WO2002089157A1 - Multilayer coil and its manufacturing method - Google Patents
Multilayer coil and its manufacturing method Download PDFInfo
- Publication number
- WO2002089157A1 WO2002089157A1 PCT/JP2002/004239 JP0204239W WO02089157A1 WO 2002089157 A1 WO2002089157 A1 WO 2002089157A1 JP 0204239 W JP0204239 W JP 0204239W WO 02089157 A1 WO02089157 A1 WO 02089157A1
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- Prior art keywords
- multilayer
- coil
- substrate
- multilayer coil
- circuit
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Classifications
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
- G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
- G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
- G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
- G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
- G06K19/07749—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card
- G06K19/07773—Antenna details
- G06K19/07777—Antenna details the antenna being of the inductive type
- G06K19/07779—Antenna details the antenna being of the inductive type the inductive antenna being a coil
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
- G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
- G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
- G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
- G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
- G06K19/07749—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
- G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
- G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
- G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
- G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
- G06K19/07749—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card
- G06K19/07773—Antenna details
- G06K19/07777—Antenna details the antenna being of the inductive type
- G06K19/07779—Antenna details the antenna being of the inductive type the inductive antenna being a coil
- G06K19/07783—Antenna details the antenna being of the inductive type the inductive antenna being a coil the coil being planar
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
- G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
- G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
- G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
- G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
- G06K19/07749—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card
- G06K19/07773—Antenna details
- G06K19/07777—Antenna details the antenna being of the inductive type
- G06K19/07784—Antenna details the antenna being of the inductive type the inductive antenna consisting of a plurality of coils stacked on top of one another
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/046—Printed circuit coils structurally combined with ferromagnetic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q7/00—Loop antennas with a substantially uniform current distribution around the loop and having a directional radiation pattern in a plane perpendicular to the plane of the loop
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q7/00—Loop antennas with a substantially uniform current distribution around the loop and having a directional radiation pattern in a plane perpendicular to the plane of the loop
- H01Q7/06—Loop antennas with a substantially uniform current distribution around the loop and having a directional radiation pattern in a plane perpendicular to the plane of the loop with core of ferromagnetic material
- H01Q7/08—Ferrite rod or like elongated core
Definitions
- the present invention relates to a multilayer coil having a novel structure, which has a small and fine conductor pattern, and whose winding number can be set almost arbitrarily, and a method for manufacturing the same.
- Bluetooth which transmits and receives data wirelessly between a personal computer and a printer or between a personal computer and a mobile phone.
- studies are being made in the field of mouth-sticks, such as RF tags, which can be attached to luggage, etc., and read the information in a non-contact manner to grasp the history of the luggage, etc.
- These cards or elements have a structure called an antenna coil.
- the transmitted electromagnetic wave is received by an antenna coil, and a semiconductor device such as a microcomputer is driven by the generated power to rewrite or update data, and further transmit data to a reading device. It is known that the generated power is proportional to the number of turns of the coil if the antenna coil has the same area.
- antenna coils have been used in which a wire is spirally wound, formed by printing a conductive paste, or formed on a printed circuit board by etching.
- Coil formed by printing conductive paste is lower in cost than wire and etching methods, but it has low conductivity and can form only sparse patterns, so it is not possible to obtain sufficient inductance
- a high-performance microcomputer cannot be driven, and as a result, a high-performance card cannot be obtained.
- the antenna coil occupies a large area, there is a great limitation on mounting other elements.
- the antenna coil formed on the printed circuit board by the etching process cannot secure a sufficient number of turns on a single plane, has insufficient inductance, and has the same problems as when a conductive paste is used.
- Japanese Patent Application Laid-Open No. Hei 9-131556 proposes a multilayer antenna coil by a transfer lamination method.
- a wide variety of devices are used for audio equipment such as CD players, VTRs, door locks, power electronics such as power windows, home appliances such as shavers, OA equipment such as pudding and copiers, and toys.
- audio equipment such as CD players, VTRs, door locks, power electronics such as power windows, home appliances such as shavers, OA equipment such as pudding and copiers, and toys.
- miniaturization of devices such as portable CD players has been progressing, and small-sized devices have been required.
- motors having a diameter of about l mm have been marketed.
- the first class is basically composed of the following three points.
- a coil a permanent magnet, and a brush in which an enamel wire is wound around a core such as iron.
- Various improvements have been made to the coil section, which has a structure in which an enameled wire is wound around the core, such as the production of a very thin conductor and the development of a winding machine.
- An object of the present invention is to provide a multilayer coil which is small and can arbitrarily secure a sufficient number of windings (number of layers) and can obtain a large inductance, and is particularly suitable as a motor coil or an antenna coil. I have.
- the above object can be achieved by the following means.
- a multilayer coil in which a coil having a circuit surface in the direction perpendicular to the plane of the board is formed in multiple layers in a spiral shape. Furthermore,
- a spiral coil in which coils having a circuit surface perpendicular to the plane of the substrate are formed in multiple layers, and adjacent circuits via the insulating layer are wound in opposite directions when viewed from the same direction. Multilayer coils with patterns and electrically connected to each other. Furthermore,
- a multilayer coil in which a coil having a circuit surface in the direction perpendicular to the plane of the substrate is formed in a spiral shape in a plurality of layers, and a core structure made of a columnar magnetic material penetrating the center of the circuit surface is provided. Furthermore,
- a spiral coil in which a coil having a circuit surface in a direction perpendicular to the substrate plane is formed in a plurality of layers and adjacent circuits via an insulating layer are wound in opposite directions when viewed from the same direction.
- a multilayer coil having a pattern, being electrically connected to each other, and having a core structure made of a columnar magnetic material penetrating the center of each circuit surface.
- the above object can also be achieved by the following means.
- Multi-layer coil It is formed integrally with the multilayer substrate, includes a winding portion parallel to the multilayer substrate and a winding portion perpendicular to the multilayer substrate, and is supported in the multilayer substrate. Multi-layer coil.
- the unit windings of the multilayer coil each have a spiral pattern that turns in the opposite direction when viewed from the same direction as the other adjacent unit windings, and the unit windings of the adjacent unit windings
- the multilayer coil is further characterized in that the sets are connected alternately at the tips or ends of the spiral pattern.
- a winding portion parallel to the multilayer substrate is formed as a part of a stacked conductive layer, and a winding portion perpendicular to the multilayer substrate connects a conductive layer adjacent to the conductive layer via an insulating layer.
- the multilayer coil further formed as:
- a winding portion parallel to the multilayer substrate is formed as a part of the stacked conductive layers, and a winding portion perpendicular to the multilayer substrate is formed between the adjacent conductive layers through the insulating layer.
- a multilayer coil further formed as a connecting via or through hole.
- a multilayer coil further having a core structure made of a columnar magnetic material penetrating the inside of the multilayer coil.
- the multilayer coils are field coils of a motor, and the central axes of the multilayer coils are respectively oriented toward the rotation axis of each motor. And the plurality of multilayer coils are arranged at equal intervals to each other.
- An antenna comprising:
- Such a multilayer coil having a flat board and a circuit surface in the vertical direction is a novel one that has not been known before, and because of its excellent features, it can be used as a coil for mobile phones or as a non-contact type IC card. It is suitable as an antenna coil used for a Bluetooth module, an RF tag and the like. Further, according to the present invention, the above object can also be achieved by a manufacturing method including the following means.
- (13) a step of forming one insulating layer constituting the multilayer substrate; and forming at least a part of a winding portion of a multilayer coil parallel to the multilayer substrate on the insulating layer in the multilayer substrate.
- At least one of the steps forming at least a part of the winding portion of the multilayer coil is defined as a winding portion of a multilayer coil parallel to the multilayer substrate and a winding of a multilayer coil perpendicular to the multilayer substrate.
- the unit winding of the predetermined multilayer coil has a helical pattern that turns in the opposite direction when viewed from the same direction as other adjacent unit windings, and A method of manufacturing a multilayer coil, further comprising the sets of windings being alternately connected at the tips or ends of the spiral pattern.
- the method for manufacturing a multilayer coil further comprising the vertical connection portion being a bump connecting an adjacent conductive layer via an insulating layer.
- At least one of the steps is carried out by a build-up method, and the vertical connection portion is a via or a through hole connecting an adjacent conductive layer through an insulating layer.
- a method for manufacturing a multilayer coil further comprising a step of forming a core structure made of a magnetic material inside the multilayer coil.
- the multilayer coil is a motor-field coil, the central axis of the multilayer coil is oriented toward the rotation axis of the motor, and the multilayer coils are mutually equal.
- a method of manufacturing a field coil for a motor further comprising a plurality of multilayer coils arranged at intervals.
- Forming a circuit forming a second circuit included in the circuit of the non-contact type IC card inside or on the surface of the multilayer substrate, and connecting the multilayer coil and the first circuit And connecting the planar coil and the second circuit.
- the first circuit is operated by an output from the multilayer coil
- the second circuit is A method of manufacturing a circuit of a non-contact type IC card, further comprising being operated by an output of the IC card.
- FIG. 1 is a schematic perspective view showing an example of the multilayer coil according to claims 1 and 12.
- FIG. 2 is a conceptual perspective view showing an example of the multilayer coil according to claims 2 and 13.
- FIG. 3 is a conceptual perspective view showing an example of the multilayer coil according to claims 3 and 16.
- FIG. 4 is a conceptual perspective view showing an example of the multilayer coil according to claims 4 and 16.
- FIG. 5 is a perspective view of a substrate at an early stage of manufacturing the multilayer coil of FIG.
- FIG. 6 is a perspective view of a substrate in an intermediate stage of manufacturing the multilayer coil of FIG.
- FIG. 7 is a perspective view of the substrate at the initial stage of manufacturing the multilayer coil of FIG.
- 8A and 8B are cross-sectional views for explaining the production of the multilayer coil of FIG. 2 by the build-up method.
- FIG. 9 is a sectional view for explaining the production of the multilayer coil by the batch lamination method.
- FIG. 10 is a cross-sectional view illustrating the formation of an insulating layer.
- 11A, 11B and 11C are cross-sectional views for explaining via formation.
- FIGS. 12A, B, C, and D are cross-sectional views for explaining the conductivity of vias for forming a circuit.
- FIGS. 13A, 13B and 13C are cross-sectional views illustrating connection by bumps.
- FIG. 14 is an initial manufacturing cross-sectional view of a circuit outer layer portion.
- FIG. 15 is a cross-sectional view of the outer layer portion of the circuit.
- FIG. 16 is a cross-sectional view before press working.
- FIG. 17 is a perspective view of an initial substrate for manufacturing a multilayer coil having a magnetic core structure.
- FIG. 18 is a plan view when two multilayer coils are arranged for a motor.
- FIG. 19 is a plan view in a case where three multilayer coils are arranged for each module.
- FIG. 20 is a perspective view showing an example of power supply unit wiring of a multilayer coil.
- FIG. 21 is a plan view showing an example of the non-contact type IC card according to claim 8.
- FIG. 22 is a conceptual perspective view showing an example of the multilayer coil according to claims 4 and 16.
- FIG. 23 is a conceptual perspective view showing an example of the multilayer coil according to claim 5.
- FIG. 24 is a perspective conceptual view showing an example of the antenna according to claim 18. BEST MODE FOR CARRYING OUT THE INVENTION
- the device has a structure in which conductive circuits 2 are formed in multiple layers (four layers in the drawing) in a direction perpendicular to the plane of the substrate 1.
- the winding portion of the coil parallel to the multilayer substrate is formed as a part of the conductive layer to be laminated, and the winding portion perpendicular to the multilayer substrate is formed between the adjacent conductive layers via the insulating layer. It is formed as a connecting bump, via or through hole.
