodiment in that the glass substrate and the back sealing plate are subjected to the chemical strengthening treatment.
- the same components will be denoted by the same reference numerals, without redundant description, and only different portions will be described below.
- the glass substrate 51 is made of soda lime glass and has the same shape and the same size as the glass substrate 11 of the organic EL element 10 of FIG.
- No. 1 a chemical strengthening treatment has been performed, and Na (sodium) atoms on the surface are converted into K (ca) atoms.
- the back sealing plate 52 is made of soda lime glass, has the same shape and the same size as the back sealing plate 20 of the organic EL element 10 in FIG. 1, and the back sealing plate 52 is A chemical strengthening treatment has been applied, and: Na (Na) atoms on the surface have been converted to K (Ca) atoms.
- the entire surface of the glass substrate 51 does not need to be subjected to the above-mentioned chemical strengthening treatment, and the surface defining the inside 53 of the organic EL element 50 where the organic EL laminated film 12 is formed is not required.
- the back sealing plate 52 need not have been subjected to the above-described chemical strengthening treatment, and the surface defining the interior 53 may be sufficient. It is only necessary that the steel be subjected to a chemical strengthening treatment.
- the glass substrate 51 is subjected to a chemical strengthening treatment, and the Na on the surface is converted to.
- the back sealing plate 52 is chemically strengthened. Is applied, and Na on the surface is converted into K.
- the alkali metal ions are prevented from being eluted from the glass substrate 51 and the rear sealing plate 52, and the organic EL laminated film using the alkali metal ions is prevented. 12 can be prevented from being deteriorated, and thus the formation of dark spots in the organic EL layered film 12 can be prevented.
- the back sealing member 52 and the glass substrate 51 are both subjected to the chemical strengthening treatment, but one of the back sealing member 52 and the glass substrate 51 is used. Only, preferably, only the back sealing member 52 may be subjected to chemical strengthening treatment.
- the organic EL element 10 having a back sealing plate 20 made of soda lime glass (Examples 6 to 10, Comparative Examples 5 to 8, Table 2) and the rear sealing plate 20 were subjected to a de-alkali treatment.
- An organic EL device 10 (Comparative Example 9) having a back sealing plate 20 made of soda lime glass in which the thickness of the alkali-removed portion 21 was reduced to 0 mm without application was prepared.
- the amount of precipitated alkali metal salt was evaluated and the dark spot generation time of the organic EL laminated film 12 was evaluated.
- Back sealing plate strength was evaluated for Comparative Examples 1 to 5 and Comparative Examples 1 to 4 and 9.
- the evaluation of the crystal deposition amount of the alkali metal salt was performed by exposing each of the above Examples 1 to 10 and Comparative Examples 1 to 9 for 120 hours under an environment of an ambient temperature of 60 ° C and a humidity of 80%. After that, by using a dark field observation with an optical microscope (X20.0 magnification), the metal salt deposited on the surface of each back sealing plate 20 of the above Examples 1 to 10 and Comparative Examples 1 to 9 was examined. The number of crystal grains (glass grains) was counted in the field of view, and ranks A to E were used. The evaluation shows that the amount of precipitated alkali metal salt crystals increases from evaluation A to evaluation E.
- Back sealing plate 20 is organic EL laminated film 1 2 etc. 13674
- Table 1 shows the evaluation of the crystal deposition amount of the alkali metal salt, the evaluation of the dark spot generation time of the organic EL laminated film 12 and the evaluation of the strength of the back sealing plate for Examples 1 to 5 and Comparative Examples 1 to 4 and 9. The result is shown.
- Example 1 the overall evaluations of Examples 1 to 5 and Comparative Examples 1 to 4 and 9 are given in order of the thickness of 2 mm of the alkali-free part. It is shown as From the results of the evaluation of the crystal deposition amount of the alkali metal salt, the evaluation of the dark spot generation time of the organic EL laminated film 12, and the evaluation of the strength of the rear sealing plate in Table 1, the thickness of the alkali-free portion 21 is 1 nm or more and 1 or less. It was found that it is more preferable that the thickness be 10 nm or more and 100 nm or less.
- Table 2 shows the results of the evaluation of the crystal deposition amount of the alkali metal salt and the evaluation of the dark spot generation time of the organic EL laminated film 12 for Examples 6 to 10 and Comparative Examples 5 to 9 described above.
- the inner layer of the alkaline-earth metal ion concentration average value of the alkali-free metal part 21 of the rear sealing plate 20 was found. It has been found that the ratio of 22 to the average value of the alkaline earth metal ion concentration is preferably 80% or more.
- the example a 1 N 0 predetermined time de-alkali treatment varies with warm water with and without addition of 3 (processing example 2) six Soviet one Dalai Mugarasu made subjected
- the organic EL element 10 having the back sealing plate 20 (Examples 16 to 18 and Comparative Examples 13 to 15 and Table 4) was used for de-alkali treatment on the back sealing plate 20.
- 10 kinds of solutes subjected to dealkalization treatment (treatment example 3) at a predetermined temperature and for a predetermined time with warm water having different pH, respectively.
- the organic EL device 1 0 with Dara Lee arm glass rear sealing plate 2 0 (Example 1 9-2 3, Comparative Example 1 6-2 0, Table 5) was created.
- Table 3 shows the relationship between the temperature of the hot water for dealkalization treatment in Treatment Example 1 and the thickness of the dealkalized portion 21 of the rear sealing plate 20.
- Table 3 shows that the temperature of the hot water for the dealkalization treatment is preferably 70 or more.
- Table 5 shows the thickness of the dealkalized part 21 of the rear sealing plate 20 and the alkaline earth metal of the dealkalized part 21 with respect to the pH of the hot water for deallocation by treatment example 3.
- 2 shows the ratio of the average ion concentration to the average value of the internal 22 of the alkaline earth metal ions, and the relationship between the appearance inspection of the surface of the back sealing plate 20.
- Example 1923 the comprehensive evaluations of Example 1923 'and Comparative Example 1620 were evaluated as evaluation ⁇ , evaluation ⁇ , and evaluation X, starting with the preferred pH as the de-alkaline treatment hot water. Shown. From Table 5, it was found that it is preferable that the pH of the hot water for dealkalization treatment is 3 or more and 10 or less.
- the evaluation of the crystal deposition amount of the alkali metal salt, the evaluation of the dark spot generation time of the organic EL laminated film 12, the evaluation of the strength of the back sealing plate, the evaluation of the efficiency of the alkali removal treatment, and the evaluation of the back sealing The appearance inspection of the surface of the plate 20 was performed on the organic EL element 10 with the thickness of the rear part 21 of the back sealing plate 20 different from that of the embodiment 1 23 and the comparative example 120. Similarly, the thickness of the dealkalized portion 21 of the glass substrate 11 was different from that of the back sealing plate 20 of Example 123 and Comparative Example 120 in the same manner.
- the present inventor made a glass substrate 41 made of soda lime glass and having Sio 2 laminated on the surface thereof, and made of soda lime glass and made of soda lime glass.
- S i 0 2 organic EL element 4 0 in FIG. 3 with a rear seal plate 4 2 are stacked (example 2 4)
- Contact with and chemical strengthening treatment which is made ⁇ Pi Sodarai Mugarasu is applied to
- the glass substrate 51 whose surface Na has been converted to K, and which is made of V—Dry glass and has been subjected to a chemical strengthening treatment, and the surface Na has been converted to K.
- the organic EL device 50 (Example 25) of FIG. 4 including the back surface sealing plate 52 was produced.
- Examples 24 and 25 were stored in a driving state under a high-temperature environment at an ambient temperature of 100 X until dark spots were generated.
- the dark spot generation time was evaluated by measuring the time of the dark spot.
- Table 6 shows the results of the dark spot occurrence time evaluation.
- Table 6 shows that in the organic EL elements 40 and 50, in the organic EL elements 40 and 50, the glass substrates 41 and 51 and the back sealing plates 42 and 52 are made of soda lime glass and have Si 0 2 on the surface.
- the glass substrate 41 when laminated, and when made of soda lime glass and subjected to chemical strengthening treatment and Na on the surface is converted to K, the glass substrate 41, even in a high temperature environment, It can be seen that alkaline metal ions can be prevented from being eluted from 51 and the rear sealing plates 42, 52, and the dark spot generation time can be prolonged.
- the thickness of the outermost surface layer of the back sealing member Is not less than 100 nm and not more than 100 nm, it is possible to further suppress the elution of metal ions from the surface of the back sealing member.
- the average value of the alkaline earth metal ion concentration in the outermost surface layer of the back sealing member is changed to the alkaline earth metal of the inner layer following the outermost surface layer. Since the average value of the metal ion concentration is 80% or more, the elution of alkaline metal ions from the surface of the back sealing member can be further suppressed.
- the glass substrate of the present invention is made of soda lime glass, and the concentration of alkali metal ions in the outermost surface layer is lower than the concentration of alkali metal ions in the inner layer following the uppermost surface layer. Therefore, elution of alkali metal ions from the surface of the glass substrate can be suppressed, and deterioration of the organic EL element due to alkali metal ions can be prevented. Can be increased.
- the polyvalent metal ion is added to the hot water, the polyvalent metal ion is added to the surface of the silica, which is a skeletal component of soda lime glass. Adsorption prevents silica from dissolving, thereby suppressing damage to the outermost surface layer of the back sealing member.
- the pH of the hot water is 3 or more and 10 or less, dissolution of silica can be prevented, and thus the outermost surface layer of the back sealing member can be prevented. Damage can be suppressed.
- the soda lime glass base plate that has been formed by heating is subjected to dealkalizing treatment, so that the life of the organic EL element can be increased. Can be provided at low cost.
- the dealkalizing process is a process of immersing the sodalime glass base plate in warm water. It can be applied efficiently.
- the temperature of the hot water is not less than 70 ° C. and not more than 100 ° C., so that the soda lime glass base plate is more efficiently removed. Can be applied in a targeted manner.
- the organic EL device of the present invention since the back sealing member of the present invention is provided, elution of the alkali metal ions from the surface of the back sealing member is suppressed, and the organic EL device is formed of alkali metal ions. The deterioration of the device can be prevented, and the life of the organic EL device can be prolonged.
- the organic EL device of the present invention since the glass substrate of the present invention is provided, elution of alkali metal ions from the surface of the glass substrate is suppressed, and deterioration of the organic EL device due to the alkali metal ions is suppressed. Thus, the lifetime of the organic EL device can be increased.
- the organic EL device of the present invention since the organic EL device includes the back sealing member of the present invention and the glass substrate of the present invention, the back sealing member of the metal ion and the respective surfaces of the glass substrate are provided. It is possible to prevent the organic EL element from deteriorating due to the alkali metal ions by suppressing the elution from the organic EL element, and also to prolong the life of the organic EL element.
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Abstract
Description
明 細 書 有機エレク ト ロルミ ネ ッ センス素子用背面封止部材、 及び有機エレク ト 口ルミ ネ ッセンス素子用ガラス基板、 有機エレク ト ロルミ ネ ッ センス素 子、 並びに該封止部材及ぴガラス基板の製造方法 技術分野 Description: Back sealing member for organic electroluminescent element, glass substrate for organic electroluminescent element, organic electroluminescent element, and sealing member and glass substrate Manufacturing method Technical field
本発明は、 有機ェレク トロルミ ネ ッセンス素子用背面封止部材、 及び 有機エレク トロルミ ネ ッ センス素子用ガラス基板、 有機エレク トロルミ ネッセンス素子、並びに該封止部材及びガラス基板の製造方法に関する。 背景技術 The present invention relates to a back sealing member for an organic electroluminescence element, a glass substrate for an organic electroluminescence element, an organic electroluminescence element, and a method for manufacturing the sealing member and a glass substrate. Background art
有機エ レク ト ロルミ ネ ッ センス ( Electroluminescence: 電界発光、 以 下 「E L」 という) 素子は、 正孔輸送層、 発光層及び電子輸送層から成 る有機多層膜を陽極と陰極との間に介在させて電荷注'入再結合型の発光 動作を行う表示素子であり、 駆動電圧の低電圧化に加えて、 有機材料の 多様性による発光色の広領域化を実現するこ とができる。 上記有機 E L 素子は、 有機 E Lディ スプレイの発光源と して使用されている。 Organic electroluminescence (EL) devices have an organic multilayer film consisting of a hole transport layer, a light emitting layer, and an electron transport layer interposed between an anode and a cathode. This is a display element that performs charge injection recombination-type light-emitting operation. In addition to lowering the driving voltage, it can realize a wider range of emission colors due to the variety of organic materials. The organic EL device is used as a light source of an organic EL display.
図 5 は、 従来の有機 E L素子の概略構造を示す断面図である。 FIG. 5 is a cross-sectional view showing a schematic structure of a conventional organic EL device.
