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WO1999053205A1 - Dispositif amplificateur de debit pour courants fluidiques - Google Patents

Dispositif amplificateur de debit pour courants fluidiques Download PDF

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Publication number
WO1999053205A1
WO1999053205A1 PCT/EP1999/001199 EP9901199W WO9953205A1 WO 1999053205 A1 WO1999053205 A1 WO 1999053205A1 EP 9901199 W EP9901199 W EP 9901199W WO 9953205 A1 WO9953205 A1 WO 9953205A1
Authority
WO
WIPO (PCT)
Prior art keywords
control
channel
quantity amplifier
amplifier device
amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP1999/001199
Other languages
German (de)
English (en)
Inventor
Kurt Stoll
Michael Weinmann
Peter Post
Herbert Vollmer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Festo SE and Co KG
Original Assignee
Festo SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo SE and Co KG filed Critical Festo SE and Co KG
Publication of WO1999053205A1 publication Critical patent/WO1999053205A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0832—Modular valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0846—Electrical details
    • F15B13/0857—Electrical connecting means, e.g. plugs, sockets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0875—Channels for electrical components, e.g. for cables or sensors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0878—Assembly of modular units
    • F15B13/0885—Assembly of modular units using valves combined with other components
    • F15B13/0892—Valves combined with fluid components
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0059—Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/009—Fluid power devices

