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WO2001033303A1 - Galvanometre a memoire de donnees incorporee - Google Patents

Galvanometre a memoire de donnees incorporee Download PDF

Info

Publication number
WO2001033303A1
WO2001033303A1 PCT/US2000/016385 US0016385W WO0133303A1 WO 2001033303 A1 WO2001033303 A1 WO 2001033303A1 US 0016385 W US0016385 W US 0016385W WO 0133303 A1 WO0133303 A1 WO 0133303A1
Authority
WO
WIPO (PCT)
Prior art keywords
motor
galvanometer
scanner
rotor
load
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2000/016385
Other languages
English (en)
Inventor
Michael B. Nussbaum
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Scanning Inc
Original Assignee
General Scanning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Scanning Inc filed Critical General Scanning Inc
Publication of WO2001033303A1 publication Critical patent/WO2001033303A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/12—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using record carriers
    • G05B19/128—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using record carriers the workpiece itself serves as a record carrier, e.g. by its form, by marks or codes on it
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/23—Pc programming
    • G05B2219/23347—Eprom
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25294—Part, workpiece, code, tool identification

Definitions

  • This invention relates to limited-rotation oscillatory motors or galvanometers.
  • a common use of these devices is to drive optical elements such as mirrors for the purpose of guiding light beams.
  • An assembly of this type is often called a "scanner.”
  • galvanometers include the moving coil or so-called D'Arsonval galvanometer, the moving iron galvanometer and the moving magnet galvanometer.
  • the invention relates primarily to the moving-magnet type galvanometer; however, it may be employed with the other types of galvanometers.
  • a typical moving-magnet galvanometer includes a cylindrical magnetic rotor and a stator.
  • the rotor is mounted for rotary oscillation about a central axis, and is normally polarized into two essentially semi-cylindrical poles on opposite sides of the axis.
  • the stator is mounted concentric with the rotor, and generally has two poles that are disposed on opposite sides of the rotor, with coils wound on neck portions of the poles. Additionally, a servo amplifier controls the angular position of the rotor by means of drive currents applied to the stator coils.
  • the accuracy of the angular position of the rotor is critical to the proper operation of the galvanometer.
  • Some examples of these types uses include; electronic manufacturing and repair operations in which a laser beam is directed to perform tasks such as the profiling, marking, cutting, drilling, and trimming of silicon and other semiconducting materials, the trimming and cutting of thick and thin films on semiconductors, the drilling of via holes in printed circuit boards, and the inspection of solder paste and component placement on printed circuit boards, among many others.
  • galvanometers display variability in characteristics over a small range as a result of manufacturing tolerances, variability in materials, etc. These varieties adversely affect operation of the servo controller especially if accurate measurement of the rotor position at high speed is desired.
  • the invention features a non- volatile memory resident within a scanner.
  • the memory is loaded with the operating characteristics of the scanner. These characteristics include, but are not limited to, information describing the scanner dy- namics, position detector gain and linearization and system temperature coefficients.
  • the memory may also contain information not limited to the servo system.
  • the servo system to which the scanner is later connected in use has access to the information stored in the memory and uses this information to "tune" itself to the characteristics.
  • any scanner can be connected to any amplifier, and the memory describing the scanner characteristics can be read to obtain optimum performance without the need for manual adjustment.
  • This allows servo electronics and scanners to be replaced in the field without the need for laborious adjustment and tuning.
  • Fig. 1 shows a cross section of a typical prior art closed loop servo optical scanner with its major components
  • Fig. 2 shows an electrically programmable read-only memory chip (EPROM) incorporated into the closed loop servo optical scanner of FIG. 1.
  • EPROM electrically programmable read-only memory chip
  • FIG. 2 shows the elements of a moving magnet scanner, or galvanometer: a limited-rotation motor 10 comprising a rotor 12, a stator 14, a position detector 16, and an electronic servo control unit 18.
  • a limited-rotation motor 10 comprising a rotor 12, a stator 14, a position detector 16, and an electronic servo control unit 18.
  • the servo control unit 18 applies power to the motor 10 and the position detector 16 and receives position signals from the detector 16.
  • the control unit includes a microprocessor 30 that operates in accordance with instructions contained in a memory 32 and command inputs from an input terminal 34.
  • the scanner also includes a nonvolatile memory 36 containing the characteristics of the motor 10, a load rotated by the motor (not shown), and the position detector 16.
  • the processor executes a digital servo loop program for control of the motor 10, accessing the memory 36 for various parameters to incorporated into the digital servo loop.
  • the memory 36 is packaged within and identified specifically with motor 10. The latter unit is thus automatically “tuned” to the characteristics of the motor 10 and its load.
  • the simplified drawing does not show various components, such as digital-analog and analog-digital convert- ers, common to digital servo controllers.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

La présente invention concerne un scanner de galvanomètre à autoréglage contenant une mémoire morte reprogrammable électroniquement (EPROM) (32) programmée avec un plan d'exécution propre de façon à ce que, lorsqu'un servoamplificateur est relié au scanner il ait accès au contenu stocké dans la mémoire morte (ROM) et utilise cette information afin de s'accorder lui-même automatiquement sans qu'il soit nécessaire d'effectuer un réglage manuel.
PCT/US2000/016385 1999-10-29 2000-06-14 Galvanometre a memoire de donnees incorporee Ceased WO2001033303A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US43155399A 1999-10-29 1999-10-29
US09/431,553 1999-10-29

Publications (1)

Publication Number Publication Date
WO2001033303A1 true WO2001033303A1 (fr) 2001-05-10

Family

ID=23712450

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/016385 Ceased WO2001033303A1 (fr) 1999-10-29 2000-06-14 Galvanometre a memoire de donnees incorporee

Country Status (1)

Country Link
WO (1) WO2001033303A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7170251B2 (en) 2004-01-23 2007-01-30 Gsi Group Corporation System and method for diagnosing a controller in a limited rotation motor system
US7200464B2 (en) 2000-09-21 2007-04-03 Gsi Group Corporation Digital control servo system
US7331512B2 (en) 2003-06-16 2008-02-19 Gsi Group Corporation Monitoring and controlling of laser operation

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0375786A1 (fr) * 1988-06-02 1990-07-04 Fanuc Ltd. Organe de commande de moteur
US5225770A (en) * 1991-02-25 1993-07-06 General Scanning, Inc. Moving magnet galvanometers having a varied density winding distribution coil for a desired performance characteristic
EP0896265A1 (fr) * 1997-08-08 1999-02-10 Robert Bosch Gmbh Dispositif d'entraínement

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0375786A1 (fr) * 1988-06-02 1990-07-04 Fanuc Ltd. Organe de commande de moteur
US5225770A (en) * 1991-02-25 1993-07-06 General Scanning, Inc. Moving magnet galvanometers having a varied density winding distribution coil for a desired performance characteristic
EP0896265A1 (fr) * 1997-08-08 1999-02-10 Robert Bosch Gmbh Dispositif d'entraínement

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7200464B2 (en) 2000-09-21 2007-04-03 Gsi Group Corporation Digital control servo system
US7421308B2 (en) 2000-09-21 2008-09-02 Gsi Group Corporation Digital control servo system
US7331512B2 (en) 2003-06-16 2008-02-19 Gsi Group Corporation Monitoring and controlling of laser operation
US7170251B2 (en) 2004-01-23 2007-01-30 Gsi Group Corporation System and method for diagnosing a controller in a limited rotation motor system
US7190144B2 (en) 2004-01-23 2007-03-13 Gsi Group Corporation System and method for adjusting a PID controller in a limited rotation motor system

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