[go: up one dir, main page]

WO2003046492A1 - String weight sensor - Google Patents

String weight sensor Download PDF

Info

Publication number
WO2003046492A1
WO2003046492A1 PCT/IB2001/002281 IB0102281W WO03046492A1 WO 2003046492 A1 WO2003046492 A1 WO 2003046492A1 IB 0102281 W IB0102281 W IB 0102281W WO 03046492 A1 WO03046492 A1 WO 03046492A1
Authority
WO
WIPO (PCT)
Prior art keywords
string
sensor
led
phototransistor
virtue
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IB2001/002281
Other languages
French (fr)
Inventor
Mark Fielker
Igor Kuznetsov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to PCT/IB2001/002281 priority Critical patent/WO2003046492A1/en
Publication of WO2003046492A1 publication Critical patent/WO2003046492A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/10—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings
    • G01L1/103—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings optical excitation or measuring of vibrations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G01G3/16—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of frequency of oscillations of the body
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/10—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings
    • G01L1/106—Constructional details

Definitions

  • This invention constitutes a piece of measuring equipment and thus falls under the category of measuring equipment.
  • This particular invention is to be utilized in an automated control system for the technological process of single crystal growth with a capacity for feedback as to the weight of a growing single crystal.
  • a well-known weight sensor (see Weight Sensor BP34 by Sartorious) has been used as a base model and comprises a string shaped sensitive element made of tungsten and rhenium glass rod that is clamped in clamps and placed into the field of permanent magnet.
  • the task in question has been solved by the design of the string sensor that comprises a string shaped sensitive element made of tungsten and rhenium glass rod that is placed into the frame as well as into the field of permanent magnet, in accordance with the invention, where the boards are placed under a hermetic casing that provides power supply for the sensor and transmission of the signal to the computer.
  • the effect of the invention is based upon a structure where one of the boards rotates along with the weight sensor while the other remains static. Power is transmitted via a transformer that rotates, by one part of, it is fixed to the dynamic board, and by the other to the static one.
  • Signal to the computer will be transformed via an optoelectronic couple: light- emitting diode (LED) and phototransistor that are placed coaxially. The LED is fixed to the board that rotates while the phototransistor is fixed to the static board. All parts of the structure have been assembled in an axially symmetric manner to minimize imbalance when the weight sensor rotates.
  • LED light- emitting diode
  • Signal that is received from the weight sensor in a digital format meets the requirements of the computerized system of control more efficiently.
  • the data received indicate resolution of the sensor at 0.1 - 0.2 grams for 10 kg.
  • Figure 1 shows a full size image of the weight sensor
  • Figure 2 shows a section image of the device.
  • String weight sensor contains a string-shaped sensitive element (1 ) made of tungsten and rhenium glass rod clamped in clamps (2 and 3). Diameter of the rod depends on the boundary weight required that can be measured.
  • the string of the sensitive element (1 ) is placed in the field of permanent magnet, in the gap between the polar rod ends (4 and 5), in particular.
  • the shape formed creates the necessary tension for the magnetic field.
  • the top clamp (1) of the sensitive element (1 ) is attached to the electrolyzed bearing by hinges.
  • the safety clutch (6) attached by centering rims (7) that possess great radial stiffness for transmitting the rotating mode as well as minimal axial mode so that not to create a prop during transmission effort (weight of the growing single crystal) to the string of the sensitive element (1 ).
  • the entire above-mentioned structure is fitted into a hermetic casing (8) that enables work of the string-shaped sensitive element (1) in the vacuum or in the gas environment.
  • the first board (9) rotates along with the weight sensor the other remains static. Power supply is transmitted by a transformer (11 ) that rotates: one part of the transformer is fixed to the static board, as the other is fixed to the dynamic board (10).
  • Signal is transmitted through an electronic optical couple that includes a light emitting diode (LED) (12) and a phototransistor (13), where the LED (12) is part the board that rotates while the phototransistor (13) is part of the static board.
  • the LED and the phototransistor are placed coaxially.
  • the principle of operation of the string weight sensor is based on the dependence of oscillation frequency fluctuations of the string upon the change of tightening force, as well as on the change of the weight of the crystal in growth.
  • the weight of the growing crystal is attached to the axle of a rod end (6) that is attached to the bottom clamp (3) of the string of the sensitive element (1 ).
  • a self-excited oscillator (the string (1 ) is a part of it) creates string oscillations in the permanent magnetic field. Frequency of these oscillations corresponds to the level of tightening of the string (weight of the single crystal). If the level of tightening were to change (oscillation frequency of fluctuations of the string (1 ) changes along with the weight of the single crystal. Electrical impulses of the frequency dependent on the self-excited oscillator will transmit via the optoelectronic couple that contains an LED (12) and a phototransistor powered to reach the TTL level (5B), and then are transmitted to the computer for processing.
  • This string weight sensor can be utilized in the semiconductor industry for the purposes of
  • This string weight sensor can be used on units/workstations where the Czokhralski or
  • This device has been designed to serve the purpose of control of the diameter by measuring/weighing of a single crystal in growth.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