図 5 において、 従来の有機 E L素子 1 0 0 は、 ガラス基板 1 0 1 と、 ガラス基板 1 0 1 の面上に形成された有機 E L素子 1 0 2 と、 有機 E L 素子 1 0 2の両側においてガラス基板 1 0 1 の面上に形成された一対の 有機 E L駆動パタ一ン形成部 1 0 3 と、 有機 E L素子 1 0 2 をその内側 に収容する よ う に接着層 1 0 4 によ つて有機 E L駆動パターン形成部 4 3 を介してガラス基板 1 0 1の面上に接着された有機 E L素子用背面封 止板 (背面封止部材) 1 0 5 とから成る。 ガラス基板 1 0 1 の材料は、 ソーダガラス又は無アルカ リ ガラスであ り 、 背面封止板 1 0 5 の材料と しては、 S U S (ステン レス鋼) 等の金 属ではガラス基板 1 0 1 との熱膨張差が大き く なつて背面封止板 1 0 5 のガラス基板 1 0 1 への接着性が悪化するので、 ソーダガラス又は無ァ ルカ リ ガラスが使用される。 In FIG. 5, a conventional organic EL element 100 has a glass substrate 101, an organic EL element 102 formed on the surface of the glass substrate 101, and an organic EL element 102 on both sides. A pair of organic EL driving pattern forming portions 103 formed on the surface of the glass substrate 101 and an adhesive layer 104 so that the organic EL element 102 is accommodated inside the organic EL driving pattern forming portion 103. A back sealing plate for organic EL elements (back sealing member) 105 bonded to the surface of the glass substrate 101 via the organic EL drive pattern forming portion 43. The material of the glass substrate 101 is soda glass or non-alkali glass, and the material of the rear sealing plate 105 is glass substrate 101 for metals such as SUS (stainless steel). Since the difference in thermal expansion between the back sealing plate 105 and the glass substrate 101 deteriorates due to a large difference in thermal expansion between them, soda glass or alkali glass is used.
また、 ガラス基板 1 0 1 と背面封止板 1 0 5 の材料と しては、 有機 E L素子 1 0 0 の量産化のために、 マ ト リ ッ クス状に一体的に配列された 複数の封止板 1 0 5から成る封止板部材を、 同じ く マ ト リ ッ クス状に一 体的に配列された複数のガラス基板 1 0 1 から成るガラス基板部材に接 着した後に、 個々の有機 E L素子 1 0 0 と して切断する こ とが容易であ るガラスが好ま しい。 In addition, as a material for the glass substrate 101 and the rear sealing plate 105, a plurality of matrix-like integratedly arranged organic EL elements 100 are used for mass production. After the sealing plate member composed of the sealing plate 105 is bonded to a glass substrate member composed of a plurality of glass substrates 101 arranged integrally in the same matrix, the individual Glass that can be easily cut as the organic EL element 100 is preferable.
しかしながら、 ガラス基板 1 0 1 及び封止板 1 0 5の材料と してソー ダラ イ ムガラス を使用する場合は、 経時的にガラス中からアルカ リ成分 が溶出 し、 ガラス中から溶出するアルカ リ成分によ り有機 E L素子 1 0 2が劣化し、 有機 E L素子 1 0 2の寿命が短く なる という問題がある。 また、 無アルカ リ ガラスは、 アルカ リ成分の溶出が少ないものの軟化 温度が高いので、 ソーダライムガラス と比較して成型性が劣る。 However, when soda lime glass is used as the material for the glass substrate 101 and the sealing plate 105, the alkaline components elute from the glass over time, and the alkaline components elute from the glass. Accordingly, there is a problem that the organic EL element 102 is deteriorated and the life of the organic EL element 102 is shortened. In addition, alkali-free glass has low moldability compared to soda-lime glass because it has a low softening temperature, although the alkali components are less eluted.
本発明の目的は、 有機 E L素子の寿命 増大させる こ とができ る有機 E L素子用背面封止部材、 及び有機 E L素子用ガラス基板、 有機エ レク ト ロルミ ネ ッセンス素子、 並びに該封止部材及びガラス基板の製造方法 を提供する こ と にある 発明め開示 An object of the present invention is to provide a rear sealing member for an organic EL element capable of extending the life of an organic EL element, a glass substrate for an organic EL element, an organic electroluminescent element, Invention disclosure for providing a method for manufacturing a glass substrate
上記目的を達成するために、 本発明の第 1 の態様によれば、 ガラス基 板に形成された有機エレク ト ロルミ ネ ッセンス素子を覆う よ う に前記ガ ラス基板上に封着された有機ェレク ト ロルミ ネ ッ センス素子用背面封止 部材において、 前記背面封止部材は、 ソーダライ ムガラス製であ り 、 最 表面層と、 該最表面層に続く 内側層とを有し、 前記最表面層のアルカ リ 金属イ オン濃度が前記内側層のアル力 リ金属イ オ ン濃度よ り も低いこ と を特徴とする有機ェレク ト ロルミ ネ ッ セ ンス素子用背面封止部材が提供 される。 To achieve the above object, according to a first aspect of the present invention, an organic electroluminescent device sealed on a glass substrate so as to cover an organic electroluminescent element formed on the glass substrate. Back sealing for luminescence element In the member, the back surface sealing member is made of soda lime glass, and has a top surface layer and an inside layer following the top surface layer, and the alkali metal ion concentration of the top surface layer is the inside layer. The present invention provides a back surface sealing member for an organic electroluminescence element, wherein the back surface sealing member has a lower concentration than the metal ion concentration.
本発明の第 1 の態様において、 前記最表面層の厚みが 1 n m以上 1 m以下である こ とが好ま しい。 In the first embodiment of the present invention, it is preferable that the thickness of the outermost surface layer is 1 nm or more and 1 m or less.
本発明の第 1 の態様において、 前記最表面層の厚みが 1 0 n m以上 1 0 0 n m以下である こ とが好ま しい。 In the first aspect of the present invention, it is preferable that the thickness of the outermost surface layer is 10 nm or more and 100 nm or less.
本発明の第 1 の態様において、 前記最表面層におけるアル力 リ土類金 属ィ ォン濃度の平均値が、 前記内側層のアル力 リ土類金属ィ ォ ン濃度の 平均値に対して 8 0 %以上である こ とが好ま しい。 In the first aspect of the present invention, the average value of the alkaline earth metal ion concentration in the outermost surface layer is larger than the average value of the alkaline earth metal ion concentration in the inner layer. It is preferably at least 80%.
上記目的を達成するために、 本発明の第 2 の態様によれば、 上面に有 機ェレク ト ロルミ ネ ッ セ ンス素子が形成される と共に前記有機ェレク ト 口ルミ ネ ッ セ ンス素子を覆う よ う に背面封止部材が封着された有機エレ ク ト ロルミ ネ ッ セ ンス素子用ガラス基板において、 前記ガラス基板は、 ソーダラ イ ムガラス製であ り、 最表面層と、 該最表面層に続く 内側層と を有し、 前記最表面層のアル力 リ金属ィ ォン濃度が前記内側層のアル力 リ金属ィ ォン濃度よ り も低いこ と を特徴とする有機ェレク ト ロルミ ネ ッ センス素子用ガラス基板が提供される。 To achieve the above object, according to a second aspect of the present invention, an organic electroluminescent element is formed on an upper surface, and the organic electroluminescent element covers the organic electroluminescent element. In the glass substrate for an organic electroluminescence element in which the back sealing member is sealed as described above, the glass substrate is made of soda lime glass, and is formed of the outermost surface layer and the second surface layer. And an inner layer, wherein the concentration of the metallic ion of the outermost surface layer is lower than the concentration of the metallic ion of the inner layer. A glass substrate for an element is provided.
本発明の第 2 の態様において、 前記最表面層の厚みが 1 n m以上 1 μ m以下である こ とが好ま しい。 In the second aspect of the present invention, it is preferable that the thickness of the outermost surface layer is 1 nm or more and 1 μm or less.
本発明の第 2 の態様において、 前記最表面層の厚みが 1 0 n m以上 1 0 0 n m以下である こ とが好ま しい。 In the second aspect of the present invention, it is preferable that the thickness of the outermost surface layer is 10 nm or more and 100 nm or less.
本発明の第 2 の態様において、 前記最表面層におけるアル力 リ土類金 属イ オン濃度の平均値が、 前記最表面層に続く 内側層のアルカ リ土類金 属ィ ォン濃度の平均値に対して 8 0 %以上である こ とが好ま しい。 . 上記目的を達成するために、 本発明の第 3 の形態によれば、 ガラス基 板に形成された有機ェレク ト ロルミ ネ ッセンス素子を覆う よ う に前記ガ ラス基板上に封着された有機エレク ト 口ルミ ネ ッセンス素子用背面封止 部材を、 ソ一ダライムガラス製のガラス素板を加熱成型する こ とによ り 製造する背面封止部材の製造方法において、 前記加熱成型されたガラス 素板に脱アルカ リ処理を施すこ と を特徴とする背面封止部材の製造方法 が提供される。 In the second aspect of the present invention, the average value of the alkaline earth metal ion concentration in the outermost surface layer is an alkaline earth metal ion in an inner layer following the outermost surface layer. It is preferable that the concentration is 80% or more with respect to the average value of the ion concentration. To achieve the above object, according to a third aspect of the present invention, there is provided an organic EL device sealed on a glass substrate so as to cover an organic EL device formed on the glass substrate. In the method of manufacturing a back sealing member for manufacturing a back sealing member for an electoru luminescence element by heating and molding a glass substrate made of soda lime glass, the heat molded glass There is provided a method for manufacturing a back surface sealing member, which comprises subjecting a base plate to a dealkalization treatment.
本発明の第 3 の態様において、 前記脱アルカ リ処理は前記ガラス素板 を温水に浸漬する こ とから成るこ とが好ま しい。 In the third aspect of the present invention, it is preferable that the dealkalization treatment comprises immersing the glass plate in warm water.
本発明の第 3 の態様において、 前記温水の温度が 7 0 °C以上 1 0 0 °C 以下である こ とが好ま しい。 In the third aspect of the present invention, it is preferable that the temperature of the hot water is 70 ° C. or more and 100 ° C. or less.
本発明の第 3 の態様において、 前記温水に多価の金属イオンを添加す る こ とが好ま しい。 In the third aspect of the present invention, it is preferable to add a polyvalent metal ion to the warm water.
本発明の第 3 の態様において、 前記多価の金属イ オ ンがアルミ ニウム イ オンであるこ とが好ま しい。 In the third aspect of the present invention, it is preferable that the polyvalent metal ion is an aluminum ion.
本発明の第 3 の態様において、 前記温水の p Hが 3 以上 1 0以下であ る こ とが好ま しい。 In the third aspect of the present invention, it is preferable that the hot water has a pH of 3 or more and 10 or less.
上記目的を達成するために、 本発明の第 4 の態様によれば、 上面に有 機エレク ト 口ルミ ネ ッセンス素子が形成される と共に前記有機エレク ト 口ルミ ネ ッ センス素子を覆う よ う に背面封止部材が封着された有機エレ ク ト ロルミ ネ ッ センス素子用ガラス基板を、 ソーダライ ムガラス製のガ ラス素板を加熱成型する こ とによ り製造するガラス基板の製造方法にお いて、 前記加熱成型されたガラス素板に脱アルカ リ処理を施すこ と を特 徴とするガラス基板の製造方法が提供される。 In order to achieve the above object, according to a fourth aspect of the present invention, an organic electroluminescent device is formed on an upper surface, and the organic electroluminescent device covers the organic electroluminescent device. A method of manufacturing a glass substrate for manufacturing an organic electroluminescence element glass substrate having a back sealing member sealed thereto by heating and molding a glass base plate made of soda lime glass. Further, there is provided a method for producing a glass substrate, which comprises subjecting the heat-molded glass base plate to a de-alkaline treatment.
本発明の第 4 の態様において、 前記脱アルカ リ処理は前記ガラス素板 を温水に浸漬する こ とから成るこ とが好ま しい。 In the fourth aspect of the present invention, the dealkalizing treatment is performed on the glass base plate. Preferably, it consists of immersing it in warm water.
本発明の第 4の態様において、 前記温水の温度が 7 0 °C以上 1 0 0 I: 以下である こ とが好ま しい。 In the fourth aspect of the present invention, it is preferable that the temperature of the hot water is 70 ° C. or more and 100 I or less.
本発明の第 4の態棣において、 前記温水に多価の金属イ オ ンを添加す るこ とが好ま しい。 In the fourth aspect of the present invention, it is preferable to add a polyvalent metal ion to the warm water.
本発明の第 4の態様において、 前記多価の金属イ オンがアルミ ニ ウム イオンである こ とが好ま しい。 In the fourth embodiment of the present invention, it is preferable that the polyvalent metal ion is an aluminum ion.
本発明の第 4の態様において、 前記温水の p Hが 3以上 1 0以下であ る こ とが好ま しい。 In the fourth embodiment of the present invention, it is preferable that the hot water has a pH of 3 or more and 10 or less.
さ ら に上記目的を達成するために、 本発明の第 5 の態様によれば、 本 発明の第 1 の態様に係る有機ェレク ト ロルミ ネ ッ センス素子用背面封止 部材を備える こ と を特徴とする有機エレク ト 口ル ミ ネ ッ センス素子が提 供される。 In order to further achieve the above object, according to a fifth aspect of the present invention, there is provided a back sealing member for an organic electroluminescence element according to the first aspect of the present invention. An organic EL luminescent element is provided.
さ ら に上記目的を達成するために、 本発明の第 6 の態様によれば、 本 発明の第 2 の態様に係る有機ェレク ト ロルミ ネ ッ センス素子用ガラス基 板を備える こ と を特徴とする有機ェレク ト ロルミ ネ ッセンス素子が提供 される。 In order to further achieve the above object, according to a sixth aspect of the present invention, the glass substrate for an organic electroluminescent element according to the second aspect of the present invention is provided. An organic electroluminescent element is provided.
