WO2002034012A1 - Irradiation device - Google Patents

Abstract

The invention relates to an irradiation device (1), especially for thermal treatment processes, comprising a plurality of beam sources for emitting an electromagnetic beam, said sources being essentially arranged next to each other and parallel to each other. The main active component of said beam source is in the near-infrared range, especially in the wavelength range between 0.8 mu m and 1.5 mu m. Said beam sources respectively comprise at least one elongated halogen lamp (3) having a tubular glass body which is provided with connections on the end thereof and which has at least one spiral-wound filament. Said beam sources also respectively comprise an elongated reflector (5), at least one cooling liquid flow channel having an inlet and an outlet being provided on or near the ends of the reflector. The inventive device is characterised by two elongated cooling liquid distributors (8) situated on or near the ends of the reflectors and extending essentially perpendicular in relation to the length of the device. A cooling liquid connection (9) is provided on or near an end of said cooling liquid distributors and a plurality of cooling liquid inlets and outlets are distributed along the length of the cooling liquid distributors. Said cooling liquid inlets or outlets are connected to the inlets and outlets of the reflectors.

Description

 Irradiation arrangement

Description

The invention relates to an irradiation arrangement according to the preamble of claim 1.

From earlier patent applications of the applicant, such as DE 197 36 462 AI, WO 99/42774 or P 10024731.8 (unpublished), methods for treating surfaces, processing materials and producing composite materials using electromagnetic radiation are known, the essential ones Active component in the near infrared range, in particular in the wavelength range between 0.8 μm and 1.5 μm. In a number of these applications, the realization of a relatively wide radiation zone is essential in the interest of high productivity of the respective method with a high power density.

It is therefore known to use an elongated halogen lamp, which has a tubular glass body with at least one filament at the ends, with an elongated reflector as a radiation source for thermal processing processes. Parallel arrangements of several such radiation sources are also known.

In known radiation sources or radiation devices with elongated lamps with a base on both sides - for example wise for medical or lighting applications - the lamps have connections or bases which are arranged coaxially to the glass body at its ends; see. such as US 4,287,554 or DE 33 178 12 AI. Moreover, these documents describe radiation arrangements with a plurality of radiation sources which are arranged in parallel next to one another.

With such a radiation source, a broad and, if necessary, also elongated radiation zone can be realized with an approximately constant radiation flux density over its width, which in turn creates uniform process conditions over the corresponding width of the working area.

With the practical application of such radiation sources and radiation arrangements for the generation of radiation zones with

However, energy densities above (sometimes far above) 100 kW / m ² have caused problems with a sufficient lamp life and the dimensional stability of the reflector arrangements, which, according to the inventors' knowledge, can be associated with permanent thermal overload and active cooling of the Require reflectors.

The invention is therefore based on the object of specifying an improved irradiation arrangement of the generic type which allows the generation of a large-area irradiation zone with a very high radiation flux density, with a sufficiently long lifespan with reproducible irradiation parameters and an efficient production and operating mode should be ensured.

This object is achieved by an irradiation arrangement with the features of claim 1. The invention includes the essential idea of assigning a cooling fluid distributor at the ends of the plurality of radiation sources forming an irradiation arrangement - especially the reflectors provided with cooling fluid flow channels. Each cooling fluid distributor has a cooling fluid connection (in particular water connection for water cooling of the reflectors) and a plurality of inlets and outlets connected to the flow channels in the reflectors. The inlets and outlets are arranged over the longitudinal extent of the respective cooling fluid distributor in coordination with the width of the reflectors and the position of the cooling fluid flow channels in these.

In an embodiment which is particularly suitable for the flexible and rational implementation of different irradiation arrangements, both the reflectors and the cooling fluid distributors are designed as solid profiles, in particular extruded profiles, made of a relatively inexpensive material with high thermal conductivity. An aluminum alloy is preferably used for this. The cooling fluid flow channels mentioned are already molded into the profiles by the profile manufacturer. For radiation arrangements of different lengths and / or widths, these profiles are cut to length in accordance with the desired radiation field geometry (in coordination with the halogen lamps used in each case).

