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WO2001009011A1 - Chambre de transfert de substrats dotee d'un support de substrats aligne a la verticale avec un module de traitement de substrats - Google Patents

Chambre de transfert de substrats dotee d'un support de substrats aligne a la verticale avec un module de traitement de substrats Download PDF

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Publication number
WO2001009011A1
WO2001009011A1 PCT/US2000/016288 US0016288W WO0109011A1 WO 2001009011 A1 WO2001009011 A1 WO 2001009011A1 US 0016288 W US0016288 W US 0016288W WO 0109011 A1 WO0109011 A1 WO 0109011A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
section
main
substrate processing
processing modules
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2000/016288
Other languages
English (en)
Inventor
Christopher A. Hofmeister
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Brooks Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation Inc filed Critical Brooks Automation Inc
Priority to JP2001514221A priority Critical patent/JP2003506861A/ja
Priority to AU57368/00A priority patent/AU5736800A/en
Publication of WO2001009011A1 publication Critical patent/WO2001009011A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H10P72/0458—
    • H10P72/0462—
    • H10P72/0464—
    • H10P72/3406—

Definitions

  • Substrate Transfer Chamber Having A Substrate Holder Vertically Aligned With A Substrate Processing Module
  • the present invention relates to substrate processing apparatus and, more particularly, to arranging components vertically to reduce the footprint of the apparatus.
  • U.S. Patents 5,562,383 and 5,882,413 disclose different types of substrate processing apparatus. It is known in the art to provide a substrate transport robot between a station holding a cassette of substrates and a load lock into a main transfer chamber of the substrate processing apparatus. A problem with this type of arrangement is that the footprint is relatively large because the cassette holding station, substrate transport robot and load lock are arranged in series along a horizontal plane.
  • a substrate processing apparatus substrate transfer chamber for transferring substrates between substrate processing modules attached to the substrate transfer chamber.
  • the substrate transfer chamber comprises a first section and a second section.
  • the first section has substrate processing module mounting areas for mounting the substrate processing modules to an exterior of the first section. Each mounting area has a hole through a wall of the transfer chamber for passing substrates between an interior of the first section and the processing modules.
  • the second section extends from the first section and has a portion which extends outward relative to the first section and has an interior which is in communication with the interior of the first section.
  • a vertical axis passing through at least one of the substrate processing modules passes through the portion of the second section.
  • the at least one substrate processing module and the interior of the portion of the second section are aligned, at least partially, one beneath the other.
  • a substrate processing apparatus comprising substrate processing modules, a housing, a first substrate transfer robot, and a substrate holder.
  • the housing has the substrate processing modules mounted on an exterior side of the housing.
  • the housing comprises an internal main transfer area.
  • the first substrate transfer robot is connected to the housing and has a movable arm assembly located in the main transfer area for moving substrates between the main transfer area and the substrate processing modules.
  • the substrate holder is mounted to the housing and located in the main transfer area. A portion of the main transfer area in which the substrate holder is located is vertically arranged with at least one of the substrate processing modules one beneath the other.
  • a substrate processing apparatus comprising a housing, a substrate transfer robot, substrate processing modules, and a sub-enclosure member.
  • the sub-enclosure member is mounted to the housing inside an interior main substrate transfer area of the housing.
  • the sub-enclosure member is movable in a horizontal plane between a first retracted position and a second extended position.
  • the second extended position comprises the sub-enclosure member contacting an interior wall of the housing surrounding an aperture into the interior main substrate transfer area such that a door covering the aperture can be opened and substrates transferred through the aperture into and out of the sub- enclosure member without exposing the entire interior main substrate transfer area to the open aperture.
  • a substrate processing apparatus comprising a housing, a substrate transfer robot, a substrate support, and substrate processing modules.
  • the housing has a substrate transfer area including a main section and an outwardly extending section intersecting the main section in a horizontal plane.
  • the substrate transfer robot is mounted to the housing and has a movable arm assembly located in the main section of the substrate transfer area.
  • the substrate support is movably mounted to the housing in the horizontal plane between a retracted position inside the outwardly extended section of the substrate transfer area and an extended position inside the main section of the substrate transfer area. In the retracted position the substrate support is at least partially vertically aligned with at least one of the substrate processing modules.
  • a method for moving substrates between a portable substrate container and a main substrate transfer area in a substrate processing apparatus comprising steps of locating the portable substrate container at a loading and unloading area at a substrate entrance aperture into the main substrate transfer area; transferring support of the substrates from the portable substrate container directly onto a substrate support; and moving the substrates directly into the main substrate transfer area from the loading and unloading area.