Definitions

  • a disadvantage of the known microvalve is the limited controllable fluid throughput. Due to the electrostatic actuators, only a small stroke of the valve plate can be realized, which limits the available flow cross sections. Conventional valve technology must therefore usually be used to control fluid flows with a higher throughput, which results in correspondingly larger construction volumes.
  • a quantity amplifier device for fluid streams which contains at least one fluid-controlled micromechanical quantity amplifier produced by microstructuring processes, one by two Laminated body has a chamber which is subdivided by a movable control membrane into a control chamber communicating with a control channel and an overflow chamber communicating with an inflow channel and an outflow channel, the control membrane depending on the control pressure applied to the control channel into a closed position closing the inflow channel and the outflow channel or an open position releasing these two channels and thus allowing fluid to flow over between the inflow channel and the outflow channel can be moved.
  • the core of the quantity amplifier device is formed by a micromechanical quantity amplifier in membrane construction, which can be produced by any microstructuring technology.
  • a control membrane is used as the control element, which at least partially has flexible properties and whose instantaneous switching
  • Position can be specified by the control pressure applied to the control channel.
  • a sufficiently high control pressure is applied to the control channel, the control membrane is pressed tightly against the mouths of the inflow channel and the outflow channel, so that the connection between these two channels is shut off.
  • the sufficiently high control pressure can be achieved, for example, by choosing a suitable control pressure level or by suitable surface differences in the control membrane.
  • the control membrane lifts off the aforementioned orifices, so that a fluid present at the inflow channel, for example compressed air, can flow through the overflow space to the outflow channel.
  • control membrane which is caused by the fluidic and preferably pneumatic control pressure, allows the realization of relatively large switching paths and accordingly the provision of large flow cross sections in the open position, see above da ß large amounts of working fluid can be controlled with a small amount of control fluid despite micro-design.
  • the volume booster device is suitable for vacuum applications as well as for overpressure applications.
  • the production of the quantity amplifier device and the quantity amplifier belonging to it is possible in principle with all relevant microstructuring methods.
  • the production using silicon technology or by means of impression technology is only an example.
  • the control membrane can be manufactured separately and then attached to the
  • Laminated bodies to be fixed in addition, a direct molding, for example by spin coating, would also be possible after the associated laminated body has been planarized beforehand, if necessary.
  • a particular advantage of the quantity amplifier device is that a plurality of micromechanical quantity amplifiers can be combined in it with a suitable fluidic connection. This allows the implementation of cascaded arrangements or higher-quality valve functions.
  • three micromechanical quantity amplifiers are fluidly linked to one another in such a way that a three-way valve switching function can be implemented.
  • a characteristic can easily be set here according to the selected link
  • the quantity amplifier device expediently has two quantity amplifiers which are linked to one another in such a way that the supply S flow channel of one is connected to the outflow channel of the other quantity amplifier and both of the aforementioned channels communicate with a common working channel, the control channel of one quantity amplifier being connected via a pilot channel to the outflow channel of a third quantity amplifier (pilot quantity amplifier) used for pilot control, the control channel of which communicates with the control channel of the other quantity amplifier of the first two quantity amplifiers mentioned.
  • the pilot channel is connected to a vent channel leading to the surroundings, which allows the pilot channel to be vented when the outflow channel of the pilot quantity amplifier is blocked.
  • a constantly open ventilation channel provided with a flow resistance can be provided, which could also be referred to as a "bleed resistor” or "standard leak”.
  • a switchable shut-off valve could also be provided, the actuation of which is coupled to the actuation of the pilot quantity amplifier.
  • the quantity booster device expediently has at least one micromechanical control valve which is constructed in a multi-layer construction and which is assigned to the control channel of at least one quantity booster in order to influence its control pressure and thus the pressure of the connected control room or rooms. Since only small amounts of fluid have to be applied to the micromechanical quantity amplifier on the part of the control channel, a conventional microvalve with electrical actuation can be used for control or pre-control.
  • a possible design for a control valve is given in EP 0 485 739 AI, whereby either a 3/2-way valve or two 2/2-valves could expediently be used.
  • the quantity amplifier device has a structural unit in which at least one micromechanical quantity amplifier and at least one micromechanical control valve are combined to form one structural unit.
  • the various laminated bodies of the quantity booster (s) and of the control valve (s) can at least partially be designed as a structural unit and can be processed together for this purpose.
  • FIG. 1 shows a first design of the quantity amplifier device according to the invention, containing a single micro-mechanical quantity amplifier, which is shown in cross section, the control membrane being shown in the closed position and its open position additionally indicated by dash-dot lines.