The outer contour of the reflectors preferably has a rectangular - and in particular a flat rectangular - cross section. It goes without saying that the actual reflector surface facing the halogen lamp or halogen lamps does not have to be flat, but (depending on the specifically desired radiation parameters) can have the shape of an elliptical or parabolic section or a trapezoidal cross section. An approximate W-shape of the active reflector surface, as described for example in DE 199 09 542 by the Amelder, is particularly preferred. The preferred design of the reflectors and cooling fluid distributors as essentially rectangular profile parts enables the reflectors to be easily fixed to the cooling fluid distributors, in particular by screwing or clamping, in such a way that the cooling fluid reflectors can serve as supporting beams for the reflectors. Such an arrangement is particularly preferably realized in that the inlets and outlets of the reflectors are arranged on the rear side thereof and the cooling fluid distributors are placed flat on the rear sides of the reflectors. To implement such a modular construction, the inlets and outlets of both components are expediently arranged in such a way that they are then aligned with one another. This makes it possible to dispense with additional connecting pieces, it being possible for the fluid channel openings to be sealed to one another in a simple and inexpensive manner by means of O-rings.

In a preferred reflector design, each reflector has (at least) two flow channels and, accordingly, twice the number of inlet and outlet openings. The arrangement of inlets and outlets in the cooling fluid distributor is then also matched to this.

The realization of a closed reflector field is preferred for many applications. This requires a seamless juxtaposition of the reflectors, which must be taken into account when determining the distances between the inlets and outlets in the cooling fluid distributor.

Radiation fields of different lengths are realized by appropriately cutting the cooling fluid distributors to length, as are radiation fields of different widths by appropriately cutting the reflector elements to length. The openings of the cooling fluid flow channels at the End faces of the respective elements are closed with plugs.

For a large number of practical applications, an embodiment of the irradiation arrangement with a counter-reflector surface and / or side reflector surfaces is also preferred. These are - in principle analogous to the design of the reflector surface directly assigned to the halogen lamps - preferably constructed from individual reflector modules which are also provided with cooling fluid flow channels for dissipating the absorbed heat. For these counter and side reflectors, too, a design as a profile part, in particular made of a highly thermally conductive material, with molded flow channels is useful. With regard to the provision and arrangement of inlets and outlets, the preferred cross-sectional configuration and the preferred combination with corresponding cooling fluid distributors, the above statements regarding the (main) reflectors apply largely analogously. However, the counter or side reflectors for many applications will have a strictly rectangular cross-section, i.e. H. have a flat effective reflector surface.

To minimize heat absorption and maximize the proportion of radiation available for the processing process, the surfaces of all reflectors are designed to be highly reflective, in particular polished. For most applications, a flat design of the surfaces of the counter or side reflectors makes sense. In contrast, the active reflector surfaces of the reflector elements directly assigned to the halogen lamps preferably have other cross-sectional shapes, for example the shape of an ellipse or parabola section or a trapezoidal shape. From the current point of view, an approximate W shape is preferred, as described in DE 199 09 542 by the applicant.

For a large number of practical applications, the counter reflectors are preferred in a strict sense to the lamps and de- Ren reflectors arranged, ie in a plane parallel to the plane spanned by the center axes of the halogen lamps. The side reflectors are typically arranged in a plane substantially perpendicular to the plane spanned by the center axes of the halogen lamps. For special applications, however, an inclination of the side reflectors should definitely be considered, for example for the irradiation of inclined side or top surfaces of products to be treated.

When the (main) reflectors assigned to the halogen lamps are combined both with counter reflectors and with side reflectors, a radiation box that is largely closed on the circumference can be formed, which is largely protected against heat accumulation in the interior by the active cooling of some or all of the boundary surfaces.

Advantages and expediencies of the invention also emerge from the subclaims and the following description of preferred exemplary embodiments with reference to the figures. Of these show:

1 is a schematic perspective view of an NIR radiation arrangement according to a first embodiment of the invention,

2 shows a schematic perspective illustration of an NIR radiation arrangement according to a second embodiment of the invention,

Fig. 3 is a partially sectioned side view of a main reflector field consisting of two reflectors according to an embodiment of the invention and 4A and 4B two partially sectioned side views

(in the transverse and longitudinal direction) of a counter-reflector field consisting of two counter-reflectors according to an embodiment of the invention.