Application: the invention can be utilized within an automated system of control of the technological process of single crystal growth. Essence of the Invention: two boards are placed under a hermetic casing; one of them rotates along with the weight sensor, as the other remains static. An optoelectronic couple (that contains an LED and a phototransistor that are placed coaxially) is placed on top fo the boards. Signal is transmitted to the comptuer via the aforementioned optoelectronic couple. Technical outcome: by utilizing the string weight, higher measuring precision and higher sensibility (that allows automated crystal growth from a seedcrystal) can be achieved.

Description

STRING WEIGHT SENSOR
Description
This invention constitutes a piece of measuring equipment and thus falls under the category of measuring equipment. This particular invention is to be utilized in an automated control system for the technological process of single crystal growth with a capacity for feedback as to the weight of a growing single crystal.
A well-known weight sensor (see Weight Sensor BP34 by Sartorious) has been used as a base model and comprises a string shaped sensitive element made of tungsten and rhenium glass rod that is clamped in clamps and placed into the field of permanent magnet.
The disadvantage of this device (see Weight Sensor BP34 by Sartorious) is the fact that it is used solely for the purpose of weighing of the crucible that serves for single crystals growth, as opposed to weighing of the single crystal itself. This reduces the device's measuring precision due to conducting indirect measuring of the single crystal as well as the fact that the aforementioned device has not been designed for rotation.
At the base of the invention there was a task of achieving better measuring precision of the variable at the time of weighing of the single crystal in growth, by using a string transformer that has a digital outlet attached on the boards that provide power supply for the string sensor and transmit a signal to the computer.
The task in question has been solved by the design of the string sensor that comprises a string shaped sensitive element made of tungsten and rhenium glass rod that is placed into the frame as well as into the field of permanent magnet, in accordance with the invention, where the boards are placed under a hermetic casing that provides power supply for the sensor and transmission of the signal to the computer. The effect of the invention is based upon a structure where one of the boards rotates along with the weight sensor while the other remains static. Power is transmitted via a transformer that rotates, by one part of, it is fixed to the dynamic board, and by the other to the static one. Signal to the computer will be transformed via an optoelectronic couple: light- emitting diode (LED) and phototransistor that are placed coaxially. The LED is fixed to the board that rotates while the phototransistor is fixed to the static board. All parts of the structure have been assembled in an axially symmetric manner to minimize imbalance when the weight sensor rotates.
This solves the task of measuring of the variable at the moment of weighing of a growing single crystal, i.e. measuring of the single crystal that rotates, moves and grows in the vacuum or in a specially made gas environment is conducted.
Signal that is received from the weight sensor in a digital format meets the requirements of the computerized system of control more efficiently. The data received indicate resolution of the sensor at 0.1 - 0.2 grams for 10 kg.
The essence of the invention can be seen in the drawings in greater detail, as Figure 1 shows a full size image of the weight sensor and Figure 2 shows a section image of the device.
String weight sensor contains a string-shaped sensitive element (1 ) made of tungsten and rhenium glass rod clamped in clamps (2 and 3). Diameter of the rod depends on the boundary weight required that can be measured.
The string of the sensitive element (1 ) is placed in the field of permanent magnet, in the gap between the polar rod ends (4 and 5), in particular. The shape formed creates the necessary tension for the magnetic field. The top clamp (1) of the sensitive element (1 ) is attached to the electrolyzed bearing by hinges. To the bottom clamp (3), there is a safety clutch also attached by hinges (6) that protects the string (1 ) from breaks, in case the weigh exceeds the border limit allowed. The safety clutch (6) attached by centering rims (7) that possess great radial stiffness for transmitting the rotating mode as well as minimal axial mode so that not to create a prop during transmission effort (weight of the growing single crystal) to the string of the sensitive element (1 ).
The entire above-mentioned structure is fitted into a hermetic casing (8) that enables work of the string-shaped sensitive element (1) in the vacuum or in the gas environment.
There are two boards (9 and 10) above the hermetic casing that provide power supply for the sensor and transmission of the signal to the computer. The first board (9) rotates along with the weight sensor the other remains static. Power supply is transmitted by a transformer (11 ) that rotates: one part of the transformer is fixed to the static board, as the other is fixed to the dynamic board (10).
Signal is transmitted through an electronic optical couple that includes a light emitting diode (LED) (12) and a phototransistor (13), where the LED (12) is part the board that rotates while the phototransistor (13) is part of the static board. The LED and the phototransistor are placed coaxially.
The principle of operation of the string weight sensor is based on the dependence of oscillation frequency fluctuations of the string upon the change of tightening force, as well as on the change of the weight of the crystal in growth.
The weight of the growing crystal is attached to the axle of a rod end (6) that is attached to the bottom clamp (3) of the string of the sensitive element (1 ). A self-excited oscillator (the string (1 ) is a part of it) creates string oscillations in the permanent magnetic field. Frequency of these oscillations corresponds to the level of tightening of the string (weight of the single crystal). If the level of tightening were to change (oscillation frequency of fluctuations of the string (1 ) changes along with the weight of the single crystal. Electrical impulses of the frequency dependent on the self-excited oscillator will transmit via the optoelectronic couple that contains an LED (12) and a phototransistor powered to reach the TTL level (5B), and then are transmitted to the computer for processing.
By utilizing the string sensor in question, higher precision of measuring and higher sensibility can be achieved. These will allow to conduct automated growing of single crystals from a seed crystal with preset geometric specifications. This also allows to increase the output.
Industrial Applicability
This string weight sensor can be utilized in the semiconductor industry for the purposes of
single crystal growth, e.g. in the units/workstations for oxide single crystals growth.
This string weight sensor can be used on units/workstations where the Czokhralski or
Kyropoulus method is applicable.
This device has been designed to serve the purpose of control of the diameter by measuring/weighing of a single crystal in growth.
By utilizing this string sensor of weight on workstations, the precision of shape control that
can be achieved is not available by utilizing any of the existing weight sensors. String weight sensor specifications list
Figs. 1, 2
1. String of the Sensitive Element
2. Upper Clam of the Sensitive Element
3. Lower clam of the Sensitive Element
4. Permanent magnet with the N Pole
5. Permanent magnet with the S Pole
6. Safety Clutch
7. Centering Rim
8. Hermetic Casing
9. Driver Board (dynamic)
10. Transformer Board (static)
11. Transformer
12. Light Emitting Diode
13. Phototransistor
Single Crystal Growth Device for High Temperature Materials Specifications List
1 - String weight sensor
2 - Electronic section of weight sensor
3 - Power cabinet - Control rack
5 - Industrial workstation
6 - Control unit
7 - Vacuum set
8 - Chamber
9 - Manual control unit