上記目的を達成するために、 本発明の第 7 の実施の形態によれば、 本 発明の第 1 の態様に係る有機エレク ト ロルミ ネ ッ センス素子用背面封止 部材と、 本発明の第 2 の態様に係る有機エレク ト 口ルミ ネ ッ セ ンス素子 用ガラス基板と を備える こ とを特徴とする有機エレク ト ロルミ ネ ッ セン ス素子が提供される。 図面の簡単な説明 To achieve the above object, according to a seventh embodiment of the present invention, a back sealing member for an organic electroluminescence element according to the first aspect of the present invention, And a glass substrate for an organic electroluminescent element according to the above aspect. An organic electroluminescent element is provided. BRIEF DESCRIPTION OF THE FIGURES
図 1 は、 本発明の第 1 の実施の形態に係る背面封止部材及ぴガラス基 板を備える有機 E L素子の断面図である。 4 FIG. 1 is a cross-sectional view of an organic EL device including a back sealing member and a glass substrate according to the first embodiment of the present invention. Four
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図 2 は、 本発明の第 1 の実施の形態の変形例に係る背面封止部材及ぴ ガラス基板を備える有機 E L素子の断面図である。 FIG. 2 is a cross-sectional view of an organic EL device including a back sealing member and a glass substrate according to a modified example of the first embodiment of the present invention.
図 3 は、 本発明の第 2 の実施の形態に係る背面封止部材及ぴガラス基 板を備える有機 E L素子の断面図である。 FIG. 3 is a cross-sectional view of an organic EL device including a back sealing member and a glass substrate according to a second embodiment of the present invention.
図 4 は、 本発明の第 3 の実施の形態に係る背面封止部材及ぴガラス基 板を備える有機 E L素子の断面図である。 FIG. 4 is a cross-sectional view of an organic EL device including a back sealing member and a glass substrate according to a third embodiment of the present invention.
図 5 は、 従来の有機 E L素子の概略構造を示す断面図である。 発明を実施するための最良の形態 FIG. 5 is a cross-sectional view showing a schematic structure of a conventional organic EL device. BEST MODE FOR CARRYING OUT THE INVENTION
本発明者は、 上記目的を達成すべく 鋭意研究を行った結果、 ソーダラ ィ ムガラス製の有機 E L素子用背面封止部材及ぴガラス基板において、 背面封止部材及びガラス基板は、 各々、 その最表面層のアルカ リ金属ィ ォン濃度が、 最表面層に続く 内側層のァルカ リ金属ィ ォン濃度よ り も低 く 、 好ま し く は、 最表面層の厚みが l n m以上 1 m以下であ り 、 さ ら に好ま し く は、最表面層の厚みが 1 O n m以上 1 O O n m以下である と、 アルカ リ金属イ オンによる有機 E L素子の劣化を防止するこ とができ、 も って有機 E L素子の寿命を増大させる こ とができ る こ とを見出 した。 また、 本発明者は、 有機 E L素子用背面封止部材及びガラス基板を、 ソ一ダライ ムガラス製のガラス素板を加熱成形する こ と によ り製造する 製造方法において、 加熱成形されたガラス素板に脱アルカ リ処理、 好ま し く は、 ガラス素板を温水に浸漬する処理を施すと、 アルカ リ金属ィ ォ ンによる有機 E L素子の劣化を防止する こ とができ、 も つて有機 E L素 子の寿命を増大させる こ とができ る背面封止部材及ぴガラス基板を安価 に提供する こ とができ る こ と を見出した。 The present inventor has conducted intensive studies to achieve the above object, and as a result, the back sealing member and the glass substrate of the soda lime glass back sealing member for an organic EL element and the glass substrate are respectively the most preferred. The concentration of alkali metal ions in the surface layer is lower than the concentration of alkali metal ions in the inner layer following the outermost layer, preferably when the thickness of the outermost layer is lnm or more and 1 m or less. More preferably, when the thickness of the outermost surface layer is 1 O nm or more and 100 nm or less, deterioration of the organic EL element due to alkali metal ions can be prevented. It was found that the lifetime of the organic EL element could be extended. Further, the present inventor provides a manufacturing method for manufacturing a back sealing member for an organic EL element and a glass substrate by heating and molding a glass base plate made of soda lime glass. When the plate is subjected to a de-alkaline treatment, preferably, a treatment of immersing the glass base plate in warm water, it is possible to prevent the deterioration of the organic EL element due to the alkali metal ion, and the organic EL element is also used. It has been found that a back sealing member and a glass substrate that can extend the life of the element can be provided at low cost.
本発明は、 上記研究の結果に基づいてなされたものである。 The present invention has been made based on the results of the above research.
以下、 本発明の実施の形態に係る有機 E L素子用背面封止部材及ぴガ ラス基板を備える有機 E L素子を図面を参照して説明する。 Hereinafter, a back sealing member and an organic EL element according to an embodiment of the present invention will be described. An organic EL device having a glass substrate will be described with reference to the drawings.
図 1 は、 本発明の第 1 の実施の形態に係る有機 E L素子用背面封止部 材及ぴガラス基板を備える有機 E L素子の断面図である。 FIG. 1 is a cross-sectional view of an organic EL device including a back sealing member for an organic EL device and a glass substrate according to a first embodiment of the present invention.
図 1 において、 本発明の第 1 の実施の形態に係る有機 E L素子用背面 封止部材及びガラス基板を備える有機 E L素子 1 0 は、 ソーダラ イ ム製 有機 E L素子用ガラス基板 1 1 と、 ガラス基板 1 1 の一方の面上に形成 された有機 E L積層膜 1 2 と、 有機 E L積層膜 1 2 の外周縁部において ガラス基板 1 1 の面上に形成された一対の有機 E L駆動パター ン形成部 1 3 と、 有機 E L積層膜 1 2 をその内側に収容する よ う に紫外線硬化型 のエポキシ樹脂等の接着層 1 4 によつて有機 E L駆動パタ一ン形成部 1 3 を介してガラス基板 1 1 の面上に接着されたソーダライムガラス製背 面封止板 (背面封止部材) 2 0 とから成る。 ガラス基板 1 1 は、 その最 表面層に脱アルカ リ処理がなされた脱アルカ リ部 1 5 を備え、 背面封止 板 2 0 は、 その最表面層に脱アルカ リ処理がなされた脱アルカ リ部 2 1 を備える。 また背面封止板 2 0 は、 その一部に凹部 2 3 が形成されてお り 、 凹部 2 3 には酸化バリ ゥム等の乾燥剤 2 4が収納されている。 In FIG. 1, an organic EL device 10 including a back sealing member for an organic EL device and a glass substrate according to the first embodiment of the present invention is a soda lime glass substrate 11 for an organic EL device, and a glass substrate. An organic EL laminated film 12 formed on one surface of the substrate 11 and a pair of organic EL driving patterns formed on the surface of the glass substrate 11 at the outer peripheral edge of the organic EL laminated film 12 A glass substrate through an organic EL drive pattern forming section 13 by an adhesive layer 14 made of an ultraviolet curable epoxy resin or the like so as to house the organic EL laminated film 12 inside thereof. 11. A back sealing plate (back sealing member) 20 made of soda lime glass adhered on the surface of No. 1. The glass substrate 11 is provided with a dealkalized part 15 on which the outermost layer has been dealkalized, and the rear sealing plate 20 has a dealkalized part on which the outermost layer has been dealkalized. Part 2 1 is provided. The back sealing plate 20 has a concave portion 23 formed in a part thereof, and the concave portion 23 stores a desiccant 24 such as an oxide barrier.
ガラス基板 1 1 及ぴ背面封止板 2 0の各々の厚さは、 0 . 7 m mであ り 、 0 . 3〜 1 . 1 m mが好ま しい。 ガラス基板 1 1 及び背面封止板 2 0 の各々の厚さが 0 . 3 m m未満である と、 ガラス基板 1 1 及び背面封 止板 2 0 の各々の強度が不十分と な り 、 上記厚さが 1 . 1 m mを超える と有機 E L素子 1 0 が重く なるからである。 The thickness of each of the glass substrate 11 and the back sealing plate 20 is 0.7 mm, preferably 0.3 to 1.1 mm. If the thickness of each of the glass substrate 11 and the rear sealing plate 20 is less than 0.3 mm, the strength of each of the glass substrate 11 and the rear sealing plate 20 becomes insufficient, and If the thickness exceeds 1.1 mm, the organic EL element 10 becomes heavy.
ガラス基板 1 1 は、 ガラス基板 1 1 と同一形状且つ同一サイズのソー ダラ イ ム ガラス製ガラス素板に脱アルカ リ処理を施して形成し、 背面封 止板 2 0 は、 まず、 ソーダライ ム製ガラス素板を加熱成形し、 この加熱 成形されたガラス素板に脱アルカ リ処理を施すこ と によ り形成する。 こ れに よ り 、 ガラス素板 1 1 の脱アルカ リ部 1 5 のアルカ リ金属イ オ ン濃 度が内側層 1 6 のアルカ リ金属ィ ォン濃度よ り小さ く な り 、 背面封止板 2 0 の脱アルカ リ部 2 1 のアルカ リ金属イオン濃度が内側部 2 2 のアル カ リ金属イ オン濃度よ り小さ く なる。 The glass substrate 11 is formed by subjecting a soda lime glass substrate of the same shape and the same size as the glass substrate 11 to a dealkaline treatment, and the rear sealing plate 20 is first made of a soda lime glass. The glass base plate is formed by heat molding, and the heat formed glass base plate is subjected to dealkalization treatment. As a result, the alkali metal ion concentration of the dealkalized part 15 of the glass base plate 11 is increased. The alkali metal ion concentration of the inner layer 16 is smaller than the alkali metal ion concentration of the inner layer 16, and the alkali metal ion concentration of the alkali-free portion 21 of the rear sealing plate 20 is changed to the alkali metal ion concentration of the inner portion 22. It becomes smaller than the ion concentration.
上記加熱成形は、 例えば成形型を用いた熱間プレスによ り行う 。 熱間 プレスは、 上下の成形型間に 8 0 m m X 8 O m mで厚さ 0 . 9 m mのソ ーダライ ムガラスを挟んで、 9 5 0 °Cの加熱炉に投入して成形し、 次い で 2 0 0 °C以下まで冷却した後、 成形品を払い出すものである。 熱間プ レスの成形型の表面には、 R aで 1 〜 1 0 mの微細な凹凸が形成され ているので、 熱間プレスによ り成形された背面封止板 2 0 は、 その表面 に微細な凹凸が転写され、 ノ ングレア効果が高められている。 The heat forming is performed by, for example, hot pressing using a forming die. The hot press is carried out by inserting soda lime glass of 80 mm x 80 mm in thickness of 0.9 mm between the upper and lower molds, putting it into a heating furnace at 950 ° C, and molding. After cooling to 200 ° C or less, the molded product is paid out. Since the surface of the hot press forming die has fine irregularities of 1 to 10 m in Ra, the back sealing plate 20 formed by hot pressing has Fine irregularities are transferred to the surface, and the non-glare effect is enhanced.
上記脱ァル力 リ処理は、ガラス素板を温水に浸潰する こ と によ り行う。 これによ り、 ガラス素板の最表面層のアルカ リ金属イ オンを温水中に溶 出するこ とができ る。 この場合、 温水の温度は、 7 0 °C以上 1 0 0 °C (沸 点) 以下であるのが好ま しい。 温水の温度を 7 0 未満にする と、 脱ァ ルカ リ処理の効率が低下し、 1 0 0 °C (沸点) を越える と沸騰する。 ま た、 脱アルカ リ処理の時間は、 必要と されるガラス基板 1 1 及ぴ背面封 止板 2 0 の性能に依存するが、 1分以上 3時間以下が好ま しい。 The above-mentioned degraving is performed by immersing the glass plate in hot water. This makes it possible to dissolve the alkali metal ions in the outermost surface layer of the glass plate into warm water. In this case, the temperature of the hot water is preferably not less than 70 ° C and not more than 100 ° C (boiling point). If the temperature of the hot water is set to less than 70, the efficiency of the decalcification process is reduced, and boiling exceeds 100 ° C (boiling point). The time of the dealkalization treatment depends on the required performance of the glass substrate 11 and the back sealing plate 20, but is preferably 1 minute or more and 3 hours or less.
また、 上記温水に多価の金属イ オ ンを添加する と、 この多価の金属ィ ォンがガラス素板のガラスの骨格成分である シリ 力表面に吸着してシリ 力の溶解を防止し、 も ってガラス素板の最表面層のダメ ージを抑制する こ とができる と共に脱アルカ リ処理を効率的に行う こ とができ る。 多価 の金属イ オンと しては、 硝酸アルミ ニウムやアルミ ニウムイ オン ( 3価) であるのが好ま し く 、 特に、 アルミ ニウムイ オンは、 シ リ カ溶解抑制効 果ゃ安全性が高 く 、 しかも安価である。 多価の金属ィ ォンの濃度と して は、 1 0 p p m〜 0 . 1 %程度が好ま しい。 Also, when a polyvalent metal ion is added to the above-mentioned warm water, the polyvalent metal ion is adsorbed on the surface of the glass skeleton, which is the skeletal component of the glass of the glass plate, to prevent the melting of the silica force. Therefore, damage to the outermost surface layer of the glass base plate can be suppressed, and the dealkalizing treatment can be performed efficiently. As the polyvalent metal ion, aluminum nitrate or aluminum ion (trivalent) is preferable. In particular, aluminum ion has high silica dissolution inhibiting effect and high safety. It is inexpensive. The concentration of the polyvalent metal ion is preferably about 10 ppm to about 0.1%.
