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WO2002006779A3 - Ellipsometre spectroscopique compact - Google Patents

Ellipsometre spectroscopique compact Download PDF

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Publication number
WO2002006779A3
WO2002006779A3 PCT/FR2001/002305 FR0102305W WO0206779A3 WO 2002006779 A3 WO2002006779 A3 WO 2002006779A3 FR 0102305 W FR0102305 W FR 0102305W WO 0206779 A3 WO0206779 A3 WO 0206779A3
Authority
WO
WIPO (PCT)
Prior art keywords
sample
source
sensor
ellipsometer
incident beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/FR2001/002305
Other languages
English (en)
Other versions
WO2002006779A2 (fr
Inventor
Jean-Louis Stehle
Jean-Philippe Piel
Pierre Boher
Luc Tantart
Jean-Pierre Rey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Societe de Commercialisation des Produits de la Recherche Appliquee SOCPRA
Original Assignee
Societe de Commercialisation des Produits de la Recherche Appliquee SOCPRA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societe de Commercialisation des Produits de la Recherche Appliquee SOCPRA filed Critical Societe de Commercialisation des Produits de la Recherche Appliquee SOCPRA
Priority to KR10-2003-7000771A priority Critical patent/KR20030026322A/ko
Priority to JP2002512640A priority patent/JP2004504590A/ja
Priority to AU2001276456A priority patent/AU2001276456A1/en
Priority to US10/333,415 priority patent/US7230701B2/en
Priority to EP01954108A priority patent/EP1301763A2/fr
Publication of WO2002006779A2 publication Critical patent/WO2002006779A2/fr
Publication of WO2002006779A3 publication Critical patent/WO2002006779A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G01J4/04—Polarimeters using electric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

L'ellipsomètre spectroscopique comprend: - une source (2) apte à émettre un rayon large bande (4), - un polariseur (10) pour polariser le rayon large bande (4), et produire un rayon incident polarisé (12) apte à illuminer un échantillon (16) selon au moins un angle d'incidence choisi, - un analyseur (24) pour recevoir le rayon réfléchi (20) par l'échantillon (16) ainsi illuminé et produire un rayon de sortie (28) en réponse à ce rayon réfléchi (20), et - au moins un élément optique réflecteur (14) disposé entre la source (2) et l'échantillon (16) et/ou entre l'échantillon (16) et le détecteur, et apte à focaliser le rayon incident (12) et/ou le rayon réfléchi (20) selon un spot choisi. L'ellipsomètre comprend en outre au moins un premier élément optique réfracteur (22) disposé entre l'échantillon (16) et le détecteur et/ou entre la source (2) et l'échantillon (16) pour collecter et focaliser le dit rayon réfléchi et/ou ledit rayon incident, ce qui permet de disposer d'au moins un élément réfracteur (22) et un élément réflecteur (14) de part et d'autre de l'échantillon (16) et de placer ainsi la source et le détecteur d'un même côté par rapport audit spot.
PCT/FR2001/002305 2000-07-17 2001-07-16 Ellipsometre spectroscopique compact Ceased WO2002006779A2 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR10-2003-7000771A KR20030026322A (ko) 2000-07-17 2001-07-16 소형 입체 타원편광계
JP2002512640A JP2004504590A (ja) 2000-07-17 2001-07-16 コンパクトな分光エリプソメータ
AU2001276456A AU2001276456A1 (en) 2000-07-17 2001-07-16 Compact spectroscopic ellipsometer
US10/333,415 US7230701B2 (en) 2000-07-17 2001-07-16 Compact spectroscopic ellipsometer
EP01954108A EP1301763A2 (fr) 2000-07-17 2001-07-16 Ellipsometre spectroscopique compact

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0009318A FR2811761B1 (fr) 2000-07-17 2000-07-17 Ellipsometre a haute resolution spatiale fonctionnant dans l'infrarouge
FR00/09318 2000-07-17

Publications (2)

Publication Number Publication Date
WO2002006779A2 WO2002006779A2 (fr) 2002-01-24
WO2002006779A3 true WO2002006779A3 (fr) 2002-03-28

Family

ID=8852567

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/FR2001/002072 Ceased WO2002006780A1 (fr) 2000-07-17 2001-06-28 Ellipsometre a haute resolution spatiale fonctionnant dans l'infrarouge
PCT/FR2001/002305 Ceased WO2002006779A2 (fr) 2000-07-17 2001-07-16 Ellipsometre spectroscopique compact

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/FR2001/002072 Ceased WO2002006780A1 (fr) 2000-07-17 2001-06-28 Ellipsometre a haute resolution spatiale fonctionnant dans l'infrarouge

Country Status (7)

Country Link
US (2) US6819423B2 (fr)
EP (2) EP1301764A1 (fr)
JP (2) JP2004504591A (fr)
KR (2) KR100846474B1 (fr)
AU (2) AU2001270701A1 (fr)
FR (1) FR2811761B1 (fr)
WO (2) WO2002006780A1 (fr)

