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WO2002046819A2 - Dispositif miroir inclinable - Google Patents

Dispositif miroir inclinable Download PDF

Info

Publication number
WO2002046819A2
WO2002046819A2 PCT/DE2001/004546 DE0104546W WO0246819A2 WO 2002046819 A2 WO2002046819 A2 WO 2002046819A2 DE 0104546 W DE0104546 W DE 0104546W WO 0246819 A2 WO0246819 A2 WO 0246819A2
Authority
WO
WIPO (PCT)
Prior art keywords
mirror device
tilting mirror
material part
tilting
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2001/004546
Other languages
German (de)
English (en)
Other versions
WO2002046819A3 (fr
Inventor
Christof Abel-Keilhack
Manfred Burkhard Helm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of WO2002046819A2 publication Critical patent/WO2002046819A2/fr
Anticipated expiration legal-status Critical
Publication of WO2002046819A3 publication Critical patent/WO2002046819A3/fr
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554—Moving beam scanning
    • G06K7/10594—Beam path
    • G06K7/10603—Basic scanning using moving elements
    • G06K7/10633—Basic scanning using moving elements by oscillation
    • G06K7/10643—Activating means
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554—Moving beam scanning
    • G06K7/10594—Beam path
    • G06K7/10603—Basic scanning using moving elements
    • G06K7/10633—Basic scanning using moving elements by oscillation
    • G06K7/10643—Activating means
    • G06K7/10653—Activating means using flexible or piezoelectric means

Definitions

  • the present invention relates to a tilting mirror device according to the preamble of patent claim 1.
  • Tilting mirror devices are known in which, according to FIG. 1, a first mirror 13 can be deflected in a first direction by a first galvanometer 14 and a second one
  • Mirror 15 can be deflected in a second direction by a second galvanometer 16.
  • the first direction is perpendicular to the second direction.
  • the incident light beam 17 strikes the first mirror 13 and is deflected to the second mirror 15.
  • the light beam is then focused by a lens 18 onto a work surface 19.
  • the light beam 20 striking the work surface 19 can track any continuous path when the first mirror 13 and the second mirror 15 move accordingly.
  • Such an arrangement is referred to as a scanner.
  • Laser beams are usually used as light beams if the tilting mirror device described is e.g. is used for laser marking.
  • the object of the present invention is to provide a tilting mirror device which is of comparatively simple construction and is therefore inexpensive to manufacture.
  • the main advantage is that the tilting mirror device according to the invention is comparatively simple and therefore inexpensive to manufacture. This is due in particular to the fact that the required drive devices only have a travel range of a few millimeters with tiv small forces (approx. 1 N).
  • the tilting mirror devices according to the invention are particularly suitable for applications in which only relatively small deflection angles are required.
  • the tilting mirror device according to the invention can also be used very well in resonance scanners.
  • Figure 1 is a schematic representation of a known tilting mirror device with two mirrors and two galvanometers
  • FIG. 2 shows a schematic side view of the tilting mirror device according to the invention in a moving state
  • Figure 3 shows the tilting mirror device of Figure 2 in a different state of motion
  • Figure 4 is a schematic representation of a preferred embodiment of the tilting mirror device according to the invention.
  • the tilting mirror device according to the invention which is preferably a four-bar structure, consists of a material part, which is preferably of a strip-like structure and comprises five elements which are connected to one another by four joints.
  • the entire device is designed as a solid structure. More precisely, a first outer element, which is designated by 1, is fixedly arranged in a housing of the tilting mirror device. This also applies to a second outer element 5, which is also fixedly arranged in the housing at a distance from the first element 1, wherein it is preferably located in the plane of the first element 1. Starting from the first outer element 1, a first intermediate element 2, a middle element 3 and a second intermediate element 4 are located between the outer elements 1 and 5.
  • the elements mentioned are each connected on the sides facing one another by joints. connected to each other.
  • the outer element 1 is connected via the joint 6 to the intermediate element 2, the intermediate element 2 via the joint 7 to the middle element 3, the middle element 3 via the joint 8 to the intermediate element 4 and the intermediate element 4 via the joint 9 connected to the outer element 5.
  • the joints are preferably 6, 7, 8 and 9 each notch joints, which are formed in the material part in the transverse direction and the outer element 1, the intermediate element 2, the middle element 3, the intermediate element 4 and the outer Define element 5.
  • the material part mentioned preferably consists of a superelastic material, which is, for example, nickel titanium (NiTi).
  • NiTi nickel titanium
  • the material part has a dimension of 57 x 8 mm.
  • a first mirror 10 is arranged on one side of the intermediate element 2. Accordingly, a second mirror 11 is arranged on the same side of the intermediate element 4.
  • the middle element 3 is moved linearly perpendicular to the extension of the material part by a drive device, not shown, in the direction of the arrow P1. This movement is made possible by the elasticity of the joints 6, 7, 8 and 9 designed as notch joints in the material part.
  • the intermediate elements 2, 4 arranged to the right and left of it execute a tilting movement with the angle ⁇ .
  • the mirrors 10 and 11 are preferably each slightly inclined mirrors, the inclination of the mirrors running at an acute angle to the plane of the intermediate part 2 or 4 in the direction of the central element 3.
  • An incident light beam 12 is reflected on the first mirror 10 in the direction of the second mirror 11 (reference symbol 12 ⁇ ) in order to also be reflected there and to leave the tilting mirror device as a falling light beam 12 ".
  • FIGS. 2 and 3 show approximately the different maximum deflections of the middle element 3 in the opposite directions, as well as the deflections of the light beam 12 ′′ in the direction of the arrow P2 that can be achieved.
  • FIG. 4 shows in detail a strip-shaped material part which consists of a superelastic NiTi material in which the joints 6, 7, 8 and 9 are designed as notch joints.
  • a deflection of the middle element 3 by one millimeter leads to a tilting movement of approximately 4.5 ° of the intermediate elements 2 and 4, whereby a deflection of a total of ⁇ 18 ° can be achieved.
  • the maximum elongation occurring in the joints 7 and 8 is approximately 1.3% and the stresses occurring in these joints are a maximum of 330 N / mm 2 .
  • the material part and the notch joints are preferably produced by erosion, since nickel-titanium cannot be machined.
  • the minimum material thickness of the notch joints should not be less than about 0.3 mm, since the material mentioned becomes brittle at the edge areas due to the eroding.
  • the transmission ratio between the actuating path and the rotary movement can be varied within wide limits by the spacing relationships between the joints 6, 7, 8 and 9.
  • a highly precise and therefore expensive linear guidance of the drive is not necessary.
  • a force application that is not exactly perpendicular to the plane of the central element 3 does lead to a slightly asymmetrical deflection of the structure; however, this asymmetry is fully compensated for by the parallel approach.
  • Suitable as drives are, for example, plunger coils or, in the case of relatively small angular movements, also piezo stacks. The advantage of such piezo stacks is that very fast movements in the kHz range are possible.
  • the tilting mirror device described is suitable for converting a linear movement into a rotary movement.
  • two of the tilting mirror arrangements described are therefore required, which are connected in series, the light beam then being guided over a total of 4 mirrors.
  • the present tilting mirror device is particularly suitable, for example, as a guide gear in a light or laser deflection arrangement, in particular in a laser marking arrangement.
  • a guide gear in a light or laser deflection arrangement
  • it can also be used in a multi-axis drive, a robot wrist or in an inclinometer.
  • the material part can also be clamped differently than in the embodiment described above.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