  • a method for moving substrates in a substrate transport chamber of a substrate processing apparatus comprising steps of moving the substrates from a portable substrate container directly onto a substrate support, the substrate support having a position in the chamber at least partially located in a vertical axis intersecting a substrate processing module connected to an exterior side of the chamber; and moving the substrates from the substrate support by a substrate transport robot, the substrate transport robot having a movable arm assembly located in the chamber, wherein the movable arm assembly stays within the chamber when moving the substrates onto and off of the substrate support.
  • a method for moving substrates in a substrate support chamber of a substrate processing apparatus comprising steps of moving a sub-enclosure can in the substrate transport chamber adjacent an aperture into the chamber; moving substrates through the aperture into the chamber inside the sub-enclosure can; and moving the sub-enclosure can away from the aperture to allow a transport robot access to the substrates in the chamber.
  • a method for moving a substrate in a substrate transport chamber to substrate processing modules of a substrate processing apparatus comprising steps of moving a substrate transport robot located in the substrate transport chamber from a first position to a second position to pick up the substrate onto an end effector of the robot, the step of moving between the first and second positions comprising a portion of the robot extending into a vertical axis passing through one of the substrate processing modules, but not in one of the substrate processing modules; and moving the robot to move the end effector from the second position into a first one of the substrate processing modules through a side aperture in the first module.
  • Fig. 1 is a top plan view of a substrate processing apparatus comprising features of the present invention
  • Fig. 2 is a schematic perspective view of the apparatus shown in Fig. 1, but with most of the substrate processing modules not shown;
  • Fig. 3 is a partial schematic cross-section view of the apparatus shown in Fig. 2 taken along line 3-3;
  • Fig. 4 is an exploded perspective view of a portable substrate container
  • Fig. 5a is a partial schematic cross-sectional view as in Fig. 3 with the sub-enclosure can and substrate holder moved to an extended position;
  • Fig. 5b is a partial schematic cross-sectional view as in Fig. 5a with the portable substrate container moved into the sub-enclosure can;
  • Fig. 5c is a partial schematic cross-sectional view as in Fig. 5b with the portable substrate container being removed and the door to the entrance aperture being closed;
  • Fig. 5d is a partial schematic cross-sectional view as in Fig. 5c with the sub-enclosure can moved to a retracted position;
  • Fig. 5e is a schematic top view of Fig. 5d;
  • Fig. 6 is a partial schematic cross-sectional view showing both the sub-enclosure can and substrate holder with substrates thereon moved to the retracted position;
  • Fig. 7 is a perspective view of an alternate embodiment of the portable substrate container support and door opener
  • Fig. 8 is a partial schematic cross-sectional view of the container and the support and door opener shown in Fig. 7 in use with a substrate holder that is moved into the container to transport the substrates;
  • Fig. 9 is a schematic perspective view of an alternate embodiment of the substrate transport chamber.
  • Fig. 10 is a schematic perspective view of another alternate embodiment of the substrate transport chamber.
  • FIG. 1 there is shown a top plan view of a substrate processing apparatus 10 incorporating features of the present invention.
  • a substrate processing apparatus 10 incorporating features of the present invention.
  • the present invention will be described with reference to the embodiments shown in the drawings, it should be understood that the present invention can be embodied in many alternate forms of embodiments.
  • any suitable size, shape or type of elements or materials could be used.
  • the apparatus 10 generally comprises a substrate transfer chamber 12, substrate processing modules 14, and two combined door opener and support 16 assemblies for portable substrate containers or pods 74.
  • the chamber 12 generally comprises a frame 20 and a robot 22 (see Fig. 1) connected to the frame 20.
  • the substrate processing modules 14 are well known in the art and are used for processing substrates such as semiconductor wafers or flat panel display substrates.
  • the frame 20 has a first section 26 and a second section 28.
  • the modules 14 are mounted to a back side 13 of the first section 26 of chamber 12.
  • the modules 14 could be mounted to other sides and/or more than one side.
  • the assemblies 16 are mounted to the front side 15 of the chamber 12.
  • the first section 26 of the frame 20 has vertically spaced apertures 24.
  • the processing modules 14 are mounted to the frame 20 at the apertures 24.
  • vertical arrays or columns of modules 14 are attached to the frame 20.
  • the chamber 12 also has the substrate transport robot 22 (see Fig. 1) located, at least partially, inside the frame 20 for transporting substrates into, through and out of the frame 20. Any suitable type of robot could be provided in the chamber 12, but it needs to be vertically movable in the first section 26 to access and pass through the vertically spaced apertures 24.
  • the chamber 12 could also have more than one robot located in main transfer area inside the frame 20.
  • FIG. 2 shown columns of four apertures 24 on a side of the frame 20, more or less apertures could be provided on various sides, the apertures 24 could be staggered on each side, and/or more than one column of apertures could be provided on a single side.
