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WO2000077877B1 - Mems transmission and circuit components - Google Patents

Mems transmission and circuit components

Info

Publication number
WO2000077877B1
WO2000077877B1 PCT/US2000/016021 US0016021W WO0077877B1 WO 2000077877 B1 WO2000077877 B1 WO 2000077877B1 US 0016021 W US0016021 W US 0016021W WO 0077877 B1 WO0077877 B1 WO 0077877B1
Authority
WO
WIPO (PCT)
Prior art keywords
transmission line
line element
actuator mechanisms
mems
moveable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2000/016021
Other languages
French (fr)
Other versions
WO2000077877A9 (en
WO2000077877A1 (en
Inventor
Jung-Chih Chiao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Hawaii at Manoa
University of Hawaii at Hilo
Original Assignee
University of Hawaii at Manoa
University of Hawaii at Hilo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Hawaii at Manoa, University of Hawaii at Hilo filed Critical University of Hawaii at Manoa
Priority to AU54804/00A priority Critical patent/AU5480400A/en
Priority to US10/009,986 priority patent/US7091924B1/en
Publication of WO2000077877A1 publication Critical patent/WO2000077877A1/en
Publication of WO2000077877B1 publication Critical patent/WO2000077877B1/en
Anticipated expiration legal-status Critical
Publication of WO2000077877A9 publication Critical patent/WO2000077877A9/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
    • G02B6/266—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
    • H01Q3/44—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the electric or magnetic characteristics of reflecting, refracting, or diffracting devices associated with the radiating element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
    • H01Q3/44—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the electric or magnetic characteristics of reflecting, refracting, or diffracting devices associated with the radiating element
    • H01Q3/46—Active lenses or reflecting arrays

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Waveguide Switches, Polarizers, And Phase Shifters (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

An Rf device (100) that comprises unique MEMS RF transmission and circuit components (104-106) that are integrated together on a semiconductor chip (101) to form the RF device (100). These MEMS components (104-106) are monolithically formed on the chip (101) and are also reconfigurable on the chip (101).

Claims

AMENDED CLAIMS
[received by the International Bureau on 29 December 2000 (29.12.00); original claims 55-62 replaced by amended claims 53-60; remaining claims unchanged (2 pages)]
53. The MEMS reconfigurable transmission line element of claim 54 wherein each of the first and second micro-mechanical pivot hinges further comprises a via that fixedly couples the second hinge plate to the pivot pin.
54. The MEMS reconfigurable transmission line element of claim 53 wherein, for each 5 of the first and second micro-mechanical pivot hinges: the first hinge plate and the hinge pin are formed from a first major layer of polysilicon; the second hinge plate and the extension arm are formed from a second major layer of polysilicon; and 10 the via is formed from an intermediate layer of polysilicon between the first and second major layers of polysilicon.
55. A MEMS reconfigurable transmission line element comprising: moveable coplanar conductors; first actuator mechanisms; 15 second actuator mechanisms; insulating attachment arms, each of the insulating attachment arms having one end fixedly coupled to a corresponding one of the actuator mechanisms and the other end fixedly coupled to a corresponding one of the moveable planar conductors; wherein, when the actuator mechanisms are controlled to move backward or forward, ^0 the insulating attachment arms pull or push the moveable planar conductors out or in to change the impedance of the transmission line element.
56. The MEMS reconfigurable transmission line element of claim 55 wherein the transmission line element does not comprise a stationary center conductor so that the transmission line element comprises a CPS transmission line element.
25 57. The MEMS reconfigurable transmission line element of claim 55 further comprising a stationary center conductor so that the transmission line element comprises a CPW transmission line element.
68
58. A MEMS impedance tuner for changing the impedance of a transmission line, the impedance tuner comprising: a transmission line branch for shunt connection to the transmission line; a moveable conductive plate suspended over the transmission line branch; actuator mechanisms; insulating attachment arms, each of the insulating attachment arms having one end fixedly coupled to a corresponding one of the actuator mechanisms and the other end fixedly coupled to a corresponding side of the moveable conductive plate so as to suspend the moveable conductive plate over the transmission line branch; wherein, when the actuator mechanisms are controlled to move backward or forward, the moveable conductive plate is moved backward or forward over the transmission line branch to change the impedance of the transmission line.
59. The MEMS reconfigurable transmission line element of claim 59 wherein the transmission line branch comprises a CPS transmission line branch.
60. The MEMS reconfigurable transmission line branch of claim 58 wherein the transmission line branch comprises a CPW transmission line branch.
69
PCT/US2000/016021 1999-06-11 2000-06-09 Mems transmission and circuit components Ceased WO2000077877A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU54804/00A AU5480400A (en) 1999-06-11 2000-06-09 Mems transmission and circuit components
US10/009,986 US7091924B1 (en) 2000-06-09 2000-06-09 MEMS transmission and circuit components

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US13886599P 1999-06-11 1999-06-11
US60/138,865 1999-06-11
US17365999P 1999-12-30 1999-12-30
US60/173,659 1999-12-30

