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WO2001036709A1 - Procede et dispositif de traitement de surface par decharge electrique - Google Patents

Procede et dispositif de traitement de surface par decharge electrique Download PDF

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Publication number
WO2001036709A1
WO2001036709A1 PCT/JP1999/006347 JP9906347W WO0136709A1 WO 2001036709 A1 WO2001036709 A1 WO 2001036709A1 JP 9906347 W JP9906347 W JP 9906347W WO 0136709 A1 WO0136709 A1 WO 0136709A1
Authority
WO
WIPO (PCT)
Prior art keywords
discharge
workpiece
surface treatment
modified layer
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP1999/006347
Other languages
English (en)
Japanese (ja)
Inventor
Akihiro Goto
Yasuhiro Kojima
Nagao Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to PCT/JP1999/006347 priority Critical patent/WO2001036709A1/fr
Priority to TW088120497A priority patent/TW469203B/zh
Publication of WO2001036709A1 publication Critical patent/WO2001036709A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/02—Wire-cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H1/00—Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • C23C26/02—Coating not provided for in groups C23C2/00 - C23C24/00 applying molten material to the substrate

Definitions

  • a discharge layer is generated between a discharge surface treatment electrode and a workpiece, and the energy of the discharge causes a modified layer made of an electrode material or a substance in which the electrode material reacts with the discharge energy on the surface of the workpiece.
  • Surface treatment method and apparatus for forming a modified layer comprising: a discharge surface treatment capable of forming a modified layer having good quality and smoother surface roughness on the surface of a workpiece; Method and apparatus improvements. Background art
  • a technique for forming a modified layer on the surface of a workpiece to impart corrosion resistance and abrasion resistance for example, a technique disclosed in Japanese Patent Application Laid-Open No. HEI 5-148615 is disclosed.
  • This technology uses a green compact electrode, which is a discharge surface treatment electrode formed by mixing and compressing WC (tungsten carbide) powder and Co (cobalt) powder in a machining fluid. Processing (deposition processing), and then replacing the electrode with relatively low electrode wear such as copper electrode and performing secondary processing (remelting processing). is there.
  • This method can form a modified layer with strong adhesion to steel, but forms a modified layer with strong adhesion to sintered materials such as cemented carbide. It is difficult.
  • FIG. 4 shows a configuration example of a discharge surface treatment apparatus used for such a discharge surface treatment.
  • 1 is T i H 2 flour powder was compression molded formed by discharge surface treatment in which green compact electrode, 2 is the pressure E was 3 machining tank, four working fluid, 5 green A switching element for switching the voltage and current applied to the body electrode 1 and the workpiece 2; 6, a control circuit for controlling the on / off of the switching element 5; 7, a power supply; 8, a resistor; and 9, a formed circuit.
  • 1 is T i H 2 flour powder was compression molded formed by discharge surface treatment in which green compact electrode, 2 is the pressure E was 3 machining tank, four working fluid, 5 green A switching element for switching the voltage and current applied to the body electrode 1 and the workpiece 2; 6, a control circuit for controlling the on / off of the switching element 5; 7, a power supply; 8, a resistor; and 9, a formed circuit.
  • This is a modified layer.
  • the green compact electrode 1 and the workpiece 2 are relatively moved by the X-axis drive unit, the Y-axis drive unit, and the Z-axis drive unit, which are not shown, and are relatively moved.
  • a discharge is generated between the workpiece 2 and the discharge energy, whereby the modified layer 9 can be formed on the surface of the workpiece 2 made of steel, cemented carbide, or the like.
  • a method of forming a modified layer made of carbide on the surface of a workpiece by such a discharge surface treatment is performed in a working fluid as described below. That is, the carbide that is a component of the modified layer to be formed is combined with the component of the discharge surface treatment electrode.
  • the heat energy from the discharge is used to react with carbon, which is a component of the machining fluid, to form a reformed layer made of carbide on the workpiece.
  • the conventional discharge surface treatment method exclusively uses in-liquid discharge, and depending on only in-liquid discharge, the composition of the electrode material for discharge surface treatment used and the discharge machining conditions during discharge surface treatment.
  • the surface roughness of the modified layer formed on the workpiece can only be slightly improved. Therefore, the conventional discharge surface treatment method has a problem that a modified layer having good quality and smoother surface roughness cannot be formed.
  • the present invention has been made to solve the above problems.
  • Another object of the present invention is to provide a discharge surface treatment method and apparatus capable of forming a high-quality and smoother modified layer on the surface of a workpiece.
  • the discharge surface treatment method according to the present invention is a discharge surface treatment method for forming a modified layer on the surface of a workpiece by discharge machining using an electrode for discharge surface treatment.
  • the object is relatively moved, and in a liquid, a modified layer is formed on the surface of the workpiece by discharge energy supplied between the discharge surface treatment electrode and the workpiece.
  • the modified layer are relatively moved, and the modified layer is shaped by discharge energy supplied between the wire electrode and the modified layer in the air.
  • the modified layer is formed by discharging energy supplied between the wire electrode and the modified layer in an atmosphere of a nitrogen gas, a nitrogen compound gas, or a mixed gas of a nitrogen compound gas and a nitrogen gas. It is to shape.
  • An electric discharge surface treatment apparatus is an electric discharge surface treatment apparatus for forming a modified layer on a surface of a workpiece by electric discharge machining using an electric discharge surface treatment electrode.
  • a relative movement means capable of relatively moving the workpiece; a discharge generating means for supplying discharge energy between the discharge surface treatment electrode or the wire electrode and a pole between the workpiece; Wire electrode traveling means for feeding a workpiece, machining fluid supply means for supplying a machining fluid for immersing the workpiece, and discharge machining between the wire electrode and the workpiece.
  • a working fluid discharging means for discharging the working fluid in order to perform the process.
  • an injection means for supplying a nitrogen gas, a nitrogen compound gas, or a mixed gas of a nitrogen compound gas and a nitrogen gas into a gap between the wire electrode and the workpiece.
