WO2001001110A1 - Arrangement for quantitative and qualitative analysis of particles in gases - Google Patents
Arrangement for quantitative and qualitative analysis of particles in gases Download PDFInfo
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- WO2001001110A1 WO2001001110A1 PCT/AT2000/000172 AT0000172W WO0101110A1 WO 2001001110 A1 WO2001001110 A1 WO 2001001110A1 AT 0000172 W AT0000172 W AT 0000172W WO 0101110 A1 WO0101110 A1 WO 0101110A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
Definitions
- the invention relates to an arrangement for the quantitative and qualitative analysis of particles in gases, in particular particles in the exhaust gas of internal combustion engines, comprising a vibration system with a vibration sensor, which is provided with a collecting electrode with a sensitive surface for the particles to be analyzed, a circuit for determining characteristic Vibration parameters as well as guidance and transport devices for the gas to be analyzed.
- the invention also relates to a method for producing a vibration sensor for such an arrangement.
- Exhaust gas analyzes are carried out specifically in the automotive industry, with the particulate content of diesel engines being one of the main approaches. Methods are known which determine the opacity of the exhaust gas or the discoloration of a filter element after passage of a certain volume of the gas to be analyzed.
- the particles are collected from the gas on an electrode surface of a piezo crystal and then released again by heating in an oxidizing atmosphere, the measured values being much too low due to the very poor adhesion of the particles on these electrode surfaces compared to the actual salary.
- the object of the present invention is therefore an arrangement for both qualitative and quantitative analysis of the particles in a gas with the greatest possible accuracy, by means of which the disadvantage of the previous measurement arrangements is avoided.
- a further task was the simple production of a vibration sensor suitable for the precise quantitative use for such an arrangement.
- the first object is achieved in that the collecting electrode is designed as an open-pore structure.
- the particles to be measured can thus get caught in the cavities of the open-pore structure and thus adhere optimally to the collecting surface.
- the pore size is advantageously matched to the expected size of the particles to be measured.
- the open-pore structure consists of a catalytic metal, preferably platinum or palladium.
- the open-pore structure is provided on a non-vibration-active part of the vibration sensor.
- the non-vibration-active part is advantageously provided opposite this clamping point.
- a particularly advantageous embodiment is characterized in that the vibration sensor is a piezoelectric resonator.
- the method for producing a suitable vibration sensor is characterized by a step in which an open-pore structure is applied to this vibration sensor or a part of it that is not active in vibration.
- the open-pore structure is produced by sputtering, the pore size of the resulting coating being able to be influenced by appropriately adapting the substrate temperature, the gas pressure or the bias voltage.
- the open-pore structure is produced by vapor deposition.
- the pore size can be adjusted via the angle of incidence of the evaporating particles to the substrate surface.
- the open-pore structure can also be produced in that, before or during the coating of the carrier with the material for the collecting surface or between two coating processes, additional foreign particles are applied and then removed again to produce the pore structure.
- the pore size can be set here via the size of the foreign particles.
- This gas is brought into a chamber in which there is an oscillation system, in which there is a vibration system, via conventional and not shown sampling devices, containing conventional guide and transport devices, suction pumps and the like for the gas loaded with the particles 1 to be analyzed the mass loading of a sensitive surface of a vibration sensor with the particles to be analyzed from the gas leads to a change in the acoustic parameters.
- Both pulsed and continuous vibration excitation can be used. These parameters include, for example, the thickness, the surface mass density, the mechanical impedance at the surface or the speed of sound in the area of the surface, depending on the type of vibration system, i.e. Volume or surface vibration systems, changes in the resonance frequency or the associated period, the transit time of a sound pulse or the like result.
- One of the vibration systems typically used contains a piezoelectric resonator with a piezoelectric vibration sensor 2.
- the piezoelectric resonator is still u. a. provided with an oscillator circuit 3 and a circuit arrangement 4 for controlling the oscillator circuit 3 as well as for measuring data acquisition, storage and display.