- a plurality of coils are simultaneously formed in the multilayer substrate in the process of manufacturing the multilayer substrate by utilizing a known multilayer substrate (print substrate) manufacturing technique such as a build-up method. It is possible to do.
- a coil-shaped circuit 3 is formed so as to have a circuit surface in a direction perpendicular to the plane of the substrate 1, and adjacent circuits via an insulating layer are viewed from the same direction.
- a multilayer circuit which is spirally patterned in a direction opposite to each other and electrically connected to each other may be one having a small number of turns on each circuit surface constituting the multilayer as shown in FIG. Even if the number of coils is the same, a stronger inductance is given than a multilayer coil in which the winding direction of the circuit of each layer is the same.
- the unit windings of the coil-shaped circuit 3 each have a spiral pattern that turns in the opposite direction when viewed from the same direction as the other adjacent unit windings, and the unit windings adjacent to each other Is different from the configuration of the multilayer coil shown in FIG. 1 in that it is connected to each other at the tips or ends of the spiral pattern.
- the core of the coil (the position penetrating through the center of each circuit surface) is composed mainly of a magnetic substance made of a simple substance such as iron or nickel, or an alloy or its compound.
- the multilayer coil of the present invention can be manufactured by applying various known methods.
- the present invention will be described by way of examples. However, these are examples, and the present invention is not limited to these examples.
- FIG. 5 a conductor pattern is formed on both sides of a well-known substrate, for example, a copper-clad glass epoxy laminate 5.
- a substrate for example, a copper-clad glass epoxy laminate 5.
- 6 is a pattern on the upper surface of the substrate
- 7 is a pattern on the lower surface.
- a subtractive method can be applied to the production of this pattern.
- a substrate whose surface is not conductive it can be formed by a full additive method, a semi-additive method, or printing of a conductive paste.
- the coil In order to use the coil as an antenna coil and to increase the opening of the coil in order to increase the inductance, it is possible to solve the problem by using a thick substrate 5.
- it can also be manufactured by forming a pattern corresponding to the outermost layer on each single-sided plate, laminating with insulating sheets or prepregs interposed therebetween, and then making holes and performing electrical connection processing.
- the multilayer coil of FIG. 2 which is an example of the means (2) and (7) can be manufactured by forming the substrate into a multilayer structure (corresponding to the manufacturing method of the means (14)). Public knowledge Conventional methods can be applied, but because of the structurally blind vias, appropriate processes are required.
- an inner layer pattern 9 as shown in FIG. 7 is created.
- a double-sided copper-clad laminate can be formed by a known method, such as drilling a hole, conducting through holes by plating, or patterning the surface by a subtractive method.
- An insulating layer and a conductive layer may be formed on both sides of the inner layer 9 to perform patterning and electrical connection.
- an insulating layer is formed on the substrate including the inner layer 9.
- a glass epoxy-based or aramid resin-based pre-reader a liquid or film-like thermoplastic or thermosetting resin composition, or a copper foil and an insulating resin layer, which is generally called a resin-coated copper foil, is used.
- a resin-coated copper foil is used.
- One that has been integrated can be used.
- the formation of the insulating layer is performed, for example, as follows. As shown in FIG. 8A, prepregs 10, unpatterned copper foil 11, or resin-coated copper foil 12 as shown in FIG. As described above, these are collectively laminated and cured by a lamination press method, and an insulating layer and a conductive layer are integrally formed. (Alternatively, as shown in FIG. 10, the liquid composition is applied onto the substrate 9 by a known and common method such as screen printing, force coating, spray coating, or the like, and then exposed to UV, electron beam, heat, or the like. Alternatively, the composition in the form of a film is pasted on the substrate by a method such as roll or lamination, and cured by a predetermined method to obtain an insulating layer 13.
- a via is formed.
- a via 14 is formed at a predetermined position on the obtained substrate by using a drill, a laser, etc.
- Fig. 11A shows a case where a pre-predator 10 and a copper foil 11 are used as insulating layers and conductive layers.
- Fig. 11B shows the case of using a resin-coated copper foil 12
- Fig. 11C shows the case of using a liquid or film-like thermoplastic or thermosetting resin composition.
- a carbon dioxide gas laser widely used for forming blind vias is used when a conductive layer is also formed together with an insulating layer by etching, if necessary, a conductor at a predetermined position is removed by etching if necessary. Mask processing may be performed.
- a conductive layer is formed together with an insulating layer using a pre-predeer or a resin-coated copper foil, for example, as shown in Fig. 12A
- a conductive paste in which conductive powder such as silver or copper is blended into vias is used. Is embedded by printing, dispensing, etc., and hardened by a predetermined method.
- a normal through-hole plating that is, a method in which a plating catalyst is applied in a via, an electroless plating is performed, and then, a plating layer 16 is formed by performing an electrolytic plating. Electrical connection is achieved.
- the insulating layer is formed using a liquid or film-like composition, as shown in FIG.
- the blind via is made conductive by the conductive paste 15 or the plating layer 16 and connected.
- the conductive via of the blind via may be performed first.
- a catalyst is applied to the substrate on which the insulating layer and the blind via are formed, the electroless plating is performed, and if necessary, the electroconductive plating is performed.
- the formation of the vias and the conduction of the blind vias can also be performed at once. In this case, the conduction of the via via can also be performed by the conductive paste 15.
- the insulating layer, the conductive layer, and the electrical connection can be collectively performed by the following method. That is, as shown in FIGS. 13A to 13C, a sharp bump 18 is formed at a predetermined location on the inner layer circuit 9 by using a conductive paste or the like, and then (FIG. 13A) prepreg Pressing after placing 10 and copper foil 11 or (Fig. 13B) Film-shaped insulator 13 and copper foil 11 or (Fig. 13C) Resin-coated copper foil 12 As a result, the pointed conductive bumps 18 penetrate the insulating layer and realize connection with the conductive layer.
- the hole When using the above liquid or film-shaped insulating material using a through-hole substrate connected by plating, or when further laminating on an insulating layer with a blind pier formed once by the build-up method, fill the hole.
- the surface may be smoothed by filling the through-holes or blind vias with an ink or paint treatment.
- a four-layer antenna coil using glass epoxy prepreg as the insulating layer is described. That is, as shown in FIG. 14, a predetermined position on the base material 19 side of the copper-clad single-sided glass epoxy substrate is punched using a laser or the like. Subsequently, electric plating is performed using the copper foil 11 as an electrode, and the resulting hole is filled with the plating 20. Then, a low melting point metal bump 21 is successively formed by a plating method.
- the copper foil 11 is etched into a predetermined pattern as shown in FIG.
- the same composition 22 as that used for the insulating layer is thinly applied to the bump side and semi-cured.
- the one shown in FIG. 15 manufactured from this single-sided substrate is the outermost layer, that is, the first and fourth layers.
- the inner layer 9 is aligned with the outermost layer in Fig. 15, and the semi-cured composition is removed from the bumps by pressing to form an interlayer insulating layer.
- the bumps are electrically connected to the conductor in the inner layer, and an antenna coil having a four-layer structure is manufactured.
- a known and commonly used insulating material can be used for the insulating layer.
- epoxy resin, bismaleimide-triazine resin, polyphenylene ether resin, polyetheretherketone resin, polyimide resin, and others examples thereof include a liquid or film-like thermoplastic or thermosetting compound obtained by mixing a curing agent and an inorganic filler, and a prepreg mixed with a glass cloth or the like.
- thermoplastic or thermosetting compound obtained by mixing a curing agent and an inorganic filler, and a prepreg mixed with a glass cloth or the like.
- ceramic materials can be used as the insulating layer.
- a coil can be formed by stacking and firing a sheet-like composition generally called a green sheet.
- the thickness of the insulating layer can be arbitrarily set according to the application, but from the viewpoint of insulation reliability, it is preferably about 10 to 300 microns in practical use.
- the thickness of the conductor can be arbitrarily set in accordance with the application as in the case of the insulating layer, but is preferably about 5 microns or 200 microns in practice.
- the wiring pattern of each layer can be formed by a known method such as a subtractive method, a full additive method, a semi-additive method, and a transfer method.
- a known method such as a subtractive method, a full additive method, a semi-additive method, and a transfer method.
- a known material such as a conductive paste containing various metals, an electroless or electrolytic plating film can be used.
- the coil of the present invention can have a structure in which a stronger inductance is obtained by having a core structure mainly composed of a magnetic material at the center of the coil. That is, the structure is as shown in FIGS.
- a core structure 4 mainly composed of a magnetic material is formed in a base material serving as a base.
- the core structure 4 is subjected to press working in a state where a rod-shaped magnetic body is sandwiched between the pre-preda when manufacturing the base material.
- a core structure 4 is formed using a magnetic paste obtained by kneading and dispersing a magnetic substance powder in a polymer on a base material, and then performing a drilling process and the like.
- the formation of the insulating layer and the conductive layer and the connection between the layers are performed by the method described above.
- the magnetic material is generally composed of a simple substance such as iron or nickel or an alloy or a compound thereof. What is used can be used.
- the length of the core structure mainly composed of a magnetic material is arbitrary as long as it does not exceed the length of the coil. Also, the thickness and width thereof can be set arbitrarily as long as the insulation with the coil formed therearound is maintained.
- the motor can be formed by preparing the coil 23 (coils in FIGS. 1 to 4) (field coil), forming the substrate into a required shape, attaching a shaft of the motor and a brush, and integrally shaping.
- the coil 23 coil in FIGS. 1 to 4
- field coil field coil
- the shaft can be integrated by drilling a predetermined position on the substrate on which the coil is formed, using a drill, etc., and then attaching a shaft suitable for the motor.
- the integration can also be achieved by bonding a bin, which is used for a PGA (pin grid array), which is a form of semiconductor package, on a substrate.
- the brush part can be a general one for a single motor. However, the motor part can be further multi-layered to form the brush part as a whole.
- Each coil must be connected to a power supply, similar to conventional motor coils. If you want to create a coil by the various methods described above and wire the power supply IN (IN) side and OUT (OUT) side close to each other, for example, as shown in FIG. .
- IC 1 (30), a conventional antenna coil 31 and IC 2 (32), and an antenna coil 23 of the present invention are mounted on a card.
- the output combining means 33 combines or switches the outputs by a known maximum ratio combining receiving method, a selective combining receiving method, an equal gain combining receiving method, or the like. With this antenna, fluctuations in antenna output due to fluctuations in the polarization plane of radio waves can be reduced.
- the multilayer coil of the present invention may have a multilayered structure of a circuit having a plurality of coils on the same plane as shown in FIG. Furthermore, as shown in Fig. 23, by providing a rod-shaped core structure 4 mainly composed of a magnetic material at a position penetrating through the center of each circuit surface, a multilayer coil with a stronger inductance can be obtained. . Further, the core structure 4 can be provided in all or some of the plurality of coils at the center. Furthermore, a core structure 4 may be provided at all or a part of the plurality of coils in addition to the center of each circuit surface to form a multilayer coil capable of obtaining a stronger inductance.
- the above-described multilayer coil according to the present invention can set the number of turns of the coil more freely than the conventional one and has a strong inductance.
- the degree of freedom in design is dramatically improved.
- the coil of the present invention can be applied to a general printed circuit board manufacturing process, it is possible to produce an overwhelmingly fine conductor as compared with an enameled wire.
- the coil is not only inexpensive, but also has essentially no variation. Therefore, a device for absorbing performance variations conventionally incorporated in a driven part is not required.
- This coil is not only suitable for use as an antenna coil for non-contact type IC cards, B 1 uet 0 'modules, RF tags, etc., but is also excellent as a coil for motors . Furthermore, by combining with a conventional coil, it is possible to provide a non-contact type high-performance IC card capable of independently driving two functions.
