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WO2000024093A1 - Planar waveguide laser amplifier - Google Patents

Planar waveguide laser amplifier Download PDF

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Publication number
WO2000024093A1
WO2000024093A1 PCT/FR1999/002516 FR9902516W WO0024093A1 WO 2000024093 A1 WO2000024093 A1 WO 2000024093A1 FR 9902516 W FR9902516 W FR 9902516W WO 0024093 A1 WO0024093 A1 WO 0024093A1
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WO
WIPO (PCT)
Prior art keywords
light
layer
amplifier
optical
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/FR1999/002516
Other languages
French (fr)
Inventor
Ludovic Brasse
Maurice Couchaud
Bernard Ferrand
Engin Molva
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to JP2000577741A priority Critical patent/JP2002528900A/en
Priority to EP99947588A priority patent/EP1121732A1/en
Publication of WO2000024093A1 publication Critical patent/WO2000024093A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/08095Zig-zag travelling beam through the active medium
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2308Amplifier arrangements, e.g. MOPA
    • H01S3/2325Multi-pass amplifiers, e.g. regenerative amplifiers

Definitions

  • the present invention relates to an optical power amplifier with an optically pumped planar waveguide and to a power laser using this amplifier.
  • the invention finds applications in particular in the following fields: laser marking and micro-marking, long distance telemetry, telecommunications, in particular space telecommunications (between satellites), laser display, scientific instrumentation and biomedical instrumentation.
  • the invention is advantageously usable in a structure of the “master oscillator power amplifier” type, more simply called MOPA.
  • This structure uses a low power laser source (master oscillator) capable of emitting a laser beam of high optical quality, as well as an optical power amplifier which is capable of providing the power necessary for the amplification of this beam. , while deteriorating the original qualities as little as possible.
  • master oscillator master oscillator
  • optical power amplifier which is capable of providing the power necessary for the amplification of this beam.
  • a laser medium doped with optically active ions, is pumped optically for example by power laser diodes to amplify the incident laser beam. It is a traveling wave amplifier more simply called TWA. Indeed, the amplification is carried out during the crossing, by the laser beam, of the amplifying laser medium.
  • an optical amplifier is therefore not a laser. It would become so by adding a resonant cavity.
  • an optical amplifier - in particular that of the invention - must not include one: it is necessary to prevent such an amplifier from becoming a laser in order to have good gain.
  • Massive optical amplifiers in the form of a rod (“rod”) or in the form of a plate (“slab”) are known. These optical amplifiers can amplify a high power but with a low gain. In addition, their lengths are of the order of several centimeters or even several tens of centimeters. They are therefore not compact.
  • Fiber optic amplifiers are also known which have a high gain but a low power. In addition, such amplifiers are not compact because they use a large length of optical fiber.
  • optical amplifiers with planar waveguide for telecommunications at 1.3 ⁇ m or 1.55 ⁇ m.
  • Such amplifiers are pumped by optical fibers, longitudinally, so that they are ill-suited to applications requiring power laser beams.
  • Such amplifiers are mentioned in documents [3] and [6].
  • optical power amplifier with planar waveguide which is compatible with micro-lasers emitting at 1.064 ⁇ m.
  • the layers of this planar guide are formed by liquid phase epitaxy on a substrate.
  • a power amplification requires a pumping technique having a good coupling efficiency and making it possible to bring high energies to the amplifying medium.
  • the amplifier described in document [1] is not compact and does not make it possible to reduce the optical losses (since this amplifier requires too many optics). In addition, it does not make it possible to obtain an optimal coupling efficiency. Indeed, for this amplifier the optical pumping is obtained thanks to a power laser diode whose emission has an elliptical configuration and which emits a laser beam which is not limited by diffraction.
  • the present invention relates to an optical amplifier with planar waveguide for amplifying a beam emitted by a laser source, for example a micro-laser, by achieving optimal coupling of the pump light, for example emitted by a laser diode or a plurality (for example a strip) of laser diodes, while preserving the optical qualities of the beam coming from the laser source after amplification of this beam.
  • a laser source for example a micro-laser
  • the present invention firstly relates to an optical amplifier intended to amplify a first light, by optical pumping by means of a second light, this amplifier comprising a substrate and, on this substrate, a waveguide planar optic comprising a plurality of layers, this amplifier being characterized in that this plurality of layers forms
  • this multimode waveguide being able to accept the major part of this second light and to guide it, and
  • this single-mode waveguide being able to guide the first light and to amplify the latter thanks to the optical pumping generated by the second light.
  • the amplifier which is the subject of the invention is capable of being compact and comprises a waveguide with a plurality of layers, allowing efficient coupling (preferably transverse coupling) of a multimode pump light beam which is not limited by diffraction and which for example comes from one or more arrays of power laser diodes, while allowing a single mode amplification of a pulsed or continuous laser beam which crosses this waveguide.
  • planar waveguide used in the invention is compatible with a high pump power and with good quality signals which it is desired to amplify.
  • a collective manufacturing process can be used to manufacture, in a large number of copies, an amplifier according to the invention.
  • the planar waveguide comprises:
  • first layer formed on the substrate and containing activating ions for the amplification of the first light
  • second layer formed on the first layer
  • the first layer forming the single-mode guide for the first light and all of the first and second layer forming the multimode guide with large digital aperture for the second light
  • the optical index of the first layer being greater than that of the substrate
  • the optical index of the second layer being less than that of the first layer and greater than that of the substrate.
  • planar waveguide comprises:
  • the second layer forming the single-mode guide for the first light and all of the first, second and third layers forming the multimode guide with large digital aperture for the second light, the optical index of the second layer being greater than that of the substrate and the optical index of each of the first and third layers being less than that of the second layer and greater than that of the substrate.
  • the amplifier may further comprise a protective layer formed on said assembly and having an optical index less than or equal to that of the substrate.
  • the planar guide has the shape of a rectangular parallelepiped and has four polished faces.
  • the lateral face of the planar waveguide is covered with a layer which is highly or totally reflective with respect to this second light.
  • the layer which is highly or totally reflective with respect to the second light is also anti-reflection with respect to the first light and the lateral face of the planar waveguide, which face is opposite to the one through which the first light penetrates is covered with an anti-reflection layer vis-à-vis the first light.
  • an anti-reflection layer vis-à-vis the first light.
  • the planar guide in the shape of a rectangular parallelepiped is further bevelled at the same angle at two opposite lateral edges and thus comprises two additional opposite lateral faces which are respectively intended to receive the first light and providing this first light in amplified form in a multiple pass configuration.
  • the layers of the planar guide are formed by epitaxy in the liquid phase.
  • the present invention also relates to a power laser comprising: the optical amplifier which is the subject of the invention,
  • the pumping light source is arranged so as to allow optical pumping in the amplifier.
  • This pumping light source comprises for example at least one power laser diode.
  • a laser diode capable of emitting in the near infrared.
  • the laser source can, for its part, comprise at least one micro-laser, for example an array of micro-lasers.
  • FIG. 1 and 2 are sectional views schematic cross section of two particular embodiments of the amplifier object of the invention, with the corresponding optical index profiles
  • FIG. 3 is a schematic view of a power laser using an amplifier according to the invention
  • FIG. 4 is a schematic top view of an amplifier according to the invention, the planar guide of which comprises two bevelled side faces, and
  • Figure 5 is a schematic top view of another amplifier according to the invention.
  • transverse pumping is used for the amplification of a light beam by means of an amplifier according to the invention.
  • the direction of propagation of the or light beams allowing this optical pumping is then perpendicular to the direction of propagation of the beam that we want to amplify.
  • the present invention can also be used in the case of longitudinal pumping but transverse pumping is preferable because it is simpler to implement.
  • the overlap of the pump beam (s) and of the beam which it is desired to amplify is less favorable in the case of transverse pumping than in the case of longitudinal pumping.
  • liquid phase epitaxy is used which is a very suitable technique (although other techniques are also suitable) for making a stack adequate. Indeed, by this liquid phase epitaxy technique, layers of good optical quality are obtained, comprising few volume and surface defects and therefore having low optical losses for propagation.
  • the amplifier which is schematically represented in cross section in FIG. 1 is intended to amplify a laser beam 2 (which can be pulsed or continuous) by transverse optical pumping by means of another laser beam 4.
  • FIG. 1 is thus a cross-sectional view perpendicular to the axis of the beam to be amplified 2.
  • the amplifier of FIG. 1 comprises a monocrystalline substrate 6 and, on this substrate, a planar optical waveguide 8.
  • This planar guide has the shape of a rectangular parallelepiped and includes four polished side faces. Two opposite side faces are visible in FIG. 1. where they have the references 10 and 12.
  • this planar guide comprises three monocrystalline layers 14, 16 and 18 epitaxially grown on the substrate, preferably by liquid phase epitaxy.
  • the layer 14 is formed on the substrate 6.
  • the layer 16 is formed on this layer 14 and contains activating ions for the amplification of the beam 2 and the layer 18 is formed on this layer 16. All three layers 14, 16, 18 forms a multimode optical waveguide with large digital aperture for the pumping beam 4 (which has a given wavelength).
  • This multimode guide is able to accept the major part of this pumping beam and to guide it.
  • the second layer 16 forms a single-mode optical waveguide for the beam to be amplified 2 (which has a given wavelength).
  • This single-mode guide is capable of guiding this beam 2 and of amplifying the latter thanks to the optical pumping generated by the pumping beam 4.
  • the third layer 18, or upper layer, can be left in the open air but, in the case of FIG. 1, it is covered by a protective layer 20.
  • optical indices of the substrate 6, of the layer 14, of the layer 16, of the layer 18 and of the layer 20 are respectively denoted ni, n2, n3, n4 and n5.
  • n3 is greater than ni and that n2 and n4 are both slightly less than n3 but greater than ni, n2 being equal to n4 in the example shown.
  • n5 is less than or equal to ni.
  • the stack of monocrystalline layers 14, 16 and 18 forms a multimode guide (for the wavelength of the pump beam 4) over the entire width 1 of this guide.
  • the single-mode guide (for the wavelength of the beam to be amplified 2), that is to say the layer 16, is a buried single-mode guide.
  • the stack of layers 14, 16 and 18 has optical indices which are both close to one another, to allow single-mode guidance of the beam to be amplified 2, and highly contrasted with respect to the substrate and to the external medium (that is ie the air or the protective layer 20), which gives it a large numerical aperture with respect to the pump beam 4.
  • the beam to be amplified 2 has a wavelength of 1.064 ⁇ m and the pumping beam 4 has a wavelength of the order of 807 nm to 808 nm;
  • the substrate 6 is made of white YAG (Y 3 Al 5 0 ⁇ 2 );
  • the confinement layers 14 and 18 are made of YAG doped with 12% at Ga and 35% at Lu;
  • the active layer 16 is made of YAG doped with 1 to 3% at of Nd, 14% at of Ga and 46% at of Lu;
  • the protective layer 20 may be made of silica (optical index represented by dotted lines, lower than that of the substrate) or of YAG (same index as that of the substrate);
  • the thicknesses of the substrate, of layer 14, of layer 16, of layer 18 and of protective layer 20 are respectively 550 ⁇ m, 2.5 ⁇ m, 5 ⁇ m, 2.5 ⁇ m and 10 ⁇ m;
  • the thickness of the multimode guide is thus 10 ⁇ m; the difference between n3 and
  • the large digital opening thus obtained allows optimal coupling of the pump beam 4 with the active medium (layer 16). Indeed, this digital opening defines the cone of acceptance of the pump beam 4 in the multimode waveguide (all of the layers 14, 16 and 18).
  • the pump harness 4 not being not limited by diffraction, the guide of this pump beam must have the largest possible digital aperture to absorb most of the pump beam 4 while retaining a single-mode guide zone (layer 16) for the beam to amplify 2.
  • a guide with the same numerical aperture of 0.26 (remember that the numerical aperture is the square root of the difference between the square of the optical index of the guide doped with active ions and the square of the optical index of the substrate) and having only a guiding layer of 10 ⁇ m would not be monomode and would therefore have a lower beam quality. It is important that the amplifier has a thick multimode guide. This makes it easier to focus the pump beam 4 on the edge of the stack of layers 14, 16 and 18 and to make the assembly more compact.
  • the amplifier in Figure 2 differs from that in Figure 1 in that the layer 14 is removed.
  • the layer 16, referenced 16a in FIG. 2 rests directly on the substrate 6.
  • the single-mode guide is formed by the layer 16a while the multimode guide is formed by all of the layers 16a and 18a.
  • the indices ni, n3, n4 and n5 retain the values they had in the case of FIG. 1
  • the thickness of the layer 18a is twice the thickness of the layer 18 of the figure 1 and a thickness of 10 ⁇ m is also obtained for the multimode guide.
  • FIG. 3 is a schematic perspective view of a power laser according to the invention.
  • This power laser comprises an amplifier 22 in accordance with the invention (the amplifier of FIG. 2 in the example shown) as well as a laser source 24 (a micro-laser in the example shown) intended to supply the beam 2 which we want to amplify and a source 26 of pumping light (a strip of power laser diodes in the example shown) which provides several pumping laser beams which have the collective reference 28. It is also a question of a transverse pumping and the array of power laser diodes is arranged so that the pumping beams coming from the different diodes of this array are perpendicular to the axis of the beam to be amplified 2.
  • the power laser also comprises a cylindrical lens 30 provided to collimate the pumping beams and a cylindrical coupling lens 32 which receives these collimated beams and focuses them on the edge of the multimode guide (layers 16a and 18a).
  • the laser beam 34 which has been amplified by optical pumping and which exits through the edge of the single-mode guide (layer 16a), through a lateral face 36 of the planar guide, adjacent to the face 10 which receives the pumping beams.
  • a strip of laser diodes is used.
  • the lateral face 12 of the planar guide (face opposite to that through which the pumping beams penetrate) is advantageously covered with a highly or totally reflective layer 38 vis-à-vis these pumping beams.
  • this layer 38 is also anti-reflection with respect to the beam to be amplified 2 and another anti-reflection layer 40 with respect to the beam to be amplified 2, also covers the lateral face 36 of the planar guide ( opposite side to the lateral entry side of the beam to be amplified).
  • These layers 38 and 40 are multi-electric deposits which allow:
  • planar structure of an amplifier according to the invention facilitates: - temperature regulation as well as minimization of thermo-optical distortion effects
  • the amplifier object of the invention is capable of operating at multiple wavelengths and with different crystalline materials (for example YAG, LMA, YSO, YAP, YAB, YLF and COB), which can be deposited by epitaxy , as well as with different activating ions (for example Nd, Yb, Er, Pr and Cr) and various co-dopants (for example Ga, Lu, Se and Bi).
  • different activating ions for example Nd, Yb, Er, Pr and Cr
  • co-dopants for example Ga, Lu, Se and Bi
  • Cross section of absorption and the effective section of stimulated emission, which make it possible to size the amplifying structures.
  • the amplifier object of the invention therefore allows, in a compact form, the power amplification of a pulsed or continuous laser source
  • the design of the stack of dielectric layers is such that one or more optical pump beams (for example guided transversely), which can be easily introduced (with simple optics), or several power laser diodes, in the active area of the amplifier.
  • This active area must have a large opening to optimize the absorption of the radiation from this or these diodes, radiation which is not limited by diffraction.
  • the stack, as designed allows single-mode guidance of the beam to be amplified in the amplifier guide, which ensures good quality of the amplified beam at the output of the amplifier. The invention therefore makes it possible to generate optical power while maintaining good beam quality comparable to that of the beam before it is amplified.
  • This provides a compact system with modular pump power (for example with laser diodes of 10, 20, 30 and 40 W without changing the structure and therefore having access to different power ranges).
  • the amplifier which is the subject of the invention is particularly suitable for transverse pumping by laser diodes since the elliptical configuration of the output beams of the power laser diodes (FIG. 3) allows easy coupling by means of simple optics.
  • This amplifier can be used with one or more laser beams (pulsed or continuous) to be amplified: for example, in the case of FIG. 3, the microlaser 24 (emitting a single beam) can be replaced by a strip of microlasers 24a emitting several parallel beams 2a, which are sent simultaneously into the single-mode guide, by the edge thereof, to obtain several amplified beams 34a.
  • the invention solves for the first time the problem of coupling the power of a multimode pump beam in a power waveguide amplifier while retaining good optical quality for the amplified beam.
  • FIG. 5 is a schematic top view of an amplifier according to the invention having a multiple pass configuration.
  • the planar waveguide 8 of parallelepipedal shape of FIG. 1 or of FIG. 2 is still used, but, in the case of FIG. 5, this planar guide is bevelled, at an angle ⁇ equal for example to 45 °, at two opposite lateral edges and thus comprises two additional opposite lateral faces 42 and 44 which are parallel and respectively intended to receive the laser beam to be amplified 2 and to provide an amplified beam 34.
  • FIG. 5 also shows the array of power laser diodes supplying the pump beams 28 as well as the collimating lens 30 and the focusing lens 32.
  • EP 0 320 990 A (POLAROID CORP.).
  • the device described in document [9] is a planar laser pumped transversely by a low power laser diode (500 mW), the beam of this diode being guided in the structure described.
  • This device does not provide single-mode guidance of the laser beam and it is not an optical amplifier but a laser. However, we saw above that an optical amplifier must not become a laser.
  • the device described in document [10] is a structure of the “cladding pumping” type conventionally used in fiber optic devices to improve the coupling of the pump light. In this device, there is no question of a pump light propagating transversely to the light to be amplified. In addition, this device cannot be extended to a multibeam configuration by the very structure of the optical fiber which can only propagate light in its cross section.
  • planar configuration of the invention is much more favorable to good control of thermal effects than the circular configuration described in document [10].
  • a planar structure such as that of the invention makes it possible, by guiding the pump light transversely to the light to be amplified, to amplify in a compact and monomode fashion a plurality of beams, for example from pulsed microlaser (s) or continuous.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