1 shows a schematic perspective illustration of the essential elements of an NIR irradiation arrangement 1, which is particularly suitable for the thermal processing of a relatively voluminous processing object (workpiece). It comprises a radiator arrangement 2 consisting of a total of nine elongated tubular halogen filament lamps 3, which are operated for the primary emission of infrared radiation in the range between 0.8 μm and 1.5 μm wavelength, and a main reflector field 4 associated therewith, which consists of three identical ones Reflectors 5 is constructed. Furthermore, the NIR irradiation arrangement 1 comprises a counter-reflector field 6, which is arranged opposite and parallel to the main reflector field and consists of three counter-reflectors 7 of the same type.

On the back of the reflectors 5 and counter-reflectors 7, two cooling water distributor bars 8 with a square cross section are attached, each having a water connection 9. These cooling water distributor bars 8 are provided with a cooling water channel in a manner shown in FIGS. 3 to 4B and described in more detail below and have cooling water inlets and outlets which correspond to corresponding inlets and outlets of cooling water channels arranged in the reflector elements are connected. They serve as distributors for water cooling of the individual reflector elements of the reflector fields 4 and 6.

2 shows a further NIR radiation arrangement 21, which has a narrower processing space and is therefore particularly suitable for the thermal processing of a flat or at least relatively flat processing object by means of NIR radiation. So far this arrangement with Fig. 1 largely matching components comprising 1 ajar reference numerals in Fig. used and will be omitted below scription a repeated detailed Be ^¬.

Such correspondences exist in particular with regard to the presence of an NIR emitter arrangement 22 composed of nine halogen filament lamps 23 in front of a main reflector field 24 made up of three reflectors 25, which is opposed by a counter reflector field 26 made up of three counter reflectors 27 in parallel. Furthermore, here too, the main and counter reflector fields 24, 26 are each assigned two cooling water distributor bars 28, i. H. screwed onto the back of the corresponding reflector elements. However, here the water connections 29 are not located on the end faces, but on the rear sides of the cooling water distributor bars 28.

The NIR irradiation arrangement 21 according to FIG. 2 differs from the simpler arrangement according to FIG. 1 by the additional presence of a side reflector 30 on the top and bottom of the arrangement, whereby a (except for narrow ventilation slots 31a, 31b ) closed radiation space is formed. The side reflectors 30 are attached to cooling water distribution bar 38, which - according to the geometry of the NIR irradiation system - are considerably shorter than the main and counter reflector panel associated distribution manifold and water connections 29 ben at their end faces ha ^¬. All cooling water distributor bars 29, 38 form - as FIG. 2 clearly shows - two rectangular frames in which all reflector elements are held stably.

The active surfaces of the reflectors 5 and 25 from FIGS. 1 and 2 have an approximately W-shaped cross-sectional shape, while the surfaces of the counter reflectors 7 and 27 and the side ^reflectors 30 are flat. All reflector elements are made of an aluminum nium alloy extruded and have polished reflective surfaces.

3 to 4B, the inner structure of the reflector elements and the cooling water distributor bar and their connection to one another are shown in more detail in accordance with a preferred embodiment of the invention. The reference numbers for the individual components are chosen based on FIGS. 1 and 2.

3 shows a main reflector array 34 with two reflectors 35 for receiving six (ie a total of twelve) elongated halogen lamps. Each of the reflectors 35 has six reflection regions 35a which are approximately W-shaped in cross section and five elongated cooling water channels 35b which are circular in cross section and which are each arranged behind the boundary region between two reflection regions 35a. The cooling water ducts 35b are connected to one another in a serpentine shape, and the two outer duct sections are each designed with an enlarged diameter. Each of these has an inlet or outlet 35c that opens onto the rear.