- the collecting electrode 5 On the piezoelectric vibration sensor 2 are a collecting electrode 5 for the particles 1 to be analyzed and on the side of the collecting electrode 5 opposite Resonators 2 applied a counter electrode 6.
- the collecting electrode 5 is an open-pore one
- the size of the pores 7 of the collecting electrode 5 can be adapted to the expected size of the particles to be measured, for which purpose the process parameters are selected accordingly when producing a suitable piezoelectric vibration sensor 2, especially the collecting electrode 5. With sputtered layers, the variation of
- Substrate temperature, gas pressure and / or bias voltage the pore size can be controlled.
- a substrate temperature of 400 ° C, a gas pressure of 3.5 * 10 " 5 mbar and a bias voltage of 24V with a sputtering power of 870W in a 100nm thick gold layer on a GaPO / j 'resonator results in pores with a lateral expansion between 50 and 400nm.
- Particles to the substrate surface are adjusted to the pore size, the pore size generally decreasing with increasing angle of incidence.
- the pore size of the finished coating can also be controlled by the size of these foreign particles by means of foreign particles which are stored and then removed before or during the application of the material for the collecting electrode. However, these foreign particles can also be applied between two coating processes and removed after the second process.
- Vibration sensor 2 may be provided, but could also be applied to a non-piezoelectrically active extension, preferably and with an optimal effect on the
- Collecting electrode surface 5 possible by burning off the collected particles, at most during the heating process by continuously recording the resonance frequency and temperature, an analysis of the type and subsets of the particles collected can be performed.
- the piezoelectric resonator described can be constructed on the basis of volumes (BAW - Bulk Acoustic Waves) - or surface vibration systems (SAW - Surface Acoustic Waves), whereby the mass loading of the piezoelectric vibration sensor 2 with the particles to be analyzed leads to a change in the resonance frequency or the associated period comes.
- SAW Surface vibration systems
- SAW are of primary importance for other vibration systems in which the transit time of a sound pulse, which changes depending on the mass load, is measured.
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- Life Sciences & Earth Sciences (AREA)
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- General Health & Medical Sciences (AREA)
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Abstract
Description
„Anordnung zur quantitativen und qualitativen Analyse von Partikeln in Gasen" "Arrangement for the quantitative and qualitative analysis of particles in gases"
Die Erfindung betrifft eine Anordnung zur quantitativen und qualitativen Analyse von Partikeln in Gasen, insbesondere von Partikeln im Abgas von Verbrennungskraftmaschinen, umfassend ein Schwingsystem mit einem Schwingsensor, der mit einer Auffangelektrode mit sensitiver Oberfläche für die zu analysierenden Partikel versehen ist, eine Schaltung zur Ermittlung charakteristischer Schwingungsparameter sowie Leit- und Transporteinrichtungen für das zu analysierende Gas. Die Erfindung betrifft weiters auch ein Verfahren zur Herstellung eines Schwingsensors für eine derartige Anordnung.The invention relates to an arrangement for the quantitative and qualitative analysis of particles in gases, in particular particles in the exhaust gas of internal combustion engines, comprising a vibration system with a vibration sensor, which is provided with a collecting electrode with a sensitive surface for the particles to be analyzed, a circuit for determining characteristic Vibration parameters as well as guidance and transport devices for the gas to be analyzed. The invention also relates to a method for producing a vibration sensor for such an arrangement.
In vielen Bereichen der Technik werden Luft oder andere Gase auf ihren Gehalt an Partikeln analysiert. Speziell auf dem Sektor der Automobilindustrie werden Abgasanalysen durchgeführt, wobei insbesondere der Partikelgehalt von Dieselmotoren einer der Hauptansatzpunkte ist. Bekannt sind Verfahren, welche die Opazität des Abgases bestimmen oder die Verfärbung eines Filterelementes nach Durchgang eines bestimmten Volumens des zu analysierenden Gases.In many areas of technology, air or other gases are analyzed for their content of particles. Exhaust gas analyzes are carried out specifically in the automotive industry, with the particulate content of diesel engines being one of the main approaches. Methods are known which determine the opacity of the exhaust gas or the discoloration of a filter element after passage of a certain volume of the gas to be analyzed.
