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WO1999003764A1 - Dispositif de manipulation de plateaux - Google Patents

Dispositif de manipulation de plateaux Download PDF

Info

Publication number
WO1999003764A1
WO1999003764A1 PCT/US1998/014437 US9814437W WO9903764A1 WO 1999003764 A1 WO1999003764 A1 WO 1999003764A1 US 9814437 W US9814437 W US 9814437W WO 9903764 A1 WO9903764 A1 WO 9903764A1
Authority
WO
WIPO (PCT)
Prior art keywords
movable member
tray
base
tab
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US1998/014437
Other languages
English (en)
Inventor
Merlin E. Behnke
Neil H. Hesse
Danny R. Simmons
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SYSTEMATION ENGINEERED PRODUCTS Inc
Original Assignee
SYSTEMATION ENGINEERED PRODUCTS Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SYSTEMATION ENGINEERED PRODUCTS Inc filed Critical SYSTEMATION ENGINEERED PRODUCTS Inc
Publication of WO1999003764A1 publication Critical patent/WO1999003764A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H10P72/3202—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/02—Measures preceding sorting, e.g. arranging articles in a stream orientating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34—Sorting according to other particular properties
    • B07C5/342—Sorting according to other particular properties according to optical properties, e.g. colour
    • B07C5/3422—Sorting according to other particular properties according to optical properties, e.g. colour using video scanning devices, e.g. TV-cameras
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36—Sorting apparatus characterised by the means used for distribution
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B15/00—Attaching articles to cards, sheets, strings, webs, or other carriers
    • B65B15/04—Attaching a series of articles, e.g. small electrical components, to a continuous web
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B9/00—Enclosing successive articles, or quantities of material, e.g. liquids or semiliquids, in flat, folded, or tubular webs of flexible sheet material; Subdividing filled flexible tubes to form packages
    • B65B9/02—Enclosing successive articles, or quantities of material between opposed webs
    • B65B9/04—Enclosing successive articles, or quantities of material between opposed webs one or both webs being formed with pockets for the reception of the articles, or of the quantities of material
    • B65B9/045—Enclosing successive articles, or quantities of material between opposed webs one or both webs being formed with pockets for the reception of the articles, or of the quantities of material for single articles, e.g. tablets
    • H10P72/0444—
    • H10P72/3212—
    • H10P72/3314—