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US8467057B1 (en) 2008-09-15 2013-06-18 J.A. Woollam Co., Inc. Ellipsometers and polarimeters comprising polarization state compensating beam directing sample wobble compensating system, and method of use
EP2446235B1 (fr) * 2009-06-23 2021-01-06 J.A. Woollam Co., Inc. Système ellipsométrique infrarouge térahertz et son procédé d'utilisation
US8416408B1 (en) 2009-02-27 2013-04-09 J.A. Woollam Co., Inc. Terahertz-infrared ellipsometer system, and method of use
US8169611B2 (en) 2009-02-27 2012-05-01 University Of Nebraska Board Of Regents Terahertz-infrared ellipsometer system, and method of use
US8934096B2 (en) 2009-02-27 2015-01-13 University Of Nebraska Board Of Regents Terahertz-infrared ellipsometer system, and method of use
US8736838B2 (en) 2009-02-27 2014-05-27 J.A. Woollam Co., Inc. Terahertz ellipsometer system, and method of use
US8488119B2 (en) 2009-02-27 2013-07-16 J.A. Woollam Co., Inc. Terahertz-infrared ellipsometer system, and method of use
JP5534315B2 (ja) * 2010-03-01 2014-06-25 独立行政法人理化学研究所 物性測定装置、物性測定方法及びプログラム
DE102011078418A1 (de) * 2011-06-30 2013-01-03 Friedrich-Alexander-Universität Erlangen-Nürnberg Vorrichtung und Verfahren zur Reflexions-Ellipsometrie im Millimeterwellenbereich
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US9297751B2 (en) 2012-10-05 2016-03-29 Seagate Technology Llc Chemical characterization of surface features
US9297759B2 (en) 2012-10-05 2016-03-29 Seagate Technology Llc Classification of surface features using fluorescence
US9377394B2 (en) 2012-10-16 2016-06-28 Seagate Technology Llc Distinguishing foreign surface features from native surface features
US9217714B2 (en) * 2012-12-06 2015-12-22 Seagate Technology Llc Reflective surfaces for surface features of an article
US9201019B2 (en) 2013-05-30 2015-12-01 Seagate Technology Llc Article edge inspection
US9217715B2 (en) 2013-05-30 2015-12-22 Seagate Technology Llc Apparatuses and methods for magnetic features of articles
US9513215B2 (en) 2013-05-30 2016-12-06 Seagate Technology Llc Surface features by azimuthal angle
US9274064B2 (en) 2013-05-30 2016-03-01 Seagate Technology Llc Surface feature manager
US10018815B1 (en) 2014-06-06 2018-07-10 J.A. Woolam Co., Inc. Beam focusing and reflective optics
US9921395B1 (en) 2015-06-09 2018-03-20 J.A. Woollam Co., Inc. Beam focusing and beam collecting optics with wavelength dependent filter element adjustment of beam area
US9442016B2 (en) 2014-06-06 2016-09-13 J.A. Woollam Co., Inc Reflective focusing optics
US10338362B1 (en) 2014-06-06 2019-07-02 J.A. Woollam Co., Inc. Beam focusing and reflecting optics with enhanced detector system
KR102313345B1 (ko) 2014-10-02 2021-10-15 삼성전자주식회사 광대역 광원 및 이를 구비하는 광학 검사장치
KR102016452B1 (ko) * 2017-12-27 2019-08-30 한양대학교 에리카산학협력단 타원해석기
KR102029824B1 (ko) * 2018-04-11 2019-10-08 조선대학교산학협력단 타원계측기 기반의 다채널 광 계측기
RU2688961C1 (ru) * 2018-07-06 2019-05-23 Федеральное государственное унитарное предприятие "Центральный аэрогидродинамический институт имени профессора Н.Е. Жуковского" (ФГУП "ЦАГИ") Устройство для измерения двунаправленного коэффициента яркости инфракрасного излучения материалов
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EP0832597A1 (fr) * 1996-08-30 1998-04-01 Heidelberg Engineering Optische Messsysteme GmbH Ellipsomètre
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US5608526A (en) * 1995-01-19 1997-03-04 Tencor Instruments Focused beam spectroscopic ellipsometry method and system
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Also Published As

Publication number Publication date
EP1301763A2 (fr) 2003-04-16
KR20030026322A (ko) 2003-03-31
AU2001276456A1 (en) 2002-01-30
FR2811761A1 (fr) 2002-01-18
FR2811761B1 (fr) 2002-10-11
US7230701B2 (en) 2007-06-12
KR20030022292A (ko) 2003-03-15
US20040070760A1 (en) 2004-04-15
AU2001270701A1 (en) 2002-01-30
EP1301764A1 (fr) 2003-04-16
WO2002006780A1 (fr) 2002-01-24
WO2002006779A2 (fr) 2002-01-24
JP2004504591A (ja) 2004-02-12
US6819423B2 (en) 2004-11-16
JP2004504590A (ja) 2004-02-12
KR100846474B1 (ko) 2008-07-17
US20040027571A1 (en) 2004-02-12

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