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WO2001061400A3 - Two-dimensional micro-mirror array enhancements - Google Patents

Two-dimensional micro-mirror array enhancements Download PDF

Info

Publication number
WO2001061400A3
WO2001061400A3 PCT/US2001/005309 US0105309W WO0161400A3 WO 2001061400 A3 WO2001061400 A3 WO 2001061400A3 US 0105309 W US0105309 W US 0105309W WO 0161400 A3 WO0161400 A3 WO 0161400A3
Authority
WO
WIPO (PCT)
Prior art keywords
deflection
micro
sensor
dimensional micro
conical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2001/005309
Other languages
French (fr)
Other versions
WO2001061400A2 (en
WO2001061400A9 (en
Inventor
Timothy G Slater
Armand P Neukermans
Sateesh S Bajikar
James P Downing
Marc R Schuman
Sam Calmes
Alexander B Romansovsky
John Green
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xros Inc
Original Assignee
Xros Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xros Inc filed Critical Xros Inc
Priority to CA002400294A priority Critical patent/CA2400294A1/en
Priority to AU2001260986A priority patent/AU2001260986A1/en
Priority to EP01934837A priority patent/EP1342121A2/en
Publication of WO2001061400A2 publication Critical patent/WO2001061400A2/en
Anticipated expiration legal-status Critical
Publication of WO2001061400A9 publication Critical patent/WO2001061400A9/en
Publication of WO2001061400A3 publication Critical patent/WO2001061400A3/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. Torsion sensors (244) are provided along the axes of rotation to control deflection of the quadrant deflection electrodes. The shielded sensor structure (240) includes a silicon layer (241), an insulating layer (242) and a metal layer (243). The structure further includes a sensor implant resistor (244) in the silicon layer (241) and a shield (245) that is applied over the sensor implant resistor (244) to stabilise sensor output and eliminate light sensitivity.
PCT/US2001/005309 2000-02-17 2001-02-16 Two-dimensional micro-mirror array enhancements Ceased WO2001061400A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CA002400294A CA2400294A1 (en) 2000-02-17 2001-02-16 Two-dimensional micro-mirror array enhancements
AU2001260986A AU2001260986A1 (en) 2000-02-17 2001-02-16 Two-dimensional micro-mirror array enhancements
EP01934837A EP1342121A2 (en) 2000-02-17 2001-02-16 Two-dimensional micro-mirror array enhancements

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
US18324600P 2000-02-17 2000-02-17
US18311700P 2000-02-17 2000-02-17
US60/183,246 2000-02-17
US60/183,117 2000-02-17
US20361700P 2000-05-11 2000-05-11
US60/203,617 2000-05-11
US20775200P 2000-05-30 2000-05-30
US60/207,752 2000-05-30
US71594500A 2000-11-16 2000-11-16
US09/715,945 2000-11-16

Publications (3)

Publication Number Publication Date
WO2001061400A2 WO2001061400A2 (en) 2001-08-23
WO2001061400A9 WO2001061400A9 (en) 2002-10-10
WO2001061400A3 true WO2001061400A3 (en) 2003-07-10

Family

ID=27539092

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/005309 Ceased WO2001061400A2 (en) 2000-02-17 2001-02-16 Two-dimensional micro-mirror array enhancements

Country Status (4)

Country Link
EP (1) EP1342121A2 (en)
AU (1) AU2001260986A1 (en)
CA (1) CA2400294A1 (en)
WO (1) WO2001061400A2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6788981B2 (en) * 2001-02-07 2004-09-07 Movaz Networks, Inc. Multiplexed analog control system for electrostatic actuator array
EP1444543B1 (en) * 2001-10-19 2008-04-23 ION Geophysical Corporation Digital optical switch apparatus and process for manufacturing same
EP1518822A3 (en) * 2001-12-06 2007-02-28 Microfabrica Inc. Complex microdevices and apparatus and methods for fabricating such devices
US7110635B2 (en) 2002-05-28 2006-09-19 Jds Uniphase Inc. Electrical x-talk shield for MEMS micromirrors
CA2429508C (en) 2002-05-28 2013-01-08 Jds Uniphase Inc. Piano mems micromirror
US6968101B2 (en) 2002-05-28 2005-11-22 Jds Uniphase Inc. Electrode configuration for piano MEMs micromirror
US7110637B2 (en) 2002-05-28 2006-09-19 Jds Uniphase Inc. Two-step electrode for MEMs micromirrors
US7302131B2 (en) 2002-05-28 2007-11-27 Jds Uniphase Inc. Sunken electrode configuration for MEMs Micromirror
EP1479647B1 (en) * 2003-05-23 2009-02-25 JDS Uniphase Inc. Electrical cross-talk shield for MEMs micromirrors
US7263252B2 (en) 2003-07-28 2007-08-28 Olympus Corporation Optical switch and method of controlling optical switch

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US5648618A (en) * 1993-10-18 1997-07-15 Armand P. Neukermans Micromachined hinge having an integral torsion sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US5648618A (en) * 1993-10-18 1997-07-15 Armand P. Neukermans Micromachined hinge having an integral torsion sensor

Also Published As

Publication number Publication date
CA2400294A1 (en) 2001-08-23
WO2001061400A2 (en) 2001-08-23
EP1342121A2 (en) 2003-09-10
AU2001260986A1 (en) 2001-08-27
WO2001061400A9 (en) 2002-10-10

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