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WO2002061373A8 - Inertia transducer - Google Patents

Inertia transducer

Info

Publication number
WO2002061373A8
WO2002061373A8 PCT/JP2002/000592 JP0200592W WO02061373A8 WO 2002061373 A8 WO2002061373 A8 WO 2002061373A8 JP 0200592 W JP0200592 W JP 0200592W WO 02061373 A8 WO02061373 A8 WO 02061373A8
Authority
WO
WIPO (PCT)
Prior art keywords
container
connection electrode
detection element
transducer
opening part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2002/000592
Other languages
French (fr)
Japanese (ja)
Other versions
WO2002061373A1 (en
Inventor
Shigehiro Yoshiuchi
Shusaku Kawasaki
Toshiyuki Nozoe
Takeshi Uemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to DE60225384T priority Critical patent/DE60225384T2/en
Priority to CA002404785A priority patent/CA2404785C/en
Priority to EP02716410A priority patent/EP1286136B1/en
Priority to US10/239,727 priority patent/US6748807B2/en
Priority to AU2002226740A priority patent/AU2002226740B8/en
Publication of WO2002061373A1 publication Critical patent/WO2002061373A1/en
Publication of WO2002061373A8 publication Critical patent/WO2002061373A8/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Gyroscopes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Pressure Sensors (AREA)

Abstract

An inertia transducer, comprising a highly reliable detection element part without adhesion of gases and organic substances from a resin adhesive agent, a first container and a second container, and a first connection electrode and a second connection electrode, the first container further comprising an opening part having a circuit part installed therein and an external electrode and the first connection electrode, the second container further comprising a detection element installed therein and an opening part sealed by a sealing plate and the second connection electrode, wherein the second container is fitted to the first container so as to cover the opening part of the first container, and the second connection electrode and the first connection electrode are electrically connected to each other, whereby, even if a part of the transducer is damaged, either of the detection element part and circuit part can be re-used if not damaged.
PCT/JP2002/000592 2001-01-29 2002-01-28 Inertia transducer Ceased WO2002061373A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE60225384T DE60225384T2 (en) 2001-01-29 2002-01-28 INERTIA CONVERTER
CA002404785A CA2404785C (en) 2001-01-29 2002-01-28 Inertia transducer
EP02716410A EP1286136B1 (en) 2001-01-29 2002-01-28 Inertia transducer
US10/239,727 US6748807B2 (en) 2001-01-29 2002-01-28 Inertia detecting transducer
AU2002226740A AU2002226740B8 (en) 2001-01-29 2002-01-28 Inertia Detecting Transducer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001019531A JP4701505B2 (en) 2001-01-29 2001-01-29 Inertial transducer
JP2001-19531 2001-01-29

Publications (2)

Publication Number Publication Date
WO2002061373A1 WO2002061373A1 (en) 2002-08-08
WO2002061373A8 true WO2002061373A8 (en) 2002-10-31

Family

ID=18885392

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/000592 Ceased WO2002061373A1 (en) 2001-01-29 2002-01-28 Inertia transducer

Country Status (8)

Country Link
US (1) US6748807B2 (en)
EP (1) EP1286136B1 (en)
JP (1) JP4701505B2 (en)
CN (1) CN100376868C (en)
AU (1) AU2002226740B8 (en)
CA (1) CA2404785C (en)
DE (1) DE60225384T2 (en)
WO (1) WO2002061373A1 (en)