Claims

Claim of InventionThis is to claim a status of invention for a STRING WEIGHT SENOR utilized as a measuring device and to be placed on workstations/units for single crystal growth.The aforementioned device has been designed to facilitate better precision control of a growing crystal, as well as to ensure that the growth of a single crystal will be conducted closely to the preset geometric parameters.Formula of the Invention
1. String weight sensor that contains a string-shaped sensor made of tungsten and rhenium glass rod that is clamped in clamps and placed in the field of permanent magnet that is unique by virtue of two wafers placed under a waterproof case that provide power supply for the sensor and transmission of the signal to the computer. One of the wafers is dynamic and has a capacity of revolving along with the weight sensor; the other is static.
2. The device described in item 1 is unique by virtue of consisting an optoelectronic couple that is a light emitting diode (LED) and phototransistor installed coaxially for the purpose of transmitting of the signal where the LED is attached to dynamic wafer while the phototransistor is attached to the static wafer.
3. The device described in item 1 is unique by virtue of all its parts having been designed in an axially symmetrical manner.
4. The device described in item 1 is unique by virtue of that for the purpose of increasing of the quality of oscillation, end points of the permanent magnets that generate the field for the sensor have a special shape.
5. The device described in item 1 is unique by virtue of that for the purpose of increasing transconductance of the impulse of the signal transmitted, a special system for an energy accumulator from a low power source has been installed that allows to receive high powered impulse of current via the LED.
6. The device described in item 1 is unique by virtue of that for the purpose of diminishing the influence of the high frequency rotating power converter on the measuring part of the sensor, it has been designed so that full screening of the high frequency field of dispersion is available.
Further specifications of the device a patent is sought for are as follows:
This string weight sensor contains a string-shaped sensitive element (1) made of tungsten and rhenium glass rod clamped in clamps (2 and 3). Diameter of the rod depends on the boundary weight required that can be measured.
The string of the sensitive element (1) is placed in the field of permanent magnet, in the gap between the polar rod ends (4 and 5), in particular. The shape formed creates the necessary tension for the magnetic field. The top clamp (1 ) of the sensitive element (1 ) is attached to the electrolyzed bearing by hinges. To the bottom clamp (3), there is a safety clutch also attached by hinges (6) that protects the string (1 ) from breaks, in case the weigh exceeds the border limit allowed. The safety clutch (6) attached by centering rims (7) that possess great radial stiffness for transmitting the rotating mode as well as minimal axial mode so that not to create a prop during transmission effort (weight of the growing single crystal) to the string of the sensitive element (1 ).
The entire above-mentioned structure is fitted into a hermetic casing (8) that enables work of the string-shaped sensitive element (1) in the vacuum or in the gas environment.
There are two boards (9 and 10) above the hermetic casing that provide power supply for the sensor and transmission of the signal to the computer. The first board (9) rotates along with the weight sensor the other remains static. Power supply is transmitted by a transformer (11 ) that rotates: one part of the transformer is fixed to the static board, as the other is fixed to the dynamic board (10).
Signal is transmitted through an electronic optical couple that includes a light emitting diode (LED) (12) and a phototransistor (13), where the LED (12) is part the board that rotates while the phototransistor (13) is part of the static board. The LED and the phototransistor are placed coaxially.
PCT/IB2001/002281 2001-11-26 2001-11-26 String weight sensor Ceased WO2003046492A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/IB2001/002281 WO2003046492A1 (en) 2001-11-26 2001-11-26 String weight sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IB2001/002281 WO2003046492A1 (en) 2001-11-26 2001-11-26 String weight sensor