Definitions

  • This invention relates to arrangements for receiving devices after such devices have been processed through an inspection and handling system and, more particularly, to such arrangements as are used in the handling and inspection of devices such as semiconductors .
  • the devices to be inspected are often provided in compartmented trays which have multiple rows and columns of pockets in which the devices are transported.
  • An inspection and handling system is utilized to inspect such devices. Trays of devices are transported through various stages of the inspection and handling system including laser scanning, inversion, camera scanning and individual placement at a final destination so that devices meeting the exacting acceptance standards are separated from those devices which do not meet such standards .
  • PNP pick and place
  • PNP mechanisms are usually movable in only one direction, a straight line path. It is therefore necessary to provide a tray arrangement that can move a tray, or trays, relative to the PNP path of motion for proper receipt of devices selected by the PNP mechanism.
  • this invention proposes a receiving tray apparatus wherein multiple trays can be provided and moved in synchronism with the pick and place module.
  • a base plate is provided in conjunction with a platform for carrying the receiving trays and is movable relative to the base plate.
  • Sensors are provided on both the base plate and platform to monitor the position of the movable platform.
  • Conductors are associated with the sensors on both members.
  • the conductors on the base plate are fixed to the base plate so that no relative movement occurs therebetween.
  • the conductors associated with the sensors on the movable platform are movable with the platform but fixed to the platform so that no relative movement occurs therebetween. All of the clamping of the tray, or trays, in the movable platform is done mechanically, as opposed to electrically or pneumatically. Therefore, no cable or conduits are associated with the clamping mechanism.
  • Fig. 1 is a side view, generally schematic, of an inspection and handling machine of the type with which this invention is usable;
  • Fig. 2 is a plan view of the mechanism of Fig. 1;
  • Fig. 3 is a plan view of a tray usable with this invention illustrating parts of the tray clamping arrangement
  • Fig. 4 is a section view along line 4-4 of Fig. 3;
  • Fig. 5 is an exploded view of part of the tray system
  • Fig. 6 is another exploded view of the tray system
  • Fig. 7 is an exploded perspective view of a base plate assembly of the tray system
  • Fig. 8 is an exploded perspective view of the movable platform assembly of the tray system
  • Fig. 9 is an exploded perspective view of a cross bar assembly of the movable platform assembly
  • Fig. 10 is an exploded perspective view of a pivoting end cam assembly
  • Fig. 11 is an exploded perspective view of a pivoting side cam assembly
  • Fig. 12 is a side view of parts of the base plate and movable platform illustrating the end cam action;
  • Fig. 13 is a partial side view similar to
  • Fig. 14 is a top view of the structure of Fig. 13.
  • FIGs. 1 and 2 An overall inspection and handling machine is illustrated in Figs. 1 and 2.
  • the machine includes an infeed module 10 at which trays filled with devices such as semiconductor circuit chips are introduced into the process by being stacked one on top the other.
  • a typical tray 12 is illustrated in Fig. 3. Trays for containing semiconductor devices include JEDEC style trays.
  • the tray 12 has multiple columns and rows of pockets 14 into which devices are housed.
  • the tray 12 includes a first surface 16, a second surface 18, a first corner 20, a second corner 22, a third corner 24, a fourth corner 26, a side edge 28, a side edge 30, an end edge 32, an end edge 34 and preferably notches 36 in the side edges 28 and 30.
  • the corner 26 is preferably slightly bevelled and is used to determine the orientation of the tray.
  • the tray 12 is adapted to be transported through the inspection handler apparatus 10 leading with the end edge 32.
  • a single tray is taken from the bottom of the stack into a transport 11 and moved to a scanning module 14 where the chips in the tray are scanned, for example, by a laser assembly 16 which is movable relative to the tray as indicated by arrow 18.
  • the tray is moved by transport 22 to an inversion module 20 in which the semiconductor devices are inverted.
  • the inverted devices, in a tray are moved by transport 22 to a second inspection station 25, normally a package vision inspection (PVI) module.
  • PVI package vision inspection
  • a camera 26 which is movable relative to the tray as illustrated by arrows 28, 30 and 32, inspects the side of the devices opposite to that inspected at scanning module 14.
  • PNP pick and place
  • a precisor 36 is provided in the PNP module.
  • the precisor can be of conventional construction operating on the basis of a vacuum head 38 which is engageable with preselected devices to remove them from the traveling tray and, in this instance, transport them to a tray module 40 located to one side of the transport 22.
  • the selected devices can be either "good” devices or rejects.
  • a tray or trays in tray module 40 may be filled with "good” devices to be transported by the precisor to the tray traveling through the tray. The traveling tray ultimately proceeds to an outfeed module 42.
  • the tray module constructed in accordance with this invention achieves that movement in the tray module.
  • the tray module 34 is located adjacent and below the PNP module and includes three bays 701, 702 and 703 that each can accommodate one tray.
  • the PNP module 34 in cooperation with the mobility of tray module 34 has the ability to move an individual device from a compartment in a tray traveling through the machine to a compartment in one of the three trays in the bays 701, 702 and 703.
  • the tray module includes a base plate assembly 704 and a movable platform assembly 705.
  • the base plate assembly 704 is best shown in Fig. 8.
  • the base plate assembly 704 is comprised of a generally rectangular base plate 706 having a pair of end edges 707 and 708 and a pair of side edges 709 and 710.
  • the base plate 706 is mounted to the overall machine using a pair of T-slot extrusion rails 711a and 711b.
  • Three spaced end cams 712a, 712b and 712c are mounted to the base plate 706 adjacent the end edge 707 and in-line relative to each other.
  • Each end cam 712a, 712b and 712c includes a pair of mounting flanges 713a and 713b and an elevated central portion 714.
  • Each central portion 714 includes a top surface 715 having a rolling profile which includes a pair of hills 716a and 716b with a valley 717 therebetween.
  • Each side cam 718a, 718b and 718c is mounted to the base plate 706 and are in line relative to each other.
  • Each side cam 718a, 718b and 718c includes a body portion 719 and a flange 720 extending outwardly from the body portion 719 and elevated from the base plate 706.