The invention concerns a power optical amplifier with planar waveguide optically pumped and a power laser using said amplifier. The amplifier planar waveguide comprises layers (14, 16, 18) forming a multimode guide with large numerical aperture for the pump light (4) and a monomode guide (16) for the light to be amplified (2). The latter is amplified in said guide by the optical pumping.

Description

AMPLIFICATEUR LASER A GUIDE D'ONDE PLANAIRE PLANAR WAVEGUIDE LASER AMPLIFIER

DESCRIPTIONDESCRIPTION

DOMAINE TECHNIQUETECHNICAL AREA

La présente invention concerne un amplificateur optique de puissance à guide d'onde planaire pompé optiquement ainsi qu'un laser de puissance utilisant cet amplificateur. L'invention trouve des applications notamment dans les domaines suivants : marquage et micro-marquage par laser, télémétrie à longue distance, télécommunications, en particulier télécommunications spatiales (entre satellites) , affichage par laser, instrumentation scientifique et instrumentation biomédicale.The present invention relates to an optical power amplifier with an optically pumped planar waveguide and to a power laser using this amplifier. The invention finds applications in particular in the following fields: laser marking and micro-marking, long distance telemetry, telecommunications, in particular space telecommunications (between satellites), laser display, scientific instrumentation and biomedical instrumentation.

L'invention est avantageusement utilisable dans une structure de type « amplificateur de puissance à oscillateur maître (« master oscillator power amplifier ») plus simplement appelée MOPA.The invention is advantageously usable in a structure of the “master oscillator power amplifier” type, more simply called MOPA.

Cette structure utilise une source laser (oscillateur maître) de faible puissance, capable d'émettre un faisceau laser de grande qualité optique, ainsi qu'un amplificateur optique de puissance qui est susceptible d'apporter la puissance nécessaire à l'amplification de ce faisceau, tout en détériorant le moins possible les qualités originelles de celui-ci.This structure uses a low power laser source (master oscillator) capable of emitting a laser beam of high optical quality, as well as an optical power amplifier which is capable of providing the power necessary for the amplification of this beam. , while deteriorating the original qualities as little as possible.

Dans l'amplificateur optique, un milieu laser, dopé avec des ions optiquement actifs, est pompé optiquement par exemple par des diodes lasers de puissance pour amplifier le faisceau laser incident. Il s'agit d'un amplificateur à onde progressive (« travelling wave amplifier ») plus simplement appelé TWA. En effet l'amplification est réalisée au cours de la traversée, par le faisceau laser, du milieu laser amplificateur .In the optical amplifier, a laser medium, doped with optically active ions, is pumped optically for example by power laser diodes to amplify the incident laser beam. It is a traveling wave amplifier more simply called TWA. Indeed, the amplification is carried out during the crossing, by the laser beam, of the amplifying laser medium.