  • Figure 2 shows a further embodiment of the quantity amplifier device according to the invention, the three to one
  • 3/2-switching function linked quantity amplifier and a micromechanical control valve serving for control has, the overall arrangement is combined to form a structural unit and dash-dotted lines indicate additional cover layer bodies in which connecting fluid channels can run, the whole on average at right angles to the expansion planes of the individual Layers,
  • FIG. 3 shows the membrane amplifier device according to FIG. 2 in a section parallel to the plane of expansion of the layers according to section line IV-IV, with an optional supplementary component being shown in dash-dot lines, which contains a switchable shut-off valve (not shown in greater detail) which is assigned to a ventilation channel
  • FIG. 4 shows a schematic representation of the structure and the internal fluidic connection of the individual components of the quantity booster device according to FIGS. 2 and 3.
  • a quantity amplifier device 1 which has a single fluid-controlled micromechanical quantity amplifier 2.
  • This quantity amplifier 2 is produced by any suitable microstructuring method in a layered construction.
  • the quantity amplifier 2 comprises two layer bodies 3, 4 which are arranged next to one another and have mutually parallel expansion planes in the normal direction of these expansion planes and are produced using silicon technology.
  • the laminated bodies 3, 4 delimit between them a chamber 5, for example formed by etching, in which is arranged a control membrane 6, for example made of plastic material, which is at least partially flexible or at least flexibly suspended.
  • control membrane 6 is fixed on the edge in the connection area between the two laminated bodies 3, 4 and divides the chamber 5 into a control chamber 7 facing one laminated body 3 and an overflow space 8 facing the other laminated body 4.
  • control membrane could also be free without an attachment on the edge be designed to be movable.
  • control chamber 7 defined between the control membrane 6 and the one, first laminate 3 communicates with a control channel 12 which penetrates the first laminate 3 and opens out into the control chamber 7 opposite the control membrane 6.
  • the overflow space 8 communicates with an inflow channel 13 and an outflow channel 14. These two channels penetrate the other, second sealing body 4 and open opposite the control membrane 6 into the overflow space 8.
  • the control membrane 6 can be moved in the chamber 5 at right angles to its plane of expansion running parallel to the layer planes, in accordance with the double arrow 15.
  • it can be designed to be flexurally elastic overall and have a film-like structure that is present in the exemplary embodiment.
  • control membrane 6 can be moved between the closed position shown in solid lines in FIG. 1 and an open position shown in broken lines by the movement options mentioned. In the closed position, it covers the mouths of the inflow channel 13 and the outflow channel 14 facing the overflow chamber 8, so that these two channels are separated from the overflow chamber 8. The control membrane 6 is lifted from the mouth of the control channel 12, which consequently communicates with the control chamber 7. In the open position, the control membrane 6 covers the mouth of the control channel 12 and simultaneously releases the mouths of the inflow channel 13 and outflow channel 14, which are thus both connected to the overflow space 8.
  • the inflow channel 13 is connected to a pressure source Y - preferably a compressed air source - and the outflow channel 14 leads to a consumer Z.
  • the control channel 12 can be connected in a controlled manner to a control pressure source X, the current position of the control membrane 6 being dependent on that Control channel depends on the existing control pressure.
  • the pressure at the inflow channel 13 will correspond to the pressure that can be applied at the control channel 12, since both channels can be supplied from the same fluid source.
  • the control membrane 6 which is in the form of a light film, is placed close over the mouths of the channels 13, 14 due to the area differences, so that the consumer Z is shut off from the pressure source Y.
  • Removing the control pressure at the control channel 12 means that the fluid present at the inflow channel 13 can lift the control membrane 16 from the assigned mouth and can move it in the direction of the first laminate 3.
  • the control membrane 6 also lifts from the mouth of the outflow channel 14 and the fluid originating from the pressure source Y can flow out to the consumer Z through the overflow space 8.
  • control membrane 6 is thus controlled fluidically and in particular pneumatically. This allows large diaphragm strokes to be realized in the direction of movement 15 and, accordingly, in the open position to ensure large flow cross sections. With only low flow values on the part of the control channel 12, large flow values on the part of the inflow channel 13 and the outflow channel 14 can thus be controlled and a connected consumer can thus be supplied with high flow rates despite the micro-construction.
  • micromechanical quantity amplifier in membrane design which can be used optimally for controlling fluid flows, particularly in micropneumatic applications. It can be used alone or in combination with other similar quantity amplifiers in order to obtain quantity amplifier devices that enable more complex amplifier circuits.
  • a possible embodiment for such a multiple arrangement will be explained later with reference to FIGS. 2 to 4.
  • the two layer bodies 3, 4 are processed using silicon technology.
  • the overflow space 8 can first be patterned out by an etching process, starting from a silicon wafer.
  • the depression is then filled with a resist and planarized.
  • the control membrane 6 is hurled onto it from plastic material.
