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WO1999003100A1 - Procede de production d'un disque matrice, matrice produite a partir de ce disque et anneau d'adaptation destine a la production - Google Patents

Procede de production d'un disque matrice, matrice produite a partir de ce disque et anneau d'adaptation destine a la production Download PDF

Info

Publication number
WO1999003100A1
WO1999003100A1 PCT/SE1998/001215 SE9801215W WO9903100A1 WO 1999003100 A1 WO1999003100 A1 WO 1999003100A1 SE 9801215 W SE9801215 W SE 9801215W WO 9903100 A1 WO9903100 A1 WO 9903100A1
Authority
WO
WIPO (PCT)
Prior art keywords
disc
annular element
matrix
diameter
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/SE1998/001215
Other languages
English (en)
Swedish (sv)
Inventor
Åke BILLMAN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toolex Alpha AB
Original Assignee
Toolex Alpha AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toolex Alpha AB filed Critical Toolex Alpha AB
Priority to EP98930022A priority Critical patent/EP0992035A1/fr
Priority to AU79503/98A priority patent/AU7950398A/en
Publication of WO1999003100A1 publication Critical patent/WO1999003100A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
    • B29D11/00769—Producing diffraction gratings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D17/00—Producing carriers of records containing fine grooves or impressions, e.g. disc records for needle playback, cylinder records; Producing record discs from master stencils
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers

Definitions

  • the present invention relates to a method of manufacturing a master disc unit, starting from a microstructure substrate disc of a first diameter, said master disc unit being intended for the manufacture of a disc-shaped matrix of a second, larger diameter for reproduction of micromechanical products, kinoforms or the like.
  • micromechanical products such as e.g. valveless micro- fluid pumps, and kinoforms and other microoptical-like conductors and lenses, so- called DOE (Diffractive Optical Elements) and the like.
  • DOE diffractive Optical Elements
  • These processes normally start with a disc substrate in the form of a round disc of silicon, quarts or glass, coated with a layer sensitive to light or radiation, which layer is given the desired form-structure by exposure to light or electron beams or by etching.
  • Such discs typically have a standard diameter of 4 inches (101,6 mm) and a thickness of ca. 0,5-1,5 mm.
  • the depth of the cavities formed (the structure depth) in the silicon disc or the disc layer can vary from a few ⁇ m in kinoforms up to ca. 500 ⁇ m in micromechanical applications.
  • the structured side of the disc substrate is coated in a known manner with a metal layer, for example by spraying or steaming on a thin layer of nickel, to make the structured surface electrically conducting in a subsequent plating phase, in which a matrix is manufactured by nickel-plating, for example, against the metallized, structured disc substrate.
  • the matrix can then be used as a press matrix in an injection moulding machine to manufacture, by known injection moulding technology, plastic discs.
  • the products can be made in multiples on each extruded disc and then be cut out as finished products or components.
  • the matrix can be used as an original or father matrix for further matrix production, i.e. for manufacturing mirror copies thereof, which are in turn used for manufacturing a number of press matrices.
  • existing plating equipment for ordinary CD- press matrices has often been used, and existing machines for moulding CDs have often been used for injection moulding.
  • One purpose of the present invention is to suggest a process which makes it possible to easily adapt the dimensions of structured disc substrates of a certain smaller diameter when manufacturing flat master disc units to a diameter which is larger than the diameter of the disc substrate.
  • the process of the type described by way of introduction is characterized by laying the micro-structured substrate disc with its structured side against a flat supporting surface, laying a flat, annular element, having a hole with an inner diameter somewhat exceeding the diameter of the substrate disc and which has an outer diameter which corresponds to or exceeds the diameter of the press matrix which is to be manufactured by the master disc unit, on the flat supporting surface with the annular element coaxially surrounding the substrate disc so as to form an annular slot between the annular element and the substrate disc, introducing adhesive into the slot, and causing the adhesive to cure into an adhesive joint between the annular element and the substrate disc to form a raw master disc unit.
  • the invention also relates to an adapter ring for manufacturing a master disc unit intended for the manufacture of a disc-shaped matrix for reproduction of micro- mechanical products, kinoforms or the like, characterized by having flat opposite surfaces, an outer diameter corresponding to or exceeding the outer diameter of the matrix which is to be manufactured by the master disc unit, and a hole diameter somewhat exceeding the diameter of a structured substrate disc which is to be concentrically surrounded by and joined to the adapter ring.
  • Fig. 1 is a cross sectional view through an adapter ring according to the invention for use in manufacturing a master disc unit for a press matrix for reproduction of micromechanical products, kinoforms or the like; and Fig. 2 shows on an enlarged scale a partial section through the adapter ring of
  • Fig. 1 joined to a structured substrate disc.
  • 10 generally designates an adapter ring which has flat surfaces 12 and 14, and an outer diameter of e.g. 200 mm and a thickness of 6 mm.
  • the ring 10 has a central, cylindrical hole 16 with an inner diameter which exceeds, by one or a few tenths of a millimeter, the outer diameter of a structured substrate disc 18 (Fig. 2) which is to be joined to the ring 10.
  • the depth d of the hole 16 corresponds essentially to the thickness of the substrate disc 18 (e.g. 1,5 mm).
  • the hole 16 opens upwards in a widened hole portion 20, which is defined by a conical hole wall 22, which can have an inclination of for example ca. 45° relative to the plane of the ring 10.
  • the substrate disc 18 which can consist of a silicon disc or a quartz or glass disc of standard format (diameter ca. 100 mm), which is coated with a layer which is sensitive to light or radiation, carries on one side a structuring 24 with a configuration corresponding to the product which is to be reproduced with the aid of a press matrix manufactured in accordance with the invention, in an injection moulding machine of standard type for CD-discs.
  • a process according to the invention for manufacturing a master disc unit, intended for the manufacture of a disc-shaped matrix for reproduction of micromechanical products, kinoforms or mirror copies of the matrix, will now be described.
  • a structured substrate disc 18 is laid on a flat supporting surface 26 with its structured surface 24 facing the supporting surface 26.
  • the supporting surface 26 can have a surface of silicon rubber or consist of another solid material and be coated with e.g. a plastic film of Teflon ® (not shown) to obtain suitable sealing and release proper- ties.
  • the adapter ring 10 is then placed concentrically over the substrate disc 18 so that a narrow annular slot (ca. 0,1-0,3 mm) is formed between the outer periphery of the substrate disc 18 and the hole 16 in the ring 10.
  • the ring 10 and the substrate disc 18 are caused to be in intimate contact with the silicon rubber surface 26 (or the plastic film), in order to prevent the adhesive 28, which in a subsequent step is introduced into the annular slot, penetrates to the undersurface 12 of the ring 10 and the substrate disc 18 and adheres to the supporting surface.
  • the adhesive 28 After application of the adhesive 28, it is cured by means of UV-light, for example.
  • the "raw" master disc unit thus formed is transferred to a metallization station (not shown), where a thin (ca. 10- 100 nm) metal layer of nickel, for example, is sputtered or steamed over the structured surface of the substrate disc and over the adhesive joint surface and the underside 12 of the ring 10.
  • a fmished master disc unit is obtained with a dimension suited to electroplating in existing plating equipment for making press matrices for CD-discs.
  • the finished, metallized master disc units After manufacturing the finished, metallized master disc units, they can be trans- ferred to or be mounted in an electroplating plant with standard holders, where matrices of nickel, for example, are mounted against the structured side of the master disc unit, whereafter the matrices in a subsequent step are surface-treated on their reversed sides to a smoothness of preferably Ra ⁇ 0,1 urn and are provided with a centre hole of standard format and are edge-cut at the outer periphery to the desired standard diameter for injection moulding machines intended for CD- production.
  • the substrate disc has relatively deep (up to ca. 500 ⁇ m), depressions in its structured surface, one can expect with present plating methods relatively large variations on the reverse side of the matrix produced.
  • it can be suitable to fill the entire widened hole portion 20 with adhesive or other material, up to the surface 14 of the ring 10.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