Un tel amplificateur optique n'est donc pas un laser. Il le deviendrait par adjonction d'une cavité résonante. Mais un amplificateur optique -en particulier celui de l'invention- ne doit pas en comporter : il faut empêcher qu'un tel amplificateur devienne un laser pour avoir un bon gain.Such an optical amplifier is therefore not a laser. It would become so by adding a resonant cavity. However, an optical amplifier - in particular that of the invention - must not include one: it is necessary to prevent such an amplifier from becoming a laser in order to have good gain.

ÉTAT DE LA TECHNIQUE ANTÉRIEUREPRIOR STATE OF THE ART

On connaît des amplificateurs optiques massifs (« bulk ») en forme de barreau (« rod ») ou en forme de plaque (« slab ») . Ces amplificateurs optiques peuvent amplifier une forte puissance mais avec un faible gain. De plus leurs longueurs sont de l'ordre de plusieurs centimètres voire plusieurs dizaines de centimètres. Ils ne sont donc pas compacts.Massive optical amplifiers (“bulk”) in the form of a rod (“rod”) or in the form of a plate (“slab”) are known. These optical amplifiers can amplify a high power but with a low gain. In addition, their lengths are of the order of several centimeters or even several tens of centimeters. They are therefore not compact.

De tels amplificateurs sont par exemple considérés dans le document [4] qui, comme les autres documents cités par la suite, est mentionné à la fin de la présente description.Such amplifiers are for example considered in document [4] which, like the other documents cited below, is mentioned at the end of this description.

On connaît aussi des amplificateurs optiques en forme de plaque mince (« thin slab ») . Cependant ces amplificateurs ne permettent pas de guider un faisceau laser incident de façon monomode de sorte que la qualité du faisceau de sortie est médiocre. Il en résulte par exemple que la focalisation d'un tel faisceau de sortie sur une très petite surface est difficile. En particulier, un tel faisceau est quasiment inutilisable pour une gravure de précision.There are also known optical amplifiers in the form of a thin plate (“thin slab”). However, these amplifiers do not make it possible to guide an incident laser beam in a single mode so that the quality of the output beam is poor. As a result, for example, the focus such an output beam over a very small area is difficult. In particular, such a beam is almost unusable for precision engraving.

De tels amplificateurs sont mentionnés dans le document [8] .Such amplifiers are mentioned in document [8].

On connaît également les amplificateurs à fibre optique qui ont un gain important mais une faible puissance. De plus, de tels amplificateurs ne sont pas compacts car ils utilisent une longueur importante de fibre optique.Fiber optic amplifiers are also known which have a high gain but a low power. In addition, such amplifiers are not compact because they use a large length of optical fiber.

De tels amplificateurs sont mentionnés dans le document [5] .Such amplifiers are mentioned in document [5].

On connaît en outre des amplificateurs optiques à guide d'onde planaire pour les télécommunications (à 1,3 μm ou 1,55 μm) . De tels amplificateurs sont pompés par des fibres optiques, de façon longitudinale, de sorte qu'ils sont mal adaptés à des applications nécessitant des faisceaux lasers de puissance . De tels amplificateurs sont mentionnés dans les documents [3] et [6].There are also known optical amplifiers with planar waveguide for telecommunications (at 1.3 μm or 1.55 μm). Such amplifiers are pumped by optical fibers, longitudinally, so that they are ill-suited to applications requiring power laser beams. Such amplifiers are mentioned in documents [3] and [6].

On connaît aussi un amplificateur optique de puissance à guide d'onde planaire qui est compatible avec les micro-lasers émettant à 1,064 μm. Les couches de ce guide planaire sont formées par épitaxie en phase liquide sur un substrat.There is also known an optical power amplifier with planar waveguide which is compatible with micro-lasers emitting at 1.064 μm. The layers of this planar guide are formed by liquid phase epitaxy on a substrate.

On se reportera au document [1] où est décrit cet amplificateur.Reference is made to document [1] where this amplifier is described.

On précise qu'il est possible de former les couches épitaxiées du guide planaire à partir de l'enseignement du document [2] auquel on se reportera. Il convient de noter que ce document [2] divulgue l'utilisation de couches épitaxiées pour former des cavités lasers compactes. Il n'est en aucun cas question d'amplification optique dans ce document [2].It is specified that it is possible to form the epitaxial layers of the planar guide from the teaching of document [2] to which we will refer. It should be noted that this document [2] discloses the use of epitaxial layers to form compact laser cavities. There is no question of optical amplification in this document [2].

Si l'on considère la figure 2 du document [1] on constate que le pompage optique de l'amplificateur décrit dans ce document est effectué de façon longitudinale. Cela nécessite un quasi-alignement et même une quasi-superposition du faisceau de pompe et du faisceau à amplifier. Cependant, comme chacun de ceux-ci a une taille de quelques dizaines de micromètres, une telle technique est très difficile à mettre en oeuvre et à rendre fiable.If we consider Figure 2 of document [1] we see that the optical pumping of the amplifier described in this document is carried out longitudinally. This requires a quasi-alignment and even a quasi-superposition of the pump beam and the beam to be amplified. However, as each of these has a size of a few tens of micrometers, such a technique is very difficult to implement and to make reliable.

De plus, une amplification de puissance nécessite une technique de pompage ayant un bon rendement de couplage et permettant d'apporter de fortes énergies au milieu amplificateur. Or l'amplificateur décrit dans le document [1] n'est pas compact et ne permet pas de réduire les pertes optiques (car cet amplificateur nécessite un trop grand nombre d' optiques) . De plus, il ne permet pas d'obtenir un rendement de couplage optimal. En effet, pour cet amplificateur le pompage optique est obtenu grâce à une diode laser de puissance dont l'émission a une configuration elliptique et qui émet un faisceau laser qui n'est pas limité par la diffraction.In addition, a power amplification requires a pumping technique having a good coupling efficiency and making it possible to bring high energies to the amplifying medium. However, the amplifier described in document [1] is not compact and does not make it possible to reduce the optical losses (since this amplifier requires too many optics). In addition, it does not make it possible to obtain an optimal coupling efficiency. Indeed, for this amplifier the optical pumping is obtained thanks to a power laser diode whose emission has an elliptical configuration and which emits a laser beam which is not limited by diffraction.

En outre, l'amplificateur décrit dans ce document [1] ne permet pas, à partir d'un faisceau incident de bonne qualité optique, de fournir un faisceau amplifié de grande puissance qui conserve cette bonne qualité optique. EXPOSÉ DE L'INVENTIONIn addition, the amplifier described in this document [1] does not make it possible, from an incident beam of good optical quality, to provide an amplified beam of high power which retains this good optical quality. STATEMENT OF THE INVENTION

La présente invention a pour objet un amplificateur optique à guide d'onde planaire permettant d'amplifier un faisceau émis par une source laser, par exemple un micro-laser, en réalisant un couplage optimal de la lumière de pompe, par exemple émise par une diode laser ou une pluralité (par exemple une barrette) de diodes lasers, tout en préservant les qualités optiques du faisceau issu de la source laser après amplification de ce faisceau.The present invention relates to an optical amplifier with planar waveguide for amplifying a beam emitted by a laser source, for example a micro-laser, by achieving optimal coupling of the pump light, for example emitted by a laser diode or a plurality (for example a strip) of laser diodes, while preserving the optical qualities of the beam coming from the laser source after amplification of this beam.

De façon précise la présente invention a tout d'abord pour objet un amplificateur optique destiné à amplifier une première lumière, par pompage optique au moyen d'une deuxième lumière, cet amplificateur comprenant un substrat et, sur ce substrat, un guide d'onde optique planaire comportant une pluralité de couches, cet amplificateur étant caractérisé en ce que cette pluralité de couches formeSpecifically, the present invention firstly relates to an optical amplifier intended to amplify a first light, by optical pumping by means of a second light, this amplifier comprising a substrate and, on this substrate, a waveguide planar optic comprising a plurality of layers, this amplifier being characterized in that this plurality of layers forms

- un guide d'onde optique multimode et de grande ouverture numérique pour la deuxième lumière, ce guide d'onde multimode étant apte à accepter la majeure partie de cette deuxième lumière et à guider celle-ci, eta multimode optical waveguide with large digital aperture for the second light, this multimode waveguide being able to accept the major part of this second light and to guide it, and

- un guide d'onde optique monomode pour la première lumière, ce guide d'onde monomode étant apte à guider la première lumière et à amplifier celle-ci grâce au pompage optique engendré par la deuxième lumière .a single-mode optical waveguide for the first light, this single-mode waveguide being able to guide the first light and to amplify the latter thanks to the optical pumping generated by the second light.

L'amplificateur objet de l'invention est susceptible d'être compact et comprend un guide d'onde à pluralité de couches, permettant un couplage (de préférence un couplage transverse) efficace d'un faisceau lumineux de pompe multimode qui est n'est pas limité par la diffraction et qui est par exemple issu d'une ou de plusieurs barrettes de diodes lasers de puissance, tout en permettant une amplification monomode d'un faisceau laser puisé ou continu qui traverse ce guide d'onde.The amplifier which is the subject of the invention is capable of being compact and comprises a waveguide with a plurality of layers, allowing efficient coupling (preferably transverse coupling) of a multimode pump light beam which is not limited by diffraction and which for example comes from one or more arrays of power laser diodes, while allowing a single mode amplification of a pulsed or continuous laser beam which crosses this waveguide.

Le guide d'onde planaire utilisé dans l'invention est compatible avec une puissance de pompe élevée et avec des signaux de bonne qualité que l'on veut amplifier. De plus on peut utiliser un procédé de fabrication collective pour fabriquer, en un grand nombre d'exemplaires, un amplificateur conforme à 1' invention.The planar waveguide used in the invention is compatible with a high pump power and with good quality signals which it is desired to amplify. In addition, a collective manufacturing process can be used to manufacture, in a large number of copies, an amplifier according to the invention.

Selon un premier mode de réalisation particulier de l'amplificateur objet de l'invention, le guide d'onde planaire comprend :According to a first particular embodiment of the amplifier which is the subject of the invention, the planar waveguide comprises:

- une première couche formée sur le substrat et contenant des ions activateurs pour l'amplification de la première lumière, et - une deuxième couche formée sur la première couche, la première couche formant le guide monomode pour la première lumière et 1 ' ensemble des première et deuxième couches formant le guide multimode de grande ouverture numérique pour la deuxième lumière, l'indice optique de la première couche étant supérieur à celui du substrat, 1 ' indice optique de la deuxième couche étant inférieur à celui de la première couche et supérieur à celui du substrat .a first layer formed on the substrate and containing activating ions for the amplification of the first light, and a second layer formed on the first layer, the first layer forming the single-mode guide for the first light and all of the first and second layer forming the multimode guide with large digital aperture for the second light, the optical index of the first layer being greater than that of the substrate, the optical index of the second layer being less than that of the first layer and greater than that of the substrate.

