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WO2002075261A3 - Method for monitoring the oscillatory characteristics of a microfabricated resonant mass sensor - Google Patents

Method for monitoring the oscillatory characteristics of a microfabricated resonant mass sensor Download PDF

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Publication number
WO2002075261A3
WO2002075261A3 PCT/US2002/007765 US0207765W WO02075261A3 WO 2002075261 A3 WO2002075261 A3 WO 2002075261A3 US 0207765 W US0207765 W US 0207765W WO 02075261 A3 WO02075261 A3 WO 02075261A3
Authority
WO
WIPO (PCT)
Prior art keywords
interferometry
oscillatory
microfabricated
resonant
methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2002/007765
Other languages
French (fr)
Other versions
WO2002075261A2 (en
Inventor
Michael I Nerenberg
Kelvin J Liu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MOLECULAR REFLECTION
Original Assignee
MOLECULAR REFLECTION
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MOLECULAR REFLECTION filed Critical MOLECULAR REFLECTION
Priority to AU2002250325A priority Critical patent/AU2002250325A1/en
Publication of WO2002075261A2 publication Critical patent/WO2002075261A2/en
Publication of WO2002075261A3 publication Critical patent/WO2002075261A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H13/00—Measuring resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/017—Doppler techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0422—Shear waves, transverse waves, horizontally polarised waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

The present invention relates, in general, to methods for determining the oscillatory characteristics in a microfabricated, resonant sensor and, in particular, to utilizing interferometry techniques to provide optical, non-contact, non-invasive methods for detecting the frequency of an oscillatory element (4) in a resonant sensor. Methods may include laser Doppler vibrometry (8), Michelson interferometry, stroboscopic interferometry, etc. Using interferometry to characterize the oscillatory response of microfabricated resonant devices permits simplified fabrication of the resonant elements (4) as it eliminates the need for the incorporation of electromechanical transducers to monitor motion of the individual elements.
PCT/US2002/007765 2001-03-15 2002-03-15 Method for monitoring the oscillatory characteristics of a microfabricated resonant mass sensor Ceased WO2002075261A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002250325A AU2002250325A1 (en) 2001-03-15 2002-03-15 Method for monitoring the oscillatory characteristics of a microfabricated resonant mass sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US81211101A 2001-03-15 2001-03-15
US09/812,111 2001-03-15

Publications (2)

Publication Number Publication Date
WO2002075261A2 WO2002075261A2 (en) 2002-09-26
WO2002075261A3 true WO2002075261A3 (en) 2002-12-12

Family

ID=25208538

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/007765 Ceased WO2002075261A2 (en) 2001-03-15 2002-03-15 Method for monitoring the oscillatory characteristics of a microfabricated resonant mass sensor

Country Status (2)

Country Link
AU (1) AU2002250325A1 (en)
WO (1) WO2002075261A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109799191B (en) * 2017-11-17 2021-07-06 南京理工大学 Optical non-contact detection device and method for acoustic disturbance on rough surface of solid material

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1744379A4 (en) * 2004-04-27 2007-10-24 Ngk Insulators Ltd Elastic body inspection method, inspection device, and dimension prediction program
CN101672692B (en) * 2009-10-14 2011-02-09 大连理工大学 A Fast Measurement Method of Tuning Fork Resonant Frequency Based on Virtual Instrument
DE102011100252A1 (en) * 2011-05-03 2012-11-08 Polytec Gmbh Method and device for optical, non-contact vibration measurement of a vibrating object
GB2492841A (en) * 2011-07-15 2013-01-16 Secr Defence Laser photoacoustic spectroscopy using a plurality of tuneable lasers
US11464487B2 (en) 2017-06-30 2022-10-11 Washington University Systems and methods for detecting embedded target elements using signal interference
DE102019106762A1 (en) 2018-12-21 2020-06-25 Endress + Hauser Flowtec Ag Method for determining a physical parameter of a liquid loaded with gas

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4764244A (en) * 1985-06-11 1988-08-16 The Foxboro Company Resonant sensor and method of making same
US5146289A (en) * 1990-12-21 1992-09-08 Laser Technology, Inc. Nondestructive testing using air-coupled acoustic excitation
US5445008A (en) * 1994-03-24 1995-08-29 Martin Marietta Energy Systems, Inc. Microbar sensor
US5912181A (en) * 1997-12-23 1999-06-15 Petcavich; Robert J. Method for molecule detection utilizing digital micromirror technology

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4764244A (en) * 1985-06-11 1988-08-16 The Foxboro Company Resonant sensor and method of making same
US5146289A (en) * 1990-12-21 1992-09-08 Laser Technology, Inc. Nondestructive testing using air-coupled acoustic excitation
US5445008A (en) * 1994-03-24 1995-08-29 Martin Marietta Energy Systems, Inc. Microbar sensor
US5912181A (en) * 1997-12-23 1999-06-15 Petcavich; Robert J. Method for molecule detection utilizing digital micromirror technology

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
BURNS ET AL.: "Sealed-cavity resonant microbeam pressure sensor", SENSORS AND ACTUATORS, vol. A48, no. 3, 1995, pages 179 - 186, XP004000964 *
HART ET AL.: "Stroboscopic interferometer system for dynamic MEMS characterization", UC BERKELEY ERL REPORT, 1 May 2000 (2000-05-01), pages 1, 5-10, 12, 15-29, XP002955520 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109799191B (en) * 2017-11-17 2021-07-06 南京理工大学 Optical non-contact detection device and method for acoustic disturbance on rough surface of solid material

Also Published As

Publication number Publication date
AU2002250325A1 (en) 2002-10-03
WO2002075261A2 (en) 2002-09-26

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