  • the inflow channel 13 and the outflow channel 14 are structured and the resist is removed through these channels, so that a unit consisting of the second laminate 4 and the control membrane 6 is present.
  • the first laminate 3 which is also structured from a silicon wafer, has to be glued on in a suitable manner.
  • the laminated bodies 3, 4 could be made of plastic material and the control membrane 6 could be made on the basis of silicon material, for example in the form of a further interposed laminated body.
  • sealing seats are required to seal the channel openings, these can be provided on the laminated bodies 3, 4 and / or on the control membrane 6, as desired.
  • the quantity amplifier device can generally be used wherever small flows are to be amplified, for example in connection with pneumatic measuring probes or as a fluid-operated valve.
  • the control membrane 6 can be suspended on one or more sides; both a fluid-impermeable and a fluid-permeable structure are possible.
  • the material selection of the quantity booster is possible within wide limits, whereby in addition to silicon and polymer, for example, amorphous metals or material combinations can also be used.
  • the further exemplary embodiment of a quantity amplifier device 1 'shown in FIGS. 2 to 4 is distinguished by the presence of a plurality of micromechanical quantity amplifiers 2 which are combined to form an amplifier unit 16 and are fluidically linked to one another.
  • the specific exemplary embodiment has a total of three volume boosters 2, which are identified by reference numerals 2 1 , 2 "and 2"'' for better distinction.
  • the fluidic connection is implemented, for example, in such a way that a higher-value valve function is located above a simple two-way switching function is generated, which in the present case is a 3/2 switching function.
  • the quantity amplifier device l 1 contains a first quantity amplifier 2 'and a second quantity amplifier 2 ", which are linked to one another in such a way that the inflow channel 13' of the first quantity amplifier 2 'is connected to the outflow channel 14" of the second quantity amplifier 2 ".
  • These two channels 13 ', 14 " also communicate with a common working channel A, which can be connected to a consumer to be operated, for example with a pneumatic miniature cylinder.
  • the inlet channel 13 'of the second set amplifier 2' is connected to a pressure source P in compound which provides a rbeits horr A under a stationary fluid pressure medium.
  • the control channel 12 "of the second quantity amplifier 2" is connected via a pilot control channel 17 to the outflow channel 14 '''of the third quantity amplifier 2 I,! connected.
  • the length of the pilot channel 17 can be selected to be as short as desired; for example, it can be defined by control and outflow channels 12 ", 14"'' which merge directly into one another, as is shown in FIG. 2.
  • the third quantity amplifier 2 '' ' practically represents a pilot control quantity amplifier which is used for the pilot control of the second quantity amplifier 2 ". Its inflow channel 13' '' is connected to a pressure source P which is connected to that of the inflow channel 13" of the second Quantity amplifier 2 "can be identical.
  • the control channel 12 '' 'of the third quantity amplifier 2' '' is connected to the control channel 12 'of the first quantity amplifier 2'. Uniform control pressurization of the two control channels 12 '' ', 12 "is thus possible.
  • control pressure is expediently controlled by at least one micromechanical control valve 18 produced in a multi-layer construction.
  • this is designed as a 3/2-way switching valve and is produced by conventional microstructuring processes.
  • a possible structure is explained in EP 0 485 739 AI, to which reference is hereby made, so that details of the structure can be dispensed with.
  • the actuation of the control valve 18 is triggered electrically, for which purpose it is via has suitable actuators, for example those based on an electrostatic principle.
  • the output 22 of the control valve 18 communicates with the control channels 12 ', 12' '' of the first and third quantity amplifiers 2 ', 2' ''.
  • the control valve 18 is connected to a control pressure source X and a pressure sink R, for example formed by the atmosphere.
  • the control valve 18 is expediently designed as a component of the quantity amplifier device 1 'and is combined with the amplifier unit 16 to form a structural unit which can be seen in FIGS. 2 and 3. This enables particularly small dimensions with short fluid paths and correspondingly high efficiency.
  • Control valve 18 has its outlet 22 vented, so that the two control channels 12 ', 12''' of the first and third quantity amplifiers 2 ', 2''' are depressurized. Therefore, the third quantity amplifier 2 ' 1 ' switches through and there is a pressure on the control channel 12 "of the second quantity amplifier 2" which shifts the assigned control membrane 6 "into the closed position. At the same time, the control membrane 6 'of the first quantity amplifier 2' can Take open position so that the working channel A can be vented via the inflow channel 13 ', the overflow chamber 8' and the outflow channel 14 'of the first quantity amplifier 2'.
  • control channel 12 So that the control membrane 6 "of the second quantity amplifier 2" can switch to the open position when the third quantity amplifier 2 '' 'is closed, the control channel 12 "assigned to it is connected to a ventilation channel 23 leading to a pressure sink R. The latter communicates when it is switched off. leadership example with the pilot channel 17.
  • the vent channel 23 enables a pressure drop at the control channel 12 "and accordingly the switching of the control membrane 6" into the open position.
  • the ventilation duct 23 can be a constantly open connection to the atmosphere or pressure sink R, the cross section of which is so small that there is sufficient flow resistance to avoid an excessive pressure drop and high fluid losses when the control pressure is applied to the pilot duct 17.