Weiters ist es bekannt, mittels Impaktion und elektrostatischer Ausfällung die zu bestimmenden Teilchen auf der Oberfläche eines piezoelektrischen Resonators zu sammeln und über die Änderung von dessen Resonanzfrequenz die Massenbeladung zu errechnen. Damit können Teilchen im Bereich von 10nm bis 10μm erfasst werden. Allerdings sind nach Studien zu diesen Verfahren solche Systeme für die genaue Erfassung speziell von Partikeln im Abgas von Dieselmotoren ungeeignet, da sie im Vergleich mit anderen, erprobten Meßmethoden teilweise nur 2%, günstigstenfalls 13% des tatsächlichen Wertes anzeigen, da die Partikel extrem schlecht auf den bislang eingesetzten Elektrodenoberflächen haften. Auch beim Verfahren und der Anordnung der EP 0 779 510 werden die Partikel aus dem Gas auf einer Elektrodenfläche eines Piezokristalls gesammelt und anschließend durch Erwärmen in oxidierender Atmosphäre wieder freigesetzt, wobei wieder durch die sehr schlechte Haftung der Partikel auf diesen Elektrodenflächen die Messwerte viel zu niedrig gegenüber dem tatsächlichen Gehalt ausfallen. Die Aufgabe der vorliegenden Erfindung ist daher eine Anordnung zur sowohl qualitativen aber auch quantitative Analyse der Partikel in einem Gas mit größtmöglicher Genauigkeit, durch die der Nachteil der bisherigen Messanordnungen vermieden wird. Eine weitere Aufgabe war die einfache Herstellung eines auch für die genaue quantitative geeigneten Schwingsensors für eine derartige Anordnung.Furthermore, it is known to collect the particles to be determined on the surface of a piezoelectric resonator by means of impaction and electrostatic precipitation and to calculate the mass loading by changing its resonance frequency. Particles in the range from 10nm to 10μm can be detected. However, according to studies on these methods, such systems are unsuitable for the precise detection of particulate matter in the exhaust gas of diesel engines, because in comparison to other, tried-and-tested measuring methods they sometimes only show 2%, at best 13% of the actual value, because the particles are extremely poor stick to the previously used electrode surfaces. In the process and arrangement of EP 0 779 510, too, the particles are collected from the gas on an electrode surface of a piezo crystal and then released again by heating in an oxidizing atmosphere, the measured values being much too low due to the very poor adhesion of the particles on these electrode surfaces compared to the actual salary. The object of the present invention is therefore an arrangement for both qualitative and quantitative analysis of the particles in a gas with the greatest possible accuracy, by means of which the disadvantage of the previous measurement arrangements is avoided. A further task was the simple production of a vibration sensor suitable for the precise quantitative use for such an arrangement.
Die erste Aufgabe wird erfindungsgemäß dadurch gelöst, dass die Auffangelektrode als offenporige Struktur ausgebildet ist. Die zu messenden Partikel können sich so in den Hohlräumen der offenporigen Struktur verhaken und haften damit optimal an der Auffangfläche an. Vorteilhafterweise wird die Porengröße auf die zu erwartende Größe der zu messenden Partikel abgestimmt.The first object is achieved in that the collecting electrode is designed as an open-pore structure. The particles to be measured can thus get caught in the cavities of the open-pore structure and thus adhere optimally to the collecting surface. The pore size is advantageously matched to the expected size of the particles to be measured.
Vorzugsweise ist vorgesehen, dass die offenporige Struktur aus einem katalytischen Metall, vorzugsweise Platin oder Palladium, besteht.It is preferably provided that the open-pore structure consists of a catalytic metal, preferably platinum or palladium.