Selon un deuxième mode de réalisation particulier, le guide d'onde planaire comprend :According to a second particular embodiment, the planar waveguide comprises:

- une première couche formée sur le substrat, - une deuxième couche formée sur la première couche et contenant des ions activateurs pour l'amplification de la première lumière, et- a first layer formed on the substrate, a second layer formed on the first layer and containing activating ions for the amplification of the first light, and

- une troisième couche formée sur la deuxième couche, la deuxième couche formant le guide monomode pour la première lumière et l'ensemble des première, deuxième et troisième couches formant le guide multimode de grande ouverture numérique pour la deuxième lumière, l'indice optique de la deuxième couche étant supérieur à celui du substrat et l'indice optique de chacune des première et troisième couches étant inférieur à celui de la deuxième couche et supérieur à celui du substrat.a third layer formed on the second layer, the second layer forming the single-mode guide for the first light and all of the first, second and third layers forming the multimode guide with large digital aperture for the second light, the optical index of the second layer being greater than that of the substrate and the optical index of each of the first and third layers being less than that of the second layer and greater than that of the substrate.

Dans l'un ou l'autre de ces deux modes de réalisation particuliers l'amplificateur peut comprendre en outre une couche de protection formée sur ledit ensemble et ayant un indice optique inférieur ou égal à celui du substrat.In either of these two particular embodiments, the amplifier may further comprise a protective layer formed on said assembly and having an optical index less than or equal to that of the substrate.

De préférence, le guide planaire a la forme d'un parallélépipède rectangle et comporte quatre faces polies.Preferably, the planar guide has the shape of a rectangular parallelepiped and has four polished faces.

Dans ce cas, selon un mode de réalisation préféré, la face latérale du guide d'onde planaire, face qui est opposée à celle par laquelle pénètre la deuxième lumière, est recouverte d'une couche hautement ou totalement réfléchissante vis-à-vis de cette deuxième lumière.In this case, according to a preferred embodiment, the lateral face of the planar waveguide, the face which is opposite to that by which the second light penetrates, is covered with a layer which is highly or totally reflective with respect to this second light.

De préférence, la couche qui est hautement ou totalement réfléchissante vis-à-vis de la deuxième lumière est également anti-reflet vis-à-vis de la première lumière et la face latérale du guide d'onde planaire, face qui est opposée à celle par laquelle pénètre la première lumière, est recouverte d'une couche anti-reflet vis-à-vis de la première lumière. En variante, au lieu d'utiliser de telles couches, on peut faire en sorte que les faces latérales du guide d'onde planaire, faces qui sont opposées à celles par lesquelles pénètrent respectivement les première et deuxième lumières, soient à environ 1°.Preferably, the layer which is highly or totally reflective with respect to the second light is also anti-reflection with respect to the first light and the lateral face of the planar waveguide, which face is opposite to the one through which the first light penetrates is covered with an anti-reflection layer vis-à-vis the first light. As a variant, instead of using such layers, it is possible to ensure that the lateral faces of the planar waveguide, faces which are opposite to those through which the first and second lumens penetrate respectively, are approximately 1 °.

Selon un mode de réalisation particulier de l'invention, le guide planaire en forme de parallélépipède rectangle est en outre biseauté suivant un même angle au niveau de deux arêtes latérales opposées et comprend ainsi deux faces latérales opposées supplémentaires qui sont respectivement destinées à recevoir la première lumière et à fournir cette première lumière sous forme amplifiée dans une configuration de passages multiples. Selon un mode de réalisation préféré de l'invention, les couches du guide planaire sont formées par épitaxie en phase liquide.According to a particular embodiment of the invention, the planar guide in the shape of a rectangular parallelepiped is further bevelled at the same angle at two opposite lateral edges and thus comprises two additional opposite lateral faces which are respectively intended to receive the first light and providing this first light in amplified form in a multiple pass configuration. According to a preferred embodiment of the invention, the layers of the planar guide are formed by epitaxy in the liquid phase.

La présente invention a également pour objet un laser de puissance comprenant : - l'amplificateur optique objet de l'invention,The present invention also relates to a power laser comprising: the optical amplifier which is the subject of the invention,

- une source laser destinée à fournir la première lumière à cet amplificateur et- a laser source intended to supply the first light to this amplifier and

- une source de lumière de pompage destinée à fournir la deuxième lumière à l'amplificateur. De préférence, la source de lumière de pompage est disposée de façon à permettre un pompage optique dans l'amplificateur.- a pumping light source intended to supply the second light to the amplifier. Preferably, the pumping light source is arranged so as to allow optical pumping in the amplifier.

Cette source de lumière de pompage comprend par exemple au moins une diode laser de puissance. Pour certaines applications de l'invention, on peut avoir à utiliser une diode laser capable d'émettre dans le proche infrarouge. La source laser peut, quant à elle, comprendre au moins un micro-laser, par exemple une barrette de micro-lasers.This pumping light source comprises for example at least one power laser diode. For certain applications of the invention, it may be necessary to use a laser diode capable of emitting in the near infrared. The laser source can, for its part, comprise at least one micro-laser, for example an array of micro-lasers.

BRÈVE DESCRIPTION DES DESSINSBRIEF DESCRIPTION OF THE DRAWINGS

La présente invention sera mieux comprise à la lecture de la description d'exemples de réalisation donnés ci-après, à titre purement indicatif et nullement limitatif, en faisant référence aux dessins annexés sur lesquels : • les figures 1 et 2 sont des vues en coupe transversale schématique de deux modes de réalisation particuliers de l'amplificateur objet de l'invention, avec les profils d'indice optique correspondants , • la figure 3 est une vue schématique d'un laser de puissance utilisant un amplificateur conforme à 1 ' invention,The present invention will be better understood on reading the description of exemplary embodiments given below, by way of purely indicative and in no way limiting, with reference to the appended drawings in which: • Figures 1 and 2 are sectional views schematic cross section of two particular embodiments of the amplifier object of the invention, with the corresponding optical index profiles, • FIG. 3 is a schematic view of a power laser using an amplifier according to the invention,

• la figure 4 est une vue de dessus schématique d'un amplificateur conforme à l'invention dont le guide planaire comprend deux faces latérales biseautées, etFIG. 4 is a schematic top view of an amplifier according to the invention, the planar guide of which comprises two bevelled side faces, and

• la figure 5 est une vue de dessus schématique d'un autre amplificateur conforme à l'invention.• Figure 5 is a schematic top view of another amplifier according to the invention.

EXPOSÉ DÉTAILLÉ DE MODES DE RÉALISATION PARTICULIERSDETAILED PRESENTATION OF PARTICULAR EMBODIMENTS

Dans le cas de chacune des figures 1 à 4, on utilise un pompage transverse pour l'amplification d'un faisceau lumineux grâce à un amplificateur conforme à l'invention. La direction de propagation du ou des faisceaux lumineux permettant ce pompage optique est alors perpendiculaire à la direction de propagation du faisceau que l'on veut amplifier.In the case of each of FIGS. 1 to 4, transverse pumping is used for the amplification of a light beam by means of an amplifier according to the invention. The direction of propagation of the or light beams allowing this optical pumping is then perpendicular to the direction of propagation of the beam that we want to amplify.

La présente invention est également utilisable dans le cas d'un pompage longitudinal mais le pompage transverse est préférable car il est plus simple à mettre en oeuvre.The present invention can also be used in the case of longitudinal pumping but transverse pumping is preferable because it is simpler to implement.

Cependant, le recouvrement du ou des faisceaux de pompe et du faisceau que l'on veut amplifier est moins favorable dans le cas d'un pompage transverse que dans le cas d'un pompage longitudinal.However, the overlap of the pump beam (s) and of the beam which it is desired to amplify is less favorable in the case of transverse pumping than in the case of longitudinal pumping.

Cela impose d'utiliser, tant pour le faisceau de pompe que pour le faisceau à amplifier, un guide planaire ayant de faibles pertes optiques. Pour former l'empilement des couches de ce guide planaire que comprend un amplificateur conforme à l'invention, on utilise l' épitaxie en phase liquide qui est une technique très adaptée (bien que d'autres techniques le soient également) pour réaliser un empilement adéquat. En effet on obtient, par cette technique d' épitaxie en phase liquide, des couches de bonne qualité optique, comprenant peu de défauts volumiques et surfaciques et possédant donc de faibles pertes optiques pour la propagation. La bonne homogénéité permise par cette technique, sur un substrat dont le diamètre peut aller jusqu'à 5 cm voire plus, ainsi que sa souplesse d'emploi, en ce qui concerne le choix des paramètres optiques (dopages et donc indices optiques) et des paramètres géométriques (croissance et découpe) , permettent une réalisation optimisée et collective d'amplificateurs optiques conformes à l'invention. L'amplificateur qui est schématiquement représenté en coupe transversale sur la figure 1 est destiné à amplifier un faisceau laser 2 (qui peut être puisé ou continu) par pompage optique transverse au moyen d'un autre faisceau laser 4.This makes it necessary to use, both for the pump beam and for the beam to be amplified, a planar guide having low optical losses. To form the stack of layers of this planar guide which comprises an amplifier according to the invention, liquid phase epitaxy is used which is a very suitable technique (although other techniques are also suitable) for making a stack adequate. Indeed, by this liquid phase epitaxy technique, layers of good optical quality are obtained, comprising few volume and surface defects and therefore having low optical losses for propagation. The good uniformity allowed by this technique, on a substrate whose diameter can go up to 5 cm or even more, as well as its flexibility of use, as regards the choice of the optical parameters (doping and therefore optical indices) and geometric parameters (growth and cutting), allow an optimized and collective realization of optical amplifiers in accordance with the invention. The amplifier which is schematically represented in cross section in FIG. 1 is intended to amplify a laser beam 2 (which can be pulsed or continuous) by transverse optical pumping by means of another laser beam 4.

La figure 1 est ainsi une vue en coupe transversale perpendiculairement à l'axe du faisceau à amplifier 2.FIG. 1 is thus a cross-sectional view perpendicular to the axis of the beam to be amplified 2.