  • the flow resistance should not be too low, so that the pilot channel 17 is quickly vented when the pilot quantity amplifier is shut off and the assigned second quantity amplifier 2 "has a good response behavior.
  • a shut-off valve 24 which can be switched in particular by means of electrical signals, and which is expediently designed as a 2/2-way switching valve, is switched into the venting channel 23 ". It normally shuts off the venting channel 23 'and, in the actuated state, provides the connection between the pilot channel 17 or the control channel 12 "and the pressure sink R, whereby a sufficiently large diameter can be selected in order to bring about an instantaneous drop in pressure.
  • a "normally open” characteristic can also be implemented, which creates an open fluid connection between the working channel A and the pressure source R in the case of unpressurized control channels 12 ', 12''' . All that is required for this is to interchange the connection configuration of the outflow duct 14 "of the first quantity amplifier 2 'and the inflow duct 13" of the second quantity amplifier 2 ". This is indicated in FIG. 4 by the designations” R “and” P "in parentheses.
  • the integration of the three quantity amplifiers 2 ', 2 ", 2 1 ' 1 in the quantity amplifier device 1 'according to FIGS. 2 to 4 preferably takes place with simultaneous assignment of one or more laminate bodies 3, 4 to different quantity amplifiers.
  • the quantity amplifier device 1' the realization of the amplifier unit 16 using only three layered bodies 25 lying one on top of the other, which keeps the manufacturing effort low.
  • one of the quantity amplifiers 2 - in the present case the third quantity amplifier 2 ' 1 ' - is arranged in a first amplifier level 26, while the other two quantity amplifiers - in the present case the first and second quantity amplifiers 2 ', 2 "- are arranged together in a second amplifier level
  • the two amplifier levels 26, 27 extend parallel to the layer levels and are arranged one on top of the other in the normal direction. In the illustration and alignment of the quantity amplifier device 1 'shown, the first amplifier level 26 lies above the second amplifier level 27.
  • the two upper laminates 25 which are vertically adjacent to one another in the exemplary embodiment form the two laminates 3 ′′, 4 ′′ ′′ of the third quantity amplifier 2 ′′.
  • the middle laminate 25 forms the respective first laminate 3 ′, 3 ′′ of the first and second quantity Strengthener 2 ', 2 "and the lower laminate 25 of the amplifier unit 16 in the unit represents the second laminate 4', 4" of the first and second quantity amplifier 2 ', 2 ".
  • the laminate 3', 3"; Executing 4 ', 4 "of the first and second quantity amplifiers 2', 2" separately is advisable for the sake of simpler manufacture by simultaneous processing, the one-piece combination in each case in one and the same laminate.
  • the control valve 18 is physically combined with the amplifier unit 16 to form a structural unit 28. In the exemplary embodiment, it is placed next to the amplifier unit 16 in the direction of the layer planes. Since the control valve 18 also has a multi-layer structure, it is advisable to arrange its individual layer bodies 32 with a parallel layer orientation, and in particular such that a layer body 25 of the amplifier unit 16 runs in the same plane with a layer body 32 of the control valve 18. In the exemplary embodiment, this is realized, the control valve 18 having a three-layer structure comparable to the amplifier unit 16. In this context, a further expedient design is given when the layer bodies 25, 32 of the amplifier unit 16 and the control valve 18 lying in a common layer plane are formed integrally with one another and can therefore be produced together. This also greatly simplifies the assembly of the quantity booster device 1 'and it is possible to avoid sealing points on the joining areas.
  • control valve 18 instead of a control valve 18 with a 3/2 switching function, two 2/2 switching valves could also be provided, for example.
  • the above-mentioned structural unit 28 could be supplemented by a ventilation unit 33 - indicated by dash-dotted lines in FIG. 3 - in which the ventilation channel 23, 23 'and in particular, a shut-off valve 24, if present, is also arranged.
  • the venting unit 33 could easily have a layer structure comparable to the control valve 18 and, accordingly, could be coupled to the layer bodies 25, 32 of the amplifier unit 16 and / or the control valve 18 or could be made in one piece.
  • the two large-area outer surfaces of the two outer layer bodies 25, 32 of the structural unit 28 are each covered with a cover layer 34, 34 ', which has fluid channels 35, indicated by dash-dotted lines, which can be used to produce internal and external connections.
  • a cover layer 34, 34 ' which has fluid channels 35, indicated by dash-dotted lines, which can be used to produce internal and external connections.
  • at least one of the cover layers 34, 34 ' contains connection openings (not shown in any more detail) which enable the connection to further fluid channels which lead to a pressure source, a pressure sink or one or more consumers.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne un dispositif amplificateur de débit pour courants fluidiques, comportant au moins un amplificateur de débit (2) micromécanique à régulation fluidique, obtenu selon un procédé de microstructuration. Cet amplificateur de débit comprend une chambre délimitée par deux corps stratifiés (3, 4) et subdivisée par une membrane de commande (6) mobile. La régulation fluidique permet de faire passer la membrane de commande (6) entre une position ouverte et une position fermée où elle pilote la jonction entre un canal d'alimentation (139 et un canal d'évacuation (14).
PCT/EP1999/001199 1998-04-11 1999-02-25 Dispositif amplificateur de debit pour courants fluidiques Ceased WO1999053205A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1998116283 DE19816283A1 (de) 1998-04-11 1998-04-11 Mengenverstärkereinrichtung für Fluidströme
DE19816283.9 1998-04-11