On the reflectors 35, the back of which is flat and which overall have an approximately rectangular cross section in their outer contour, two cooling water distributor bars (according to FIG. 1 or 2) are arranged on the back, of which in

Fig. 3 one can be seen. The cooling water distributor bar 38 has a rectilinear, continuous distributor cooling water channel 38a and two distributor inlets or outlets 38b, which are arranged in such a way that they are in the state of the distributor bar 38 with the inlets / outlets 35c attached to the reflectors 35 the

Reflectors are aligned. Since they also have the same diameter as this, sealing by means of O-rings 38c is possible in a simple manner. From the ends of the distributor cooling water channel 38a, in the installed state of the entire reflector field, one will in each case form a cooling water inlet or outlet for the main reflector field, while the other with one (shown in FIGS. 1 and 2 but not with) with its own reference number)

Stopper will be closed. In an analogous manner, a lateral closure of the cooling water channels 35b formed continuously in the extruded reflector profiles is implemented.

4A and 4B show a counter-reflector field 46 comprising two counter-reflectors 47 with an attached cooling water distributor bar 42. Analogously to the structure of the cooling water distributor bar 38 from FIG 4A is shown in a state closed on both sides by sealing plugs 48d.

The counter reflectors 47 each have a highly polished, flat reflection surface 47a and two cooling water channels 47b, each of which has two inlets / outlets 47c on the rear. The dimensions of the counter reflectors 47 and the arrangement of the cooling water ducts 47b and the inlets / outlets 47c in them are matched to the design of the cooling water distributor bars 48 - in particular the arrangement of the inlets / outlets 48b in them - that in the assembled state Condition of the arrangement, the inlets and outlets of both components are aligned with one another and can in turn be sealed off from one another by O-rings 48c. The continuous cooling water channels 47b (as already mentioned above with regard to the reflectors of the main reflector field) are closed by sealing plugs 49. Therefore, cooling water supplied or discharged via the cooling water distributor bars 48 flows from the distributor cooling water channel 48a of the one distributor via its outlet 48b and the adjacent inlet 47c into the cooling water channel 47b of the counter-reflector. From this it flows through its outlet and the adjacent inlet in the their distributor bar in its distributor cooling water channel and is derived from there (for several reflector elements together).

In order for the counter-reflectors to be lined up seamlessly to form extended counter-reflectors, dovetail grooves 47d are provided on their side surfaces for inserting corresponding connector profiles (not shown). In Fig. 4B it can be seen that the connection between the counter ^reflectors 47 and the cooling water distributor bar 48 is in each case produced by screw bolts 50 which are inserted into correspondingly designed mounting bores 48e of the distributor bars 48 and 47e of the counter reflectors.

The embodiment of the invention is not limited to these examples and the aspects highlighted above, but is also possible within the scope of the claims in a large number of modifications which are within the scope of professional action.

LIST OF REFERENCE NUMBERS

1, 21 NIR radiation arrangement

£ 2.2. radiator assembly

3, 23 halogen filament lamp

4, 24, 34 main reflector field

5, 25, 35 reflector

6, 26, 46 counter reflector field

7, 27, 47 counter reflector

8, 28, 38 48 cooling water manifold

9, 29 water connection

30 side reflector

31a ventilation slot

31b vent slot

3 3a; * ^■ 17a reflection area b, 47b cooling water channel c, 47c inlet / outlet a, 48a manifold cooling water channel b, 48b manifold inlet and outlet c, 48c O-ring d dovetail groove e, 48e mounting hole d 49 sealing plug