  • the interior of second section 28 is in communication with the interior of the first section 26.
  • the second section 28 extends from the first section 26 at the bottom of the first section 26.
  • a portion of the second section 28 extends outward relative to the first section along a horizontal plane beneath the modules 14.
  • vertical axes A passing through the modules 14 pass through the second section 28.
  • the outward extended portion of the second section could be located above one or more of the processing modules 14.
  • the portion of the second section 28 extends in a rearward direction.
  • the outward extending portion of the second section could alternatively or additionally extend in other directions and could have sections on different spaced horizontal planes.
  • the chamber 12 also includes two batch substrate movers 30.
  • the two movers 30 are arranged side-by-side in the second section 28 of the frame 20.
  • Each mover 30 has a substrate holder 32, a drive 34, and a sub-enclosure can or member 36.
  • the holder 32 and sub-enclosure member 36 are separately movable relative to each other.
  • the two members 32, 36 could be fixedly connected to each other to always extend and retract in unison with each other.
  • the holder 32 includes a plurality of spaced substrate support shelves 38 for supporting individual substrates thereon.
  • the sub-enclosure member 36 surrounds the holder 32.
  • the sub-enclosure member 36 has an open front end 40, but otherwise encloses the holder 32 on all other sides.
  • the sub-enclosure member 36 also includes a front end seal 42 and a rear end seal 44.
  • the holder 32 and sub-enclosure member 36 are connected to the drive 34 by a drive rod 46.
  • An expandable seal 48 extends between the rear end of the second section 28 and the sub-enclosure member 36 around the rod 46.
  • the drive 34 can be any suitable type of drive, such as an electro-mechanical drive, for horizontally extending the rod 46 as indicated by arrow B and retracting the rod in a reverse direction. Fig.
  • FIG. 3 shows the substrate mover 30 in a retracted position wherein the holder 38 and sub-enclosure member 36 are wholly contained within the second section 28 in area C and outside area D.
  • the robot 22 in the retraced position, the robot 22 (see Fig. 1) can move in area D without the holders 32 or sub-enclosure member 36 interfering with the movement or being in a possible path of movement of the robot 22.
  • the frame 20 includes two substrate entrance apertures 50 at the front side 15 of the chamber 12.
  • the entrance apertures 50 are located in the same horizontal plane as the movers 30 and second section 28. However, the entrance apertures 50 are located on an opposite side of area D from the movers 30.
  • Movable doors 52 are connected to the frame 20 for opening and closing the apertures 50.
  • Each combined door opener and support assembly 16 generally comprises a carrier door opener 94, a support frame 96, a movable arm 98, and a drive 100 for moving the movable arm 98.
  • the carrier door opener 94 is connected to the support frame 96 and is adapted to remove and replace the door 78 with the main housing 76 of the portable container 74 as described in U.S. patent application No. 09/243,516.
  • the movable arm 98 is adapted to have the container 74 removably mounted thereon.
  • the drive 100 is adapted to horizontally move the arm 94 to move the main housing 76 of the container 74 relative to the support frame 96, as indicated by arrow E, through the aperture 50 into and out of the area D.
  • the drive 100 is preferably also able to slightly move the arm 98 vertically up and down when the main housing 76 is in the area D as indicated by arrow F.
  • the movable door 52 must be out of the way of the aperture 50 for the arm 98 and main housing 76 of the container 74 to more into and out of the middle chamber 37.
  • the container 74 has a main housing 76 and a removable side door 78.
  • the container 74 is similar to that described in U.S. patent application No. 09/243,516 which is hereby incorporated by reference in its entirety.
  • the container 74 is a FOUP (Front Opening Unified Pod) design for supporting and transporting a plurality of wafers is spaced relationship in a substantially particle free environment.
  • the container 74 has a plurality of rack members 80 for supporting the wafers generally horizontally, in a generally vertically spaced relationship. At any one time, all or only some of the rack members 80 may actually be supporting wafers. In alternate embodiments other types of portable substrate holders could be used.
  • the container 74 includes the housing 76 with a carrier port 82 for providing access to the interior 84 thereof.
  • a carrier door 78 is removably connected to the housing 76 and is movable between a closed position overlying the carrier port 82 and an open position spaced from the carrier port 82.
  • the carrier door 78 is illustrated as including a generally rectangular plate and has a peripherally extending continuous raised flange.
  • a suitable seal 86 is interposed between the flange and the carrier port for sealing the interior of the carrier 74 from the surrounding atmosphere when the carrier door is in the closed position.
  • a plurality of latch members 88 are provided on the carrier door at peripheral spaced locations movable between an extended, locking position so as to be engaged with respectively positioned locking recesses 90 on the carrier adjacent the carrier port and a retracted release position disengaged from the locking recesses 90.
  • Suitable keyway mechanisms externally indicated by latch keyways 92 are operably connected to the latch members 88 for moving the latch members between the locking position and the release position.
  • the mechanisms may be linkages or may be solenoid operated or may be of other appropriate design.
  • the latch members 88 are extended such that the carrier door is closed and locked with the flange bearing firmly against the carrier port 82 with the seal 86 interposed between the flange and the port to maintain the particle free environment interior 84 of the carrier.