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Abstract
Description
明 細 書 Specification
多層コィルぉよびその製造方法 Multilayer coil and method of manufacturing the same
技術分野 Technical field
本発明は、 小型で且つ微細な導体パターンを有し、 巻き数をほぼ任意に設定で きる、 新規な構造の多層コイル及びその製造方法に関する。 The present invention relates to a multilayer coil having a novel structure, which has a small and fine conductor pattern, and whose winding number can be set almost arbitrarily, and a method for manufacturing the same.
背景技術 Background art
近年、 スキー場のリフトの回数券カード、 電車やパスなどの回数券、 定期券用 カードとして、 カードを取り出して改札口等の読みとり装置を通さなくても、 そ の近くを通るだけでデ一夕の確認及び更新が可能である非接触型 I Cカードが使 われるようになってきている。 In recent years, as a coupon card for ski lifts, a coupon for trains and passes, and a commuter pass card, it is not necessary to take out the card and pass it through a reading device such as a ticket gate. Contactless IC cards that can be checked and updated in the evening are being used.
また、 ブルートウ一ス (B l u e t o o t h) と呼ばれる、 パソコンとプリン 夕一、 あるいはパソコンと携帯電話等の間で無線でデータを送受信する方式も採 用されてきている。 加えて、 荷物などに貼り付け、 非接触でその情報を読みとる ことにより、 その荷物などの履歴を把握する R Fタグと呼ばれるものも口ジステ イツク分野などで検討が進んでいる。 In addition, a method called Bluetooth, which transmits and receives data wirelessly between a personal computer and a printer or between a personal computer and a mobile phone, has also been adopted. In addition, studies are being made in the field of mouth-sticks, such as RF tags, which can be attached to luggage, etc., and read the information in a non-contact manner to grasp the history of the luggage, etc.
これらのカードあるいは素子中には、 アンテナコイルと呼ばれる構造がある。 送信された電磁波をアンテナコイルにより受信し、 生じた電力によりマイコンな どの半導体装置を駆動させ、 データの書き換え、 更新などを行い、 更に読みとり 装置にデータを送信することができる。 生じる電力は、 同一面積のアンテナコィ ルであればコイルの巻き数に比例することが知られている。 These cards or elements have a structure called an antenna coil. The transmitted electromagnetic wave is received by an antenna coil, and a semiconductor device such as a microcomputer is driven by the generated power to rewrite or update data, and further transmit data to a reading device. It is known that the generated power is proportional to the number of turns of the coil if the antenna coil has the same area.
アンテナコイルとしてはこれまで、 ワイヤーをスパイラル状に巻き加工したも の、 導電性ペース卜を印刷することにより形成したもの、 エッチング処理により プリント基板上に形成したものなどが使用されてきた。 Heretofore, antenna coils have been used in which a wire is spirally wound, formed by printing a conductive paste, or formed on a printed circuit board by etching.
しかしながら、 これら現在使用されているアンテナコイルは、 例えば非接触型 I Cカードのように限られた面積では種々の制限があり、 十分な性能を発揮でき ない。 However, these currently used antenna coils have various limitations in a limited area such as a non-contact type IC card, and can exhibit sufficient performance. Absent.
ワイヤーの巻き加工によって薄型のコイルを作成する場合、 径の細いワイヤ一 を使用するが、 径が細くなると抵抗が大きくなり、 適正な物性が得られない。 ま た、 扁平状のワイヤーを用いる場合もあるが、 巻き数を増やすとコイル自体が大 きくなりすぎてしまうという欠点がある。 When a thin coil is made by winding a wire, a thin wire is used. However, if the diameter is small, the resistance increases and proper physical properties cannot be obtained. In some cases, a flat wire is used, but when the number of turns is increased, the coil itself becomes too large.
導電性ペーストの印刷により形成されたコイルは、 ワイヤー、 エッチング法に 比べて低コストであるが、 導電性が低くまた本質的に疎なパターンしか形成でき ないため十分なインダク夕ンスを得られず、 例えば非接触型 I Cカードに用いる 場合には高性能なマイコンなどを駆動できず、 結果的に高性能なカードを得るこ とができない。 更に、 アンテナコイルが大きな面積を占めてしまうため他の素子 などの搭載に大きな制限が生じる。 Coil formed by printing conductive paste is lower in cost than wire and etching methods, but it has low conductivity and can form only sparse patterns, so it is not possible to obtain sufficient inductance However, for example, when used for a contactless IC card, a high-performance microcomputer cannot be driven, and as a result, a high-performance card cannot be obtained. Furthermore, since the antenna coil occupies a large area, there is a great limitation on mounting other elements.
エッチング処理によりプリント基板上に形成されたアンテナコイルは、 単一平 面では十分な卷き数を確保できず、 インダクタンスが不十分であり、 導電ペース トを用いた場合と同様の問題点がある。 The antenna coil formed on the printed circuit board by the etching process cannot secure a sufficient number of turns on a single plane, has insufficient inductance, and has the same problems as when a conductive paste is used.
上記問題点を解決するため、 多層化されたアンテナコイルが種々提案されてい る。 例えば特公平 0 6— 4 6 4 1 6号公報には、 対向する導電層が、 同じ向きか ら見た場合互いに反対方向に卷かれた螺旋状のパターンを有し、 お互いに電気的 に接続することを特徴とするアンテナコイル、 すなわち、 お互い反対向きに卷か れたコイルを接続することにより、電磁誘導により生じる電流を同一方向に流し、 十分なィンダク夕ンスを得る事を目的とした提案がなされている。 In order to solve the above problems, various multilayered antenna coils have been proposed. For example, in Japanese Patent Publication No. 06-466416, opposing conductive layers have spiral patterns wound in opposite directions when viewed from the same direction, and are electrically connected to each other. By connecting antenna coils, that is, coils wound in opposite directions, the current generated by electromagnetic induction can flow in the same direction, and a sufficient inductance can be obtained. Has been made.
一方、 例えば特開平 9一 1 3 0 0 5 6号公報には、 転写積層法による多層アン テナコイルが提案されている。 On the other hand, for example, Japanese Patent Application Laid-Open No. Hei 9-131556 proposes a multilayer antenna coil by a transfer lamination method.
しかしながら、 これら従来の基板平面と平行方向に回路面を持ち且つ同方向に 多層化されたアンテナコイルは、 厚さ方向の制約があり、 十分な巻き数を確保す ることが困難である。 また、 近年、 複数の機能を持たせるため、 ハイブリッド力 ードと呼ばれる I cカードが市販されている。 これは、 従来のアンテナコイルを 利用することにより非接触型として、 磁気テープを利用することにより接触型のHowever, these conventional antenna coils having a circuit surface in a direction parallel to the plane of the substrate and being multilayered in the same direction are limited in the thickness direction, and it is difficult to secure a sufficient number of turns. In recent years, hybrid power has been developed to provide multiple functions. An IC card called a card is commercially available. This is a non-contact type using a conventional antenna coil, and a contact type using a magnetic tape.
I Cカードとして使用できるものである。 しかしながら、 利用者にとってより簡 便で、且つ接点を持たないために耐久性も高い非接触型の I C力一ドにおいては、 従来のアンテナコイルが構造上、 一方向の磁界によってのみ誘導電流を生ずるた め、 複数のマイコンなどを別系統で駆動することは困難である。 It can be used as an IC card. However, in non-contact type ICs, which are simpler for users and have high durability because they do not have contacts, conventional antenna coils generate an induced current only by a unidirectional magnetic field due to their structure. Therefore, it is difficult to drive multiple microcomputers, etc., with different systems.
—方、 C Dプレーヤ一、 V T Rなどの音響機器、 ドアロック、 パワーウィンド ゥなどの自動車の電装、 シェーバーなどの家電製品、 プリン夕、 コピー機などの O A機器、 玩具などにモー夕一類が幅広く用いられている。 近年、 携帯用の C D プレーヤ—など、 機器の小型化が進み、 モー夕一類も小型のものが求められてい る。 最近では、 直径 l mm程度のモータ一も市販されている。 A wide variety of devices are used for audio equipment such as CD players, VTRs, door locks, power electronics such as power windows, home appliances such as shavers, OA equipment such as pudding and copiers, and toys. Have been. In recent years, miniaturization of devices such as portable CD players has been progressing, and small-sized devices have been required. Recently, motors having a diameter of about l mm have been marketed.
モー夕一類は基本的に以下の 3点より構成されている。 すなわち、 鉄などの芯 に、 エナメル線などを巻き付けたコイル部、 永久磁石、 ブラシである。 エナメル 線などを芯に巻き付けた構造のコイル部については、 非常に細い導線の製造、 卷 き付け機の開発など、 種々の改良が行われてきている。 The first class is basically composed of the following three points. In other words, a coil, a permanent magnet, and a brush in which an enamel wire is wound around a core such as iron. Various improvements have been made to the coil section, which has a structure in which an enameled wire is wound around the core, such as the production of a very thin conductor and the development of a winding machine.
しかしながら、 これら現在使用されているコイルは、 将来予想される更なる微 細化には対応できない。 すなわち、 直径が 1 0 0 zm以下となるような導線は均 一に製造することが非常に困難であるとともに、 機械的強度も小さいため、 高速 で精度良く芯に巻き付けることも困難である。 低速で巻き付け処理を行えば上記 問題点は解決できるが、 生産性が著しく悪化し、 高コストとなる。 また、 コイル の製造は前述のように芯に導線を巻き付けていくという方法によりなされる。 し たがって、一連の工程で複数個のコイルを作成することは本質的に不可能である。 更に、 従来のコイルは導線を巻き付けていくという製造工程の故に、 各コイル間 に微妙な性能の違いが生じ、 被駆動側でばらつきを吸収する装置を別途設ける必 要がある。 本発明は、 小型で且つ任意に充分な卷き数 (層数) を確保でき、 大きなインダ クタンスを得ることが出来る、 特にモーターコイルとしてあるいはアンテナコィ ルとして好適な多層コイルを提供することを課題としている。 However, these currently used coils cannot cope with further miniaturization expected in the future. In other words, it is extremely difficult to uniformly manufacture a conductor having a diameter of 100 zm or less, and it is also difficult to wind the wire around the core at high speed and with high accuracy because of its low mechanical strength. If the winding process is performed at a low speed, the above problem can be solved, but productivity will deteriorate significantly and the cost will increase. The coil is manufactured by winding a wire around the core as described above. Therefore, it is essentially impossible to create a plurality of coils in a series of steps. Furthermore, since the conventional coil has a manufacturing process in which a conductive wire is wound, a slight difference in performance occurs between the coils, and it is necessary to separately provide a device for absorbing variations on the driven side. SUMMARY OF THE INVENTION An object of the present invention is to provide a multilayer coil which is small and can arbitrarily secure a sufficient number of windings (number of layers) and can obtain a large inductance, and is particularly suitable as a motor coil or an antenna coil. I have.
発明の開示 Disclosure of the invention
本発明によれば、 上記課題は、 次の手段により達成できる。 According to the present invention, the above object can be achieved by the following means.
