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WO2002090859A1 - Heat-exchanging device comprising a surface-coated wall separating medium 1 from medium 2 - Google Patents

Heat-exchanging device comprising a surface-coated wall separating medium 1 from medium 2 Download PDF

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Publication number
WO2002090859A1
WO2002090859A1 PCT/DE2002/001669 DE0201669W WO02090859A1 WO 2002090859 A1 WO2002090859 A1 WO 2002090859A1 DE 0201669 W DE0201669 W DE 0201669W WO 02090859 A1 WO02090859 A1 WO 02090859A1
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Prior art keywords
heat exchanger
wall
exchanger device
coated
compound
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PCT/DE2002/001669
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German (de)
French (fr)
Inventor
Milan Lazarov
Isabella Mayer
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TINOX GmbH
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TINOX GmbH
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F19/00Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers
    • F28F19/02Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers by using coatings, e.g. vitreous or enamel coatings
    • F28F19/06Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers by using coatings, e.g. vitreous or enamel coatings of metal
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F13/00Arrangements for modifying heat-transfer, e.g. increasing, decreasing
    • F28F13/18Arrangements for modifying heat-transfer, e.g. increasing, decreasing by applying coatings, e.g. radiation-absorbing, radiation-reflecting; by surface treatment, e.g. polishing
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2245/00Coatings; Surface treatments
    • F28F2245/02Coatings; Surface treatments hydrophilic
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2245/00Coatings; Surface treatments
    • F28F2245/04Coatings; Surface treatments hydrophobic

Definitions

  • the present invention relates to a heat exchanger device having a surface-coated wall which separates medium 1 from medium 2, the surface of the wall being at least partially coated with a thin layer which comprises at least one compound of the elements titanium, zirconium and / or hafnium and / or alloys thereof with nitrogen and / or oxygen and / or carbon and / or fluorine.
  • the present invention further relates to a method for producing the surface-coated heat exchanger wall and the use of the heat exchanger device.
  • the invention relates essentially to a surface-coated heat exchanger wall of a heat exchanger device for transferring heat from a warmer medium to a colder one.
  • a medium is understood to be any gas or liquid.
  • the heat exchanger wall is, for example, the walls of a plate which is connected to a heat transfer tube and is used, for example, in condensers of refrigeration systems, air separation systems, drying or humidification systems or moist air stills.
  • the object of the present invention is to provide a heat exchanger whose surface is modified in such a way that the efficiency of the heat exchanger is improved, corrosion problems when using corrosive media are reduced and the surface for use in the production of drinking water is food-safe.
  • the present invention relates to a heat exchanger device with a surface-coated wall which separates medium 1 from medium 2, the surface of the wall being at least partially coated with a thin layer which comprises at least one compound of the elements titanium, zirconium and / or hafnium and / or alloys thereof with nitrogen and / or oxygen and / or carbon and / or fluorine contains.
  • fluorine is also present in the compound for the surface coating, the ratio of the fluorine atoms to the carbon atoms contained therein being 0.05 to 2.05.
  • Very preferred compounds are TiNO t ICQ, 5 F 0, 01 , TiNOi, 1C0, 5F0, 1 / TiNOi, ⁇ C 0 , 5 ⁇ 0, 15 / TiNOi, ⁇ C 0 , 5 ⁇ 0, 3, TiNOa., ⁇ C 0 , 5F0,, and TiOi, 4 C 0 , 5F0, 5 •
  • the hydrophilicity / hydrophobicity of the surface coating can be controlled particularly easily by means of the fluorine content.
  • a higher fluorine content thus creates a more hydrophobic surface, which can be advantageous for applications in refrigeration technology.
  • more hydrophilic surfaces are more advantageous, which can be caused by a low fluorine content or the omission of fluorine.
  • the fluorine-containing layers preferably have CF and / or CF2 groups which in the ESCA spectrum lead to maxima at 290 ⁇ 1 eV
  • the surface coating contains CF and CF2 groups, which lead to an intensity ratio of the two maxima (at 290 and 293 eV) of 0.5 to 8 in the ESCA spectrum.
  • the coating is located as a thin layer on a substrate suitable as a heat exchanger wall.
  • a substrate suitable as a heat exchanger wall.
  • This can be made of plastic, e.g. Polypropylene, polyester, polyamide, polyurethane, polyethylene, polytetrafluoroethylene or from a metal such as copper, aluminum, nickel, chromium, titanium, vanadium, niobium, iron or their mixtures or alloys.
  • the coating formed as a thin layer is preferably applied to a structured surface.
  • the thickness of the coating is preferably in the range from 20 nm to 2 mm, more preferably in the range from 200 nm to 1.5 mm and very preferably in the range from 500 nm to 1 mm.
  • the coating can completely or partially cover the surface of the heat exchanger wall.
  • the heat exchanger wall is preferably coated with at least 85% of the coating.
  • an intermediate layer is provided between the heat exchanger wall and the coating, which brings about a higher adhesive strength.
  • This intermediate layer preferably consists of a thermally conductive metal, preferably chromium, nickel, titanium, molybdenum or vanadium.
  • the heat exchanger wall is preferably coated in a vacuum coating chamber, in which titanium, zirconium and / or hafnium are evaporated by means of electron beam evaporation and the elements nitrogen, oxygen, carbon and / or fluorine are added in gaseous form by means of “mass flow controler”.
  • a particularly preferred method is the introduction of the base material of the heat exchanger (plastic or metal) in the form of tape material, which is in rolls, in a vacuum chamber.
  • This vacuum chamber (Fig. 11) consists of a winding mechanism through which the strip material can be rewound from one roll to another in a vacuum.
  • the winding mechanism has at least one, preferably two, deflection rollers through which the strip material can be heated or cooled.
  • the heating rollers are preferably heated by infrared emitters, the cooling rollers are preferably cooled by thermal oil.
  • the strip material is exposed to steam between the deflection rollers.
  • This steam is generated in a vacuum of approx. 10–5 mBar to which the non-metals of the compound are added as gases, so that the process takes place at a process pressure of approx. 0.1 to 3 * 10 " mBar.
  • the gas mixture the supplied non-metals are preferably controlled by means of a “mass flow controler.” It may be advantageous for the process to add a noble gas, such as argon, for example.
  • the metals are preferably vaporized from crucibles by means of electron beam guns. The metals in these are preferred Crucibles mixed in granular form, in the ratio as they are later present in the connection on the strip material.
  • Preferred strip speeds are 1 to 60 m / min, particularly preferably speeds of 6 to 25 m / min.
  • the strip is heated by means of the heating rollers heated to temperatures of 150 ° C to 450 ° C.
  • temperatures of 150 ° C to 450 ° C For copper, a temperature range of 350 ° C to 420 ° C has proven to be particularly suitable other temperatures in the range of 20 ° C to 80 ° C to choose.
  • the coated heat exchanger wall can be used in the context of a heat exchanger device in condensers of refrigeration systems, air separation systems, drying or humidification systems or moist air stills, the use in moist air stills and refrigeration systems being preferred.
  • the surface coating is corrosion-proof and food-safe and that after evaporation no individual droplets are deposited, but a thin one continuous film is created, which contributes to the efficiency of the still.
  • Hydrophilic surfaces are advantageous, so compounds with little or no fluorine and a low carbon content should preferably be selected.
  • the surface coating is hydrophobic, corrosion-resistant and food-safe has an advantageous effect.
  • warm, often humid air is cooled.
  • the excess water vapor condenses on the heat exchanger surfaces and reduces the efficiency of the heat exchanger.
  • a hydrophobic surface leads to the formation of individual droplets that drip quickly, which is conducive to the efficiency of the air conditioning system, especially in humid climates. This process and the improved efficiency through these connections is e.g. B. can be seen in Figure 10.
  • the condensate does not need to be treated further, since no contamination occurs on the surface.
  • Hydrophobic surfaces are preferably realized using compounds with a high fluorine content.
  • Fig. 1 to Fig. 6 ESCA spectra of various coated heat exchangers.
  • Fig.l heat exchanger coated with i t QOI, ICQ, 5 F 0, 0 1
  • Fig. 2 Heat exchanger coated with TiNi, 0 ° l, l c 0 , 5 F 0, 1
  • Fig. 3 Heat exchanger coated with TiNi, 0 ° 1, l c o, 5 F o, 15
  • Fig. 4 Heat exchanger coated with iN, 0O1, l ⁇ o, 5 o, 3
  • Fig. 5 Heat exchanger coated with TiNi, 0 ° l, l c 0, 5 F o
  • 4 Fig. 6 Heat exchanger coated with OK, 4 C 0 , 5 F 0 , 5
  • Fig. 9 Schematic representation of a humid still
  • Fig. 10 Thermal conductivity of a coated heat exchanger used in an air conditioning system: The graphic shows the quotients of the thermal conductivity of various coated heat exchangers for an uncoated heat exchanger.
  • the operating point of the air conditioning system is the cooling and dehumidification of air with 28 ° C, 95% air humidity on the inlet side and 18 ° C, 20% air humidity on the outlet side.
  • the coating consists of: a) TiNi, 0 O 1 , 1 b) TiNi, 0 O ⁇ , ⁇ C 0f 5 0, 01 C) TiNi, 0 ⁇ , ⁇ C 0 , 5 F 0, 1 d) TiNi, 0 O ⁇ , ⁇ C 0 , 5 F 0, 15 e) ' TiN ⁇ , 0 O ⁇ , ⁇ C 0 , 5 F 0, 3 f) TiNi, 0 O ⁇ , ⁇ C 0 , 5 0 , 4 Fig. 11: Cons drawing of the coating system
  • the heat exchangers are manufactured as follows: 0.3mm thick copper foils are coated in a vacuum coating chamber. Here titanium is evaporated by means of electron beam evaporation and N 2 , O 2 , CH 4 , CO 2 and fluorine are fed into the vacuum chamber. By controlling the composition of the gas supplied, the chemical composition of the coating can be controlled. The titanium and the gases condense to a solid coating on the copper strip. In a subsequent step, the copper strip is cut to the size of the heat exchanger. Two of these blanks are placed on top of each other with the coated side facing outwards. Before that, solder and a tube are inserted between the plates. The almost finished heat exchanger is soldered in a soldering oven.
  • the tape to be coated runs 40 ⁇ 5cm over the electron beam evaporators, in which titanium, zirconium and hafnium are evaporated.
  • Substrate temperature (temperature of the belt): 350 ⁇ 30 ° C total gas pressure: 10 hPa
  • Substrate temperature (temperature of the belt): 350 ⁇ 30 ° C total gas pressure: 10 " hPa Gases supplied: N 2 , CO 2 , F in the ratio N 2 / CO 2 / F:
  • Substrate temperature (temperature of the belt): 350 + 30 ° C
  • Substrate temperature (temperature of the belt): 350 + 30 ° C
  • Substrate temperature (temperature of the belt): 350 ⁇ 30 ° C
  • Substrate temperature (temperature of the belt): 350 ⁇ 30 ° C
  • Heat exchangers with the coatings a-f are measured in FIG. 10.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
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Abstract