上記温水の p H と しては、 3以上 1 0以下であるのが好ま しい。 温水 の p Hが 3以下になる と、 アルカ リ土類金属イ オンがガラス素板から溶 出 し易 く な り 、 p Hが 1 0 を越える と、 アルカ リ金属イ オンが溶出困難 とな り シリ カの溶解が促進されてガラス素板の最表面層にダメ ージを発 生し易 く する。 The pH of the warm water is preferably 3 or more and 10 or less. Hot water If the pH is 3 or less, the alkaline earth metal ion is easily eluted from the glass plate, and if the pH exceeds 10, the alkali metal ion becomes difficult to elute. The dissolution of silica is promoted, and damage is easily generated in the outermost surface layer of the glass plate.
ガラス基板 1 1 の最表面層の脱アル力 リ部 1 5 、 及び背面封止板 2 0 の最表面層の脱アルカ リ部 2 1 の各々の厚み及びアル力 リ金属イ オ ン濃 度は夫々以下の通り である。 The thickness and the metal ion concentration of the outermost layer 15 of the outermost layer of the glass substrate 11 and the outermost layer 21 of the outermost layer of the rear sealing plate 20 are as follows. Each is as follows.
脱アルカ リ部 1 5 のアルカ リ金属イ オ ン濃度が、 脱アルカ リ部 1 5 に 続く 内側層 1 6 のアルカ リ金属イ オ ン濃度よ り も低いと き、 ソーダライ ムガラスから成るガラス基板 1 1 であっても アルカ リ金属イ オンがガラ ス基板 1 1 の表面に溶出 しに く く な り 、 同様に、 背面封止板 2 0 につい ても、 ソ一ダラ イムガラスから成るが、 脱アルカ リ部 2 1 のアルカ リ金 属イ オ ン濃度が、 脱アルカ リ部 2 1 に続く 内側層 2 2 のアルカ リ金属ィ オ ン濃度よ り も低いと き、 アルカ リ金属イ オ ンが背面封止板 2 0 の表面 に溶出 しに く く な り 、 ガラス基板 1 1 及び背面封止板 2 0から溶出する アルカ リ金属イ オ ンによ る有機 E L積層膜 1 2 の劣化を防止でき、 も つ て有機 E L積層膜 1 2 におけるダークスポッ トの形成を防止する こ とが でき、 またガラス基板 1 1 の材料と背面封止板 2 0の材料が共にソ一ダ ラ イ ム ガラスなので、 背面封止板 2 0 とガラス基板 1 1 との接着性を向 上させる こ とができる。 When the alkali metal ion concentration of the alkali-free portion 15 is lower than the alkali metal ion concentration of the inner layer 16 following the alkali-free portion 15, the glass substrate 1 made of soda lime glass is used. Even if it is 1, the alkali metal ion is less likely to elute on the surface of the glass substrate 11. Similarly, the rear sealing plate 20 is also made of soda lime glass, When the alkali metal ion concentration of the metal part 21 is lower than the alkali metal ion concentration of the inner layer 22 following the alkali removal part 21, the alkali metal ion is on the back side. It hardly elutes on the surface of the sealing plate 20, and the deterioration of the organic EL laminated film 12 due to alkali metal ions eluted from the glass substrate 11 and the back sealing plate 20 can be prevented. In addition, the formation of dark spots in the organic EL laminated film 12 is prevented. Since the material of the glass substrate 11 and the material of the back sealing plate 20 are both soda lime glass, the adhesiveness between the back sealing plate 20 and the glass substrate 11 is improved. be able to.
このため、 脱アルカ リ部 1 5 , 2 1 の厚みは、 好ま し く は 1 n m以上 l m以下さ らに好ま し く は 1 0 n m以上 1 0 0 n m以下である。 脱ァ ルカ リ部 1 5 , 2 1 の厚みが 1 n m未満では、 アルカ リ金属イ オ ンの溶 出を十分に防止する こ とができず、 また 1 0 mを越える と ガラス基板 1 1 及び背面封止板 2 0 の表面強度が低下する。 For this reason, the thickness of the dealkalized parts 15 and 21 is preferably 1 nm or more and 1 nm or less, more preferably 10 nm or more and 100 nm or less. If the thickness of the decalcified portions 15 and 21 is less than 1 nm, the elution of alkali metal ions cannot be sufficiently prevented.If the thickness exceeds 10 m, the glass substrates 11 and 21 cannot be removed. The surface strength of the back sealing plate 20 decreases.
また、 脱アルカ リ部 1 5 のアルカ リ土類金属イ オン濃度の平均値が、 内側層 1 6 のアルカ リ土類金属イ オ ン濃度の平均値に対して、 脱アル力 リ部 2 1 のアルカ リ土類金属ィォン濃度の平均値が、 内側層 2 2 のァル カ リ土類金属イ オン濃度の平均値に対して夫々 8 0 %以下になる と、 脱 アルカ リ部 1 5, 2 1 の各々の表面が多孔質状態にな り 、 この多孔質部 分には、 アルカ リ金属イオンが蓄積し易 く 、 またアルカ リ金属イ オ ンが 移動し易 く なるため、 脱アルカ リ部 1 5 , 2 1 のアルカ リ土類金属ィ ォ ン濃度が大き く 低下する と、 ガラス基板 1 1 及び背面封止板 2 0 からァ. ルカ リ金属イ オンが溶出 し易 く なる。 このため、 脱アルカ リ部 1 5 のァ ルカ リ土類金属ィ ォン濃度の平均値は、 内側層 1 6 のアルカ リ土類金属 イ オン濃度の平均値に対して、 脱アルカ リ部 2 1 のアルカ リ土類金属ィ オン濃度の平均値は、 内側層 2 2 のアルカ リ土類金属イ オン濃度の平均 値に対して夫々 8 0 %以上であるのが好ま しい。 The average of the alkaline earth metal ion concentrations in the dealkalized part 15 is The average value of the alkaline earth metal ion concentration of the removal part 21 is compared with the average value of the alkaline earth metal ion concentration of the inner layer 16. When the average value of the earth metal ion concentration is 80% or less, the surface of each of the dealkalized parts 15 and 21 becomes porous. Alkali metal ions easily accumulate and easily move, so if the concentration of alkaline earth metal ions in the de-alkali parts 15 and 21 drops significantly, Alkali metal ions are easily eluted from the glass substrate 11 and the back sealing plate 20. For this reason, the average value of the alkaline earth metal ion concentration in the dealkalized part 15 is larger than the average value of the alkaline earth metal ion concentration in the inner layer 16. The average value of the alkaline earth metal ion concentration of 1 is preferably 80% or more with respect to the average value of the alkaline earth metal ion concentration of the inner layer 22.
このためには、 本発明の第 1 の実施の形態では、 脱アルカ リ処理に用 いる温水の p Hを 3 以上に調整するのが良い。 温水の p Hを 3 よ り低く する と、 アルカ リ金属イ オンだけでな く 、 アルカ リ土類金属イ オン も溶 出 しやす く な り 、 脱アルカ リ部 1 5 , 2 1 を形成する と共に、 脱アル力 リ部 1 5 , 2 1 のアルカ リ土類金属イ オン濃度を維持するこ とが困難と なるためである。 For this purpose, in the first embodiment of the present invention, it is preferable to adjust the pH of the hot water used for the dealkalization treatment to 3 or more. When the pH of the hot water is lower than 3, not only the alkali metal ions but also the alkaline earth metal ions are easily eluted, and the dealkalized parts 15 and 21 are formed. At the same time, it becomes difficult to maintain the alkaline earth metal ion concentration in the removal parts 15 and 21.
上記第 1 の実施の形態に係る有機 E L素子 1 0 は、 背面封止部材 2 0 及びガラス基板 1 1 共に脱アルカ リ処理を施したが、 背面封止部材 2 0 及びガラス基板 1 1 の一方のみ、 好ま し く は背面封止部材 2 0 のみに脱 アル力 リ処理を施しても よい。 In the organic EL element 10 according to the first embodiment, the rear sealing member 20 and the glass substrate 11 were both subjected to dealkalizing treatment, but one of the rear sealing member 20 and the glass substrate 11 was used. Only, preferably, only the back surface sealing member 20 may be subjected to a removal treatment.
図 2 は、 本発明の第 1 の実施の形態の変形例に係る有機 E L素子用背 面封止部材及ぴガラス基板を備える有機 E L素子の断面図である。 FIG. 2 is a cross-sectional view of an organic EL device including a back sealing member for an organic EL device and a glass substrate according to a modification of the first embodiment of the present invention.
図 2 において、 本発明の第 1 の実施の形態の変形例に係る有機 E L素 子用背面封止部材及ぴガラス基板を備える有機 E L素子 3 0 は、 その構 成が図 1 の有機 E L素子 1 0 と基本的に同一であ り 、 有機 E L素子 1 0 に対してガラス基板 1 1 をガラス基板 3 1 に、 背面封止板 (背面封止部 材) 2 0 を背面封止板 3 2 に交換したものであ り 、 同 じ構成部材には同 一の符号を付して重複した説明を省略し、 以下に異なる部分のみを説明 する。 In FIG. 2, an organic EL element 30 including a back sealing member for an organic EL element and a glass substrate according to a modification of the first embodiment of the present invention has the same structure. The configuration is basically the same as that of the organic EL element 10 in FIG. 1. The organic EL element 10 is replaced by a glass substrate 11 on a glass substrate 31, and a back sealing plate (back sealing member) 2 0 is replaced with a back sealing plate 32, and the same components are denoted by the same reference numerals, and redundant description will be omitted. Only different portions will be described below.
図 2 の有機 E L素子 3 0 は、 有機 E L素子 3 0の量産化のために、 複 数のソーダライ ムガラス製背面封止板 3 2がマ ト リ ッ クス状に一体的に 配列された封止板部材を、 有機 E L積層膜 1 2及び有機 E L駆動パター ン形成部 1 3 から成る複数のソ一ダライ ムガラス製ガラス基板 3 1 が同 じ く マ ト リ ッ クス状に一体的に配列されたガラス基板部材に接着層 1 4 によ つて接着した後に、 個々の有機 E L素子 3 0 に切断して形成された ものである。 The organic EL element 30 shown in Fig. 2 is a sealed structure in which a plurality of soda-lime glass back sealing plates 32 are integrally arranged in a matrix for mass production of the organic EL element 30. A plurality of soda lime glass substrates 31 each comprising an organic EL laminated film 12 and an organic EL driving pattern forming portion 13 were integrally arranged in the same matrix in the plate member. It is formed by bonding to a glass substrate member with an adhesive layer 14 and then cutting into individual organic EL elements 30.
ガラス基板 3 1 は、 その最表面層に、 図 1 におけるガラス基板 1 1 の 脱アルカ リ部 1 5 と同様の脱アルカ リ部 3 3 を備えるが、 切断端面 3 4 に脱アルカ リ部 3 3 を備えていない点でガラス基板 1 1 と異な り、 背面 封止板 3 2 は、 その最表面層に、 図 1 における背面封止板 2 0 の脱アル カ リ部 2 1 と同様の脱アルカ リ部 3 5 を備えるが、 切断端面 3 6 に脱ァ ルカ リ部 3 5 を備えていない点で背面封止板 2 0 と異なる。 。 有機 E L 素子 3 0 において、 脱アルカ リ部 3 3 を備えていないガラス基板 3 1 の 切断端面 3 4、 及び脱アルカ リ部 3 5 を備えていない背面封止板 3 2 の 切断端面 3 6 は、 有機 E L素子 1 2が封止されている部分の外側である ため、 切断端面 3 4 , 3 6 に脱アル力 リ処理が施されていな く ても有機 E L素子 1 2 の劣化は生じない。 The glass substrate 31 has, on its outermost surface layer, a dealkalized part 33 similar to the dealkalized part 15 of the glass substrate 11 in FIG. Unlike the glass substrate 11 in that the rear sealing plate 32 is not provided, the rear sealing plate 32 is provided on the outermost surface layer thereof with the same dealkalizing part 21 as the dealkalizing portion 21 of the rear sealing plate 20 in FIG. It is different from the rear sealing plate 20 in that it is provided with a recessed portion 35 but is not provided with a decalcified portion 35 on the cut end surface 36. . In the organic EL element 30, the cut end face 34 of the glass substrate 31 not having the alkali removal part 33 and the cut end face 36 of the back sealing plate 32 not having the alkali removal part 35 are formed. However, since the organic EL element 12 is outside the portion where the organic EL element 12 is sealed, the organic EL element 12 does not deteriorate even if the cut end faces 34 and 36 are not subjected to the removal processing. .
図 3 は、 本発明の第 2 の実施の形態に係る有機 E L素子用背面封止部 材及ぴガラス基板を備える有機 E L素子の断面図である。 FIG. 3 is a cross-sectional view of an organic EL device including a back sealing member for an organic EL device and a glass substrate according to a second embodiment of the present invention.