L'invention concerne un procédé permettant de produire, à partir d'un disque substrat (18) micro-structuré d'un premier diamètre, un disque matrice destiné à la production d'une matrice en forme de disque d'un second diamètre plus large afin de reproduire des produits micromécaniques, des copies kinoformes ou miroirs d'une telle matrice. Selon l'invention, le disque substrat (18) micro-structuré est posé avec sa face structurée (24) sur une surface support plate (26). Ensuite, un élément plat annulaire (10) est placé sur la surface support plate (26), l'élément annulaire (10) entourant de façon coaxiale le disque substrat (18) pour former une fente annulaire entre l'élément annulaire (10) et le disque substrat (18). Le disque substrat (18) et l'élément annulaire (10) sont réunis par un adhésif (28) pour former un disque matrice brut. L'invention concerne également un procédé de production d'une matrice en forme de disque à l'aide du disque matrice formé. Une matrice pressée en forme de disque peut être formée contre une face métallisée du disque matrice, par un procédé connu, l'électroplastie. L'invention concerne enfin un anneau d'adaptation destiné à la production d'un disque matrice. L'anneau a des faces plates opposées (12, 14), un diamètre extérieur correspondant ou supérieur au diamètre extérieur de la matrice devant être produite par le disque matrice, et un diamètre de trou légèrement supérieur au diamètre du disque substrat structuré (18) qui est destiné à être entouré de façon concentrique par l'anneau d'adaptation (10) et à être assemblé à ce dernier.
PCT/SE1998/001215 1997-06-27 1998-06-23 Procede de production d'un disque matrice, matrice produite a partir de ce disque et anneau d'adaptation destine a la production Ceased WO1999003100A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP98930022A EP0992035A1 (fr) 1997-06-27 1998-06-23 Procede de production d'un disque matrice, matrice produite a partir de ce disque et anneau d'adaptation destine a la production
AU79503/98A AU7950398A (en) 1997-06-27 1998-06-23 Method of manufacturing a master disc unit and a matrix produced therefrom and adapter ring for manufacturing the master disc unit