The invention relates to a heat-exchanging device comprising a surface-coated wall which separates medium 1 from medium 2. The surface of the wall is at least partially coated with a thin layer containing at least one compound from the elements titanium, zirconium and/or hafnium and/or alloys of the same with nitrogen and/or oxygen and/or carbon and/or fluorine. The invention also relates to a method for producing the surface-coated heat-exchanging wall, and to the use of the inventive heat-exchanging device.

Description

Wärmetauscher-Vorrichtung mit einer oberflachenbeschichteten Heat exchanger device with a surface coated

Wand, die Medium 1 von Medium 2 trenntWall that separates medium 1 from medium 2

Die vorliegende Erfindung betrifft eine Wärmetauscher- Vorrichtung mit einer oberflachenbeschichteten Wand, die Medium 1 von Medium 2 trennt, wobei die Oberfläche der Wand zumindest teilweise mit einer dünnen Schicht beschichtet ist, die mindestens eine Verbindung der Elemente Titan, Zirkonium und/oder Hafnium und/oder Legierungen davon mit Stickstoff und/oder Sauerstoff und/oder Kohlenstoff und/oder Fluor enthält. Weiter betrifft die vorliegende Erfindung ein Verfahren zur Herstellung der oberflachenbeschichteten Wärmetauscherwand sowie die Verwendung der Wärmetauscher- Vorrichtung.The present invention relates to a heat exchanger device having a surface-coated wall which separates medium 1 from medium 2, the surface of the wall being at least partially coated with a thin layer which comprises at least one compound of the elements titanium, zirconium and / or hafnium and / or alloys thereof with nitrogen and / or oxygen and / or carbon and / or fluorine. The present invention further relates to a method for producing the surface-coated heat exchanger wall and the use of the heat exchanger device.

Die Erfindung betrifft im wesentlichen eine oberflächenbeschichtete Wärmetauscherwand einer Wärmetauscher-Vorrichtung zum Übertragen von Wärme von einem wärmeren Medium auf ein kälteres. Unter einem Medium sind dabei jegliche Gase oder Flüssigkeiten zu verstehen. Bei der Wärmetauscherwand handelt es sich beispielsweise um die Wände einer Platte, die an ein Wärmeträgerrohr angebunden ist und beispielsweise in Kondensatoren von Kälteanlagen, Lufttrennanlagen, Trocknungsoder Befeuchtungsanlagen oder Feuchtluftdestillen eingesetzt werden.The invention relates essentially to a surface-coated heat exchanger wall of a heat exchanger device for transferring heat from a warmer medium to a colder one. A medium is understood to be any gas or liquid. The heat exchanger wall is, for example, the walls of a plate which is connected to a heat transfer tube and is used, for example, in condensers of refrigeration systems, air separation systems, drying or humidification systems or moist air stills.