Gemäß einem weiteren Merkmal der Erfindung ist die offenporige Struktur auf einem nicht schwingungsaktiven Teil des Schwingsensors vorgesehen. Dabei ist im Falle von einseitig eingespannten Sensoren der nicht schwingungsaktive Teil vorteilhafterweise gegenüberliegend von dieser besagten Einspannstelle vorgesehen.According to a further feature of the invention, the open-pore structure is provided on a non-vibration-active part of the vibration sensor. In the case of sensors clamped on one side, the non-vibration-active part is advantageously provided opposite this clamping point.
Eine besonders vorteilhafte Ausführungsform ist dadurch gekennzeichnet, dass der Schwingsensor ein piezoelektrischer Resonator ist.A particularly advantageous embodiment is characterized in that the vibration sensor is a piezoelectric resonator.
Das Verfahren zur Herstellung eines geeigneten Schwingsensors ist erfindungsgemäß durch einen Schritt gekennzeichnet, in dem auf diesen Schwingsensor oder einem nicht schwingungsaktiven Teil davon eine offenporige Struktur aufgebracht wird.According to the invention, the method for producing a suitable vibration sensor is characterized by a step in which an open-pore structure is applied to this vibration sensor or a part of it that is not active in vibration.
Gemäß einer ersten vorteilhaften Variante wird die offenporige Struktur durch Sputtern hergestellt, wobei durch entsprechendes Anpassen der Substrattemperatur, des Gasdruckes oder der Biasspannung die Porengröße der entstehenden Beschichtung beeinflußt werden kann. Andererseits könnte gemäß einer weiteren Ausführungsform der Erfindung auch vorgesehen sein, dass die offenporige Struktur durch Aufdampfen hergestellt wird. Hier lässt sich über den Einfallswinkel der verdampfenden Teilchen zur Substratoberfläche die Porengröße einstellen. Die offenporige Struktur kann gemäß einer weiteren Variante der Erfindung auch dadurch hergestellt werden, dass vor oder während der Beschichtung des Trägers mit dem Material für die Auffangfläche bzw. zwischen zwei Beschichtungsvorgängen zusätzlich Fremdteilchen aufgebracht und anschließend zur Erzeugung der Porenstruktur wieder entfernt werden. Hier kann über die Größe der Fremdteilchen die Porengröße eingestellt werden.According to a first advantageous variant, the open-pore structure is produced by sputtering, the pore size of the resulting coating being able to be influenced by appropriately adapting the substrate temperature, the gas pressure or the bias voltage. On the other hand, according to a further embodiment of the invention, it could also be provided that the open-pore structure is produced by vapor deposition. Here the pore size can be adjusted via the angle of incidence of the evaporating particles to the substrate surface. According to a further variant of the invention, the open-pore structure can also be produced in that, before or during the coating of the carrier with the material for the collecting surface or between two coating processes, additional foreign particles are applied and then removed again to produce the pore structure. The pore size can be set here via the size of the foreign particles.
In der nachfolgenden Beschreibung soll die Erfindung näher erläutert werden, wobei die beigefügte Zeichnungsfigur in schematischer Darstellung eine Ausführungsform mit einem piezoelektrischen Resonator als Schwingsensor einer erfindungsgemäßen Anordnung darstellt.The invention is to be explained in more detail in the following description, the attached drawing figure schematically illustrating an embodiment with a piezoelectric resonator as a vibration sensor of an arrangement according to the invention.