  • Each side cam 718a, 718b and 718c has a top surface 721 with a ramped profile.
  • the side cam 718a is mounted adjacent the end cam 712a
  • the side cam 718b is mounted adjacent the end cam 712b
  • the side cam 718c is mounted adjacent the end cam 712c.
  • a pair of roller tracks 722a and 722b are mounted to the base plate 706 and in parallel relation with each other and the side edges 709 and 710.
  • Each roller track 722a and 722b includes a pair of rail stops 723a and 723b mounted over each roller track 722a and 722b.
  • a pair of slide brackets 724a and 724b slidable engage each roller track 722a and 722b so as to be movable along the respective roller track 722a and 722b.
  • a belt bracket 725 is secured to the slide bracket 724b on the roller track 722b so as to extend outwardly from the slide bracket 724b in a direction toward the roller track 722a.
  • a pulley assembly 726 is mounted to the base plate 706 adjacent the roller track 722b and adjacent the end edge 707 of the base plate 706.
  • the pulley assembly 726 includes a pulley 727.
  • a second pulley assembly 728 is mounted to the base plate 706 adjacent the roller track 722b and adjacent the end edge 708.
  • the pulley assembly 728 includes a pulley 729 and a pulley 730.
  • a belt 731 is positioned around the pulleys 727 and 730.
  • the belt bracket 725 is secured to the belt 731 such that when the belt 731 travels around the pulleys 729 and 730, the slide brackets 724b moves along the roller track 722b.
  • a stepper motor 732 is mounted to the base plate 706 adjacent the end edge 708 with a motor mount 733.
  • the stepper motor 732 is mounted so that its rotational shaft is horizontally oriented.
  • the shaft has thereon a pulley 735.
  • a belt 736 is positioned around the pulleys 735 and 729.
  • rotation of the shaft in one direction causes the slide bracket 724b to travel along the roller track 722b in a first direction which is towards the end edge 708.
  • Rotation of the shaft in the opposite direction causes the slide bracket 724b to travel along the roller track 722b in a second direction which is towards the end edge 707.
  • a motor drive 737 is mounted to the base plate 706 adjacent stepper motor 732.
  • a pair of photoelectric sensors 738a and 738b are mounted to the base plate 706 with one sensor 738a adjacent the side edge 709 and the other sensor 738b adjacent the roller track 722a.
  • One end 739a of a sensor cable plugs into the sensor 738a and one end 739b of a sensor cable plugs into the sensor 738b.
  • a sensor mount 740 is mounted to the base plate 706 adjacent the side edge 709.
  • the sensor mount 740 has therein preferably twelve bores.
  • a sensor bracket 741 having therein preferably twelve bores is secured to the sensor mount 740 such that the bores align.
  • a first end of a conductor 742 is secured to each bore such that twelve leads extend outwardly from the sensor mount 740.
  • the conductor 742 as well as the two sensor cables 739a and 739b extend along the base plate 706 and make respective connections at a control system 707 secured to the base plate 706 adjacent the end edge 708 and the side edge 709.
  • the conductors associated with the sensor elements on the base plate are movable with the base plate and are fixed to the base plate such that no relative movement occurs between the base plate and those conductors.
  • a cover 743 is secured to the base plate 706.
  • the cover includes various apertures that are oriented so that the end cams 712a, 712b and 712c, the side cams 718a, 718b and 718c, the pulley assembly 726 and the belt 731 protrude through respective apertures.
  • the oveable platform assembly 705 includes a platform 744 having a top surface 745, a bottom surface 746, a pair of end edges 747a and 747b and a pair of side edges 748a and 748b.
  • the side edge 748a has therein a lip 749 along the length of the side edge 748a.
  • the side edge 748b has therein a rectangular notch 750.
  • the end edge 747a has therein three spaced rectangular notches 751.
  • the top surface 745 of the platform 744 includes two elongate grooves 752a and 752b that extend from the end edge 747a to the end edge 747b and parallel to the lip 749.
  • the platform 744 further includes three rectangular apertures 753a, 753b and 753c, two rectangular apertures 754a and 754b and three elongate slots 755a, 755b and 755c.
  • the bay 701 is defined between the lip 749 and the groove 752a
  • the bay 702 is defined between the groove 752a and the groove 752b
  • the bay 703 is defined between the groove 752b and the side edge 748b of the platform 744.
  • a generally rectangular end bar 756 is mounted to the platform 744 in the lip 749 and in each of the two grooves 752a and 752b such that an end of each end bar 756 is flush with the end edge 747a.
  • a generally U-shaped locking bar 758 is mounted to the platform 744 such that one end of the bar 758 is secured to the end edge 747a with a thumb screw 759 and the other end is positioned in the notch 750.
  • a tray stop 760 is mounted to the end edge 747a adjacent the lip 749 and adjacent each groove 752a and 752b.
  • a pin 761 extends outwardly from each tray stop 760.
  • Three pivoting end cam assemblies 762a, 762b and 762c are mounted to the end edge 747a adjacent a tray stop 760.
  • each pivoting end cam assembly 762a, 762b and 762c includes a cam pivot block 763 and a generally L-shaped finger 764.
  • the finger 764 includes an upwardly extending tab 765 which is preferably integral with a leg portion 766.
  • the leg portion 766 is pivotally secured to the cam pivot block 763 with a pivot pin 767.
  • the leg portion 766 includes a bore 768 and a recess 769.
  • a bearing 770 is mounted in the recess 769 and allowed to rotate about a pin 771 housed in the bore 768.
  • the finger 764 is able to teeter totter about the pivot pin 767.
  • a spring 772 biases the finger 764 such that the finger 764 is normally teetered so that the tab 765 is raised upwardly relative to the bearing 770 and is angled toward the edge 747a.
  • the cam pivot block 763 is mounted to the bottom surface 746 of the platform 744 such that the tab 765 of the finger 764 is adjacent the end edge 747a and extends upwardly (Fig. 6). The bearing 770 is therefore beneath the platform 744.
  • the platform assembly 705 further includes a first slide plate 773 that is generally rectangular, has a top surface 774a and has a bottom surface 11 Ah .
  • the slide plate 774 has therein two apertures 775a and 775b and a rectangular notch 776.
  • a pair of second slide plates 777a and 777b having therein a rectangular apertures 778 are secured to the bottom surface 774b of the slide plate 773 such that the apertures 775a of the slide plate 773 and the aperture 778 of the slide plate 777a are aligned and, similarly, the notch 776 of the slide plate 773 and aperture 778 of the slide plate 777b are aligned (Fig. 6).