Es gibt diverse Vorschläge zur Optimierung von Wärmetauscherwänden. In den Schriften DE-A-27 31 476, EP-A-0 136 148 und DE-A-26 00 821 werden Nuten in der Oberfläche beschrieben. Durch geeignete Wahl von Form, Größe und Anordnung dieser Nuten soll kondensierter Dampf einen dünneren Wasserfilm bilden als ohne diese Nuten. Ein dünnerer Wasserfilm ist nämlich eine kleinere Wärmebarriere und führt zu einem effizienteren Wärmetauscher. Ein anderer Ansatz wird in DE-A-26 50 565 beschrieben, wo eine mit "porösem Material", wie z.B. Faservlies oder Kunststoffschäum, beschichtete Oberfläche den Wasserfilm minimieren soll. Wärmetauscher werden auch in Anlagen zur Wiederaufbereitung von Brackwasser, insbesondere Meerwasser, eingesetzt. Die Medien in diesen Anlagen sind korrosiv und bei der Aufbereitung von Meerwasser wird verlangt, daß das mit der Wärmetauscherwand in Kontakt stehende Medium lebensmittelecht ist. Weiterhin hängt die Effizienz und damit die Wirtschaftlichkeit solcher Anlagen stark von der Wirksamkeit der eingesetzten Wärmetauscher ab. Eine Vorrichtung zur Gewinnung von Brauchwasser aus verunreinigten Wässern ist im deutschen Patent DE-C-43 40 745 beschrieben. Hier werden eine Mehrzahl von senkrecht parallel zueinander unter Ausbildung von Kanälen, d.h. in einem Abstand zueinander angeordnete Vlies- oder Gewebebahnen als Verdunstungsflächen für die zuvor aufgeheizten verunreinigten Wässer genutzt. Hier ist allerdings der Nachteil, daß es zur Ausbildung von Tropfen kommt und keinem dünnen Film, was die Effizienz der Anlage mindert .There are various suggestions for optimizing heat exchanger walls. Grooves in the surface are described in the documents DE-A-27 31 476, EP-A-0 136 148 and DE-A-26 00 821. By suitably choosing the shape, size and arrangement of these grooves, condensed steam should form a thinner water film than without these grooves. A thinner water film is a smaller heat barrier and leads to one more efficient heat exchanger. Another approach is described in DE-A-26 50 565, where a surface coated with "porous material", such as fiber fleece or plastic foam, is intended to minimize the water film. Heat exchangers are also used in plants for the reprocessing of brackish water, especially sea water. The media in these systems are corrosive and when treating seawater, it is required that the medium in contact with the heat exchanger wall is food-safe. Furthermore, the efficiency and thus the economic viability of such systems strongly depend on the effectiveness of the heat exchangers used. A device for extracting industrial water from contaminated water is described in German patent DE-C-43 40 745. Here, a plurality of vertically parallel to each other with the formation of channels, ie at a distance from each other fleece or fabric webs are used as evaporation surfaces for the previously heated contaminated water. The disadvantage here, however, is that drops are formed and no thin film, which reduces the efficiency of the system.

Die Aufgabe der vorliegenden Erfindung ist einen Wärmetauscher zur Verfügung zu stellen, dessen Oberfläche derart modifiziert ist, dass der Wirkungsgrad des Wärmetauschers verbessert wird, Korrosionsprobleme bei Einsatz korrosiver Medien reduziert werden und die Oberfläche für Einsätze bei der Gewinnung von Trinkwasser lebensmittelecht ist.The object of the present invention is to provide a heat exchanger whose surface is modified in such a way that the efficiency of the heat exchanger is improved, corrosion problems when using corrosive media are reduced and the surface for use in the production of drinking water is food-safe.

Diese Aufgabe wird durch den Gegenstand von Anspruch 1 gelöst. Weitere vorteilhafte Ausgestaltungen ergeben sich aus den Unteransprüchen.This object is solved by the subject matter of claim 1. Further advantageous embodiments result from the subclaims.

Die vorliegende Erfindung betrifft eine Wärmetauscher- Vorrichtung mit einer oberflachenbeschichteten Wand, die Medium 1 von Medium 2 trennt, wobei die Oberfläche der Wand zumindest teilweise mit einer dünnen Schicht beschichtet ist, die mindestens eine Verbindung der Elemente Titan, Zirkonium und/oder Hafnium und/oder Legierungen davon mit Stickstoff und/oder Sauerstoff und/oder Kohlenstoff und/oder Fluor enthält .The present invention relates to a heat exchanger device with a surface-coated wall which separates medium 1 from medium 2, the surface of the wall being at least partially coated with a thin layer which comprises at least one compound of the elements titanium, zirconium and / or hafnium and / or alloys thereof with nitrogen and / or oxygen and / or carbon and / or fluorine contains.

In einer bevorzugten Ausführungsform enthält dieIn a preferred embodiment, the

Oberflächenbeschichtung eine Verbindung mit der chemischen Summenformel TixZryHfzNaOkCc (mit x,y,z = jeweils 0 bis 1; a,b,c = jeweils 0 bis 2,5, mit der Maßgabe, daß x+y+z = 1 und a+b+c > 0) . In einer weiter bevorzugten Ausführungsform enthält die Oberflächenbeschichtung eine Verbindung mit der chemischen Summenformel TixZryHfz^a^b^c (mit x,y,z = jeweils 0 bis 1; a,b,c = jeweils 0 bis 2, mit der Maßgabe, daß x+y+z = 1 und a+b+c = 0,02 bis 2,0). Konkrete Verbindungen, die besonders bevorzugt sind : Tiθ2, TiNaOfoCc, mit a=0,01 bis 1,8; b=0,2 bis 1,98 und c=0,01 bis 1,5; ZrNaO Cc, mit a=0,01 bis 0,2; b=0,8 bis 1,89 und c=0,l bis 1,5.Surface coating a compound with the chemical formula Ti x ZryHf z N a OkC c (with x, y, z = 0 to 1 each; a, b, c = 0 to 2.5 each, with the proviso that x + y + z = 1 and a + b + c> 0). In a further preferred embodiment, the surface coating contains a compound with the chemical formula Ti x ZryHfz ^ a ^ b ^ c (with x, y, z = 0 to 1 each; a, b, c = 0 to 2 each, with the proviso that x + y + z = 1 and a + b + c = 0.02 to 2.0). Specific compounds which are particularly preferred: TiO 2 , TiN a O f oC c , with a = 0.01 to 1.8; b = 0.2 to 1.98 and c = 0.01 to 1.5; ZrN a OC c , with a = 0.01 to 0.2; b = 0.8 to 1.89 and c = 0.1 to 1.5.