  • the latch keyways 92 are horizontally oriented the latch members 88 are retracted such that the carrier door is unlocked and capable of being removed from the carrier port 82.
  • FIG. 3 An operator places the container 74 on the arm 98 at a container loading and unloading area as shown in Fig. 3.
  • a controller such as a computer, controls movement of the mover 30, robot 22, doors 52, 94 and drive 100.
  • the drive 34 is actuated to extend the sub-enclosure member 36 and holder 32 from the retracted position shown in Fig. 3 to the extended position shown in Fig. 5a.
  • the holder 32 and sub-enclosure member 36 are horizontally extended into area D.
  • the front seal 42 makes a sealing contact with the inside surface of the front wall 15.
  • the rear seal 44 makes a sealing contact with a flange 45.
  • an area D' is formed inside area D which is sealed off from the rest of the area of D.
  • the carrier door opener 94 removes the door 78 from the container 74.
  • the arm 98 is extended through the entrance aperture 50 into the area D as indicated by arrow E.
  • the container main housing 76 and substrates S therein are moved with the arm 98 into area D' .
  • the shelves 38 are located under individual ones of the substrates S inside the main housing 76.
  • the arm 98 is then lowered as indicated by arrow F to move the main housing 76 downward.
  • the substrates S are thus deposited onto the shelves 38 and are no longer supported by the rack members 80 of the main housing 76.
  • the arm 98 is then withdrawn from area D' with the container main housing 76.
  • the substrates S are left supported on the holder 32 by the shelves 38.
  • the door 52 is then moved back to its closed position to seal area D' again.
  • the sub-enclosure member 36 is then retracted back to its retracted position inside area C. Area D' is thus reintegrated with the rest of the area D.
  • the area D' is connected to a source of vacuum to evacuate air from inside area D' before the sub-enclosure member 36 is retracted.
  • the holder 32 remains in area D.
  • the robot 22 can be moved to pick up and return substrates S on the holder 32 and move the substrates between the holder 32 and the substrate processing modules 14.
  • the holder 32 and sub- enclosure member 36 are returned to their extended position shown in Fig. 5.
  • the sub-enclosure member 36 once again forms the separated area D' which is isolated from the rest of the area D. Area D' is pressurized to atmospheric pressure.
  • the door 52 is opened.
  • the arm 98 moves the container main housing 76 back into area D' and picks up the processed substrates off of the shelves 38 onto the rack members 80.
  • the arm 98 is retracted.
  • the door 52 is closed.
  • the container door 78 is reconnected to the housing 76 by the door opener 94.
  • the operator then removes the container 74 from the arm 98 and replaces it with a new container of substrates to be processed. The method is then repeated.
  • the sub-enclosure members 36 in addition to keeping the entrance apertures 50 isolated from the majority of the environment in area D when the doors 52 are open, also provides the function of a load lock.
  • area D' can be evacuated and pressurized while the sub- enclosure member 36 is extended.
  • This load lock function is for transferring the substrates between the vacuum environment of area D and the atmospheric environment outside entrance aperture 50.
  • the present invention allows the load lock chamber/function between the environment in the main transfer chamber 12 and the environment outside the chamber 12 to be vertically aligned, at least partially, with at least a portion of the robot (s) 22 used to transfer the substrates to and from the substrate processing modules 14 and vertically aligned, at least sometimes, with the main transfer area D of the frame 20.
  • the combined door opener and support assembly 16' generally comprises a frame 162 and a door opener 164.
  • the portable container 74 is positioned on the frame 162.
  • a door opener 164 is connected to the frame 162 to remove the door of the container 74.
  • the main housing 76 remains stationary on the frame 162 as the robot 160 moves the substrates into and out of the main housing 76.
  • the robot 160 includes the substrate holder 32.
  • the rod 46 is long enough to extend the holder 32 past the entrance aperture 50 into the interior of the portable substrate container 74.
  • the robot 160 is then able to raise the holder 32 as indicated by arrow H, transferring support of the substrates S from the rack members 80 onto the shelves 38, and move the holder 32 with the substrates into area D' .
  • the door 52 can then be closed and the holder 32 and/or sub-enclosure member 36 can be retracted back to their retracted positions under the processing modules 14.
  • Fig. 9 shows a schematic perspective view of an alternate embodiment of the substrate transfer chamber 200.
  • the rear wall 213 of the first section 226 has two angled sides 213a, 213b.
  • the two lateral side walls 217a, 217b also have vertically spaced apertures 224.
  • Vertical arrays of the substrate processing modules can thus be mounted on the side walls 217a, 217b as well as the sides 213a, 213b,
  • Fig. 10 shows a schematic perspective view of another alternate embodiment of the substrate transfer chamber 300.
  • the second section 328 includes a portion 328a located in front of the first section 326.
  • the first section 326 can have substrate processing modules mounted on both is rear side 313 and on its front side 315.
  • the portion 328a of the second section 328 is vertically aligned, at least partially, with the processing modules attached to the front side 315.
  • the door opener and support assemblies 16' are located at the front of the second section 328 with the entrance apertures 350 into the frame 320 being located in the portion 328a.

