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WO2001053032A1 - Dispositif de maintien pour transducteur a ultrasons - Google Patents

Dispositif de maintien pour transducteur a ultrasons Download PDF

Info

Publication number
WO2001053032A1
WO2001053032A1 PCT/DE2001/000245 DE0100245W WO0153032A1 WO 2001053032 A1 WO2001053032 A1 WO 2001053032A1 DE 0100245 W DE0100245 W DE 0100245W WO 0153032 A1 WO0153032 A1 WO 0153032A1
Authority
WO
WIPO (PCT)
Prior art keywords
clamping ring
holding device
ultrasonic transducer
ultrasonic
transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2001/000245
Other languages
German (de)
English (en)
Inventor
Hans-Jürgen HESSE
Jörg WALLASCHEK
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hesse and Knipps GmbH
Original Assignee
Hesse and Knipps GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hesse and Knipps GmbH filed Critical Hesse and Knipps GmbH
Priority to AU2001235352A priority Critical patent/AU2001235352A1/en
Priority to DE10190130T priority patent/DE10190130D2/de
Publication of WO2001053032A1 publication Critical patent/WO2001053032A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
    • B23K20/106—Features related to sonotrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B3/00—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78313—Wedge

Definitions

  • the invention relates to a holding device for attaching an ultrasound transducer to a bonding head of an ultrasound wire bonding device, a sonotrode (wedge) being arranged at one end of the ultrasound transducer and an ultrasound vibration generator being arranged at the other end thereof.
  • Ultrasonic wire bonding devices or the like are used to produce electrical connections between bond pads on a semiconductor chip and contacts on carrier elements. used by mounting wire bridges between these contacts.
  • the wire bridges are assembled by attaching the wire to the contacts using ultrasonic welding.
  • the bond wire is welded to the respective contact with the aid of the wedge (bond wedge) attached to the ultrasonic transducer (sonotrode) under the action of the ultrasonic vibrations generated by the ultrasonic vibration generator and transmitted to the wedge via the ultrasonic transducer.
  • the ultrasonic transducer is therefore used to transmit ultrasonic vibrations from the ultrasonic vibration generator to the sonotrode, an amplitude transformation taking place at the same time. Since the transducer is intended to conduct the ultrasonic vibrations initiated by the ultrasonic vibration generator m mainly in the form of longitudinal vibrations to the sonotrode, care must be taken to ensure that no energy losses, for example due to steaming, or the oscillations are not otherwise disturbed. These can be reflected vibrations, for example, which are superimposed on the vibration generated by the ultrasonic vibration generator.
  • the transducer is usually fastened in such a way that it is clamped in an oscillation node in a receptacle.
  • a suitable vibration node can be easily determined for the resonance case, that is to say at the intended operating frequency. If the transducer is clamped in one of the vibration nodes, the vibration propagation is not impeded, at least in the longitudinal direction.
  • EP 0 857 535 A1 An example of such a transducer attachment is shown in EP 0 857 535 A1, which relates to an ultrasound bonding head with an ultrasound transducer attached to it.
  • the transducer is held here in clamping jaws which are clamped against one another by a screw connection.
  • Very similar solutions can also be found in US Pat. Nos. 4,817,848 and 4,653,681.
  • transducer fastenings have the disadvantage, however, that when the transducer is excited to vibrate, radial vibrations are generated in addition to the desired longitudinal oscillations, which are then transmitted to other elements, for example via the transducer fastening, and also generate vibrations there. The result is in any case a disturbance in the vibration behavior of the transducer and possibly the emission of disturbing noises.
  • the resonance frequency shifts under load, which is a result of the constantly changing damping during the bonding process, so that the vibration nodes also shift to the same extent, if only slightly. The result is that the transducer is temporarily clamped outside of the vibration node, so to speak, and that undefined vibration ratios actually arise with respect to the vibration transmission, which can negatively influence the result of the bonding process.
  • the invention is therefore based on the object of providing a transducer attachment in which the difficulties / disadvantages of the prior art shown do not occur.
  • a clamping ring is assigned to the ultrasonic transducer, which is arranged in a vibration node of the unit consisting of ultrasonic transducer, ultrasonic vibration generator and wedge, in that a clamping device belonging to the bonding head comprises the clamping ring on the outer circumference in a positive and non-positive manner and that the clamping ring is provided with a damping device for damping radial vibrations.
  • the clamping ring can be designed as a separate component, which is inserted non-positively between the end of the ultrasound transducer and the vibration generator. This can be done with a clamping screw, with which both the ultrasonic vibration generator and the clamping ring are attached to the ultrasonic transducer. In a variant of the invention, it is also possible to design the ultrasonic transducer and the clamping ring as one unit.
  • the damping device of the clamping member preferably has elements similar to fixed body joints.
  • the damping device of the clamping arm consists of at least two nng-shaped recesses, which are alternately made concentrically in the front and rear end faces of the clamping arm, so that, seen in section, a meandering structure is created.
  • This configuration has the particular advantage that, on the one hand, a very good damping of radial oscillations is achieved and, on the other hand, that the required mechanical rigidity of the clamp and thus the safe reception of the ultrasound transducers is still guaranteed.
  • the clamping ring is preferably made of metal and can also be made of the same material as the ultrasonic transducer.
  • the clamping ring consists of a material with higher damping properties.
  • the clamping ring can be made of a softer material than the ultrasonic transducer. Suitable materials for this are aluminum or brass, which have a particularly high damping effect.
  • FIG. 1 shows a transducer / ultrasonic1-Schwmger / Wedge-Emhe ⁇ t equipped with a clamping ring according to the invention
  • Fig. 2 shows a transducer / ultrasonic Schwmger / Wedge unit, in which the clamping ring is integral on the transducer is molded.
  • the ultrasonic transducer 1 shows an ultrasonic transducer 1 in which an ultrasonic vibration generator 2 is arranged at one end and a wedge 3 is arranged at the other narrow end.
  • the ultrasonic vibration generator 2 and the wedge 3 to a wire bond head (not shown) of an ultrasonic wire bond device by means of a conventional clamping device belonging to an ultrasonic bond head, one has to be attached to the ultrasonic transducer 1 Clamping ring 4 attached.
  • This clamping ring 4 is arranged in a vibration node of the unit, so that the clamping has no influence on the vibration behavior of the unit consisting of the ultrasonic transducer 1 and the ultrasonic vibration generator 2.
  • the clamping ring 4 is fastened as a separate component between the ultrasonic vibration generator 2 and the ultrasonic vibration transmitter 1 with a clamping screw 5, which in itself serves to fasten the ultrasonic vibration generator 2.
  • the clamping ring 4 is provided with a damping device 8.
  • the damping device 8 of the clamping ring 4 consists of at least two annular recesses 6, 7, which are alternately made concentrically in the front and rear end faces of the clamping ring 4, so that, seen in section, a meandering structure is created.
  • Such a damping device has the particular advantage that on the one hand a very good damping of radial vibrations is achieved and that on the other hand the required mechanical rigidity of the clamping arm 4 and thus the secure reception of the ultrasound transducers 1 in the clamping device of the bonding head is still guaranteed. Geringgla- Any displacements of the vibration node no longer have a negative effect on the vibration behavior of the system due to the clamping ring 4 designed according to the invention.
  • the clamping ring 4 can be designed as a separate component which is non-positively fastened between the ultrasonic transducer 1 and the vibration generator 2, or, as shown in FIG. 2, can also be connected in one piece to the ultrasonic transducer 1.
  • the clamping ring 4 is preferably made of metal, for example from the same material as the ultrasonic transducer 1.
  • the clamping ring 4 can also be made from a material with higher damping properties, as is the case with a softer material, such as aluminum or brass.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Wire Bonding (AREA)