Publications (3)

Publication Number Publication Date
WO2000077877A1 WO2000077877A1 (en) 2000-12-21
WO2000077877B1 true WO2000077877B1 (en) 2001-03-08
WO2000077877A9 WO2000077877A9 (en) 2002-06-27

Family

ID=26836626

Family Applications (3)

Application Number Title Priority Date Filing Date
PCT/US2000/016023 Ceased WO2000077556A1 (en) 1999-06-11 2000-06-09 Mems optical components
PCT/US2000/016021 Ceased WO2000077877A1 (en) 1999-06-11 2000-06-09 Mems transmission and circuit components
PCT/US2000/016024 Ceased WO2000077543A1 (en) 1999-06-11 2000-06-09 Reconfigurable quasi-optical unit cells

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/US2000/016023 Ceased WO2000077556A1 (en) 1999-06-11 2000-06-09 Mems optical components

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/US2000/016024 Ceased WO2000077543A1 (en) 1999-06-11 2000-06-09 Reconfigurable quasi-optical unit cells

Country Status (2)

Country Link
AU (3) AU5480600A (en)
WO (3) WO2000077556A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6498870B1 (en) 1998-04-20 2002-12-24 Omm, Inc. Micromachined optomechanical switches
US6859299B1 (en) 1999-06-11 2005-02-22 Jung-Chih Chiao MEMS optical components
US6850353B1 (en) * 1999-06-11 2005-02-01 University Of Hawaii MEMS optical components
US6731833B2 (en) 2001-01-16 2004-05-04 T-Rex Enterprises Corp. Optical cross connect switch
US6571029B1 (en) 2001-02-13 2003-05-27 Omm, Inc. Method for determining and implementing electrical damping coefficients
US6556739B1 (en) 2001-02-13 2003-04-29 Omm, Inc. Electronic damping of MEMS devices using a look-up table
DE10152945B4 (en) * 2001-10-26 2004-02-05 Eads Deutschland Gmbh MEMS switch and method for its manufacture

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3576579A (en) * 1968-04-19 1971-04-27 Sylvania Electric Prod Planar radial array with controllable quasi-optical lens
US3574438A (en) * 1969-02-27 1971-04-13 Nasa Quasi-optical microwave component
FR2063967B1 (en) * 1969-10-15 1973-10-19 Bony Gilbert
US4823357A (en) * 1986-11-10 1989-04-18 The United States Of America As Represented By The Secretary Of The Air Force Diffraction limited dichroic combiner diode laser
US5047783A (en) * 1987-11-06 1991-09-10 Millitech Corporation Millimeter-wave imaging system
US5119454A (en) * 1988-05-23 1992-06-02 Polaroid Corporation Bulk optic wavelength division multiplexer
US5170169A (en) * 1991-05-31 1992-12-08 Millitech Corporation Quasi-optical transmission/reflection switch and millimeter-wave imaging system using the same
US5412186A (en) * 1994-02-23 1995-05-02 Texas Instruments Incorporated Elimination of sticking of micro-mechanical devices
US5512374A (en) * 1994-05-09 1996-04-30 Texas Instruments Incorporated PFPE coatings for micro-mechanical devices
US5485304A (en) * 1994-07-29 1996-01-16 Texas Instruments, Inc. Support posts for micro-mechanical devices
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US5835256A (en) * 1995-06-19 1998-11-10 Reflectivity, Inc. Reflective spatial light modulator with encapsulated micro-mechanical elements
US5768007A (en) * 1995-09-11 1998-06-16 Texas Instruments Incorporated Phase matched reset for digital micro-mirror device
US5706123A (en) * 1996-09-27 1998-01-06 Texas Instruments Incorporated Switched control signals for digital micro-mirror device with split reset
US5982326A (en) * 1997-07-21 1999-11-09 Chow; Yung Leonard Active micropatch antenna device and array system
US5903393A (en) * 1997-12-04 1999-05-11 Kalibjian; Ralph Optical-hybrid etalons for simultaneous phase- and polarization-diversity operations
US5994159A (en) * 1997-12-22 1999-11-30 Lucent Technologies, Inc. Self-assemblying micro-mechanical device
US5995688A (en) * 1998-06-01 1999-11-30 Lucent Technologies, Inc. Micro-opto-electromechanical devices and method therefor
US6101371A (en) * 1998-09-12 2000-08-08 Lucent Technologies, Inc. Article comprising an inductor
US6034807A (en) * 1998-10-28 2000-03-07 Memsolutions, Inc. Bistable paper white direct view display

Also Published As

Publication number Publication date
WO2000077877A9 (en) 2002-06-27
AU5480600A (en) 2001-01-02
WO2000077877A1 (en) 2000-12-21
AU5480400A (en) 2001-01-02
AU5480500A (en) 2001-01-02
WO2000077543A1 (en) 2000-12-21
WO2000077556A1 (en) 2000-12-21

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