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

L'invention concerne un appareil (10) de traitement de substrats doté d'une chambre (12) de transfert de substrats, de modules (14) de traitement de substrats fixés à l'extérieur de la chambre, d'un robot (22) de transfert de substrats relié à la chambre et d'un support (32) de substrats disposé dans la chambre. Le robot peut transporter les substrats entre les différents modules de traitement et le support de substrats. Le support de substrats peut être relié amovible à la chambre et peut se trouver dans une position à la verticale au-dessus ou au-dessous d'au moins un des modules de traitement. Un élément (36) sous-enceinte peut être relié amovible à la chambre de façon à être disposé dans une ouverture d'entrée de la chambre lorsque l'entrée est ouverte, afin d'empêcher que l'intérieur de la chambre soit entièrement exposé à l'ouverture de l'entrée.
PCT/US2000/016288 1999-07-28 2000-06-14 Chambre de transfert de substrats dotee d'un support de substrats aligne a la verticale avec un module de traitement de substrats Ceased WO2001009011A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2001514221A JP2003506861A (ja) 1999-07-28 2000-06-14 基板処理モジュールに対して垂直に整列配置された基板ホルダを有する基板搬送チャンバ
AU57368/00A AU5736800A (en) 1999-07-28 2000-06-14 Substrate transfer chamber having a substrate holder vertically aligned with a substrate processing module

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US36276199A 1999-07-28 1999-07-28
US09/362,761 1999-07-28

Publications (1)

Publication Number Publication Date
WO2001009011A1 true WO2001009011A1 (fr) 2001-02-08

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PCT/US2000/016288 Ceased WO2001009011A1 (fr) 1999-07-28 2000-06-14 Chambre de transfert de substrats dotee d'un support de substrats aligne a la verticale avec un module de traitement de substrats

Country Status (3)

Country Link
JP (1) JP2003506861A (fr)
AU (1) AU5736800A (fr)
WO (1) WO2001009011A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002073665A3 (fr) * 2001-03-12 2003-02-27 Applied Materials Inc Distribution et traitement d'une piece a travailler dans un agencement de cadres empiles a haute capacite
EP2366287A3 (fr) * 2006-06-21 2012-05-16 Bayer CropScience AG Préparations pauvres en mousse pour la protection des plantes
US10793433B2 (en) 2011-10-11 2020-10-06 Solvay Sa Process for producing hydrogen peroxide

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6062798A (en) * 1996-06-13 2000-05-16 Brooks Automation, Inc. Multi-level substrate processing apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6062798A (en) * 1996-06-13 2000-05-16 Brooks Automation, Inc. Multi-level substrate processing apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002073665A3 (fr) * 2001-03-12 2003-02-27 Applied Materials Inc Distribution et traitement d'une piece a travailler dans un agencement de cadres empiles a haute capacite
EP2366287A3 (fr) * 2006-06-21 2012-05-16 Bayer CropScience AG Préparations pauvres en mousse pour la protection des plantes
US9215868B2 (en) 2006-06-21 2015-12-22 Bayer Intellectual Property Gmbh Low-foam preparations for crop protection
US10793433B2 (en) 2011-10-11 2020-10-06 Solvay Sa Process for producing hydrogen peroxide

Also Published As

Publication number Publication date
JP2003506861A (ja) 2003-02-18
AU5736800A (en) 2001-02-19

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