In einer ganz bevorzugten Ausführungsform ist in der Verbindung zur Oberflächenbeschichtung auch Fluor enthalten, wobei das Verhältnis der Fluoratome zu den darin enthaltenen Kohlenstoffatomen 0,05 bis 2,05 ist. Eine derartige Verbindung hat die chemische Formel TixZryHfzNa°bccFd (mit X Y Z = jeweilsIn a very preferred embodiment, fluorine is also present in the compound for the surface coating, the ratio of the fluorine atoms to the carbon atoms contained therein being 0.05 to 2.05. Such a compound has the chemical formula Ti x ZryHfz N a ° b c c F d ( with XYZ = in each case

0 bis 1; a,b = jeweils 0 bis 2; c = 0,05 bis 2 und d = 0,01 bis 2 mit der Maßgabe, daß x+y+z = 1, a+b+c = 0,02 bis 2,0 und d/c = 0,005 bis 2,05). Bevorzugt werden Verbindungen mit kleinen Anteilen an Fluor, d < 0,3. Konkrete Verbindungen, die besonders bevorzugt sind :

Figure imgf000004_0001
mit b=0 bis 1,5, c=0,l bis 1,8 und d=0,01 bis 0,8; TiNaCcFd mit a=0 bis 2,5, c=0,l bis 2,5 und d=0,01 bis 0,8.0 to 1; a, b = 0 to 2 each; c = 0.05 to 2 and d = 0.01 to 2 with the proviso that x + y + z = 1, a + b + c = 0.02 to 2.0 and d / c = 0.005 to 2, 05). Compounds with small proportions of fluorine, d <0.3, are preferred. Specific connections that are particularly preferred:
Figure imgf000004_0001
with b = 0 to 1.5, c = 0, l to 1.8 and d = 0.01 to 0.8; TiN a C c F d with a = 0 to 2.5, c = 0, l to 2.5 and d = 0.01 to 0.8.

Ganz bevorzugte Verbindungen sind TiNO t ICQ , 5F0 , 01, TiNOi, 1C0, 5F0, 1/ TiNOi, ιC0, 5^0, 15/ TiNOi , ιC0 , 5^0 , 3 , TiNOa., ιC0, 5F0, , und TiOi, 4C0, 5F0 , 5 •Very preferred compounds are TiNO t ICQ, 5 F 0, 01 , TiNOi, 1C0, 5F0, 1 / TiNOi, ιC 0 , 5 ^ 0, 15 / TiNOi, ιC 0 , 5 ^ 0, 3, TiNOa., ΙC 0 , 5F0,, and TiOi, 4 C 0 , 5F0, 5 •

Mittels des Fluorgehalts läßt sich die Hydrophilizität/ Hydrophobizität der Oberflächenbeschichtung besonders einfach steuern. So bewirkt ein höherer Fluorgehalt eine hydrophobere Oberfläche, was für Einsätze in der Kältetechnik vorteilhaft sein kann. In der Brauchwassertechnik sind dagegen hydrophilere Oberflächen vorteilhafter, was durch einen niedrigen Fluorgehalt oder das Weglassen von Fluor bewirkt werden kann. Die Fluor-enthaltenden Schichten weisen bevorzugt CF und/oder CF2 - Gruppen auf, die im ESCA-Spektrum zu Maxima bei 290±1 eVThe hydrophilicity / hydrophobicity of the surface coating can be controlled particularly easily by means of the fluorine content. A higher fluorine content thus creates a more hydrophobic surface, which can be advantageous for applications in refrigeration technology. In industrial water technology, on the other hand, more hydrophilic surfaces are more advantageous, which can be caused by a low fluorine content or the omission of fluorine. The fluorine-containing layers preferably have CF and / or CF2 groups which in the ESCA spectrum lead to maxima at 290 ± 1 eV

(hervorgerufen durch die CF-Gruppen) bzw. 293±1 eV (hervorgerufen durch CF2-Gruppen) führen (vgl. Fig. 1 - 6). In einer bevorzugten Ausführungsform enthält die Oberflächenbeschichtung CF- und CF2 - Gruppen, die im ESCA- Spektrum zu einem Intensitätsverhältnis der beiden Maxima (bei 290 bzw. 293 eV) von 0,5 bis 8 führen.(caused by the CF groups) or 293 ± 1 eV (caused by CF2 groups) (see FIGS. 1-6). In a preferred embodiment, the surface coating contains CF and CF2 groups, which lead to an intensity ratio of the two maxima (at 290 and 293 eV) of 0.5 to 8 in the ESCA spectrum.

Die Beschichtung befindet sich als dünne Schicht auf einem als Wärmetauscherwand geeigneten Substrat. Diese kann aus Kunststoff, z.B. Polypropylen, Polyester, Polyamid, Polyurethan, Polyethylen, Polytetrafluorethylen oder aus einem Metall, wie Kupfer, Aluminium, Nickel, Chrom, Titan, Vanadium, Niob, Eisen oder deren Mischungen oder Legierungen sein. Die als dünne Schicht ausgebildete Beschichtung ist vorzugsweise auf eine strukturierte Oberfläche aufgebracht. Die Dicke der Beschichtung liegt vorzugsweise im Bereich von 20 nm bis 2 mm, weiter bevorzugt im Bereich von 200 nm bis 1,5 mm und ganz bevorzugt im Bereich von 500 nm bis 1 mm.The coating is located as a thin layer on a substrate suitable as a heat exchanger wall. This can be made of plastic, e.g. Polypropylene, polyester, polyamide, polyurethane, polyethylene, polytetrafluoroethylene or from a metal such as copper, aluminum, nickel, chromium, titanium, vanadium, niobium, iron or their mixtures or alloys. The coating formed as a thin layer is preferably applied to a structured surface. The thickness of the coating is preferably in the range from 20 nm to 2 mm, more preferably in the range from 200 nm to 1.5 mm and very preferably in the range from 500 nm to 1 mm.

Die Beschichtung kann die Oberfläche der Wärmetauscherwand ganz oder teilweise bedecken. Vorzugsweise ist die Wärmetauscherwand zu mindestens 85% mit der Beschichtung beschichtet.The coating can completely or partially cover the surface of the heat exchanger wall. The heat exchanger wall is preferably coated with at least 85% of the coating.

In einer bevorzugten Ausführungsform ist eine Zwischenschicht zwischen der Wärmetauscherwand und der Beschichtung vorgesehen, die eine höhere Haftfestigkeit bewirkt. Diese Zwischenschicht besteht vorzugsweise aus einem wärmeleitfähigen Metall, vorzugsweise aus Chrom, Nickel, Titan, Molybdän oder Vanadium.In a preferred embodiment, an intermediate layer is provided between the heat exchanger wall and the coating, which brings about a higher adhesive strength. This intermediate layer preferably consists of a thermally conductive metal, preferably chromium, nickel, titanium, molybdenum or vanadium.