Publications (1)

Publication Number Publication Date
WO2003046492A1 true WO2003046492A1 (en) 2003-06-05

Family

ID=11004220

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2001/002281 Ceased WO2003046492A1 (en) 2001-11-26 2001-11-26 String weight sensor

Country Status (1)

Country Link
WO (1) WO2003046492A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU757859A1 (en) * 1978-06-15 1980-08-23 Evgenij A Dukhovskoj Weight measuring device
GB2078956A (en) * 1980-06-20 1982-01-13 Postalia Gmbh Weighing device
GB2128329A (en) * 1982-10-05 1984-04-26 Yamato Scale Co Ltd Vibrating wire for sensor
JPS60127434A (en) * 1983-12-14 1985-07-08 Shimadzu Corp Vibrating force detector

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU757859A1 (en) * 1978-06-15 1980-08-23 Evgenij A Dukhovskoj Weight measuring device
GB2078956A (en) * 1980-06-20 1982-01-13 Postalia Gmbh Weighing device
GB2128329A (en) * 1982-10-05 1984-04-26 Yamato Scale Co Ltd Vibrating wire for sensor
JPS60127434A (en) * 1983-12-14 1985-07-08 Shimadzu Corp Vibrating force detector

Similar Documents

Publication Publication Date Title
JP5846405B2 (en) Torque measuring device, torque measuring flange and torque measuring method
US12186866B2 (en) Electric tool system, electric tool, and method for managing electric tool
CN1146520C (en) Method and apparatus for controlling piezoelectric vibration
US7883456B2 (en) Centrifugal machine having a vibration preventing mechanism
CN101135343A (en) Smart Magnetic Bearings
CN107064562A (en) A kind of caliberating device of photoelectric encoder output speed error
CN106918720B (en) A kind of filament restricted type acceleration transducer
WO2003046492A1 (en) String weight sensor
CN101880910A (en) Single crystal furnace weighing device
CN101831778A (en) Drum washing machine
CN102059863A (en) Automatic stamping machine
CN206788206U (en) A kind of caliberating device of photoelectric encoder output speed error
SE526246C2 (en) Apparatus at a torque or shear force meter for determining fiber concentration or viscosity in pulp suspensions and method for returning the measuring shaft in a torque or shear force meter
CN113049087A (en) Electromagnetic type vibration sensor
CN2867336Y (en) Microcomputer Controlling high-temperature creep lasting experimental machine
CN103900762A (en) Unbalance amount measuring device and method thereof
EP0653382B1 (en) Method and apparatus for manufacturing an optical fibre preform
CN102887345A (en) Sensorless speed regulation controller based on observation method and sensorless speed regulation control method for piezoelectric vibration feeder
CN208606888U (en) A kind of automobile engine vibrating sensor automatic calibration device
CN201867230U (en) Weighing device with overhead metering box
US4478303A (en) Weighing scale
CN2591589Y (en) Magnetic suspension mechanism for electronic weighing apparatus
WO1996021849A3 (en) Support system with radially rigid wire suspension
CN107356373A (en) A kind of flabellum dual-threshold detection machine
UA44392A (en) STRING WEIGHT SENSOR

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): CA CN IL JP KR RU US

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Country of ref document: JP