Abstract

La présente invention concerne un dispositif de maintien permettant de fixer un transducteur à ultrasons à une tête de connexion d'un dispositif de connexion de fils ultrasonore. Selon cette invention, une sonotrode (coin) est montée à une extrémité du transducteur à ultrasons et un générateur de vibrations ultrasonores est monté à l'autre extrémité du transducteur à ultrasons. L'objectif de la présente invention est de réaliser une fixation pour transducteur qui permet un amortissement suffisant des vibrations radiales. Afin d'atteindre cet objectif, une bague de serrage (4), entourant le transducteur à ultrasons (1), est montée dans un noeud de vibration du transducteur à ultrasons (1), ce dernier faisant partie de l'unité constituée du transducteur à ultrasons (1), du générateur de vibrations ultrasonores (2) et du coin (3). Selon cette invention, un système de serrage, appartenant à la tête de connexion, sert la bague de serrage (4) sur le pourtour et la bague de serrage (4) est pourvue d'un dispositif d'amortissement (8) qui permet d'amortir les vibrations radiales.
PCT/DE2001/000245 2000-01-21 2001-01-22 Dispositif de maintien pour transducteur a ultrasons Ceased WO2001053032A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2001235352A AU2001235352A1 (en) 2000-01-21 2001-01-22 Holding device for an ultrasonic transducer
DE10190130T DE10190130D2 (de) 2000-01-21 2001-01-22 Halteeinrichtung für Ultraschall-Transducer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10002634.6 2000-01-21
DE10002634 2000-01-21