  • FIG. 1 is a configuration diagram showing a discharge surface treatment apparatus according to Embodiment 1 of the present invention.
  • FIG. 2 is a configuration diagram showing a discharge surface treatment apparatus according to Embodiment 2 of the present invention.
  • FIG. 3 is a configuration diagram showing a discharge surface treatment apparatus according to Embodiment 2 of the present invention.
  • FIG. 4 is a configuration diagram of a conventional discharge surface treatment apparatus. BEST MODE FOR CARRYING OUT THE INVENTION
  • FIG. 1 is a configuration diagram showing a discharge surface treatment apparatus according to Embodiment 1 of the present invention, where 11 is a die material such as a punching die, an extrusion die, etc.
  • a wire electrode, 13 is a table surface on which the workpiece 11 is placed
  • 14 and 15 are X and Y tables arranged orthogonal to each other so as to move in a two-dimensional direction
  • 16 is
  • 17 is a Y-axis driving device for driving the Y-table 15
  • the X-axis driving device 16 and the Y-axis driving device 17 are provided with the workpiece 11. It constitutes a relative moving means for relatively changing the positional relationship with the wire electrode 12.
  • the relative moving means As the relative moving means, the relative moving means described in the background art can be used. Also, 18 is a numerical controller, 19 is a numerical controller 18 Locus movement control means provided therein, 20a is a wire reel, 2Ob is a wire drive roller, and the wire reel 20a and the wire drive roller 20b constitute wire electrode running means. I have.
  • Reference numeral 21 denotes a power supply device which is a discharge generating means for supplying discharge energy between the workpiece 11 and the wire electrode 12, and includes a DC power supply, a switching element, a control circuit, and the like. .
  • the workpiece 11 is subjected to a discharge surface treatment in a machining fluid using, for example, the side surface of the electrode for discharge surface treatment by a discharge surface treatment apparatus having a configuration as shown in FIG. 4 shown in the background art.
  • a modified layer 11 a is formed on a predetermined portion of the workpiece 11.
  • the working fluid is discharged by a working fluid discharge unit (not shown) capable of discharging the working fluid by, for example, opening a valve.
  • a working fluid discharge unit (not shown) capable of discharging the working fluid by, for example, opening a valve.
  • the gap is adjusted to a predetermined value by 17 and the wire electrode 12 is run by a wire reel 20a, a wire drive roller 20b, etc., which constitutes the wire electrode running means, and is provided in the numerical controller 18
  • the wire electrode 12 is moved along the modified layer surface of the workpiece 11 by the X-axis drive device 16 and the Y-axis drive device constituting the relative movement means.
  • the trajectory is moved, and a discharge energy is supplied between the workpiece 11 and the wire electrode 12 by the power supply device 21 which is a discharge generating means, and is processed between the modified layer 11 a and the wire electrode 12. Discharge is generated in the air without passing through the liquid, and the surface of the modified layer 11a is removed.
  • the machining fluid When performing EDM in a machining fluid, the machining fluid is less compressible than gas, so the discharge generates a large discharge explosion pressure, Since the wire electrode between the guides vibrates, it is not possible to perform more precise processing. Due to such characteristics of the machining fluid, electric discharge machining using a wire electrode in the machining fluid is performed by a modified layer (having a thickness of several m to several m) formed on the workpiece by the discharge surface treatment targeted by the present invention. It is not suitable for processing to reduce the surface roughness (for example, the maximum height is about several meters or less).
  • the present invention electric discharge machining in the air is employed, and by performing electric discharge machining with the wire electrode 12 in the air, the machining reaction force becomes extremely small. Vibration is suppressed, and higher precision processing can be performed. Therefore, the modified layer 11a can be shaped more smoothly, and the surface roughness of the modified layer 11a can be reduced.
  • the supply of the processing liquid can be performed by, for example, supplying the processing liquid into the processing tank by a processing liquid supply unit including a pump or the like.
  • electric discharge machining is performed on the modified layer formed on the workpiece by electric discharge surface treatment in the machining fluid as the primary machining, and further, in the air using the wire electrode in the air as the secondary machining. Accordingly, it is possible to form a modified layer having good quality and smoother surface roughness.
  • FIG. 2 is a configuration diagram showing a discharge surface treatment apparatus according to Embodiment 2 of the present invention.
  • the same reference numerals as in FIG. 1 of Embodiment 1 indicate the same or corresponding parts.
  • reference numeral 22 denotes injection means
  • reference numeral 23 denotes nitrogen gas, nitrogen compound gas such as ammonia gas, or a mixed gas of nitrogen compound gas and nitrogen gas injected by the injection means 22.
  • Fig. 2 It has a configuration in which 22 injection means are added in the vicinity of the gap between the reformed layer 11a and the wire electrode 12.
  • Nitrogen gas, nitrogen compound gas, or nitrogen compound gas and nitrogen introduced from a supply source (not shown)
  • the gas mixture 23 is injected and supplied by the injection means 22 into the gap between the reformed layer 11a of the workpiece 11 and the wire electrode 12 to supply nitrogen gas, nitrogen compound gas, or nitrogen compound gas.
  • electrical discharge machining secondary machining described in Embodiment 1 in an atmosphere of a mixed gas of nitrogen and nitrogen gas.
  • the surface roughness of the modified layer 11a can be reduced, and a nitrogen compound is further formed on the surface of the modified layer 11a. Therefore, the wear resistance of the workpiece 11 can be improved.
  • Fig. 3 shows the minimum opening required for the relative movement of the work 11 and the X table 14 and the Y table 15 on the X table 14 to cover the work 11 in Fig. 2. It is a figure which shows the state which attached the chamber 24 which has a gas, and 25 is a supply means of the nitrogen gas, the nitrogen compound gas, or the mixed gas of the nitrogen compound gas and the nitrogen gas.
  • the supply means 25 is provided with a flow rate adjusting means capable of arbitrarily adjusting the gas supply amount to the chamber 24.
  • the modified layer 11a of the workpiece 11 and the wire electrode 12 are The same effect as in the configuration of FIG. 2 can be obtained more efficiently by discharging the battery between the two.
  • the discharge surface treatment method and apparatus according to the present invention are suitable for being used in a surface treatment related industry for forming a modified layer on the surface of a workpiece.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