Die Beschichtung der Wärmetauscherwand erfolgt bevorzugt in einer Vakuumbeschichtungskammer, worin mittels Elektronenstrahlverdampfung Titan, Zirkonium und/oder Hafnium verdampft werden und durch "mass flow controler" die Elemente Stickstoff, Sauerstoff, Kohlenstoff und/oder Fluor gasförmig beigegeben werden. Ein besonders bevorzugtes Verfahren ist das Einbringen des Grundmaterials des Wärmetauschers (Kunststoff oder Metall) in Form von Bandmaterial, welches in Rollen vorliegt, in eine Vakuumkammer. Diese Vakuumkammer (Fig. 11) besteht aus einem Wickelmechanismus durch den das Bandmaterial im Vakuum von einer Rolle aus eine andere umgespult werden kann. Ferner hat der Wickelmechanismus mindestens je eine, bevorzugt je zwei, Umlenkwalzen durch die das Bandmaterial geheizt beziehungsweise gekühlt werden kann. Die Heizung der Heizwalzen geschieht vorzugsweise durch Infrarotstrahler, die Kühlung der Kühlwalzen vorzugsweise durch Thermoöl . Das Bandmaterial wird zwischen den Umlenkwalzen Dampf ausgesetzt.The heat exchanger wall is preferably coated in a vacuum coating chamber, in which titanium, zirconium and / or hafnium are evaporated by means of electron beam evaporation and the elements nitrogen, oxygen, carbon and / or fluorine are added in gaseous form by means of “mass flow controler”. A particularly preferred method is the introduction of the base material of the heat exchanger (plastic or metal) in the form of tape material, which is in rolls, in a vacuum chamber. This vacuum chamber (Fig. 11) consists of a winding mechanism through which the strip material can be rewound from one roll to another in a vacuum. Furthermore, the winding mechanism has at least one, preferably two, deflection rollers through which the strip material can be heated or cooled. The heating rollers are preferably heated by infrared emitters, the cooling rollers are preferably cooled by thermal oil. The strip material is exposed to steam between the deflection rollers.

Di ■eser Dampf entsteht in ei•nem Vakuum von ca. 10—5 mBar dem die Nichtmetalle der Verbindung als Gase beigestzt werden, so dass der Prozeß bei einem Prozessdruck von ca. 0,1 bis 3 * 10" mBar stattfindet. Das Gasgemisch der zugeführten Nichtmetalle wird bevorzugt mittels "mass flow controler" gesteuert. Für den Prozess kann es von Vorteil sein, ein Edelgas, wie z. B. Argon, beizufügen. Die Metalle werden bevorzugt mittels Elektronenstrahlkanonen aus Tiegeln verdampft. Bevorzugt werden die Metalle in diesen Tiegeln in Granulatform gemischt, in dem Verhältnis, wie sie später in der Verbindung auf dem Bandmaterial vorliegen. Bevorzugte Bandgeschwindigkeiten sind 1 bis 60 m/min, besonderst bevorzugt Geschwindigkeiten von 6 bis 25 m/min. Bei metallischen Bändern wird das Band mittels der Heizwalzen auf Temperaturen von 150°C bis 450°C aufgeheizt. Bei Kupfer hat sich eine Temperaturbereich von 350°C bis 420°C als besonders geeignet erwiesen. Bei Kunststoffbändern sind niedrige Temperaturen im Bereich von 20°C bis 80°C zu wählen.This steam is generated in a vacuum of approx. 10–5 mBar to which the non-metals of the compound are added as gases, so that the process takes place at a process pressure of approx. 0.1 to 3 * 10 " mBar. The gas mixture the supplied non-metals are preferably controlled by means of a “mass flow controler.” It may be advantageous for the process to add a noble gas, such as argon, for example. The metals are preferably vaporized from crucibles by means of electron beam guns. The metals in these are preferred Crucibles mixed in granular form, in the ratio as they are later present in the connection on the strip material. Preferred strip speeds are 1 to 60 m / min, particularly preferably speeds of 6 to 25 m / min. In the case of metallic strips, the strip is heated by means of the heating rollers heated to temperatures of 150 ° C to 450 ° C. For copper, a temperature range of 350 ° C to 420 ° C has proven to be particularly suitable other temperatures in the range of 20 ° C to 80 ° C to choose.

Die beschichtete Wärmetauscherwand kann im Rahmen einer Wärmetauscher-Vorrichtung in Kondensatoren von Kälteanlagen, Lufttrennanlagen, Trocknungs- oder Befeuchtungsanlagen oder Feuchtluftdestillen eingesetzt werden, wobei der Einsatz in Feuchtluftdestillen und Kälteanlagen bevorzugt ist.The coated heat exchanger wall can be used in the context of a heat exchanger device in condensers of refrigeration systems, air separation systems, drying or humidification systems or moist air stills, the use in moist air stills and refrigeration systems being preferred.

Für die Anwendung in Feuchtluftdestillen wirkt sich vorteilhaft aus, daß die Oberflächenbeschichtung korrossionsecht und lebensmittelecht ist und sich nach der Verdampfung keine einzelnen Tröpfchen niederschlagen, sondern ein dünner kontinuierlicher Film entsteht, was der Effizienz der Destille zuträglich ist. Hydrophile Oberflächen sind vorteilhaft, daher sind bevorzugt Verbindungen ohne oder nur mit geringem Fluor und geringem Kohlenstoffanteil zu wählen. Besonders bevorzugt sind Verbindungen mit TiNa0oCc, mit a=0,01 bis 1,8; b=0,2 bis 2,2 und c=0,01 bis 0,5. Die Steigerung der Effizienz durch diese Verbindungen ist z. B. in Figur 7 zu sehen.For use in moist air stills, it is advantageous that the surface coating is corrosion-proof and food-safe and that after evaporation no individual droplets are deposited, but a thin one continuous film is created, which contributes to the efficiency of the still. Hydrophilic surfaces are advantageous, so compounds with little or no fluorine and a low carbon content should preferably be selected. Compounds with TiN a 0 o C c , with a = 0.01 to 1.8; b = 0.2 to 2.2 and c = 0.01 to 0.5. The increase in efficiency through these connections is e.g. B. can be seen in Figure 7.

Für die Anwendung in Klimaanlagen wirkt sich vorteilhaft aus, daß die Oberflächenbeschichtung hydrophob, korrosionsbeständig und lebensmittelecht ist. Bei Klimaanlagen wird warme, häufig feuchte Luft abgekühlt. Dabei kondensiert der überschüssige Wasserdampf auf den Wärmetauscherflächen und reduziert die Effizienz des Wärmetauschers. Eine hydrophobe Oberfläche führt zur Bildung einzelner Tröpfchen, die rasch abtropfen, was der Effizienz der Klimaanlage, besonders in feuchten Klimaregionen zuträglich ist. Dieser Vorgang und die verbesserte Effizienz durch diese Verbindungen ist z. B. in Figur 10 zu sehen. Zudem muss das Kondensat nicht weiter behandelt werden, da durch die Oberfläche keinerlei Verunreinigung stattfindet. Hydrophobe Oberflächen werden bevorzugt durch Verbindungen mit hohem Fluoranteil realisiert. Besonders bevorzugt sind Verbindungen mit TiObCcF^ mit b=0,l bis 1,5, c=0,l bis 1,8 und d=0,05 bis 0,6, TiNaCcFd mit a=0,l bis 2,5, c=0,l bis 2,5 und d=0,05 bis 0,6 und TiNaObCcFd mit a,b= jeweil 0,1 bis 2,5, c=0,l bis 2,5 und d=0,05 bis 0,6.For use in air conditioning systems, the fact that the surface coating is hydrophobic, corrosion-resistant and food-safe has an advantageous effect. In air conditioning systems, warm, often humid air is cooled. The excess water vapor condenses on the heat exchanger surfaces and reduces the efficiency of the heat exchanger. A hydrophobic surface leads to the formation of individual droplets that drip quickly, which is conducive to the efficiency of the air conditioning system, especially in humid climates. This process and the improved efficiency through these connections is e.g. B. can be seen in Figure 10. In addition, the condensate does not need to be treated further, since no contamination occurs on the surface. Hydrophobic surfaces are preferably realized using compounds with a high fluorine content. Compounds with TiO b C c F ^ with b = 0.1 to 1.5, c = 0.1 to 1.8 and d = 0.05 to 0.6, TiN a C c F d with a are particularly preferred = 0.1 to 2.5, c = 0.1 to 2.5 and d = 0.05 to 0.6 and TiN a O b C c F d with a, b = 0.1 to 2.5 each , c = 0.1 to 2.5 and d = 0.05 to 0.6.