( 1 ) 基板平面と垂直方向に回路面を持つコイルを複数層螺旋状に形成した多層 コイル。 更には、 (1) A multilayer coil in which a coil having a circuit surface in the direction perpendicular to the plane of the board is formed in multiple layers in a spiral shape. Furthermore,
( 2 ) 基板平面と垂直方向に回路面を持つコイルを複数層螺旋状に形成し、 且つ 絶縁層を介して隣接する回路が、 同じ向きから見た場合互いに反対方向に巻かれ た螺旋状のパターンを有し、 互いに電気的に接続した多層コイル。 更には、 (2) A spiral coil in which coils having a circuit surface perpendicular to the plane of the substrate are formed in multiple layers, and adjacent circuits via the insulating layer are wound in opposite directions when viewed from the same direction. Multilayer coils with patterns and electrically connected to each other. Furthermore,
( 3 ) 基板平面と垂直方向に回路面を持つコイルを複数層螺旋状に形成し、 且つ 回路面の中心部を貫通する柱状の磁性体からなる芯構造を設けた多層コイル。 更 には、 (3) A multilayer coil in which a coil having a circuit surface in the direction perpendicular to the plane of the substrate is formed in a spiral shape in a plurality of layers, and a core structure made of a columnar magnetic material penetrating the center of the circuit surface is provided. Furthermore,
( 4 ) 基板平面と垂直方向に回路面を持つコイルを複数層螺旋状に形成し、 且つ 絶縁層を介して隣接する回路が、 同じ向きから見た場合互いに反対方向に巻かれ た螺旋状のパターンを有し、 互いに電気的に接続されており、 さらに各回路面の 中心部を貫通する柱状の磁性体からなる芯構造を有する多層コイル。 (4) A spiral coil in which a coil having a circuit surface in a direction perpendicular to the substrate plane is formed in a plurality of layers and adjacent circuits via an insulating layer are wound in opposite directions when viewed from the same direction. A multilayer coil having a pattern, being electrically connected to each other, and having a core structure made of a columnar magnetic material penetrating the center of each circuit surface.
( 5 ) 基板平面と垂直方向に回路面を持つコイルを複数層螺旋状に形成し、 且つ 絶縁層を介して隣接する回路が、 同じ向きから見た場合互いに反対方向に巻かれ た螺旋状のパターンを有し、 互いに電気的に接続されており、 さらに各回路面の 中心部及び/又はコイルを貫通する柱状の磁性体からなる芯構造を有する多層コ ィル。 (5) A spiral coil in which a coil having a circuit surface perpendicular to the plane of the substrate is formed in a plurality of layers and adjacent circuits via an insulating layer are wound in opposite directions when viewed from the same direction. A multilayer coil having a pattern, being electrically connected to each other, and further having a core structure made of a columnar magnetic material penetrating the center of each circuit surface and / or the coil.
また、 本発明によれば、 上記課題は次の手段によっても達成できる。 Further, according to the present invention, the above object can also be achieved by the following means.
( 6 ) 多層基板と一体的に形成され、 当該多層基板に平行な卷線部分及び当該多 層基板に垂直な巻線部分を含み、 当該多層基板内に支持されることを特徴とする 多層コイル。 (6) It is formed integrally with the multilayer substrate, includes a winding portion parallel to the multilayer substrate and a winding portion perpendicular to the multilayer substrate, and is supported in the multilayer substrate. Multi-layer coil.
( 7 ) 多層コイルの単位卷線は、 隣接する他の単位卷線と同じ方向から見た場合 に互いに反対方向に旋回する螺旋状のパターンをそれそれ有し、 及び互いに隣接 する単位卷線の組は、 当該螺旋状のパターンの先端同士又は末端同士において交 互に接続されることを更に特徴とする多層コイル。 (7) The unit windings of the multilayer coil each have a spiral pattern that turns in the opposite direction when viewed from the same direction as the other adjacent unit windings, and the unit windings of the adjacent unit windings The multilayer coil is further characterized in that the sets are connected alternately at the tips or ends of the spiral pattern.
( 8 ) 多層基板に平行な卷線部分が、 積層された導電層の一部として形成され、 当該多層基板に垂直な卷線部分が、 絶縁層を介して隣接する当該導電層間を接続 するバンプとして形成されることを更に特徴とする多層コイル。 (8) A winding portion parallel to the multilayer substrate is formed as a part of a stacked conductive layer, and a winding portion perpendicular to the multilayer substrate connects a conductive layer adjacent to the conductive layer via an insulating layer. The multilayer coil further formed as:
( 9 ) ビルドアップ工法により、 多層基板に平行な卷線部分が、 積層された導電 層の一部として形成され、 当該多層基板に垂直な巻線部分が、 絶縁層を通して隣 接する当該導電層間を接続するビア或いはスルーホールとして形成されることを 更に特徴とする多層コイル。 (9) By the build-up method, a winding portion parallel to the multilayer substrate is formed as a part of the stacked conductive layers, and a winding portion perpendicular to the multilayer substrate is formed between the adjacent conductive layers through the insulating layer. A multilayer coil further formed as a connecting via or through hole.
( 1 0 ) 多層コイルの内部を貫通する柱状の磁性体からなる芯構造を有すること を更に特徴とする多層コイル。 (10) A multilayer coil further having a core structure made of a columnar magnetic material penetrating the inside of the multilayer coil.
( 1 1 ) 多層コイルを複数有し、 当該複数の多層コイルは、 モーターの界磁コィ ルであり、 当該複数の多層コイルの中心軸は、 それぞれモ一夕一の回転軸に向か つて配向され、 及び、 当該複数の多層コイルは、 お互いに等間隔に配置されたこ とを特徴とするモー夕一の界磁コイル。 (11) Having a plurality of multilayer coils, the multilayer coils are field coils of a motor, and the central axes of the multilayer coils are respectively oriented toward the rotation axis of each motor. And the plurality of multilayer coils are arranged at equal intervals to each other.
( 1 2 ) 上記いずれかの多層コイルと、 多層基板と平行な面内に回路面を有する 平面コイルと、 当該多層コイルからの出力と当該平面コイルからの出力を合成す る出力合成手段と、 を有することを特徴とするアンテナ。 (12) Any one of the above-mentioned multilayer coils, a planar coil having a circuit surface in a plane parallel to the multilayer substrate, output combining means for combining an output from the multilayer coil and an output from the planar coil, An antenna, comprising:
このような平面基盤と垂直方向に回路面を持つ多層コイルは、 従来知られてい ない新規なものであり、 その優れた特長から、 モ一夕一用コイルとしても、 また 非接触型 ICカードゃブル一トゥース ·モジュール、 R Fタグなどに用いられるァ ンテナコイルとして好適である。 更に、 本発明によれば、 上記課題は次の手段からなる製造方法によっても達成 できる。 Such a multilayer coil having a flat board and a circuit surface in the vertical direction is a novel one that has not been known before, and because of its excellent features, it can be used as a coil for mobile phones or as a non-contact type IC card. It is suitable as an antenna coil used for a Bluetooth module, an RF tag and the like. Further, according to the present invention, the above object can also be achieved by a manufacturing method including the following means.
( 1 3 ) 多層基板を構成する 1つの絶縁層を形成するステップと、 当該多層基板 に平行な多層コイルの卷線部分の少なくとも一部を当該多層基板内の絶縁層上に 形成するステップと、 当該多層基板に平行な多層コイルの当該巻線部分の少なく とも一部同士を絶縁層間で電気的に接続する垂直接続部を形成し、 それによつて 当該多層基板に垂直な多層コイルの卷線部分の少なくとも一部を形成するステツ プと、 絶縁層を形成する当該ステップ、 当該多層基板に平行な多層コイルの卷線 部分の少なくとも一部を形成する当該ステップ、 及び当該多層基板に垂直な多層 コイルの卷線部分の少なくとも一部を形成する当該ステツプの少なくともいずれ かを、 当該多層基板に平行な多層コイルの巻線部分と当該多層基板に垂直な多層 コイルの卷線部分とで当該多層基板内に支持される所定の多層コイルが形成され るまで、それまでに形成された多層基板の部分に対して適宜反復するステップと、 を有することを特徴とする多層コイルの製造方法。 (13) a step of forming one insulating layer constituting the multilayer substrate; and forming at least a part of a winding portion of a multilayer coil parallel to the multilayer substrate on the insulating layer in the multilayer substrate. Forming a vertical connection portion for electrically connecting at least a part of the winding portion of the multilayer coil parallel to the multilayer substrate between the insulating layers, thereby forming a winding portion of the multilayer coil perpendicular to the multilayer substrate; A step of forming at least a part of: a step of forming an insulating layer; a step of forming at least a part of a winding portion of a multilayer coil parallel to the multilayer substrate; and a multilayer coil perpendicular to the multilayer substrate. At least one of the steps forming at least a part of the winding portion of the multilayer coil is defined as a winding portion of a multilayer coil parallel to the multilayer substrate and a winding of a multilayer coil perpendicular to the multilayer substrate. A step of appropriately repeating the portion of the multilayer substrate formed so far until a predetermined multilayer coil supported in the multilayer substrate is formed with the portion. Production method.
( 1 4 ) 所定の多層コイルの単位卷線は、 隣接する他の単位卷線と同じ方向から 見た場合に互いに反対方向に旋回する螺旋状のパターンをそれぞれ有し、 及び、 互いに隣接する単位卷線の組は、 当該螺旋状のパターンの先端同士又は末端同士 において交互に接続されていることを更に特徴とする多層コイルの製造方法。 (14) The unit winding of the predetermined multilayer coil has a helical pattern that turns in the opposite direction when viewed from the same direction as other adjacent unit windings, and A method of manufacturing a multilayer coil, further comprising the sets of windings being alternately connected at the tips or ends of the spiral pattern.
( 1 5 ) 垂直接続部は絶縁層を介して隣接する導電層間を接続するバンプである ことを更に特徴とする多層コイルの製造方法。 (15) The method for manufacturing a multilayer coil, further comprising the vertical connection portion being a bump connecting an adjacent conductive layer via an insulating layer.
( 1 6 ) 当該ステップの少なくともいずれかはビルドアップ工法によって実施さ れ、 及び、 垂直接続部は絶縁層を通して隣接する導電層間を接続するビア或いは スルーホールであることを特徴とする多層コイルの製造方法。 (16) At least one of the steps is carried out by a build-up method, and the vertical connection portion is a via or a through hole connecting an adjacent conductive layer through an insulating layer. Method.
( 1 7 ) 多層コイルの内部に磁性体からなる芯構造を形成するステップを更に有 することを更に特徴とする多層コイルの製造方法。 ( 1 8 ) 当該多層コイルは、 モー夕一の界磁コイルであり、 当該多層コイルの中 心軸は、 モーターの回転軸に向かって配向され、 及び、 当該多層コイルは、 お互 いに等間隔に配置された複数の多層コイルであることを更に特徴とするモーター の界磁コイルの製造方法。 (17) A method for manufacturing a multilayer coil, further comprising a step of forming a core structure made of a magnetic material inside the multilayer coil. (18) The multilayer coil is a motor-field coil, the central axis of the multilayer coil is oriented toward the rotation axis of the motor, and the multilayer coils are mutually equal. A method of manufacturing a field coil for a motor, further comprising a plurality of multilayer coils arranged at intervals.
( 1 9 ) 当該多層基板と平行な面内に回路面を有する平面コイルを形成するステ ップと、 当該多層基板の内部或いは表面に、 非接触型 I Cカードの回路に含まれ る第 1の回路を形成するステップと、 当該多層基板の内部或いは表面に、 非接触 型 I Cカードの回路に含まれる第 2の回路を形成するステップと、 当該多層コィ ルと当該第 1の回路を接続するステップと、 当該平面コイルと当該第 2の回路を 接続するステップと、 を更に有し、 当該第 1の回路は当該多層コイルからの出力 によって動作させられ、 及び当該第 2の回路は当該平面コイルからの出力によつ て動作させられることを更に特徴とする、非接触型 I Cカードの回路の製造方法。 (19) A step of forming a planar coil having a circuit surface in a plane parallel to the multilayer substrate; and forming a first coil included in a circuit of the non-contact type IC card inside or on the surface of the multilayer substrate. Forming a circuit, forming a second circuit included in the circuit of the non-contact type IC card inside or on the surface of the multilayer substrate, and connecting the multilayer coil and the first circuit And connecting the planar coil and the second circuit. The first circuit is operated by an output from the multilayer coil, and the second circuit is A method of manufacturing a circuit of a non-contact type IC card, further comprising being operated by an output of the IC card.
