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WO2002033361A3 - Appareil et procede pour maintenir une perte de pression constante dans un compteur de gaz - Google Patents

Appareil et procede pour maintenir une perte de pression constante dans un compteur de gaz Download PDF

Info

Publication number
WO2002033361A3
WO2002033361A3 PCT/US2001/024607 US0124607W WO0233361A3 WO 2002033361 A3 WO2002033361 A3 WO 2002033361A3 US 0124607 W US0124607 W US 0124607W WO 0233361 A3 WO0233361 A3 WO 0233361A3
Authority
WO
WIPO (PCT)
Prior art keywords
inlet
metering unit
pressure
actual
measurement device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2001/024607
Other languages
English (en)
Other versions
WO2002033361A2 (fr
Inventor
Paul Francis Grosshart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of WO2002033361A2 publication Critical patent/WO2002033361A2/fr
Publication of WO2002033361A3 publication Critical patent/WO2002033361A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/17—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using calibrated reservoirs

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)

Abstract

L'invention concerne un appareil conçu pour maintenir une perte de pression sensiblement constante dans un compteur de gaz afin d'en assurer un fonctionnement précis. L'appareil comporte une soupape d'admission régulant le flux vers une entrée du compteur, un dispositif de mesure de la pression d'admission relié à l'entrée du compteur, et un dispositif de mesure de pression de sortie relié à une sortie du compteur. L'appareil comporte en outre un régulateur qui reçoit une pression d'admission réelle du dispositif de mesure de pression d'admission, une pression de sortie réelle du dispositif de mesure de la pression de sortie. Le contrôleur compare alors la pression d'admission réelle à la pression de sortie réelle afin de déterminer un changement de pression réel et agit sur la soupape d'admission pour faire varier le flux vers l'entrée du compteur, dans le cas où le changement de pression réel varie par rapport à un changement de pression initial prédéterminé. Ainsi, l'appareil selon l'invention, maintient une perte de pression sensiblement constante dans le compteur.
PCT/US2001/024607 2000-10-13 2001-08-06 Appareil et procede pour maintenir une perte de pression constante dans un compteur de gaz Ceased WO2002033361A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US68757100A 2000-10-13 2000-10-13
US09/687,571 2000-10-13

Publications (2)

Publication Number Publication Date
WO2002033361A2 WO2002033361A2 (fr) 2002-04-25
WO2002033361A3 true WO2002033361A3 (fr) 2002-08-01

Family

ID=24760938

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/024607 Ceased WO2002033361A2 (fr) 2000-10-13 2001-08-06 Appareil et procede pour maintenir une perte de pression constante dans un compteur de gaz

Country Status (1)

Country Link
WO (1) WO2002033361A2 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1797489A4 (fr) * 2004-07-09 2008-07-30 Celerity Inc Procédé et système de mesure d'écoulement et validation d'une unité de commande d'écoulement massive
US7757554B2 (en) * 2005-03-25 2010-07-20 Mks Instruments, Inc. High accuracy mass flow verifier with multiple inlets
DE102011100029C5 (de) 2011-04-29 2016-10-13 Horiba Europe Gmbh Vorrichtung zum Messen eines Kraftstoffflusses und Kalibriervorrichtung dafür
CN104764510A (zh) * 2015-04-23 2015-07-08 江苏博克斯自动化控制工程有限公司 一种全自动直插式热式气体质量流量计标定系统及其应用
JP6795832B2 (ja) * 2016-07-05 2020-12-02 株式会社フジキン 流量制御機器、流量制御機器の流量校正方法、流量測定機器および流量測定機器を用いた流量測定方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59225411A (ja) * 1983-06-06 1984-12-18 Tokyo Keiki Co Ltd デイジタル弁制御装置
US4951224A (en) * 1987-07-30 1990-08-21 Jiri Hokynar Control device for fluid flow
US5190068A (en) * 1992-07-02 1993-03-02 Brian Philbin Control apparatus and method for controlling fluid flows and pressures
JPH11259140A (ja) * 1998-03-13 1999-09-24 Kokusai Electric Co Ltd 流量制御装置
WO2000020940A1 (fr) * 1998-10-08 2000-04-13 Mott Metallurgical Corporation Regulation de debit de fluide
US6074691A (en) * 1997-06-24 2000-06-13 Balzers Aktiengesellschaft Method for monitoring the flow of a gas into a vacuum reactor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59225411A (ja) * 1983-06-06 1984-12-18 Tokyo Keiki Co Ltd デイジタル弁制御装置
US4951224A (en) * 1987-07-30 1990-08-21 Jiri Hokynar Control device for fluid flow
US5190068A (en) * 1992-07-02 1993-03-02 Brian Philbin Control apparatus and method for controlling fluid flows and pressures
US6074691A (en) * 1997-06-24 2000-06-13 Balzers Aktiengesellschaft Method for monitoring the flow of a gas into a vacuum reactor
JPH11259140A (ja) * 1998-03-13 1999-09-24 Kokusai Electric Co Ltd 流量制御装置
WO2000020940A1 (fr) * 1998-10-08 2000-04-13 Mott Metallurgical Corporation Regulation de debit de fluide

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 009, no. 101 (P - 353) 2 May 1985 (1985-05-02) *
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 14 22 December 1999 (1999-12-22) *

Also Published As

Publication number Publication date
WO2002033361A2 (fr) 2002-04-25

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