bolts

Claims

claims 1. irradiation arrangement (1; 21), in particular for thermal processing processes, with a plurality of radiation sources for electromagnetic radiation which are arranged essentially next to one another and parallel to one another, the essential active component of which is in the near infrared range, in particular in the wavelength range between 0.8 μm and 1, 5 μm, each with at least one elongated halogen lamp (3; 23), which has a tubular glass body with at the ends provided with connections and at least one filament, and an elongated reflector (5; 25; 35), in which at least a cooling fluid flow channel (35b) with an inlet and an outlet (35c) is provided at or near the ends of the reflector, characterized by at least two elongated cooling fluid distributors, in particular at or near the ends of the reflectors, which run essentially perpendicular to their longitudinal extension ( 8; 28; 38) that are at or near a m a cooling fluid connection (9; 29) and distributed over their longitudinal extent have a plurality of cooling fluid inlets and outlets (38b) which are connected to the inlets and outlets of the reflectors. 2. Irradiation arrangement according to claim 1, characterized by a plurality of with respect to the halogen lamps (3; 23) and a processing object the reflectors (5; 25; 35) opposite or laterally arranged from these and counter or side reflectors (7; 27; 30 ; 47) who each have at least one cooling fluid flow channel (47b) with an inlet and an outlet (47c) at or near the ends, the counter and side reflectors also being assigned cooling fluid distributors (8; 28; 48), the inclusion of which , Outlets (48b) with the inlets and outlets of the counter or Side reflectors are connected. 3. Irradiation arrangement according to claim 1 or 2, characterized in that the reflectors (5; 25; 35) and / or counter or side reflectors (7; 27; 30; 47) and the cooling fluid distributor (8; 28; 38; 48) are designed as solid profiles, in particular extruded profiles made of a material with high thermal conductivity, in particular aluminum or an aluminum alloy, into which cooling fluid flow channels (35b, 38a; 47b, 48a) are molded. 4. Irradiation arrangement according to one of the preceding claims, in particular claim 3, characterized in that the cross section of the outer contour of the reflectors (5; 25; 35) and / or counter or side reflectors (7; 27; 30; 47) essentially flat rectangular and the cross section of the cooling fluid distributor (8; 28; 38; 48) is rectangular, in particular square. 5. Irradiation arrangement according to one of the preceding claims, characterized in that the reflectors (5; 25; 35) and / or counter or Seitenre ^¬ reflectors (7; 27; 30; 47) on the cooling fluid distributors (8; 28; 38; 48) are fixed, in particular screwed or clamped to them, in such a way that the cooling fluid Distribution beam for the reflectors and / or counter or Form side reflectors. 6. Irradiation arrangement according to one of the preceding claims, particularly according to claims 4 and 5, characterized in that the inlets and outlets of the reflectors (5; 25; 35) and / or counter or side reflectors (7; 27; 30; 47) are arranged on the rear sides, the cooling fluid distributors (8; 28; 38; 48) are placed flat on the rear sides of the reflectors and / or counter or side reflectors and their inlets and outlets (38b; 48b) are arranged in this way are that they lie over the inlets or outlets (35c; 47c) of the reflectors and / or counter or side reflectors and the inlets or outlets of the cooling fluid distributors and the reflectors and / or counter or Side reflectors are sealed together via O-rings (38c; 48c). 7. Irradiation arrangement according to one of the preceding claims, characterized in that each reflector (5; 25; 35) and / or counter or side reflector (7, 27; 30; 47) two or more cooling fluid flow channels and each cooling fluid Distributor (8; 28; 38; 48) has a corresponding number of inlets / outlets on a length section corresponding to the reflector width. 8. irradiation arrangement according to one of the preceding Ansprü- before, characterized in that the reflectors (5; 25; 35) and / or counter or Seitenre ^¬ reflectors (7; 27; 30; 47) to the Kuhlfluid distributors (8, 28; 38; 48) to form a closed main reflector field (4; 24; 34) and / or counter or side flektorfeldes (6; 26; 46) are lined up side by side without gaps. 9. Irradiation arrangement according to one of claims 2 to 8, characterized in that the halogen lamps (3; 23) and the processing object facing surfaces (47a) of the counter or side reflectors (47) are essentially flat and highly reflective, in particular polished, executed are. 10. Irradiation arrangement according to one of claims 2 to 9, so that the counter-reflectors (7; 27; 30; 47) are arranged in a plane which is parallel to the plane spanned by the center axes of the halogen lamps (3; 23). 11. Irradiation arrangement according to one of claims 2 to 10, d a d u r c h g e k e n n z e i c h n e t that a plurality of side reflectors are arranged in a plane which is substantially perpendicular to the plane spanned by the center axes of the halogen lamps. 12. Irradiation arrangement according to one of claims 2 to 11, d a d u r c h g e k e n n z e i c h n e t that the reflectors (5; 25; 35) together with a first Sten form a substantially closed on the periphery, actively cooled Strahlungska- and a two ^¬ th plurality of side reflectors (30) plurality of counter-reflectors (47 7;; 27).