  • Three pivoting side cam assemblies 779a, 779b and 779c are mounted to the slide plate 773.
  • each pivoting side cam assembly 779a, 779b and 779c includes a cam pivot block 780 and a finger 781.
  • the finger 781 includes an upwardly extending tab 782 and a generally U-shaped end portion 783 which defines a recess 784.
  • the finger 781 is pivotally secured to the cam pivot block 780 by a pivot pin 785.
  • a swivel block 786 with a bearing 787 mounted thereto is pivotally mounted in the recess 784.
  • the bearing 787 is allowed to rotated about a pin 788.
  • the axis of the pin 788 is transverse to the axis of the pivot pin 785.
  • each pivoting side cam assembly 779a, 779b and 779c are mounted to the bottom surface 774b of the slide plate 773 such that the tabs 782 extend upwardly through the apertures 775a and 775b and the notch 776 in the slide plate 773.
  • the finger 781 acts as a teeter totter about the pivot pin 785 such that movement of the bearing 786 toward the bottom surface 774b of the slide plate 773 teeters the tabs 782 downwardly in the respective apertures 775a and 775b and in the notch 776.
  • the slide plate 773 is mounted to the bottom surface 746 of the platform 744 such that the tabs 782 of the pivoting side cam assemblies 779a, 779b and 779c extend upwardly through and are pivotable in the respective apertures 754a and 754b and the notch 750 in the platform 744.
  • a sensor bracket 788a with sensor flag 789 attached is also mounted to the bottom surface 746 of the platform 744.
  • Another sensor bracket 788b is also mounted to the bottom surface 746 of the platform 744.
  • the bracket 788b has therethrough twelve bores. Twelve sensor locks 790 are housed in and extend outwardly of the bores.
  • a sensor bracket 788c having therein twelve bores is mounted to the sensor bracket 788b such that the bores align.
  • a conductor 791 is in communication with each sensor lock 790 and extends from the bracket 788b and makes appropriate connections.
  • the conductors associated with the sensor elements on the movable platform are movable with that platform and are fixed to the platform such that no relative movement occurs between the movable platform and those conductors.
  • the moveable platform assembly 705 includes an elongate cross bar 792 having a top surface 793, a side edge 794 and three apertures 795.
  • a locking lever 796 is aligned with the each aperture and a threaded bolt 797 extends through each aperture 795 to secure each locking lever 796 to the cross bar 792.
  • Three tee slides 798a, 798b and 798c are secured to the side edge 794 and extend outwardly of the cross bar 792.
  • a sensor bracket 799 is secured to each tee slide 798.
  • a sensor flag 800 is secured to the tee slide 798b.
  • Three corner brackets 801a, 801b and 801c are slidably mounted to the top surface 793 of the cross bar 792 so as to be adjustable along the length of the cross bar 792.
  • the cross bar 792 is slidable mounted to the platform 744 with the tee slide 798a housed in the lip 749, the tee slide 798b housed in the groove 752a and the tee slide 798c housed in the groove 752b.
  • the tee slides 798a, 798b and 798c act as guides to move the cross bar 792 along the platform 744 between the end edges 747a and 747b.
  • the bolts 797 extend downwardly through the slots 755a, 755b and 755c and a tee lock 802 is threaded onto each bolt 797 from beneath the platform 744 (Fig. 60).
  • the bolts 797 move along the slots 755a, 755b and 755c which also acts as a guide to keep the cross bar 752 aligned relative to the platform 744.
  • the tee locks 802 tighten against the bottom surface 746 of the platform 744 preventing movement of the cross bar 792 relative to the platform 744.
  • the tee locks 802 disengage from contact with the bottom surface 746 of the platform 744 enabling the cross bar 752 to move along the platform 744 toward and away from the end edges 747a and 747b.
  • the moveable platform assembly 705 is mounted on the base plate assembly 704 to allow movement of the platform assembly 705 relative to the base plate 706.
  • the bottom surface 746 of the platform 744 is secured to the four slide brackets 724a and 724b.
  • the bays 701, 702 and 703 of the triple tray module 700 are adjustable to accommodate varying sized trays.
  • the cross bar 792 is adjusted so that a particular tray can be positioned between the tab 765 and the cross bar 792 in each bay 701, 702 and 703 through manipulation of the locking levers 796 as described above.
  • the width of each bay 701, 702 and 703 is also adjustable by adjustment of the corner brackets 801a, 801b and 801c. After these adjustments are made, one size of tray should fit snugly in each bay 701, 702 and 703.
  • a tray is loaded into each of the bays 701, 702 and 703 of the platform 744.
  • Fig. 4 illustrates the engagement of the clamping member 801b, 798b, 748b, 782 and 765 with tray after having left the home position.
  • the stepper motor 732 actuates movement of the platform 744 necessary for the precisor of the PNP module 450 to set a device in a particular pocket of one of the rows of one of the three trays housed on the platform 744.
  • the precisor is only moveable linearly between the side edges 748a and 748b of the platform 744.
  • each pivoting side cam assembly 779a, 779b and 779c contact the ramped top surface 721 of the side cams 718a, 718b and 718c, respectively. Movement of the bearings 787 up the respective ramps, until they come to a rest on the top of the ramp, pivots the finger 781 such that the tabs 782 move toward the side edge 748b of the platform 744 and away from the respective tray.
  • the bearings 787 pivoting side cam assembly 779a, 779b and 779c contact the ramped top surface 721 of the side cams 718a, 718b and 718c, respectively. Movement of the bearings 787 up the respective ramps, until they come to a rest on the top of the ramp, pivots the finger 781 such that the tabs 782 move toward the side edge 748b of the platform 744 and away from the respective tray.
  • the platform assembly 705 When the flag 800 engages the sensor 738b or when the flag 789 engages the sensor 738a, the platform assembly 705 is in its home position.
  • the sensors 740 mounted to the base plate 706 act in concert with the sensors 788b mounted to the bottom surface 746 of the platform 744 to determine the position of the moving platform 744.
  • the sensors 740 and 788b also form a wireless communication system between the base plate 706 and the moving platform 744. This wireless communication ensures that no wires will get tangled when the platform 744 moves relative to the base plate 706.
  • the tray 12 of one bay is shown as held between clamp member 765 and bar 792 and between clamp 782 and corner bars 798a and 798b. That configuration occurs when the movable platform is away from its home position. In the home position, clamp members 765 and 782 assume the dotted line position show in Fig. 3.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Multimedia (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