図 3 において、 本発明の第 2 の実施の形態に係る有機 E L素子用背面 封止部材及ぴガラス基板を備える有機 E L素子 4 0 は、 その構成が図 1 の有機 E L素子 1 0 と基本的に同一であ り 、 第 1 の実施の形態に対して ガラス基板及び背面封止板に S i 0 2膜を形成した点が相違する。 同 じ 構成部材には同一の符号を付して重複した説明を省略し、 以下に異なる 部分のみを説明する。 In FIG. 3, a back surface for an organic EL device according to a second embodiment of the present invention is shown. The organic EL element 40 including the sealing member and the glass substrate has basically the same configuration as the organic EL element 10 of FIG. 1, and differs from the first embodiment in that the glass substrate and the back sealing are used. The difference is that the SiO 2 film is formed on the stop plate. The same components are denoted by the same reference numerals, and redundant description will be omitted. Only different portions will be described below.
図 3 の有機 E L素子 4 0 において、 ガラス基板 4 1 は、 ソ一ダラ イ ム ガラス製で、 図 1 の有機 E L素子 1 0 におけるガラス基板 1 1 と同一形 状且つ同一サイズであ り 、 その表面には S i 0 2膜 4 3 が積層されてい る。 背面封止板 4 2 は、 ソーダライ ムガラス製であ り 、 図 1 の有機 E L 素子 1 0 における背面封止板 2 0 と同一形状且つ同一サイズであ り 、 そ の表面には S i 0 2膜 4 4が積層されている。 In the organic EL element 40 in FIG. 3, the glass substrate 41 is made of soda lime glass, and has the same shape and size as the glass substrate 11 in the organic EL element 10 in FIG. The SiO 2 film 43 is laminated on the surface. The back sealing plate 42 is made of soda lime glass, has the same shape and the same size as the back sealing plate 20 of the organic EL element 10 of FIG. 1, and has a SiO 2 film on its surface. 4 4 are stacked.
S i 0 2膜 4 3 は、 ガラス基板 4 1 の表面全体に積層される必要はな く、 有機 E L素子 4 0 において、 有機 E L積層膜 1 2 が形成された内部 4 5 を画成する表面に積層される ものであればよ く 、 また、 S i 0 2膜 4 4 は、 背面封止板 4 2 の表面全体に積層される必要はな く 、 内部 4 5 を画成する表面に積層される ものであればよい。 The S i 0 2 film 4 3 does not need to be laminated on the entire surface of the glass substrate 4 1, and in the organic EL element 40, the surface defining the inside 4 5 where the organic EL laminated film 12 is formed rather i as long as is stacked, also, S i 0 2 film 4 4 needs to be laminated on the entire surface of the rear seal plate 4 2 rather than, laminated on the surface defining the interior 4 5 Anything can be used.
図 3 の有機 E L素子 4 0 によれば、 ガラス基板 4 1 は、 その表面に S i 0 2膜 4 3 が積層されてお り 、 背面封止板 4 2 は、 その表面に S i 0 2膜 4 4が積層されているので、 有機 E L素子 4 0 の内部 4 5 において、 ガラス基板 4 1 及ぴ背面封止板 4 2 からアルカ リ金属イ オンが溶出する こ と を防止して、 アルカ リ 金属イ オンによ る有機 E L積層膜 1 2 の劣化 を防止でき、 も って有機 E L積層膜 1 2 における ダークスポッ 卜の形成 を防止する こ とができ る。 According to the organic EL element 4 0 in FIG. 3, the glass substrate 4 1, Ri Contact is laminated S i 0 2 film 4 3 on its surface, the rear seal plate 4 2, S i 0 2 on the surface thereof Since the film 44 is laminated, the alkali metal ions are prevented from being eluted from the glass substrate 41 and the back sealing plate 42 in the inside 45 of the organic EL element 40, and the (4) Deterioration of the organic EL laminated film 12 due to metal ions can be prevented, and thus formation of dark spots in the organic EL laminated film 12 can be prevented.
上記第 2 の実施の形態に係る有機 E L素子 4 0 は、 背面封止部材 4 2 及びガラス基板 4 1 共に' S i 0 2膜を形成したが、 背面封止部材 4 2 及 ぴガラス基板 4 1 の一方のみ、 好ま し く は背面封止部材 4 2 のみに S i 0 2膜を形成しても よい。 The organic EL element 4 according to the second embodiment 0, has formed the rear sealing member 4 2 and the glass substrate 4 both 1 'S i 0 2 film, the back sealing member 4 2及Pi glass substrate 4 1 only, preferably the back sealing member 4 2 only S i 0 2 film may be formed.
図 4 は、 本発明の第 3 の実施の形態に係る有機 E L素子用背面封止部 材及びガラス基板を備える有機 E L素子の断面図である。 FIG. 4 is a cross-sectional view of an organic EL device including a back sealing member for an organic EL device and a glass substrate according to a third embodiment of the present invention.
図 4 において、 本発明の第 3 の実施の形態に係る有機 E L素子用背面 封止部材及びガラス基板を備える有機 E L素子 5 0 は、 その構成が図 1 の有機 E L素子 1 0 と基本的に同一であ り 、 第 1 の実施の形態に対して ガラス基板及び背面封止板に化学強化処理が施した点が相違する。 同じ 構成部材には同一の符号を付して重複した説明を省略し、 以下に異なる 部分のみを説明する。 In FIG. 4, an organic EL element 50 including a back surface sealing member for an organic EL element and a glass substrate according to the third embodiment of the present invention has a configuration basically similar to that of the organic EL element 10 of FIG. It is the same, and differs from the first embodiment in that the glass substrate and the back sealing plate are subjected to the chemical strengthening treatment. The same components will be denoted by the same reference numerals, without redundant description, and only different portions will be described below.
図 4 の有機 E L素子 5 0 において、 ガラス基板 5 1 は、 ソーダラ イ ム ガラス製で、 図 1 の有機 E L素子 1 0 におけるガラス基板 1 1 と同一形 状且つ同一サイズであ り 、 ガラス基板 5 1 は、 化学強化処理が施されて お り 、 その表面の N a (ナ ト リ ウム) 原子が K (カ リ ウム) 原子に変換 さている。 背面封止板 5 2 は、 ソーダラ イ ムガラス製であ り 、 図 1 の有 機 E L素子 1 0 における背面封止板 2 0 と同一形状且つ同一サイズであ り 、 背面封止板 5 2 は、 化学強化処理が施されてお り、 その表面の : N a (ナ ト リ ウム) 原子が K (カ リ ウム) 原子に変換されている。 In the organic EL element 50 of FIG. 4, the glass substrate 51 is made of soda lime glass and has the same shape and the same size as the glass substrate 11 of the organic EL element 10 of FIG. In No. 1, a chemical strengthening treatment has been performed, and Na (sodium) atoms on the surface are converted into K (ca) atoms. The back sealing plate 52 is made of soda lime glass, has the same shape and the same size as the back sealing plate 20 of the organic EL element 10 in FIG. 1, and the back sealing plate 52 is A chemical strengthening treatment has been applied, and: Na (Na) atoms on the surface have been converted to K (Ca) atoms.
ガラス基板 5 1 は、 その表面全体が上記化学強化処理を施されている 必要はな く 、 有機 E L素子 5 0 において、 有機 E L積層膜 1 2 が形成さ れた内部 5 3 を画成する表面に化学強化処理が施されていればよ く 、 ま た、 背面封止板 5 2 は、 その表面全体に上記化学強化処理が施されてい る必要はな く 、 内部 5 3 を画成する表面に化学強化処理が施されていれ ばよい。 The entire surface of the glass substrate 51 does not need to be subjected to the above-mentioned chemical strengthening treatment, and the surface defining the inside 53 of the organic EL element 50 where the organic EL laminated film 12 is formed is not required. The back sealing plate 52 need not have been subjected to the above-described chemical strengthening treatment, and the surface defining the interior 53 may be sufficient. It is only necessary that the steel be subjected to a chemical strengthening treatment.
図 4 の有機 E L素子 5 0 によれば、 ガラス基板 5 1 は、 化学強化処理 が施されて、 その表面の N aが に変換されてお り 、 背面封止板 5 2 は、 化学強化処理が施されて、 その表面の N aが Kに変換されているので、 有機 E L素子 5 0の内部 5 3 において、 ガラス基板 5 1 及び背面封止板 5 2からアルカ リ金属イ オンが溶出するこ と を防止して、 アルカ リ金属 イ オンによ る有機 E L積層膜 1 2の劣化を防止でき、 も って有機 E L積 層膜 1 2 におけるダークスポッ トの形成を防止する こ とができ る。 According to the organic EL element 50 of FIG. 4, the glass substrate 51 is subjected to a chemical strengthening treatment, and the Na on the surface is converted to. The back sealing plate 52 is chemically strengthened. Is applied, and Na on the surface is converted into K. In the inside 53 of the organic EL element 50, the alkali metal ions are prevented from being eluted from the glass substrate 51 and the rear sealing plate 52, and the organic EL laminated film using the alkali metal ions is prevented. 12 can be prevented from being deteriorated, and thus the formation of dark spots in the organic EL layered film 12 can be prevented.
上記第 4の実施の形態に係る有機 E L素子 5 0は、 背面封止部材 5 2 及びガラス基板 5 1共に化学強化処理を施したが、 背面封止部材 5 2及 びガラス基板 5 1の一方のみ、 好ま し く は背面封止部材 5 2のみに化学 強化処理を施しても よい。 In the organic EL element 50 according to the fourth embodiment, the back sealing member 52 and the glass substrate 51 are both subjected to the chemical strengthening treatment, but one of the back sealing member 52 and the glass substrate 51 is used. Only, preferably, only the back sealing member 52 may be subjected to chemical strengthening treatment.
図 1 の有機 E L素子 1 0 における背面封止板 2 0、 図 2の有機 E L素 子 3 0 における背面封止板 3 2、 図 3の有機 E L素子 4 0における背面 封止板 4 2、 及び図 4の有機 E L素子 5 0 における背面封止板 5 2 は、 夫々その一部に凹部 2 3が形成されてお り 、 凹部 2 3 には酸化バリ ウム 等の乾燥剤 2 が収納されているが、 これに限る ものではな く 、 例えば、 背面封止板 2 0 , 3 2, 4 2 , 5 2はほぼ平板状であっても よ く 、 また 乾燥剤 2 4を備えていな く ても よい。 背面封止板 2 0, 3 2, 4 2 , 5 2がほぼ平板状で且つ乾燥剤 2 4 を備えていない場合は、 有機 E L素子 1 0 , 3 0 , 4 0, 5 0において、 背面封止板 2 0, 3 2, 4 2 , 5 2 を介して画像を見るこ とができ る。 The back sealing plate 20 of the organic EL device 10 in FIG. 1, the back sealing plate 32 of the organic EL device 30 of FIG. 2, the back sealing plate 42 of the organic EL device 40 of FIG. 3, and The back sealing plate 52 of the organic EL element 50 in FIG. 4 has a recess 23 formed in a part thereof, and the recess 23 stores a desiccant 2 such as barium oxide. However, the present invention is not limited to this. For example, the rear sealing plates 20, 32, 42, 52 may be substantially flat, and may be provided with no desiccant 24. Good. When the back sealing plates 20, 32, 42, 52 are almost flat and do not include the desiccant 24, the back sealing plate is used for the organic EL elements 10, 30, 40, 50. Images can be viewed through the stop plates 20, 32, 42, 52.
次に、 上記本発明に係る有機 E L素子用背面封止部材及ぴガラス基板 を備える有機 E L素子の実施例を具体的に説明する。 Next, examples of the organic EL device including the back sealing member for an organic EL device and the glass substrate according to the present invention will be specifically described.
本発明者は、 図 1の有機 E L素子 1 0 と して、 ソ一ダライ ムガラス製 の背面封止板 2 0の最表面層の脱アル力 リ部 2 1の厚みのみが異なる 9 種類のソ一グラ イ ムガラス製背面封止板 2 0 を有する有機 E L素子 1 0 (実施例 :! 〜 5 , 比較例 :! 〜 4、 表 1 ) 、 また、 脱アルカ リ部 2 1 のァ ルカ リ土類金属イ オン濃度の平均値に対する、 背面封止板 2 0の内側部 2 2 のアルカ リ土類金属ィ ォン濃度の平均値の比のみが異なる 9種類の 02 13674 The present inventor has proposed that the organic EL element 10 of FIG. 1 has nine types of sourcing elements, which differ only in the thickness of the rear part 21 of the outermost surface layer of the rear sealing plate 20 made of soda lime glass. Organic EL element 10 having rear glass sealing plate 20 made of single glass (Example:! ~ 5, Comparative example:! ~ 4, Table 1), and alkaline earth of dealkalized part 21 Nine different types differ only in the ratio of the average value of the alkaline earth metal ion concentration in the inner part 22 of the rear sealing plate 20 to the average value of the similar metal ion concentration. 02 13674
-15- -15-
ソ一ダラ イムガラス製背面封止板 2 0 を有する有機 E L素子 1 0 (実施 例 6 〜 1 0, 比較例 5 〜 8、 表 2 ) 、 さらに、 背面封止板 2 0 に脱アル カリ処理を施さずに脱アルカリ部 2 1 の厚さを 0 m mと したソーダライ ムガラス製背面封止板 2 0 を有する有機 E L素子 1 0 (比較例 9 ) を作 成した。 これらの実施例 1 〜 1 0及び比較例 1 〜 9に対し、 アルカ リ金 属塩の結晶析出量評価、 及び有機 E L積層膜 1 2のダ―クスポッ ト発生 時間評価を行い、 さらに実施例 1 〜 5及び比較例 1 〜 4 , 9 に対して、 背面封止板強度評価を行った。 The organic EL element 10 having a back sealing plate 20 made of soda lime glass (Examples 6 to 10, Comparative Examples 5 to 8, Table 2) and the rear sealing plate 20 were subjected to a de-alkali treatment. An organic EL device 10 (Comparative Example 9) having a back sealing plate 20 made of soda lime glass in which the thickness of the alkali-removed portion 21 was reduced to 0 mm without application was prepared. For these Examples 1 to 10 and Comparative Examples 1 to 9, the amount of precipitated alkali metal salt was evaluated and the dark spot generation time of the organic EL laminated film 12 was evaluated. Back sealing plate strength was evaluated for Comparative Examples 1 to 5 and Comparative Examples 1 to 4 and 9.