( 2 0 ) 当該多層基板と平行な面内に回路面を有する平面コイルを形成するステ ップと、 当該多層基板の内部或いは表面に、 当該多層コイルからの出力と当該平 面コィルからの出力とを合成する出力合成手段を形成するステツプと、 を更に有 するアンテナの製造方法。 (20) A step of forming a planar coil having a circuit surface in a plane parallel to the multilayer substrate, and an output from the multilayer coil and an output from the planar coil inside or on the surface of the multilayer substrate. Forming an output synthesizing means for synthesizing the antenna and a method for manufacturing an antenna.
図面の簡単な説明 BRIEF DESCRIPTION OF THE FIGURES
図 1は、 請求の範囲第 1項及び第 1 2項の多層コィルの一例を示す斜視概念図 である。 FIG. 1 is a schematic perspective view showing an example of the multilayer coil according to claims 1 and 12.
図 2は、 請求の範囲第 2項及び第 1 3項の多層コイルの一例を示す斜視概念図 である。 FIG. 2 is a conceptual perspective view showing an example of the multilayer coil according to claims 2 and 13.
図 3は、 請求の範囲第 3項及び第 1 6項の多層コイルの一例を示す斜視概念図 である。 FIG. 3 is a conceptual perspective view showing an example of the multilayer coil according to claims 3 and 16.
図 4は、 請求の範囲第 4項及び第 1 6項の多層コイルの一例を示す斜視概念図 である。 図 5は、 図 1の多層コイルの製造初期の基板斜視図である。 FIG. 4 is a conceptual perspective view showing an example of the multilayer coil according to claims 4 and 16. FIG. 5 is a perspective view of a substrate at an early stage of manufacturing the multilayer coil of FIG.
図 6は、 図 1の多層コイルの製造中間期の基板斜視図である。 FIG. 6 is a perspective view of a substrate in an intermediate stage of manufacturing the multilayer coil of FIG.
図 7は、 図 2の多層コィル製造初期の基板斜視図である。 FIG. 7 is a perspective view of the substrate at the initial stage of manufacturing the multilayer coil of FIG.
図 8 A及び Bは、 図 2の多層コィルのビルドァップ法による製造説明断面図で ある。 8A and 8B are cross-sectional views for explaining the production of the multilayer coil of FIG. 2 by the build-up method.
図 9は、 多層コィルの一括積層法による製造説明断面図である。 FIG. 9 is a sectional view for explaining the production of the multilayer coil by the batch lamination method.
図 1 0は、 絶縁層作成説明断面図である。 FIG. 10 is a cross-sectional view illustrating the formation of an insulating layer.
図 1 1 A、 B及び Cは、 ビア形成説明断面図である。 11A, 11B and 11C are cross-sectional views for explaining via formation.
図 1 2 A、 B、 C及び Dは、回路形成のためのビアの導電化説明断面図である。 図 1 3 A、 B及び Cは、 バンプによる接続説明断面図である。 FIGS. 12A, B, C, and D are cross-sectional views for explaining the conductivity of vias for forming a circuit. FIGS. 13A, 13B and 13C are cross-sectional views illustrating connection by bumps.
図 1 4は、 回路外層部分の製造初期断面図である。 FIG. 14 is an initial manufacturing cross-sectional view of a circuit outer layer portion.
図 1 5は、 回路外層部分の断面図である。 FIG. 15 is a cross-sectional view of the outer layer portion of the circuit.
図 1 6は、 プレス加工前の断面図である。 FIG. 16 is a cross-sectional view before press working.
図 1 7は、 磁性体芯構造を持つ多層コイルの製造初期基板の斜視図である。 図 1 8は、 多層コイルをモーター用に 2個配置した場合の平面図である。 FIG. 17 is a perspective view of an initial substrate for manufacturing a multilayer coil having a magnetic core structure. FIG. 18 is a plan view when two multilayer coils are arranged for a motor.
図 1 9は、 多層コイルをモ一夕一用に 3個配置した場合の平面図である。 FIG. 19 is a plan view in a case where three multilayer coils are arranged for each module.
図 2 0は、 多層コイルの電源部配線例を示す斜視図である。 FIG. 20 is a perspective view showing an example of power supply unit wiring of a multilayer coil.
図 2 1は、請求の範囲第 8項の非接触型 I Cカードの一例を示す平面図である。 図 2 2は、 請求の範囲第 4項及び第 1 6項の多層コイルの一例を示す斜視概念 図である。 FIG. 21 is a plan view showing an example of the non-contact type IC card according to claim 8. FIG. 22 is a conceptual perspective view showing an example of the multilayer coil according to claims 4 and 16.
図 2 3は、 請求の範囲第 5項の多層コイルの一例を示す斜視概念図である。 図 2 4は、 請求の範囲第 1 8項のアンテナの一例を示す斜視概念図である。 発明を実施するための最良の形態 FIG. 23 is a conceptual perspective view showing an example of the multilayer coil according to claim 5. FIG. 24 is a perspective conceptual view showing an example of the antenna according to claim 18. BEST MODE FOR CARRYING OUT THE INVENTION
以下、 本発明について図面を参照しながら詳細に説明する。 Hereinafter, the present invention will be described in detail with reference to the drawings.
基板平面と垂直方向に回路面を持つコイルが複数層螺旋状に形成された多層コ ィルは、 図 1および図 2に示される通り、 基板 1の平面と垂直方向に導電回路 2 が多層 (図面では 4層) 形成された構造を有する。 このように基板平面と垂直方 向に回路面を設けた構造を有することにより、 基板の厚さによる制限を受けるこ とがないので、 回路を任意に多層化でき、 総巻き数を任意に増やせ、 必要にして 十分なィンダク夕ンスが得られるものである。 同時にこのような構造のコイルは 小型化が容易である特長がある。 A multilayer coil in which a coil having a circuit surface perpendicular to the substrate plane is formed in a spiral shape As shown in FIGS. 1 and 2, the device has a structure in which conductive circuits 2 are formed in multiple layers (four layers in the drawing) in a direction perpendicular to the plane of the substrate 1. By having a structure in which the circuit surface is provided in the direction perpendicular to the substrate plane, there is no restriction imposed by the thickness of the substrate. It is necessary to obtain sufficient inductance. At the same time, coils with such a structure have the advantage of being easily miniaturized.
好適には、 コイルの多層基板に平行な卷線部分は、 積層される導電層の一部と して形成され、 多層基板に垂直な卷線部分は、 絶縁層を介して隣接する導電層間 を接続するバンプ、 ビア或いはスルーホールなどとして形成される。 このように してコイルを形成することにより、 ビルドアップ工法などの公知の多層基板 (プ リント基板) 製造技術を利用して、 多層基板の製造工程においてコイルを多層基 板内に複数個同時に形成することが可能となる。 Preferably, the winding portion of the coil parallel to the multilayer substrate is formed as a part of the conductive layer to be laminated, and the winding portion perpendicular to the multilayer substrate is formed between the adjacent conductive layers via the insulating layer. It is formed as a connecting bump, via or through hole. By forming the coil in this manner, a plurality of coils are simultaneously formed in the multilayer substrate in the process of manufacturing the multilayer substrate by utilizing a known multilayer substrate (print substrate) manufacturing technique such as a build-up method. It is possible to do.
また、 図 2に示すように、 基板 1の平面と垂直方向に回路面を持つようにコィ ル状の回路 3が形成され、 且つ絶縁層を介して隣接する各回路が、 同じ向きから 見た場合互いに反対方向に巻かれた螺旋状にパターン化され、 互いに電気的に接 続された多層回路は、 図 1のような多層を構成する各回路面における巻き数が少 ないものや、 該卷き数が同じであっても各層の回路の巻き方向が同じ多層コイル より、 強力なインダク夕ンスを与える。 In addition, as shown in FIG. 2, a coil-shaped circuit 3 is formed so as to have a circuit surface in a direction perpendicular to the plane of the substrate 1, and adjacent circuits via an insulating layer are viewed from the same direction. In such a case, a multilayer circuit which is spirally patterned in a direction opposite to each other and electrically connected to each other may be one having a small number of turns on each circuit surface constituting the multilayer as shown in FIG. Even if the number of coils is the same, a stronger inductance is given than a multilayer coil in which the winding direction of the circuit of each layer is the same.
コイル状の回路 3の単位巻線は、 隣接する他の単位卷線と同じ方向から見た場 合に反対方向に旋回する螺旋状のパターンをそれそれ有し、 及び互いに隣接する 単位巻線同士は、 当該螺旋状のパターンの先端同士又は末端同士において互いに 接続される点で、 図 1に示す多層コイルの構成と異なっている。 多層コイルをそ のように構成することによって、 単位卷線内の卷数を 1より大きくすることがで き、 かつ、 多層コイルに電流が流されるとすべての単位卷線が同じ方向の磁界を 発生するため、 インダク夕ンスを大きくすることができる。 更に、 図 3あるいは図 4に示すように、 コイルの中心部 (各回路面の中心部を 貫通する位置) に鉄、 ニッケルなどの単体あるいは合金あるいはその化合物など よりなる磁性体を主成分とした棒状の芯構造 4を持たせることにより、 より一層 強力なィンダク夕ンスが得られる多層コイルとなる。 The unit windings of the coil-shaped circuit 3 each have a spiral pattern that turns in the opposite direction when viewed from the same direction as the other adjacent unit windings, and the unit windings adjacent to each other Is different from the configuration of the multilayer coil shown in FIG. 1 in that it is connected to each other at the tips or ends of the spiral pattern. By configuring the multilayer coil in such a manner, the number of turns in a unit winding can be made larger than one, and when a current flows through the multilayer coil, all unit windings generate a magnetic field in the same direction. As a result, the inductance can be increased. Furthermore, as shown in Fig. 3 or 4, the core of the coil (the position penetrating through the center of each circuit surface) is composed mainly of a magnetic substance made of a simple substance such as iron or nickel, or an alloy or its compound. By providing the rod-shaped core structure 4, a multi-layer coil can be obtained in which a stronger inductance can be obtained.
本発明の多層コイルは、 公知の種々の方法を応用して製造することができる。 以下、 例を挙げて説明するが、 これらは、 例示であり、 この発明はこれらの例に なんら制限されるものではない。 The multilayer coil of the present invention can be manufactured by applying various known methods. Hereinafter, the present invention will be described by way of examples. However, these are examples, and the present invention is not limited to these examples.
まず、 前記手段 ( 1 ) 及び (6 ) の一例である図 1の多層コイルの製造例 (前 記手段 (1 3 ) の製造方法に対応する) を説明する。 図 5に示すように、 公知慣 用の基板、 例えば銅張りガラスエポキシ積層板 5の両面に、 導体パターンを形成 する。 図 5中、 6は基板上面のパターン、 7は下面のパターンである。 このパ夕 —ンの製造には例えばサブトラクティブ法が適用できる。 基板として表面が導電 化されていないものを用いた場合には、 フルアディティブ法、 セミアディティブ 法、 導電性ペーストの印刷によっても形成できる。 続いて、 図 6に示すように所 定の位置 8にドリル、 レーザーなどを用いてスルーホールやビアホールなどの穴 開け加工を行った上で、 弓 Iき続きメツキあるいは導電性ペーストにより電気的に 接続する。 このようにして基板平面と垂直方向に回路面を持つコイルを複数層 ( 図面の場合は 4層) 螺旋状に形成できる。 First, an example of the production of the multilayer coil shown in FIG. 1 (corresponding to the production method of the means (13)), which is an example of the means (1) and (6), will be described. As shown in FIG. 5, a conductor pattern is formed on both sides of a well-known substrate, for example, a copper-clad glass epoxy laminate 5. In FIG. 5, 6 is a pattern on the upper surface of the substrate, and 7 is a pattern on the lower surface. For example, a subtractive method can be applied to the production of this pattern. When a substrate whose surface is not conductive is used, it can be formed by a full additive method, a semi-additive method, or printing of a conductive paste. Then, as shown in Fig. 6, drill holes, via holes, etc. were drilled at predetermined positions 8 using a drill, laser, etc., and then the bow I was used. Connecting. In this way, a plurality of coils (four layers in the drawing) having a circuit surface perpendicular to the substrate plane can be formed in a spiral shape.