Die vorliegende Erfindung wird weiter mit Bezug auf die Figuren beschrieben:The present invention is further described with reference to the figures:

Fig. 1 bis Fig. 6: ESCA-Spektren verschiedener beschichteter Wärmetauscher.Fig. 1 to Fig. 6: ESCA spectra of various coated heat exchangers.

Fig.l: Wärmetauscher beschichtet mit i t QOI , ICQ , 5F0 , 01 Fig.l: heat exchanger coated with i t QOI, ICQ, 5 F 0, 0 1

Fig.2: Wärmetauscher beschichtet mit TiNi , 0°l , l c 0 , 5F0 , 1Fig. 2: Heat exchanger coated with TiNi, 0 ° l, l c 0 , 5 F 0, 1

Fig.3: Wärmetauscher beschichtet mit TiNi , 0°1 , lco , 5Fo , 15Fig. 3: Heat exchanger coated with TiNi, 0 ° 1, l c o, 5 F o, 15

Fig.4: Wärmetauscher beschichtet mit iN , 0O1 , l^o , 5 o , 3Fig. 4: Heat exchanger coated with iN, 0O1, l ^ o, 5 o, 3

Fig.5: Wärmetauscher beschichtet mit TiNi , 0°l , lc0, 5Fo , 4 Fig.6: Wärmetauscher beschichtet mit iO , 4C0 , 5F0 , 5 Fig. 5: Heat exchanger coated with TiNi, 0 ° l, l c 0, 5 F o, 4 Fig. 6: Heat exchanger coated with OK, 4 C 0 , 5 F 0 , 5

Fig. 7: WärmeleitwertFig. 7: Thermal conductivity

In einer Versuchsanordnung wurden zwei Wärmetauscher in eine Feuchtluftdestille eingebaut. Der eine bestand aus herkömmlichem PP-Material (Stand der Technik) , der andere mit der erfindungsgemäßen Beschichtung, TiNo , 2^1 , ic 0 , 3 beschichtet. Die Grafik zeigt bei einer Arbeitstemperatur von 95°C einen 40-fachen Wärmeleitwert zwischen Verdunster und Kühlwasser. Dieser Wert ist bei den heutigen Anlagen der limitierende Leitwert.In a test arrangement, two heat exchangers were installed in a moist air still. One consisted of conventional PP material (prior art), the other coated with the coating according to the invention, TiNo, 2 ^ 1 , i c 0 , 3. At a working temperature of 95 ° C, the graphic shows a 40-fold thermal conductivity between the evaporator and the cooling water. This value is the limiting guide value in today's systems.

Fig.8: Benetzbarkeit von erfindungsgemäßen Wärmetauscherwand-Beschichtungen für verschiedene Ausführungen der Oberfläche a) 105° Kontaktwinkel einer Oberfläche aus TiNi , 0°l , 1 und einer hohen Porosität (40% Leerräume) , b) 60° Kontaktwinkel einer Oberfläche aus TiNi , 0°1 , 1 und einer mittleren Porosität (22% Leerräume) , c) 8° Kontaktwinkel einer Oberfläche aus iNi 0°l , 1 und einer niedrigen Porosität (3% Leerräume) .8: wettability of heat exchanger wall coatings according to the invention for different designs of the surface a) 105 ° contact angle of a surface made of TiNi, 0 ° l , 1 and a high porosity (40% empty spaces), b) 60 ° contact angle of a surface made of TiNi, 0 ° 1 , 1 and a medium porosity (22% empty spaces), c) 8 ° contact angle of a surface made of iNi 0 ° l , 1 and a low porosity (3% empty spaces).

Fig. 9: Schematische Darstellung einer FeuchtluftdestilleFig. 9: Schematic representation of a humid still

Fig. 10: Wärmeleitwert eines beschichteten Wärmetauschers, eingesetzt in einer Klimaanlage: In der Grafik sind die Quotienten der Wärmeleitwerte von verschiedenen beschichteten Wärmetauschern zu einem unbeschichteten Wärmetauscher angegeben. Der Arbeitspunkt der Klimaanlage ist die Kühlung und Entfeuchtung von Luft mit 28°C, 95% Luftfeuchte eingangsseitig und 18°C, 20% Luftfeuchte ausgangsseitig. Die Beschichtung besteht aus: a) TiNi, 0O1, 1 b) TiNi, 0Oι, ιC0f 5 0, 01 C) TiNi, 0θι, ιC0, 5F0, 1 d) TiNi, 0Oι, ιC0 , 5F0 , 15 e)'TiNι, 0Oι, ιC0, 5 F0, 3 f) TiNi, 0Oι, ιC0, 5 0, 4 Fig. 11: Kons ruktionszeichnung der BeschichtungsanlageFig. 10: Thermal conductivity of a coated heat exchanger used in an air conditioning system: The graphic shows the quotients of the thermal conductivity of various coated heat exchangers for an uncoated heat exchanger. The operating point of the air conditioning system is the cooling and dehumidification of air with 28 ° C, 95% air humidity on the inlet side and 18 ° C, 20% air humidity on the outlet side. The coating consists of: a) TiNi, 0 O 1 , 1 b) TiNi, 0 Oι, ιC 0f 5 0, 01 C) TiNi, 0θι, ιC 0 , 5 F 0, 1 d) TiNi, 0 Oι, ιC 0 , 5 F 0, 15 e) ' TiNι, 0 Oι, ιC 0 , 5 F 0, 3 f) TiNi, 0 Oι, ιC 0 , 5 0 , 4 Fig. 11: Cons drawing of the coating system

Die Erfindung wird weiter anhand der Beispiele beschrieben.The invention is further described on the basis of the examples.

BEISPIELEEXAMPLES

Die Wärmetauscher werden folgendermaßen hergestellt: 0,3mm dicke Kupferfolien werden in einer Vakuumbeschichtungskammer beschichtet. Hierbei wird Titan mittels Elektronenstrahlverdampfung verdampft und N2, O2 , CH4, CO2 sowie Fluor werden in die Vakuumkammer zugeführt. Durch Steuern der Zusammensetzung des zugeführten Gases kann die chemische Zusammensetzung der Beschichtung gesteuert werden. Das Titan und die Gase kondensieren zu einer festen Beschichtung auf dem Kupferband. In einem folgenden Arbeitsschritt wird das Kupferband auf die Wärmetauschergröße zugeschnitten. Zwei dieser Zuschnitte werden, die beschichtete Seite nach außen, aufeinander gelegt. Vorher wird Lot und ein Rohr zwischen den Platten eingefügt. Der fast fertige Wärmetauscher wird in einem Lötofen gelötet.The heat exchangers are manufactured as follows: 0.3mm thick copper foils are coated in a vacuum coating chamber. Here titanium is evaporated by means of electron beam evaporation and N 2 , O 2 , CH 4 , CO 2 and fluorine are fed into the vacuum chamber. By controlling the composition of the gas supplied, the chemical composition of the coating can be controlled. The titanium and the gases condense to a solid coating on the copper strip. In a subsequent step, the copper strip is cut to the size of the heat exchanger. Two of these blanks are placed on top of each other with the coated side facing outwards. Before that, solder and a tube are inserted between the plates. The almost finished heat exchanger is soldered in a soldering oven.