Über herkömmliche und nicht dargestellte Probennahme-Vorrichtungen, enthaltend übliche Leit- und Transporteinrichtungen, Ansaugpumpen und dgl. für das mit den zu analysierenden Partikeln 1 beladene Gas, wird dieses Gas in eine Kammer gebracht, in dem sich ein Schwingsystem befindet, in welchem es durch die Massenbeladung einer sensitiven Oberfläche eines Schwingsensors mit dem zu analysierenden Partikeln aus dem Gas zu einer Veränderung der akustischen Parameter kommt. Dabei kann sowohl die gepulste als auch kontinuierliche Schwingungsanregung verwendet werden. Diese Parameter umfassen beispielsweise die Dicke, die Oberflächenmassendichte, die mechanische Impedanz an der Oberfläche oder die Schallgeschwindigkeit im Bereich der Oberfläche, wobei je nach Art des Schwingsystems, d.h. Volums- oder Oberflächenschwingsysteme, Änderungen der Resonanzfrequenz bzw. der zugehörigen Periodendauer, der Laufzeit eines Schallpulses od. dgl. resultieren. Diese Änderungen werden am elektroakustischen Wandler des Schwingsystems detektiert und dann in an sich bekannter Weise zur Bestimmung der Massenbeladung herangezogen. Eines der typischerweise verwendeten Schwingsysteme enthält einen piezoelektrischen Resonator mit einem piezoelektrischen Schwingsensor 2. Der piezoelektrische Resonator ist noch u. a. mit einem Oszillatorkreis 3 und einer Schaltungsanordnung 4 zur Steuerung des Oszillatorkreises 3 sowie zur Messdatenerfassung, -speicherung und -anzeige versehen.This gas is brought into a chamber in which there is an oscillation system, in which there is a vibration system, via conventional and not shown sampling devices, containing conventional guide and transport devices, suction pumps and the like for the gas loaded with the particles 1 to be analyzed the mass loading of a sensitive surface of a vibration sensor with the particles to be analyzed from the gas leads to a change in the acoustic parameters. Both pulsed and continuous vibration excitation can be used. These parameters include, for example, the thickness, the surface mass density, the mechanical impedance at the surface or the speed of sound in the area of the surface, depending on the type of vibration system, i.e. Volume or surface vibration systems, changes in the resonance frequency or the associated period, the transit time of a sound pulse or the like result. These changes are detected on the electroacoustic transducer of the vibration system and then used in a manner known per se to determine the mass loading. One of the vibration systems typically used contains a piezoelectric resonator with a piezoelectric vibration sensor 2. The piezoelectric resonator is still u. a. provided with an oscillator circuit 3 and a circuit arrangement 4 for controlling the oscillator circuit 3 as well as for measuring data acquisition, storage and display.
Auf dem piezoelektrischen Schwingsensor 2 sind eine Auffangelektrode 5 für die zu analysierenden Partikel 1 und auf der der Auffangelektrode 5 gegenüberliegenden Seite des Resonators 2 eine Gegenelektrode 6 aufgebracht. Die Auffangelektrode 5 ist als offenporigeOn the piezoelectric vibration sensor 2 are a collecting electrode 5 for the particles 1 to be analyzed and on the side of the collecting electrode 5 opposite Resonators 2 applied a counter electrode 6. The collecting electrode 5 is an open-pore one
Struktur mit Poren 7 ausgeführt, in welchen Poren 7 sich die Partikel 1 verhaken, die durch elektrostatisches Ausfällen oder durch Impaktion auf dem piezoelektrischen Resonator 2 gesammelt werden.Structure with pores 7, in which pores 7 the particles 1 get caught, which are collected by electrostatic precipitation or by impaction on the piezoelectric resonator 2.
Die Größe der Poren 7 der Auffangelektrode 5 kann an die zu erwartende Größe der zu messenden Partikeln angepasst werden, wozu bei der Herstellung eines geeigneten piezoelektrischen Schwingsensors 2, speziell der Auffangelektrode 5, die Verfahrensparameter entsprechend gewählt werden. So kann bei gesputterten Schichten durch die Variation vonThe size of the pores 7 of the collecting electrode 5 can be adapted to the expected size of the particles to be measured, for which purpose the process parameters are selected accordingly when producing a suitable piezoelectric vibration sensor 2, especially the collecting electrode 5. With sputtered layers, the variation of
Substrattemperatur, Gasdruck und/oder Biasspannung die Porengröße gesteuert werden.Substrate temperature, gas pressure and / or bias voltage the pore size can be controlled.