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JP4590853B2 (en) * 2003-10-17 2010-12-01 パナソニック株式会社 Rotation rate sensor and multi-axis detection type rotation rate sensor
JP4449504B2 (en) * 2004-03-15 2010-04-14 パナソニック株式会社 Angular velocity sensor
JP4544107B2 (en) * 2005-06-29 2010-09-15 株式会社デンソー Sensor device
JP4622780B2 (en) * 2005-09-28 2011-02-02 株式会社デンソー Angular velocity sensor device
US7536909B2 (en) * 2006-01-20 2009-05-26 Memsic, Inc. Three-dimensional multi-chips and tri-axial sensors and methods of manufacturing the same
CN103196437B (en) * 2006-03-15 2016-04-06 松下知识产权经营株式会社 Angular-rate sensor and manufacture method thereof
JP2007327758A (en) * 2006-06-06 2007-12-20 Nec Tokin Corp Piezoelectric single-crystal oscillator and piezoelectric vibration gyroscope
JP5013250B2 (en) * 2006-07-20 2012-08-29 セイコーエプソン株式会社 Acceleration sensor
JP2008256570A (en) * 2007-04-05 2008-10-23 Fujitsu Media Device Kk Angular velocity sensor
CN101796374A (en) * 2007-09-03 2010-08-04 松下电器产业株式会社 inertial force sensor
JP2010060358A (en) * 2008-09-02 2010-03-18 Murata Mfg Co Ltd Angular velocity sensor
US8080925B2 (en) * 2008-09-23 2011-12-20 Custom Sensors & Technologies, Inc. Inertial sensor with dual cavity package and method of fabrication
JP2010169614A (en) * 2009-01-26 2010-08-05 Epson Toyocom Corp Electronic device and electronic module, and method for manufacturing the same
JP4985789B2 (en) * 2010-01-13 2012-07-25 株式会社デンソー Mechanical quantity sensor
JP2013002938A (en) * 2011-06-16 2013-01-07 Seiko Epson Corp Sensor device and manufacturing method of the same
US9632105B2 (en) * 2011-09-30 2017-04-25 Panasonic Intellectual Property Management Co., Ltd. Angular velocity sensor for suppressing fluctuation of detection sensitivity
JP6016228B2 (en) * 2012-07-03 2016-10-26 ソニーセミコンダクタソリューションズ株式会社 Sensor device
JP6119518B2 (en) 2013-02-12 2017-04-26 ソニー株式会社 Sensor device, input device and electronic apparatus
JP6136402B2 (en) * 2013-03-15 2017-05-31 セイコーエプソン株式会社 Sensor unit, electronic device, and moving object
CN105190492B (en) 2013-03-18 2019-09-27 索尼公司 Sensor devices, input devices and electronics
JP6142745B2 (en) 2013-09-10 2017-06-07 ソニー株式会社 Sensor device, input device and electronic apparatus
JP2015190859A (en) 2014-03-28 2015-11-02 ソニー株式会社 Sensor device, input device, and electronic apparatus
CN108508230B (en) * 2017-02-27 2021-07-23 川崎重工业株式会社 acceleration sensor assembly
JP2019200123A (en) * 2018-05-16 2019-11-21 セイコーエプソン株式会社 Sensor unit, construction machine, and structure monitoring device
JP7310598B2 (en) * 2019-12-25 2023-07-19 株式会社デンソー electronic device
CN119309558B (en) * 2024-12-10 2025-03-25 北京晨晶电子有限公司 An angular velocity sensor

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JPH0843435A (en) * 1994-08-03 1996-02-16 Murata Mfg Co Ltd Acceleration sensor
JP3382030B2 (en) * 1994-10-14 2003-03-04 株式会社日立製作所 Full-mold mounting type acceleration sensor
DE69736630D1 (en) * 1997-06-19 2006-10-19 St Microelectronics Srl Hermetically sealed sensor with movable microstructure
JPH11312566A (en) * 1998-04-28 1999-11-09 Shin Etsu Polymer Co Ltd Connecting socket for semiconductor package

Also Published As

Publication number Publication date
EP1286136A4 (en) 2005-09-07
AU2002226740B1 (en) 2002-08-12
DE60225384D1 (en) 2008-04-17
EP1286136B1 (en) 2008-03-05
WO2002061373A1 (en) 2002-08-08
JP4701505B2 (en) 2011-06-15
EP1286136A1 (en) 2003-02-26
CA2404785C (en) 2007-07-31
DE60225384T2 (en) 2009-03-26
CN100376868C (en) 2008-03-26
US6748807B2 (en) 2004-06-15
JP2002221419A (en) 2002-08-09
CN1460172A (en) 2003-12-03
US20030154787A1 (en) 2003-08-21
CA2404785A1 (en) 2002-09-27
AU2002226740B8 (en) 2010-03-25

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