Es wurden folgende Wärmetauscher hergestellt:The following heat exchangers were manufactured:

In einer Vakuumkammer (Fig. 11a, b) läuft das zu beschichtete Band 40±5cm über den Elektronenstrahlverdampfern, in denen Titan, Zirkonium und Hafnium verdampft werden.In a vacuum chamber (Fig. 11a, b), the tape to be coated runs 40 ± 5cm over the electron beam evaporators, in which titanium, zirconium and hafnium are evaporated.

a) Bandgeschwindigkeit: 45+5mm/s Verdampferrate: 50+10nm/s Material: Titana) Belt speed: 45 + 5mm / s evaporator rate: 50 + 10nm / s material: titanium

Substrattemperatur (Temperatur des Bandes) : 350±30°C Gesamtgasdruck: 10 hPaSubstrate temperature (temperature of the belt): 350 ± 30 ° C total gas pressure: 10 hPa

Zugeführte Gase: N2 , O2 im Verhältnis N22= 1000 Dies ergibt eine Beschichtung mit TiNi 0O1 , 1Gases supplied: N 2 , O 2 in the ratio N 2 / θ 2 = 1000 This results in a coating with TiNi 0 O 1 , 1

b) Bandgeschwindigkeit: 45±5mm/s Verdampferrate: 50±10nm/s Material: Titanb) Belt speed: 45 ± 5mm / s Evaporation rate: 50 ± 10nm / s Material: titanium

Substrattemperatur (Temperatur des Bandes) : 350±30°C Gesamtgasdruck: 10" hPa Zugeführte Gase: N2 , CO2, F im Verhältnis N2/CO2/F:Substrate temperature (temperature of the belt): 350 ± 30 ° C total gas pressure: 10 " hPa Gases supplied: N 2 , CO 2 , F in the ratio N 2 / CO 2 / F:

1000/50/0,11000/50 / 0.1

Dies ergibt eine Beschichtung mit iNi , θ°i,lCo,5 F θ,θl-This results in a coating with iNi, θ ° i, l Co, 5 F θ , θl -

c) Bandgeschwindigkeit: 45±5mm/s Verdampferrate: 50+10nm/s Material: Titanc) Belt speed: 45 ± 5mm / s Evaporation rate: 50 + 10nm / s Material: titanium

Substrattemperatur (Temperatur des Bandes) : 350+30°CSubstrate temperature (temperature of the belt): 350 + 30 ° C

Gesamtgasdruck: 10 hPaTotal gas pressure: 10 hPa

Zugeführte Gase: N2 , C0 , F im Verhältnis N2/CO2/F:Gases supplied: N 2 , C0, F in the ratio N 2 / CO 2 / F:

1000/50/11000/50/1

Dies ergibt eine Beschichtung mit i i , 0°l , l co , 5 Fo , 1This results in a coating with ii, 0 ° l , l c o, 5 F o, 1

d) Bandgeschwindigkeit: 45±5mm/s Verdampferrate: 50+10nm/s Material: Titand) Belt speed: 45 ± 5mm / s Evaporation rate: 50 + 10nm / s Material: titanium

Substrattemperatur (Temperatur des Bandes) : 350+30°CSubstrate temperature (temperature of the belt): 350 + 30 ° C

Gesamtgasdruck: 10 hPaTotal gas pressure: 10 hPa

Zugeführte Gase: N2 , C02, F im Verhältnis N2/C02/F=Gases supplied: N 2 , C0 2 , F in the ratio N 2 / C0 2 / F =

1000/50/0,151000/50 / 0.15

Dies ergibt eine Beschichtung mit iNi , 0°l , l c 0 , 5 F 0 15This results in a coating with iNi, 0 ° l , l c 0 , 5 F 0 15

e) Bandgeschwindigkeit: 45±5mm/s Verdampferrate: 50±10nm/s Material: Titane) Belt speed: 45 ± 5mm / s Evaporation rate: 50 ± 10nm / s Material: titanium

Substrattemperatur (Temperatur des Bandes) : 350±30°CSubstrate temperature (temperature of the belt): 350 ± 30 ° C

Gesamtgasdruck: 10 hPaTotal gas pressure: 10 hPa

Zugeführte Gase: N2 , C02, F im Verhältnis N2/C0 /F=Gases supplied: N 2 , C0 2 , F in the ratio N 2 / C0 / F =

1000/50/0,351000/50 / 0.35

Dies ergibt eine Beschichtung mit TiNi , 0°l , ic 0 , 5 F 0 , 3This results in a coating with TiNi, 0 ° l , i c 0 , 5 F 0 , 3

f) Bandgeschwindigkeit: 45+5mm/s Verdampferrate: 50±10nm/s Material: Titanf) Belt speed: 45 + 5mm / s Evaporation rate: 50 ± 10nm / s Material: titanium

Substrattemperatur (Temperatur des Bandes) : 350±30°CSubstrate temperature (temperature of the belt): 350 ± 30 ° C

Gesamtgasdruck: 10 hPaTotal gas pressure: 10 hPa

Zugeführte Gase: N2 , C02, F im Verhältnis N2/C02/F=Gases supplied: N 2 , C0 2 , F in the ratio N 2 / C0 2 / F =

1000/50/0,51000/50 / 0.5

Dies ergibt eine Beschichtung mit iNi , 0°1 , l c 0 , 5 F 0 , 4 ■ ) Bandgeschwindigkeit: 45±5mm/s Verdampferrate: 50±10nm/sThis results in a coating with iNi, 0 ° 1 , l c 0 , 5 F 0 , 4 ■ ) Belt speed: 45 ± 5mm / s Evaporation rate: 50 ± 10nm / s

Material: Titan, Zirkonium im Verhältnis 1:0,1 Substrattemperatur (Temperatur des Bandes) : 350±30°C Gesamtgasdruck: 10" hPaMaterial: titanium, zirconium in a ratio of 1: 0.1 substrate temperature (temperature of the strip): 350 ± 30 ° C total gas pressure: 10 " hPa

Zugeführte Gase: N , O2 im Verhältnis N /0 = 1000 Dies ergibt eine Beschichtung mit TiZrg , 1N1 , 0O1 , 1Gases supplied: N, O 2 in the ratio N / 0 = 1000 This results in a coating with TiZrg, 1 N 1 , 0 O 1 , 1

Wärmetauscher mit den Beschichtungen a-f werden in Figur 10 vermessen. Heat exchangers with the coatings a-f are measured in FIG. 10.