Beispielsweise ergibt eine Substrattemperatur von 400°C, ein Gasdruck von 3,5*10"5 mbar und einer Biasspannung von 24V bei einer Sputterleistung von 870W in einer 100nm dicken Goldschicht auf einem GaPO/j'Resonator Poren mit einer lateralen Ausdehnung zwischen 50 und 400nm. Bei aufgedampften Schichten kann durch den Einfallswinkel der verdampfendenFor example, a substrate temperature of 400 ° C, a gas pressure of 3.5 * 10 " 5 mbar and a bias voltage of 24V with a sputtering power of 870W in a 100nm thick gold layer on a GaPO / j 'resonator results in pores with a lateral expansion between 50 and 400nm. With vapor-deposited layers, the angle of incidence of the evaporating
Teilchen zur Substratoberfläche die Porengröße eingestellt werden, wobei die Porengröße im allgemeinen mit steigendem Einfallswinkel sinkt. Auch durch vor oder während der Aufbringung des Materials für die Auffangelektrode eingelagerte und anschließend entfernte Fremdteilchen kann über die Größe dieser Fremdteilchen die Porengröße der fertigen Beschichtung gesteuert werden. Diese Fremdteilchen können aber auch zwischen zwei Beschichtungsvorgängen aufgebracht und nach dem jeweils zweiten Vorgang entfernt werden.Particles to the substrate surface are adjusted to the pore size, the pore size generally decreasing with increasing angle of incidence. The pore size of the finished coating can also be controlled by the size of these foreign particles by means of foreign particles which are stored and then removed before or during the application of the material for the collecting electrode. However, these foreign particles can also be applied between two coating processes and removed after the second process.
Selbstverständlich muss die Auffangelektrode 5, und das gilt auch für dieOf course, the collecting electrode 5, and this also applies to the
Gegenelektrode 6, nicht unmittelbar auf dem aktiven Abschnitt des piezoelektrischenCounter electrode 6, not directly on the active section of the piezoelectric
Schwingsensors 2 vorgesehen sein, sondern könnte auch auf einer nicht piezoelektrisch aktiven Verlängerung aufgebracht sein, vorzugsweise und bei optimaler Auswirkung auf dieVibration sensor 2 may be provided, but could also be applied to a non-piezoelectrically active extension, preferably and with an optimal effect on the
Veränderung der Resonanzfrequenz auf der der Einspannung gegenüberliegenden Seite.Change in the resonance frequency on the side opposite the clamping.
Bei Verwendung von hochtemperaturtauglichen Materialien, etwa eines schon erwähnten GaPO^Resonators mit einer Platinelektrode, ist die Reinigung derWhen using materials suitable for high temperatures, such as a GaPO ^ resonator with a platinum electrode, the cleaning of the
Auffangelektrodenfläche 5 durch Abbrennen der gesammelten Teilchen möglich, wobei allenfalls während des Aufheizvorganges durch laufende Aufzeichnung der Resonanzfrequenz und Temperatur auch eine Analyse über die Art und die Teilmengen der vorhandenen, gesammelten Partikel durchgeführt werden kann.Collecting electrode surface 5 possible by burning off the collected particles, at most during the heating process by continuously recording the resonance frequency and temperature, an analysis of the type and subsets of the particles collected can be performed.
Der beschriebene piezoelektrische Resonator kann auf Basis von Volums (BAW - Bulk Acoustic Waves)- oder Oberflächenschwingsystemen (SAW - Surface Acoustic Waves) aufgebaut sein, wobei es durch die Massenbeladung des piezoelektrischen Schwingsensors 2 mit den zu analysierenden Partikeln zu einer Veränderung der Resonanzfrequenz bzw. der zugehörigen Periodendauer kommt. Für andere Schwingsysteme, bei welchen die je nach Massenbeladung veränderte Laufzeit eines Schallpulses gemessen wird, sind in erster Linie Oberflächenschwingsysteme (SAW) von Bedeutung. The piezoelectric resonator described can be constructed on the basis of volumes (BAW - Bulk Acoustic Waves) - or surface vibration systems (SAW - Surface Acoustic Waves), whereby the mass loading of the piezoelectric vibration sensor 2 with the particles to be analyzed leads to a change in the resonance frequency or the associated period comes. Surface vibration systems (SAW) are of primary importance for other vibration systems in which the transit time of a sound pulse, which changes depending on the mass load, is measured.