アンテナコイルとして使用するため、 ィンダク夕ンスを強力にするためにコィ ルの開口部を大きくしたい場合は、 基板 5として厚みの大きいものを用いれば解 決できる。 あるいは、 最外層にあたるパターンを各々片面板で形成しておき、 絶 縁性のシートあるいはプリプレグを間に挟んで積層した後に穴開け、 電気的接続 加工を行うことによつても製造できる。 In order to use the coil as an antenna coil and to increase the opening of the coil in order to increase the inductance, it is possible to solve the problem by using a thick substrate 5. Alternatively, it can also be manufactured by forming a pattern corresponding to the outermost layer on each single-sided plate, laminating with insulating sheets or prepregs interposed therebetween, and then making holes and performing electrical connection processing.
前記手段 (2 ) 及び (7 ) の一例である図 2の多層コイルは、 基板を多層構造 にすることにより製造できる (前記手段 (1 4 ) の製造方法に対応する) 。 公知 慣用の方法が応用できるが、 構造上ブラインドビアを有するため、 それに適した 工程が必要である。 The multilayer coil of FIG. 2 which is an example of the means (2) and (7) can be manufactured by forming the substrate into a multilayer structure (corresponding to the manufacturing method of the means (14)). Public knowledge Conventional methods can be applied, but because of the structurally blind vias, appropriate processes are required.
まず、 図 7に示すような内層パターン 9を作成する。 両面銅張り積層板を穴開 け、 メツキによるスルーホールの導電化、 サブトラクティブ法による表面のパ夕 —ンニングなど、 公知の方法で作成できる。 この内層 9に対し、 両面に絶縁層、 更に導電層を作成し、 パターニングおよび電気的接続を行なえばよい。 いくつか の方法にっき具体的に例を挙げて説明する。 First, an inner layer pattern 9 as shown in FIG. 7 is created. A double-sided copper-clad laminate can be formed by a known method, such as drilling a hole, conducting through holes by plating, or patterning the surface by a subtractive method. An insulating layer and a conductive layer may be formed on both sides of the inner layer 9 to perform patterning and electrical connection. Several methods will be described with specific examples.
いわゆるビルドアップ法による場合につき説明する。 図 8 A及び Bに示すよう に、 上記内層 9からなる基板に絶縁層を形成する。 絶縁層としてはガラスェポキ シ系あるいはァラミ ド樹脂系などのプリプレダ、 液状あるいはフィルム状の熱可 塑あるいは熱硬化性の樹脂組成物あるいは一般的に樹脂付き銅箔と呼ばれる、 銅 箔と絶縁樹脂層を一体ィ匕したものなどが使用できる。 The case of the so-called build-up method will be described. As shown in FIGS. 8A and 8B, an insulating layer is formed on the substrate including the inner layer 9. As the insulating layer, a glass epoxy-based or aramid resin-based pre-reader, a liquid or film-like thermoplastic or thermosetting resin composition, or a copper foil and an insulating resin layer, which is generally called a resin-coated copper foil, is used. One that has been integrated can be used.
絶縁層の形成は例えば以下のように行われる。 図 8 Aに示すように、 上記基板 9両面にプリプレグ類 1 0、 パターン化されていない銅箔 1 1、 あるいは図 8 B に示すように樹脂付き銅箔 1 2を配置し、 図 9に示すように積層プレス法により これらを一括で積層、 硬化させ、 絶縁層と導電層を一体ィヒしたものを作成する。 (あるいは、 図 1 0に示すように、 上記基板 9上に液状の組成物をスクリーン印 刷、 力一テンコート、 スプレーコートなどの公知慣用の方法で塗布し、 UV、 電 子線、熱などで硬化させる。あるいは上記基板上にフィルム状の組成物をロール、 ラミネートなどの方法で貼り付け、所定の方法にて硬化させ、絶縁層 1 3を得る。 続いてビアを形成する。 上記の方法で得られた基板の所定の位置にドリル、 レ 一ザ一などを用いてビア 1 4を形成する。 図 1 1 Aは絶緣層および導電層として プリプレダ 1 0と銅箔 1 1を用いた場合、 同様に図 1 1 Bは樹脂付き銅箔 1 2、 図 1 1 Cは液状あるいはフィルム状の熱可塑あるいは熱硬化性の樹脂組成物を用 いた場合について記したものである。 プリプレグ類あるいは樹脂付き銅箔を用い て絶縁層と共に導電層も形成した場合に、 ブラインドビアの形成に広く用いられ ている炭酸ガスレ一ザ一を用いる場合には、 必要に応じてあらかじめ所定の位置 の導電体をエッチングで除く、 いわゆるマスク加工を施してもよい。 The formation of the insulating layer is performed, for example, as follows. As shown in FIG. 8A, prepregs 10, unpatterned copper foil 11, or resin-coated copper foil 12 as shown in FIG. As described above, these are collectively laminated and cured by a lamination press method, and an insulating layer and a conductive layer are integrally formed. (Alternatively, as shown in FIG. 10, the liquid composition is applied onto the substrate 9 by a known and common method such as screen printing, force coating, spray coating, or the like, and then exposed to UV, electron beam, heat, or the like. Alternatively, the composition in the form of a film is pasted on the substrate by a method such as roll or lamination, and cured by a predetermined method to obtain an insulating layer 13. Subsequently, a via is formed. A via 14 is formed at a predetermined position on the obtained substrate by using a drill, a laser, etc. Fig. 11A shows a case where a pre-predator 10 and a copper foil 11 are used as insulating layers and conductive layers. Similarly, Fig. 11B shows the case of using a resin-coated copper foil 12 and Fig. 11C shows the case of using a liquid or film-like thermoplastic or thermosetting resin composition. Using copper foil When a carbon dioxide gas laser widely used for forming blind vias is used when a conductive layer is also formed together with an insulating layer by etching, if necessary, a conductor at a predetermined position is removed by etching if necessary. Mask processing may be performed.
プリプレダ類あるいは樹脂付き銅箔を用いて絶縁層と共に導電層も形成した場 合は、 例えば図 1 2 Aに示すようにビアに銀、 銅などの導電性粉末を配合した導 電性ペースト 1 5を印刷、 デイスペンスなどの方法で埋め込み、 所定の方法で硬 化させる。 あるいは、 図 1 2 Bに示すように通常のスルーホ一ルメツキすなわち ビア内にメツキ触媒を付与したのちに無電解メツキを行い、 続いて電解メツキを 行う方法によってメツキ層 1 6を形成する方法によっても電気的接続は達成され る。 液状もしくはフィルム状の組成物を用いて絶縁層を形成した場合は、 図 1 2 Cに示すように、 例えば銅箔 1 7をプレスし、 絶縁層の外側に導電層を形成し、 所定の位置をマスク加工した後、 ブラインドビアを導電性ペースト 1 5あるいは メツキ層 1 6により導電化し接続する。 この場合、 先にブラインドビアの導電ィ匕 を行っても良い。 また、 図 1 2 Dに示すように、 絶縁層、 ブラインドビアが形成 された基板に触媒を付与し、 無電解メツキ処理し、 続いて必要に応じて電解メッ キ処理することによって導電層 1 7の形成とブラインドビアの (メツキ層 1 6に よる) 導電化を一括で行うこともできる。 この場合、 ビラインドビアの導電化は 導電性ペースト 1 5によっても行うことができる。 When a conductive layer is formed together with an insulating layer using a pre-predeer or a resin-coated copper foil, for example, as shown in Fig. 12A, a conductive paste in which conductive powder such as silver or copper is blended into vias is used. Is embedded by printing, dispensing, etc., and hardened by a predetermined method. Alternatively, as shown in FIG. 12B, a normal through-hole plating, that is, a method in which a plating catalyst is applied in a via, an electroless plating is performed, and then, a plating layer 16 is formed by performing an electrolytic plating. Electrical connection is achieved. When the insulating layer is formed using a liquid or film-like composition, as shown in FIG. 12C, for example, a copper foil 17 is pressed, and a conductive layer is formed outside the insulating layer. After the mask processing, the blind via is made conductive by the conductive paste 15 or the plating layer 16 and connected. In this case, the conductive via of the blind via may be performed first. Further, as shown in FIG. 12D, a catalyst is applied to the substrate on which the insulating layer and the blind via are formed, the electroless plating is performed, and if necessary, the electroconductive plating is performed. The formation of the vias and the conduction of the blind vias (by the plating layer 16) can also be performed at once. In this case, the conduction of the via via can also be performed by the conductive paste 15.
あるいは以下の方法により、 絶縁層と導電層、 電気的接続を一括で行うことも できる。 すなわち、 図 1 3 Aから Cに示すように、 内層回路 9上所定の場所に導 電性ペーストなどを用いて先端のとがった導電性バンプ 1 8を形成した後、 (図 1 3 A) プリプレグ 1 0と銅箔 1 1、 あるいは (図 1 3 B ) フィルム状の絶縁体 1 3と銅箔 1 1、 または (図 1 3 C) 樹脂付き銅箔 1 2を配置した後にプレス加 ェを行うことによりとがった導電性バンプ 1 8が絶縁層を貫通し、 導電層との接 続を実現する。 なお、 メツキにより接続されたスルーホール基板を用い、 上記の液状あるいは フィルム状の絶縁材料を使用する場合、 あるいは一旦ビルドァップ法により形成 したブラインドピアのある絶縁層上に更に積層する場合には、 穴埋め用のインキ あるいはメツキ処理によりスルーホールあるいはブラインドビアを埋め、 表面を 平滑ィ匕してもよい。 Alternatively, the insulating layer, the conductive layer, and the electrical connection can be collectively performed by the following method. That is, as shown in FIGS. 13A to 13C, a sharp bump 18 is formed at a predetermined location on the inner layer circuit 9 by using a conductive paste or the like, and then (FIG. 13A) prepreg Pressing after placing 10 and copper foil 11 or (Fig. 13B) Film-shaped insulator 13 and copper foil 11 or (Fig. 13C) Resin-coated copper foil 12 As a result, the pointed conductive bumps 18 penetrate the insulating layer and realize connection with the conductive layer. When using the above liquid or film-shaped insulating material using a through-hole substrate connected by plating, or when further laminating on an insulating layer with a blind pier formed once by the build-up method, fill the hole. The surface may be smoothed by filling the through-holes or blind vias with an ink or paint treatment.
あるいは、 以下の方法により一括に積層させることもできる。 絶縁層としてガ ラスエポキシ系のプリプレグを用いた 4層構造のアンテナコイルの場合につき説 明する。 すなわち、 図 1 4に示すように、 銅張片面ガラスエポキシ基板の基材 1 9側の所定の位置をレーザ一などを用いて穴開け加工する。 続いて、 銅箔 1 1を 電極として電気メツキを行い、 生じた穴をメツキ 2 0で充填する。 その上に、 低 融点の金属バンプ 2 1を引き続きメツキ法により作成する。 Alternatively, they can be collectively laminated by the following method. The case of a four-layer antenna coil using glass epoxy prepreg as the insulating layer is described. That is, as shown in FIG. 14, a predetermined position on the base material 19 side of the copper-clad single-sided glass epoxy substrate is punched using a laser or the like. Subsequently, electric plating is performed using the copper foil 11 as an electrode, and the resulting hole is filled with the plating 20. Then, a low melting point metal bump 21 is successively formed by a plating method.