Claims

Patentansprüche claims 1. Wärmetauscher-Vorrichtung mit einer oberflachenbeschichteten Wand, die Medium 1 von Medium 2 trennt, wobei die Oberfläche der Wand zumindest teilweise mit einer dünnen Schicht beschichtet ist, die mindestens eine Verbindung der Elemente Titan, Zirkonium und/oder Hafnium und/oder Legierungen davon mit Stickstoff und/oder Sauerstoff und/oder Kohlenstoff und/oder Fluor enthält.1. Heat exchanger device with a surface-coated wall that separates medium 1 from medium 2, the surface of the wall being at least partially coated with a thin layer that contains at least one compound of the elements titanium, zirconium and / or hafnium and / or alloys thereof with nitrogen and / or oxygen and / or carbon and / or fluorine. 2. Wärmetauscher-Vorrichtung nach Anspruch 1, wobei die Verbindung die chemische Formel TixZryHfz Na°bcc (mit x,y,z2. Heat exchanger device according to claim 1, wherein the compound has the chemical formula Ti x ZryHf z N a ° b c c (with x, y, z = jeweils 0 bis 1; a,b,c = jeweils 0 bis 2,5, mit der Maßgabe, daß x+y+z = 1 und a+b+c > 0) hat.= 0 to 1 in each case; a, b, c = 0 to 2.5, with the proviso that x + y + z = 1 and a + b + c> 0). 3. Wärmetauscher-Vorrichtung nach Anspruch 1 oder 2 , wobei die Verbindung die chemische Formel TixZryHf ^^0^0,-. (mit x,y,z = jeweils 0 bis 1; a,b,c = jeweils 0 bis 2, mit der Maßgabe, daß x+y+z = 1 und a+b+c = 0,02 bis 2,0) hat.3. Heat exchanger device according to claim 1 or 2, wherein the compound has the chemical formula Ti x Zr y Hf ^^ 0 ^ 0, -. (with x, y, z = 0 to 1 each; a, b, c = 0 to 2 each, with the proviso that x + y + z = 1 and a + b + c = 0.02 to 2.0 ) Has. 4. Wärmetauscher-Vorrichtung nach Anspruch 1, wobei die Verbindung die chemische Formel TixZryHfz aO;bCcFd (mit x,y, z=jeweils 0 bis 1; a,b=jeweils 0 bis 2, c=0,05 bis 2 und d=0,01 bis 2 mit der Maßgabe x,y,z=l, a,b,c=0,02 bis 2,0 und d/c=0,05 bis 2,05) hat.4. The heat exchanger device according to claim 1, wherein the compound has the chemical formula Ti x Zr y Hf za O; b C c F d (with x, y, z = 0 to 1 each; a, b = 0 to 2 each, c = 0.05 to 2 and d = 0.01 to 2 with the proviso x, y, z = l, a, b, c = 0.02 to 2.0 and d / c = 0.05 to 2.05). 5. Wärmetauscher-Vorrichtung nach Anspruch 4 , wobei die Verbindung CF und/oder CF2-Gruppen enthält, die im ESCA- Spektrum zu Maxima bei 290±1 eV (hervorgerufen durch CF- Gruppen) bzw. 293+1 eV (hervorgerufen durch CF2~Gruppen) führen.5. Heat exchanger device according to claim 4, wherein the compound contains CF and / or CF2 groups which in the ESCA spectrum to maxima at 290 ± 1 eV (caused by CF groups) or 293 + 1 eV (caused by CF2 ~ Groups). 6. Wärmetauscher-Vorrichtung nach einem der Ansprüche 1 bis 5, wobei die Wärmetauscherwand aus einem Metall, wie Kupfer, Aluminium, Nickel, Chrom, Titan, Vanadium, Niob, Eisen oder deren Mischungen oder deren Legierungen besteht. 6. Heat exchanger device according to one of claims 1 to 5, wherein the heat exchanger wall consists of a metal such as copper, aluminum, nickel, chromium, titanium, vanadium, niobium, iron or mixtures thereof or their alloys. 7. Wärmetauscher-Vorrichtung nach einem der Ansprüche 1 bis 5, wobei die Wärmetauscherwand aus Kunststoff bevorzugt Polypropylen, Polyester, Polyamid, Polyurethan, Polyethylen, Polytetrafluorethylen besteht.7. Heat exchanger device according to one of claims 1 to 5, wherein the heat exchanger wall made of plastic preferably polypropylene, polyester, polyamide, polyurethane, polyethylene, polytetrafluoroethylene. 8. Wärmetauscher-Vorrichtung, wobei die dünne Schicht der Verbindung auf der Wärmetauscherwand 20 nm bis 2 mm dick ist .8. Heat exchanger device, wherein the thin layer of the connection on the heat exchanger wall is 20 nm to 2 mm thick. 9. Verfahren zur Herstellung der dünnen Schicht auf der Wärmetauscherwand der Wärmetauscher-Vorrichtung nach einem der Ansprüche 1 bis 8, wobei die zu beschichtende Wärmetauscherwand teilweise oder im Ganzen in eine Vakkumbeschichtungsanlage eingebracht wird, worin mittels Elektronenstrahlverdampfung Titan, Zirkonium und/oder Hafnium verdampft wird und durch "mass flow controler" die Elemente Stickstoff, Sauerstoff, Kohlenstoff und/oder Fluor gasförmig beigegeben werden.9. A method for producing the thin layer on the heat exchanger wall of the heat exchanger device according to one of claims 1 to 8, wherein the heat exchanger wall to be coated is introduced partially or wholly in a vacuum coating system, in which titanium, zirconium and / or hafnium is evaporated by means of electron beam evaporation and by means of "mass flow controler" the elements nitrogen, oxygen, carbon and / or fluorine are added in gaseous form. 10. Vorrichtung zur Durchführung des Verfahrens nach Anspruch 9, dadurch gekennzeichnet, dass im Deckel einer zylindrischen Vakuumkammer ein Tragrohr angebracht ist an welchem ein Wickelmechanismus mit mindestens zwei Umlenkwalzen, einer Ab- und einer Aufwickelwalze befestigt ist, wobei die Vakuumkammer mit Elektronenstrahlkanonen und Gaszuflusskontrollern (mass flow controler) ausgestattet ist.10. The device for carrying out the method according to claim 9, characterized in that in the cover of a cylindrical vacuum chamber a support tube is attached to which a winding mechanism with at least two deflecting rollers, a unwinding and a winding roller is fastened, the vacuum chamber with electron beam guns and gas flow controllers ( mass flow controler). 11. Verwendung der Wärmetauscher-Vorrichtung nach einem der Ansprüche 1 bis 8 in einer Feuchtluftdestille. 11. Use of the heat exchanger device according to one of claims 1 to 8 in a humid still.
PCT/DE2002/001669 2001-05-08 2002-05-08 Heat-exchanging device comprising a surface-coated wall separating medium 1 from medium 2 Ceased WO2002090859A1 (en)

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EP3222931A1 (en) * 2016-03-22 2017-09-27 POLYCSP ApS Solar selective coating
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