Cette invention se rapporte à un dispositif de manipulation de plateaux conçu pour être utilisé avec un système de manipulation et de contrôle de dispositifs électroniques. Ce dispositif de manipulation comporte un élément de base (704) fixe et une plate-forme (744) susceptible de pivoter par rapport à l'élément de base. La base et la plate-forme sont équipées de capteurs (738, 788) associés à des conducteurs (742, 791). Les conducteurs (742) disposés sur la plaque de base (706) sont fixés à cette dernière de façon à ce qu'aucun mouvement relatif ne puisse se produire entre les conducteurs et la plaque. Les conducteurs (791) associés aux capteurs (788) disposés sur la plate-forme (744) se déplacent avec la plate-forme relativement à la plaque de base mais sont fixés à la plate-forme de façon à ce qu'aucun mouvement relatif ne puisse se produire entre ces conducteurs et la plate-forme. Les plateaux (12) positionnés sur la plate-forme sont sélectivement bloqués sur place ou libérés lorsqu'on souhaite les retirer de la plate-forme. Le blocage sélectif et la libération sont mis en oeuvre au moyen d'un agencement à cames (712, 718) qui est mécanique, et non électrique ou pneumatique.
PCT/US1998/014437 1997-07-16 1998-07-15 Dispositif de manipulation de plateaux Ceased WO1999003764A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US5269897P 1997-07-16 1997-07-16
US60/052,698 1997-07-16