銅箔 1 1は図 1 5に示すように所定のパターンにエッチング加工する。 バンプ 側には絶縁層に用いるものと同様の組成物 2 2を薄く塗布し、半硬化させておく。 この片面基板から製造された図 1 5のものは最外層すなわち第 1層および第 4層 となる。 The copper foil 11 is etched into a predetermined pattern as shown in FIG. The same composition 22 as that used for the insulating layer is thinly applied to the bump side and semi-cured. The one shown in FIG. 15 manufactured from this single-sided substrate is the outermost layer, that is, the first and fourth layers.
続いて、 図 1 6に示すように、 内層 9と図 1 5の最外層を位置あわせし、 プレ ス加工することにより半硬化させた組成物はバンプ部から除かれ、 層間の絶縁層 を形成すると同時にバンプ部は内層の導電体と電気的に接続され、 4層構造を有 するアンテナコイルが製造される。 この方法を応用することにより、 更なる多層 化も容易に行うことができる。 Then, as shown in Fig. 16, the inner layer 9 is aligned with the outermost layer in Fig. 15, and the semi-cured composition is removed from the bumps by pressing to form an interlayer insulating layer. At the same time, the bumps are electrically connected to the conductor in the inner layer, and an antenna coil having a four-layer structure is manufactured. By applying this method, further multilayering can be easily performed.
螺旋状のパターンをより密にしたい場合は、 更なる多層化が必要となる。 上記 のいずれの方法を用いても、 更なる多層化が可能である。 In order to make the spiral pattern denser, further multilayering is required. Further multilayering is possible using any of the above methods.
上記いずれの場合においても、 絶縁層としては公知慣用の絶縁材料が使用でき る。 例えば、 エポキシ樹脂、 ビスマレイミドートリアジン樹脂、 ポリフエ二レン エーテル樹脂、 ポリエーテルエ一テルケトン樹脂、 ポリイミ ド樹脂、 これらに他 の成分、 例えば硬化剤、 無機フィラーを混合した液状あるいはフィルム状の熱可 塑あるいは熱硬化性の配合物、 ガラスクロスなどと複合ィ匕されたプリブレグなど が挙げられる。 これら有機系の材料だけでなく、 無機系材料、 いわゆるセラミック材料も絶縁 層として使用できる。 絶縁層にセラミック材料を用いる場合には、 一般的にグリ —ンシートと呼ばれるシ一ト状組成物を積層し、 焼成することによりコイルを形 成することができる。 In any of the above cases, a known and commonly used insulating material can be used for the insulating layer. For example, epoxy resin, bismaleimide-triazine resin, polyphenylene ether resin, polyetheretherketone resin, polyimide resin, and others Examples thereof include a liquid or film-like thermoplastic or thermosetting compound obtained by mixing a curing agent and an inorganic filler, and a prepreg mixed with a glass cloth or the like. Not only these organic materials but also inorganic materials, so-called ceramic materials, can be used as the insulating layer. When using a ceramic material for the insulating layer, a coil can be formed by stacking and firing a sheet-like composition generally called a green sheet.
絶縁層の厚みは用途に応じて任意に設定できるが、 絶縁信頼性の観点から実用 上は 1 0ミクロンから 3 0 0ミクロン程度が望ましい。 導体の厚さも絶縁層と同 様用途に応じて任意に設定できるが、 実用上 5ミクロンないしは 2 0 0ミクロン 程度が望ましい。 The thickness of the insulating layer can be arbitrarily set according to the application, but from the viewpoint of insulation reliability, it is preferably about 10 to 300 microns in practical use. The thickness of the conductor can be arbitrarily set in accordance with the application as in the case of the insulating layer, but is preferably about 5 microns or 200 microns in practice.
各層の配線パターンは、 サブトラクティブ法、 フルアディティブ法、 セミアデ ィティブ法、 転写法など、 公知慣用の方法で形成することができる。 各層間を電 気的に接続する材料は各種金属を配合した導電性ペースト、 無電解あるいは電解 のメッキ被膜など公知慣用のものが使用できる。 The wiring pattern of each layer can be formed by a known method such as a subtractive method, a full additive method, a semi-additive method, and a transfer method. As a material for electrically connecting the layers, a known material such as a conductive paste containing various metals, an electroless or electrolytic plating film can be used.
本発明のコイルは、 コイル中心部に磁性体を主成分とした芯構造を有すること により更に強力なインダク夕ンスを得る構造とすることができる。 すなわち、 図 3および図 4に示すような構造となる。 The coil of the present invention can have a structure in which a stronger inductance is obtained by having a core structure mainly composed of a magnetic material at the center of the coil. That is, the structure is as shown in FIGS.
これらの構造は、例えば以下のような方法で構築できる。図 1 7に示すように、 ベースとなる基材中に磁性体を主成分とした芯構造 4を作成する。 芯構造 4は、 基材製造時に棒状の磁性体をプリプレダに挟み込んだ状態でプレス加工する。 あ るいは、 基材上に磁性体の粉末をポリマー中に混練、 分散させてなる磁性ペース トを用いて芯構造 4を作成した後、 穴開け加工などを施し、 続いてこれに前述の 種々の方法により絶縁層、 導電層の形成および層間の接続を行う。 磁性体として は鉄、 ニッケルなどの単体あるいは合金あるいはその化合物からなる、 一般的に 使われているものが使用できる。 These structures can be constructed, for example, by the following method. As shown in FIG. 17, a core structure 4 mainly composed of a magnetic material is formed in a base material serving as a base. The core structure 4 is subjected to press working in a state where a rod-shaped magnetic body is sandwiched between the pre-preda when manufacturing the base material. Alternatively, a core structure 4 is formed using a magnetic paste obtained by kneading and dispersing a magnetic substance powder in a polymer on a base material, and then performing a drilling process and the like. The formation of the insulating layer and the conductive layer and the connection between the layers are performed by the method described above. The magnetic material is generally composed of a simple substance such as iron or nickel or an alloy or a compound thereof. What is used can be used.
磁性体を主成分とする芯構造の長さは、 コイルの長さを超えない範囲であれば 任意である。 また、 その厚さ、 幅も、 その周囲に形成されるコイルとの絶縁性が 保たれる範囲であれば任意に設定できる。 The length of the core structure mainly composed of a magnetic material is arbitrary as long as it does not exceed the length of the coil. Also, the thickness and width thereof can be set arbitrarily as long as the insulation with the coil formed therearound is maintained.
本発明のコイルをモ一夕一用に用いる場合は、 上記記載のいずれかの方法を用 いて、 図 1 8あるいは図 1 9に示すように、 同一平面内に 2方向、 あるいは 3方 向に上記コイル 2 3 (図 1乃至 4のコイル) を作成し (界磁コイル) 、 必要な形 に基板を成形した後にモーターの軸部、 ブラシを取り付け一体ィ匕することにより モーターが作成できる。 むろん、 4方向以上多数のコイルを作成しても差し支え ない。 When the coil of the present invention is used for all modes, one of the methods described above can be used to make two or three directions in the same plane as shown in FIG. 18 or FIG. The motor can be formed by preparing the coil 23 (coils in FIGS. 1 to 4) (field coil), forming the substrate into a required shape, attaching a shaft of the motor and a brush, and integrally shaping. Of course, it is possible to create many coils in four or more directions.
軸部はコイルが作成された基板の所定の位置をドリルなどで穴開け後、 モータ —用に適した軸を取り付けることにより一体化できる。 また、 半導体パッケージ の一形態である P GA (ピングリッドアレイ) に使用されるようなビンを基板上 に接着することでも一体化は可能である。 ブラシ部は、 一般のモ一夕一用のもの を流用することもできるが、 モーター用の基板を更に多層化して、 ブラシ部も一 括で形成することもできる。 The shaft can be integrated by drilling a predetermined position on the substrate on which the coil is formed, using a drill, etc., and then attaching a shaft suitable for the motor. The integration can also be achieved by bonding a bin, which is used for a PGA (pin grid array), which is a form of semiconductor package, on a substrate. The brush part can be a general one for a single motor. However, the motor part can be further multi-layered to form the brush part as a whole.
従来のモー夕一用コイルと同様、各コイルは電源と接続されなければならない。 上述の種々の方法でコイルを作成し、 電源のイン (I N) 側とアウト (O U T ) 側を近傍に配線したい場合には、 例えば図 2 0に示すように、 望ましい方向に配 線すればよい。 Each coil must be connected to a power supply, similar to conventional motor coils. If you want to create a coil by the various methods described above and wire the power supply IN (IN) side and OUT (OUT) side close to each other, for example, as shown in FIG. .
本発明のコイルは、 従来の基板平面と平行な方向に形成されたコイルと組み合 わせることにより、 複数の機能を独立で駆動できる非接触型 I Cカードを提供で きる。 すなわち、 図 2 1に示すように、 カード上に I C 1 ( 3 0 ) 、 従来型のァ ンテナコイル 3 1、 I C 2 ( 3 2 ) 、 本発明のアンテナコイル 2 3を搭載し、 3 By combining the coil of the present invention with a conventional coil formed in a direction parallel to the plane of the substrate, it is possible to provide a non-contact type IC card capable of independently driving a plurality of functions. That is, as shown in FIG. 21, IC 1 (30), a conventional antenna coil 31 and IC 2 (32), and an antenna coil 23 of the present invention are mounted on a card.
0と 3 1 , 3 2と 2 3を接続する。 従来型のアンテナすなわち基板平面と平行な 方向に形成されたコイルは、 基板平面と直交する方向の磁界により電磁誘導され るが、 基板平面と同じ方向の磁界には反応しない。 一方、 本発明のアンテナコィ ルは基板平面と同じ方向の磁界にしか反応しない。 したがって、 非接触型で、 二 つの機能を独立で駆動させることができる高性能な I Cカードを提供できる。 また、 基板に垂直な面内に回路面 (単位卷線) を有する上記の多層コイルから なるアンテナコイル 2 3と、 基板と平行な面内に回路面を有する平面コイルから なる従来型のアンテナコイル 3 1とを同じ基板上に形成し、 それらに多層コイル からの出力と平面コイルからの出力を適宜合成する出力合成手段 3 3を組合わせ ることにより、 基板内に形成される小型な偏波ダイバーシティの性能を有するァ ンテナを構成することができる。 出力合成手段 3 3は、 公知の、 最大比合成受信 法、 選択合成受信法、 等利得合成受信法などによって、 出力を合成したり、 切り 換えたりする。 このアンテナによって、 電波の偏波面の変動によるアンテナ出力 の変動を低減させることができる。 Connect 0 and 31, 32 and 23. Conventional antenna, parallel to the plane of the board The coil formed in the direction is electromagnetically induced by a magnetic field in a direction perpendicular to the substrate plane, but does not react to a magnetic field in the same direction as the substrate plane. On the other hand, the antenna coil of the present invention reacts only to the magnetic field in the same direction as the plane of the substrate. Therefore, it is possible to provide a non-contact type, high-performance IC card capable of independently driving two functions. Also, a conventional antenna coil composed of the above-described multilayer coil having a circuit surface (unit winding) in a plane perpendicular to the substrate and a planar coil having a circuit surface in a plane parallel to the substrate. 3 is formed on the same substrate, and the combination of the output from the multilayer coil and the output from the planar coil is combined with the output combining means 33 to form a small polarized wave formed in the substrate. An antenna having diversity performance can be configured. The output combining means 33 combines or switches the outputs by a known maximum ratio combining receiving method, a selective combining receiving method, an equal gain combining receiving method, or the like. With this antenna, fluctuations in antenna output due to fluctuations in the polarization plane of radio waves can be reduced.