L'amplificateur de la figure 1 comprend un substrat monocristallin 6 et, sur ce substrat, un guide d'onde optique planaire 8. Ce guide planaire a la forme d'un parallélépipède rectangle et comprend quatre faces latérales polies. Deux faces latérales opposées sont visibles sur la figure 1. où elles ont les références 10 et 12.The amplifier of FIG. 1 comprises a monocrystalline substrate 6 and, on this substrate, a planar optical waveguide 8. This planar guide has the shape of a rectangular parallelepiped and includes four polished side faces. Two opposite side faces are visible in FIG. 1. where they have the references 10 and 12.

De plus, ce guide planaire comprend trois couches monocristallines 14, 16 et 18 épitaxiées sur le substrat, de préférence par épitaxie en phase liquide.In addition, this planar guide comprises three monocrystalline layers 14, 16 and 18 epitaxially grown on the substrate, preferably by liquid phase epitaxy.

Pour la fabrication de ce guide planaire on peut utiliser l'enseignement du document [2] déjà cité.For the production of this planar guide one can use the teaching of the document [2] already cited.

La couche 14 est formée sur le substrat 6. La couche 16 est formée sur cette couche 14 et contient des ions activateurs pour l'amplification du faisceau 2 et la couche 18 est formée sur cette couche 16. L'ensemble des trois couches 14, 16, 18 forme un guide d'onde optique multimode et de grande ouverture numérique pour le faisceau de pompage 4 (qui a une longueur d'onde donnée) .The layer 14 is formed on the substrate 6. The layer 16 is formed on this layer 14 and contains activating ions for the amplification of the beam 2 and the layer 18 is formed on this layer 16. All three layers 14, 16, 18 forms a multimode optical waveguide with large digital aperture for the pumping beam 4 (which has a given wavelength).

Ce guide multimode est apte à accepter la majeure partie de ce faisceau de pompage et à guider celui-ci .This multimode guide is able to accept the major part of this pumping beam and to guide it.

La deuxième couche 16 forme un guide d'onde optique monomode pour le faisceau à amplifier 2 (qui a une longueur d'onde donnée). Ce guide monomode est apte à guider ce faisceau 2 et à amplifier celui-ci grâce au pompage optique engendré par le faisceau de pompage 4.The second layer 16 forms a single-mode optical waveguide for the beam to be amplified 2 (which has a given wavelength). This single-mode guide is capable of guiding this beam 2 and of amplifying the latter thanks to the optical pumping generated by the pumping beam 4.

La troisième couche 18, ou couche supérieure, peut être laissée à l'air libre mais, dans le cas de la figure 1, elle est recouverte par une couche de protection 20.The third layer 18, or upper layer, can be left in the open air but, in the case of FIG. 1, it is covered by a protective layer 20.

On voit également sur cette figure 1 les variations de l'indice optique n en fonction de l'épaisseur e qui est comptée en allant de la couche de protection 20 jusqu'au substrat 6.We also see in this figure 1 the variations of the optical index n as a function of the thickness e which is counted going from the protective layer 20 to the substrate 6.

Les indices optiques du substrat 6, de la couche 14, de la couche 16, de la couche 18 et de la couche 20 sont respectivement notés ni, n2 , n3 , n4 et n5.The optical indices of the substrate 6, of the layer 14, of the layer 16, of the layer 18 and of the layer 20 are respectively denoted ni, n2, n3, n4 and n5.

On voit que n3 est supérieur à ni et que n2 et n4 sont tous deux légèrement inférieurs à n3 mais supérieurs à ni , n2 étant égal à n4 dans 1 ' exemple représenté. On voit aussi que n5 est inférieur ou égal à ni.We see that n3 is greater than ni and that n2 and n4 are both slightly less than n3 but greater than ni, n2 being equal to n4 in the example shown. We also see that n5 is less than or equal to ni.

On voit que l'empilement des couches monocristallines 14, 16 et 18 forme un guide multimode (pour la longueur d'onde du faisceau de pompe 4) sur toute la largeur 1 de ce guide. On voit aussi que le guide monomode (pour la longueur d'onde du faisceau à amplifier 2), c'est-à- dire la couche 16, est un guide monomode enterré.It can be seen that the stack of monocrystalline layers 14, 16 and 18 forms a multimode guide (for the wavelength of the pump beam 4) over the entire width 1 of this guide. It can also be seen that the single-mode guide (for the wavelength of the beam to be amplified 2), that is to say the layer 16, is a buried single-mode guide.

Les deux couches 14 et 18 sont des couches de confinement. Elles ne sont pas dopées par les ions activateurs mais leur dopage est choisi pour qu'elles aient un indice optique (n2=n4) bien plus élevé que celui (ni) du substrat. L'empilement des couches 14, 16 et 18 possède des indices optiques à la fois proches les uns des autres, pour permettre le guidage monomode du faisceau à amplifier 2, et fortement contrastés par rapport au substrat et au milieu extérieur (c'est-à- dire l'air ou la couche de protection 20), ce qui lui confère une grande ouverture numérique vis-à-vis du faisceau de pompe 4.The two layers 14 and 18 are containment layers. They are not doped by the activating ions but their doping is chosen so that they have an optical index (n2 = n4) much higher than that (nor) of the substrate. The stack of layers 14, 16 and 18 has optical indices which are both close to one another, to allow single-mode guidance of the beam to be amplified 2, and highly contrasted with respect to the substrate and to the external medium (that is ie the air or the protective layer 20), which gives it a large numerical aperture with respect to the pump beam 4.

A titre purement indicatif et nullement limitatif, le faisceau à amplifier 2 a une longueur d'onde de 1,064 μm et le faisceau de pompage 4 a une longueur d'onde de l'ordre de 807 nm à 808 nm ; le substrat 6 est en YAG blanc (Y3Al52) ; les couches de confinement 14 et 18 sont en YAG dopé avec 12%at de Ga et 35%at de Lu ; la couche active 16 est en YAG dopé avec 1 à 3% at de Nd, 14% at de Ga et 46% at de Lu ; la couche de protection 20 peut être en silice (indice optique représenté en pointillés, inférieur à celui du substrat) ou en YAG (même indice que celui du substrat) ; les épaisseurs du substrat, de la couche 14, de la couche 16, de la couche 18 et de la couche de protection 20 valent respectivement 550 μm, 2,5 μm, 5 μm, 2,5 μm et 10 μm ; l'épaisseur du guide multimode vaut ainsi 10 μm ; l'écart entre n3 et n2 (et donc entre n3 et n4) est de l'ordre de 10"3 ; l'écart entre n2 (ou n4) et ni est de l'ordre de 2xl0~2 et il en est de même pour 1 ' écart entre n3 et ni .As a purely indicative and in no way limitative, the beam to be amplified 2 has a wavelength of 1.064 μm and the pumping beam 4 has a wavelength of the order of 807 nm to 808 nm; the substrate 6 is made of white YAG (Y 3 Al 52 ); the confinement layers 14 and 18 are made of YAG doped with 12% at Ga and 35% at Lu; the active layer 16 is made of YAG doped with 1 to 3% at of Nd, 14% at of Ga and 46% at of Lu; the protective layer 20 may be made of silica (optical index represented by dotted lines, lower than that of the substrate) or of YAG (same index as that of the substrate); the thicknesses of the substrate, of layer 14, of layer 16, of layer 18 and of protective layer 20 are respectively 550 μm, 2.5 μm, 5 μm, 2.5 μm and 10 μm; the thickness of the multimode guide is thus 10 μm; the difference between n3 and n2 (and therefore between n3 and n4) is around 10 "3 ; the difference between n2 (or n4) and ni is around 2x10 ~ 2 and so is even for the difference between n3 and ni.

La grande ouverture numérique ainsi obtenue permet un couplage optimal du faisceau de pompe 4 avec le milieu actif (couche 16) . En effet cette ouverture numérique définit le cône d'acceptance du faisceau de pompe 4 dans le guide d'onde multimode (ensemble des couches 14, 16 et 18). Le faisceau de pompe 4 n'étant pas limité par la diffraction, le guide de ce faisceau de pompe doit avoir 1 ' ouverture numérique la plus importante possible pour absorber la plus grande partie du faisceau de pompe 4 tout en conservant une zone de guidage monomode (couche 16) pour le faisceau à amplifier 2.The large digital opening thus obtained allows optimal coupling of the pump beam 4 with the active medium (layer 16). Indeed, this digital opening defines the cone of acceptance of the pump beam 4 in the multimode waveguide (all of the layers 14, 16 and 18). The pump harness 4 not being not limited by diffraction, the guide of this pump beam must have the largest possible digital aperture to absorb most of the pump beam 4 while retaining a single-mode guide zone (layer 16) for the beam to amplify 2.

A titre de comparaison, un guide avec la même ouverture numérique de 0,26 (on rappelle que l'ouverture numérique est la racine carrée de la différence entre le carré de l'indice optique du guide dopé avec les ions actifs et le carré de l'indice optique du substrat) et ne possédant qu'une couche guidante de 10 μm ne serait pas monomode et posséderait donc un moins grande qualité de faisceau. II est important que l'amplificateur ait un guide multimode épais. Cela permet de focaliser plus facilement le faisceau de pompe 4 sur la tranche de l'empilement des couches 14, 16 et 18 et de rendre le montage plus compact . L'amplificateur de la figure 2 diffère de celui de la figure 1 par le fait que le couche 14 est supprimée. La couche 16, référencée 16a sur la figure 2, repose directement sur le substrat 6. De plus la couche 18, référencée 18a sur la figure 2, a une épaisseur supérieure à l'épaisseur qu'elle avait dans le cas de la figure 1. Dans le cas de la figure 2 , le guide monomode est formé par la couche 16a tandis que le guide multimode est constitué par l'ensemble des couches 16a et 18a. Dans l'exemple représenté, les indices ni, n3 , n4 et n5 conservent les valeurs qu'ils avaient dans le cas de la figure 1, l'épaisseur de la couche 18a est le double de l'épaisseur de la couche 18 de la figure 1 et l'on obtient encore une épaisseur de 10 μm pour le guide multimode.For comparison, a guide with the same numerical aperture of 0.26 (remember that the numerical aperture is the square root of the difference between the square of the optical index of the guide doped with active ions and the square of the optical index of the substrate) and having only a guiding layer of 10 μm would not be monomode and would therefore have a lower beam quality. It is important that the amplifier has a thick multimode guide. This makes it easier to focus the pump beam 4 on the edge of the stack of layers 14, 16 and 18 and to make the assembly more compact. The amplifier in Figure 2 differs from that in Figure 1 in that the layer 14 is removed. The layer 16, referenced 16a in FIG. 2, rests directly on the substrate 6. In addition, the layer 18, referenced 18a in FIG. 2, has a thickness greater than the thickness that it had in the case of FIG. 1 In the case of FIG. 2, the single-mode guide is formed by the layer 16a while the multimode guide is formed by all of the layers 16a and 18a. In the example shown, the indices ni, n3, n4 and n5 retain the values they had in the case of FIG. 1, the thickness of the layer 18a is twice the thickness of the layer 18 of the figure 1 and a thickness of 10 μm is also obtained for the multimode guide.

