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WO2003049175A1 - Irradiateur a faisceaux et dispositif de recuit pour laser - Google Patents

Irradiateur a faisceaux et dispositif de recuit pour laser Download PDF

Info

Publication number
WO2003049175A1
WO2003049175A1 PCT/JP2002/012340 JP0212340W WO03049175A1 WO 2003049175 A1 WO2003049175 A1 WO 2003049175A1 JP 0212340 W JP0212340 W JP 0212340W WO 03049175 A1 WO03049175 A1 WO 03049175A1
Authority
WO
WIPO (PCT)
Prior art keywords
beam splitter
reflecting mirror
laser
anneal device
laser anneal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2002/012340
Other languages
English (en)
French (fr)
Inventor
Koichi Tsukihara
Koichi Tatsuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2003550273A priority Critical patent/JPWO2003049175A1/ja
Priority to US10/467,518 priority patent/US7109435B2/en
Priority to KR10-2003-7010265A priority patent/KR20040063079A/ko
Publication of WO2003049175A1 publication Critical patent/WO2003049175A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/18, H10D48/04 and H10D48/07, with or without impurities, e.g. doping materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/06—Surface hardening
    • C21D1/09—Surface hardening by direct application of electrical or wave energy; by particle radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34—Methods of heating

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Nonlinear Science (AREA)
  • Materials Engineering (AREA)
  • Thermal Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Recrystallisation Techniques (AREA)
PCT/JP2002/012340 2001-12-07 2002-11-26 Irradiateur a faisceaux et dispositif de recuit pour laser Ceased WO2003049175A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2003550273A JPWO2003049175A1 (ja) 2001-12-07 2002-11-26 光照射装置及びレーザアニール装置
US10/467,518 US7109435B2 (en) 2001-12-07 2002-11-26 Beam irradiator and laser anneal device
KR10-2003-7010265A KR20040063079A (ko) 2001-12-07 2002-11-26 광 조사 장치 및 레이저 어닐 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001/374922 2001-12-07
JP2001374922 2001-12-07

Publications (1)

Publication Number Publication Date
WO2003049175A1 true WO2003049175A1 (fr) 2003-06-12

Family

ID=19183394

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/012340 Ceased WO2003049175A1 (fr) 2001-12-07 2002-11-26 Irradiateur a faisceaux et dispositif de recuit pour laser

Country Status (5)

Country Link
US (1) US7109435B2 (ja)
JP (1) JPWO2003049175A1 (ja)
KR (1) KR20040063079A (ja)
TW (1) TWI223843B (ja)
WO (1) WO2003049175A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100683662B1 (ko) * 2003-11-28 2007-02-20 삼성에스디아이 주식회사 레이저 가공 장치
CN101678507B (zh) * 2007-06-18 2012-11-28 应用材料公司 用于热处理工件的处理系统和使衬底激光退火的方法
JP2016507075A (ja) * 2013-01-21 2016-03-07 インテル・コーポレーション スペックルを減少するための方法
JP2018504599A (ja) * 2015-01-21 2018-02-15 トルネード スペクトラル システムズ，インコーポレイテッド ハイブリッド像瞳光学リフォーマッター