La présente invention concerne un procédé de traitement de surface par décharge électrique utilisé pour former une couche modifiée à la surface d'un objet (11) à usiner au moyen d'une électrode, en vue d'un traitement de surface par décharge électrique. L'électrode et l'objet (11) sont relativement déplacés. La couche modifiée (11a) est formée dans un liquide, à la surface de l'objet (11), grâce à l'énergie de décharge fournie entre l'électrode et l'objet (11). Un fil-électrode (12) et la couche modifiée (11a) sont relativement déplacés, t la couche modifiée (11a) étant mise en forme dans l'air à l'aide de l'énergie de décharge fournie entre le fil-électrode (12) et la couche modifiée (11a). Ainsi, une couche modifiée plus lisse (11a) est formée à la surface de l'objet (11).
PCT/JP1999/006347 1999-11-15 1999-11-15 Procede et dispositif de traitement de surface par decharge electrique Ceased WO2001036709A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP1999/006347 WO2001036709A1 (fr) 1999-11-15 1999-11-15 Procede et dispositif de traitement de surface par decharge electrique
TW088120497A TW469203B (en) 1999-11-15 1999-11-24 Method for treating a surface with electric discharge and apparatus therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1999/006347 WO2001036709A1 (fr) 1999-11-15 1999-11-15 Procede et dispositif de traitement de surface par decharge electrique

Publications (1)

Publication Number Publication Date
WO2001036709A1 true WO2001036709A1 (fr) 2001-05-25

Family

ID=14237276

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1999/006347 Ceased WO2001036709A1 (fr) 1999-11-15 1999-11-15 Procede et dispositif de traitement de surface par decharge electrique

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TW (1) TW469203B (fr)
WO (1) WO2001036709A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107073613B (zh) 2014-09-24 2019-04-16 三菱电机株式会社 线放电加工装置及半导体晶片的制造方法
CN108080756A (zh) * 2017-11-24 2018-05-29 西安工业大学 一种导体材料的切割方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50115631A (fr) * 1974-02-26 1975-09-10
JPH0770761A (ja) * 1993-08-31 1995-03-14 Res Dev Corp Of Japan アルミニウム及びその合金の液中放電による表面処理方法
JPH10235521A (ja) * 1997-02-27 1998-09-08 Fuji Xerox Co Ltd 放電加工装置および放電加工方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50115631A (fr) * 1974-02-26 1975-09-10
JPH0770761A (ja) * 1993-08-31 1995-03-14 Res Dev Corp Of Japan アルミニウム及びその合金の液中放電による表面処理方法
JPH10235521A (ja) * 1997-02-27 1998-09-08 Fuji Xerox Co Ltd 放電加工装置および放電加工方法

Also Published As

Publication number Publication date
TW469203B (en) 2001-12-21

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