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WO2000070297A3 - Humidity chamber for scanning atomic force microscope - Google Patents

Humidity chamber for scanning atomic force microscope Download PDF

Info

Publication number
WO2000070297A3
WO2000070297A3 PCT/US2000/013658 US0013658W WO0070297A3 WO 2000070297 A3 WO2000070297 A3 WO 2000070297A3 US 0013658 W US0013658 W US 0013658W WO 0070297 A3 WO0070297 A3 WO 0070297A3
Authority
WO
WIPO (PCT)
Prior art keywords
chamber
afm
base
sample platform
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2000/013658
Other versions
WO2000070297A2 (en
Inventor
Edward Embree
Mark Vanlandingham
Jonathan Martin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Standards and Technology NIST
Original Assignee
National Institute of Standards and Technology NIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute of Standards and Technology NIST filed Critical National Institute of Standards and Technology NIST
Priority to AU51411/00A priority Critical patent/AU5141100A/en
Publication of WO2000070297A2 publication Critical patent/WO2000070297A2/en
Anticipated expiration legal-status Critical
Publication of WO2000070297A3 publication Critical patent/WO2000070297A3/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/12—Fluid environment
    • G01Q30/14—Liquid environment

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The present invention provides a novel humidity chamber suitable for use with an atomic force microscope (AFM). The humidity chamber of the present invention employs an intricate geometrical design which can accommodate a scanned-stylus AFM with an optical lever. This geometrical design allows the invention to enclose one or more of the AFM scanner, tip assembly, optical lever detection system, sample and an optical microscope objective lens, without degrading the ability to operate the AFM or the related systems. The invention is comprised of two major pieces: a chamber within which the AFM scanning head assembly is placed, and an integrated sample platform and spring-loaded base-plate that allows samples to be loaded and unloaded without removal of the chamber from the AFM scanning head assembly. The sample platform, which extends up from the base-plate and is inserted into the chamber, can include a magnet that is securely attached to the base. Once the sample platform is positioned inside the chamber, a locking pin can be inserted between the chamber and the bottom portion of the sample platform to secure the sample platform and base-plate. The spring-loaded base allows the z-directional motors of the AFM to be used to position the sample just below the probe prior to scanning, while at the same time providing an essentially air-tight fit between the chamber and the AFM scanning head. An embodiment of the present invention is suitable for use with one or both of a means for sensing relative humidity and a means for controlling relative humidity.
PCT/US2000/013658 1999-05-19 2000-05-18 Humidity chamber for scanning atomic force microscope Ceased WO2000070297A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU51411/00A AU5141100A (en) 1999-05-19 2000-05-18 Humidity chamber for scanning stylus atomic force microscope with cantilever tracking

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13488599P 1999-05-19 1999-05-19
US60/134,885 1999-05-19

Publications (2)

Publication Number Publication Date
WO2000070297A2 WO2000070297A2 (en) 2000-11-23
WO2000070297A3 true WO2000070297A3 (en) 2002-10-03

Family

ID=22465458

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/013658 Ceased WO2000070297A2 (en) 1999-05-19 2000-05-18 Humidity chamber for scanning atomic force microscope

Country Status (2)

Country Link
AU (1) AU5141100A (en)
WO (1) WO2000070297A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7472576B1 (en) 2004-11-17 2009-01-06 State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Portland State University Nanometrology device standards for scanning probe microscopes and processes for their fabrication and use

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4892830A (en) * 1987-04-02 1990-01-09 Baylor College Of Medicine Environmentally controlled in vitro incubator
US5393980A (en) * 1993-05-11 1995-02-28 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Quality monitor and monitoring technique employing optically stimulated electron emmission
JPH0963525A (en) * 1995-08-22 1997-03-07 Nikon Corp Scanning electron microscope
US5675154A (en) * 1995-02-10 1997-10-07 Molecular Imaging Corporation Scanning probe microscope
US5767514A (en) * 1994-06-23 1998-06-16 Lloyd; Grongar Wynn Scanning probe and an approach mechanism therefor
JPH10241620A (en) * 1997-02-27 1998-09-11 Nikon Corp Environmentally controlled scanning electron microscope
WO1999062097A1 (en) * 1998-05-22 1999-12-02 Euro-Celtique, S.A. Dissolution stage for an environmental scanning electron microscope
US6051825A (en) * 1998-06-19 2000-04-18 Molecular Imaging Corporation Conducting scanning probe microscope with environmental control

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4892830A (en) * 1987-04-02 1990-01-09 Baylor College Of Medicine Environmentally controlled in vitro incubator
US5393980A (en) * 1993-05-11 1995-02-28 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Quality monitor and monitoring technique employing optically stimulated electron emmission
US5767514A (en) * 1994-06-23 1998-06-16 Lloyd; Grongar Wynn Scanning probe and an approach mechanism therefor
US5675154A (en) * 1995-02-10 1997-10-07 Molecular Imaging Corporation Scanning probe microscope
JPH0963525A (en) * 1995-08-22 1997-03-07 Nikon Corp Scanning electron microscope
JPH10241620A (en) * 1997-02-27 1998-09-11 Nikon Corp Environmentally controlled scanning electron microscope
WO1999062097A1 (en) * 1998-05-22 1999-12-02 Euro-Celtique, S.A. Dissolution stage for an environmental scanning electron microscope
US6051825A (en) * 1998-06-19 2000-04-18 Molecular Imaging Corporation Conducting scanning probe microscope with environmental control

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 07 31 July 1997 (1997-07-31) *
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 14 31 December 1998 (1998-12-31) *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7472576B1 (en) 2004-11-17 2009-01-06 State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Portland State University Nanometrology device standards for scanning probe microscopes and processes for their fabrication and use

Also Published As

Publication number Publication date
WO2000070297A2 (en) 2000-11-23
AU5141100A (en) 2000-12-05

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