Publications (1)

Publication Number Publication Date
WO1999003764A1 true WO1999003764A1 (fr) 1999-01-28

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Cited By (4)

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SG71938A1 (en) * 1999-08-12 2001-03-20 Mfg Integration Technology Ltd Method and apparatus for inspecting an object
US6833453B2 (en) 2000-10-17 2004-12-21 Pharmacia & Upjohn Company Methods of producing oxazolidinone compounds
CN103738693A (zh) * 2013-12-30 2014-04-23 苏州工业园区世纪福科技有限公司 周转托盘回转装置
CN111778559A (zh) * 2020-08-17 2020-10-16 中国工程物理研究院总体工程研究所 石墨盘翻转式GaN单晶衬底激光预剥离集成腔

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Cited By (4)

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SG71938A1 (en) * 1999-08-12 2001-03-20 Mfg Integration Technology Ltd Method and apparatus for inspecting an object
US6833453B2 (en) 2000-10-17 2004-12-21 Pharmacia & Upjohn Company Methods of producing oxazolidinone compounds
CN103738693A (zh) * 2013-12-30 2014-04-23 苏州工业园区世纪福科技有限公司 周转托盘回转装置
CN111778559A (zh) * 2020-08-17 2020-10-16 中国工程物理研究院总体工程研究所 石墨盘翻转式GaN单晶衬底激光预剥离集成腔

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