La figure 3 est une vue en perspective schématique d'un laser de puissance conforme à l'invention. Ce laser de puissance comprend un amplificateur 22 conforme à l'invention (l'amplificateur de la figure 2 dans l'exemple représenté) ainsi qu'une source laser 24 (un micro- laser dans l'exemple représenté) destinée à fournir le faisceau 2 que l'on veut amplifier et une source 26 de lumière de pompage (une barrette de diodes lasers de puissance dans l'exemple représenté) qui fournit plusieurs faisceaux lasers de pompage qui ont la référence collective 28. II s'agit encore d'un pompage transverse et la barrette de diodes lasers de puissance est disposée de façon que les faisceaux de pompage issus des différentes diodes de cette barrette soient perperdiculaires à l'axe du faisceau à amplifier 2. Le laser de puissance comprend aussi une lentille cylindrique 30 prévue pour collimater les faisceaux de pompage et une lentille cylindrique de couplage 32 qui reçoit ces faisceaux collimatés et les focalise sur la tranche du guide multimode (couches 16a et 18a) .Figure 3 is a schematic perspective view of a power laser according to the invention. This power laser comprises an amplifier 22 in accordance with the invention (the amplifier of FIG. 2 in the example shown) as well as a laser source 24 (a micro-laser in the example shown) intended to supply the beam 2 which we want to amplify and a source 26 of pumping light (a strip of power laser diodes in the example shown) which provides several pumping laser beams which have the collective reference 28. It is also a question of a transverse pumping and the array of power laser diodes is arranged so that the pumping beams coming from the different diodes of this array are perpendicular to the axis of the beam to be amplified 2. The power laser also comprises a cylindrical lens 30 provided to collimate the pumping beams and a cylindrical coupling lens 32 which receives these collimated beams and focuses them on the edge of the multimode guide (layers 16a and 18a).

On voit également le faisceau laser 34 qui a été amplifié grâce au pompage optique et qui sort par la tranche du guide monomode (couche 16a) , par une face latérale 36 du guide planaire, adjacente à la face 10 qui reçoit les faisceaux de pompage.We also see the laser beam 34 which has been amplified by optical pumping and which exits through the edge of the single-mode guide (layer 16a), through a lateral face 36 of the planar guide, adjacent to the face 10 which receives the pumping beams.

A titre purement indicatif et nullement limitatif, on utilise une barrette de diodes lasers de puissance de 20 W, émettant à une longueur d'onde de 807 à 808 nm.As a purely indicative and in no way limitative, a strip of laser diodes is used. power of 20 W, emitting at a wavelength of 807 to 808 nm.

La face latérale 12 du guide planaire (face opposée à celle par laquelle pénètrent les faisceaux de pompage) est avantageusement recouverte d'une couche hautement ou totalement réfléchissante 38 vis-à-vis de ces faisceaux de pompage.The lateral face 12 of the planar guide (face opposite to that through which the pumping beams penetrate) is advantageously covered with a highly or totally reflective layer 38 vis-à-vis these pumping beams.

De préférence, cette couche 38 est également anti-reflet vis-à-vis du faisceau à amplifier 2 et une autre couche 40 anti-reflet vis-à-vis du faisceau à amplifier 2, recouvre également la face latérale 36 du guide planaire (face opposée à la face latérale d'entrée du faisceau à amplifier).Preferably, this layer 38 is also anti-reflection with respect to the beam to be amplified 2 and another anti-reflection layer 40 with respect to the beam to be amplified 2, also covers the lateral face 36 of the planar guide ( opposite side to the lateral entry side of the beam to be amplified).

Ces couches 38 et 40 sont des dépôts multidiélectriques qui permettent :These layers 38 and 40 are multi-electric deposits which allow:

- d'optimiser les dimensions transverses du guide planaire tout en assurant une bonne uniformité du pompage dans l'amplificateur,- optimize the transverse dimensions of the planar guide while ensuring good uniformity of pumping in the amplifier,

- d'éviter les oscillations parasites qui contribuent à dégrader les performances de l'amplificateur et- avoid parasitic oscillations which contribute to degrading the performance of the amplifier and

- d'éliminer les pertes d'injection dans la structure guidante et les retours de la lumière dans les diodes de pompe ou dans le micro-laser 24 (oscillateur maître) , qui perturberaient le fonctionnement de ceux-ci.- Eliminate the injection losses in the guiding structure and the light returns in the pump diodes or in the micro-laser 24 (master oscillator), which would disturb the functioning of these.

Au lieu d'utiliser de telles couches, on peut biseauter, comme cela est schématiquement illustré par la figure 4 en vue de dessus, les faces latérales 12 et 36 du guide planaire. On voit que la face 12 est biseautée avec un angle OC et que la face 36 est biseautée avec un angle β. Ces angles α et β sont de l'ordre de 0,5° à 1°. Ces biseaux remplacent donc les traitements diélectriques destinés à lutter contre les oscillations parasites (effet laser indésirable) .Instead of using such layers, it is possible to bevel, as is schematically illustrated by FIG. 4 in top view, the lateral faces 12 and 36 of the planar guide. We see that the face 12 is bevelled with an angle OC and that the face 36 is bevelled with an angle β. These angles α and β are of the order of 0.5 ° to 1 °. These bevels therefore replace the dielectric treatments intended to combat parasitic oscillations (undesirable laser effect).

S'il n'y a pas la couche 38, on peut prévoir, en regard de la face latérale 12, un autre ensemble de pompage optique pour envoyer des faisceaux de pompage 28a dans la tranche du guide multimode, cet autre ensemble comprenant successivement une barrette 26a de diodes lasers de puissance, une lentille de collimation 30a (homologue de la lentille 30) et une lentille de focalisation 32a (homologue de la lentille 32) .If there is no layer 38, it is possible to provide, opposite the lateral face 12, another optical pumping assembly for sending pumping beams 28a into the edge of the multimode guide, this other assembly successively comprising a strip 26a of power laser diodes, a collimating lens 30a (homologous to lens 30) and a focusing lens 32a (homologous to lens 32).

La structure planaire d'un amplificateur conforme à l'invention facilite : - la régulation en température ainsi que la minimisation des effets de distorsion thermo-optiqueThe planar structure of an amplifier according to the invention facilitates: - temperature regulation as well as minimization of thermo-optical distortion effects

(biréfringence thermo-induite) , qui permettent de forts gains avec de fortes puissances de sortie(thermo-induced birefringence), which allow high gains with high output powers

- le passage d'une amplification d'un seul faisceau à une amplification de plusieurs faisceaux, grâce au pompage étant un pompage transverse effectué sur toute la largeur 1 (figure 3) du guide planaire etthe passage from an amplification of a single beam to an amplification of several beams, by means of the pumping being a transverse pumping carried out over the entire width 1 (FIG. 3) of the planar guide and

- l'utilisation de microtechniques optiques et mécaniques pour réaliser des sources lasers de puissance, que l'on peut intégrer dans des microsystèmes .- the use of optical and mechanical microtechnology to produce power laser sources, which can be integrated into microsystems.

L'amplificateur objet de l'invention est susceptible de fonctionner à de multiples longueurs d'onde et avec différents matériaux cristallins (par exemple YAG, LMA, YSO, YAP, YAB, YLF et COB) , que l'on peut déposer par épitaxie, ainsi qu'avec différents ions activateurs (par exemple Nd, Yb, Er, Pr et Cr) et divers co-dopants (par exemple Ga, Lu, Se et Bi) . La concentration en ions dopants et co- dopants dans les différentes couches permet de :The amplifier object of the invention is capable of operating at multiple wavelengths and with different crystalline materials (for example YAG, LMA, YSO, YAP, YAB, YLF and COB), which can be deposited by epitaxy , as well as with different activating ions (for example Nd, Yb, Er, Pr and Cr) and various co-dopants (for example Ga, Lu, Se and Bi). The concentration of doping and co-doping ions in the different layers makes it possible to:

- maîtriser les indices optiques respectifs des matériaux, - maîtriser les désaccords de maille entre les couches adjacentes (ceci est important pour la croissance des multicouches et la réduction des pertes par diffusion de volume ou d'interface) et- master the respective optical indices of the materials, - master the mesh disagreements between the adjacent layers (this is important for the growth of multilayers and the reduction of losses by diffusion of volume or interface) and

- fixer les grandeurs spectroscopiques telles que la longueur d'onde de fluorescence, la section efficace- fix the spectroscopic quantities such as the fluorescence wavelength, the cross section

(« cross section ») d'absorption et la section efficace d'émission stimulée, qui permettent de dimensionner les structures amplificatrices.(“Cross section”) of absorption and the effective section of stimulated emission, which make it possible to size the amplifying structures.

L'amplificateur objet de l'invention permet donc, sous une forme compacte, l'amplification de puissance d'une source laser puisée ou continueThe amplifier object of the invention therefore allows, in a compact form, the power amplification of a pulsed or continuous laser source

(typiquement un micro-laser) tout en permettant à celle-ci de conserver les qualités spatiales originelles de son faisceau qui sont indispensables à son intégration.(typically a micro-laser) while allowing it to retain the original spatial qualities of its beam which are essential for its integration.

D'autres avantages de l'amplification objet de l'invention sont indiqués ci-après.Other advantages of the amplification which is the subject of the invention are indicated below.

1) La configuration de cet amplificateur facilite l'évacuation de chaleur tout en réduisant l'impact des effets thermiques sur la distorsion du faisceau à amplifier. Ceci est important lorsqu'il s'agit d'un amplificateur de puissance.1) The configuration of this amplifier facilitates heat dissipation while reducing the impact of thermal effects on the distortion of the beam to be amplified. This is important when it comes to a power amplifier.