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9702491-3 1997-06-27
SE9702491A SE512483C2 (sv) 1997-06-27 1997-06-27 Förfarande för framställning av masterskivenhet samt av en därav framställd pressmatris jämte adapterring för framställning av masterskivenheten

Publications (1)

Publication Number Publication Date
WO1999003100A1 true WO1999003100A1 (fr) 1999-01-21

Family

ID=20407561

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SE1998/001215 Ceased WO1999003100A1 (fr) 1997-06-27 1998-06-23 Procede de production d'un disque matrice, matrice produite a partir de ce disque et anneau d'adaptation destine a la production

Country Status (4)

Country Link
EP (1) EP0992035A1 (fr)
AU (1) AU7950398A (fr)
SE (1) SE512483C2 (fr)
WO (1) WO1999003100A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT520718A4 (de) * 2018-01-30 2019-07-15 Joanneum Res Forschungsgmbh Verfahren zur herstellung eines formeinsatzes mit (sub-)mikrostrukturen sowie werkstück mit (sub-)mikrostrukturen

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0268291A2 (fr) * 1986-11-20 1988-05-25 Kabushiki Kaisha Meiki Seisakusho Moule de fabrication de disques
EP0296677A1 (fr) * 1987-06-26 1988-12-28 Koninklijke Philips Electronics N.V. Dispositif de moulage par injecion pour la fabrication de disques d'information en matière plastique, et procédé de fabrication de disques d'information en matière plastique au moyen d'un dispositif de moulage par injection
US5427520A (en) * 1992-01-31 1995-06-27 Sony Corporation Mold device for fabricating disc substrate
US5607705A (en) * 1994-05-25 1997-03-04 Meiki Co., Ltd. Mold for molding disc substrata

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2501823A (en) * 1947-05-16 1950-03-28 Capitol Records Record forming die
GB2065168B (en) * 1979-12-07 1983-03-23 Emi Ltd Tact with a metal or metalised cathode plate used in produelectroplating arrangement for establishing electrical conction of a disc record matrix
US4445995A (en) * 1983-02-28 1984-05-01 Rca Corporation Cathode head having improved seal means
JP2636903B2 (ja) * 1988-09-30 1997-08-06 株式会社リコー 光ディスク基板の射出成形用金型
US5078852A (en) * 1990-10-12 1992-01-07 Microelectronics And Computer Technology Corporation Plating rack
US5167792A (en) * 1990-12-19 1992-12-01 Canon Kabushiki Kaisha Master holder of stamper electroforming apparatus and electroforming method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0268291A2 (fr) * 1986-11-20 1988-05-25 Kabushiki Kaisha Meiki Seisakusho Moule de fabrication de disques
US4790738A (en) * 1986-11-20 1988-12-13 Meiki Co., Ltd. Injection mold having rotatable stamper holding ring
EP0296677A1 (fr) * 1987-06-26 1988-12-28 Koninklijke Philips Electronics N.V. Dispositif de moulage par injecion pour la fabrication de disques d'information en matière plastique, et procédé de fabrication de disques d'information en matière plastique au moyen d'un dispositif de moulage par injection
US5427520A (en) * 1992-01-31 1995-06-27 Sony Corporation Mold device for fabricating disc substrate
US5607705A (en) * 1994-05-25 1997-03-04 Meiki Co., Ltd. Mold for molding disc substrata

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT520718A4 (de) * 2018-01-30 2019-07-15 Joanneum Res Forschungsgmbh Verfahren zur herstellung eines formeinsatzes mit (sub-)mikrostrukturen sowie werkstück mit (sub-)mikrostrukturen
AT520718B1 (de) * 2018-01-30 2019-07-15 Joanneum Res Forschungsgmbh Verfahren zur herstellung eines formeinsatzes mit (sub-)mikrostrukturen sowie werkstück mit (sub-)mikrostrukturen

Also Published As

Publication number Publication date
AU7950398A (en) 1999-02-08
SE512483C2 (sv) 2000-03-20
SE9702491L (sv) 1998-12-28
EP0992035A1 (fr) 2000-04-12
SE9702491D0 (sv) 1997-06-27

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