Claims
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AU55094/00A AU5509400A (en) | 1999-06-23 | 2000-06-21 | Arrangement for quantitative and qualitative analysis of particles in gases |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ATGM439/99 | 1999-06-23 | ||
| AT43999U AT3690U1 (en) | 1999-06-23 | 1999-06-23 | ARRANGEMENT FOR QUANTITATIVE AND QUALITATIVE ANALYSIS OF PARTICLES IN GASES |
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| WO2001001110A1 true WO2001001110A1 (en) | 2001-01-04 |
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| PCT/AT2000/000172 Ceased WO2001001110A1 (en) | 1999-06-23 | 2000-06-21 | Arrangement for quantitative and qualitative analysis of particles in gases |
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| Country | Link |
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| AT (1) | AT3690U1 (en) |
| AU (1) | AU5509400A (en) |
| WO (1) | WO2001001110A1 (en) |
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| WO2018087535A1 (en) * | 2016-11-08 | 2018-05-17 | Rentokil Initial 1927 Plc | Dirt sensor |
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| DE3327159A1 (en) * | 1983-07-28 | 1985-02-07 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Sensor for measuring a vapour concentration |
| EP0264338A2 (en) * | 1986-10-14 | 1988-04-20 | Sermatech International Inc. | Porous coatings, products and method of manufacture |
| US5589396A (en) * | 1990-09-11 | 1996-12-31 | Sandia Corporation | Coatings with controlled porosity and chemical properties |
| EP0779510A2 (en) * | 1995-11-21 | 1997-06-18 | Sun Electric Uk Ltd. | Method and apparatus for analysis of particulate content of gases |
| US5827947A (en) * | 1997-01-17 | 1998-10-27 | Advanced Technology Materials, Inc. | Piezoelectric sensor for hydride gases, and fluid monitoring apparatus comprising same |
-
1999
- 1999-06-23 AT AT43999U patent/AT3690U1/en not_active IP Right Cessation
-
2000
- 2000-06-21 WO PCT/AT2000/000172 patent/WO2001001110A1/en not_active Ceased
- 2000-06-21 AU AU55094/00A patent/AU5509400A/en not_active Abandoned
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|---|---|---|---|---|
| US3561253A (en) * | 1969-03-26 | 1971-02-09 | Thermo Systems Inc | Apparatus and method of measurement of particulate mass |
| US4091184A (en) * | 1977-08-19 | 1978-05-23 | The United States Of America As Represented By The Secretary Of The Air Force | High power, rechargeable, pile type silver zinc battery |
| DE3327159A1 (en) * | 1983-07-28 | 1985-02-07 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Sensor for measuring a vapour concentration |
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| US5589396A (en) * | 1990-09-11 | 1996-12-31 | Sandia Corporation | Coatings with controlled porosity and chemical properties |
| EP0779510A2 (en) * | 1995-11-21 | 1997-06-18 | Sun Electric Uk Ltd. | Method and apparatus for analysis of particulate content of gases |
| US5827947A (en) * | 1997-01-17 | 1998-10-27 | Advanced Technology Materials, Inc. | Piezoelectric sensor for hydride gases, and fluid monitoring apparatus comprising same |
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| BAGLIN J E E: "THIN FILM ADHESION: NEW POSSIBILITIES FOR INTERFACE ENGINEERING", MATERIALS SCIENCE AND ENGINEERING B,CH,ELSEVIER SEQUOIA, LAUSANNE, vol. 1, no. 1, 1 August 1988 (1988-08-01), pages 1 - 7, XP000032878, ISSN: 0921-5107 * |
Also Published As
| Publication number | Publication date |
|---|---|
| AU5509400A (en) | 2001-01-31 |
| AT3690U1 (en) | 2000-06-26 |
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