2) La conception de l'empilement de couches diélectriques est telle que l'on peut introduire facilement (avec une optique simple) un ou plusieurs faisceaux de pompe optique (par exemple guidé (s) transversalement), issu(s) d'une ou de plusieurs diodes lasers de puissance, dans la zone active de l'amplificateur. Cette zone active se doit posséder une grande ouverture pour optimiser l'absorption du rayonnement de cette ou ces diodes, rayonnement qui n'est pas limité par la diffraction. 3) L'empilement, tel qu'il est conçu, permet un guidage monomode du faisceau à amplifier dans le guide amplificateur, ce qui assure une bonne qualité du faisceau amplifié à la sortie de l'amplificateur. L'invention permet donc de générer une puissance optique tout en conservant une bonne qualité de faisceau comparable à celle du faisceau avant son amplification.2) The design of the stack of dielectric layers is such that one or more optical pump beams (for example guided transversely), which can be easily introduced (with simple optics), or several power laser diodes, in the active area of the amplifier. This active area must have a large opening to optimize the absorption of the radiation from this or these diodes, radiation which is not limited by diffraction. 3) The stack, as designed, allows single-mode guidance of the beam to be amplified in the amplifier guide, which ensures good quality of the amplified beam at the output of the amplifier. The invention therefore makes it possible to generate optical power while maintaining good beam quality comparable to that of the beam before it is amplified.

On dispose ainsi d'une système compact et à puissance de pompe modulable (par exemple avec des diodes lasers de 10, 20, 30 et 40 W sans changer la structure et en ayant donc accès à différentes gammes de puissance) .This provides a compact system with modular pump power (for example with laser diodes of 10, 20, 30 and 40 W without changing the structure and therefore having access to different power ranges).

Il convient de noter que l'amplificateur objet de l'invention est particulièrement adapté à un pompage transverse par diodes lasers puisque la configuration elliptique des faisceaux de sortie des diodes lasers de puissance (figure 3) permet un couplage aisé par l'intermédiaire d'optiques simples.It should be noted that the amplifier which is the subject of the invention is particularly suitable for transverse pumping by laser diodes since the elliptical configuration of the output beams of the power laser diodes (FIG. 3) allows easy coupling by means of simple optics.

On peut utiliser cet amplificateur avec un ou plusieurs faisceaux lasers (puisés ou continus) à amplifier : par exemple, dans le cas de la figure 3, on peut remplacer le microlaser 24 (émettant un seul faisceau) par une barrette de microlasers 24a émettant plusieurs faisceaux parallèles 2a, que l'on envoie simultanément dans le guide monomode, par la tranche de celui-ci, pour obtenir plusieurs faisceaux amplifiés 34a. L'invention résout pour la première fois le problème du couplage de la puissance d'un faisceau de pompe multimode dans un amplificateur guide d'onde de puissance tout en conservant une bonne qualité optique pour le faisceau amplifié.This amplifier can be used with one or more laser beams (pulsed or continuous) to be amplified: for example, in the case of FIG. 3, the microlaser 24 (emitting a single beam) can be replaced by a strip of microlasers 24a emitting several parallel beams 2a, which are sent simultaneously into the single-mode guide, by the edge thereof, to obtain several amplified beams 34a. The invention solves for the first time the problem of coupling the power of a multimode pump beam in a power waveguide amplifier while retaining good optical quality for the amplified beam.

De plus, compte tenu de la technique utilisée, il est facile de réaliser des structures à passages multiples, compactes et efficaces, comparables à celles dont il est question dans le document [7] . La figure 5 est une vue de dessus schématique d'un amplificateur conforme à l'invention ayant une configuration à passages multiples. Dans le cas de cette figure 5, on utilise encore le guide d'onde planaire 8 de forme parallélépipédique de la figure 1 ou de la figure 2 mais, dans le cas de la figure 5, ce guide planaire est biseauté, suivant un angle γ égal par exemple à 45°, au niveau de deux arêtes latérales opposées et comprend ainsi deux faces latérales opposées supplémentaires 42 et 44 qui sont parallèles et respectivement destinées à recevoir le faisceau laser à amplifier 2 et à fournir un faisceau amplifié 34.In addition, given the technique used, it is easy to produce multiple passage structures, compact and efficient, comparable to those mentioned in the document [7]. Figure 5 is a schematic top view of an amplifier according to the invention having a multiple pass configuration. In the case of this FIG. 5, the planar waveguide 8 of parallelepipedal shape of FIG. 1 or of FIG. 2 is still used, but, in the case of FIG. 5, this planar guide is bevelled, at an angle γ equal for example to 45 °, at two opposite lateral edges and thus comprises two additional opposite lateral faces 42 and 44 which are parallel and respectively intended to receive the laser beam to be amplified 2 and to provide an amplified beam 34.

On voit aussi, sur la figure 5, la barrette de diodes lasers de puissance fournissant les faisceaux de pompe 28 ainsi que la lentille de collimation 30 et la lentille de focalisation 32.FIG. 5 also shows the array of power laser diodes supplying the pump beams 28 as well as the collimating lens 30 and the focusing lens 32.

On voit les nombreux passages effectués, dans le guide monomode, par le faisceau laser que l'on veut amplifier. On voit aussi un dépôt diélectrique 38a hautement ou totalement réfléchissant à la lumière des faisceaux de pompage, formé sur la face latérale 12 du guide planaire, opposée à celle où arrivent les faisceaux de pompage.We see the many passages made, in the single-mode guide, by the laser beam that we want to amplify. We also see a dielectric deposit 38a highly or totally reflecting in the light of the pumping beams, formed on the lateral face 12 of the planar guide, opposite to where the pumping beams arrive.

Les documents cités dans la présente description sont les suivants :The documents cited in this description are as follows:

[1] D.P. Sheperd; C.T.A. Brown, T.J. Warburton, D.C. Hanna, A.C. Tropper et B. Ferrand, A diode-pumped, high gain, planar waveguide, Nd:Y3Al52 amplifier, Applied Physics Letters 71(7), 18 août 1997[1] DP Sheperd; CTA Brown, TJ Warburton, DC Hanna, AC Tropper and B. Ferrand, A diode-pumped, high gain, planar waveguide, Nd: Y 3 Al 52 amplifier, Applied Physics Letters 71 (7), August 18, 1997

[2] Invention de B. Chambaz, I. Chartier, B. Ferrand et D. Pelenc : FR 2685135 A -voir aussi EP 0547956 A et US5,309,471 A[2] Invention of B. Chambaz, I. Chartier, B. Ferrand and D. Pelenc: FR 2685135 A - see also EP 0547956 A and US5,309,471 A

[3] R.N. Ghosh, J. Shmulovich, CF. Kane, M. R.X. De Barros, G. Nykolak, A. J. Bruce et P. C.Becker, 8-mW Threshold Er3+-Doped Planar Waveguide Amplifier, IEEE Photonics Technology Letters, vol. 8, n°4, avril 1996[3] RN Ghosh, J. Shmulovich, CF. Kane, MRX De Barros, G. Nykolak, AJ Bruce and PCBecker, 8-mW Threshold Er 3+ -Doped Planar Waveguide Amplifier, IEEE Photonics Technology Letters, vol. 8, n ° 4, April 1996

[4] C. Kennedy, High Power Diode Pumped Laser Puise Amplifier, Lasers & Optronics, octobre 1997[4] C. Kennedy, High Power Diode Pumped Laser Puise Amplifier, Lasers & Optronics, October 1997

[5] J.D. Minelly, W.L. Barnes, R.I. Laming, P.R. Morkel, J.E. Townsend, S.G. Grubb et D.N. Payne, Diode Array Pumping of Er3+/Yb3+ Co-Doped Fiber Lasers and Amplifiers, IEEE Photonics Technology Letters, vol.5, n°3, mars 1993[5] JD Minelly, WL Barnes, RI Laming, PR Morkel, JE Townsend, SG Grubb and DN Payne, Diode Array Pumping of Er 3+ / Yb 3+ Co-Doped Fiber Lasers and Amplifiers, IEEE Photonics Technology Letters, vol. 5, n ° 3, March 1993

[6] Y.C. Yan, A.J. Faber, H. De Waal, P.G. Kik et A. Polman, Appl . Phys . Lett., 71, 2922 (1997)[6] Y.C. Yan, A.J. Faber, H. De Waal, P.G. Kik and A. Polman, Appl. Phys. Lett., 71, 2922 (1997)

[7] J.J. Degnan, Optimal Design of Passively Q-Switched Microlaser Transmitters for Satellite Laser Ranging, présenté à « Laser Technology Developement Session » de « Tenth International Workshop on Laser Ranging Instrumentation », Shanghai, Chine, 11 au 15 novembre 1996[7] JJ Degnan, Optimal Design of Passively Q-Switched Microlaser Transmitters for Satellite Laser Ranging, presented at "Laser Technology Developement Session" from "Tenth International Workshop on Laser Ranging Instrumentation", Shanghai, China, November 11 to 15, 1996

[8] J.E. Bernard, E. McCullough et A.J. Alcock, High- gain, diode-laser-pumped Nd:YV04 slab amplifier, Cleo 1994, CTUK54, p.116, 1994[8] JE Bernard, E. McCullough and AJ Alcock, High-gain, diode-laser-pumped Nd: YV0 4 slab amplifier, Cleo 1994, CTUK54, p.116, 1994

[9] D.C. Hanna et al., Optics Communications, vol.91, n°3, 1992, p.229 à 235[9] D.C. Hanna et al., Optics Communications, vol.91, n ° 3, 1992, p.229 to 235

[10] EP 0 320 990 A (POLAROID CORP.).[10] EP 0 320 990 A (POLAROID CORP.).