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US8042740B2 (en) * 2000-11-24 2011-10-25 Metrologic Instruments, Inc. Method of reading bar code symbols on objects at a point-of-sale station by passing said objects through a complex of stationary coplanar illumination and imaging planes projected into a 3D imaging volume
JP3977038B2 (ja) 2001-08-27 2007-09-19 株式会社半導体エネルギー研究所 レーザ照射装置およびレーザ照射方法
JP2004055771A (ja) * 2002-07-18 2004-02-19 Nec Lcd Technologies Ltd 半導体薄膜の製造方法及びレーザ照射装置
JP2004158568A (ja) * 2002-11-05 2004-06-03 Sony Corp 光照射装置
US8536492B2 (en) * 2003-10-27 2013-09-17 Applied Materials, Inc. Processing multilayer semiconductors with multiple heat sources
JP2007110064A (ja) 2005-09-14 2007-04-26 Ishikawajima Harima Heavy Ind Co Ltd レーザアニール方法及び装置
US7615722B2 (en) * 2006-07-17 2009-11-10 Coherent, Inc. Amorphous silicon crystallization using combined beams from optically pumped semiconductor lasers
US20080013182A1 (en) * 2006-07-17 2008-01-17 Joerg Ferber Two-stage laser-beam homogenizer
US7888620B2 (en) * 2006-07-31 2011-02-15 Electro Scientific Industries, Inc. Reducing coherent crosstalk in dual-beam laser processing system
KR100900684B1 (ko) * 2007-07-19 2009-06-01 삼성전기주식회사 라인 빔 레이저 장치 및 이를 이용한 표면 측정 장치
US20090034071A1 (en) * 2007-07-31 2009-02-05 Dean Jennings Method for partitioning and incoherently summing a coherent beam
US8148663B2 (en) 2007-07-31 2012-04-03 Applied Materials, Inc. Apparatus and method of improving beam shaping and beam homogenization
US8460983B1 (en) * 2008-01-21 2013-06-11 Kovio, Inc. Method for modifying and controlling the threshold voltage of thin film transistors
JP5671766B2 (ja) * 2009-10-01 2015-02-18 トルネード スペクトラル システムズ，インコーポレイテッド 分散分光器のスペクトル分解能を改善するための光学スライサー
TWI543264B (zh) * 2010-03-31 2016-07-21 應用材料股份有限公司 雷射光束定位系統
US8946594B2 (en) * 2011-11-04 2015-02-03 Applied Materials, Inc. Optical design for line generation using microlens array
GB201200890D0 (en) * 2012-01-19 2012-02-29 Univ Dundee An ion exchange substrate and metalized product and apparatus and method for production thereof
DE102014208435A1 (de) * 2014-05-06 2015-11-12 Siemens Aktiengesellschaft Anordnung und Verfahren zum schichtweisen Erstellen einer Auftragschicht
JP6679229B2 (ja) * 2015-06-30 2020-04-15 キヤノン株式会社 被検体情報取得装置及び光源装置
CN106785817B (zh) * 2017-03-24 2020-03-06 京东方科技集团股份有限公司 一种光学设备及准分子激光退火系统
CN106980180B (zh) * 2017-05-08 2019-06-11 中国科学院长春光学精密机械与物理研究所 一种合束装置及其制作方法
KR102688794B1 (ko) * 2019-01-11 2024-07-29 삼성디스플레이 주식회사 레이저 결정화 장치
KR20210057265A (ko) * 2019-11-11 2021-05-21 삼성전자주식회사 레이저 어닐링 장치 및 그를 이용한 반도체 소자의 제조 방법
KR102759423B1 (ko) * 2020-08-31 2025-01-31 삼성디스플레이 주식회사 레이저 조사 장치
TWI772937B (zh) 2020-10-26 2022-08-01 財團法人工業技術研究院 雷射光束整形裝置、雷射加工系統以及雷射焊接互鎖結構
DE102021131456A1 (de) 2021-11-30 2023-06-01 Trumpf Laser- Und Systemtechnik Gmbh Linienoptiksystem
US12379575B2 (en) * 2022-07-26 2025-08-05 The United States Of America, As Represented By The Secretary Of The Navy Digital adaptive optics encoder module

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US5005969A (en) * 1988-03-30 1991-04-09 Hitachi, Ltd. Optical projection apparatus with the function of controlling laser coherency
US5071225A (en) * 1989-12-29 1991-12-10 Hoya Corporation Beam splitter for producing a plurality of splitted light beams for each of wavelength components of an incident light beam
JPH0476553A (ja) * 1990-07-18 1992-03-11 Dainippon Screen Mfg Co Ltd カラー画像記録装置
JPH0629177A (ja) * 1992-07-09 1994-02-04 Nec Corp 半導体露光装置
JPH0882711A (ja) * 1994-09-12 1996-03-26 Nippon Telegr & Teleph Corp <Ntt> 光合波器及び光分波器
EP0785473A2 (en) * 1996-01-16 1997-07-23 AT&T Corp. Reduction in damage to optical elements used in optical lithography for device fabrication
US20010005606A1 (en) * 1999-12-24 2001-06-28 Koichiro Tanaka Laser irradiation apparatus and method of fabricating a semiconductor device

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Publication number Priority date Publication date Assignee Title
US5005969A (en) * 1988-03-30 1991-04-09 Hitachi, Ltd. Optical projection apparatus with the function of controlling laser coherency
US5071225A (en) * 1989-12-29 1991-12-10 Hoya Corporation Beam splitter for producing a plurality of splitted light beams for each of wavelength components of an incident light beam
US5003543A (en) * 1990-01-19 1991-03-26 California Jamar, Incorporated Laser plasma X-ray source
JPH0476553A (ja) * 1990-07-18 1992-03-11 Dainippon Screen Mfg Co Ltd カラー画像記録装置
JPH0629177A (ja) * 1992-07-09 1994-02-04 Nec Corp 半導体露光装置
JPH0882711A (ja) * 1994-09-12 1996-03-26 Nippon Telegr & Teleph Corp <Ntt> 光合波器及び光分波器
EP0785473A2 (en) * 1996-01-16 1997-07-23 AT&T Corp. Reduction in damage to optical elements used in optical lithography for device fabrication
US20010005606A1 (en) * 1999-12-24 2001-06-28 Koichiro Tanaka Laser irradiation apparatus and method of fabricating a semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100683662B1 (ko) * 2003-11-28 2007-02-20 삼성에스디아이 주식회사 레이저 가공 장치
CN101678507B (zh) * 2007-06-18 2012-11-28 应用材料公司 用于热处理工件的处理系统和使衬底激光退火的方法
JP2016507075A (ja) * 2013-01-21 2016-03-07 インテル・コーポレーション スペックルを減少するための方法
JP2018504599A (ja) * 2015-01-21 2018-02-15 トルネード スペクトラル システムズ，インコーポレイテッド ハイブリッド像瞳光学リフォーマッター

Also Published As

Publication number Publication date
KR20040063079A (ko) 2004-07-12
TW200305231A (en) 2003-10-16
JPWO2003049175A1 (ja) 2005-04-21
US20040120050A1 (en) 2004-06-24
TWI223843B (en) 2004-11-11
US7109435B2 (en) 2006-09-19

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