アルカ リ金属塩の結晶析出量評価は、 上記実施例 1 〜 1 0及び比較例 1 〜 9 の各々を雰囲気温度 6 0 °C、 湿度 8 0 %の環境下で 1 2 0時間暴 露放置した後、 光学顕微鏡暗視野観察 (X 2 0. 0倍) にて、 上記実施例 1 〜 1 0及ぴ比較例 1 〜 9の各背面封止板 2 0の表面に析出したアル力 リ金属塩の結晶の粒 (ガラスのャケ粒) の数を視野範囲でカ ウ ン ト して、 A〜 Eのラ ンク付けによ り行った。 評価は、 評価 Aから評価 Eに進むつ れてアルカリ金属塩の結晶の析出量が多いことを示す。 具体的には、 ァ ルカ リ金属塩の結晶の粒の数が、 評価 Aは 0 〜 1 0個ノ視野、 評価 Bは 1 0 〜 5 0個/視野、 評価 Cは 5 0 〜 2 0 0個/視野、 評価 Dは 2 0 0 〜 5 0 0個/視野、 評価 Eは 5 0 0個以上/視野の状態を示す。 The evaluation of the crystal deposition amount of the alkali metal salt was performed by exposing each of the above Examples 1 to 10 and Comparative Examples 1 to 9 for 120 hours under an environment of an ambient temperature of 60 ° C and a humidity of 80%. After that, by using a dark field observation with an optical microscope (X20.0 magnification), the metal salt deposited on the surface of each back sealing plate 20 of the above Examples 1 to 10 and Comparative Examples 1 to 9 was examined. The number of crystal grains (glass grains) was counted in the field of view, and ranks A to E were used. The evaluation shows that the amount of precipitated alkali metal salt crystals increases from evaluation A to evaluation E. Specifically, the number of crystal grains of the alkali metal salt was 0 to 10 for evaluation A, 10 to 50 per field for evaluation B, and 50 to 200 for evaluation C. Individual / view, evaluation D: 200 to 50,000 / view, evaluation E: 500 or more / view.
有機 E L積層膜 1 2 のダークスポッ ト発生時間評価は、 上記上記実施 例 1 〜 1 0及ぴ比較例 1 〜 9 の各々を駆動状態で雰囲気温度 1 0 0 °Cの 高温環境下に保管し、 ダークスポッ トが発生するまでの時間を測定して 行った。 The evaluation of the dark spot generation time of the organic EL laminated film 12 was performed by storing each of the above Examples 1 to 10 and Comparative Examples 1 to 9 in a high temperature environment at an ambient temperature of 100 ° C. in a driving state. The measurement was performed by measuring the time until the occurrence of dark spots.
背面封止板強度評価は、上記実施例 1 〜 5及び比較例 1 〜 4 , 9の各々 の背面封止板 2 0 の表面中央部近傍にガラス基板 1 1 への接着時に用い る荷重を与えて、 背面封止板 2 0 に発生する破損の有無を調べて、 A〜 Cのラ ンク付けによ り行った。 背面封止板 2 0が有機 E L積層膜 1 2等 13674 In the evaluation of the strength of the back sealing plate, a load used for bonding to the glass substrate 11 was applied to the vicinity of the center of the surface of the back sealing plate 20 in each of Examples 1 to 5 and Comparative Examples 1 to 4 and 9 above. The rear sealing plate 20 was checked for damage, and ranks A to C were used. Back sealing plate 20 is organic EL laminated film 1 2 etc. 13674
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が形成されたガラス基板 1 1 と接着層 1 4で接着される きに、 背面封 止板 2 0 には一定の力が加圧され、 このと き、 背面封止板 2 0 は変形に よ り破損する場合がある。 このため、 背面封止板 2 0には一定以上の加 圧変形に耐える必要があり、この工程を想定した上記評価が必要となる。 評価は、 評価 Aから評価 Cに進むにつれて強度が低下し、 具体的には、 評価 Aは破損のない状態、 評価 Bは破損のバラツキを考慮する と封着工 程で破損のおそれがある状態、 評価 Cは封着工程でかなりの確率で破損 があり得る状態を示す。 When the glass substrate 11 on which is formed is adhered to the adhesive layer 14 with a certain force, a certain force is applied to the rear sealing plate 20. At this time, the rear sealing plate 20 is deformed. May be damaged. For this reason, it is necessary for the back sealing plate 20 to withstand a certain amount of pressurized deformation, and the above evaluation assuming this step is required. In the evaluation, the strength decreased from Evaluation A to Evaluation C.Specifically, Evaluation A was in a state where there was no breakage, and Evaluation B was in a state where there was a risk of breakage in the sealing process considering variation in breakage. Evaluation C indicates a state in which there is a considerable probability of damage during the sealing process.
表 1 は、 上記実施例 1 〜 5及び比較例 1 〜 4 , 9 に対するアルカ リ金 属塩の結晶析出量評価及び有機 E L積層膜 1 2 のダークスポッ ト発生時 間評価及び背面封止板強度評価の結果を示す。 Table 1 shows the evaluation of the crystal deposition amount of the alkali metal salt, the evaluation of the dark spot generation time of the organic EL laminated film 12 and the evaluation of the strength of the back sealing plate for Examples 1 to 5 and Comparative Examples 1 to 4 and 9. The result is shown.
表 1 において、 実施例 1 〜 5及び比較例 1 〜 4 , 9の総合評価は、 脱 アルカリ部 2 ίの厚みと して好ま しい方から、 評価〇、 評価厶、 評価 X と して示されている。 表 1 のアルカリ金属塩の結晶析出量評価、 有機 E L積層膜 1 2のダークスポッ ト発生時間評価、 及び背面封止板強度評価 の結果よ り、 脱アルカリ部 2 1の厚みは 1 n m以上 1 以下であるの が好ま しく、 1 0 n m以上 1 0 0 n m以下であるのがさ らに好ま しいこ とが分かつた。 In Table 1, the overall evaluations of Examples 1 to 5 and Comparative Examples 1 to 4 and 9 are given in order of the thickness of 2 mm of the alkali-free part. It is shown as From the results of the evaluation of the crystal deposition amount of the alkali metal salt, the evaluation of the dark spot generation time of the organic EL laminated film 12, and the evaluation of the strength of the rear sealing plate in Table 1, the thickness of the alkali-free portion 21 is 1 nm or more and 1 or less. It was found that it is more preferable that the thickness be 10 nm or more and 100 nm or less.
表 2 は、 上記実施例 6 〜 1 0及び比較例 5 〜 9 に対するアルカ リ金属 塩の結晶析出量評価及び有機 E L積層膜 1 2 のダークスポツ ト発生時間 評価の結果を示す。 Table 2 shows the results of the evaluation of the crystal deposition amount of the alkali metal salt and the evaluation of the dark spot generation time of the organic EL laminated film 12 for Examples 6 to 10 and Comparative Examples 5 to 9 described above.
表 2 Table 2
表 2 において、 実施例 6 〜 1 0及ぴ比較例 5 〜 9の総合評価は、 実施 例 6 〜 1 0及び比較例 5 〜 9 の各々の背面封止板 2 0の脱アルカ リ部 2 1 のアルカ リ土類金属ィォ ン濃度の平均値と、 内側層 2 2 のアルカ リ土 類金属イ オン濃度の平均値に対する比と して好ま しいものを評価〇、 好 ま しく ないものを評価 Xと して示されている。 表 2のアルカリ金属塩の P0213674 In Table 2, the comprehensive evaluation of Examples 6 to 10 and Comparative Examples 5 to 9 is based on the dealkalized part 21 of the rear sealing plate 20 of each of Examples 6 to 10 and Comparative Examples 5 to 9. Of the average value of the alkaline earth metal ion concentration of the inner layer 22 and the average value of the alkaline earth metal ion concentration of the inner layer 22 was evaluated as favorable. Indicated as X. Table 2 of alkali metal salts P0213674
-18- -18-
結晶析出量評価及び有機 E L積層膜 1 2のダークスポッ ト発生時間評価 の結果よ り 、 背面封止板 2 0の脱アルカ リ部 2 1のアルカ リ土類金属ィ ォン濃度平均値の内側層 2 2のアルカ リ土類金属ィ ォン濃度平均値に対 する比が 8 0 %以上であるのが好ま しいこ とが分かつた。 From the results of the evaluation of the amount of crystal deposition and the evaluation of the dark spot generation time of the organic EL laminated film 12, the inner layer of the alkaline-earth metal ion concentration average value of the alkali-free metal part 21 of the rear sealing plate 20 was found. It has been found that the ratio of 22 to the average value of the alkaline earth metal ion concentration is preferably 80% or more.
また、 本発明者は、 背面封止板 2 0に対する脱アル力 リ処理において、 夫々異なる温度の温水にて所定時間脱アルカ リ処理 (処理例 1 ) を施し た 8種類のソーダラ イ ムガラス製背面封止板 2 0 を有する有機 E L素子 1 0 (実施例 1 1 〜 : I 5 , 比較例 1 0〜 : 1 2、 表 3 ) 、 また、 背面封止 板 2 0 に対する脱アルカ リ処理において、 夫々異なる温度且つ多価の金 属イ オ ン、 例えば A 1 N 03の添加の有無で異なる温水にて所定時間脱 アルカ リ処理 (処理例 2 ) を施した 6種類のソ一ダライ ムガラス製背面 封止板 2 0 を有する有機 E L素子 1 0 (実施例 1 6〜 1 8 , 比較例 1 3 〜 1 5、 表 4 ) 、 さ らに、 背面封止板 2 0 に対する脱アルカ リ処理にお いて、 夫々異なる p Hの温水にて所定温度且つ所定時間脱アルカ リ処理 (処理例 3 ) を施した 1 0種類のソーダラ イ ム ガラス製背面封止板 2 0 を有する有機 E L素子 1 0 (実施例 1 9〜 2 3, 比較例 1 6 ~ 2 0、 表 5 ) を作成した。 In addition, in the deallocation of the rear sealing plate 20, the present inventor has made eight kinds of soda lime glass backs which have been subjected to dealkalization treatment (treatment example 1) with hot water of different temperatures for a predetermined time. The organic EL device 10 having the sealing plate 20 (Examples 11 to: I5, Comparative Examples 10 to: 12 and Table 3). each different temperatures and multivalent gold Shokui on, the example a 1 N 0 predetermined time de-alkali treatment varies with warm water with and without addition of 3 (processing example 2) six Soviet one Dalai Mugarasu made subjected The organic EL element 10 having the back sealing plate 20 (Examples 16 to 18 and Comparative Examples 13 to 15 and Table 4) was used for de-alkali treatment on the back sealing plate 20. Then, 10 kinds of solutes subjected to dealkalization treatment (treatment example 3) at a predetermined temperature and for a predetermined time with warm water having different pH, respectively. The organic EL device 1 0 with Dara Lee arm glass rear sealing plate 2 0 (Example 1 9-2 3, Comparative Example 1 6-2 0, Table 5) was created.
上記実施例及び比較例の有機 E L素子 1 0 に対し、 脱アルカ リ処理の 効率性評価や背面封止板 2 0表面の外観検査を行つた。 For the organic EL devices 10 of the above Examples and Comparative Examples, an evaluation of the efficiency of the dealkalization treatment and an appearance inspection of the surface of the back sealing plate 20 were performed.
脱アルカ リ処理の効率性評価は、 脱アルカ リ処理の違い (温氷温度に よ る違い, 多価の金属イ オ ンの添加の有無による違い, 温水の p Hによ る違い) による、 形成される脱アルカ リ部 2 1の厚みの比較によ り 評価 して行った。 The efficiency of the dealkalization process was evaluated based on the differences in the dealkalization process (differences due to hot ice temperature, differences due to the presence or absence of polyvalent metal ions, and differences due to hot water pH). The evaluation was performed by comparing the thickness of the dealkali part 21 formed.