Le dispositif décrit dans le document [9] est un laser planaire pompé transversalement par une diode laser de faible puissance (500 mW) , le faisceau de cette diode étant guidé dans la structure décrite. Ce dispositif n'assure pas le guidage monomode du faisceau laser et il ne s'agit pas d'un amplificateur optique mais d'un laser. Or on a vu plus haut qu'un amplificateur optique ne doit pas devenir un laser. Le dispositif décrit dans le document [10] est une structure du genre « cladding pumping » classiquement utilisée dans les dispositifs à fibre optique pour améliorer le couplage de la lumière de pompe . Dans ce dispositif il n'est pas question d'une lumière de pompe se propageant transversalement à la lumière à amplifier. De plus ce dispositif n'est pas extensible à une configuration multifaisceaux de par la structure même de la fibre optique qui ne peut propager qu'une lumière dans sa section transversale. En outre la configuration planaire de l'invention est nettement plus favorable à la bonne maîtrise des effets thermiques que la configuration circulaire décrite dans le document [10] . De plus seule une structure planaire telle que celle de l'invention permet, en guidant la lumière de pompe transversalement à la lumière à amplifier, d'amplifier de façon compacte et monomode une pluralité de faisceaux par exemple issus de microlaser (s) puisés ou continus. The device described in document [9] is a planar laser pumped transversely by a low power laser diode (500 mW), the beam of this diode being guided in the structure described. This device does not provide single-mode guidance of the laser beam and it is not an optical amplifier but a laser. However, we saw above that an optical amplifier must not become a laser. The device described in document [10] is a structure of the “cladding pumping” type conventionally used in fiber optic devices to improve the coupling of the pump light. In this device, there is no question of a pump light propagating transversely to the light to be amplified. In addition, this device cannot be extended to a multibeam configuration by the very structure of the optical fiber which can only propagate light in its cross section. In addition, the planar configuration of the invention is much more favorable to good control of thermal effects than the circular configuration described in document [10]. Furthermore, only a planar structure such as that of the invention makes it possible, by guiding the pump light transversely to the light to be amplified, to amplify in a compact and monomode fashion a plurality of beams, for example from pulsed microlaser (s) or continuous.

Claims

REVENDICATIONS 1. Amplificateur optique destiné à amplifier une première lumière (2), par pompage optique au moyen d'une deuxième lumière (4) , cet amplificateur comprenant un substrat (6) et, sur ce substrat, un guide d'onde optique planaire (8) comportant une pluralité de couches (14, 16, 18; 16a, 18a) , cet amplificateur étant caractérisé en ce que cette pluralité de couches forme - un guide d'onde optique multimode et de grande ouverture numérique pour la deuxième lumière, ce guide d'onde multimode étant apte à accepter la majeure partie de cette deuxième lumière et à guider celle-ci, et - un guide d'onde optique monomode pour la première lumière, ce guide d'onde monomode étant apte à guider la première lumière et à amplifier celle-ci grâce au pompage optique engendré par la deuxième lumière. 1. An optical amplifier intended to amplify a first light (2), by optical pumping by means of a second light (4), this amplifier comprising a substrate (6) and, on this substrate, a planar optical waveguide ( 8) comprising a plurality of layers (14, 16, 18; 16a, 18a), this amplifier being characterized in that this plurality of layers forms - a multimode optical waveguide and of large digital aperture for the second light, this multimode waveguide being able to accept most of this second light and to guide it, and - a single-mode optical waveguide for the first light, this single-mode waveguide being able to guide the first light and to amplify it thanks to the optical pumping generated by the second light. 2. Amplificateur selon la revendication 1, dans lequel le guide d'onde planaire comprend :2. Amplifier according to claim 1, in which the planar waveguide comprises: - une première couche (16a) formée sur le substrat (6) et contenant des ions activateurs pour l'amplification de la première lumière, et - une deuxième couche (18a) formée sur la première couche, la première couche formant le guide monomode pour la première lumière et l'ensemble des première et deuxième couches formant le guide multimode de grande ouverture numérique pour la deuxième lumière, l'indice optique de la première couche étant supérieur à celui du substrat, l'indice optique de la deuxième couche étant inférieur à celui de la première couche et supérieur à celui du substrat.- a first layer (16a) formed on the substrate (6) and containing activating ions for the amplification of the first light, and - a second layer (18a) formed on the first layer, the first layer forming the single-mode guide for the first light and all of the first and second layers forming the multimode guide of large digital aperture for the second light, the optical index of the first layer being greater than that of the substrate, the optical index of the second layer being lower to that of the first layer and higher than that of the substrate. 3. Amplificateur selon la revendication 1, dans lequel le guide d'onde planaire comprend : - une première couche (14) formée sur le substrat,3. Amplifier according to claim 1, in which the planar waveguide comprises: - a first layer (14) formed on the substrate, - une deuxième couche (16) formée sur la première couche et contenant des ions activateurs pour l'amplification de la première lumière, et- a second layer (16) formed on the first layer and containing activating ions for the amplification of the first light, and - une troisième couche (18) formée sur la deuxième couche, la deuxième couche formant le guide monomode pour la première lumière et l'ensemble des première, deuxième et troisième couches formant le guide multimode de grande ouverture numérique pour la deuxième lumière, l'indice optique de la deuxième couche étant supérieur à celui du substrat et l'indice optique de chacune des première et troisième couches étant inférieur à celui de la deuxième couche et supérieur à celui du substrat .- A third layer (18) formed on the second layer, the second layer forming the single-mode guide for the first light and all of the first, second and third layers forming the multimode guide with large digital aperture for the second light, the the optical index of the second layer being greater than that of the substrate and the optical index of each of the first and third layers being less than that of the second layer and greater than that of the substrate. 4. Amplificateur selon l'une quelconque des revendications 2 et 3 , comprenant en outre une couche de protection (20) formée sur ledit ensemble et ayant un indice optique inférieur ou égal à celui du substrat.4. Amplifier according to any one of claims 2 and 3, further comprising a protective layer (20) formed on said assembly and having an optical index less than or equal to that of the substrate. 5. Amplificateur selon l'une quelconque des revendications 1 à 4, dans lequel le guide planaire a la forme d'un parallélépipède rectangle et comporte quatre faces latérales polies.5. Amplifier according to any one of claims 1 to 4, wherein the planar guide has the shape of a rectangular parallelepiped and has four polished side faces. 6. Amplificateur selon la revendications 5, dans lequel la face latérale du guide d'onde planaire, face qui est opposée à celle par laquelle pénètre la deuxième lumière (4), est recouverte d'une couche (38) hautement ou totalement réfléchissante vis-à-vis de cette deuxième lumière. 6. Amplifier according to claim 5, in which the lateral face of the planar waveguide, the face which is opposite to that by which the second light enters (4), is covered with a layer (38) of highly or totally reflecting screws. opposite this second light. 7. Amplificateur selon la revendication 6, dans lequel la couche (38) qui est hautement ou totalement réfléchissante vis-à-vis de la deuxième lumière (4) est également anti-reflet vis-à-vis de la première lumière (2) et la face latérale du guide d'onde planaire, face qui est opposée à celle par laquelle pénètre la première lumière, est recouverte d'une couche (40) anti-reflet vis-à-vis de la première lumière. 7. Amplifier according to claim 6, in which the layer (38) which is highly or totally reflective with respect to the second light (4) is also anti-reflection with respect to the first light (2) and the lateral face of the planar waveguide, the face which is opposite to that through which the first light penetrates, is covered with a layer (40) anti-reflection vis-à-vis the first light. 8. Amplificateur selon la revendications 5, dans lequel les faces latérales (12, 36) du guide d'onde planaire, faces qui sont opposées à celles par lesquelles pénètrent respectivement les première et deuxième lumières, sont biseautées à environ 1°. 8. Amplifier according to claim 5, in which the lateral faces (12, 36) of the planar waveguide, faces which are opposite to those through which the first and second lumens penetrate respectively, are bevelled at approximately 1 °. 9. Amplificateur optique selon la revendication 5, dans lequel le guide planaire est en outre biseauté suivant un même angle au niveau de deux arêtes latérales opposées et comprend ainsi deux faces latérales opposées supplémentaires (42, 44) qui sont respectivement destinées à recevoir la première lumière9. An optical amplifier according to claim 5, in which the planar guide is also bevelled at the same angle at two opposite lateral edges and thus comprises two additional opposite lateral faces (42, 44) which are respectively intended to receive the first light (2) et à fournir cette première lumière sous forme amplifiée (34) dans une configuration de passages multiples .(2) and providing this first light in amplified form (34) in a multiple pass configuration. 10. Amplificateur selon l'une quelconque des revendications 1 à 9, dans lequel les couches (14,10. Amplifier according to any one of claims 1 to 9, in which the layers (14, 16, 18; 16a, 18a) du guide planaire sont formées par épitaxie en phase liquide.16, 18; 16a, 18a) of the planar guide are formed by liquid phase epitaxy. 11. Laser de puissance comprenant :11. Power laser comprising: - l'amplificateur optique (22) selon l'une quelconque des revendications 1 à 10,- the optical amplifier (22) according to any one of claims 1 to 10, - une source laser (24) destinée à fournir la première lumière (2) à cet amplificateur et - une source de lumière de pompage (26) destinée à fournir la deuxième lumière (4) à l'amplificateur.- a laser source (24) intended to supply the first light (2) to this amplifier and - a pump light source (26) intended to supply the second light (4) to the amplifier. 12. Laser selon la revendication 11, dans lequel la source de lumière de pompage (26) est disposée de façon à permettre un pompage optique transverse dans l'amplificateur (22).12. The laser of claim 11, wherein the pumping light source (26) is arranged so as to allow transverse optical pumping in the amplifier (22). 13. Laser selon l'une quelconque des revendications 11 et 12, dans lequel la source de lumière de pompage comprend au moins une diode laser de puissance (26, 26a).13. The laser as claimed in claim 11, in which the pumping light source comprises at least one power laser diode (26, 26a). 14. Laser selon l'une quelconque des revendications 11 à 13, dans lequel la source laser comprend au moins un microlaser (24) . 14. Laser according to any one of claims 11 to 13, wherein the laser source comprises at least one microlaser (24).
PCT/FR1999/002516 1998-10-16 1999-10-15 Planar waveguide laser amplifier Ceased WO2000024093A1 (en)

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JP2000577741A JP2002528900A (en) 1998-10-16 1999-10-15 Optical amplifier having optically pumped planar waveguide and power laser using the optical amplifier
EP99947588A EP1121732A1 (en) 1998-10-16 1999-10-15 Planar waveguide laser amplifier

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FR9813011A FR2784809B1 (en) 1998-10-16 1998-10-16 OPTICAL PLANAR WAVEGUIDE POWER OPTICAL AMPLIFIER AND POWER LASER USING THE SAME
FR98/13011 1998-10-16

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JP2010502029A (en) * 2006-08-30 2010-01-21 テールズ Amplifying device having parallel hexahedron shaped laser amplifying medium and pumping means having lamp
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EP1121732A1 (en) 2001-08-08
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JP2002528900A (en) 2002-09-03

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