Publications (1)

Publication Number Publication Date
WO2001053032A1 true WO2001053032A1 (fr) 2001-07-26

Family

ID=7628352

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2001/000245 Ceased WO2001053032A1 (fr) 2000-01-21 2001-01-22 Dispositif de maintien pour transducteur a ultrasons

Country Status (3)

Country Link
AU (1) AU2001235352A1 (fr)
DE (1) DE10190130D2 (fr)
WO (1) WO2001053032A1 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003070387A3 (fr) * 2002-02-15 2003-11-27 3M Innovative Properties Co Support pour elements vibratoires
WO2006099872A1 (fr) * 2005-03-23 2006-09-28 3L-Ludvigsen A/S Scelleuse a ultrasons rotative
US7766067B2 (en) 2006-09-28 2010-08-03 3-L Ludvigsen A/S Rotary ultrasonic sealer
CN102945813A (zh) * 2012-10-25 2013-02-27 广东工业大学 一种用于全自动引线键合设备上的键合头装置
DE102011086326A1 (de) * 2011-11-15 2013-05-16 Söring GmbH Ultraschallchirurgisches Instrument
CN109365252A (zh) * 2018-11-16 2019-02-22 广州汇专工具有限公司 一种具有多向隔振功能、用于超声波装置的换能器
DE102017127826A1 (de) * 2017-11-24 2019-05-29 Herrmann Ultraschalltechnik Gmbh & Co. Kg Ultraschallschwingeinheit mit Dämpfung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2928360A1 (de) * 1979-07-13 1981-01-15 Siemens Ag Sonotrode fuer ein kombiniertes ultraschall-widerstands-schweissgeraet
US5364005A (en) * 1993-11-08 1994-11-15 Verity Instruments Inc. Ultrasonic transducer and mount
US5411195A (en) * 1993-01-18 1995-05-02 Kabushiki Kaisha Shinkawa Bonding apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2928360A1 (de) * 1979-07-13 1981-01-15 Siemens Ag Sonotrode fuer ein kombiniertes ultraschall-widerstands-schweissgeraet
US5411195A (en) * 1993-01-18 1995-05-02 Kabushiki Kaisha Shinkawa Bonding apparatus
US5364005A (en) * 1993-11-08 1994-11-15 Verity Instruments Inc. Ultrasonic transducer and mount

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7980536B2 (en) 2002-02-15 2011-07-19 3M Innovative Properties Company Mount for vibratory elements
US7243894B2 (en) 2002-02-15 2007-07-17 3M Innovative Properties Company Mount for vibratory elements
CN100408205C (zh) * 2002-02-15 2008-08-06 3M创新有限公司 用于振动元件的安装件
KR100939386B1 (ko) * 2002-02-15 2010-01-28 쓰리엠 이노베이티브 프로퍼티즈 컴파니 진동 요소용 마운트
WO2003070387A3 (fr) * 2002-02-15 2003-11-27 3M Innovative Properties Co Support pour elements vibratoires
WO2006099872A1 (fr) * 2005-03-23 2006-09-28 3L-Ludvigsen A/S Scelleuse a ultrasons rotative
US7644746B2 (en) 2005-03-23 2010-01-12 3L-Ludvigsen A/S Rotary ultrasonic sealer
US7766067B2 (en) 2006-09-28 2010-08-03 3-L Ludvigsen A/S Rotary ultrasonic sealer
DE102011086326A1 (de) * 2011-11-15 2013-05-16 Söring GmbH Ultraschallchirurgisches Instrument
CN102945813A (zh) * 2012-10-25 2013-02-27 广东工业大学 一种用于全自动引线键合设备上的键合头装置
DE102017127826A1 (de) * 2017-11-24 2019-05-29 Herrmann Ultraschalltechnik Gmbh & Co. Kg Ultraschallschwingeinheit mit Dämpfung
US11376630B2 (en) 2017-11-24 2022-07-05 Herrmann Ultraschalltechnik Gmbh & Co. Kg Ultrasonic vibration unit with damping
CN109365252A (zh) * 2018-11-16 2019-02-22 广州汇专工具有限公司 一种具有多向隔振功能、用于超声波装置的换能器
CN109365252B (zh) * 2018-11-16 2023-12-19 汇专科技集团股份有限公司 一种具有多向隔振功能、用于超声波装置的换能器

Also Published As

Publication number Publication date
AU2001235352A1 (en) 2001-07-31
DE10190130D2 (de) 2002-12-19

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