背面封止板 2 0表面の外観検査は、 光学顕微鏡暗視野観察 (X 2 0 0 倍) にて、 一般に潜傷と呼ばれるエ ッ チングによ って発生する傷の程度 を A〜 Cのラ ン ク付けによ り相対評価したも のである。 評価は、 評価 A から評価 Cに進むつれて背面封止板 2 0表面の傷が多いことを示す。 具 体的には、 評価 Aが 0個 視野、 評価 Bが 0 〜 0 . 5個/視野、 評価。 が 0 . 5個以上/視野の状況であることを示す。 The appearance inspection of the surface of the back sealing plate 20 is performed by dark field observation with an optical microscope (X200 magnification), and the degree of scratches generated by etching, which is generally called latent scratching, is rated A to C. The relative evaluation was made by attaching the links. Evaluation is evaluation A The evaluation indicates that the number of scratches on the surface of the back sealing plate 20 is large as the evaluation proceeds to C. Specifically, the evaluation A was 0 visual fields, and the evaluation B was 0 to 0.5 visual fields / field. Indicates that the condition is 0.5 or more / field of view.
表 3 は、 処理例 1 による脱アルカリ処理用温水の温度に対する背面封 止板 2 0の脱アルカ リ部 2 1の厚みの関係を示す。 Table 3 shows the relationship between the temperature of the hot water for dealkalization treatment in Treatment Example 1 and the thickness of the dealkalized portion 21 of the rear sealing plate 20.
表 3Table 3
表 3から、 脱アルカリ処理用温水の温度は、 7 0 以上であるのが好 ま しいことが分かつた。 Table 3 shows that the temperature of the hot water for the dealkalization treatment is preferably 70 or more.
表 4 は、 処理例 2 による脱アルカリ処理用温水への多価金属イオンの 添加の有無に対する背面封止板 2 0の脱アルカ リ部 2 1 の厚み及び背面 封止板 2 0表面の外観の関係を示す。 表 4 Table 4 shows the thickness of the dealkalized portion 21 of the back sealing plate 20 and the appearance of the back sealing plate 20 surface with respect to whether or not polyvalent metal ions were added to the hot water for dealkalization treatment in Treatment Example 2. Show the relationship. Table 4
表 4から、 脱アルカ リ処理用温水に多価金属ィォンの添加をするのが 好ま しいことが分つた。 Table 4 shows that it is preferable to add the polyvalent metal ion to the hot water for dealkalization treatment.
表 5 は、 処理例 3 による脱アル力リ処理用温水の p Hに対する背面封 止板 2 0 の脱アルカ リ部 2 1 の厚み、 及ぴ脱アルカ リ部 2 1 のアルカ リ 土類金属ィ ォン濃度平均値の内部 2 2 のアルカ リ土類金属ィ ォン濃度平 均値に対する比、 及び背面封止板 2 0表面の外観検査の関係を示す。 Table 5 shows the thickness of the dealkalized part 21 of the rear sealing plate 20 and the alkaline earth metal of the dealkalized part 21 with respect to the pH of the hot water for deallocation by treatment example 3. 2 shows the ratio of the average ion concentration to the average value of the internal 22 of the alkaline earth metal ions, and the relationship between the appearance inspection of the surface of the back sealing plate 20.
表 5 Table 5
表 5 において、 実施例 1 9 2 3 '、 比較例 1 6 2 0 の総合評価は、 脱アルカ リ処理用温水の p Hと して好ま しい方から、 評価〇、 評価厶、 評価 X と して示されている。表 5 から、 脱アルカ リ処理用温水の p Hは、 3以上 1 0以下であるのが好ま しいこ とが分かった。 In Table 5, the comprehensive evaluations of Example 1923 'and Comparative Example 1620 were evaluated as evaluation 〇, evaluation 、, and evaluation X, starting with the preferred pH as the de-alkaline treatment hot water. Shown. From Table 5, it was found that it is preferable that the pH of the hot water for dealkalization treatment is 3 or more and 10 or less.
上述のよ う に、 アルカ リ金属塩の結晶析出量評価、 有機 E L積層膜 1 2 のダークスポッ ト発生時間評価、 背面封止板強度評価、 脱アルカ リ処 理の効率性能評価、 及び背面封止板 2 0表面の外観検査は、 有機 E L素 子 1 0 において、 背面封止板 2 0 の脱アル力 リ部 2 1 の厚さが異なる実 施例 1 2 3及び比較例 1 2 0 に対して行ったが、 同様に、 ガラス基 板 1 1 の脱アルカ リ部 2 1 の厚さが実施例 1 2 3 及び比較例 1 2 0 の背面封止板 2 0 と同様に異なる有機 E L素子 1 0 に対して、 上記アル 力 リ 金属塩の結晶析出量評価、 有機 E L積層膜 1 2 のダークスポッ ト発 生時間評価、 背面封止板強度評価、 脱アルカ リ処理の効率性能評価、 及 P 漏 2/13674 As described above, the evaluation of the crystal deposition amount of the alkali metal salt, the evaluation of the dark spot generation time of the organic EL laminated film 12, the evaluation of the strength of the back sealing plate, the evaluation of the efficiency of the alkali removal treatment, and the evaluation of the back sealing The appearance inspection of the surface of the plate 20 was performed on the organic EL element 10 with the thickness of the rear part 21 of the back sealing plate 20 different from that of the embodiment 1 23 and the comparative example 120. Similarly, the thickness of the dealkalized portion 21 of the glass substrate 11 was different from that of the back sealing plate 20 of Example 123 and Comparative Example 120 in the same manner. In contrast to the above, the evaluation of the crystal deposition amount of the above-mentioned Al metal salt, the evaluation of the dark spot generation time of the organic EL laminated film 12, the evaluation of the strength of the back sealing plate, the evaluation of the efficiency of the dealkalization process, and P leak 2/13674
-22- -twenty two-
ぴ背面封止板 2 0表面の外観検査を行い、 実施例 1 〜 2 3 及び比較例 1 〜 2 0 と同様の結果が得られた。 (4) The appearance of the surface of the back sealing plate 20 was inspected, and the same results as in Examples 1 to 23 and Comparative Examples 1 to 20 were obtained.
したがって、 ガラス基板 1 1 の脱アルカ リ部 1 5 の厚みは 1 n m以上 1 /^ m以下であるのが好ま し く 、 1 0 n m以上 1 0 0 n m以下であるの がさ らに好ま し く 、 脱アルカ リ部 1 5 のアルカ リ土類金属イ オ ン濃度平 均値の内側層 1 6 のアル力 リ土類金属ィ オ ン濃度平均値に対する比が 8 0 %以上であるのが好ま しいこ とが分かる。 また、 ガラス基板 1 1 の脱 アルカ リ処理において、 脱アルカ リ処理用温水の温度は、 7 0 以上で あるのが好ま し く 、 脱アル力 リ処理用温水に多価金属ィ ォンの添加をす るのが好ま し く 、 脱アルカ リ処理用温水の p Hは、 3以上 1 0以下であ るのが好ま しいこ とが分かる。 Therefore, the thickness of the dealkalized portion 15 of the glass substrate 11 is preferably 1 nm or more and 1 / ^ m or less, and more preferably 10 nm or more and 100 nm or less. In particular, the ratio of the average alkaline earth metal ion concentration in the de-alkali zone 15 to the average alkaline earth metal ion concentration in the inner layer 16 is 80% or more. It turns out to be good. In addition, in the de-alkaline treatment of the glass substrate 11, the temperature of the de-alkaline processing hot water is preferably 70 or more, and polyvalent metal ions are added to the de-alcohol processing hot water. It can be seen that the pH of the hot water for dealkalization treatment is preferably 3 or more and 10 or less.
また、 本発明者は、 表 6 に示すよ う に、 ソーダラ イ ムガラス製であつ て且つ表面に S i 0 2が積層されている ガラス基板 4 1 、 及ぴソーダラ ィ ムガラス製であつて且つ表面に S i 0 2が積層されている背面封止板 4 2 を備える図 3 の有機 E L素子 4 0 (実施例 2 4 ) 、 及ぴソーダライ ムガラス製であって且つ化学強化処理が施されてお り 、 表面の N a が K に変換されているガラス基板 5 1 、 及び V —ダラ イ ムガラス製であって 且つ化学強化処理が施されてお り 、 表面の N aが Kに変換されている背 面封止板 5 2 を備える図 4 の有機 E L素子 5 0 (実施例 2 5 ) を夫々作 成した。 Further, as shown in Table 6, the present inventor made a glass substrate 41 made of soda lime glass and having Sio 2 laminated on the surface thereof, and made of soda lime glass and made of soda lime glass. S i 0 2 organic EL element 4 0 in FIG. 3 with a rear seal plate 4 2 are stacked (example 2 4) Contact with and chemical strengthening treatment which is made及Pi Sodarai Mugarasu is applied to And the glass substrate 51 whose surface Na has been converted to K, and which is made of V—Dry glass and has been subjected to a chemical strengthening treatment, and the surface Na has been converted to K. The organic EL device 50 (Example 25) of FIG. 4 including the back surface sealing plate 52 was produced.
次いで、 上記実施例 2 4 , 2 5 に対し、 上記と同様に、 実施例 2 4 , 2 5 を駆動状態で雰囲気温度 1 0 0 X の高温環境下に保管し、 ダークス ポッ 卜が発生するまでの時間を測定するダークスポッ ト発生時間評価を 行った。 ダークスポッ ト発生時間評価の結果を表 6 に示す。 表 6 Next, for Examples 24 and 25, in the same manner as described above, Examples 24 and 25 were stored in a driving state under a high-temperature environment at an ambient temperature of 100 X until dark spots were generated. The dark spot generation time was evaluated by measuring the time of the dark spot. Table 6 shows the results of the dark spot occurrence time evaluation. Table 6
表 6 から、 有機 E L素子 4 0 , 5 0 において、 ガラス基板 4 1, 5 1 及ぴ背面封止板 4 2, 5 2 が、 ソーダラ イ ム ガラス製であって且つ表面 に S i 0 2が積層されている場合、 及びソ一ダラ イ ムガラス製であって 且つ化学強化処理が施されており 、 表面の N aが Kに変換されている場 合に、 高温環境下でも ガラス基板 4 1 , 5 1 及び背面封止板 4 2 , 5 2 からアルカ リ金属イ オ ンが溶出する こ と を防止でき、 ダークスポッ ト発 生時間を長くする こ とができ るこ とが分かる。 産業上の利用可能性 Table 6 shows that in the organic EL elements 40 and 50, in the organic EL elements 40 and 50, the glass substrates 41 and 51 and the back sealing plates 42 and 52 are made of soda lime glass and have Si 0 2 on the surface. When laminated, and when made of soda lime glass and subjected to chemical strengthening treatment and Na on the surface is converted to K, the glass substrate 41, even in a high temperature environment, It can be seen that alkaline metal ions can be prevented from being eluted from 51 and the rear sealing plates 42, 52, and the dark spot generation time can be prolonged. Industrial applicability
以上詳述したよ う に、 本発明に係る背面封止部材によれば、 ソ一ダラ ィムガラス製であ り、 その最表面層のアルカ リ金属ィ ォ ン濃度が最表面 層に続く 内側層のアルカ リ金属イ オ ン濃度よ り も低いので、 アル力 リ金 属ィ ォ ンの背面封止部材表面からの溶出を抑制して、 アルカ リ金属ィォ ンによる有機 E L素子の劣化を防止するこ とができ、 も つて有機 E L素 子の寿命を増大させる こ とができ る。 As described in detail above, according to the back surface sealing member of the present invention, the back surface sealing member is made of soda lime glass, and the alkali metal ion concentration of the outermost surface layer is the inner layer following the outermost surface layer. Since the concentration is lower than the alkali metal ion concentration, the elution of the alkali metal ion from the surface of the back sealing member is suppressed, and the deterioration of the organic EL element due to the alkali metal ion is prevented. Therefore, the lifetime of the organic EL device can be increased.
本発明に係る背面封止部材によれば、 その最表面層の厚みが 1 n m以 上 1 μ m以下であるので、 アルカ リ金属ィ ォンの背面封止部材表面から の溶出を よ り抑制する こ とができ る。 According to the back sealing member of the present invention, since the thickness of the outermost surface layer is not less than 1 nm and not more than 1 μm, elution of alkali metal ions from the surface of the back sealing member is further suppressed. can do.
本発明に係る背面封止部材によれば、 背面封止部材の最表面層の厚み が 1 0 n m以上 1 0 0 n m以下であるので、 アル力 リ金属ィォンの背面 封止部材表面からの溶出をよ り一層抑制する こ とができ る。 According to the back sealing member of the present invention, the thickness of the outermost surface layer of the back sealing member Is not less than 100 nm and not more than 100 nm, it is possible to further suppress the elution of metal ions from the surface of the back sealing member.
本発明に係る背面封止部材によれば、 背面封止部材の最表面層におけ るアルカ リ土類金属ィ ォン濃度の平均値が、 最表面層に続く 内側層のァ ルカ リ土類金属イ オン濃度の平均値に対して 8 0 %以上であるので、 ァ ルカ リ金属ィ ォ ンの背面封止部材表面からの溶出をさ らに抑制する こ と ができ る。 According to the back sealing member according to the present invention, the average value of the alkaline earth metal ion concentration in the outermost surface layer of the back sealing member is changed to the alkaline earth metal of the inner layer following the outermost surface layer. Since the average value of the metal ion concentration is 80% or more, the elution of alkaline metal ions from the surface of the back sealing member can be further suppressed.