なお本発明の多層コイルは、 図 2 2に示すように同一平面にコイルを複数有す る回路を多層化した構造とすることもできる。 更に、 図 2 3に示すように、 各回 路面の中心部を貫通する位置に磁性体を主成分とした棒状の芯構造 4を持たせる ことにより、 より一層強力なインダクタンスが得られる多層コイルとなる。また、 複数あるコイルの全て又は一部のコイル中心部に芯構造 4を持たせることもでき る。 更に各回路面の中心部に加え複数あるコィルの全て又は一部のコィル中心部 に芯構造 4を持たせ、 更に強力なィンダク夕ンスが得られる多層コイルとするこ ともできる。 Note that the multilayer coil of the present invention may have a multilayered structure of a circuit having a plurality of coils on the same plane as shown in FIG. Furthermore, as shown in Fig. 23, by providing a rod-shaped core structure 4 mainly composed of a magnetic material at a position penetrating through the center of each circuit surface, a multilayer coil with a stronger inductance can be obtained. . Further, the core structure 4 can be provided in all or some of the plurality of coils at the center. Furthermore, a core structure 4 may be provided at all or a part of the plurality of coils in addition to the center of each circuit surface to form a multilayer coil capable of obtaining a stronger inductance.
以上に説明した本発明の多層コィルは、 従来のものに比べて自由にコィルの卷 き数を設定でき、 強力なインダク夕ンスを有する。 The above-described multilayer coil according to the present invention can set the number of turns of the coil more freely than the conventional one and has a strong inductance.
また、 コイル途中で電力を引き出すことができ小型化も達成できるため、 設計 の自由度が飛躍的に向上する。 一方、 微細導線パターンを有し、 小型であることに加え、 一括で多数製造する ことにより安価に製造することが可能である。 すなわち、 本発明のコイルは、 一 般のプリント基板製造プロセスが適用できるため、 エナメル線に比べて圧倒的に 微細な導線を作成できる。 また、 一括で多数のコイルを作成できるため、 安価で あるばかりでなく、 本質的にばらつきが生じないので、 被駆動部に従来組み込ま れてきた、 性能のばらつきを吸収する装置も不要となる。 In addition, since power can be extracted in the middle of the coil and downsizing can be achieved, the degree of freedom in design is dramatically improved. On the other hand, in addition to having a fine conductor pattern and being compact, it can be manufactured at low cost by manufacturing a large number of packages at once. That is, since the coil of the present invention can be applied to a general printed circuit board manufacturing process, it is possible to produce an overwhelmingly fine conductor as compared with an enameled wire. In addition, since a large number of coils can be produced at once, the coil is not only inexpensive, but also has essentially no variation. Therefore, a device for absorbing performance variations conventionally incorporated in a driven part is not required.
このコイルは、 例えば非接触型 I Cカード、 ブル一トゥ一ス (B 1 u e t 0 o t h) 'モジュール、 R Fタグなどのアンテナコイルとして好適に使用できるだ けでなく、 モータ一用コイルとして優れている。 更に、従来型のコイルと組み合 わせることにより、 非接触型で、 二つの機能を独立で駆動させることができる高 性能な I Cカードを提供できる。 This coil is not only suitable for use as an antenna coil for non-contact type IC cards, B 1 uet 0 'modules, RF tags, etc., but is also excellent as a coil for motors . Furthermore, by combining with a conventional coil, it is possible to provide a non-contact type high-performance IC card capable of independently driving two functions.
Claims
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002586364A JPWO2002089157A1 (en) | 2001-04-27 | 2002-04-26 | Multilayer coil and method of manufacturing the same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001132882 | 2001-04-27 | ||
| JP2001-132882 | 2001-04-27 |
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| WO2002089157A1 true WO2002089157A1 (en) | 2002-11-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| PCT/JP2002/004239 Ceased WO2002089157A1 (en) | 2001-04-27 | 2002-04-26 | Multilayer coil and its manufacturing method |
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| WO (1) | WO2002089157A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2006120997A1 (en) * | 2005-05-11 | 2006-11-16 | Namiki Seimitsu Houseki Kabushikikaisha | Cylindrical coil and cylindrical micro-motor using the same |
| WO2007007639A1 (en) * | 2005-07-07 | 2007-01-18 | Toda Kogyo Corporation | Magnetic antenna |
| US7170384B2 (en) | 2004-12-30 | 2007-01-30 | Samsung Electro-Mechanics Co., Ltd. | Printed circuit board having three-dimensional spiral inductor and method of fabricating same |
| US7443362B2 (en) * | 2005-07-19 | 2008-10-28 | 3M Innovative Properties Company | Solenoid antenna |
| WO2008133018A1 (en) * | 2007-04-13 | 2008-11-06 | Murata Manufacturing Co., Ltd. | Magnetic field coupling type antenna, magnetic field coupling type antenna module, magnetic field coupling type antenna device, and their manufacturing methods |
| JP2009123058A (en) * | 2007-11-16 | 2009-06-04 | Dainippon Printing Co Ltd | Non-contact type IC tag and method of manufacturing non-contact type IC tag |
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59159648A (en) * | 1983-02-28 | 1984-09-10 | Hitachi Ltd | How to manufacture armature coils |
| JPH04237106A (en) * | 1991-01-21 | 1992-08-25 | Nippon Telegr & Teleph Corp <Ntt> | Integrated inductance element and integrated transformer |
| JPH0945866A (en) * | 1995-08-02 | 1997-02-14 | Hitachi Ltd | Microwave integrated circuit |
| JPH10189339A (en) * | 1996-11-19 | 1998-07-21 | Samsung Electron Co Ltd | Semiconductor device and manufacturing method thereof |
| JPH1155165A (en) * | 1997-08-06 | 1999-02-26 | Nippon Soken Inc | Transmitter/receiver for rf tag |
| JPH11204341A (en) * | 1998-01-13 | 1999-07-30 | Mitsubishi Materials Corp | Solid electronic components |
| JPH11345713A (en) * | 1998-06-02 | 1999-12-14 | Nissha Printing Co Ltd | Multilayer printed board and its manufacture |
| JP2000040620A (en) * | 1998-07-24 | 2000-02-08 | Toshiba Corp | Inductor and circuit device using the inductor |
| EP1079463A2 (en) * | 1999-08-24 | 2001-02-28 | Rangestar International Corporation | Asymetric dipole antenna assembly |
| JP2001101370A (en) * | 1999-10-04 | 2001-04-13 | Dainippon Printing Co Ltd | Information processing media |
-
2002
- 2002-04-26 JP JP2002586364A patent/JPWO2002089157A1/en active Pending
- 2002-04-26 WO PCT/JP2002/004239 patent/WO2002089157A1/en not_active Ceased
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59159648A (en) * | 1983-02-28 | 1984-09-10 | Hitachi Ltd | How to manufacture armature coils |
| JPH04237106A (en) * | 1991-01-21 | 1992-08-25 | Nippon Telegr & Teleph Corp <Ntt> | Integrated inductance element and integrated transformer |
| JPH0945866A (en) * | 1995-08-02 | 1997-02-14 | Hitachi Ltd | Microwave integrated circuit |
| JPH10189339A (en) * | 1996-11-19 | 1998-07-21 | Samsung Electron Co Ltd | Semiconductor device and manufacturing method thereof |
| JPH1155165A (en) * | 1997-08-06 | 1999-02-26 | Nippon Soken Inc | Transmitter/receiver for rf tag |
| JPH11204341A (en) * | 1998-01-13 | 1999-07-30 | Mitsubishi Materials Corp | Solid electronic components |
| JPH11345713A (en) * | 1998-06-02 | 1999-12-14 | Nissha Printing Co Ltd | Multilayer printed board and its manufacture |
| JP2000040620A (en) * | 1998-07-24 | 2000-02-08 | Toshiba Corp | Inductor and circuit device using the inductor |
| EP1079463A2 (en) * | 1999-08-24 | 2001-02-28 | Rangestar International Corporation | Asymetric dipole antenna assembly |
| JP2001101370A (en) * | 1999-10-04 | 2001-04-13 | Dainippon Printing Co Ltd | Information processing media |
Cited By (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7170384B2 (en) | 2004-12-30 | 2007-01-30 | Samsung Electro-Mechanics Co., Ltd. | Printed circuit board having three-dimensional spiral inductor and method of fabricating same |
| WO2006120997A1 (en) * | 2005-05-11 | 2006-11-16 | Namiki Seimitsu Houseki Kabushikikaisha | Cylindrical coil and cylindrical micro-motor using the same |
| US8072387B2 (en) | 2005-07-07 | 2011-12-06 | Toda Kogyo Corporation | Magnetic antenna and board mounted with the same |
| WO2007007639A1 (en) * | 2005-07-07 | 2007-01-18 | Toda Kogyo Corporation | Magnetic antenna |
| US8159405B2 (en) | 2005-07-07 | 2012-04-17 | Toda Kogyo Corporation | Magnetic antenna and board mounted with the same |
| US7443362B2 (en) * | 2005-07-19 | 2008-10-28 | 3M Innovative Properties Company | Solenoid antenna |
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| JP4775440B2 (en) * | 2006-06-01 | 2011-09-21 | 株式会社村田製作所 | Wireless IC device and composite component for wireless IC device |
| US8353459B2 (en) | 2007-04-06 | 2013-01-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| WO2008133018A1 (en) * | 2007-04-13 | 2008-11-06 | Murata Manufacturing Co., Ltd. | Magnetic field coupling type antenna, magnetic field coupling type antenna module, magnetic field coupling type antenna device, and their manufacturing methods |
| CN101657938A (en) * | 2007-04-13 | 2010-02-24 | 株式会社村田制作所 | Magnetic field coupling type antenna, magnetic field coupling type antenna module, magnetic field coupling type antenna device, and manufacturing method thereof |
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| KR101395256B1 (en) | 2010-07-23 | 2014-05-16 | 한국전자통신연구원 | Wireless energy transfer apparatus and making method therefor |
| CN102569249A (en) * | 2010-12-08 | 2012-07-11 | 财团法人工业技术研究院 | Three-dimensional inductor |
| JP2013081327A (en) * | 2011-10-05 | 2013-05-02 | Jtekt Corp | Stator for motor and manufacturing method of the same |
| CN104204834B (en) * | 2012-03-29 | 2017-03-22 | 株式会社村田制作所 | Magnetic field probe |
| CN104204834A (en) * | 2012-03-29 | 2014-12-10 | 株式会社村田制作所 | Magnetic field probe |
| JP2013247436A (en) * | 2012-05-24 | 2013-12-09 | Murata Mfg Co Ltd | Coil antenna and communication terminal device |
| JP2015207614A (en) * | 2014-04-18 | 2015-11-19 | 日本電信電話株式会社 | Orthogonal type solenoid inductor |
| US10153810B2 (en) | 2014-12-19 | 2018-12-11 | Murata Manufacturing Co., Ltd. | Wireless IC device, molded resin article, and method for manufacturing wireless IC device |
| JP5930137B1 (en) * | 2014-12-19 | 2016-06-08 | 株式会社村田製作所 | Wireless IC device, resin molded body and manufacturing method thereof |
| WO2016098379A1 (en) * | 2014-12-19 | 2016-06-23 | 株式会社村田製作所 | Wireless ic device, resin molded product, and manufacturing method therefor |
| WO2016143584A1 (en) * | 2015-03-09 | 2016-09-15 | 株式会社村田製作所 | Coil device and electronic device |
| JPWO2016143584A1 (en) * | 2015-03-09 | 2018-01-25 | 株式会社村田製作所 | Coil device and electronic device |
| JP2018093650A (en) * | 2016-12-06 | 2018-06-14 | 三菱電機株式会社 | Layer coil, stator and motor |
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