L'invention concerne un dispositif miroir inclinable destiné à dévier un rayon lumineux incident (12) dans une direction (P2). Une pièce matériau (1, 2, 3, 4, 5), solidement fixée à au moins une extrémité, peut être animée d'un mouvement linéaire perpendiculairement au plan de la pièce matériau par un dispositif d'entraînement. Deux miroirs (10, 11) placés à une certaine distance l'un de l'autre, vu dans le sens longitudinal de la pièce matériau, sont animés de mouvements linéaires perpendiculaires au plan de la pièce matériau, de telle façon qu'un rayon lumineux (12) qui frappe un miroir (10), est réfléchi vers l'autre miroir (11) puis dévié dans la direction (P2) perpendiculairement au plan de la bande matériau. De préférence, plusieurs articulations à charnière (6, 7, 8, 9), situées dans le sens longitudinal de la pièce matériau, subdivisent la pièce matériau en plusieurs éléments.
PCT/DE2001/004546 2000-12-04 2001-12-04 Dispositif miroir inclinable Ceased WO2002046819A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10060111.1 2000-12-04
DE10060111A DE10060111C1 (de) 2000-12-04 2000-12-04 Optische Ablenkvorrichtung

Publications (2)

Publication Number Publication Date
WO2002046819A2 true WO2002046819A2 (fr) 2002-06-13
WO2002046819A3 WO2002046819A3 (fr) 2003-06-05

Family

ID=7665662

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2001/004546 Ceased WO2002046819A2 (fr) 2000-12-04 2001-12-04 Dispositif miroir inclinable

Country Status (2)

Country Link
DE (1) DE10060111C1 (fr)
WO (1) WO2002046819A2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004003625A1 (fr) * 2002-06-28 2004-01-08 Clvr Pty Ltd Dispositif de balayage et procede de balayage d'un faisceau optique sur une surface
WO2004008218A1 (fr) * 2002-07-10 2004-01-22 Infm Istituto Nazionale Per La Fisica Della Materia Microscope optique pouvant effectuer une modulation tridimensionnelle rapide de la position du point d'observation
AU2003240315B2 (en) * 2002-06-28 2009-07-16 Cv Laser Pty Ltd Scanning device and method of scanning an optical beam over a surface

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005023985A1 (de) * 2005-05-20 2006-11-23 Keysystech Gmbh Laserschweißvorrichtung

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4402575A (en) * 1981-05-01 1983-09-06 Bell & Howell Company Wideband optical beam deflector
JP3076465B2 (ja) * 1992-11-20 2000-08-14 キヤノン株式会社 マイクロアクチュエータおよび光偏向器
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US5862003A (en) * 1995-06-23 1999-01-19 Saif; Muhammad T. A. Micromotion amplifier
DE19648727A1 (de) * 1996-11-25 1998-05-28 Piezosystem Jena Praezisionsju Optische Ablenkvorrichtung
US6072617A (en) * 1996-11-26 2000-06-06 Texas Instruments Incorporated Micro mechanical device with memory metal component

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004003625A1 (fr) * 2002-06-28 2004-01-08 Clvr Pty Ltd Dispositif de balayage et procede de balayage d'un faisceau optique sur une surface
US7221494B2 (en) 2002-06-28 2007-05-22 Clvr Pty Ltd. Scanning device and method of scanning an optical beam over a surface
AU2003240315B2 (en) * 2002-06-28 2009-07-16 Cv Laser Pty Ltd Scanning device and method of scanning an optical beam over a surface
EP1525506A4 (fr) * 2002-06-28 2009-12-23 Clvr Pty Ltd Dispositif de balayage et procede de balayage d'un faisceau optique sur une surface
WO2004008218A1 (fr) * 2002-07-10 2004-01-22 Infm Istituto Nazionale Per La Fisica Della Materia Microscope optique pouvant effectuer une modulation tridimensionnelle rapide de la position du point d'observation

Also Published As

Publication number Publication date
DE10060111C1 (de) 2002-07-25
WO2002046819A3 (fr) 2003-06-05

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