Publications (1)

Publication Number Publication Date
WO1999053205A1 true WO1999053205A1 (fr) 1999-10-21

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WO (1) WO1999053205A1 (fr)

Cited By (3)

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US6994781B2 (en) 2000-07-07 2006-02-07 Baxter International Inc. Medical system, method and apparatus employing MEMS
JP2013519422A (ja) * 2010-02-12 2013-05-30 デバイオテック・ソシエテ・アノニム マイクロメカニック受動的フローレギュレータ
US9971358B2 (en) 2013-01-10 2018-05-15 Debiotech S.A. Adjustable passive flow regulator

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EP1679121A3 (fr) * 2001-04-06 2006-07-26 Fluidigm Corporation Éléments et applications de circuit fluidique microfabriqués
US6802342B2 (en) 2001-04-06 2004-10-12 Fluidigm Corporation Microfabricated fluidic circuit elements and applications
DE102007012483B4 (de) * 2007-03-15 2013-07-04 Reinz-Dichtungs-Gmbh Ventil, Ölabscheider, Abscheideverfahren und deren Verwendung
EP3763439A1 (fr) 2019-07-12 2021-01-13 Curiosity Diagnostics sp. z o.o Puce et soupape microfluidiques, procédé de production et utilisations

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6994781B2 (en) 2000-07-07 2006-02-07 Baxter International Inc. Medical system, method and apparatus employing MEMS
US7217356B2 (en) 2000-07-07 2007-05-15 Fenwal, Inc. Medical system, method and apparatus employing MEMS
JP2013519422A (ja) * 2010-02-12 2013-05-30 デバイオテック・ソシエテ・アノニム マイクロメカニック受動的フローレギュレータ
US9867935B2 (en) 2010-02-12 2018-01-16 Debiotech S.A. Micromechanic passive flow regulator
US9971358B2 (en) 2013-01-10 2018-05-15 Debiotech S.A. Adjustable passive flow regulator

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