本発明に係るガラス基板によれば、 ソーダライ ムガラス製であ り 、 そ の最表面層のアルカ リ 金属ィ ォン濃度が最表面層に続く 内側層のアル力 リ金属イ オン濃度よ り も低いので、 アルカ リ金属イオンのガラス基板表 面からの溶出を抑制して、 アル力 リ金属イ オンによ る有機 E L素子の劣 化を防止する こ とができ、 も って有機 E L素子の寿命を増大させる こ と ができ る。 According to the glass substrate of the present invention, the glass substrate is made of soda lime glass, and the concentration of alkali metal ions in the outermost surface layer is lower than the concentration of alkali metal ions in the inner layer following the uppermost surface layer. Therefore, elution of alkali metal ions from the surface of the glass substrate can be suppressed, and deterioration of the organic EL element due to alkali metal ions can be prevented. Can be increased.
本発明に係るガラス基板によれば、 その最表面層の厚みが 1 n m以上 以下であるので、 アルカ リ金属イオンのガラス基板表面からの溶 出をよ り抑制する こ とができ る。 According to the glass substrate of the present invention, since the thickness of the outermost surface layer is not more than 1 nm, the leaching of alkali metal ions from the surface of the glass substrate can be further suppressed.
本発明に係るガラス基板によれば、 その最表面層の厚みが 1 0 n m以 上 1 0 0 n m以下であるので、 アルカ リ金属イ オンのガラス基板表面か らの溶出を よ り一層抑制するこ とができる。 According to the glass substrate of the present invention, the thickness of the outermost surface layer is not less than 100 nm and not more than 100 nm, so that the elution of alkali metal ions from the surface of the glass substrate is further suppressed. be able to.
本発明に係るガラス基板によれば、 その最表面層におけるアルカ リ土 類金属イ オン濃度の平均値が、 最表面層に続く 内側層のアルカ リ土類金 属イ オン濃度の平均値に対して 8 0 %以上であるので、 アルカ リ金属ィ オンのガラス基板表面からの溶出をさ らに抑制する こ とができ る。 According to the glass substrate of the present invention, the average value of the alkaline earth metal ion concentration in the outermost surface layer is different from the average value of the alkaline earth metal ion concentration in the inner layer following the uppermost surface layer. Therefore, the elution of alkali metal ions from the glass substrate surface can be further suppressed.
本発明に係る背面封止部材の製造方法によれば、 加熱成型されたソー ダライム製ガラス素板に脱アルカ リ処理を施すので、 有機 E L素子の寿 命を増大させる こ とができ る背面封止部材を安価に提供する こ とができ る。 According to the method for manufacturing a back sealing member according to the present invention, since the soda lime glass plate formed by heating is subjected to dealkalizing treatment, the life of the organic EL element can be increased. Stop members can be provided at low cost. You.
本発明に係る背面封止部材の製造方法によれば、 脱アル力 リ処理はソ ーダライ ム製ガラス素板を温水に浸漬する処理であるので、 ソ一ダライ ムガラス製ガラス素板の脱アルカ リ処理を効率的に施すこ とができ る。 本発明に係る背面封止部材の製造方法によれば、 温水の温度が 7 0 °C 以上 1 0 0 °C以下であるので、 ソーダライ ムガラス製ガラス素板の脱ァ ルカ リ処理をよ り効率的に施すこ とができ る。 According to the method of manufacturing the back sealing member according to the present invention, since the deallocation force treatment is a process of immersing the soda lime glass plate in warm water, the dealamination of the soda lime glass plate is performed. Processing can be performed efficiently. According to the method of manufacturing the back sealing member of the present invention, the temperature of the hot water is not less than 70 ° C. and not more than 100 ° C., so that the decalcification of the soda lime glass base plate is more efficient. Can be applied in a targeted manner.
本発明に係る背面封止部材の製造方法によれば、 温水に多価の金属ィ オンを添加するので、 多価の金属イ オ ンがソ一ダライ ムガラスの骨格成 分である シリ カ表面に吸着 してシリ カの溶解を防止し、 も って背面封止 部材の最表面層のダメ ージ'を抑制する こ とができ る。 According to the method for manufacturing the back sealing member according to the present invention, since the polyvalent metal ion is added to the hot water, the polyvalent metal ion is added to the surface of the silica, which is a skeletal component of soda lime glass. Adsorption prevents silica from dissolving, thereby suppressing damage to the outermost surface layer of the back sealing member.
本発明に係る背面封止部材の製造方法によれば、 多価の金属ィ ォ ンが アルミ ニウムイ オ ンであるので、 多価の金属イ オ ンを低価格とする こ と ができ る。 According to the method of manufacturing the back sealing member according to the present invention, since the polyvalent metal ion is aluminum ion, the polyvalent metal ion can be reduced in price.
本発明に係る背面封止部材の製造方法によ れば、 温水の p Hが 3 以上 1 0 以下であるので、 シリ カの溶解を防止でき、 も って背面封止部材の 最表面層のダメ ージを抑制する こ とができ る。 According to the method of manufacturing the back sealing member according to the present invention, since the pH of the hot water is 3 or more and 10 or less, dissolution of silica can be prevented, and thus the outermost surface layer of the back sealing member can be prevented. Damage can be suppressed.
本発明に係るガラス基板の製造方法によれば、 加熱成型されたソ一ダ ライ ム製ガラス素板に脱アルカ リ処理を施すので、 有機 E L素子の寿命 を増大させる こ とができ るガラス基板を安価に提供する こ とができ る。 本発明に係るガラス基板の製造方法によれば、 脱アルカ リ処理はソー ダラ イ ム製ガラス素板を温水に浸漬する処理であるので、 ソーダラ イ ム ガラス製ガラス素板の脱アルカ リ処理を効率的に施すこ とができる。 本発明に係るガラス基板の製造方法によれば、 温水の温度が 7 0 °C以 上 1 0 0 °C以下であるので、 ソーダラ イ ムガラス製ガラス素板の脱アル 力 リ処理をよ り効率的に施すこ とができ る。 本発明に係るガラス基板の製造方法によれば、 温水に多価の金属ィ ォ ンを添加するので、 多価の金属イ オンがソーダラ イ ムガラスの骨格成分 であるシ リ カ表面に吸着してシリ カの溶解を防止し、 も ってガラス基板 の最表面層のダメ ージを抑制するこ とができ る。 According to the method of manufacturing a glass substrate according to the present invention, the soda lime glass base plate that has been formed by heating is subjected to dealkalizing treatment, so that the life of the organic EL element can be increased. Can be provided at low cost. According to the method for manufacturing a glass substrate according to the present invention, the dealkalizing process is a process of immersing the sodalime glass base plate in warm water. It can be applied efficiently. According to the method of manufacturing a glass substrate of the present invention, the temperature of the hot water is not less than 70 ° C. and not more than 100 ° C., so that the soda lime glass base plate is more efficiently removed. Can be applied in a targeted manner. According to the glass substrate manufacturing method of the present invention, since polyvalent metal ions are added to hot water, polyvalent metal ions are adsorbed on the silica surface, which is a skeleton component of soda lime glass. Dissolution of silica can be prevented, and thus damage to the outermost surface layer of the glass substrate can be suppressed.
本発明に係る ガラス基板の製造方法によれば、 多価の金属イ オンがァ ルミ ニゥムイ オ ンであるので、 多価の金属イ オンを低価格とするこ とが でき る。 According to the method of manufacturing a glass substrate according to the present invention, since the polyvalent metal ion is an aluminum ion, the price of the polyvalent metal ion can be reduced.
本発明に係るガラス基板の製造方法によれば、 温水の p Hが 3以上 1 0以下であるので、 シリ カの溶解を防止でき、 も ってガラス基板の最表 面層のダメ ージを抑制する こ とができ る。 According to the glass substrate manufacturing method of the present invention, the pH of the hot water is 3 or more and 10 or less, so that the dissolution of silica can be prevented, and thus the damage of the outermost surface layer of the glass substrate can be prevented. Can be suppressed.
本発明に係る有機 E L素子によれば、 本発明に係る背面封止部材を備 えるので、 アルカ リ金属イ オンの背面封止部材表面からの溶出を抑制し て、 アルカ リ金属イオンによる有機 E L素子の劣化を防止する こ とがで き、 も って有機 E L素子の寿命を増大させる こ とができ る。 According to the organic EL device of the present invention, since the back sealing member of the present invention is provided, elution of the alkali metal ions from the surface of the back sealing member is suppressed, and the organic EL device is formed of alkali metal ions. The deterioration of the device can be prevented, and the life of the organic EL device can be prolonged.
本発明に係る有機 E L素子によれば、 本発明に係るガラス基板を備え るので、 アルカ リ金属イオンのガラス基板表面からの溶出を抑制して、 アルカ リ金属イ オンによる有機 E L素子の劣化を防止するこ とができ、 もって有機 E L素子の寿命を増大させるこ とができ る。 According to the organic EL device of the present invention, since the glass substrate of the present invention is provided, elution of alkali metal ions from the surface of the glass substrate is suppressed, and deterioration of the organic EL device due to the alkali metal ions is suppressed. Thus, the lifetime of the organic EL device can be increased.
本発明に係る有機 E L素子によれば、 本発明に係る背面封止部材と、 本発明に係るガラス基板と を備えるので、 アル力 リ金属イ オンの背面封 止部材及ぴガラス基板の各表面からの溶出を抑制 して、 アルカ リ金属ィ オンによ る有機 E L素子の劣化を防止する こ とができ、 もつて有機 E L 素子の寿命を増大させる こ とができ る。 According to the organic EL device of the present invention, since the organic EL device includes the back sealing member of the present invention and the glass substrate of the present invention, the back sealing member of the metal ion and the respective surfaces of the glass substrate are provided. It is possible to prevent the organic EL element from deteriorating due to the alkali metal ions by suppressing the elution from the organic EL element, and also to prolong the life of the organic EL element.
Claims
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2004-7011587A KR20040077809A (en) | 2002-01-28 | 2002-12-26 | Back sealing member for organic electroluminescence device, glass substrate for organic electroluminescence device, organic electroluminescence device, and methods for manufacturing sealing member and glass substrate |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002018679A JP2003217833A (en) | 2002-01-28 | 2002-01-28 | Back sealing can for organic electroluminescence display and method for manufacturing the sealing can |
| JP2002-18679 | 2002-01-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2003065769A1 true WO2003065769A1 (en) | 2003-08-07 |
Family
ID=27653930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2002/013674 Ceased WO2003065769A1 (en) | 2002-01-28 | 2002-12-26 | Back sealing member for organic electroluminescence device, glass substrate for organic electroluminescence device, organic electroluminescence device, and methods for manufacturing sealing member and glass substrate |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2003217833A (en) |
| KR (1) | KR20040077809A (en) |
| CN (1) | CN1618255A (en) |
| TW (1) | TW200306755A (en) |
| WO (1) | WO2003065769A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100423317C (en) * | 2004-04-01 | 2008-10-01 | 上海宏力半导体制造有限公司 | Device and packaging method of organic electroluminescent component |
| JP2022152210A (en) * | 2021-03-29 | 2022-10-12 | 株式会社カネカ | Substrate laminate and method for manufacturing substrate laminate |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1672468A (en) * | 2002-07-31 | 2005-09-21 | 日本板硝子株式会社 | Sealing plate for electroluminescent element and sample glass substrate for producing a plurality of the sealing plate |
| JP2007212705A (en) * | 2006-02-09 | 2007-08-23 | Hoya Corp | Mask blank and photomask |
| KR100869127B1 (en) * | 2007-03-30 | 2008-11-17 | 주식회사 나모텍 | Organic Light-Emitting Diode and Manufacturing Method Thereof |
| US8568184B2 (en) | 2009-07-15 | 2013-10-29 | Apple Inc. | Display modules |
| KR102568779B1 (en) * | 2016-05-30 | 2023-08-22 | 삼성디스플레이 주식회사 | Display device |
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2002
- 2002-01-28 JP JP2002018679A patent/JP2003217833A/en not_active Withdrawn
- 2002-12-26 KR KR10-2004-7011587A patent/KR20040077809A/en not_active Ceased
- 2002-12-26 WO PCT/JP2002/013674 patent/WO2003065769A1/en not_active Ceased
- 2002-12-26 TW TW091137468A patent/TW200306755A/en unknown
- 2002-12-26 CN CNA028276140A patent/CN1618255A/en active Pending
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|---|---|---|---|---|
| JPS5826052A (en) * | 1981-08-06 | 1983-02-16 | Asahi Glass Co Ltd | Glass body with silicon oxide film to prevent alkali diffusion |
| JPS60176952A (en) * | 1984-02-23 | 1985-09-11 | Asahi Glass Co Ltd | Method for preventing weathering of glass |
| JPH07506329A (en) * | 1992-10-02 | 1995-07-13 | サン―ゴバン ビトラージュ | Glass substrate used in electronics and obtained by dealkalization |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100423317C (en) * | 2004-04-01 | 2008-10-01 | 上海宏力半导体制造有限公司 | Device and packaging method of organic electroluminescent component |
| JP2022152210A (en) * | 2021-03-29 | 2022-10-12 | 株式会社カネカ | Substrate laminate and method for manufacturing substrate laminate |
| JP7634403B2 (en) | 2021-03-29 | 2025-02-21 | 株式会社カネカ | Substrate laminate and method for manufacturing said substrate laminate |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1618255A (en) | 2005-05-18 |
| KR20040077809A (en) | 2004-09-06 |
| JP2003217833A (en) | 2003-07-31 |
| TW200306755A (en) | 2003-11-16 |
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